CN216870865U

CN216870865U - Double-probe optical measurement and control mechanism

Info

Publication number: CN216870865U
Application number: CN202123200453.3U
Authority: CN
Inventors: 胡传辉; 吕青; 李�瑞
Original assignee: Tang Optoelectronics Equipment Co ltd
Current assignee: Tang Optoelectronics Equipment Co ltd
Priority date: 2021-12-20
Filing date: 2021-12-20
Publication date: 2022-07-01
Anticipated expiration: 2031-12-20

Abstract

The utility model relates to the technical field of probes, and particularly discloses a double-probe optical measurement and control mechanism. The double-probe optical measuring and controlling mechanism comprises a probe body, a first optical machine element and a second optical machine element; one end of the first optical element is connected to the probe body, and the other end of the first optical element is connected to the first single-core optical fiber jumper; one end of the second optical element is connected with the probe body, and the other end of the second optical element is connected with a second single-core optical fiber jumper. According to the utility model, the probe body is respectively connected with the two single-core optical fiber jumpers, so that optical signals can enter the probe body from the first single-core optical fiber jumper, the optical signals in the probe body are transmitted to a piece to be detected and then return to the probe body, and then enter the second single-core optical fiber jumper from the probe body, so that the transmission of the optical signals is completed. Because the first optical element and the second optical element transmit signals through the single-core optical fiber jumper respectively, the single-core optical fiber jumper does not influence the transmission of optical signals when passing through the glove box, and the sealing of the glove box is convenient to realize.

Description

Double-probe optical measurement and control mechanism

Technical Field

The utility model relates to the technical field of probes, in particular to a double-probe optical measurement and control mechanism.

Background

A Metal-organic Chemical Vapor Deposition (MOCVD) apparatus is a commonly used semiconductor material epitaxial growth apparatus. When the MOCVD equipment is maintained in an open cavity, a glove box mechanism is usually installed outside the reaction cavity in order to avoid direct exposure of parts in the reaction cavity to the air. The glove box forms an independent gas closed space, and meanwhile, water, electricity, gas, light and the like are connected to the reaction cavity through the glove box under the condition that sealing can be guaranteed. When the in-situ monitoring system is connected to a probe in the glove box through the optical fiber jumper, the skin of the optical fiber jumper penetrating through the glove box needs to be stripped, and then the intersection of the optical fiber jumper and the glove box is sealed in a glue filling mode so as to avoid gas leakage in the glove box.

The probe in the prior art is a single-head probe and is adapted to a single multi-core multi-mode jumper wire, the single multi-core multi-mode jumper wire comprises a plurality of optical fiber jumper wires, the function of the optical fiber jumper wire can be influenced when the single multi-core multi-mode jumper wire penetrates through a glove box to be stripped, and the single multi-core multi-mode jumper wire is easy to break when penetrating through the glove box.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a double-probe optical measurement and control mechanism, which solves the problem that when a single-head probe in the prior art is only suitable for a single multi-core multi-mode jumper wire, the function of the optical fiber jumper wire is influenced when the single multi-core multi-mode jumper wire passes through a glove box after being stripped.

In order to achieve the purpose, the utility model adopts the following technical scheme:

the utility model provides a double-probe optical measurement and control mechanism, which is used for measuring the light reflectivity of a piece to be measured and the temperature of the piece to be measured, and comprises:

a probe body;

one end of the first optical element is connected to the probe body, and the other end of the first optical element is connected with a first single-core optical fiber jumper; the first optical-mechanical part is used for receiving the optical signal transmitted by the first single-core optical fiber jumper and transmitting the optical signal to the probe body; the optical signal in the probe body can be transmitted to the piece to be tested, and the optical signal can be reflected to the probe body by the piece to be tested;

one end of the second optical element is connected to the probe body, and the other end of the second optical element is connected with a second single-core optical fiber jumper; the second optical-mechanical part is used for receiving the optical signal transmitted by the probe body and transmitting the optical signal to the second single-core optical fiber jumper.

As an alternative of the dual-probe optical measurement and control mechanism, the probe body is internally provided with a first channel, a second channel, a third channel and an accommodating cavity; one end of the first channel, one end of the second channel and one end of the third channel are communicated with the accommodating cavity; the other end of the first channel is provided with the first optical element, and the other end of the second channel is provided with the second optical element; the other end of the third channel is opposite to the piece to be detected.

As an alternative to the above-mentioned dual-probe optical measurement and control mechanism, a refraction element is disposed in the accommodating cavity, and the refraction element is used for refracting the optical signal.

As an alternative to the above-mentioned dual-probe optical measurement and control mechanism, the above-mentioned refractive element is a spectroscope.

As an alternative to the above-mentioned dual-probe optical measurement and control mechanism, the probe body further includes a reflection element, and the reflection element is disposed in the first channel and/or the second channel and/or the third channel; the reflecting member is used for reflecting the optical signal.

As an alternative to the dual probe optical measurement and control mechanism, lenses are provided in both the first optical element and the second optical element, through which the optical signals can pass.

As an alternative to the dual-probe optical measurement and control mechanism, the first optical element and the second optical element are both detachably connected to the probe body.

As an alternative of the above dual-probe optical measurement and control mechanism, the dual-probe optical measurement and control mechanism further includes a connecting member, and the connecting member connects the probe body and an external device.

As an alternative to the above-mentioned dual-probe optical measurement and control mechanism, the single-core optical fiber jumper includes a single-core single-mode jumper and a single-core multi-mode jumper.

As an alternative of the dual-probe optical measurement and control mechanism, an included angle between the first optical element and the second optical element ranges from 0 ° to 180 °.

The beneficial effects of the utility model are as follows:

the double-probe optical measuring and controlling mechanism comprises a probe body, a first optical machine element and a second optical machine element. One end of the first optical element is connected to the probe body, the other end of the first optical element is connected with the first single-core optical fiber jumper, one end of the second optical element is connected to the probe body, the other end of the second optical element is connected with the second single-core optical fiber jumper, and then the double-probe optical measurement and control mechanism can be connected with the two single-core optical fiber jumpers, so that optical signals can enter the probe body through the first single-core optical fiber jumper, the optical signals in the probe body are transmitted to a piece to be measured and then return to the probe body, and then the optical signals enter the second single-core optical fiber jumper through the probe body, and transmission of the optical signals is completed. Meanwhile, the probe body is connected with the two single-core optical fiber jumpers, when the two single-core optical fiber jumpers penetrate through the glove box to be stripped, the optical signal transmission function of the single-core optical fiber jumpers cannot be affected, and the single-core optical fiber jumpers cannot be broken when penetrating through the glove box, so that the glove box is convenient to seal.

Drawings

FIG. 1 is a schematic structural diagram of a dual-probe optical measurement and control mechanism according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of a dual probe optical metrology mechanism provided in accordance with an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of another dual-probe optical measurement and control mechanism according to an embodiment of the present invention;

fig. 4 is a cross-sectional view of another dual-probe optical measurement and control mechanism provided in an embodiment of the present invention.

In the figure:

1. a probe body; 11. a first channel; 12. a second channel; 13. a third channel; 14. an accommodating chamber; 141. A refractive member; 15. a reflector; 2. a first optical element; 3. a second optical element; 4. a lens; 5. a connecting member.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Where the terms "first position" and "second position" are two different positions, and where a first feature is "over", "above" and "on" a second feature, it is intended that the first feature is directly over and obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

Example one

The present embodiment provides a dual-probe optical measurement and control mechanism, which is used to measure the light reflectivity of a device under test and the temperature of the device under test.

As shown in fig. 1-2, the dual-probe optical measurement and control mechanism includes a probe body 1, a first optical element 2 and a second optical element 3. One end of the first optical mechanism 2 is connected to the probe body 1, the other end of the first optical mechanism 2 is connected to the first single-core optical fiber jumper, and the first optical mechanism 2 is used for receiving an optical signal transmitted by the first single-core optical fiber jumper and transmitting the optical signal to the probe body 1 so as to input the optical signal into the probe body 1 from an optical signal providing device. Optical signals in the probe body 1 can be transmitted to the to-be-detected piece, and the optical signals can be reflected back to the probe body 1 by the to-be-detected piece, so that the measurement of the optical reflectivity of the to-be-detected piece by the double-probe optical measurement and control mechanism is completed. Meanwhile, one end of the second optical element 3 is connected to the probe body 1, the other end of the second optical element 3 is connected to the second single-core optical fiber jumper, and the second optical element 3 is used for receiving the optical signal transmitted by the probe body 1 and transmitting the optical signal to the second single-core optical fiber jumper, so that the optical signal is transmitted from the probe body 1 to the optical signal measuring equipment. Wherein, because probe body 1 connects two single core optical fiber wire jumpers, two single core optical fiber wire jumpers can not produce the influence to the optical signal transmission function of single core optical fiber wire jumper when passing glove box department and carrying out the wire stripping, and can not produce the fracture when just single core optical fiber wire jumper passes the glove box yet, be convenient for realize the sealed of glove box. Optionally, single core optical fiber jumper includes single core single mode jumper and single core multimode jumper, and then this two probe optics measurement control mechanism can use single core single mode jumper and/or single core multimode jumper according to the user demand, realizes the measurement to the piece that awaits measuring. Preferably, the dual probe optical measurement and control mechanism uses single core multimode jumpers.

Further optionally, the piece to be tested is a graphite tray and a wafer placed on the graphite tray. Of course, the device to be measured may also be other devices capable of using the dual-probe optical measurement control mechanism to perform measurement, and this embodiment is not particularly limited. Specifically, a double-probe optical measurement and control mechanism is arranged in a glove box of the MOCVD equipment, the double-probe optical measurement and control mechanism can receive LED light transmitted by a first single-core optical fiber jumper, the LED light can be transmitted to a graphite tray and a wafer through the transmission of the double-probe optical measurement and control mechanism, the LED light can be reflected back to the double-probe optical measurement and control mechanism through the graphite tray and the wafer, and then the LED light is transmitted to a second single-core optical fiber jumper through the double-probe optical measurement and control mechanism and transmitted to optical signal measuring equipment to complete the measurement of the optical reflectivity of the double-probe optical measurement and control mechanism on a piece to be measured. The infrared signals generated by the graphite tray and the wafer can also be transmitted to the double-probe optical measurement and control mechanism, then transmitted to the second single-core optical fiber jumper by the double-probe optical measurement and control mechanism and transmitted to the infrared signal measuring equipment, so that the temperature of the to-be-measured piece can be measured by the double-probe optical measurement and control mechanism.

Further, the probe body 1 has a first channel 11, a second channel 12, a third channel 13 and a containing cavity 14 inside. One end of the first channel 11, one end of the second channel 12 and one end of the third channel 13 are all communicated with the accommodating cavity 14, the first optical element 2 is arranged at the other end of the first channel 11, the second optical element 3 is arranged at the other end of the second channel 12, and then optical signals can be transmitted in the first channel 11, the second channel 12, the third channel 13 and the accommodating cavity 14. Meanwhile, the other end of the third channel 13 is arranged opposite to the piece to be measured, so that the dual-probe optical measurement and control mechanism can transmit an optical signal to the piece to be measured through the third channel 13, and can receive the optical signal and the infrared signal transmitted back by the piece to be measured through the third channel 13, thereby realizing information exchange between the dual-probe optical measurement and control mechanism and the piece to be measured. Wherein, be equipped with refraction piece 141 in holding the chamber 14, refraction piece 141 is used for refracting the optical signal to change the transmission direction of optical signal, and the produced infrared signal of the piece of awaiting measuring itself also can pass through refraction piece 141. Optionally, the refracting element 141 is a spectroscope, and the spectroscope can generate a refraction effect on an optical signal passing through the spectroscope itself, so as to meet the requirement of the dual-probe optical measurement and control mechanism on the refracting element 141, and specifically, the spectroscope includes a spectroscopic plane mirror and a spectroscopic prism. Of course, the refraction element 141 may also be another element capable of generating a refraction effect on the optical signal, and the embodiment is not particularly limited.

Furthermore, the first optical element 2 and the second optical element 3 are both provided with a lens 4, and the optical signal can pass through the lens 4, and then the lens 4 in the first optical element 2 can disperse the optical signal transmitted by the first single-core optical fiber into parallel light, and the lens 4 in the second optical element 3 can focus the optical signal transmitted by the probe body 1 into the second single-core optical fiber, so as to meet the requirement of the double-probe optical measurement and control mechanism on the optical path of the optical signal, and after the probe body 1 is assembled and calibrated with the first optical element 2 and the second optical element 3, no complicated optical path calibration is needed, and the use is simple and convenient. Optionally, the first optical element 2 and the second optical element 3 are detachably connected to the probe body 1, so that a worker can maintain the first optical element 2 and the second optical element 3, and meanwhile, the lens 4 is convenient to replace, so that the requirement of the dual-probe optical measurement and control mechanism on the lens 4 is met.

Further, the dual-probe optical measurement and control mechanism further comprises a connecting piece 5, and the connecting piece 5 is connected with the probe body 1 and external equipment, so that the dual-probe optical measurement and control mechanism is fixed on the external equipment, and the requirement on the position of the dual-probe optical measurement and control mechanism during measurement is met. Specifically, the outside of the probe body 1 of the connecting piece 5 is provided with an external thread, the connecting piece 5 is provided with an internal thread hole, and the external thread is in threaded connection with the internal thread hole, so that the probe body 1 is fixed on the connecting piece 5, and the connecting piece 5 is fixedly installed on external equipment again, thereby fixing the dual-probe optical measurement and control mechanism on the external equipment. Wherein, the internal thread hole is communicated with the third channel 13, and the axial direction of the internal thread hole is the same as the axial direction of the third channel 13. Optionally, the external apparatus is an MOCVD apparatus. Of course, the external device may also be other devices that can use a dual-probe optical measurement and control mechanism, and this embodiment is not particularly limited.

Furthermore, the included angle range of the first optical element 2 and the second optical element 3 is 0-180 degrees, and then the dual-probe optical measurement and control mechanism can be suitable for different types of external equipment. Optionally, the first optical train element 2 is perpendicular to the second optical train element 3, and then the first single-core optical fiber jumper and the second single-core optical fiber jumper are connected into the dual-probe optical measurement and control mechanism from two directions, so that the first single-core optical fiber jumper and the second single-core optical fiber jumper can pass through the glove box from two directions.

Example two

The embodiment further provides a dual-probe optical measurement and control mechanism, and the dual-probe optical measurement and control mechanism is also used for measuring the light reflectivity of the to-be-measured piece and the temperature of the to-be-measured piece.

The dual-probe optical measurement and control mechanism provided by the embodiment is basically the same as the dual-probe optical measurement and control mechanism in the first embodiment, except that, as shown in fig. 3 to 4, the first optical machine member 2 is parallel to the second optical machine member 3, and then the first single-core optical fiber jumper and the second single-core optical fiber jumper are connected to the dual-probe optical measurement and control mechanism from one direction, so that the first single-core optical fiber jumper and the second single-core optical fiber jumper can pass through the glove box from a single direction. Further, the probe body 1 further comprises a reflection piece 15, the reflection piece 15 is arranged in the first channel 11 and/or the second channel 12 and/or the third channel 13, and the reflection piece 15 is used for reflecting the optical signals, so that the change of the propagation direction of the optical signals in the first channel 11 and/or the second channel 12 and/or the third channel 13 is realized, and the propagation requirement of the dual-probe optical measurement and control mechanism on the optical signals is met. Optionally, the reflector 15 is a flat mirror.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. The utility model provides a two probe optics measurement and control mechanism for measure the light reflectivity of a piece and the temperature of a piece that awaits measuring, its characterized in that, two probe optics measurement and control mechanism includes:

a probe body (1);

the probe comprises a first optical element (2), one end of the first optical element (2) is connected to the probe body (1), and the other end of the first optical element (2) is connected with a first single-core optical fiber jumper; the first optical element (2) is used for receiving the optical signal transmitted by the first single-core optical fiber jumper and transmitting the optical signal to the probe body (1); the optical signal in the probe body (1) can be transmitted to the piece to be detected, and the optical signal can be reflected back to the probe body (1) by the piece to be detected;

one end of the second optical element (3) is connected to the probe body (1), and the other end of the second optical element (3) is connected with a second single-core optical fiber jumper; the second optical mechanism (3) is used for receiving the optical signal transmitted by the probe body (1) and transmitting the optical signal to the second single-core optical fiber jumper.

2. The dual probe optical measurement and control mechanism according to claim 1, characterized in that the probe body (1) has inside a first channel (11), a second channel (12), a third channel (13) and a housing cavity (14); one end of the first channel (11), one end of the second channel (12) and one end of the third channel (13) are communicated with the accommodating cavity (14); the other end of the first channel (11) is provided with the first optical element (2), and the other end of the second channel (12) is provided with the second optical element (3); the other end of the third channel (13) is opposite to the piece to be detected.

3. The dual probe optical measurement and control mechanism according to claim 2, wherein a refraction element (141) is disposed in the accommodating cavity (14), and the refraction element (141) is used for refracting the optical signal.

4. The dual probe optical measurement and control mechanism according to claim 3, wherein the refractive element (141) is a beam splitter.

5. Dual probe optical measurement control mechanism according to claim 2, characterized in that the probe body (1) further comprises a reflector (15), the reflector (15) being provided within the first channel (11) and/or the second channel (12) and/or the third channel (13); the reflecting member (15) is used for reflecting the optical signal.

6. Dual probe optical metrology mechanism according to claim 1, characterized in that a lens (4) is provided in both the first optical machine part (2) and the second optical machine part (3), the optical signal being able to pass through the lens (4).

7. Dual probe optical metrology mechanism according to claim 1 characterized in that the first optical train (2) and the second optical train (3) are both detachably connected to the probe body (1).

8. The dual-probe optical measurement and control mechanism according to claim 1, further comprising a connector (5), wherein the connector (5) connects the probe body (1) with an external device.

9. The dual probe optical measurement and control mechanism of claim 1, wherein the single core optical fiber jumpers comprise single core single mode jumpers and single core multi-mode jumpers.

10. The dual probe optical metrology mechanism of claim 1 wherein the angle between the first optical train (2) and the second optical train (3) is in the range of 0 to 180 °.