CN201540879U - Lifting position adjusting device - Google Patents
Lifting position adjusting device Download PDFInfo
- Publication number
- CN201540879U CN201540879U CN2009201933848U CN200920193384U CN201540879U CN 201540879 U CN201540879 U CN 201540879U CN 2009201933848 U CN2009201933848 U CN 2009201933848U CN 200920193384 U CN200920193384 U CN 200920193384U CN 201540879 U CN201540879 U CN 201540879U
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- driving mechanism
- lifting position
- guide plate
- adjusting device
- position adjusting
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- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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Abstract
The utility model discloses a lifting position adjusting device, including actuating mechanism, actuating mechanism fixed plate, deflector, integral key shaft, spline housing, catch shaft and catch plate, actuating mechanism with actuating mechanism fixed plate fixed connection, the spline housing install in on the deflector, the integral key shaft one end with actuating mechanism fixed plate fixed connection, the gliding passing of the other end the spline housing and with cavity fixed connection, actuating mechanism's drive shaft with the deflector is connected, catch shaft one end with deflector fixed connection, the other end stretches into the cavity and with catch plate fixed connection, the catch plate is located in the cavity, actuating mechanism fixed plate, deflector and catch plate are parallel to each other. Because the utility model discloses a drive mechanism drive deflector makes straight reciprocating motion to drive the catch plate makes straight reciprocating motion, and simple structure is compact, the cost is lower, occupation space is less and the noise is less in the use.
Description
Technical field
The utility model relates to a kind of power transmitting mechanism, relates more specifically to be used for the device in the cavity is carried out the lifting position adjusting device that lifting position is regulated.
Background technology
The occasion of lifting position adjusting device utilization is very extensive, particularly be applied on the product automation production line, and the design of described lifting position adjusting device often the difference because of application target is different.In existing lifting position adjusting device, mostly be to drive shaft coupling and ball screw work by motor reducer, described ball screw cooperates with the guide rail slide block and then realizes the lifting position adjusting.Yet, described lifting position adjusting device complex structure, cost are higher, and because described shaft coupling, ball screw and guide rail slide block constantly rub in the course of the work, problem such as caused that transmission accuracy is low, noise is big, transmission is unreliable and take up room greatly.
In addition, in semiconductor technology, particularly production processes such as transmission, photoetching mostly need be carried out under vacuum environment.In whole transmission/photoetching process, need on the one hand to keep in the vacuum cavity higher vacuum degree being arranged, promptly be to guarantee that vacuum gas can not be leaked to the external world in the whole process of production; On the other hand the gaseous mass in the described vacuum cavity also there is higher requirement; promptly be to prevent because friction of motion causes the powder of parts granulation to enter in the described vacuum cavity; thereby pollute the gas in the described vacuum cavity, and then have influence on the quality of product.But; described lifting position adjusting device is not considered in the semiconductor technology protection problem to vacuum gas; when therefore being applied to described lifting position adjusting device in the semiconductor technology; cause problems such as the leakage of the vacuum gas in the described vacuum cavity and vacuum pollution easily, thereby cause the production maintenance cost to increase and product quality problem.
Therefore, be necessary to provide a kind of improved lifting position adjusting device to overcome above-mentioned defective.
The utility model content
The purpose of this utility model provides a kind of lifting position adjusting device, and described lifting position adjusting device is simple and compact for structure, cost is lower, transmission is accurate and it is little to take up room, and can also satisfy in the semiconductor technology vacuum requirements.
To achieve these goals, the utility model provides a kind of lifting position adjusting device, be applicable to that the device in the cavity is carried out lifting position to be regulated, described lifting position adjusting device comprises driving mechanism, driving mechanism fixed head, guide plate, splined shaft, spline housing, impeller-hub and slurcam.Described driving mechanism is fixedlyed connected with described driving mechanism fixed head, described spline housing is installed on the described guide plate, one end of described splined shaft is fixedlyed connected with described driving mechanism fixed head, the other end of described splined shaft slides passes described spline housing and fixedlys connected with described cavity, the driving shaft of described driving mechanism is connected with described guide plate, one end of described impeller-hub is fixedlyed connected with described guide plate, the other end of described impeller-hub stretches into described cavity and fixedlys connected with described slurcam, described slurcam is positioned at described cavity, described driving mechanism fixed head, guide plate and slurcam are parallel to each other, the described guide plate of described drive mechanism is done straight reciprocating motion, and described guide plate drives described slurcam and does straight reciprocating motion.
In the utility model one preferred embodiment, described lifting position adjusting device also comprises the splined shaft fixed head, described splined shaft fixed head is fixedlyed connected with described cavity, one end of the splined shaft that passes described spline housing that slides is fixedlyed connected with described splined shaft fixed head, and described splined shaft fixed head is parallel with described guide plate.
Preferably, described lifting position adjusting device also comprises bellows, and described bellows is connected between described guide plate and the cavity, and the two ends of described bellows have sealing ring respectively, and described impeller-hub passes described bellows.The design of adopting so described bellows to match with sealing ring, satisfied in the semiconductor technology guaranteeing the requirement of higher vacuum in the vacuum cavity, effectively avoided the leakage of the vacuum gas in the vacuum cavity, stopped also that simultaneously ambient atmos enters in the described vacuum cavity, thereby kept process environments preferably, and then improved the quality of device.
Preferably, described driving mechanism is cylinder motor or electric cylinder motor, and the driving shaft of described driving mechanism is fixedlyed connected with described guide plate.When described driving mechanism is a cylinder motor, in adjustment process, can avoid damaging the danger of described lifting position adjusting device effectively because of the device overload, and relatively simple for structure, easy control.When described driving mechanism is electric cylinder motor, in adjustment process, because the distance that described electric cylinder motor promotes can be controlled, promptly control described electric cylinder motor and reach purpose, thereby can guarantee higher adjustment stroke precision in arbitrary position adjustments according to the needs of position adjustments.
Alternatively, described driving mechanism is an electro-motor, and the driving shaft of described driving mechanism and described guide plate mesh, thereby can guarantee the accuracy of position adjustments.
Preferably, described splined shaft is a ball spline shaft, and described spline housing is the ball spline cover.Described ball spline cover and ball spline shaft are formed the ball spline pair bearing bigger load and power, and the secondary life-span of described ball spline is long, in light weight, makes described lifting position adjusting device compact more simultaneously.
Preferably, described bellows is a corrugated stainless steel tubing.
Preferably, described driving mechanism fixed head or splined shaft fixed head or cavity are provided with position transducer, and described position transducer detects the position of described slurcam, thereby have guaranteed the precision and the reliable transmission of transmission, have also improved operating efficiency simultaneously.
Compared with prior art, because the utility model adopts the drive mechanism guide plate to do straight reciprocating motion on splined shaft, thereby drive impeller-hub of fixedlying connected and the slurcam that is fixed in described impeller-hub and do straight reciprocating motion with described guide plate, and then reach the purpose of regulating lifting position, simple and compact for structure, cost is lower, it is less to take up room and use in noise less.
By following description also in conjunction with the accompanying drawings, it is more clear that the utility model will become, and these accompanying drawings are used to explain embodiment of the present utility model.
Description of drawings
Fig. 1 is an example structure schematic diagram of lifting position adjusting device of the present utility model.
Fig. 2 is the structural representation of another embodiment of lifting position adjusting device of the present utility model.
Fig. 3 is the structural representation after lifting position adjusting device shown in Figure 2 is turned over turnback.
Fig. 4 is that lifting position adjusting device shown in Figure 2 is turned over the structural representation after turning 90 degrees clockwise.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.As mentioned above, because the utility model adopts the drive mechanism guide plate to do straight reciprocating motion on splined shaft, thereby drive impeller-hub of fixedlying connected and the slurcam that is fixed in described impeller-hub and do straight reciprocating motion with described guide plate, and then reach the purpose of lift adjustment position, simple and compact for structure, cost is lower, it is less to take up room and use in noise less.
Lifting position adjusting device of the present utility model can be applicable to the occasion that do not need vacuum environment and/or gas flow is not limited.The structural representation of one preferred embodiment of the lifting position adjusting device of the present utility model that reference is shown in Figure 1.As shown in the figure, described lifting position adjusting device comprises driving mechanism 10, driving mechanism fixed head 12, guide plate 14, spline housing 16, splined shaft 18, splined shaft fixed head 20, impeller-hub 22, slurcam 24 and position transducer 26.Described driving mechanism 10 is fixedlyed connected with described driving mechanism fixed head 12, described spline housing 16 is installed on the described guide plate 14, described splined shaft fixed head 20 is fixedlyed connected with cavity 28, one end of described splined shaft 18 is fixedlyed connected with described driving mechanism fixed head 12, the other end of described splined shaft 18 slidably passes described spline housing 16 and fixedlys connected with described splined shaft fixed head 20, the driving shaft 30 of described driving mechanism 10 is connected with described guide plate 14, one end of described impeller-hub 22 is fixedlyed connected with described guide plate 14, the other end of described impeller-hub 22 stretches into described cavity 28 and fixedlys connected with described slurcam 24, described position transducer 26 is located on the described driving mechanism fixed head 12, and described position transducer 26 detects the position of described slurcam 24.Described driving mechanism fixed head 12, guide plate 14, splined shaft fixed head 20 and slurcam 24 are parallel to each other, and described driving mechanism 10 drives described guide plate 14 and does straight reciprocating motion, and described guide plate 14 drives described slurcam 24 and does straight reciprocating motion.
Alternatively, in another embodiment of the utility model, an end of described splined shaft 18 slidably passes described spline housing 16 and fixedlys connected with described cavity 28, and described position transducer 26 is located on described splined shaft fixed head 20 or the cavity 28.
In the present embodiment, described driving mechanism 10 is electric cylinder motor, is in particular straight line electricity cylinder motor, and the driving shaft 30 of described driving mechanism 10 is fixedlyed connected with described guide plate 14.Because the distance that described electric cylinder motor promotes can be controlled, promptly control described electric cylinder motor and reach purpose, thereby can guarantee higher adjustment stroke precision in arbitrary position adjustments according to the needs of position adjustments.Alternatively, described driving mechanism 10 is a cylinder motor, is in particular the straight line cylinder motor, and the driving shaft 30 of described driving mechanism 10 is fixedlyed connected with described guide plate 14.In adjustment process, can avoid damaging the danger of described lifting position adjusting device effectively because of the device overload, and relatively simple for structure, easy control.Alternatively, described driving mechanism 10 is an electro-motor, the driving shaft 30 of described driving mechanism 10 and described guide plate 14 engagements.Can guarantee the accuracy of position adjustments like this.Described splined shaft 18 is a ball spline shaft, and described spline housing 16 is the ball spline cover.Described ball spline shaft and ball spline cover are formed the ball spline pair, can bear bigger load and power, and the secondary life-span of described ball spline is long, in light weight, make described lifting position adjusting device compact more simultaneously.
When adopting lifting position adjusting device shown in Figure 1 to carry out the lifting position adjusting, suspension hook is installed to hook up the device that pending lifting position is regulated on described slurcam 24, described driving mechanism 10 drives described guide plate 14 and does straight reciprocating motion along the direction of diagram arrow A, thereby drive an end and do straight reciprocating motion along the direction of diagram arrow A with described guide plate 14 fixedly connected impeller-hubs 22, and then the slurcam 24 that drives the other end be fixedly connected on described impeller-hub 22 does straight reciprocating motion along the direction of diagram arrow A together, and final the realization regulated the lifting position of the vertical direction that is positioned over the device on the described slurcam 24.And do in the process of straight reciprocating motion together in vertical direction at described guide plate 14, impeller-hub 22 and slurcam 24, be located at the position transducer 26 all right positions of detecting described slurcam 24 in real time on the described driving mechanism 10, thereby guaranteed the precision and the reliable transmission of transmission, also improved operating efficiency simultaneously.
With reference to another preferred embodiment of the present utility model shown in Figure 2, the lifting position adjusting device in the present embodiment is mainly used in the semiconductor technology that vacuum degree is had relatively high expectations.As shown in the figure, described lifting position adjusting device also comprises bellows 32, and described bellows 32 is connected between described guide plate 14 and the cavity 28, and the two ends of described bellows 32 are installed on described guide plate 14 and the cavity plate 28 by o shape sealing ring 34 respectively.It should be noted that in the present embodiment described cavity 28 is a vacuum cavity.Adopt the design of bellows 32 to satisfy in the semiconductor technology to guaranteeing the requirement of higher vacuum in the vacuum cavity, effectively avoided the leakage of the vacuum gas in the vacuum cavity, stopped also that simultaneously ambient atmos enters in the described vacuum cavity, thereby kept process environments preferably, and then improved the quality of device.In addition, the shape of o shape sealing ring that adopts in the present embodiment and described bellows 32 and described impeller-hub 22 is complementary, thereby has reached better sealing effectiveness.Therefore, in the semiconductor technology that the lifting position adjusting device in the present embodiment is particularly suitable for vacuum degree is had relatively high expectations.
It should be noted that because the annexation of the miscellaneous part of the lifting position adjusting device in the present embodiment and embodiment shown in Figure 1 are similar, do not giving unnecessary details at this.In addition, the lifting position adjusting device of present embodiment be used for to the device in the vacuum cavity carry out operation principle that lifting position regulates and operating process and embodiment shown in Figure 1 similar, do not repeat them here.
It should be noted that when adopting lifting position adjusting device of the present utility model to carry out the lifting position adjusting, except adopting direction as illustrated in fig. 1 and 2, can also be with lifting position adjusting device Rotate 180 degree shown in Fig. 1 and 2 and 90 degree, shown in Fig. 3 and 4.Fig. 3 is the structural representation of lifting position adjusting device Rotate 180 degree shown in Figure 2, hook needn't be installed on described slurcam 24 this moment just can realize the lifting position of device is regulated; Fig. 4 revolves the structural representation that turn 90 degrees for lifting position adjusting device shown in Figure 2, can install hook this moment on described slurcam 24, do straight reciprocating motion by the described guide plate 14 of described driving mechanism 10 drivings along diagram arrow B directions, the arrow B directions are done straight reciprocating motion and then realization is regulated the lateral attitude of device along illustrating thereby drive described slurcam 24.When described lifting position adjusting device Rotate 180 degree or 90 is spent, realize that the detailed process of lifting position adjusting is similar to the above embodiments, do not giving unnecessary details at this.
Abovely the utility model is described, but the utility model is not limited to the embodiment of above announcement, and should contains various modification, equivalent combinations of carrying out according to essence of the present utility model in conjunction with most preferred embodiment.
Claims (8)
1. lifting position adjusting device, be applicable to that the device in the cavity is carried out lifting position to be regulated, it is characterized in that: described lifting position adjusting device comprises driving mechanism, the driving mechanism fixed head, guide plate, splined shaft, spline housing, impeller-hub and slurcam, described driving mechanism is fixedlyed connected with described driving mechanism fixed head, described spline housing is installed on the described guide plate, one end of described splined shaft is fixedlyed connected with described driving mechanism fixed head, the other end of described splined shaft slides passes described spline housing and fixedlys connected with described cavity, the driving shaft of described driving mechanism is connected with described guide plate, one end of described impeller-hub is fixedlyed connected with described guide plate, the other end of described impeller-hub stretches into described cavity and fixedlys connected with described slurcam, described slurcam is positioned at described cavity, described driving mechanism fixed head, guide plate and slurcam are parallel to each other, the described guide plate of described drive mechanism is done straight reciprocating motion, and described guide plate drives described slurcam and does straight reciprocating motion.
2. lifting position adjusting device as claimed in claim 1, it is characterized in that: also comprise the splined shaft fixed head, described splined shaft fixed head is fixedlyed connected with described cavity, one end of the splined shaft that passes described spline housing that slides is fixedlyed connected with described splined shaft fixed head, and described splined shaft fixed head is parallel with described guide plate.
3. lifting position adjusting device as claimed in claim 1 is characterized in that: also comprise bellows, described bellows is connected between described guide plate and the cavity, and the two ends of described bellows have sealing ring respectively, and described impeller-hub passes described bellows.
4. lifting position adjusting device as claimed in claim 1 is characterized in that: described driving mechanism is cylinder motor or electric cylinder motor, and the driving shaft of described driving mechanism is fixedlyed connected with described guide plate.
5. lifting position adjusting device as claimed in claim 1 is characterized in that: described driving mechanism is an electro-motor, the driving shaft of described driving mechanism and the engagement of described guide plate.
6. lifting position adjusting device as claimed in claim 1 is characterized in that: described splined shaft is a ball spline shaft, and described spline housing is the ball spline cover.
7. lifting position adjusting device as claimed in claim 3 is characterized in that: described bellows is a corrugated stainless steel tubing.
8. lifting position adjusting device as claimed in claim 1 is characterized in that: described driving mechanism fixed head or splined shaft fixed head or cavity are provided with position transducer, and described position transducer detects the position of described slurcam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201933848U CN201540879U (en) | 2009-08-25 | 2009-08-25 | Lifting position adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201933848U CN201540879U (en) | 2009-08-25 | 2009-08-25 | Lifting position adjusting device |
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| Publication Number | Publication Date |
|---|---|
| CN201540879U true CN201540879U (en) | 2010-08-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201933848U Expired - Lifetime CN201540879U (en) | 2009-08-25 | 2009-08-25 | Lifting position adjusting device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102464278A (en) * | 2010-10-29 | 2012-05-23 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Linear driving device and semiconductor processing equipment applying same |
| CN102737954A (en) * | 2011-04-07 | 2012-10-17 | 陈群 | Method and device for reducing electronic component manufacturing tool bodies |
| CN103341789A (en) * | 2013-06-09 | 2013-10-09 | 沈阳机床(集团)有限责任公司 | Sensor position adjusting device for spindle rotation error detection |
| CN103424303A (en) * | 2012-05-22 | 2013-12-04 | 中国科学院物理研究所 | Vacuum precise displacement device |
| CN103613041A (en) * | 2013-11-20 | 2014-03-05 | 贵州航天南海科技有限责任公司 | Lifter |
| CN105571524A (en) * | 2015-12-16 | 2016-05-11 | 贵州航天计量测试技术研究所 | Transmission shaft angle measurement apparatus based on circular grating |
| CN109950070A (en) * | 2019-03-08 | 2019-06-28 | 武汉心浩智能科技有限公司 | A kind of single-power rotates and upgrades device and the coaxial switch with the device |
-
2009
- 2009-08-25 CN CN2009201933848U patent/CN201540879U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102464278A (en) * | 2010-10-29 | 2012-05-23 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Linear driving device and semiconductor processing equipment applying same |
| CN102464278B (en) * | 2010-10-29 | 2014-09-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Linear drive device and semiconductor processing device with linear drive device |
| CN102737954A (en) * | 2011-04-07 | 2012-10-17 | 陈群 | Method and device for reducing electronic component manufacturing tool bodies |
| CN103424303A (en) * | 2012-05-22 | 2013-12-04 | 中国科学院物理研究所 | Vacuum precise displacement device |
| CN103424303B (en) * | 2012-05-22 | 2015-12-02 | 中国科学院物理研究所 | A kind of vacuum precise displacement device |
| CN103341789A (en) * | 2013-06-09 | 2013-10-09 | 沈阳机床(集团)有限责任公司 | Sensor position adjusting device for spindle rotation error detection |
| CN103613041A (en) * | 2013-11-20 | 2014-03-05 | 贵州航天南海科技有限责任公司 | Lifter |
| CN103613041B (en) * | 2013-11-20 | 2016-04-20 | 贵州航天南海科技有限责任公司 | A kind of lifter |
| CN105571524A (en) * | 2015-12-16 | 2016-05-11 | 贵州航天计量测试技术研究所 | Transmission shaft angle measurement apparatus based on circular grating |
| CN105571524B (en) * | 2015-12-16 | 2018-09-07 | 贵州航天计量测试技术研究所 | A kind of transmission shaft angle-measuring equipment based on Circular gratings |
| CN109950070A (en) * | 2019-03-08 | 2019-06-28 | 武汉心浩智能科技有限公司 | A kind of single-power rotates and upgrades device and the coaxial switch with the device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20100804 Effective date of abandoning: 20090825 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20100804 Effective date of abandoning: 20090825 |