CN223636787U - A pipe angle measuring fixture for semiconductor pipes - Google Patents

Abstract

The utility model provides a pipeline angle measurement tool for a semiconductor pipeline, which comprises a detection part, a connection part and a calibration part, wherein the detection part comprises a dial and an indicating needle, the indicating needle is rotatably arranged on the dial, two ends of the indicating needle are respectively a pointer end and a gravity end, the pointer end and the gravity end are vertical to a reference plane along the vertical direction, the connection part and the indicating needle are oppositely arranged on two opposite end surfaces of the dial, the connection part can abut against the semiconductor pipeline to be measured, and the calibration part is arranged at the bottom of the dial. The pipeline angle measurement tool for the semiconductor pipeline can accurately and conveniently measure the angle of the pipeline for semiconductor production, has a simple overall structure, few parts and low cost, can control measurement errors within +/-0.5 degrees, meets the fine angle tolerance requirement of the semiconductor pipeline, and has accurate measurement of the pipeline angle and wide application range.

Description

Pipeline angle measurement tool for semiconductor pipeline

Technical Field

The application relates to the technical field of semiconductor pipeline measurement, in particular to a pipeline angle measurement tool for a semiconductor pipeline.

Background

In the semiconductor manufacturing process, a pipeline system is as critical as a blood vessel of a human body, and various special gases are accurately conveyed. Because of the reasons of site limitation, production requirement and the like, the semiconductor pipeline needs to be welded and bent, so that the whole pipeline layout has bent pipes with various angles, and the angles of the pipelines cannot deviate because the process precision is strictly required in the semiconductor production.

The conventional angle measuring tool, such as a common angle ruler, a universal angle meter and the like, cannot detect precision in a semiconductor pipeline measuring task. Taking the pipeline of square elbow as an example, when the conventional tool is attached to a square structure, the angle ruler cannot be tightly attached to the outer contour of the pipeline, so that the measurement error is extremely large and even cannot be read, the process of installing and debugging the pipeline is greatly hindered, and hidden danger is buried for the stability of semiconductor production.

Therefore, it is necessary to design a duct angle measurement tool for semiconductor duct to solve the above problems.

Disclosure of utility model

In view of the above, in order to overcome the defects of the prior art, the utility model provides a pipeline angle measurement tool for a semiconductor pipeline, which effectively solves the problem that the existing angle measurement tool cannot accurately measure the angle of the semiconductor pipeline.

The utility model provides a pipeline angle measurement tool for a semiconductor pipeline, which comprises a detection part, a connecting part and a calibration part, wherein the detection part comprises a dial and an indicator needle, the indicator needle can be rotatably arranged on the dial, two ends of the indicator needle are respectively a pointer end and a gravity end, the pointer end and the gravity end are perpendicular to a reference plane along the vertical direction, the connecting part and the indicator needle are oppositely arranged on two opposite end surfaces of the dial, the connecting part can be abutted against the semiconductor pipeline to be measured, and the calibration part is arranged at the bottom of the dial.

Preferably, the scale is arranged on the periphery of the dial, the scale is in the range of 0-360 degrees, the pipe angle measuring tool for the semiconductor pipe can be switched between a static state and a use state, the pointer end points to 90 degrees when the pipe angle measuring tool for the semiconductor pipe is in the static state, and the scale pointed by the pointer end is the angle of the semiconductor pipe to be measured when the pipe angle measuring tool for the semiconductor pipe is in the use state.

Preferably, a connecting hole is formed in the middle of the dial, and the middle of the indicator needle is connected with the middle of the dial through the connecting hole.

Preferably, a sliding groove is provided on a peripheral side of the connection hole, and the gravity end is slidably provided in the sliding groove.

Preferably, the connecting part comprises a fixing part and a disassembling part, the fixing part is fixedly arranged on the dial, a first end of the disassembling part is detachably connected with the fixing part, and a second end of the disassembling part is abutted to the semiconductor channel to be tested.

Preferably, the fixing member includes a vertical portion perpendicular to a surface of the dial, and an extension portion extending from an end of the vertical portion toward both sides of the vertical portion.

Preferably, the end part of the replacing piece, which is connected with the fixing piece, is provided with a containing groove, and the fixing piece can be arranged in the containing groove.

Preferably, the second end of the replacing member is provided with an abutment recess comprising a plurality of mutually connected abutment surfaces, each of which is capable of abutting against a semiconductor die to be tested.

Preferably, the bottom of the dial is provided with a calibration mounting groove, the calibration mounting groove is arranged on the end face of the dial, on which the connecting part is arranged, and the bottom of the calibration mounting groove is provided with a plurality of mounting holes.

Preferably, the calibration part includes a planar block and a connection block connected to each other, the connection block is disposed in the calibration mounting groove through the mounting hole, and a bottom surface of the planar block is a plane.

According to the pipeline angle measurement tool for the semiconductor pipeline, the angle of the pipeline for semiconductor production can be accurately and conveniently measured through the cooperation of the detection part, the connection part and the calibration part. The pipe angle measuring tool for the semiconductor pipeline is simple in integral structure, few in parts, free of complex electronic elements and mechanical transmission structures, capable of achieving accurate measurement of the pipe angle by only wiping and cleaning in daily maintenance and capable of achieving maintenance work by regular checking whether the indicating needle is accurately measured or not, high in adaptability, wide in application range and capable of achieving angle measurement regardless of standard pipe diameter, special-shaped pipe which is derived by process improvement or complex pipe diameter joints which are formed by welding and bending due to the fact that the material of the component parts is common metal, the processing technology is mature, cost is greatly reduced compared with existing detection equipment for the semiconductor pipeline, the integral structure depends on the gravity principle, the indicating needle is accurately vertically oriented and combined with a high-precision dial, measurement errors can be controlled within +/-0.5 degrees, the fine angle tolerance requirement of the semiconductor pipeline is met, and the connecting part and the detecting part are arranged on two opposite surfaces of the dial, and can be used for selecting a connecting part with proper size according to pipe diameter difference of the pipe.

In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 shows a schematic structural diagram of a duct angle measurement tool for semiconductor ducts according to an embodiment of the present utility model;

Fig. 2 shows a rear view of a conduit angle measurement tool for a semiconductor die according to an embodiment of the utility model;

FIG. 3 shows a schematic structural view of a dial according to an embodiment of the present utility model;

FIG. 4 shows a rear view of a dial according to an embodiment of the utility model;

FIG. 5 shows a schematic structural view of a refill unit according to an embodiment of the present utility model;

FIG. 6 shows a schematic structural view of a planar block and a connection block according to an embodiment of the present utility model;

Fig. 7 shows a schematic structural diagram of a connection of a pipe angle measurement tool for a semiconductor pipe and a first pipe to be measured according to an embodiment of the present utility model;

FIG. 8 is a schematic view showing the structure of the connection of the replacement part to the first pipeline to be tested according to the embodiment of the present utility model;

Fig. 9 shows a schematic structural diagram of a connection of a conduit angle measurement tool for a semiconductor conduit with a second conduit to be measured according to an embodiment of the present utility model;

Fig. 10 shows a schematic structural diagram of the connection of the replacement part to the second pipe under test according to an embodiment of the present utility model.

The reference numerals comprise a 1-detection part, a 101-dial, a 102-indicating needle, a 103-pointer end, a 104-gravity end, a 105-connecting hole, a 106-sliding groove, a 2-connecting part, a 201-fixing part, a 202-replacing part, a 203-vertical part, a 204-extending part, a 205-accommodating groove, a 206-abutting surface, a 3-calibrating part, a 301-calibrating installation groove, a 302-installing hole, a 303-plane block, a 304-connecting block, a 4-first pipeline to be tested and a 5-second pipeline to be tested.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present application.

In the description of the embodiments of the present application, it should be noted that, directions or positional relationships indicated by terms such as "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, or directions or positional relationships in which products of the application are conventionally put in use, are merely for convenience of describing the present application and simplifying the description, and are not indicative or implying that the apparatus or elements referred to must have a specific direction, be configured and operated in a specific direction, and therefore should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the embodiments of the present application, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intermediate medium, or connected in two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.

According to a first aspect of the present utility model, there is provided a pipe angle measurement tool for a semiconductor pipe, which is used for angle measurement of a semiconductor half pipe, as shown in fig. 1 to 10, the pipe angle measurement tool for a semiconductor pipe including a detecting portion 1, a connecting portion 2, and a calibrating portion 3.

In the following description, detailed structures of the detecting section 1, the connecting section 2, and the calibrating section 3 of the pipe angle measuring tool for semiconductor channels will be specifically described with reference to fig. 1 to 10.

As shown in fig. 1 to 4, in the embodiment, the detection section 1 includes a dial 101 and an indicator needle 102, and the indicator needle 102 is rotatably provided to the dial 101. The dial 101 may be formed in a disk structure, and the indicating needle 102 is rotatable at the center of the disk. The dial 101 can be formed by precisely milling an aluminum alloy material, and the surface of the dial 101 should be flat and smooth to meet the use requirement.

The pointer 102 has a pointer end 103 and a gravity end 104 at both ends, and the pointer end 103 and the gravity end 104 are perpendicular to the reference plane along the vertical direction. The reference plane here may be, for example, the ground, the work plane or the measurement plane, which is required to meet the measurement requirements of the semiconductor die angle, and may be, for example, a high-precision marble platform, in particular, the vertical direction, i.e. perpendicular to this reference plane. To ensure accurate measurement, the dial 101 and the pointer 102 should have sufficient accuracy, and both ends of the pointer 102 should be perpendicular to the reference plane without using the pipe angle measurement tool for semiconductor channels. The indicator needle 102 can be made of stainless steel materials, and the surface of the indicator needle 102 is subjected to chromium plating treatment, so that the indicator needle has corrosion resistance and is convenient to observe. The gravitational end 104 may be made of a high density tungsten alloy, which has a high gravity, so that the pointer 102 is placed under the traction of gravity anyway, and can be always perpendicular to the reference plane, and has stability.

The connecting part 2 and the indicator needle 102 are oppositely arranged on two opposite end surfaces of the dial 101, the connecting part 2 can be abutted against a semiconductor pipeline to be tested, one of the two opposite end surfaces is used for indicating the swing of the indicator needle 102, the other is convenient for a user to connect the semiconductor pipeline with the pipeline angle measuring tool for the semiconductor pipeline to be tested, and the connecting part 2 and the detecting part 1 are prevented from interfering.

The calibration part 3 is disposed at the bottom of the dial 101, and when a user uses the pipe angle measurement tool for semiconductor channels, the user needs to detect the detection part 1 by using the calibration part 3, so that errors occur in measurement. The calibration may be performed, for example, by placing the detecting unit 1 on a high-precision marble stage through the calibrating unit 3, observing whether the pointer 102 of the detecting unit 1 is perpendicular to the marble stage at this time, if so, performing angle measurement by using the pipe angle measurement tool for semiconductor pipe, and if not, adjusting the connection between the pointer 102 and the dial 101 so that the pointer 102 can be perpendicular to the marble stage.

According to the pipeline angle measurement tool for the semiconductor pipeline, the angle of the pipeline for semiconductor production can be accurately and conveniently measured through the cooperation of the detection part 1, the connecting part 2 and the calibration part 3. The pipe angle measuring tool for the semiconductor pipeline is simple in integral structure, few in parts, free of complex electronic elements and mechanical transmission structures, capable of meeting the fine angle tolerance requirement of the semiconductor pipeline by wiping and cleaning in daily maintenance, capable of meeting maintenance work by regular checking whether the indicating needle 102 is accurate in measurement or not, high in adaptability, wide in pipe diameter measuring range and applicable to bending of a wide range, and capable of measuring pipe angles due to the fact that connecting parts 2 and detecting parts 1 are arranged on two opposite surfaces of the semiconductor pipeline, and connecting parts 2 with proper sizes can be selected according to different pipe diameters of the pipelines.

Preferably, as shown in fig. 1 to 4, in the embodiment, the outer peripheral edge of the dial 101 is provided with a scale in the range of 0 ° -360 °, and the scale range of 0 ° -360 ° can satisfy the pipe inspection. The pipe angle measuring tool for the semiconductor pipe can be switched between a static state and a use state, the pointer end 103 points to 90 degrees under the condition that the pipe angle measuring tool for the semiconductor pipe is in the static state (shown in fig. 1), and the scale points to the pointer end 103 is the angle of the semiconductor pipe to be measured under the condition that the pipe angle measuring tool for the semiconductor pipe is in the use state (shown in fig. 7 and 9).

Preferably, as shown in fig. 3, in the embodiment, a connection hole 105 is provided at the middle of the dial 101, and the middle of the indicating needle 102 is connected to the middle of the dial 101 through the connection hole 105. The connection may be, for example, by means of a suitable connection pin which at the same time enables the pointer 102 to be rotated. The pointer 102 may be adjusted by adjusting the connection position of the connection pin at the time of the calibration step.

Preferably, as shown in fig. 1 and 3, in the embodiment, the circumference side of the connection hole 105 is provided with a sliding groove 106, and the gravitational end 104 is slidably disposed in the sliding groove 106. The sliding groove 106 may be formed as a circular groove surrounding the connection hole 105, since the gravity end 104 is large in volume, since the gravity end 104 is provided to the sliding groove 106 in order to smoothly rotate the indicating needle 102.

Preferably, as shown in fig. 2, 4 and 5, in an embodiment, the connection portion 2 may include a fixing member 201 and a replacing member 202, where the fixing member 201 is fixedly disposed on the dial 101, a first end of the replacing member 202 is detachably connected to the fixing member 201, and a second end of the replacing member 202 abuts against the semiconductor channel to be tested. The fixing piece 201 can be fixedly connected with the dial 101, and the fixedly connected mode can be, for example, integrated into one piece or welded, and the disassembling and replacing piece 202 can be detachably connected with the fixing piece 201, so that the disassembling and replacing piece 202 with different sizes can be replaced according to the pipe diameters of the pipelines to be tested.

Preferably, as shown in fig. 2, 4 and 5, in an embodiment, the fixing member 201 may include a vertical portion 203 perpendicular to the surface of the dial 101 and an extension portion 204 extending from an end of the vertical portion 203 toward both sides of the vertical portion 203. The fixing member 201 may be formed in a T-shaped structure, which may include the above-described upright portion 203 and the extension portion 204. The T-shaped configuration can facilitate attachment and detachment of the replacement piece 202.

Preferably, as shown in fig. 5, in an embodiment, an end of the replacing member 202 connected to the fixing member 201 is provided with a receiving groove 205, and the fixing member 201 can be disposed in the receiving groove 205. The size and configuration of the receiving recess 205 matches the size and configuration of the fixture 201 for ease of removal and replacement.

Preferably, as shown in fig. 5, in an embodiment, the second end of the replacement part 202 is provided with an abutment recess, which may include a plurality of abutment surfaces 206 connected to each other, each abutment surface 206 being capable of abutting a semiconductor die to be tested. The abutment surface 206 may be formed as an arcuate surface, with a plurality of mutually connected abutment surfaces 206 being different in size for abutting different sized pipes. Further, each abutment surface 206 is provided with another abutment surface 206 opposite thereto, by which two abutment surfaces 206 the side wall of the pipe can be clamped and abutted. Referring to fig. 8 and 10, the pipe diameter of the first pipe 4 to be measured in fig. 8 is smaller, and thus can abut against the abutment surface 206 of smaller size, and the pipe diameter of the second pipe 5 to be measured in fig. 10 is larger, and thus can abut against the abutment surface 206 of larger size. The abutment recess of the replacement part 202 may be a standard part, wherein each abutment surface 206 may be preset according to standard specifications of pipes. However, the abutting recess of the replacement member 202 is not limited thereto, and may be customized according to the pipe diameter of the pipe.

Preferably, as shown in fig. 4 and 6, in the embodiment, the bottom of the dial 101 is provided with the calibration mounting groove 301, and the calibration mounting groove 301 is provided on the end surface of the dial 101 where the connection portion 2 is provided, so that the connection portion 3 and the dial 101 are coplanar with the connection portion 2 in order to avoid interference with the detection portion 1. A plurality of mounting holes 302 are formed in the bottom of the alignment mounting groove 301, and the plurality of mounting holes 302 may be, for example, screw holes.

Preferably, as shown in fig. 4 and 6, in an embodiment, the alignment part 3 may include a planar block 303 and a connection block 304 connected to each other, the connection block 304 being provided to the alignment mounting groove 301 through the mounting hole 302, the bottom surface of the planar block 303 being planar. The connection block 304 may be threadably coupled to the mounting hole 302 by using a connection member such as a connection screw. The bottom surface of the flat block 303 formed in a flat surface may be placed on a marble stage for calibration.

The measuring process of the pipe angle measuring tool for the semiconductor pipe comprises the steps of firstly, carrying out early measuring preparation, fixing one end of the semiconductor pipe to be measured (for example, a first pipe to be measured 4 in fig. 7 and a second pipe to be measured 5 in fig. 9) on a clamping device (a clamping device commonly used for semiconductor pipe measurement in the prior art) so that the end of the pipe is accurately parallel to a horizontal plane, and laying a foundation for subsequent measurement. A suitable replacement piece 202 is selected according to the outer diameter of the pipe to be tested, and a T-shaped fixing piece 201 is inserted. And then calibrating, namely stably placing the calibrating part 3 on a high-precision marble platform, looking up the pointer, and checking whether the pointer points to 90 degrees accurately. If the deviation exists, the position of the dial 101 is finely adjusted, and meanwhile, the joint of the indicator needle 102 and the dial 101 can be adjusted until the pointer returns to 90 degrees, so that the calibration is completed. Finally, after the calibration is correct, the tool is held by hand, the abutting concave part of the disassembly and replacement piece 202 is tightly attached to the pipeline to be tested, and the attachment between the abutting concave part and the pipeline is ensured to be seamless. The dial 101 has its dial face facing the operator, the line of sight perpendicular to the pointer, and the scale of the pointer is read clearly, and this reading is the precise angle of the bent pipe.

According to the pipeline angle measurement tool for the semiconductor pipeline, the angle of the pipeline for semiconductor production can be accurately and conveniently measured through the cooperation of the detection part, the connection part and the calibration part. The pipe angle measuring tool for the semiconductor pipeline is simple in integral structure, few in parts, free of complex electronic elements and mechanical transmission structures, capable of achieving accurate measurement of the pipe angle by only wiping and cleaning in daily maintenance and capable of achieving maintenance work by regular checking whether the indicating needle is accurately measured or not, high in adaptability, wide in application range and capable of achieving angle measurement regardless of standard pipe diameter, special-shaped pipe which is derived by process improvement or complex pipe diameter joints which are formed by welding and bending due to the fact that the material of the component parts is common metal, the processing technology is mature, cost is greatly reduced compared with existing detection equipment for the semiconductor pipeline, the integral structure depends on the gravity principle, the indicating needle is accurately vertically oriented and combined with a high-precision dial, measurement errors can be controlled within +/-0.5 degrees, the fine angle tolerance requirement of the semiconductor pipeline is met, and the connecting part and the detecting part are arranged on two opposite surfaces of the dial, and can be used for selecting a connecting part with proper size according to pipe diameter difference of the pipe.

It should be noted that the foregoing embodiments are merely illustrative embodiments of the present application, and not restrictive, and the scope of the application is not limited to the embodiments, and although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that any modification, variation or substitution of some of the technical features of the embodiments described in the foregoing embodiments may be easily contemplated within the scope of the present application, and the spirit and scope of the technical solutions of the embodiments do not depart from the spirit and scope of the embodiments of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims (10)

1. The utility model provides a pipeline angle measurement frock for semiconductor pipeline, its characterized in that, pipeline angle measurement frock for semiconductor pipeline includes detection portion, connecting portion and calibration portion, detection portion includes calibrated scale and pilot pin, the pilot pin rotationally set up in the calibrated scale, the both ends of pilot pin are pointer end and gravity end respectively, pointer end with the gravity end all hangs down in the reference surface along vertical direction, connecting portion with the pilot pin set up relatively in two terminal surfaces that are opposite of calibrated scale, connecting portion can butt wait to survey the semiconductor pipeline, calibration portion set up in the bottom of calibrated scale.

2. The tool for measuring the angle of a pipeline for a semiconductor pipeline according to claim 1, wherein scales are arranged on the peripheral edge of the dial, and the scales range from 0 degrees to 360 degrees;

The pipe angle measuring tool for the semiconductor pipe can be switched between a static state and a use state, the pointer end points to 90 degrees under the condition that the pipe angle measuring tool for the semiconductor pipe is in the static state, and the scale points to the pointer end is the angle of the semiconductor pipe to be measured under the condition that the pipe angle measuring tool for the semiconductor pipe is in the use state.

3. The tool for measuring the angle of the pipeline for the semiconductor pipeline according to claim 1, wherein the middle part of the dial is provided with a connecting hole, and the middle part of the indicator needle is connected with the middle part of the dial through the connecting hole.

4. The piping angle measurement tool for a semiconductor pipe according to claim 3, wherein a sliding groove is provided on a peripheral side of the connection hole, and the gravitational end is slidably provided in the sliding groove.

5. The tool for measuring the angle of the pipeline for the semiconductor pipeline according to claim 1, wherein the connecting portion comprises a fixing piece and a disassembling piece, the fixing piece is fixedly arranged on the dial, a first end of the disassembling piece is detachably connected with the fixing piece, and a second end of the disassembling piece is abutted to the semiconductor pipeline to be measured.

6. The tool of claim 5, wherein the fixture includes a vertical portion perpendicular to a surface of the dial and an extension portion extending from an end of the vertical portion toward both sides of the vertical portion.

7. The tool for measuring the angle of the pipeline for the semiconductor pipeline according to claim 6, wherein the end part of the detachable part connected with the fixing part is provided with a containing groove, and the fixing part can be arranged in the containing groove.

8. The tool for measuring the angle of a conduit for a semiconductor die according to claim 5, wherein the second end of the replacement member is provided with an abutment recess,

The abutting concave part comprises a plurality of abutting surfaces connected with each other, and each abutting surface can abut against the semiconductor pipeline to be tested.

9. The tool for measuring the angle of the pipeline for the semiconductor pipeline according to claim 1, wherein a calibration mounting groove is formed in the bottom of the dial, and the calibration mounting groove is formed in the end face of the dial, on which the connecting part is arranged;

And a plurality of mounting holes are formed in the bottom of the calibration mounting groove.

10. The tool for measuring the angle of the pipe for the semiconductor die according to claim 9, wherein the aligning portion includes a planar block and a connection block connected to each other, the connection block is provided to the aligning mounting groove through the mounting hole, and a bottom surface of the planar block is a plane.