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CN216846069U - 0.01 mu m high-precision displacement sensor easy to assemble - Google Patents

0.01 mu m high-precision displacement sensor easy to assemble Download PDF

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Publication number
CN216846069U
CN216846069U CN202121176383.XU CN202121176383U CN216846069U CN 216846069 U CN216846069 U CN 216846069U CN 202121176383 U CN202121176383 U CN 202121176383U CN 216846069 U CN216846069 U CN 216846069U
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Prior art keywords
polar plate
electric capacity
plate
seat
plate seat
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CN202121176383.XU
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Chinese (zh)
Inventor
张华建
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Sani Precision Instrument Shanghai Co ltd
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Sani Precision Instrument Shanghai Co ltd
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Abstract

The utility model provides a 0.01 mu m high accuracy displacement sensor of easily assembling, decide polar plate and electric capacity polar plate seat including electric capacity, electric capacity polar plate seat is the cuboid of circle in the foreign side that is formed by two huff structure equipment, be provided with 3 semicircular mounting grooves along the length direction interval on the interior circular wall of electric capacity polar plate seat, the mounting groove is greater than the interior circle radius of electric capacity polar plate seat with the coaxial and the radius of mounting groove of circle in electric capacity polar plate seat, each inlay in the mounting groove and adorn a rubber band, the polar plate is decided to electric capacity of installation between two rubber bands every adjacent, the polar plate is decided to electric capacity is a cylinder section of thick bamboo, two the electric capacity decides the polar plate coaxial with the interior circle of electric capacity polar plate seat. The utility model provides an electric capacity polar plate seat is open structure, and electric capacity is decided polar plate installation adjustment and is very convenient, ensures the axiality of polar plate is decided to two electric capacities forcefully to improve the linearity of sensor by a wide margin.

Description

0.01 mu m high-precision displacement sensor easy to assemble
Technical Field
The utility model belongs to the relative displacement volume sensor field of applications such as high accuracy measurement displacement, degree of depth, concretely relates to 0.01 mu m high accuracy displacement sensor of easily assembling.
Background
At present, a fixed polar plate of a 0.01 mu m high-precision displacement sensor is fixed on a polar plate seat through a rubber ring, the polar plate seat is a cuboid with a middle cylindrical cavity, and three inner cavity circular grooves which are used for installing the rubber ring and have the diameter larger than the inner diameter of the inner cavity are arranged on the inner side of the polar plate seat. The assembling method of the 0.01 mu m high-precision displacement sensor mainly comprises the following three steps:
the first step is as follows: clamping the rubber ring by using tweezers, extending into an inner cavity circular groove in the cylindrical cavity, and sequentially installing the three rubber rings;
the second step is that: sequentially placing two fixed polar plates into a cylindrical cavity of a polar plate seat by using tweezers, and fixing the two fixed polar plates by using three rubber rings;
the third step: and adjusting the coaxiality of the two fixed polar plates.
Two decide polar plate and fix in the cylinder intracavity of polar plate seat through three rubber ring, have following shortcoming: a. the installation quality of the rubber ring is difficult to ensure; b. the coaxiality of the two fixed polar plates is difficult to adjust to the best; c. the fixed polar plate is clamped by tweezers and is arranged in the cylindrical cavity, which wastes time and labor and has poor installation effect.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a 0.01 mu m high accuracy displacement sensor of easily assembling, it is very convenient to decide the polar plate installation adjustment, thereby ensures two axialities of deciding the polar plate effectively and improves the linearity of sensor by a wide margin.
In order to solve the technical problem, the embodiment of the utility model provides a 0.01 mu m high accuracy displacement sensor of easily assembling, decide polar plate and electric capacity polar plate seat including electric capacity, the electric capacity polar plate seat is the cuboid of circle in the foreign side that is formed by two huff structure equipment, be provided with 3 semicircular mounting grooves along the length direction interval on the interior circular wall of electric capacity polar plate seat, the mounting groove is greater than the interior radius of circle of electric capacity polar plate seat with the coaxial and the radius of mounting groove of circle in electric capacity polar plate seat, each inlay in the mounting groove and adorn a rubber band, and electric capacity is decided polar plate to installation between every two adjacent rubber bands, electric capacity is decided polar plate and is a cylinder, two electric capacity is decided polar plate and electric capacity polar plate seat's interior circle coaxial.
The easily-assembled 0.01-micrometer high-precision displacement sensor further comprises a capacitor movable polar plate, a measuring rod and a spring, wherein the right side of the capacitor polar plate seat is connected with a spring mounting seat, a circular spring mounting cavity is formed in the spring mounting seat, the spring mounting cavity is communicated with and coaxial with the semicircular groove, the capacitor movable polar plate is coaxially and slidably arranged on the inner side of the capacitor fixed polar plate, the right end of the capacitor movable polar plate is connected with the measuring rod in an insulated mode, the measuring rod sequentially penetrates through the semicircular groove and the spring mounting cavity rightwards and then extends out, and the spring is mounted in the spring mounting cavity and sleeved on the outer side of the measuring rod;
the outer side of the capacitor polar plate seat is provided with a printed circuit board, and the capacitor fixed polar plate, the capacitor movable polar plate and the measuring rod are all electrically connected with the printed circuit board.
The printed circuit board is welded with elastic probes, and the two capacitor fixed polar plates are in contact with the elastic probes. And the capacitance movable polar plate and the measuring rod are respectively provided with a lead wire which is welded with the printed circuit board.
Preferably, the inner radius of the capacitor fixed plate is R, and the length of the capacitor fixed plate is L; the outer radius of the capacitor movable polar plate is r, and the length of the capacitor movable polar plate is L.
Preferably, the thickness of the rubber ring is 0.5 mm.
The capacitance movable polar plate is a cylindrical tube, a disc is arranged at the left end of the measuring rod and fixedly connected with the right end of the capacitance movable polar plate through a nylon screw, and an insulating layer is arranged between the disc and the capacitance movable polar plate.
The utility model discloses an above-mentioned technical scheme's beneficial effect as follows: the utility model provides an electric capacity polar plate seat is open structure, and electric capacity is decided polar plate installation adjustment and is very convenient, ensures the axiality of polar plate is decided to two electric capacities forcefully to improve the linearity of sensor by a wide margin.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is an enlarged view of a front view of the capacitor plate holder of the present invention;
fig. 3 is a cross-sectional view taken along line a-a in fig. 2.
Description of reference numerals:
1. a capacitor fixed pole plate; 2. a capacitor movable plate; 3. a capacitor plate base; 31. mounting grooves; 4. a measuring rod; 5. a spring; 6. a rubber ring; 7. a spring mount; 8. a printed circuit board.
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, an embodiment of the present invention provides an easily assembled 0.01 μm high-precision displacement sensor, which includes a capacitor fixed plate 1, a capacitor movable plate 2, a capacitor plate seat 3, a measuring rod 4 and a spring 5.
As shown in fig. 2 and fig. 3, the capacitor plate holder 3 is a rectangular solid with an outer square and an inner circle assembled by two huff structures, 3 semicircular mounting grooves 31 are formed in the inner circular wall of the capacitor plate holder 3 at intervals along the length direction, the mounting grooves 31 are coaxial with the inner circle of the capacitor plate holder 3, the radius of the mounting grooves 31 is larger than the radius of the inner circle of the capacitor plate holder 3, a rubber ring 6 with the thickness of 0.5mm is embedded in each mounting groove 31, a capacitor fixed plate 1 is installed between every two adjacent rubber rings 6, the capacitor fixed plate 1 is a cylindrical tube, and the two capacitor fixed plates 1 are coaxial with the inner circle of the capacitor plate holder 3.
The right side of electric capacity polar plate seat 3 is connected with spring mount pad 7, the circular shape spring installation cavity has been seted up to spring mount pad 7's inside, the spring installation cavity communicates and is coaxial with semicircular groove 31, electric capacity moves polar plate 2 and is a cylinder section of thick bamboo, electric capacity moves polar plate 2 and is coaxial smooth locate electric capacity and decide polar plate 1 inboard, preferred, electric capacity decides the inner radius of polar plate 1 and is R, and electric capacity moves the outer radius of polar plate 2 and is R, and electric capacity decides polar plate 1 and electric capacity and moves the length of polar plate 2 and be L.
The right end of the capacitor movable polar plate 2 is connected with a measuring rod 4 in an insulating mode, the measuring rod 4 penetrates through the semicircular groove 31 and the spring installation cavity rightwards in sequence and then extends out, and the spring 5 is installed in the spring installation cavity and sleeved on the outer side of the measuring rod 4.
The outer side of the capacitor plate seat 3 is provided with a printed circuit board 8, and the capacitor fixed plate 1, the capacitor movable plate 2 and the measuring rod 4 are all electrically connected with the printed circuit board 8.
And the printed circuit board 8 is welded with an elastic probe, and the two capacitance fixed polar plates 1 are in contact connection with the elastic probe. And the capacitance movable polar plate 2 and the measuring rod 4 are respectively provided with a lead wire which is welded with the printed circuit board 8.
The utility model discloses a theory of operation does:
(1) when the measuring rod is not stressed, the measuring rod enables the capacitance movable polar plate to lean against the rightmost side under the action of the spring, and at the moment, the capacitance difference of two capacitors formed by one shared capacitance movable polar plate and two capacitance fixed polar plates is called as initial capacitance C0
(2) Under the action of external thrust, the measuring rod moves to the right, and if the measuring rod moves to the right for a certain x value, at the moment, the capacitance difference of two capacitors formed by a shared capacitance movable polar plate and two capacitance fixed polar plates is called as a measured capacitance C1Then, it can be inferred that:
C0-C1=4πεx/ln(R/r);
it can be seen that the variation C of the capacitance difference0-C1Proportional to the amount of displacement x.
The utility model discloses in, the equipment of polar plate is decided to electric capacity mainly divide into following four steps:
the first step is as follows: clamping the rubber ring by using tweezers and directly embedding the rubber ring into the mounting groove of the capacitor plate seat, wherein the three rubber rings are sequentially mounted;
the second step is that: sequentially and directly installing the two capacitance fixed pole plates between the rubber rings by using tweezers;
the third step: adjusting the coaxiality of the two capacitor fixed pole plates;
the fourth step: and fixing the capacitor plate seat.
The utility model provides an electric capacity polar plate seat is open structure, and electric capacity is decided polar plate installation and adjustment and is very convenient, ensures the axiality of two electric capacities surely polar plate powerfully to improve the linearity of sensor by a wide margin.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims (6)

1. The utility model provides an easily 0.01 mu m high accuracy displacement sensor who assembles, its characterized in that, decides polar plate and electric capacity polar plate seat including electric capacity, electric capacity polar plate seat is the cuboid of circle in the foreign side that is formed by two huff structure equipment, be provided with 3 semicircular mounting grooves along the length direction interval on the interior circular wall of electric capacity polar plate seat, the mounting groove is coaxial with the interior circle of electric capacity polar plate seat and the radius of mounting groove is greater than the interior circle radius of electric capacity polar plate seat, each inlay the dress in the mounting groove and adorn a rubber band, the polar plate is decided to electric capacity of installation between every two adjacent rubber bands, the polar plate is decided to electric capacity is the cylinder, two the polar plate is decided to electric capacity is coaxial with the interior circle of electric capacity polar plate seat.
2. The easy-to-assemble 0.01 μm high-precision displacement sensor according to claim 1, further comprising a movable capacitive plate, a measuring rod and a spring, wherein the right side of the movable capacitive plate is connected with a spring mounting seat, a circular spring mounting cavity is formed in the spring mounting seat, the spring mounting cavity is communicated with and coaxial with the semicircular groove, the movable capacitive plate is coaxially and slidably arranged on the inner side of the fixed capacitive plate, the right end of the movable capacitive plate is connected with the measuring rod in an insulated manner, the measuring rod sequentially penetrates through the semicircular groove and the spring mounting cavity to the right and then extends out, and the spring is mounted in the spring mounting cavity and sleeved on the outer side of the measuring rod;
the outer side of the capacitor polar plate seat is provided with a printed circuit board, and the capacitor fixed polar plate, the capacitor movable polar plate and the measuring rod are all electrically connected with the printed circuit board.
3. The easily assembled 0.01 μm high precision displacement sensor of claim 2, wherein the printed circuit board has a spring probe soldered thereon, and the two capacitor plates are in contact with the spring probe.
4. The easily assembled 0.01 μm high precision displacement sensor of claim 2, wherein the capacitive movable plate and the measuring rod are provided with leads soldered to a printed circuit board.
5. An easily assembled 0.01 μm high precision displacement sensor according to claim 1, wherein the thickness of the rubber band is 0.5 mm.
6. The easily assembled 0.01 μm high precision displacement transducer according to claim 2, wherein the capacitance movable plate is a cylinder, the left end of the measuring rod is provided with a disc, the disc is fixedly connected with the right end of the capacitance movable plate through a nylon screw, and an insulating layer is arranged between the disc and the capacitance movable plate.
CN202121176383.XU 2021-05-28 2021-05-28 0.01 mu m high-precision displacement sensor easy to assemble Active CN216846069U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121176383.XU CN216846069U (en) 2021-05-28 2021-05-28 0.01 mu m high-precision displacement sensor easy to assemble

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121176383.XU CN216846069U (en) 2021-05-28 2021-05-28 0.01 mu m high-precision displacement sensor easy to assemble

Publications (1)

Publication Number Publication Date
CN216846069U true CN216846069U (en) 2022-06-28

Family

ID=82082173

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121176383.XU Active CN216846069U (en) 2021-05-28 2021-05-28 0.01 mu m high-precision displacement sensor easy to assemble

Country Status (1)

Country Link
CN (1) CN216846069U (en)

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