DE3637549A1 - Measuring device for testing the dielectric properties of biological tissues - Google Patents
Measuring device for testing the dielectric properties of biological tissuesInfo
- Publication number
- DE3637549A1 DE3637549A1 DE19863637549 DE3637549A DE3637549A1 DE 3637549 A1 DE3637549 A1 DE 3637549A1 DE 19863637549 DE19863637549 DE 19863637549 DE 3637549 A DE3637549 A DE 3637549A DE 3637549 A1 DE3637549 A1 DE 3637549A1
- Authority
- DE
- Germany
- Prior art keywords
- dielectric properties
- testing
- measuring device
- biological tissue
- tissue
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 20
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 230000004410 intraocular pressure Effects 0.000 claims abstract description 3
- 210000004204 blood vessel Anatomy 0.000 claims abstract 2
- 239000004020 conductor Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000035515 penetration Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 210000000056 organ Anatomy 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 239000012620 biological material Substances 0.000 abstract 1
- 241001465754 Metazoa Species 0.000 description 1
- 230000017531 blood circulation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 210000004400 mucous membrane Anatomy 0.000 description 1
- 230000001575 pathological effect Effects 0.000 description 1
- 230000000144 pharmacologic effect Effects 0.000 description 1
- 230000036548 skin texture Effects 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
- A61B5/0507—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves using microwaves or terahertz waves
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/16—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for measuring intraocular pressure, e.g. tonometers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
- A61B5/026—Measuring blood flow
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/41—Detecting, measuring or recording for evaluating the immune or lymphatic systems
- A61B5/411—Detecting or monitoring allergy or intolerance reactions to an allergenic agent or substance
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Animal Behavior & Ethology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Veterinary Medicine (AREA)
- Biophysics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Ophthalmology & Optometry (AREA)
- Hematology (AREA)
- Cardiology (AREA)
- Physiology (AREA)
- Immunology (AREA)
- Vascular Medicine (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
Abstract
Description
Beim Auftreffen elektromagnetischer Wellen auf Haut, Schleimhaut oder andere Organoberflächen wird ein Teil der eingestrahlten Energie absorbiert, ein Teil wird reflektiert. Die reflektierte Energiemenge hängt ab von den dielektrischen Eigenschaften des untersuchten Objektes und der verwendeten Frequenzen. Lit. hierzu:When electromagnetic waves hit the skin, mucous membrane or other organ surfaces becomes part of the irradiated Energy is absorbed, some is reflected. The reflected The amount of energy depends on the dielectric properties of the examined object and the frequencies used. Lit. on this:
Stüttgen G. , Flesch U.: Dermatologische Thermographie. Abb. 2.16. Weinheim, Deerfield Beach, Florida; Basel. Edition Medizin 1984.Stüttgen G., Flesch U .: Dermatological thermography. Fig.2.16. Weinheim, Deerfield Beach, Florida; Basel. Edition Medicine 1984.
Bei konstanter Frequenz hängt der reflektierte Energieanteil direkt von den dielektrischen Eigenschaften des untersuchten Materials ab. Durch Wahl einer geeigneten Frequenz kann die Tiefe bestimmt werden, bis zu der hin diese Dielektrizitätseigen schaften gemessen werden sollen. Sichtbares Licht und Infrarot sind wegen der zu geringen Ein dringtiefe für diese Meßaufgaben nicht geeignet. Für die Untersuchung von Organoberflächen und deren Struktur änderungen wird daher die Verwendung des Frequenzbandes von ca. 10 GigaHertz eingeführt. Die Erfindung bezieht sich auf die Konstruktion eines Meßge rätes, mit dem man unter Verwendung dieses Frequenzbandes die Oberflächeneigenschaften und die des direkt darunter liegenden Gewebes durch Meßung der dielektrischen Eigenschaften charak terisiert.At a constant frequency, the reflected energy component depends directly from the dielectric properties of the investigated Material. By choosing an appropriate frequency, the depth be determined up to which these dielectric properties should be measured. Visible light and infrared are due to the low on penetration depth not suitable for these measuring tasks. For the investigation of organ surfaces and their structure The use of the frequency band of approx. 10 GigaHertz introduced. The invention relates to the construction of a Meßge advises using this frequency band Surface properties and those of the directly below Fabric by measuring the dielectric properties terized.
Angewendet soll das Gerät in der Allergologie zur objektiven Erfassung von Hauttestreaktionen bei Mensch und Tier, außerdem in der Dermatologie zur Messung der Hautbeschaffenheit unter normalen und pathologischen Bedingungen und zur Messung ihrer pharmakologischen Beeinflussung. In der Angiologie können mit dem Gerät Strömungsmessungen oberflächlich verlaufender Blut gefäße durchgeführt werden. In der Ophthalmologie können mit dem Gerät Messungen des Augeninnendrucks erfolgen, wobei die berührungslose Messung von besonderem Vorteil ist. Die von einem Generator gelieferten Mikrowellen werden über einen Hohl-Leiter oder Fest-Leiter auf das zu untersuchende Objekt gestrahlt. Ein zweiter Leiter nimmt einen definierten Teil der reflektierten Mikrowellen auf und führt sie einem Meßgerät zu. Da für die Meßung nur geringe Energiemengen er forderlich sind und die Meßung berührungslos erfolgen kann, wird das Meßobjekt durch den Meßstrahl nicht beeinflußt.The device is used in allergology for objective Recording of skin test reactions in humans and animals, moreover in dermatology to measure skin texture under normal and pathological conditions and to measure their pharmacological interference. In angiology you can use blood flow on the device vessels are carried out. In ophthalmology, with measurements of the intraocular pressure are carried out on the device, the non-contact measurement is of particular advantage. The microwaves supplied by a generator are over a hollow conductor or fixed conductor on the one to be examined Object blasted. A second leader takes a defined one Part of the reflected microwaves and leads them to you Measuring device too. Because he measured only small amounts of energy for the measurement are required and the measurement can take place without contact, the measuring object is not influenced by the measuring beam.
Claims (14)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19863637549 DE3637549A1 (en) | 1986-11-04 | 1986-11-04 | Measuring device for testing the dielectric properties of biological tissues |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19863637549 DE3637549A1 (en) | 1986-11-04 | 1986-11-04 | Measuring device for testing the dielectric properties of biological tissues |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3637549A1 true DE3637549A1 (en) | 1988-05-11 |
Family
ID=6313147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19863637549 Ceased DE3637549A1 (en) | 1986-11-04 | 1986-11-04 | Measuring device for testing the dielectric properties of biological tissues |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3637549A1 (en) |
Cited By (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993018395A1 (en) * | 1992-03-10 | 1993-09-16 | Christopher Barnes | Apparatus for determining the physical and/or chemical properties of a sample, particularly of blood |
| US5583432A (en) * | 1994-04-11 | 1996-12-10 | Sci-Nostics Limited | Electrical method and apparatus for non-contact determination of physical and/or chemical properties of a sample, particularly of blood |
| DE19705769A1 (en) * | 1997-02-14 | 1998-08-20 | Siemens Ag | Monitoring device for radial and axial clearance between blades and housing of turbo engine |
| EP1460936A4 (en) * | 2002-01-04 | 2005-04-13 | Dune Medical Devices Ltd | Method and system for examining tissue according to the dielectric properties thereof |
| WO2005115235A1 (en) * | 2004-05-26 | 2005-12-08 | Medical Device Innovations Limited | Tissue detection and ablation apparatus and apparatus and method for actuating a tuner |
| US7161363B2 (en) | 2002-05-23 | 2007-01-09 | Cascade Microtech, Inc. | Probe for testing a device under test |
| US7233160B2 (en) | 2000-12-04 | 2007-06-19 | Cascade Microtech, Inc. | Wafer probe |
| US7271603B2 (en) | 2003-05-23 | 2007-09-18 | Cascade Microtech, Inc. | Shielded probe for testing a device under test |
| US7285969B2 (en) | 2002-11-13 | 2007-10-23 | Cascade Microtech, Inc. | Probe for combined signals |
| US7298536B2 (en) | 2001-05-04 | 2007-11-20 | Cascade Microtech, Inc. | Fiber optic wafer probe |
| US7321233B2 (en) | 1995-04-14 | 2008-01-22 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| US7348787B2 (en) | 1992-06-11 | 2008-03-25 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US7352168B2 (en) | 2000-09-05 | 2008-04-01 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
| US7362115B2 (en) | 2003-12-24 | 2008-04-22 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| US7368925B2 (en) | 2002-01-25 | 2008-05-06 | Cascade Microtech, Inc. | Probe station with two platens |
| US7368927B2 (en) | 2004-07-07 | 2008-05-06 | Cascade Microtech, Inc. | Probe head having a membrane suspended probe |
| US7403025B2 (en) | 2000-02-25 | 2008-07-22 | Cascade Microtech, Inc. | Membrane probing system |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7420381B2 (en) | 2004-09-13 | 2008-09-02 | Cascade Microtech, Inc. | Double sided probing structures |
| US7427868B2 (en) | 2003-12-24 | 2008-09-23 | Cascade Microtech, Inc. | Active wafer probe |
| US7436170B2 (en) | 1997-06-06 | 2008-10-14 | Cascade Microtech, Inc. | Probe station having multiple enclosures |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| US7468609B2 (en) | 2003-05-06 | 2008-12-23 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7492147B2 (en) | 1992-06-11 | 2009-02-17 | Cascade Microtech, Inc. | Wafer probe station having a skirting component |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7498828B2 (en) | 2002-11-25 | 2009-03-03 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US7504823B2 (en) | 2004-06-07 | 2009-03-17 | Cascade Microtech, Inc. | Thermal optical chuck |
| US7504842B2 (en) | 1997-05-28 | 2009-03-17 | Cascade Microtech, Inc. | Probe holder for testing of a test device |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7533462B2 (en) | 1999-06-04 | 2009-05-19 | Cascade Microtech, Inc. | Method of constructing a membrane probe |
| US7541821B2 (en) | 1996-08-08 | 2009-06-02 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US7550984B2 (en) | 2002-11-08 | 2009-06-23 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US7554322B2 (en) | 2000-09-05 | 2009-06-30 | Cascade Microtech, Inc. | Probe station |
| US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
| US7616017B2 (en) | 1999-06-30 | 2009-11-10 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US7619419B2 (en) | 2005-06-13 | 2009-11-17 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
| US7639003B2 (en) | 2002-12-13 | 2009-12-29 | Cascade Microtech, Inc. | Guarded tub enclosure |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| US7681312B2 (en) | 1998-07-14 | 2010-03-23 | Cascade Microtech, Inc. | Membrane probing system |
| US7720532B2 (en) | 2004-03-23 | 2010-05-18 | Dune Medical Ltd. | Clean margin assessment tool |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7809425B2 (en) | 2003-07-24 | 2010-10-05 | Dune Medical Devices Ltd. | Method and apparatus for examining a substance, particularly tissue, to characterize its type |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US7904145B2 (en) | 2004-03-23 | 2011-03-08 | Dune Medical Devices Ltd. | Clean margin assessment tool |
| US8019411B2 (en) | 2002-01-04 | 2011-09-13 | Dune Medical Devices Ltd. | Probes, systems, and methods for examining tissue according to the dielectric properties thereof |
| US8032211B2 (en) | 2002-01-04 | 2011-10-04 | Dune Medical Devices Ltd. | Probes, systems, and methods for examining tissue according to the dielectric properties thereof |
| US8069491B2 (en) | 2003-10-22 | 2011-11-29 | Cascade Microtech, Inc. | Probe testing structure |
| US8147423B2 (en) | 2007-03-01 | 2012-04-03 | Dune Medical Devices, Ltd. | Tissue-characterization system and method |
| US8195282B2 (en) | 2001-11-19 | 2012-06-05 | Dune Medical Devices Ltd | Method and apparatus for examining tissue for predefined target cells, particularly cancerous cells, and a probe useful in such method and apparatus |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| US8768485B2 (en) | 2002-11-27 | 2014-07-01 | Medical Device Innovations Limited | Tissue ablation apparatus and method of ablating tissue |
| US9750425B2 (en) | 2004-03-23 | 2017-09-05 | Dune Medical Devices Ltd. | Graphical user interfaces (GUI), methods and apparatus for data presentation |
| US20230111664A1 (en) * | 2021-10-08 | 2023-04-13 | Natural Eye Care, Inc. | Hand-held radar system to measure intraocular pressure and to assess eye diseases and method therefor |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2461264A1 (en) * | 1974-12-23 | 1976-06-24 | Siemens Ag | DEVICE FOR MEASURING THE VOLUME FLOW OF FLOWING MEDIA |
| DE3020015A1 (en) * | 1979-06-01 | 1980-12-11 | Instrumentarium Oy | DEVICE FOR DIAGNOSIS OF BREAST CANCER |
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| US4346716A (en) * | 1980-03-31 | 1982-08-31 | M/A Com, Inc. | Microwave detection system |
| DE3147197A1 (en) * | 1981-11-27 | 1983-06-09 | Siemens AG, 1000 Berlin und 8000 München | METHOD AND DEVICE FOR CARRYING OUT FLOW MEASURES ON FLOWING MEDIA BY THE ULTRASONIC DOPPLER METHOD |
| DE3409595A1 (en) * | 1984-03-15 | 1985-09-19 | Micro Pure Systems, Inc., Smithfield, R.I. | Method and device for identifying discontinuities in a flow |
| FR2561769A1 (en) * | 1984-03-21 | 1985-09-27 | Centre Nat Rech Scient | IMPEDANCE ADAPTATION CONTROL METHOD IN LOW NOISE RECEPTION CHAINS AND MINIATURE MICROWAVE THERMOMETER FOR IMPLEMENTING THE METHOD |
| DE3507431C1 (en) * | 1985-03-02 | 1986-03-13 | Horst Dipl.-Ing. 7500 Karlsruhe Hommel | Method and device for the early detection of damaged to plants, in particular conifers |
-
1986
- 1986-11-04 DE DE19863637549 patent/DE3637549A1/en not_active Ceased
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| DE2461264A1 (en) * | 1974-12-23 | 1976-06-24 | Siemens Ag | DEVICE FOR MEASURING THE VOLUME FLOW OF FLOWING MEDIA |
| DE3020015A1 (en) * | 1979-06-01 | 1980-12-11 | Instrumentarium Oy | DEVICE FOR DIAGNOSIS OF BREAST CANCER |
| US4346716A (en) * | 1980-03-31 | 1982-08-31 | M/A Com, Inc. | Microwave detection system |
| DE3100610A1 (en) * | 1981-01-12 | 1982-07-29 | Vladimir Dr.-Ing. Blazek | MEASURING DEVICE FOR NON-INVASIVE DETECTING VENOESER OR ARTIFICIAL DRAIN AND FLOW DISRUPTIONS |
| DE3147197A1 (en) * | 1981-11-27 | 1983-06-09 | Siemens AG, 1000 Berlin und 8000 München | METHOD AND DEVICE FOR CARRYING OUT FLOW MEASURES ON FLOWING MEDIA BY THE ULTRASONIC DOPPLER METHOD |
| DE3409595A1 (en) * | 1984-03-15 | 1985-09-19 | Micro Pure Systems, Inc., Smithfield, R.I. | Method and device for identifying discontinuities in a flow |
| FR2561769A1 (en) * | 1984-03-21 | 1985-09-27 | Centre Nat Rech Scient | IMPEDANCE ADAPTATION CONTROL METHOD IN LOW NOISE RECEPTION CHAINS AND MINIATURE MICROWAVE THERMOMETER FOR IMPLEMENTING THE METHOD |
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Cited By (97)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993018395A1 (en) * | 1992-03-10 | 1993-09-16 | Christopher Barnes | Apparatus for determining the physical and/or chemical properties of a sample, particularly of blood |
| US7348787B2 (en) | 1992-06-11 | 2008-03-25 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US7492147B2 (en) | 1992-06-11 | 2009-02-17 | Cascade Microtech, Inc. | Wafer probe station having a skirting component |
| US7595632B2 (en) | 1992-06-11 | 2009-09-29 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US7589518B2 (en) | 1992-06-11 | 2009-09-15 | Cascade Microtech, Inc. | Wafer probe station having a skirting component |
| US5583432A (en) * | 1994-04-11 | 1996-12-10 | Sci-Nostics Limited | Electrical method and apparatus for non-contact determination of physical and/or chemical properties of a sample, particularly of blood |
| US7321233B2 (en) | 1995-04-14 | 2008-01-22 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US7541821B2 (en) | 1996-08-08 | 2009-06-02 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US7893704B2 (en) | 1996-08-08 | 2011-02-22 | Cascade Microtech, Inc. | Membrane probing structure with laterally scrubbing contacts |
| DE19705769A1 (en) * | 1997-02-14 | 1998-08-20 | Siemens Ag | Monitoring device for radial and axial clearance between blades and housing of turbo engine |
| US7504842B2 (en) | 1997-05-28 | 2009-03-17 | Cascade Microtech, Inc. | Probe holder for testing of a test device |
| US7626379B2 (en) | 1997-06-06 | 2009-12-01 | Cascade Microtech, Inc. | Probe station having multiple enclosures |
| US7436170B2 (en) | 1997-06-06 | 2008-10-14 | Cascade Microtech, Inc. | Probe station having multiple enclosures |
| US7761986B2 (en) | 1998-07-14 | 2010-07-27 | Cascade Microtech, Inc. | Membrane probing method using improved contact |
| US7681312B2 (en) | 1998-07-14 | 2010-03-23 | Cascade Microtech, Inc. | Membrane probing system |
| US7533462B2 (en) | 1999-06-04 | 2009-05-19 | Cascade Microtech, Inc. | Method of constructing a membrane probe |
| US7616017B2 (en) | 1999-06-30 | 2009-11-10 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US7403025B2 (en) | 2000-02-25 | 2008-07-22 | Cascade Microtech, Inc. | Membrane probing system |
| US7352168B2 (en) | 2000-09-05 | 2008-04-01 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7501810B2 (en) | 2000-09-05 | 2009-03-10 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7554322B2 (en) | 2000-09-05 | 2009-06-30 | Cascade Microtech, Inc. | Probe station |
| US7688062B2 (en) | 2000-09-05 | 2010-03-30 | Cascade Microtech, Inc. | Probe station |
| US7514915B2 (en) | 2000-09-05 | 2009-04-07 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7969173B2 (en) | 2000-09-05 | 2011-06-28 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7423419B2 (en) | 2000-09-05 | 2008-09-09 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7518358B2 (en) | 2000-09-05 | 2009-04-14 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7688097B2 (en) | 2000-12-04 | 2010-03-30 | Cascade Microtech, Inc. | Wafer probe |
| US7761983B2 (en) | 2000-12-04 | 2010-07-27 | Cascade Microtech, Inc. | Method of assembling a wafer probe |
| US7495461B2 (en) | 2000-12-04 | 2009-02-24 | Cascade Microtech, Inc. | Wafer probe |
| US7233160B2 (en) | 2000-12-04 | 2007-06-19 | Cascade Microtech, Inc. | Wafer probe |
| US7456646B2 (en) | 2000-12-04 | 2008-11-25 | Cascade Microtech, Inc. | Wafer probe |
| US7298536B2 (en) | 2001-05-04 | 2007-11-20 | Cascade Microtech, Inc. | Fiber optic wafer probe |
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