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DE1789111B2 - METHOD OF TESTING INSULATING LAYERS ON THE SURFACE OF SEMICONDUCTOR ARRANGEMENTS - Google Patents

METHOD OF TESTING INSULATING LAYERS ON THE SURFACE OF SEMICONDUCTOR ARRANGEMENTS

Info

Publication number
DE1789111B2
DE1789111B2 DE19671789111 DE1789111A DE1789111B2 DE 1789111 B2 DE1789111 B2 DE 1789111B2 DE 19671789111 DE19671789111 DE 19671789111 DE 1789111 A DE1789111 A DE 1789111A DE 1789111 B2 DE1789111 B2 DE 1789111B2
Authority
DE
Germany
Prior art keywords
insulating layers
semiconductor arrangements
testing insulating
testing
arrangements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19671789111
Other languages
German (de)
Other versions
DE1789111A1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE1789111A1 publication Critical patent/DE1789111A1/en
Publication of DE1789111B2 publication Critical patent/DE1789111B2/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105After-treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE19671789111 1966-09-26 1967-09-21 METHOD OF TESTING INSULATING LAYERS ON THE SURFACE OF SEMICONDUCTOR ARRANGEMENTS Pending DE1789111B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6303366 1966-09-26

Publications (2)

Publication Number Publication Date
DE1789111A1 DE1789111A1 (en) 1972-03-09
DE1789111B2 true DE1789111B2 (en) 1972-10-05

Family

ID=13217594

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19671789111 Pending DE1789111B2 (en) 1966-09-26 1967-09-21 METHOD OF TESTING INSULATING LAYERS ON THE SURFACE OF SEMICONDUCTOR ARRANGEMENTS
DE19671589901 Withdrawn DE1589901B2 (en) 1966-09-26 1967-09-21 PROCESS FOR IMPROVING AND STABILIZING THE ELECTRICAL PROPERTIES OF A SEMICONDUCTOR ARRANGEMENT WITH AN INSULATING PROTECTIVE LAYER

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19671589901 Withdrawn DE1589901B2 (en) 1966-09-26 1967-09-21 PROCESS FOR IMPROVING AND STABILIZING THE ELECTRICAL PROPERTIES OF A SEMICONDUCTOR ARRANGEMENT WITH AN INSULATING PROTECTIVE LAYER

Country Status (1)

Country Link
DE (2) DE1789111B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627935A (en) * 1979-08-15 1981-03-18 Toshiba Corp Semiconductor device
JP2934456B2 (en) * 1989-07-14 1999-08-16 株式会社日立製作所 Surface treatment method and apparatus

Also Published As

Publication number Publication date
DE1589901B2 (en) 1972-02-17
DE1789111A1 (en) 1972-03-09
DE1589901A1 (en) 1970-10-22

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