CN202631568U - Micro-monitoring type optional area atomic force microimaging device - Google Patents

Abstract

The utility model discloses a micro-monitoring type atomic force micro-imaging device with an optional area. The method of combining optical microscopic monitoring with atomic force microscope (AFM) microimaging and combining AFM scanner with two-dimensional stepping micro-stage is used to realize microscopic monitoring of AFM scanning area and AFM imaging of optional area. It has an AFM probe consisting of a laser, a semi-transparent and half-reflecting prism, a microprobe, a position sensitive element, a sample, a sample stage, a scanner, a microscope objective lens, a CCD, a two-dimensional stepping and micro-moving stage, and a front AFM imaging and control system composed of amplifier, XY scanning and Z feedback control unit, XYZ high voltage amplification module, step control module, video acquisition module, computer and hardware interface, etc. The utility model has the advantages of realizing the real-time monitoring and selection of the micro-nano sample scanning area, monitoring the adjustment and alignment of the optical path and the approaching process of the sample and the micro-probe, and overcoming the randomness and blindness of the conventional AFM technology in these aspects. and limitations.

Description

A microscopic monitoring type atomic force microscopy imaging device with optional area

technical field

The utility model relates to a micro-monitoring type atomic force micro-imaging device with an optional area.

Background technique

Micro-nano technology is a high-tech field that has developed rapidly in the world in recent years. Developed countries such as the United States, Europe, and Japan, as well as my country, have included micro-nano technology as a priority frontier technology field in the national science and technology development strategy in the 21st century. The scanning probe microscope (SPM) family, represented by scanning tunneling microscope (STM) and atomic force microscope (AFM), is a widely used micro-nano detection technology and instrument in the field of micro-nano technology, and is an important part of the development of micro-nano technology. one of the bases. Among them, AFM is not limited by the conductivity (conductor, semiconductor and insulator), magnetism (magnet and non-magnet) and material state (solid, colloid and liquid) of micro-nano samples, so it is widely used in micro-nano technology and its branches. The research and application of nanotechnology are more extensive, which has played an important role in promoting the development of science and technology, especially the development of micro-nano technology.

It should be pointed out that most AFM technologies and instruments at home and abroad (hereinafter also referred to as conventional or ordinary AFM), although their scanning detection accuracy can reach the nanometer level, there are also complex operations, strict maintenance requirements, and selection of scanning areas. Randomness and blindness, limitations in microscopic imaging performance and other shortcomings. For example, since the size of the microcantilever of AFM is very small, the total length is generally 100 μm or 200 μm, and the size of the tip of the microcantilever is generally on the order of microns. The tip of the micro-cantilever is aligned, and the quality of adjustments such as the focus and alignment of the laser spot directly affects the quality of AFM scanning imaging; similarly, in the absence of microscopic monitoring, AFM can only randomly use the micro-cantilever ( Microprobe) scans and images the surface area of the sample facing the microprobe, so there is randomness and blindness; in addition, it is impossible to perform selection and AFM scanning imaging on the surface area of the sample of interest. Therefore, further development and innovation are needed in the principles, methods and technical performance of AFM.

The method of combining optical microscopic monitoring with atomic force microscope (AFM) microscopic imaging, and the method of combining AFM scanner with two-dimensional stepping and micro-moving stage can realize real-time monitoring and selection of scanning areas of micro-nano samples, and The adjustment and alignment process of the laser beam and the AFM microcantilever (integrated with the microprobe) can be monitored, and at the same time, the micro-nano approach process between the sample and the AFM microcantilever (microprobe) can be effectively monitored, which overcomes the conventional The randomness, blindness and limitations of AFM in these aspects are necessary for the realization of microscopic monitoring of samples, optional areas (optional areas in the field of view from micron to centimeter level), large-scale (micron-level scanning range and adjacent scanning image stitching) ), high-resolution (nanoscale) atomic force microscopy imaging provides a new technical method.

Contents of the invention

The purpose of the utility model is to overcome the randomness, blindness and limitations of the conventional AFM in the monitoring and selection of the sample scanning area, the alignment of the light spot and the micro-cantilever, the monitoring of the approaching process of the sample and the micro-probe, etc., and provide a microscope A monitoring type optional area atomic force microscopy imaging device.

The micro-monitoring type optional atomic force microscopy imaging device includes a micro-monitoring type optional area AFM probe, a preamplifier, an XY scanning and Z feedback control unit, an XYZ high-voltage amplification module, a step control module, a video acquisition module, a computer and hardware Interface; the preamplifier is connected to the laser and position sensitive components, and is connected to the XY scanning and Z feedback control unit at the same time. The XY scanning and Z feedback control unit is connected to the XYZ high-voltage amplification module and the computer and hardware interface. It is connected with the stepper motor, computer and hardware interface, and the two ends of the video acquisition module are respectively connected with CCD, computer and hardware interface.

The microscopic monitoring type optional area AFM probe includes a laser, a vertical adjustment screw, a horizontal adjustment screw, a semi-transparent and half-reflective prism, a microprobe, a fixing screw, a mounting block, a position sensitive element, a sample, a sample stage, a scanner, Microscopic objective lens, adapter tube, lens tube, CCD, assembly seat, monitoring hole, backing plate, two-dimensional stepping and micro-moving stage, screw mechanism, stepping motor, coarse adjustment knob, fine adjustment knob, guide rail, guide rail seat, Columns, beams, wedges, ribs, and bases; the laser is adjusted and fixed on the mounting block by the vertical adjustment screw and the horizontal adjustment screw, and the position sensitive element is fixed on the mounting block by fixing screws, and the mounting block and the assembly seat are fixed together. The semi-transparent and semi-reflective prism is glued and fixed at the lower end of the assembly seat, and there is a monitoring hole in the center of the assembly seat. , CCD are connected in sequence, the connecting tube is fixed on the beam, the beam is fixed on the column through the wedge, the column is installed on the base through the reinforcing rib, the sample (16) is installed on the sample stage of the scanner, and the scanner passes through the backing plate It is installed on the two-dimensional stepping and micro-moving stage, and the two-dimensional stepping and micro-moving stage is installed on the base.

The advantages and innovations of the utility model are: it can effectively realize the real-time monitoring and selection of the micro-nano sample scanning area, and can monitor the adjustment and alignment process of the laser beam and the AFM micro-cantilever. At the same time, it can effectively monitor The micro-nano approach process between the sample and the AFM micro-cantilever (micro-probe) overcomes the randomness, blindness and limitations of the conventional AFM technology in these aspects, and realizes the microscopic monitoring of the sample, the optional area (micrometer to centimeter-level visual field) Field optional area), large-scale (micron-scale scanning range and adjacent scanning image stitching), high-resolution (nanoscale) atomic force microscopy imaging provides a new technical method.

Description of drawings

Fig. 1 is a schematic structural diagram of an atomic force microscopic imaging device of a micromonitoring type optional area;

Fig. 2 is a schematic diagram of a microscopic monitoring type optional area AFM probe of the present invention;

In the figure: AFM probe 1, preamplifier 2, XY scanning and Z feedback control unit 3, XYZ high voltage amplification module 4, step control module 5, video acquisition module 6, computer and hardware interface 7; including laser 8, vertical adjustment Screw rod 9, horizontal adjustment screw rod 10, semi-transparent and semi-reflective prism 11, microprobe 12, fixing screw 13, mounting block 14, position sensitive element 15, sample 16, sample stage 17, scanner 18, microscope objective lens 19, connector Barrel 20, lens barrel 21, CCD22, assembly seat 23, monitoring hole 24, backing plate 25, two-dimensional stepping and micro-moving table 26, lead screw mechanism 27, stepping motor 28, coarse adjustment knob 29, fine adjustment knob 30, Guide rail 31, guide rail seat 32, column 33, beam 34, wedge 35, reinforcing rib 36, base 37.

Detailed ways

Micro-monitoring type optional area AFM imaging method: using the method of combining optical micro-monitoring with AFM micro-imaging, and combining the AFM scanner with a two-dimensional stepping The transflective prism, optical microscope objective lens and CCD are used for real-time microscopic monitoring of the atomic force microscope scanning area of the sample; at the same time, the adjustment and alignment process of the laser beam on the atomic force microscope microprobe is monitored, so as to effectively Improve the operational performance and scanning imaging quality of the atomic force microscope; in addition, monitor the micro-nano approach process between the sample and the atomic force microscope microprobe, thereby improving the efficiency and reliability of the micro-nano approach operation; introduce a two-dimensional stepping and micro-moving stage, Under microscopic monitoring, select the area of the sample surface of interest, and cooperate with the atomic force microscope scanner to realize atomic force microscopic imaging of any area on the sample surface; on this basis, further realize the microscopic monitoring of the sample, from microns to centimeters Large-scale, nanometer-scale high-resolution AFM imaging can be obtained by splicing the micron-scale scanning range and adjacent scanning images for an optional area in the field of view.

As shown in Figure 1, the micro-monitoring type optional area atomic force microscopy imaging device includes a micro-monitoring type optional area AFM probe 1, a preamplifier 2, an XY scanning and Z feedback control unit 3, an XYZ high-voltage amplification module 4, a stepper Control module 5, video capture module 6, computer and hardware interface 7; preamplifier 2 is connected with laser 8 and position sensitive element 15, is connected with XY scan and Z feedback control unit 3 simultaneously, XY scan and Z feedback control unit 3 and XYZ high-voltage amplifying module 4 is connected with computer and hardware interface 7, the two ends of step control module 5 are respectively connected with stepper motor 28, computer and hardware interface 7, and the two ends of video acquisition module 6 are respectively connected with CCD22, computer and hardware interface 7 .

As shown in Figure 2, the microscopic monitoring type optional area AFM probe 1 includes a laser 8, a vertical adjustment screw 9, a horizontal adjustment screw 10, a semi-transparent and half-reflective prism 11, a microprobe 12, a fixing screw 13, and a mounting block 14. Position sensitive element 15, sample 16, sample stage 17, scanner 18, microscope objective lens 19, adapter tube 20, lens barrel 21, CCD22, assembly seat 23, monitoring hole 24, backing plate 25, two-dimensional stepping micro Moving table 26, lead screw mechanism 27, stepper motor 28, coarse adjustment knob 29, fine adjustment knob 30, guide rail 31, guide rail seat 32, column 33, beam 34, wedge 35, rib 36, base 37; laser 8 Adjusted by the vertical adjustment screw 9 and the horizontal adjustment screw 10 and fixed on the installation block 14, the position sensitive element 15 is fixed on the installation block 14 by the fixing screw 13, the installation block 14 and the assembly seat 23 are fixed together, the semi-transparent and half-reflective prism 11 is glued and fixed on the lower end of the assembly seat 23, and the center of the assembly seat 23 has a monitoring hole 24, and the assembly seat 23 is installed on the guide rail 31. By adjusting the coarse adjustment knob 29 and the fine adjustment knob 30 to move vertically up and down, the microscope objective lens 19, connected to Tube 20, lens tube 21, and CCD 22 are connected sequentially. Connecting tube 20 is fixed on beam 34, beam 34 is fixed on column 33 through wedge 35, column is installed on base 37 through rib 36, sample 16 is installed on the scanning On the sample stage 17 of the scanner 18, the scanner 18 is installed on the two-dimensional stepping and micro-moving stage 26 through the backing plate 25, and the two-dimensional stepping and micro-moving stage 26 is installed on the base 37.

AFM probe with optional area for microscopic monitoring, introduces semi-transparent and semi-reflective prism, microscopic objective lens and CCD, etc., to perform real-time microscopic monitoring of the AFM scanning area of the sample, and the video image of microscopic monitoring is input to the computer through the video acquisition module , and displayed on the display. At the same time, a two-dimensional stepping micro-motion control system is introduced. Under the control of the stepping motor, the two-dimensional stepping micro-motion stage is driven by the screw mechanism to move in two dimensions, and at the same time, the scanner and the sample are driven in two directions in the XY plane. Three-dimensional movement, so as to select the sample surface area of interest under microscopic monitoring, and cooperate with the AFM scanner to realize atomic force microscopy imaging of any area on the sample surface. The microscopic monitoring type optional atomic force microscopic imaging method and device of the utility model overcomes the monitoring and selection of the sample scanning area, the adjustment and alignment of the laser beam and the microprobe, the sample and the AFM microprobe in the conventional AFM technology. The randomness, blindness, and limitations of micro-nano approximation have effectively improved the microscopic imaging performance of AFM, and improved the image scanning quality, scanning area, scanning range, and operating efficiency of AFM. Microscopic monitoring, optional area (optional area in the field of view from micron to centimeter level), large range (micron-level scanning range and adjacent scanning image stitching), high-resolution (nano-level) AFM imaging provides new technical method.

Claims (2)

1. but micro-monitoring type constituency atomic force microscopic imaging device, but it is characterized in that comprising micro-monitoring type constituency AFM probe (1), prime amplifier (2), XY scanning and Z feedback control unit (3), XYZ high pressure amplifying (4), stepping control module (5), video acquisition module (6), computing machine and hardware interface (7); Prime amplifier (2) is connected with laser instrument (8) and position sensor (15); Be connected with Z feedback control unit (3) with XY scanning simultaneously; XY scanning and Z feedback control unit (3) and XYZ high pressure amplifying (4) and computing machine and hardware interface (7) are connected; Stepping control module (5) two ends are connected with stepper motor (28), computing machine and hardware interface (7) respectively, and video acquisition module (6) two ends are connected with CCD (22), computing machine and hardware interface (7) respectively.

2. but a kind of micro-monitoring type according to claim 1 constituency atomic force microscopic imaging device, but it is characterized in that described micro-monitoring type constituency AFM probe (1) comprises laser instrument (8), vertical adjusting screw rod (9), horizontal adjustment screw rod (10), semi-transparent semi-reflecting prism (11), microprobe (12), gib screw (13), mounting blocks (14), position sensor (15), sample (16), sample stage (17), scanner (18), microcobjective (19), extend neck (20), lens barrel (21), CCD (22), assembling stand (23), monitoring hole (24), backing plate (25), two-dimentional stepping micropositioner (26), screw mechanism (27), stepper motor (28), coarse adjustment knob (29), fine tuning knob (30), guide rail (31), track base (32), column (33), crossbeam (34), voussoir (35), reinforcement (36), base (37); Laser instrument (8) is regulated and is fixed on the mounting blocks (14) by vertical adjusting screw rod (9) and horizontal adjustment screw rod (10); Position sensor (15) is fixed on the mounting blocks (14) by gib screw (13); Mounting blocks (14) is fixed together with assembling stand (23); Semi-transparent semi-reflecting prism (11) is adhesively fixed and fixes on assembling stand (23) lower end; Assembling stand (23) central authorities have monitoring hole (24), and assembling stand (23) is installed on the guide rail (31), through regulating coarse adjustment knob (29) and fine tuning knob (30) vertical up-or-down movement; Microcobjective (19), extend neck (20), lens barrel (21), CCD (22) are connected in order, extend neck (20) is fixed on the crossbeam (34); Crossbeam (34) is fixed on the column (33) through voussoir (35), and column is installed on the base (37) through reinforcement (36), and sample (16) is installed on the sample stage (17) of scanner (18); Scanner (18) is installed on the two-dimentional stepping micropositioner (26) through backing plate (25), and two-dimentional stepping micropositioner (26) is installed on the base (37).

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