CN206321374U - A kind of fabry perot interferometer baroceptor based on optical fiber ring laser - Google Patents
A kind of fabry perot interferometer baroceptor based on optical fiber ring laser Download PDFInfo
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Abstract
Description
技术领域technical field
本实用新型属于光纤传感技术领域,具体涉及一种基于光纤环形激光器的法布里-珀罗干涉仪气压传感器。The utility model belongs to the technical field of optical fiber sensing, in particular to a Fabry-Perot interferometer air pressure sensor based on an optical fiber ring laser.
背景技术Background technique
气压跟天气有密切的关系,地球表面上的风、云、雨、雪,万千气象,都跟大气运动有关系,而造成大气运动的动力就是大气压分布的不平衡和气压分布的的经常变化。因此,气压传感器的研究对于大气探测、气象服务具有重要的作用。Air pressure is closely related to weather. The wind, cloud, rain, snow, and all kinds of weather on the earth's surface are all related to atmospheric movement, and the driving force for atmospheric movement is the imbalance and frequent changes in the distribution of atmospheric pressure. . Therefore, the study of barometric pressure sensors plays an important role in atmospheric detection and meteorological services.
电子气压传感器受温度、磁场等外界环境影响大且制作工艺复杂,造价高,故其使用范围受到了很大的限制。光纤气压传感器较之传统的气压传感器,具有抗电磁干扰能力强、耐腐蚀、质量轻、体积小和易于远程监测等优点。The electronic air pressure sensor is greatly affected by the external environment such as temperature and magnetic field, and the manufacturing process is complicated and the cost is high, so its application range is greatly limited. Compared with traditional air pressure sensors, optical fiber air pressure sensors have the advantages of strong anti-electromagnetic interference, corrosion resistance, light weight, small size and easy remote monitoring.
光纤气压传感器可分为两类:一类是密封腔式光纤气压传感器,另一类是开腔式光纤气压传感器。对于密封腔式光纤气压传感器,当外界压力改变时,其腔长也会随之改变。而为了能够有效提高密封腔式光纤气压传感器的气压灵敏度,密封腔的壁厚必须降低,但是这种方法使得传感器的探测范围受到了限制,且由于腔壁变得非常薄,传感器的机械强度也会很差。对于开腔式光纤气压传感器,其探测原理与密封腔式光纤气压传感器不同:利用了气体压力变化时,折射率随之改变的特性。因此与密封腔式光纤气压传感器相比,开腔式光纤气压传感器具有较大的探测范围。但是,由于它们通常使用宽带光源,因此探测信号,即输出光谱中特定的谐振峰,对应的光强很弱。另一方面,干涉仪输出的干涉谱对比度较低,通常为3-20dB,且谐振峰的3dB带宽(FWHM)较大,约几纳米到几十纳米,从而很难准确地确定谐振峰的中心波长,导致被测气体气压测量误差较大。同时,这些光纤干涉仪往往对环境温度较为敏感,这也一定程度上增大了气压测量的误差。Optical fiber air pressure sensors can be divided into two categories: one is sealed cavity optical fiber air pressure sensor, and the other is open cavity optical fiber air pressure sensor. For the sealed cavity fiber optic air pressure sensor, when the external pressure changes, the cavity length will also change accordingly. In order to effectively improve the air pressure sensitivity of the sealed cavity optical fiber air pressure sensor, the wall thickness of the sealed cavity must be reduced, but this method limits the detection range of the sensor, and because the cavity wall becomes very thin, the mechanical strength of the sensor is also reduced. will be bad. For the open-cavity optical fiber air pressure sensor, its detection principle is different from that of the sealed-cavity optical fiber air pressure sensor: it uses the characteristic that the refractive index changes when the gas pressure changes. Therefore, compared with the sealed-cavity fiber-optic pressure sensor, the open-cavity fiber-optic pressure sensor has a larger detection range. However, since they typically use broadband light sources, the probe signal, the specific resonance peak in the output spectrum, corresponds to a weak light intensity. On the other hand, the contrast of the interference spectrum output by the interferometer is low, usually 3-20dB, and the 3dB bandwidth (FWHM) of the resonance peak is large, about several nanometers to tens of nanometers, so it is difficult to accurately determine the center of the resonance peak wavelength, resulting in a large error in the measurement of the measured gas pressure. At the same time, these fiber optic interferometers are often sensitive to ambient temperature, which also increases the error of air pressure measurement to a certain extent.
发明内容Contents of the invention
为了解决上述现有技术的不足,本实用新型提供一种基于光纤环形激光器的法布里-珀罗干涉仪气压传感器,将基于单模光纤的开放式纤内气泡结构法布里-珀罗干涉仪接入到环形激光器中。该光纤干涉仪一方面起到气压传感的作用,一方面作为光学滤波器,从而使得激光器输出激光的中心波长受气压的调制。通过测量激光器输出激光的中心波长即可获得被测气体的气压。激光器输出激光具有光强大、超窄线宽的特性,为其中心波长的准确确定提供了保证。另一方面,由于基于单模光纤的开放式纤内气泡结构法布里-珀罗干涉仪长度远小于激光谐振腔的长度,因此该气压传感测量系统几乎不受光纤干涉仪温度的影响,具有温度不敏感的优点。In order to solve the above-mentioned deficiencies in the prior art, the utility model provides a Fabry-Perot interferometer air pressure sensor based on a fiber ring laser. connected to the ring laser. On the one hand, the optical fiber interferometer plays the role of air pressure sensing, and on the other hand, it acts as an optical filter, so that the central wavelength of the laser output laser is modulated by the air pressure. The pressure of the measured gas can be obtained by measuring the central wavelength of the laser output from the laser. The output laser of the laser has the characteristics of strong light and ultra-narrow line width, which provides a guarantee for the accurate determination of its central wavelength. On the other hand, since the length of the Fabry-Perot interferometer based on the open fiber bubble structure of the single-mode fiber is much smaller than the length of the laser resonator, the air pressure sensing measurement system is hardly affected by the temperature of the fiber interferometer, Has the advantage of being temperature insensitive.
本实用新型所采用的技术方案:一种基于光纤环形激光器的法布里-珀罗干涉仪气压传感器,包括泵浦激光器、波分复用器、掺铒光纤、光环形器、法布里-珀罗干涉仪,1*2型光纤耦合器、光纤光谱仪,其特征在于:所述的法布里-珀罗干涉仪包括单模光纤,单模光纤一端端面为斜面,且内部有一个气泡,气泡上方有一个小孔,使气泡与外部连通,从而构成一个法布里-珀罗干涉仪;波分复用器一边的两个端口分别经连接光纤与泵浦激光器以及掺铒光纤相连接,掺铒光纤的另一端与光环形器的一端相连接,光环形器的另一端经连接光纤与法布里-珀罗干涉仪相连接,光环形器的第三端经连接光纤与1*2型光纤耦合器相连;1*2型光纤耦合器的另一端经连接光纤分别与光纤光谱仪和波分复用器相连接。The technical solution adopted in the utility model: a Fabry-Perot interferometer air pressure sensor based on a fiber optic ring laser, including a pump laser, a wavelength division multiplexer, an erbium-doped optical fiber, an optical circulator, and a Fabry-Perot interferometer. Perot interferometer, 1*2 fiber coupler, fiber optic spectrometer, characterized in that: the Fabry-Perot interferometer includes a single-mode fiber, one end of the single-mode fiber is a bevel, and there is a bubble inside, There is a small hole above the bubble, which connects the bubble with the outside, thus forming a Fabry-Perot interferometer; the two ports on one side of the wavelength division multiplexer are respectively connected to the pump laser and the erbium-doped fiber through the connecting fiber, The other end of the erbium-doped fiber is connected to one end of the optical circulator, the other end of the optical circulator is connected to the Fabry-Perot interferometer through the connecting fiber, and the third end of the optical circulator is connected to the 1*2 The other end of the 1*2 type fiber coupler is respectively connected to the fiber optic spectrometer and the wavelength division multiplexer through the connecting fiber.
其中,泵浦激光器的输出波长可为980nm,对应波分复用器可采用980/1550nm型光纤波分复用器;1*2型光纤耦合器的分光比值较小的一端经连接光纤与光纤光谱仪相连,其分光比值大的一端经连接光纤与光环形器相连;单模光纤内部的气泡直径为30~40μm,斜面与气泡之间的距离为20~50μm,且斜面的倾斜度为5°~10°,小孔直径大小为5~30μm,掺铒光纤的长度为1~10m,连接光纤可采用G.652、G.653和G.655单模光纤。Among them, the output wavelength of the pump laser can be 980nm, and the corresponding wavelength division multiplexer can use a 980/1550nm fiber wavelength division multiplexer; the end of the 1*2 fiber coupler with a smaller splitting ratio is connected to the optical fiber and the optical fiber The spectrometer is connected, and the end with a large splitting ratio is connected to the optical circulator through the connecting fiber; the diameter of the bubble inside the single-mode fiber is 30-40 μm, the distance between the slope and the bubble is 20-50 μm, and the slope of the slope is 5° ~10°, the diameter of the small hole is 5~30μm, the length of the erbium-doped fiber is 1~10m, and the connecting fiber can be G.652, G.653 and G.655 single-mode fiber.
本实用新型的有益效果是:The beneficial effects of the utility model are:
1.法布里-珀罗干涉仪的制备是基于普通的G.652、G.653或G.655单模光纤,利用飞秒激光在光纤端面刻蚀一个小坑,然后利用熔接技术制备一个纤内气泡结构的法布里-珀罗干涉仪;接下来利用聚焦的飞秒激光束将气泡击穿,形成开放式法布里-珀罗干涉仪具有制备方便,结构简单等优点。1. The preparation of the Fabry-Perot interferometer is based on ordinary G.652, G.653 or G.655 single-mode fiber, using a femtosecond laser to etch a small pit on the end face of the fiber, and then using fusion splicing technology to prepare a A Fabry-Perot interferometer with a bubble structure in the fiber; then the bubbles are broken down by a focused femtosecond laser beam to form an open Fabry-Perot interferometer, which has the advantages of convenient preparation and simple structure.
2.该法布里-珀罗干涉仪一方面起到气压传感的作用,一方面作为光学滤波器,从而使得激光器输出激光的中心波长受到气压的调制。2. On the one hand, the Fabry-Perot interferometer plays the role of air pressure sensing, and on the other hand, it acts as an optical filter, so that the central wavelength of the laser output laser is modulated by the air pressure.
3.该法布里-珀罗干涉仪中的单模光纤一端端面为斜面,减少了端面的菲涅耳反射产生的寄生法布里-珀罗干涉。3. One end face of the single-mode optical fiber in the Fabry-Perot interferometer is inclined, which reduces the parasitic Fabry-Perot interference generated by the Fresnel reflection of the end face.
4.将法布里-珀罗干涉仪连接于光纤环形激光器的谐振腔光路中,构成一个基于光纤环形激光器的气压传感测量系统。由于光纤激光器输出的激光具有光强大和超窄线宽的特性,有利于其中心波长的准确测定,即为准确测量被测气体的压强提供了保证,最终可以实现气体压强的高精度传感测量。4. Connect the Fabry-Perot interferometer to the optical path of the resonant cavity of the fiber ring laser to form a pressure sensing measurement system based on the fiber ring laser. Since the laser output by the fiber laser has the characteristics of light intensity and ultra-narrow linewidth, it is conducive to the accurate determination of its central wavelength, which provides a guarantee for accurate measurement of the pressure of the gas to be measured, and finally can realize high-precision sensing and measurement of gas pressure .
附图说明Description of drawings
下面结合附图及具体方式对本实用新型作进一步说明。Below in conjunction with accompanying drawing and specific mode, the utility model is further described.
图1为基于光纤环形激光器的法布里-珀罗干涉仪气压传感器的应用实施示意图;Fig. 1 is the application implementation schematic diagram of the Fabry-Perot interferometer air pressure sensor based on the fiber ring laser;
图2为基于单模光纤的法布里-珀罗干涉仪气压传感结构示意图。Fig. 2 is a schematic diagram of the air pressure sensing structure of a Fabry-Perot interferometer based on a single-mode fiber.
图中:1.泵浦激光器,2.波分复用器,3.掺铒光纤,4.光环形器,5.法布里-珀罗干涉仪,6.1*2型光纤耦合器,7.光纤光谱仪,8.小孔,9.气泡,10.斜面。In the figure: 1. Pump laser, 2. Wavelength division multiplexer, 3. Erbium-doped fiber, 4. Optical circulator, 5. Fabry-Perot interferometer, 6.1*2 fiber coupler, 7. Fiber optic spectrometer, 8. Small hole, 9. Bubble, 10. Bevel.
具体实施方式detailed description
波分复用器(2)的两个端口经连接光纤分别与泵浦激光器(1)以及掺铒光纤(3)相连接;掺铒光纤(3)的另一端与光环形器(4)的一端相连接,光环形器(4)的另一端经连接光纤与法布里-珀罗干涉仪(5)相连接,光环形器(4)的第三端经连接光纤与1*2型光纤耦合器(6)相连;1*2型光纤耦合器(6)的另一端经连接光纤分别与光纤光谱仪(7)和波分复用器(2)相连接,如图1;然后将具有传感作用的法布里-珀罗干涉仪(5)置于不同的气压腔中进行传感测量,当置于不同的气压环境中,气泡内的折射率将不同,最终造成激光器输出激光的中心波长发生漂移。同时光纤激光器输出的激光具有光强大和超窄线宽的特性,有利于其中心波长的准确测定,实现气体气压的的高精度测量。其具有制备简单、灵敏度高、测量范围广、交叉灵敏度低等优点。The two ports of the wavelength division multiplexer (2) are respectively connected with the pump laser (1) and the erbium-doped fiber (3) through the connecting fiber; the other end of the erbium-doped fiber (3) is connected with the optical circulator (4) One end is connected, the other end of the optical circulator (4) is connected to the Fabry-Perot interferometer (5) through the connecting fiber, and the third end of the optical circulator (4) is connected to the 1*2 type optical fiber through the connecting fiber The coupler (6) is connected; the other end of the 1*2 type fiber coupler (6) is connected with the fiber optic spectrometer (7) and the wavelength division multiplexer (2) respectively through the connecting fiber, as shown in Figure 1; The sensitive Fabry-Perot interferometer (5) is placed in different air pressure cavities for sensing and measurement. When placed in different air pressure environments, the refractive index in the bubble will be different, and finally the center of the laser output laser will be caused. The wavelength shifts. At the same time, the laser output by the fiber laser has the characteristics of strong light and ultra-narrow line width, which is conducive to the accurate determination of its central wavelength and the realization of high-precision measurement of gas pressure. It has the advantages of simple preparation, high sensitivity, wide measurement range and low cross-sensitivity.
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| CN108120460A (en) * | 2018-02-28 | 2018-06-05 | 中国科学技术大学 | Optical fiber Fabry Perot sensor and preparation method thereof, test device |
| CN108844561A (en) * | 2018-08-31 | 2018-11-20 | 中国科学技术大学 | Fabry-perot optical fiber bubble cavity sensor and preparation method thereof |
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| CN108120460A (en) * | 2018-02-28 | 2018-06-05 | 中国科学技术大学 | Optical fiber Fabry Perot sensor and preparation method thereof, test device |
| CN108844561A (en) * | 2018-08-31 | 2018-11-20 | 中国科学技术大学 | Fabry-perot optical fiber bubble cavity sensor and preparation method thereof |
| CN108844561B (en) * | 2018-08-31 | 2024-05-17 | 中国科学技术大学 | Optical fiber Fabry-Perot bubble cavity sensor and manufacturing method thereof |
| CN110207806A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of oblique angle end face optical fibre vibration sensor and its method of measurement vibration |
| US20210164853A1 (en) * | 2019-11-29 | 2021-06-03 | Meggitt Sa | Optical sensor for the measurement of physical parameters in harsh environments and methods of making and using the same |
| CN111442741A (en) * | 2020-05-21 | 2020-07-24 | 中国计量大学 | Non-linear interference type bending sensor |
| CN115683444A (en) * | 2022-11-10 | 2023-02-03 | 常州厚德再生资源科技有限公司 | Optical fiber gas pressure sensor and detection method of waste gas generated by disassembling waste power batteries of optical fiber gas pressure sensor |
| CN115683444B (en) * | 2022-11-10 | 2023-09-26 | 常州厚德再生资源科技有限公司 | An optical fiber gas pressure sensor and its detection method for waste gas from dismantling of used power batteries |
| CN115839794A (en) * | 2022-12-28 | 2023-03-24 | 江苏理工学院 | Fast response optical fiber relative air pressure sensor applied to environment-friendly plastic-resin composite device and control method thereof |
| CN116481701A (en) * | 2023-04-07 | 2023-07-25 | 江苏理工学院 | A hydraulic sensor based on optical fiber sensing transparency effect and its measurement method |
| CN119779367A (en) * | 2024-12-30 | 2025-04-08 | 中国科学院电工研究所 | An optical path structure for improving the precision of interference fringes of Fabry-Perot sensors |
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