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DE60323663D1 - Kristallziehvorrichtung und verfahren zur züchtung einer einkristallstange - Google Patents

Kristallziehvorrichtung und verfahren zur züchtung einer einkristallstange

Info

Publication number
DE60323663D1
DE60323663D1 DE60323663T DE60323663T DE60323663D1 DE 60323663 D1 DE60323663 D1 DE 60323663D1 DE 60323663 T DE60323663 T DE 60323663T DE 60323663 T DE60323663 T DE 60323663T DE 60323663 D1 DE60323663 D1 DE 60323663D1
Authority
DE
Germany
Prior art keywords
crystal
breating
tightening device
bar
crystal bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60323663T
Other languages
English (en)
Inventor
Milind Kulkarni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SunEdison Inc
Original Assignee
SunEdison Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SunEdison Inc filed Critical SunEdison Inc
Application granted granted Critical
Publication of DE60323663D1 publication Critical patent/DE60323663D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/203—Controlling or regulating the relationship of pull rate (v) to axial thermal gradient (G)
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/206—Controlling or regulating the thermal history of growing the ingot
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B21/00—Unidirectional solidification of eutectic materials
    • C30B21/06—Unidirectional solidification of eutectic materials by pulling from a melt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1064—Seed pulling including a fully-sealed or vacuum-maintained crystallization chamber [e.g., ampoule]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE60323663T 2002-11-12 2003-11-10 Kristallziehvorrichtung und verfahren zur züchtung einer einkristallstange Expired - Lifetime DE60323663D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42555602P 2002-11-12 2002-11-12
PCT/US2003/036046 WO2004044276A1 (en) 2002-11-12 2003-11-10 A crystal puller and method for growing a monocrystalline ingot

Publications (1)

Publication Number Publication Date
DE60323663D1 true DE60323663D1 (de) 2008-10-30

Family

ID=32313014

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60323663T Expired - Lifetime DE60323663D1 (de) 2002-11-12 2003-11-10 Kristallziehvorrichtung und verfahren zur züchtung einer einkristallstange

Country Status (8)

Country Link
US (1) US8147613B2 (de)
EP (1) EP1560950B1 (de)
JP (1) JP4486889B2 (de)
KR (1) KR101181052B1 (de)
CN (1) CN1327041C (de)
DE (1) DE60323663D1 (de)
TW (1) TWI325900B (de)
WO (1) WO2004044276A1 (de)

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DE102007005346B4 (de) * 2007-02-02 2015-09-17 Siltronic Ag Halbleiterscheiben aus Silicium und Verfahren zu deren Herstellung
US8389099B1 (en) 2007-06-01 2013-03-05 Rubicon Technology, Inc. Asymmetrical wafer configurations and method for creating the same
US8691013B2 (en) 2011-05-09 2014-04-08 Memc Singapore Pte Ltd Feed tool for shielding a portion of a crystal puller
KR101467103B1 (ko) * 2013-06-21 2014-11-28 주식회사 엘지실트론 실리콘 단결정 성장 장치 및 그 성장 방법
JP6197680B2 (ja) * 2014-02-12 2017-09-20 信越半導体株式会社 シリコン単結晶製造装置
TWM485251U (zh) * 2014-04-03 2014-09-01 Globalwafers Co Ltd 晶體生長裝置及其保溫罩
US11313049B2 (en) 2015-10-19 2022-04-26 Globalwafers Co., Ltd. Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects
CN105177702A (zh) * 2015-10-20 2015-12-23 宁晋松宫电子材料有限公司 一种控制单晶环状缺陷的生产工艺
KR101853678B1 (ko) 2016-06-03 2018-05-02 알씨텍 주식회사 사파이어 성장장치의 상부 단열 구조
CN106048723A (zh) * 2016-08-01 2016-10-26 中国电子科技集团公司第四十六研究所 一种采用提拉法生长氧化镓晶体的固液界面控制方法
JP6604338B2 (ja) 2017-01-05 2019-11-13 株式会社Ｓｕｍｃｏ シリコン単結晶の引き上げ条件演算プログラム、シリコン単結晶のホットゾーンの改良方法、およびシリコン単結晶の育成方法
FR3075379B1 (fr) * 2017-12-15 2019-11-22 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode de validation de l'histoire thermique d'un lingot semi-conducteur
CN111379015B (zh) * 2020-04-30 2024-07-02 中环领先(徐州)半导体材料有限公司 晶体的生长装置及生长方法
CN111763985B (zh) * 2020-07-01 2021-10-19 中国科学院上海微系统与信息技术研究所 一种用于单晶生产炉的热屏结构及单晶生产炉
US12195873B2 (en) 2020-09-01 2025-01-14 Globalwafers Co., Ltd. Crystal pulling systems having a cover member for covering the silicon charge and methods for growing a melt of silicon in a crucible assembly
US11987899B2 (en) 2020-11-12 2024-05-21 Globalwafers Co., Ltd. Methods for preparing an ingot in an ingot puller apparatus and methods for selecting a side heater length for such apparatus
CN113373516B (zh) * 2021-06-16 2022-05-03 眉山博雅新材料股份有限公司 一种用于生长晶体的装置及方法

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Also Published As

Publication number Publication date
TWI325900B (en) 2010-06-11
JP4486889B2 (ja) 2010-06-23
CN1738930A (zh) 2006-02-22
JP2006506306A (ja) 2006-02-23
EP1560950A1 (de) 2005-08-10
TW200417638A (en) 2004-09-16
US20040112277A1 (en) 2004-06-17
US8147613B2 (en) 2012-04-03
WO2004044276A1 (en) 2004-05-27
KR101181052B1 (ko) 2012-09-07
CN1327041C (zh) 2007-07-18
KR20050086573A (ko) 2005-08-30
EP1560950B1 (de) 2008-09-17

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