DE60003529D1 - Verfahren zur herstellung von norbornensulfonamidpolymeren - Google Patents
Verfahren zur herstellung von norbornensulfonamidpolymerenInfo
- Publication number
- DE60003529D1 DE60003529D1 DE60003529T DE60003529T DE60003529D1 DE 60003529 D1 DE60003529 D1 DE 60003529D1 DE 60003529 T DE60003529 T DE 60003529T DE 60003529 T DE60003529 T DE 60003529T DE 60003529 D1 DE60003529 D1 DE 60003529D1
- Authority
- DE
- Germany
- Prior art keywords
- polymers
- norbornene
- norborn
- sulphonamide
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920000642 polymer Polymers 0.000 title abstract 6
- 229940124530 sulfonamide Drugs 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- FDDDEECHVMSUSB-UHFFFAOYSA-N sulfanilamide Chemical compound NC1=CC=C(S(N)(=O)=O)C=C1 FDDDEECHVMSUSB-UHFFFAOYSA-N 0.000 title 1
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 abstract 2
- 239000003054 catalyst Substances 0.000 abstract 2
- -1 norbornene sulfonamide Chemical class 0.000 abstract 2
- 238000007152 ring opening metathesis polymerisation reaction Methods 0.000 abstract 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 abstract 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 abstract 1
- 239000005977 Ethylene Substances 0.000 abstract 1
- 229910002091 carbon monoxide Inorganic materials 0.000 abstract 1
- 229920001577 copolymer Polymers 0.000 abstract 1
- 238000005649 metathesis reaction Methods 0.000 abstract 1
- 239000000178 monomer Substances 0.000 abstract 1
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
- C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
- C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
- C08G61/08—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds of carbocyclic compounds containing one or more carbon-to-carbon double bonds in the ring
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Polyethers (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US497356 | 1983-05-23 | ||
| US11893699P | 1999-02-05 | 1999-02-05 | |
| US118936P | 1999-02-05 | ||
| US09/497,356 US6235849B1 (en) | 1999-02-05 | 2000-02-03 | Method of preparing norbornene sulfonamide polymers |
| PCT/US2000/003060 WO2000046267A1 (en) | 1999-02-05 | 2000-02-04 | Method of preparing norbornene sulfonamide polymers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60003529D1 true DE60003529D1 (de) | 2003-07-31 |
| DE60003529T2 DE60003529T2 (de) | 2004-04-29 |
Family
ID=22381647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60003529T Expired - Lifetime DE60003529T2 (de) | 1999-02-05 | 2000-02-04 | Verfahren zur herstellung von norbornensulfonamidpolymeren |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6235849B1 (de) |
| EP (1) | EP1157058B1 (de) |
| JP (1) | JP2003525311A (de) |
| KR (1) | KR100687963B1 (de) |
| AT (1) | ATE243719T1 (de) |
| AU (1) | AU2757300A (de) |
| DE (1) | DE60003529T2 (de) |
| WO (1) | WO2000046267A1 (de) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2001296505A1 (en) | 2000-10-12 | 2002-04-22 | The Dow Chemical Company | Catalyst system for high-cis polybutadiene |
| KR20020056602A (ko) * | 2000-12-29 | 2002-07-10 | 노기호 | 황을 포함하는 고리형 올레핀 공중합체 및 그의 제조방법 |
| JP4941621B2 (ja) * | 2001-07-27 | 2012-05-30 | Ｊｓｒ株式会社 | 環状オレフィン付加重合体の製造方法 |
| JP5013033B2 (ja) * | 2001-07-27 | 2012-08-29 | Ｊｓｒ株式会社 | 環状オレフィン付加重合体の製造方法 |
| US6583307B2 (en) * | 2001-03-07 | 2003-06-24 | University Of New Orleans Research And Technology Foundation, Inc. | Convenient and efficient Suzuki-Miyaura cross-coupling catalyzed by a palladium/diazabutadiene system |
| AU2003287194A1 (en) | 2002-10-21 | 2004-05-13 | Shipley Company L.L.C. | Photoresists containing sulfonamide component |
| US6677419B1 (en) | 2002-11-13 | 2004-01-13 | International Business Machines Corporation | Preparation of copolymers |
| EP1589055A4 (de) * | 2003-01-31 | 2010-06-02 | Zeon Corp | Verfahren zur herstellung eines cycloolefinharzfilms und verfahren zur herstellung einer cycloolefinharzfolie oder eines cycloolefinharzfilms |
| US6949325B2 (en) * | 2003-09-16 | 2005-09-27 | International Business Machines Corporation | Negative resist composition with fluorosulfonamide-containing polymer |
| JP2005171234A (ja) * | 2003-11-18 | 2005-06-30 | Jsr Corp | 新規な（共）重合体およびその製造方法並びにカルボキシル基含有（共）重合体の製造方法 |
| US7063931B2 (en) * | 2004-01-08 | 2006-06-20 | International Business Machines Corporation | Positive photoresist composition with a polymer including a fluorosulfonamide group and process for its use |
| CA2462011A1 (en) * | 2004-02-23 | 2005-08-23 | Bayer Inc. | Process for the preparation of low molecular weight nitrile rubber |
| DE602005011017D1 (de) * | 2004-07-07 | 2008-12-24 | Promerus Llc | Lichtempfindliche dielektrische harzzusammensetzungen und ihre verwendungen |
| JP4494161B2 (ja) * | 2004-10-14 | 2010-06-30 | 東京応化工業株式会社 | 高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法 |
| JP5411407B2 (ja) * | 2004-12-15 | 2014-02-12 | 学校法人日本大学 | ノルボルネン系付加（共）重合体の製造方法 |
| US7799883B2 (en) * | 2005-02-22 | 2010-09-21 | Promerus Llc | Norbornene-type polymers, compositions thereof and lithographic process using such compositions |
| KR20070116610A (ko) * | 2005-02-22 | 2007-12-10 | 프로메러스, 엘엘씨 | 노르보르넨-타입 폴리머, 이들의 조성물 및 그러한조성물을 사용하는 리소그라피 프로세스 |
| JP4887710B2 (ja) * | 2005-09-28 | 2012-02-29 | セントラル硝子株式会社 | α−置換アクリル酸ノルボルナニル類の製造方法 |
| CN100344656C (zh) * | 2006-05-11 | 2007-10-24 | 复旦大学 | 聚降冰片烯的制备方法 |
| JP5076682B2 (ja) * | 2006-07-26 | 2012-11-21 | セントラル硝子株式会社 | Ｎ−（ビシクロ［２，２，１］ヘプト−５−エン−２−イルメチル）−１，１，１−トリフルオロメタンスルホンアミドの製造方法 |
| US20080027246A1 (en) * | 2006-07-26 | 2008-01-31 | Andrew Bell | Process for forming perfluorinated-alkyl sulfonamide substituted norbornene-type monomers |
| JP5314882B2 (ja) | 2007-02-15 | 2013-10-16 | 東京応化工業株式会社 | 高分子化合物、レジスト組成物及びレジストパターン形成方法 |
| WO2008099725A1 (ja) * | 2007-02-15 | 2008-08-21 | Tokyo Ohka Kogyo Co., Ltd. | 高分子化合物、レジスト組成物及びレジストパターン形成方法 |
| JP5236246B2 (ja) * | 2007-10-18 | 2013-07-17 | 株式会社クラレ | スルホニルハライド誘導体の製造方法 |
| JP5352387B2 (ja) * | 2008-09-02 | 2013-11-27 | 株式会社クラレ | スルトン誘導体の製造方法 |
| JP5117484B2 (ja) * | 2009-12-28 | 2013-01-16 | 東京応化工業株式会社 | 新規な化合物、及びその製造方法 |
| US8541523B2 (en) * | 2010-04-05 | 2013-09-24 | Promerus, Llc | Norbornene-type polymers, compositions thereof and lithographic process using such compositions |
| CN102702432B (zh) * | 2012-05-30 | 2014-06-18 | 宁波工程学院 | 用于降冰片烯、马来酸酐与环己烯三元共聚的催化剂以及三元共聚方法 |
| CN105218821A (zh) * | 2015-10-19 | 2016-01-06 | 昆明理工大学 | 一种聚合单体与二氧化硫共聚物的制备方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3970133A (en) * | 1974-12-16 | 1976-07-20 | The Goodyear Tire & Rubber Company | Chlorothio-sulfonamide-modified rubbery terpolymers and their blends |
| DE3720760A1 (de) | 1987-06-24 | 1989-01-05 | Bayer Ag | Norbornan- und norbornensulfonamide, verfahren zu deren herstellung sowie ihre verwendung als arzneimittel |
| JP3221636B2 (ja) * | 1993-03-15 | 2001-10-22 | 株式会社クラレ | ３−フェニルスルホニルアミノ−ビシクロ［２，２，１］ヘプタン−２−カルボン酸アルキルエステルの製造方法 |
| US5656412A (en) | 1995-03-07 | 1997-08-12 | Lucent Technologies Inc. | Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material |
| CA2154862A1 (en) * | 1995-03-20 | 1996-09-21 | Roger John Hopper | Process for preparation of n-halothiosulfonamide modified terpolymers |
| JPH09124588A (ja) * | 1995-11-07 | 1997-05-13 | Mitsubishi Materials Corp | 不飽和スルホン酸誘導体とその製造方法 |
| RU2194295C2 (ru) | 1996-03-07 | 2002-12-10 | З Би. Эф. Гудрич Кампэни | Фоторезистная композиция и полимер |
| JPH11184090A (ja) * | 1997-10-13 | 1999-07-09 | Fuji Photo Film Co Ltd | 遠紫外線露光用ポジ型フォトレジスト組成物 |
| JP3720970B2 (ja) * | 1998-01-13 | 2005-11-30 | 株式会社東芝 | 感光性組成物、およびこれを用いたパターン形成方法、半導体装置の製造方法 |
-
2000
- 2000-02-03 US US09/497,356 patent/US6235849B1/en not_active Expired - Lifetime
- 2000-02-04 AT AT00905995T patent/ATE243719T1/de not_active IP Right Cessation
- 2000-02-04 KR KR1020017009927A patent/KR100687963B1/ko not_active Expired - Fee Related
- 2000-02-04 WO PCT/US2000/003060 patent/WO2000046267A1/en not_active Ceased
- 2000-02-04 AU AU27573/00A patent/AU2757300A/en not_active Abandoned
- 2000-02-04 JP JP2000597337A patent/JP2003525311A/ja active Pending
- 2000-02-04 EP EP00905995A patent/EP1157058B1/de not_active Expired - Lifetime
- 2000-02-04 DE DE60003529T patent/DE60003529T2/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003525311A (ja) | 2003-08-26 |
| EP1157058B1 (de) | 2003-06-25 |
| ATE243719T1 (de) | 2003-07-15 |
| US6235849B1 (en) | 2001-05-22 |
| KR100687963B1 (ko) | 2007-02-27 |
| DE60003529T2 (de) | 2004-04-29 |
| WO2000046267A1 (en) | 2000-08-10 |
| EP1157058A1 (de) | 2001-11-28 |
| KR20010089637A (ko) | 2001-10-06 |
| AU2757300A (en) | 2000-08-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |