DE4339320A1 - Process for accelerated etching and deposition of metals in ammoniacal etching systems - Google Patents
Process for accelerated etching and deposition of metals in ammoniacal etching systemsInfo
- Publication number
- DE4339320A1 DE4339320A1 DE4339320A DE4339320A DE4339320A1 DE 4339320 A1 DE4339320 A1 DE 4339320A1 DE 4339320 A DE4339320 A DE 4339320A DE 4339320 A DE4339320 A DE 4339320A DE 4339320 A1 DE4339320 A1 DE 4339320A1
- Authority
- DE
- Germany
- Prior art keywords
- etching
- copper
- added
- etchant
- agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005530 etching Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 8
- 239000002184 metal Substances 0.000 title claims abstract description 8
- 230000008021 deposition Effects 0.000 title description 3
- 150000002739 metals Chemical group 0.000 title description 2
- 229910002651 NO3 Inorganic materials 0.000 claims abstract description 15
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 11
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000005868 electrolysis reaction Methods 0.000 claims abstract description 6
- 230000008929 regeneration Effects 0.000 claims abstract 2
- 238000011069 regeneration method Methods 0.000 claims abstract 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 239000011669 selenium Substances 0.000 claims description 2
- 229910052711 selenium Inorganic materials 0.000 claims description 2
- 230000009089 cytolysis Effects 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
- 239000010949 copper Substances 0.000 abstract description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052802 copper Inorganic materials 0.000 abstract description 10
- 239000003795 chemical substances by application Substances 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 230000001133 acceleration Effects 0.000 abstract description 2
- 230000001172 regenerating effect Effects 0.000 abstract description 2
- 238000011084 recovery Methods 0.000 abstract 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007086 side reaction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 2
- 239000013539 acceleration additive Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- -1 ammonium ions Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrolytic Production Of Metals (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Description
Ätzanlagen, welche mit ammoniakalischen Ätzmitteln arbeiten, eig nen sich besonders gut zur Regenerierung des Ätzmittels in Re cyclingverfahren, bei denen gleichzeitig das abgeätzte Metall in Elektrolysezellen metallisch abgeschieden wird.Etching systems that work with ammoniacal etching agents are particularly good for regenerating the etchant in Re cycling process in which the etched metal in Electrolysis cells is deposited metallically.
Für die Wirtschaftlichkeit derartiger Recyclinganlagen ist von großer Bedeutung, daß die Ätzgeschwindigkeit, aber auch die Ab scheidegeschwindigkeit des Metalls in der Elektrolysezelle be schleunigt werden.For the economy of such recycling plants is of of great importance that the etching rate, but also the Ab cutting speed of the metal in the electrolysis cell be accelerated.
Wichtig ist dabei, daß nach Möglichkeit die beim Ätzen bzw. Rege nerieren und beim Abscheiden des Metalls entstehenden Stoffe zu keiner übermäßigen Anreicherung führen. Störende Nebenreaktionen sollen nach Möglichkeit vermieden werden.It is important that, if possible, the etching or rain nerieren and substances formed during the deposition of the metal do not lead to excessive enrichment. Annoying side reactions should be avoided if possible.
Aufgabe der Erfindung ist es, ein Verfahren anzugeben, welches dieses ideale Ziel möglichst nahe erreicht.The object of the invention is to provide a method which achieved this ideal goal as close as possible.
Dem Erfindungsgedanken kommt diesbezüglich eine besondere Bedeu tung zu, indem man eine störende Nebenerscheinung bei bisherigen Anlagen mit Elektrolysezelle - nämlich das Entstehen von Sauer stoff und als Nebenreaktion die Oxydation von Ammoniumionen zu Ni trat - positiv nutzt.The idea of the invention is particularly important in this regard by adding a disturbing side effect to previous ones Systems with an electrolytic cell - namely the formation of acid material and as a side reaction the oxidation of ammonium ions to Ni kicked - used positively.
So wird z. B. in der Offenlegungsschrift DE 42 18 843 A1 ein Ver fahren beschrieben, welches die Entfernung des Nitrats aus dem Ätzmittel durch Reaktion mit einem Reduktionsmittel vorschlägt. So z. B. in published patent application DE 42 18 843 A1 a Ver drive described the removal of the nitrate from the Corrosive proposes by reaction with a reducing agent.
Dabei wurde vollkommen die beschleunigende Wirkung des Ätzvorgan ges durch das Nitrat außer acht gelassen, die bei einer Entfernung aus dem Ätzmittel auch bei einem Restgehalt zwischen 10 und 40 g/l nicht mehr gegeben ist.The accelerating effect of the etching process was completely neglected by the nitrate, which at a distance from the etchant even with a residual content between 10 and 40 g / l is no longer given.
Erfindungsgemäß wird das an den Elektroden der Elektrolysezelle entstehende Nitrat im Ätzmittel auf einen Wert von mindestens 50 bis 200 g/l angereichert. Dadurch kann eine wesentliche Beschleu nigung des Ätzvorganges erreicht werden.According to the invention, this is done on the electrodes of the electrolytic cell nitrate in the etchant to a value of at least 50 enriched up to 200 g / l. This can result in an essential acceleration The etching process can be achieved.
Um eine übermäßige Nitratkonzentratin zu vermeiden, wird empfoh len, Reduktionsmittel zuzusetzen, sobald die Werte zu hoch anstei gen.To avoid excessive nitrate concentrate it is recommended len, add reducing agent as soon as the values rise too high gene.
Als ein besonders wirksames Reduktionsmittel wird Formaldehyd empfohlen, welches im galvano-technischen Bereich als bewährtes Produkt bekannt ist.Formaldehyde is a particularly effective reducing agent recommended, which is proven in the electro-technical field Product is known.
Ein erhöhter Nitratgehalt in Verbindung mit Reduktionsmitteln, er findungsgemäß zugesetzt, verbessert aber auch die Abscheidung von Metallen in der Elektrolysezelle, da z. B. bei Kupfer die notwen dige Reduzierung von Kupfer II zu Kupfer I, die zur metallischen Abscheidung des Kupfers erforderlich ist, beschleunigt wird.An increased nitrate content in connection with reducing agents, he added according to the invention, but also improves the separation of Metals in the electrolytic cell, e.g. B. in copper the necessary reduction of copper II to copper I, the metallic Deposition of the copper is required is accelerated.
Das erfindungsgemäß vorgeschlagene Ätzen mit hohem Nitratgehalt hat auch den Vorteil, daß es für bestimmte Beschleunigungszusätze, z. B. auf der Basis von vanadiumhaltigen Verbindungen, gut verwend bar ist.The etching proposed according to the invention with a high nitrate content also has the advantage that for certain acceleration additives, e.g. B. on the basis of compounds containing vanadium, well used is cash.
Auch der Zusatz von Selen oder Kobalt enthaltenden Beschleunigern wird erfindungsgemäß vorgeschlagen.Also the addition of accelerators containing selenium or cobalt is proposed according to the invention.
Da bei den empfohlenen Verfahren keine Stoffe entstehen, die den Ätzprozeß beeinflussen, sind die Vorteile offenbar. Since the recommended procedures do not produce any substances that Affect etching process, the advantages are obvious.
Beispiele für erfindungsgemäße Ätzlösungen mit Spuren von Vanadium als Beschleuniger sind:Examples of etching solutions according to the invention with traces of vanadium as accelerators are:
1. Lösung:
60 - 120 g Cu/l
120 - 220 g SO₄/l
70 - 100 g NO₃/l
0,5 - 5 g Cl/l
1 - 20 mgV/l1. Solution:
60 - 120 g Cu / l
120 - 220 g SO₄ / l
70 - 100 g NO₃ / l
0.5 - 5 g Cl / l
1 - 20 mgV / l
2. Lösung:
60 - 120 g Cu/l
120 - 220 g SO₄/l
70 - 100 g NO₃/l
0,5 - 5 g Cl/l
0,5 - 20 g PO₄/l
1 - 20 mg V/l2nd solution:
60 - 120 g Cu / l
120 - 220 g SO₄ / l
70 - 100 g NO₃ / l
0.5 - 5 g Cl / l
0.5 - 20 g PO₄ / l
1 - 20 mg V / l
Die Lösungen 1 und 2 enthalten zusätzlich Ammoniak zur Einstellung des alkalischen pH-Wertes.Solutions 1 and 2 also contain ammonia for adjustment of the alkaline pH.
In bekannter Weise ist die Ätzgeschwindigkeit temperatur- und pH- Wert-abhängig. Als optimal wurden z. B. für die Erfindungsbeispiele der Ätzlösungen Temperaturen von 35°C bis 60°C ermittelt, bei einem pH-Wert von 8,1 bis 8,8 und einem Nitratgehalt von 70-80g/l.In a known manner, the etching rate is temperature and pH Value-dependent. As optimal z. B. for the invention examples the etching solutions temperatures from 35 ° C to 60 ° C determined at a pH of 8.1 to 8.8 and a nitrate content of 70-80g / l.
Die Zudosierung der Reduktionsmittel, um zu hohe Nitratkon zentrationen zu vermeiden, ist unkritisch. Eine wöchentliche Ana lyse und Zugabe reicht in den meisten Fällen aus.The reducing agents are added in order to increase the nitrate concentration Avoiding concentrations is not critical. A weekly Ana Lysis and addition are sufficient in most cases.
Selbstverständlich ist es auch möglich, eine laufende Zudosierung, z. B. mit Dosierpumpen, vorzusehen, da die Nitratbildung der abgeschiedenen Kupfermenge bzw. der Strombilanz der Elektrolyse zelle etwa proportional entspricht und daher leicht vorherberech net werden kann.Of course, it is also possible to continuously add e.g. B. with dosing pumps, because the nitrate formation deposited copper quantity or the current balance of the electrolysis cell corresponds approximately proportionally and therefore easily precalculated can be net.
Besonders bei kontinuierlicher Zudosierung von Reduktionsmitteln wird empfohlen, dies im Bereich der Elektrolysezelle zu tun z. B. beim Zulauf, so daß ein besserer Erfolg z. B. bei der Umwandlung von Kupfer II zu Kupfer I erreicht wird.Especially when continuously adding reducing agents it is recommended to do this in the area of the electrolytic cell e.g. B. with the inflow, so that a better success z. B. in the conversion from copper II to copper I is achieved.
Claims (6)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4339320A DE4339320A1 (en) | 1993-11-18 | 1993-11-18 | Process for accelerated etching and deposition of metals in ammoniacal etching systems |
| GB9422669A GB2283983B (en) | 1993-11-18 | 1994-11-10 | Process for the accelerated etching and refining of metals in ammoniacal etching systems |
| IT94BO000512A IT1276359B1 (en) | 1993-11-18 | 1994-11-17 | ACCELERATED CORROSION PROCESS AND METAL SEPARATION IN METAL ATTACKING PLANTS USING AMMONIA TREATMENT |
| FR9413991A FR2712607B1 (en) | 1993-11-18 | 1994-11-17 | Accelerated process of gnawing and separation of metals in gnawing plants in an ammoniacal medium. |
| JP6283829A JPH07197300A (en) | 1993-11-18 | 1994-11-17 | Accelerated etching and refining of metals in ammoniacal etching systems |
| CN94120116.3A CN1107902A (en) | 1993-11-18 | 1994-11-17 | Process for the accelerated etching and refining of metals in ammoniacal etching systems |
| HK97102708.3A HK1001095B (en) | 1993-11-18 | 1997-12-31 | Process for the accelerated etching and refining of metals in ammoniacal etching systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4339320A DE4339320A1 (en) | 1993-11-18 | 1993-11-18 | Process for accelerated etching and deposition of metals in ammoniacal etching systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE4339320A1 true DE4339320A1 (en) | 1995-05-24 |
Family
ID=6502857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE4339320A Ceased DE4339320A1 (en) | 1993-11-18 | 1993-11-18 | Process for accelerated etching and deposition of metals in ammoniacal etching systems |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH07197300A (en) |
| CN (1) | CN1107902A (en) |
| DE (1) | DE4339320A1 (en) |
| FR (1) | FR2712607B1 (en) |
| GB (1) | GB2283983B (en) |
| IT (1) | IT1276359B1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110042425A (en) * | 2019-04-23 | 2019-07-23 | 博罗县华盈科技有限公司 | A kind of heavy process for copper of alkaline etching waste liquid for producing direct electrowinning |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2136919A1 (en) * | 1970-07-24 | 1972-02-03 | Shipley Co | Aqueous solution for etching copper |
| DE2216269A1 (en) * | 1972-04-05 | 1973-10-18 | Hoellmueller Maschbau H | METHOD OF ETCHING COPPER AND COPPER ALLOYS |
| EP0448870A1 (en) * | 1990-03-21 | 1991-10-02 | Macdermid Incorporated | System and process for etching with, and regenerating, alkaline ammoniacal etchant solution |
| WO1992001086A1 (en) * | 1990-07-05 | 1992-01-23 | Elo-Chem Ätztechnik Gmbh | Etching solution |
| DE3305319C2 (en) * | 1983-02-16 | 1993-01-21 | Siemens Ag, 1000 Berlin Und 8000 Muenchen, De | |
| WO1993009267A1 (en) * | 1991-11-09 | 1993-05-13 | Hans Höllmüller Maschinenbau GmbH & Co. | Process for regenerating an ammoniacal etching agent and device for implementing it |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE789944A (en) * | 1971-10-12 | 1973-02-01 | Shipley Co | REGENERATION OF A USED COPPER ATTACK SOLUTION |
| DE4218843C2 (en) * | 1991-11-09 | 1994-04-28 | Hoellmueller Maschbau H | Process for the regeneration of an ammoniacal etchant and device for carrying out this process |
-
1993
- 1993-11-18 DE DE4339320A patent/DE4339320A1/en not_active Ceased
-
1994
- 1994-11-10 GB GB9422669A patent/GB2283983B/en not_active Expired - Fee Related
- 1994-11-17 IT IT94BO000512A patent/IT1276359B1/en active IP Right Grant
- 1994-11-17 CN CN94120116.3A patent/CN1107902A/en active Pending
- 1994-11-17 JP JP6283829A patent/JPH07197300A/en active Pending
- 1994-11-17 FR FR9413991A patent/FR2712607B1/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2136919A1 (en) * | 1970-07-24 | 1972-02-03 | Shipley Co | Aqueous solution for etching copper |
| DE2216269A1 (en) * | 1972-04-05 | 1973-10-18 | Hoellmueller Maschbau H | METHOD OF ETCHING COPPER AND COPPER ALLOYS |
| DE3305319C2 (en) * | 1983-02-16 | 1993-01-21 | Siemens Ag, 1000 Berlin Und 8000 Muenchen, De | |
| EP0448870A1 (en) * | 1990-03-21 | 1991-10-02 | Macdermid Incorporated | System and process for etching with, and regenerating, alkaline ammoniacal etchant solution |
| WO1992001086A1 (en) * | 1990-07-05 | 1992-01-23 | Elo-Chem Ätztechnik Gmbh | Etching solution |
| WO1993009267A1 (en) * | 1991-11-09 | 1993-05-13 | Hans Höllmüller Maschinenbau GmbH & Co. | Process for regenerating an ammoniacal etching agent and device for implementing it |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2712607B1 (en) | 1997-06-20 |
| GB2283983A (en) | 1995-05-24 |
| GB2283983B (en) | 1997-07-02 |
| FR2712607A1 (en) | 1995-05-24 |
| CN1107902A (en) | 1995-09-06 |
| IT1276359B1 (en) | 1997-10-30 |
| JPH07197300A (en) | 1995-08-01 |
| HK1001095A1 (en) | 1998-05-22 |
| GB9422669D0 (en) | 1995-01-04 |
| ITBO940512A0 (en) | 1994-11-17 |
| ITBO940512A1 (en) | 1996-05-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8131 | Rejection |