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CN201132815Y - Furnace equipment for the manufacture of optical fiber preforms - Google Patents

Furnace equipment for the manufacture of optical fiber preforms Download PDF

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Publication number
CN201132815Y
CN201132815Y CNU2007200881014U CN200720088101U CN201132815Y CN 201132815 Y CN201132815 Y CN 201132815Y CN U2007200881014 U CNU2007200881014 U CN U2007200881014U CN 200720088101 U CN200720088101 U CN 200720088101U CN 201132815 Y CN201132815 Y CN 201132815Y
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air
graphite
annular
furnace
hole
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刘善沛
雷高清
李震宇
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Yangtze Optical Fibre and Cable Co Ltd
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Yangtze Optical Fibre and Cable Co Ltd
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Abstract

本实用新型涉及一种用于光纤预制棒制造的熔缩炉装置,包括有石墨加热炉,在石墨加热炉的一侧对应石墨衬套一端设置有气幕密封装置和气流冲刷装置,其特征在于所述的气幕密封装置和气流冲刷装置由外套配置前、后衬套构成,其中在前、后衬套的衔接端头形成有环形细缝,对应于环形细缝在外套内孔设置环形气室,在环形气室内设置有导气阻尼环,构成气幕密封装置;在后衬套上沿周向开设有径向通孔,对应于径向通孔出气口在后衬套上开设轴向导气口,对应于径向通孔在外套内孔设置后环形气室,在后环形气室内设置有导气阻尼环,构成气流冲刷装置。本实用新型的结构简单,设置合理,便于加工,导气阻尼环的设置使密封气流分布均匀,提高了熔缩炉气密性能。

The utility model relates to a shrinkage furnace device for manufacturing optical fiber preform rods, which includes a graphite heating furnace, and an air curtain sealing device and an air flow flushing device are arranged on one side of the graphite heating furnace corresponding to the end of the graphite bushing, and is characterized in that The air curtain sealing device and the air flow flushing device are composed of front and rear bushings arranged on the outer casing, wherein annular slits are formed at the connecting ends of the front and rear bushings, and annular air slits are arranged in the inner hole of the outer casing corresponding to the annular slits. The air guide and damping ring is arranged in the annular air chamber to form an air curtain sealing device; a radial through hole is opened on the rear bush along the circumferential direction, and an axial guide is set on the rear bush corresponding to the air outlet of the radial through hole. The air port corresponds to the radial through hole, and a rear annular air chamber is arranged in the inner hole of the jacket, and an air guide damping ring is arranged in the rear annular air chamber to form an airflow flushing device. The utility model has the advantages of simple structure, reasonable setting and convenient processing, and the setting of the gas guide and damping ring makes the sealing air flow evenly distributed and improves the airtight performance of the melting and shrinking furnace.

Description

用于光纤预制棒制造的熔缩炉装置 Furnace equipment for the manufacture of optical fiber preforms

技术领域technical field

本实用新型涉及一种用于光纤预制棒制造的熔缩炉装置,是对现有熔缩炉装置的进一步改进,属于光纤预制棒加工设备技术领域。The utility model relates to a shrinkage furnace device for manufacturing optical fiber preform rods, which is a further improvement on the existing shrinkage furnace device and belongs to the technical field of optical fiber preform rod processing equipment.

背景技术Background technique

光纤预制棒通常由芯棒和玻璃套管制成,其中芯棒的制作包括先用等离子化学气相沉积法或其它化学气相沉积法在石英管内壁进行纯二氧化硅或掺杂的二氧化硅玻璃态沉积,沉积完毕后再将其熔缩成棒,即为光纤预制棒芯棒。熔缩炉装置即为将沉积的石英管熔缩成芯棒的加工设备。光纤预制棒芯棒的熔缩炉装置主要由石墨加热炉和安设在石墨加热炉中部的石墨衬套构成,在石墨衬套的一端安设有气幕密封装置和气流冲刷装置。现有熔缩炉装置的气幕密封装置和气流冲刷装置是通过在金属衬套中开设周向小孔和或环形细缝构成,由于孔径小、环形缝细,因此零件的结构复杂,加工和装配难度大,工艺要求高,否则将影响气流分布的均匀性和气密性能;而且其部件间的界面连接很难保证不同气路间的隔离,在高温工作环境下,隔离容易被破坏而造成串气;此外该结构金属衬套在高温下工作,易于变形和损坏,使用寿命短。The optical fiber preform is usually made of a core rod and a glass sleeve, wherein the production of the core rod includes firstly using plasma chemical vapor deposition or other chemical vapor deposition to process pure silica or doped silica glass on the inner wall of the quartz tube. Deposition, after the deposition is completed, it is melted and shrunk into a rod, which is the optical fiber prefabricated core rod. The shrinking furnace device is the processing equipment that melts the deposited quartz tube into a mandrel. The shrinking furnace device for optical fiber preform mandrel is mainly composed of a graphite heating furnace and a graphite bushing installed in the middle of the graphite heating furnace. An air curtain sealing device and an airflow flushing device are installed at one end of the graphite bushing. The air curtain sealing device and the air flow flushing device of the existing shrinkage furnace device are formed by opening small circumferential holes and/or annular slits in the metal bushing. Due to the small aperture and thin annular slit, the structure of the parts is complicated, and the processing and The assembly is difficult and the process requirements are high, otherwise the uniformity of airflow distribution and airtightness will be affected; and the interface connection between the components is difficult to ensure the isolation between different gas paths. In addition, the metal bushing of this structure works at high temperature, is easy to be deformed and damaged, and has a short service life.

发明内容Contents of the invention

本实用新型所要解决的技术问题是针对上述现有技术存在的不足而提供一种结构设置较为简单合理,工艺性好、易于制作和气密性能好的用于光纤预制棒制造的熔缩炉装置。The technical problem to be solved by the utility model is to provide a melting and shrinking furnace device for optical fiber preform manufacturing with simple and reasonable structure, good manufacturability, easy manufacture and good airtight performance in view of the shortcomings of the above-mentioned prior art.

本实用新型为解决上述提出的问题所采用的技术方案为:包括有石墨加热炉和安设在石墨加热炉中部的石墨衬套4,在石墨加热炉的一侧对应石墨衬套一端设置有气幕密封装置和气流冲刷装置,其不同之处在于所述的气幕密封装置和气流冲刷装置由外套7配置前、后衬套6、8构成,其中在前、后衬套的衔接端头形成有环形细缝19,对应于环形细缝在外套内孔设置环形气室16,环形气室与进气口18相接,在环形气室内环形细缝与进气口之间设置有导气阻尼环17,构成气幕密封装置;在后衬套8上沿周向开设有径向通孔15,对应于径向通孔出气口在后衬套上开设轴向导气口11,对应于径向通孔在外套内孔设置后环形气室12,后环形气室与进气口14导通,在后环形气室内径向通孔与进气口之间设置有导气阻尼环13,构成气流冲刷装置。The technical scheme adopted by the utility model to solve the above-mentioned problems is as follows: it includes a graphite heating furnace and a graphite bushing 4 arranged in the middle of the graphite heating furnace, and a gas bushing is arranged at one end of the graphite heating furnace corresponding to the graphite bushing. The curtain sealing device and the airflow flushing device are different in that the air curtain sealing device and the airflow flushing device are composed of front and rear bushings 6, 8 arranged on the outer casing 7, wherein the connecting ends of the front and rear bushings are formed There is an annular slit 19, and an annular air chamber 16 is arranged in the inner hole of the outer jacket corresponding to the annular slit, and the annular air chamber is connected to the air inlet 18, and an air guide damping is arranged between the annular slit and the air inlet in the annular air chamber The ring 17 constitutes the air curtain sealing device; the rear bush 8 is provided with a radial through hole 15 along the circumference, corresponding to the radial through hole air outlet, and an axial air guide port 11 is set on the rear bush, corresponding to the radial The hole is provided with a rear annular air chamber 12 in the inner hole of the jacket, and the rear annular air chamber is connected to the air inlet 14. An air guide damping ring 13 is arranged between the radial through hole in the rear annular air chamber and the air inlet to form an air flow scouring device.

按上述方案,所述的环形细缝19呈圆锥形,向外侧倾斜,构成向外吹气的气幕密封装置。According to the above scheme, the annular slit 19 is conical and inclined to the outside to form an air curtain sealing device for blowing air outward.

按上述方案,所述的后衬套8上开设的轴向导气口11为环形轴向导气口,在后衬套内孔对应于轴向导气口设置有导流锥面20。According to the above scheme, the axial air guide port 11 provided on the rear bushing 8 is an annular axial air guide port, and the inner hole of the rear bush is provided with a guide cone surface 20 corresponding to the axial air guide port.

按上述方案,所述的外套7后端为连接圆盘,在连接圆盘内设置冷却水槽9,冷却水槽的两头分别与进水口21和出水口22连通,构成外套的水冷结构,使外套的工作温度降低。According to the above scheme, the rear end of the outer jacket 7 is a connecting disc, and a cooling water tank 9 is arranged in the connecting disc, and the two ends of the cooling water tank are respectively communicated with the water inlet 21 and the water outlet 22 to form a water cooling structure of the outer jacket, so that the outer jacket The operating temperature is reduced.

本实用新型使用时,将沉积完毕的石英管穿经石墨熔缩炉的中间通孔,熔缩时石墨熔缩炉的工作温度达到2000℃左右,石墨熔缩炉缓慢往复移动,在高温下将石英管10熔缩成实心棒,此时在石墨熔缩炉一侧的石英管进入端通过气幕密封装置吹出惰性气体形成密封气幕,从左端阻止外界空气进入石墨炉的高温区,避免石英管表面形成新的氧化层,与此同时通过气流冲刷装置吹出一定流速的惰性气体,将石墨衬管与石英管之间由于高温所产生的碳化硅颗粒与石英管表面挥发的二氧化硅迅速吹走,并阻止外界空气从右端进入石墨炉的高温区,从而实现无氧状态下的石英管熔缩,保证光纤预制棒芯棒的加工质量。When the utility model is used, the deposited quartz tube is passed through the middle through hole of the graphite melting and shrinking furnace, and the working temperature of the graphite melting and shrinking furnace reaches about 2000° C. The quartz tube 10 is condensed into a solid rod. At this time, the inert gas is blown out through the air curtain sealing device at the entry end of the quartz tube on one side of the graphite melting furnace to form a sealed air curtain, which prevents the outside air from entering the high temperature area of the graphite furnace from the left end and prevents the quartz A new oxide layer is formed on the surface of the tube. At the same time, a certain flow rate of inert gas is blown out through the airflow flushing device, and the silicon carbide particles produced between the graphite liner and the quartz tube due to high temperature and the silicon dioxide volatilized on the surface of the quartz tube are quickly blown away. Go, and prevent the outside air from entering the high temperature zone of the graphite furnace from the right end, so as to realize the melting and shrinking of the quartz tube in the anaerobic state and ensure the processing quality of the optical fiber preform core rod.

本实用新型的有益效果在于:1、采用前后衬套结构形成气幕密封装置和气流冲刷装置,不仅能形成有效的密封,而且结构简单,设置合理,便于加工;尤其是通过设置导气阻尼环来调节气体的流量和流速,可使环形细缝的缝隙和径向通孔的孔径相对加大,使工件加工的工艺性大大改善,同时使密封气流的分布均匀,进一步提高气密性能;2、对应于轴向导气口设置有导流锥面,可使冲刷气流进一步加速,达到更好的表面冲刷效果;3、在外套与石墨炉相连的连接盘上设置冷却水槽,能有效降低密封构件的工作温度,防止构件的变形和氧化,有效延长构件的使用寿命。The beneficial effects of the utility model are as follows: 1. Adopting the front and rear bushing structures to form the air curtain sealing device and the air flow scouring device, not only can form effective sealing, but also the structure is simple, the setting is reasonable, and it is easy to process; especially by setting the air guide damping ring To adjust the flow rate and flow rate of the gas, the gap of the annular slit and the diameter of the radial through hole can be relatively enlarged, so that the manufacturability of the workpiece processing is greatly improved, and the distribution of the sealing air flow is uniform, and the airtight performance is further improved; 2 . Corresponding to the axial air guide port, there is a diversion cone surface, which can further accelerate the scouring air flow and achieve a better surface scouring effect; 3. A cooling water tank is set on the connecting plate connecting the jacket and the graphite furnace, which can effectively reduce the sealing component. Working temperature, preventing deformation and oxidation of components, effectively prolonging the service life of components.

附图说明Description of drawings

图1为本实用新型一个实施例的正剖视结构图。Fig. 1 is a front sectional structure diagram of an embodiment of the present invention.

图2为本实用新型一个实施例气幕密封装置和气流冲刷装置的正剖视结构图。Fig. 2 is a frontal cross-sectional structural diagram of an air curtain sealing device and an airflow flushing device according to an embodiment of the present invention.

图3为图2的右视图。Fig. 3 is a right side view of Fig. 2 .

具体实施方式Detailed ways

以下结合附图进一步说明本实用新型的实施例,包括有石墨加热炉,所述的石墨加热炉包括石墨发热体2和铜质导电电极1,在石墨发热体的外周包绕有石墨隔热层3,石墨隔热层外为熔缩炉外壳5,在石墨加热炉中部的石墨发热体内安设有管状的石墨衬套4,石墨衬套贯穿整个石墨加热炉的加热区,在石墨加热炉的左侧对应石墨衬套一端安设有外套7和与外套内孔相配置的前、后衬套6、8,构成气幕密封装置和气流冲刷装置,其中在前、后衬套的衔接端头通过控制轴向间隔距形成有环形细缝19,细缝间隙为0.5±0.1mm,环形细缝呈圆锥形,向外侧倾斜,构成向外吹气的气幕密封装置,对应于环形细缝在外套7内孔设置环形气室16,环形气室与进气口18相接,在环形气室中内环形细缝与进气口之间设置有导气阻尼环17,由此构成气幕密封装置;在后衬套8上沿周向均布有径向通孔15,径向通孔的孔径为0.8±0.2mm,对应于径向通孔出气口在后衬套上开设环形的轴向导气口11,轴向导气口的出气口处配置有导流锥面20,对应于径向通孔进气端在外套内孔设置后环形气室12,后环形气室与进气口14导通,在后环形气室内径向通孔与进气口之间设置有导气阻尼环13,构成气流冲刷装置。所述的外套7后端为直径较大的连接圆盘,在连接圆盘内设置冷却水槽9,冷却水槽呈大半圆弧形,圆弧两头分别与进水口21和出水口22连通,构成外套的水冷结构,可使外套的工作温度大大下降。Further illustrate the embodiment of the present utility model below in conjunction with accompanying drawing, comprise graphite heating furnace, described graphite heating furnace comprises graphite heating element 2 and copper conductive electrode 1, is surrounded with graphite heat insulation layer at the periphery of graphite heating element 3. Outside the graphite heat insulation layer is the shell 5 of the shrinking furnace. A tubular graphite bushing 4 is installed in the graphite heating body in the middle of the graphite heating furnace. The graphite bushing runs through the entire heating zone of the graphite heating furnace. The left end of the corresponding graphite bushing is equipped with a jacket 7 and front and rear bushings 6 and 8 that are configured with the inner hole of the jacket to form an air curtain sealing device and an air flow flushing device, wherein the connecting ends of the front and rear bushings are By controlling the axial spacing, an annular slit 19 is formed, the gap between the slits is 0.5±0.1mm, the annular slit is conical, inclined to the outside, and constitutes an air curtain sealing device for blowing outward, corresponding to the annular slit in An annular air chamber 16 is arranged in the inner hole of the outer jacket 7, and the annular air chamber is connected to the air inlet 18, and an air guide damping ring 17 is arranged between the inner annular slit in the annular air chamber and the air inlet, thereby forming an air curtain seal. Device; radial through-holes 15 are evenly distributed along the circumference on the rear bushing 8, and the diameter of the radial through-holes is 0.8±0.2mm, corresponding to the air outlet of the radial through-holes, an annular axial air guide port 11 is set on the rear bushing , the air outlet of the axial air guide port is equipped with a diversion cone 20, corresponding to the radial through hole inlet end, the rear annular air chamber 12 is arranged in the inner hole of the jacket, and the rear annular air chamber is connected with the air inlet 14. An air-guiding damping ring 13 is arranged between the radial through hole in the annular air chamber and the air inlet to form an airflow scouring device. The rear end of the outer jacket 7 is a connecting disc with a larger diameter, and a cooling water tank 9 is arranged in the connecting disc. The cooling water tank is in the shape of a large semicircle, and the two ends of the arc are respectively connected with the water inlet 21 and the water outlet 22 to form a jacket. The unique water-cooling structure can greatly reduce the working temperature of the coat.

Claims (7)

1、一种用于光纤预制棒制造的熔缩炉装置,包括有石墨加热炉和安设在石墨加热炉中部的石墨衬套(4),在石墨加热炉的一侧对应石墨衬套一端设置有气幕密封装置和气流冲刷装置,其特征在于所述的气幕密封装置和气流冲刷装置由外套(7)配置前、后衬套(6、8)构成,其中在前、后衬套的衔接端头形成有环形细缝(19),对应于环形细缝在外套内孔设置环形气室(16),环形气室与进气口(18)相接,在环形气室内环形细缝与进气口之间设置有导气阻尼环(17),构成气幕密封装置;在后衬套(8)上沿周向开设有径向通孔(15),对应于径向通孔出气口在后衬套上开设轴向导气口(11),对应于径向通孔在外套内孔设置后环形气室(12),后环形气室与进气口(14)导通,在后环形气室内径向通孔与进气口之间设置有导气阻尼环(13),构成气流冲刷装置。1. A shrinking furnace device for the manufacture of optical fiber preforms, comprising a graphite heating furnace and a graphite bushing (4) arranged in the middle of the graphite heating furnace, and one end of the graphite heating furnace corresponding to the graphite bushing is arranged There is an air curtain sealing device and an airflow scouring device, and it is characterized in that the air curtain sealing device and the airflow scouring device are composed of front and rear bushings (6, 8) equipped with an outer jacket (7), wherein the front and rear bushings The connecting end is formed with an annular slit (19), corresponding to the annular slit, an annular air chamber (16) is arranged in the inner hole of the overcoat, and the annular air chamber is connected with the air inlet (18). An air guide damping ring (17) is arranged between the air inlets to form an air curtain sealing device; a radial through hole (15) is opened on the rear bush (8) along the circumference, corresponding to the radial through hole air outlet An axial air guide port (11) is set on the rear bush, and a rear annular air chamber (12) is arranged in the inner hole of the jacket corresponding to the radial through hole. The rear annular air chamber is connected with the air inlet (14). An air-guiding damping ring (13) is arranged between the indoor radial through hole and the air inlet to form an airflow scouring device. 2、按权利要求1所述的用于光纤预制棒制造的熔缩炉装置,其特征在于所述的环形细缝(19)呈圆锥形,向外侧倾斜,构成向外吹气的气幕密封装置。2. The melting and shrinking furnace device for manufacturing optical fiber preform according to claim 1, characterized in that the said annular slit (19) is conical and inclined to the outside, forming an air curtain seal for blowing air outwards device. 3、按权利要求1或2所述的用于光纤预制棒制造的熔缩炉装置,其特征在于所述的后衬套上开设的轴向导气口(11)为环形轴向导气口,在后衬套内孔对应于轴向导气口设置有导流锥面(20)。3. The shrinking furnace device for manufacturing optical fiber preforms according to claim 1 or 2, characterized in that the axial gas inlet (11) opened on the rear bushing is an annular axial gas inlet, and the rear bushing Corresponding to the axial air inlet, the sleeve inner hole is provided with a diversion cone surface (20). 4、按权利要求1或2所述的用于光纤预制棒制造的熔缩炉装置,其特征在于所述的外套(7)后端为连接圆盘,在连接圆盘内设置冷却水槽(9),冷却水槽的两头分别与进水口(21)和出水口(22)连通,构成外套的水冷结构。4. The shrinking furnace device for manufacturing optical fiber preform according to claim 1 or 2, characterized in that the rear end of the jacket (7) is a connecting disc, and a cooling water tank (9) is arranged in the connecting disc ), the two ends of the cooling tank are communicated with the water inlet (21) and the water outlet (22) respectively, forming the water cooling structure of the overcoat. 5、按权利要求1或2所述的用于光纤预制棒制造的熔缩炉装置,其特征在于所述的石墨加热炉包括石墨发热体(2)和铜质导电电极(1),在石墨发热体的外周包绕有石墨隔热层(3),石墨隔热层外为熔缩炉外壳(5),在石墨加热炉中部的石墨发热体内安设有管状的石墨衬套(4),石墨衬套贯穿整个石墨炉的加热区,在石墨加热炉的左侧对应石墨衬套一端安设有外套(7)和与外套内孔相配置的前、后衬套(6、8),构成气幕密封装置和气流冲刷装置。5. The shrinking furnace device for manufacturing optical fiber preform according to claim 1 or 2, characterized in that the graphite heating furnace includes a graphite heating element (2) and a copper conductive electrode (1). The outer circumference of the heating element is surrounded by a graphite heat-insulating layer (3), and the outside of the graphite heat-insulating layer is a shrink furnace shell (5), and a tubular graphite bushing (4) is installed in the graphite heating body in the middle of the graphite heating furnace. The graphite bushing runs through the entire heating zone of the graphite furnace. On the left side of the graphite heating furnace corresponding to the end of the graphite bushing, a jacket (7) and front and rear bushings (6, 8) arranged with the inner hole of the jacket are installed to form a Air curtain sealing device and air scour device. 6、按权利要求1或2所述的用于光纤预制棒制造的熔缩炉装置,其特征在于所述的环形细缝间隙为0.5±0.1mm。6. The shrinking furnace device for manufacturing optical fiber preform according to claim 1 or 2, characterized in that the gap between said annular slits is 0.5±0.1mm. 7、按权利要求1或2所述的用于光纤预制棒制造的熔缩炉装置,其特征在于所述的径向通孔孔径为0.8±0.2mm。7. The shrink furnace device for manufacturing optical fiber preform according to claim 1 or 2, characterized in that the diameter of said radial through hole is 0.8±0.2 mm.
CNU2007200881014U 2007-11-09 2007-11-09 Furnace equipment for the manufacture of optical fiber preforms Expired - Lifetime CN201132815Y (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101182112B (en) * 2007-11-09 2010-12-22 长飞光纤光缆有限公司 Furnace equipment for the manufacture of optical fiber preforms
CN111018337A (en) * 2019-10-24 2020-04-17 长飞光纤光缆股份有限公司 HEC optical fiber collapsing furnace gas path system and gas sealing method
CN113381275A (en) * 2021-06-17 2021-09-10 瑞燃(上海)环境工程技术有限公司 Anti-irradiation erbium-doped photonic crystal fiber light source for high-precision fiber-optic gyroscope
CN115536261A (en) * 2022-11-10 2022-12-30 江苏亨通光纤科技有限公司 Optical fiber preform manufacturing apparatus and optical fiber preform manufacturing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101182112B (en) * 2007-11-09 2010-12-22 长飞光纤光缆有限公司 Furnace equipment for the manufacture of optical fiber preforms
CN111018337A (en) * 2019-10-24 2020-04-17 长飞光纤光缆股份有限公司 HEC optical fiber collapsing furnace gas path system and gas sealing method
CN111018337B (en) * 2019-10-24 2021-04-02 长飞光纤光缆股份有限公司 HEC optical fiber collapsing furnace gas path system and gas sealing method
CN113381275A (en) * 2021-06-17 2021-09-10 瑞燃(上海)环境工程技术有限公司 Anti-irradiation erbium-doped photonic crystal fiber light source for high-precision fiber-optic gyroscope
CN115536261A (en) * 2022-11-10 2022-12-30 江苏亨通光纤科技有限公司 Optical fiber preform manufacturing apparatus and optical fiber preform manufacturing method

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