CN201399098Y - Plasma micro-beam current generator - Google Patents
Plasma micro-beam current generator Download PDFInfo
- Publication number
- CN201399098Y CN201399098Y CN2008201990935U CN200820199093U CN201399098Y CN 201399098 Y CN201399098 Y CN 201399098Y CN 2008201990935 U CN2008201990935 U CN 2008201990935U CN 200820199093 U CN200820199093 U CN 200820199093U CN 201399098 Y CN201399098 Y CN 201399098Y
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- Prior art keywords
- plasma
- microbeam
- tube
- electrode
- flow
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- Expired - Fee Related
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- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 36
- 239000007789 gas Substances 0.000 claims description 30
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 6
- 230000015556 catabolic process Effects 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 239000000725 suspension Substances 0.000 claims description 4
- 229910052756 noble gas Inorganic materials 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract 1
- 230000000249 desinfective effect Effects 0.000 abstract 1
- 230000001954 sterilising effect Effects 0.000 description 8
- 238000004659 sterilization and disinfection Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010048768 Dermatosis Diseases 0.000 description 1
- 239000013566 allergen Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 230000005495 cold plasma Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 208000017520 skin disease Diseases 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
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- Apparatus For Disinfection Or Sterilisation (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model discloses a novel plasma micro-beam current generator, which comprises a power supply, a gas supply source and a plasma micro-beam current generator main body, and is characterized in that the plasma micro-beam current generator main body comprises one or a plurality of dielectric tubes, and electrodes are respectively arranged inside and outside the dielectric tube and are connected with a radio frequency or high-frequency power supply; a shell is arranged outside the plasma micro-beam current generator, and one or a plurality of spouts are arranged at one side of the shell;and a gas inlet connecting port, a gas flow control valve switch and a power supply switch are arranged at the other side of the shell. When flowing through the clearance between electrodes inside and outside the dielectric tube, gas in gas supply source is broke down and ionized to form plasma to jet out of the shell, and the jetted plasma beam current can be used for cleaning, disinfecting andsterilizing various surfaces.
Description
[technical field]
This utility model relates to a kind of novel plasma microbeam flow-generator, especially relate to one with the excitation of high frequency or radio-frequency power supply, be respectively equipped with metal electrode inside and outside one or more insulated dielectric tube, noble gas breakdown ionization when flowing through between the insulated dielectric tube internal and external electrode forms the equipment that the plasma microbeam flows to ejection outside the housing.
[background technology]
The atmospheric plasma body technique is at the new technique that just develops rapidly in recent years, also has been used widely, and it can be applicable to: (1) surface clean (for example biochemical pollution of clean surface, surperficial organic contamination).(2) modification of material surface.(3) surface sterilization and sterilization or the like.
Traditionally, atmospheric plasma is because needed power volume is bigger, price is more expensive, the plasma temperature that is produced is more high, be not suitable for being sterilized in the allergen surface, especially be not suitable for the sterilization that carries out disinfection of skin surface to the people, thereby limited the application in skin surface sterilization and the treatment dermatosis.
[utility model content]
The purpose of this utility model is to provide a kind of novel plasma microbeam flow-generator, can be used for various sensing surfaces, comprises the sterilization and the sterilization of people's skin surface.
In order to achieve the above object, this utility model provides a kind of novel plasma microbeam flow-generator, comprise a power supply, an air supply source, plasma microbeam flow-generator main body, it is characterized in that: plasma microbeam flow-generator main body comprises one or more insulated dielectric tube, inside and outside this insulated dielectric tube, be respectively equipped with electrode, this electrode is connected with a radio frequency or high frequency electric source, be provided with a housing outside this plasma microbeam stream, one side of this housing is provided with one or more spouts, side is provided with the air inlet connector in addition, the gas flow control valve switch, gas in the air supply source is when the gap of flowing through between the insulated dielectric tube internal and external electrode, and breakdown ionization forms plasma and sprays outside housing.
Described a kind of plasma microbeam flow-generator, it is characterized in that: this plasma microbeam flow-generator main body is coated by a housing, be provided with one or more spouts in this housing one side, side is provided with air inlet connector, gas flow control valve switch and power control switch in addition.
Described a kind of plasma microbeam flow-generator, it is characterized in that: the power work frequency can be in radio-frequency region or at high-frequency range, the power span of power supply is in 100W, power supply can be installed in the housing, also can place outside the housing to be connected with plasma microbeam generator electrode by leader cable.
Described a kind of plasma microbeam flow-generator, it is characterized in that: when plasma microbeam flow-generator adopts the high frequency electric source power supply, plasma microbeam stream main body is to adopt one or more insulated dielectric tube, be coated on two metal ring external electrodes that this insulated dielectric tube outside is provided with certain intervals and is connected with high frequency electric source respectively, and one is insulated metal tube or the metallic rod suspension electrode that medium tube coats.
Described a kind of plasma microbeam flow-generator, it is characterized in that: when plasma microbeam flow-generator adopts the radio-frequency power supply power supply, plasma microbeam stream main body is to adopt one or more insulated dielectric tube, be coated on a metal ring external electrode of this insulated dielectric tube outside, and being insulated metal tube or the interior electrode of metallic rod that medium tube coats, internal and external electrode is connected with the outfan of radio-frequency power supply respectively.
Described a kind of plasma microbeam flow-generator, it is characterized in that: the metal inner electrode and the insulated dielectric tube that are insulated the medium tube coating are to adopt the insulant connector to be fixed together, and make metal inner electrode be in the center of medium tube, when metal inner electrode is straight-bar, be provided with certain clearance between the interior warp of its outer warp and medium tube, working gas is to pass from the gap; When metal inner electrode adopted metal tube, its metal tube was outer through working gas is to pass from metal tube through closely cooperating with insulated dielectric tube interior, and the end by medium tube.
Described plasma microbeam flow-generator, it is characterized in that: the gas of air supply source connects by gas conduit, gas flow gauge tap and plasma microbeam flow-generator main body, when gas was flowed through between the insulated dielectric tube internal and external electrode, breakdown ionization formed plasma and sprays outside housing.
Described plasma microbeam flow-generator is characterized in that: the air supply source gas supplied is argon or helium.
This practical plasma microbeam flow-generator, its advantage is: 1, plasma line temperature is low.2, this equipment discharge power is little.3, discharge is to adopt argon or helium.4, this plasma line can burned skin.
This utility model is under atmospheric pressure to produce low temperature cold plasma microbeam stream device, main uses is: utilize the surface of electronics, photon, active particle and radical pair skin in the plasma microbeam stream to carry out surface sterilizing and sterilization, and can not bring secondary pollution.
[description of drawings]
Below in conjunction with accompanying drawing this utility model is further described, wherein:
Fig. 1 is this utility model embodiment plasma microbeam flow-generator structure cross-sectional schematic.
Fig. 2 .1 and Fig. 2 .2 are that this utility model embodiment plasma microbeam flow-generator spout is rectified the face structural representation.
Fig. 3 is this utility model embodiment 1 plasma microbeam flow-generator main body sectional structure sketch map.
Fig. 4 is this utility model embodiment 2 plasma microbeam flow-generator main body sectional structure sketch maps.
Fig. 5 is this utility model embodiment 3 plasma microbeam flow-generator main body sectional structure sketch maps.
Fig. 6 is this utility model embodiment 4 plasma microbeam flow-generator main body sectional structure sketch maps.
The specific embodiment
With reference to the accompanying drawings 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6, in conjunction with specific embodiments this utility model is described in detail.
At first, consult the side structure cross-sectional schematic of Fig. 1 for this utility model embodiment, plasma microbeam flow-generator is provided with the housing 101 of a cuboid, be provided with one or more circular spouts 102 at housing 101 1 ends, its shape is shown in Fig. 2 .1 and Fig. 2 .2, and the diameter range of each spout is the 1-8 millimeter.On this cuboid housing 101, also can be provided with a reducing changeover portion 111.The other end at housing 101 is provided with an on and off switch 203, air inlet switch 109 and power line connecting pin 202.
Consult Fig. 1 this utility model embodiment, also be provided with fixture 106 and 108 in this housing 101, fixture 106 is fixing with housing 101 insulated dielectric tube 104; Fixture 108 is that interior electrode 105 is fixed together with insulated dielectric tube 104, and makes interior electrode 105 place the center of insulated dielectric tube, and the gas in the gas conduit 107 can pass connector 108 and and medium tube 104 perforations.
Fig. 3 is this utility model embodiment 1 plasma microbeam flow-generator main body sectional structure sketch map.It is characterized in that when power supply adopts radio-frequency power supply, the interior electrode that is insulated medium tube 104 coatings in the plasma microbeam a fluid stream flow-generator main body is a metal straight-bar 105, these metal straight-bar 105 connected pieces 108 are fixed an end, the major part of its bar is the center that places insulated dielectric tube 104, the other end of metallic rod 105 is to be in the annulus of external electrode 103, between insulated dielectric tube 104 and metal inner electrode bar 105, be provided with certain ring gap 200, gas is to enter into gap between medium tube 104 and the interior electrode 105 by connector 108, and is ionized to form outside the plasma hoop at 200 places, gap and sprays.
Fig. 4 is this utility model embodiment 2 little plasma beam main body sectional structure sketch maps.It is characterized in that when power supply adopts radio-frequency power supply, in little plasma beam generator main body, the metal inner electrode 105 that is insulated medium tube 104 coatings is metal tube, these metal tube electrode 105 1 end connected pieces 108 are fixing, its big portion is insulated medium tube 104 and closely coats, the end of its other end is near outer ring electrode 103, and gas is by metal tube electrode 105, and forms plasma column and outwards spray being ionized by with close pipe electrode 105 ends of external electrode 103 time.
Fig. 5 is this utility model embodiment 3 plasma microbeam flow-generator main body sectional structure sketch maps.It is characterized in that when power supply adopts high frequency electric source, be to coat two becket electrodes 103 and 300 outside the insulated dielectric tube 104 in the plasma microbeam a fluid stream flow-generator main body, high frequency electric source 201 is to be connected with 300 with these two becket electrodes 103 respectively, and the electrode 105 that coats in the medium tube is that a suspension electrode is not connected with power supply.These metal straight-bar 105 connected pieces 108 are fixed an end, the major part of its bar is the center that places insulated dielectric tube 104, the other end of metallic rod 105 is to be in the annulus of external electrode 103, between insulated dielectric tube 104 and metal inner electrode bar 105, be provided with certain ring gap 200, gas is to enter into gap between medium tube 104 and the interior electrode 105 by connector 108, and is ionized to form outside the plasma hoop at 200 places, gap and sprays.
Fig. 6 is this utility model embodiment 4 plasma microbeam flow-generator main body sectional structure sketch maps.It is characterized in that when power supply adopts high frequency electric source, be to coat two becket electrodes 103 and 300 outside the insulated dielectric tube 104 in the plasma microbeam flow-generator main body, high frequency electric source 201 is to be connected with 300 with these two becket electrodes 103 respectively, the metal tube electrode 105 that coats in the medium tube is suspension electrodes, is not connected with power supply.These metal tube electrode 105 1 end connected pieces 108 are fixing, its big portion is insulated medium tube 104 and closely coats, the end of its other end is near external electrode 103, gas connects by connector 108 and metal tube electrode 105, and forms plasma column and outwards spray being ionized by with close pipe electrode 105 ends of external electrode 103 time.
Among this utility model embodiment, power supply 201 can place the inside of housing, also can place the outside of housing, and is connected with electrode by cable conductor.External electrode 103 is mounted in the spout end place near insulated dielectric tube 104, and the spout end of this medium tube 104 is concordant with the spout 102 of housing.This becket electrode 103 and 300 can be made with metallic copper, aluminum and other metal material, and this becket electrode 103 and 300 closely is coated on the medium tube 104.
Dielectric straight tube 104 is to adopt quartz ampoule or earthenware, and housing 101 is with metal material or adopts plastic material to make that its inside is provided with the metal screen layer that is connected with ground electrode when adopting plastic material; Gas conduit is with plastics or rubber trachea.
The gas of 116 confessions of air supply source is noble gas argon or helium, this gas is through air relief valve 110, gas trap switch 109, gas conduit 107, connector 108, medium tube 104, through outwards ejection of housing spout 102, plasma discharge carries out under normal pressure again.
In conjunction with specific embodiments this utility model is described with reference to the accompanying drawings above, yet, need to prove, for a person skilled in the art, under the situation that does not break away from spirit and scope of the present utility model, can make many changes and modification to the foregoing description, these changes and modification all drop in the claim restricted portion of the present utility model.
Claims (9)
1, a kind of novel plasma microbeam flow-generator, comprise a power supply, an air supply source, plasma microbeam flow-generator main body, it is characterized in that: plasma microbeam flow-generator main body comprises one or more insulated dielectric tube, inside and outside this insulated dielectric tube, be respectively equipped with electrode, this electrode is connected with a radio frequency or a high frequency electric source, be provided with a housing outside this plasma microbeam stream, one side of this housing is provided with one or more spouts, side is provided with the air inlet connector in addition, gas flow control valve switch, the gas in the air supply source are when the gap of flowing through between the insulated dielectric tube internal and external electrode, and breakdown ionization forms plasma and sprays outside housing.
2, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: this plasma microbeam flow-generator main body is coated by a housing, be provided with one or more spouts in this housing one side, side is provided with air inlet connector, gas flow control valve switch and power control switch in addition.
3, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: the power work frequency can be at radio frequency or at high-frequency range, the power value of power supply is in 100W, power supply can be installed in the housing, also can place outside the housing, power supply is to be connected with plasma microbeam generator electrode by cable conductor.
4, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: when plasma microbeam flow-generator adopts the high frequency electric source power supply, this plasma microbeam stream main body is to adopt one or more insulated dielectric tube, be coated on two metal ring external electrodes that this insulated dielectric tube outside is provided with certain intervals and is connected with high frequency electric source respectively, and one is insulated metal tube or the metallic rod suspension electrode that medium tube coats.
5, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: when plasma microbeam flow-generator adopts the radio-frequency power supply power supply, this plasma microbeam stream main body is to adopt one or more insulated dielectric tube, be coated on a metal ring external electrode of this insulated dielectric tube outside, and being insulated metal tube or the interior electrode of metallic rod that medium tube coats, internal and external electrode is connected with the outfan of radio-frequency power supply respectively.
6, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: the metal inner electrode and the insulated dielectric tube that are insulated the medium tube coating are to adopt the insulant connector to be fixed together, and make metal inner electrode be in the center of medium tube.
7, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: when the metal electrode that is equipped with the insulated dielectric tube coating is straight-bar, be provided with certain clearance between the internal diameter of its external diameter and medium tube, working gas is to pass from the gap, and the end by medium tube.
8, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: when the metal electrode that is equipped with the insulated dielectric tube coating is metal tube, the internal diameter of its metal tube external diameter and insulated dielectric tube closely cooperates, working gas is to pass from metal tube, and the end by medium tube.
9, a kind of plasma microbeam flow-generator according to claim 1, it is characterized in that: the gas that air supply source adopted is noble gas argon or helium, the gas of air supply source is by gas conduit, gas flow gauge tap and the medium tube of becoming attached to, and when the gap of flowing through between the insulated dielectric tube internal and external electrode, breakdown ionization forms plasma and sprays outside housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008201990935U CN201399098Y (en) | 2008-12-30 | 2008-12-30 | Plasma micro-beam current generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008201990935U CN201399098Y (en) | 2008-12-30 | 2008-12-30 | Plasma micro-beam current generator |
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| Publication Number | Publication Date |
|---|---|
| CN201399098Y true CN201399098Y (en) | 2010-02-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2008201990935U Expired - Fee Related CN201399098Y (en) | 2008-12-30 | 2008-12-30 | Plasma micro-beam current generator |
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| CN (1) | CN201399098Y (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103260329A (en) * | 2013-04-23 | 2013-08-21 | 华中科技大学 | Plasma jet device with suspension electrode |
| CN103508452A (en) * | 2013-09-29 | 2014-01-15 | 陈晖� | Diamond crystallizer |
| CN104254188A (en) * | 2014-10-10 | 2014-12-31 | 中国地质大学（武汉） | Miniature normal-voltage glow discharge plasma excitation source |
| CN104812154A (en) * | 2015-04-22 | 2015-07-29 | 西安交通大学 | Three-electrode dielectric barrier discharging plasma generation device |
| CN106492247A (en) * | 2016-12-31 | 2017-03-15 | 合肥优亿科机电科技有限公司 | Portable type atmosphere plasma sterilizing installation |
| CN106586127A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Sterile packaging production line for shallow packaging containers |
| CN106581709A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Atmospheric plasma sterilizer used in medical device sterilization apparatus |
| CN106783711A (en) * | 2016-12-31 | 2017-05-31 | 合肥优亿科机电科技有限公司 | Plasma clean photovoltaic silicon wafer organic dirt equipment |
| CN110753437A (en) * | 2019-10-12 | 2020-02-04 | 嘉兴恩奇医疗器械有限公司 | Portable plasma shunt |
| CN113207216A (en) * | 2021-05-25 | 2021-08-03 | 四川大学 | Plasma source for surface cleaning and repairing |
-
2008
- 2008-12-30 CN CN2008201990935U patent/CN201399098Y/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103260329A (en) * | 2013-04-23 | 2013-08-21 | 华中科技大学 | Plasma jet device with suspension electrode |
| CN103508452A (en) * | 2013-09-29 | 2014-01-15 | 陈晖� | Diamond crystallizer |
| CN103508452B (en) * | 2013-09-29 | 2016-01-20 | 陈晖� | A kind of Diamond crystallizer |
| CN104254188A (en) * | 2014-10-10 | 2014-12-31 | 中国地质大学（武汉） | Miniature normal-voltage glow discharge plasma excitation source |
| CN104254188B (en) * | 2014-10-10 | 2017-02-01 | 中国地质大学（武汉） | Miniature normal-voltage glow discharge plasma excitation source |
| CN104812154A (en) * | 2015-04-22 | 2015-07-29 | 西安交通大学 | Three-electrode dielectric barrier discharging plasma generation device |
| CN106492247A (en) * | 2016-12-31 | 2017-03-15 | 合肥优亿科机电科技有限公司 | Portable type atmosphere plasma sterilizing installation |
| CN106586127A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Sterile packaging production line for shallow packaging containers |
| CN106581709A (en) * | 2016-12-31 | 2017-04-26 | 合肥优亿科机电科技有限公司 | Atmospheric plasma sterilizer used in medical device sterilization apparatus |
| CN106783711A (en) * | 2016-12-31 | 2017-05-31 | 合肥优亿科机电科技有限公司 | Plasma clean photovoltaic silicon wafer organic dirt equipment |
| CN110753437A (en) * | 2019-10-12 | 2020-02-04 | 嘉兴恩奇医疗器械有限公司 | Portable plasma shunt |
| CN113207216A (en) * | 2021-05-25 | 2021-08-03 | 四川大学 | Plasma source for surface cleaning and repairing |
| CN113207216B (en) * | 2021-05-25 | 2022-02-11 | 四川大学 | Plasma source for surface cleaning and repairing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100210 Termination date: 20121230 |