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CN204981134U - Adopt tubular micro -filtration membrane's hydrofluoric acid recycling processed system - Google Patents

Adopt tubular micro -filtration membrane's hydrofluoric acid recycling processed system Download PDF

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Publication number
CN204981134U
CN204981134U CN201520761129.4U CN201520761129U CN204981134U CN 204981134 U CN204981134 U CN 204981134U CN 201520761129 U CN201520761129 U CN 201520761129U CN 204981134 U CN204981134 U CN 204981134U
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tank
membrane module
water
tubular membrane
tubular
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朱建初
岳立毅
孙慕天
李王羽
袁维乾
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NANJING DANHENG TECHNOLOGY Co Ltd
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NANJING DANHENG TECHNOLOGY Co Ltd
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Abstract

本实用新型涉一种采用管式微滤膜的氢氟酸回收处理系统,包括调节处理废水槽、浓缩槽、管式膜组件、过滤水槽、污泥贮槽和板框压滤机;所述调节处理废水槽与原水进水口连通,调节处理废水槽的出水口与浓缩槽的入水口连通;浓缩槽的出水口与管式膜组件的进水口端连通;氢氟酸废液经调解处理通过溢流的方式通入浓缩槽,用循环泵输送到管式膜组件进行固液分离。此时大流量的废液在浓缩槽和管式膜组件之间循环,而透过管式膜组件渗出的氢氟酸通过滤水出口端流出,直接回用。此工艺中管式膜组件取代了传统的沉淀池和过滤设备,不再需要沉淀和预过滤,就可直接进行过滤实现固体颗粒和液体的分离。

The utility model relates to a hydrofluoric acid recovery and treatment system using a tubular microfiltration membrane, which includes a waste water tank for regulating treatment, a concentration tank, a tubular membrane module, a filtering water tank, a sludge storage tank and a plate and frame filter press; the regulating The waste water treatment tank is connected to the raw water inlet, and the outlet of the waste water treatment tank is adjusted to be connected to the water inlet of the concentration tank; the water outlet of the concentration tank is connected to the water inlet end of the tubular membrane module; It is passed into the concentration tank by means of flow, and is transported to the tubular membrane module by a circulation pump for solid-liquid separation. At this time, the large flow of waste liquid circulates between the concentrating tank and the tubular membrane module, and the hydrofluoric acid seeped through the tubular membrane module flows out through the outlet port of the filtered water and is directly reused. In this process, the tubular membrane module replaces the traditional sedimentation tank and filtration equipment, no sedimentation and pre-filtration are needed, and the separation of solid particles and liquid can be achieved by direct filtration.

Description

一种采用管式微滤膜的氢氟酸回收处理系统A hydrofluoric acid recovery and treatment system using tubular microfiltration membrane

技术领域 technical field

本实用新型涉及工业废水回用处理领域,尤其是一种采用管式微 The utility model relates to the field of industrial waste water reuse treatment, in particular to a pipe-type micro

滤膜的氢氟酸回收处理系统。 Membrane hydrofluoric acid recovery treatment system.

背景技术 Background technique

氢氟酸是氟化氢气体的水溶液,无色、发烟的腐蚀性液体,有剧 Hydrofluoric acid is an aqueous solution of hydrogen fluoride gas, a colorless, fuming, corrosive liquid with violent

烈刺激性气味。因为氢原子和氟原子间结合的能力相对较强,使得氢 Strong pungent odor. Because of the relatively strong binding ability between hydrogen atoms and fluorine atoms, hydrogen

氟酸在水中不能完全电离,所以理论上低浓度的氢氟酸是一种弱酸。 Hydrofluoric acid cannot be completely ionized in water, so theoretically low concentration of hydrofluoric acid is a weak acid.

具有极强的腐蚀性,能强烈地腐蚀金属、玻璃和含硅的物体。 It is extremely corrosive and can strongly corrode metal, glass and silicon-containing objects.

随着工业社会的不断发展,氢氟酸在各工业领域都有出现,在光 With the continuous development of industrial society, hydrofluoric acid has appeared in various industrial fields.

伏、冶金、金属加工、玻璃、电子、电镀等行业,这些行业都需要大 Volt, metallurgy, metal processing, glass, electronics, electroplating and other industries, these industries require large

量的氢氟酸用于蚀刻和清洗,同时也产生大量的氢氟酸废液。这些废 A large amount of hydrofluoric acid is used for etching and cleaning, and a large amount of hydrofluoric acid waste liquid is also produced. these waste

酸来源广、数量大,净化处理及综合利用比较困难,而直接排放又会 The source of acid is wide and the quantity is large, so it is difficult to purify and comprehensively utilize it, and direct discharge will cause

对环境造成极为严重的污染。由于产生的氢氟酸废液含量的不同和排 Cause extremely serious pollution to the environment. Due to the difference in the content of hydrofluoric acid waste liquid and the discharge

放量的不同,它们对环境的危害程度也不同,但都会对环境中的生物造 The degree of harm to the environment is also different according to the amount of them, but all of them will cause harm to the organisms in the environment.

成极大危害,即使微量氟及其化合物也会对人类和动物的肌体造成极 Even a trace amount of fluorine and its compounds can cause great harm to human and animal body

其严重的后果。因此,充分回收利用所有含氟废物是工业生产中一项 its serious consequences. Therefore, the full recycling of all fluorine-containing waste is an important part of industrial production.

最重要的任务。 most important tasks.

氢氟酸在光伏、冶金、玻璃行业中被用于蚀刻和清洗过程中广泛 Hydrofluoric acid is widely used in etching and cleaning processes in photovoltaic, metallurgy, and glass industries

使用,使用过的氢氟酸废液一般还存1—10%有效浓度,但是含有大 After use, the used hydrofluoric acid waste liquid generally still has an effective concentration of 1-10%, but it contains a large amount of

量的悬浮固体和颗粒物,造成该废液无法回用,并且传统的沉淀分离 A large amount of suspended solids and particulate matter, resulting in the waste liquid can not be reused, and the traditional sedimentation separation

工艺也无法实现氢氟酸废液中悬浮物与氢氟酸的有效分离。因为氢氟 The process also cannot realize the effective separation of suspended solids and hydrofluoric acid in the hydrofluoric acid waste liquid. Because of hydrofluoride

酸废液中悬浮颗粒物浓度很高,不适合采用传统过滤器,滤芯、袋滤 The concentration of suspended particles in the acid waste liquid is very high, so it is not suitable to use traditional filters, filter elements, and bag filters

器进行截留,也不适用于超滤分离,同时颗粒物的沉淀性极差,也不 It is not suitable for ultrafiltration separation, and the sedimentation of particles is extremely poor, and it is not suitable for

适合采用沉淀或气浮方式进行固液分离。因为氢氟酸要回收使用,不 It is suitable for solid-liquid separation by precipitation or air flotation. Because hydrofluoric acid needs to be recycled, no

可添加药剂,所以无法采用传统沉淀池工艺进行固液分离。 Chemicals can be added, so the traditional sedimentation tank process cannot be used for solid-liquid separation.

实用新型内容 Utility model content

本实用新型所要解决的技术问题是提供一种不需添加药剂就能 The technical problem to be solved by the utility model is to provide a

对含有悬浮物的氢氟酸溶液过滤回收的采用管式微滤膜的含磷酸根 Phosphate-containing phosphate radicals recovered by filtration of hydrofluoric acid solutions containing suspended solids using tubular microfiltration membranes

废水处理系统,该系统避免了昂贵药剂的同时,还减少了污泥量。 Wastewater treatment system, which avoids expensive chemicals and reduces the amount of sludge.

为解决上述技术问题,本实用新型是按如下方式实现的:本实用 In order to solve the above technical problems, the utility model is realized in the following way: the utility model

新型所述一种采用管式微滤膜的氢氟酸回收处理系统,包括调节处理 A hydrofluoric acid recovery and treatment system using tubular microfiltration membranes, including conditioning treatment

废水槽、浓缩槽、管式膜组件、过滤水槽、污泥贮槽和板框压滤机; Waste water tanks, thickening tanks, tubular membrane modules, filter water tanks, sludge storage tanks and plate and frame filter presses;

所述调节处理废水槽与原水进水口连通,调节处理废水槽的出水口与 The waste water tank for regulating treatment is communicated with the raw water inlet, and the water outlet of the waste water tank for regulating treatment is connected with the

浓缩槽的入水口连通;浓缩槽的出水口与管式膜组件的进水口端连 The water inlet of the thickening tank is connected; the water outlet of the thickening tank is connected with the water inlet of the tubular membrane module

通;所述管式膜组件上设置有滤水出口端及浓水回流端,滤水出口端 through; the tubular membrane module is provided with a filtered water outlet port and a concentrated water return port, and the filtered water outlet port

与过滤水槽连通;浓水回流端与管式膜组件的进水口端连通,浓水回 It is connected with the filter tank; the concentrated water return port is connected with the water inlet port of the tubular membrane module, and the concentrated water return

流端设置有污泥浓缩液排放管路,污泥浓缩液排放管路与污泥贮槽连 The flow end is provided with a sludge concentrate discharge pipeline, and the sludge concentrate discharge pipeline is connected to the sludge storage tank.

通;所述污泥贮槽后方设置有板框压滤机,板框压滤机的脱离水出口 pass; the rear of the sludge storage tank is provided with a plate and frame filter press, and the detached water outlet of the plate and frame filter press

与调节处理废水槽连通。 It is connected with the regulating treatment waste water tank.

所述管式膜组件由错流过滤的管式微滤膜组成,管式膜组件中设 The tubular membrane module is composed of tubular microfiltration membranes for cross-flow filtration, and the tubular membrane module is equipped with

置有循环泵。 Equipped with circulation pump.

所述浓缩槽中设置有液位控制器。 A liquid level controller is arranged in the concentration tank.

上述采用管式微滤膜的氢氟酸回收处理系统所采用的工艺方法 The process method adopted in the above-mentioned hydrofluoric acid recovery and treatment system using tubular microfiltration membrane

包括如下步骤: Including the following steps:

1)将待处理的原水通入调节处理废水槽中进行调节处理; 1) Pass the raw water to be treated into the regulated treatment waste water tank for regulated treatment;

2)将调节处理废水槽中的混合液通过溢流的方式通入浓缩槽 2) Pass the mixed liquid in the waste water tank for regulating treatment into the concentration tank by way of overflow

中,浓缩槽容水量应大于循环泵3分钟的吸水量,浓缩槽中设置 In the concentration tank, the water capacity of the concentration tank should be greater than the water absorption capacity of the circulating pump for 3 minutes, and the concentration tank should be set

液位控制器对液位实时监控; The liquid level controller monitors the liquid level in real time;

3)通过循环泵将浓缩槽内的水注入管式膜组件内进行固液分 3) The water in the concentration tank is injected into the tubular membrane module through the circulating pump for solid-liquid separation.

离,氢氟酸废液在浓缩槽和管式膜组件之间循环; Separated, the hydrofluoric acid waste liquid circulates between the concentrating tank and the tubular membrane module;

4)管式膜组件将滤出的氢氟酸溶液存放于过滤水槽中直接回 4) The tubular membrane module stores the filtered hydrofluoric acid solution in the filter water tank and returns it directly to

用或输送至后续工艺; used or transported to subsequent processes;

5)流经管式膜组件的废水将再次被通入管式膜组件中进行循 5) The wastewater flowing through the tubular membrane module will be passed into the tubular membrane module again for circulation.

环过滤,此过程中产生的含有污泥的浓缩液将被排泄至污泥贮槽 Ring filtration, the concentrate containing sludge produced during this process will be discharged to the sludge storage tank

内; Inside;

6)通过板框压滤机对污泥贮槽内的浓缩液进行污泥脱水处 6) Sludge dehydration of the concentrated solution in the sludge storage tank is carried out through the plate and frame filter press

理,污泥脱水处理后的脱离水将再次被注入最前端的调节处理废 After sludge dehydration treatment, the dewatered water will be injected into the front-end conditioning treatment waste again.

水槽中进行第二次处理;对脱水后的泥饼进行集中处理。 The second treatment is carried out in the water tank; the dehydrated mud cake is subjected to centralized treatment.

本实用新型的积极效果:本实用新型所述一种采用管式微滤膜的 Positive effects of the utility model: the utility model adopts a tubular microfiltration membrane

氢氟酸回收处理系统,氢氟酸废液经调解处理通过溢流的方式通入浓 Hydrofluoric acid recovery and treatment system, the hydrofluoric acid waste liquid is passed into the concentrated

缩槽,用循环泵输送到管式膜组件进行固液分离。此时大流量的废液 The shrinkage tank is transported to the tubular membrane module by a circulating pump for solid-liquid separation. Large flow of waste liquid at this time

在浓缩槽和管式膜组件之间循环,而透过管式膜组件渗出的氢氟酸通 Circulate between the concentrating tank and the tubular membrane module, and the hydrofluoric acid leaked through the tubular membrane module is passed through

过滤水出口端流出,直接回用。此工艺中管式膜组件取代了传统的沉 The filtered water flows out from the outlet end and is reused directly. In this process, the tubular membrane module replaces the traditional sinking

淀池和过滤设备,不再需要沉淀和预过滤,就可直接进行过滤实现固 Sediment pool and filtration equipment, no need for sedimentation and pre-filtration, can be directly filtered to achieve solid

体颗粒和液体的分离。 Separation of bulk particles and liquids.

在后续阶段可通过板框压滤机实现彻底的固液分离,固体微粒可 In the subsequent stage, a complete solid-liquid separation can be achieved through a plate and frame filter press, and solid particles can be

回收利用,回收率接近100%,可将固体废弃物资源化;该系统中所 Recycling, the recovery rate is close to 100%, which can turn solid waste into resources;

涉及到的设备清洗方便,仅仅需要常规的无机酸、碱和氧化剂,没有 The equipment involved is easy to clean, and only needs conventional inorganic acids, alkalis and oxidants, without

废水排放限制。 Wastewater discharge restrictions.

管式膜组件作为过滤的核心部件,采用管式大流量错流过滤,水 As the core component of filtration, the tubular membrane module adopts tubular large-flow cross-flow filtration, and the water

流切向高速流过膜表面,在过滤的同时还有冲刷清洁膜表面的作用, The flow tangentially flows through the surface of the membrane at high speed, and it also has the function of scouring and cleaning the surface of the membrane while filtering.

污染物不易累积,膜面不易污染,适合过滤高浊度(最高5%的悬浮 Pollutants are not easy to accumulate, and the membrane surface is not easy to contaminate, suitable for filtering high turbidity (up to 5% suspended

固体浓度)和污染物粒径相近的料液;滤后的产水浊度<1NTU,可 Solid concentration) and the feed liquid with the particle size of the pollutants are similar; the turbidity of the filtered product water is less than 1NTU, which can be

以有效的保护反渗透。管式膜组件可完全取代沉淀池和过滤等多道处 With effective protection against reverse osmosis. Tubular membrane modules can completely replace multiple channels such as sedimentation tanks and filtration

理及过滤设备,不需沉淀和预过滤,可直接进行过滤实现固体颗粒和 Treatment and filtration equipment, without sedimentation and pre-filtration, can be directly filtered to achieve solid particles and

液体的分离,管式膜组件作为反渗透或蒸发器等脱盐工艺的管式膜软 Liquid separation, tubular membrane modules are used as tubular membrane soft membranes for desalination processes such as reverse osmosis or

化处理,大大缩短简化了工艺流程,减少了系统占地面积,提高了后 Chemical treatment greatly shortens and simplifies the process flow, reduces the system footprint, and improves the after-sales

续设备的回收率,并有效延长其使用寿命。相较于其他膜组件,管式 The recovery rate of continuous equipment and effectively prolong its service life. Compared with other membrane components, tubular

膜组件有强度好、耐摩擦、耐高浓度药剂清洗、可在极高悬浮固体浓 The membrane module has good strength, friction resistance, high concentration chemical cleaning resistance, and can be used in extremely high concentration of suspended solids.

度下稳定运行、可耐受进水水质波动等优良性能。 It has excellent performances such as stable operation at high temperature and tolerance to fluctuations in influent water quality.

附图说明 Description of drawings

下面结合附图和具体实施方式对本实用新型作进一步详细的说 Below in conjunction with accompanying drawing and specific embodiment, the utility model is described in further detail

明。 bright.

图1是本实用新型的结构示意图。 Fig. 1 is a structural representation of the utility model.

具体实施方式 detailed description

如图1所示,本实用新型所述采用管式微滤膜的氢氟酸回收处理 As shown in Figure 1, the utility model adopts the hydrofluoric acid recovery treatment of tubular microfiltration membrane

系统,包括调节处理废水槽、浓缩槽、管式膜组件、过滤水槽、污泥 System, including regulating treatment waste water tank, thickening tank, tubular membrane module, filter tank, sludge

贮槽和板框压滤机;所述调节处理废水槽与原水进水口连通,调节处 Storage tank and plate-and-frame filter press; the wastewater tank for regulating treatment is connected with the raw water inlet, and the regulating place

理废水槽的出水口与浓缩槽的入水口连通;浓缩槽的出水口与管式膜 The water outlet of the wastewater treatment tank is connected with the water inlet of the concentration tank; the water outlet of the concentration tank is connected with the tubular membrane

组件的进水口端连通;所述管式膜组件上设置有滤水出口端及浓水回 The water inlet port of the module is connected; the tubular membrane module is provided with a filter water outlet port and a concentrated water return port.

流端,滤水出口端与过滤水槽连通;浓水回流端与管式膜组件的进水 At the flow end, the outlet end of the filtered water is connected to the filter water tank; the return end of the concentrated water is connected to the water inlet of the tubular membrane module

口端连通,浓水回流端设置有污泥浓缩液排放管路,污泥浓缩液排放 The mouth end is connected, and the concentrated water return end is equipped with a sludge concentrate discharge pipeline, and the sludge concentrate is discharged

管路与污泥贮槽连通;所述污泥贮槽后方设置有板框压滤机,板框压 The pipeline is connected with the sludge storage tank; a plate and frame filter press is arranged behind the sludge storage tank, and the plate and frame filter press

滤机的脱离水出口与调节处理废水槽连通。 The detached water outlet of the filter is communicated with the regulating treatment waste water tank.

所述管式膜组件由错流过滤的管式微滤膜组成,管式膜组件中设 The tubular membrane module is composed of tubular microfiltration membranes for cross-flow filtration, and the tubular membrane module is equipped with

置有循环泵。 Equipped with circulation pump.

所述浓缩槽中设置有液位控制器。 A liquid level controller is arranged in the concentration tank.

上述采用管式微滤膜的氢氟酸回收处理系统所采用的工艺方法 The process method adopted in the above-mentioned hydrofluoric acid recovery and treatment system using tubular microfiltration membrane

包括如下步骤: Including the following steps:

1)将待处理的原水通入调节处理废水槽中进行调节处理; 1) Pass the raw water to be treated into the regulated treatment waste water tank for regulated treatment;

2)将调节处理废水槽中的混合液通过溢流的方式通入浓缩槽中,浓 2) Pass the mixed liquid in the waste water tank for regulating treatment into the concentration tank through overflow, and concentrate

缩槽容水量应大于循环泵3分钟的吸水量,浓缩槽中设置液位控 The water capacity of the shrinking tank should be greater than the 3-minute water absorption of the circulating pump, and the liquid level control is set in the concentrating tank.

制器对液位实时监控; The controller monitors the liquid level in real time;

3)通过循环泵将浓缩槽内的水注入管式膜组件内进行固液分离,氢 3) The water in the concentration tank is injected into the tubular membrane module through the circulation pump for solid-liquid separation, and the hydrogen

氟酸废液在浓缩槽和管式膜组件之间循环; Fluoric acid waste liquid circulates between the concentrating tank and the tubular membrane module;

4)管式膜组件将滤出的氢氟酸溶液存放于过滤水槽中直接回用或输 4) The tubular membrane module stores the filtered hydrofluoric acid solution in the filter water tank for direct reuse or transport

送至后续工艺; sent to the follow-up process;

5)流经管式膜组件的废水将再次被通入管式膜组件中进行循环过 5) The wastewater flowing through the tubular membrane module will be passed into the tubular membrane module again for circulation.

滤,此过程中产生的含有污泥的浓缩液将被排泄至污泥贮槽内; Filtration, the concentrated liquid containing sludge generated during this process will be discharged into the sludge storage tank;

6)通过板框压滤机对污泥贮槽内的浓缩液进行污泥脱水处理,污泥 6) Sludge dehydration treatment is performed on the concentrated solution in the sludge storage tank through a plate and frame filter press, and the sludge

脱水处理后的脱离水将再次被注入最前端的调节处理废水槽中进 The dehydrated dehydrated water will be re-injected into the front-end conditioning waste water tank for further processing.

行第二次处理;对脱水后的泥饼进行集中处理。 Carry out the second treatment; carry out concentrated treatment on the mud cake after dehydration.

Claims (3)

1.一种采用管式微滤膜的氢氟酸回收处理系统,其特征在于: 1. A hydrofluoric acid recovery treatment system that adopts tubular microfiltration membrane, is characterized in that: 包括调节处理废水槽、浓缩槽、管式膜组件、过滤水槽、污泥贮槽和 Including regulating wastewater tank, thickening tank, tubular membrane module, filter water tank, sludge storage tank and 板框压滤机;所述调节处理废水槽与原水进水口连通,调节处理废水 Plate and frame filter press; the regulated and treated wastewater tank is connected to the raw water inlet, and the regulated and treated wastewater 槽的出水口与浓缩槽的入水口连通;浓缩槽的出水口与管式膜组件的 The water outlet of the tank is connected with the water inlet of the thickening tank; the water outlet of the thickening tank is connected with the tubular membrane module 进水口端连通;所述管式膜组件上设置有滤水出口端及浓水回流端, The water inlet end is connected; the tubular membrane module is provided with a filtered water outlet end and a concentrated water return end, 滤水出口端与过滤水槽连通;浓水回流端与管式膜组件的进水口端连 The filtered water outlet port is connected with the filtered water tank; the concentrated water return port is connected with the water inlet port of the tubular membrane module. 通,浓水回流端设置有污泥浓缩液排放管路,污泥浓缩液排放管路与 The concentrated water return end is provided with a sludge concentrate discharge pipeline, and the sludge concentrate discharge pipeline is connected to the 污泥贮槽连通;所述污泥贮槽后方设置有板框压滤机,板框压滤机的 The sludge storage tank is connected; a plate and frame filter press is arranged behind the sludge storage tank, and the plate and frame filter press 脱离水出口与调节处理废水槽连通。 The detached water outlet is communicated with the regulating treatment waste water tank. 2.根据权利要求1所述的一种采用管式微滤膜的氢氟酸回收 2. a kind of hydrofluoric acid that adopts tubular microfiltration membrane according to claim 1 reclaims 处理系统,其特征在于:所述管式膜组件由错流过滤的管式微滤膜组 The processing system is characterized in that: the tubular membrane module is composed of a tubular microfiltration membrane group for cross-flow filtration 成,管式膜组件中设置有循环泵。 As a result, a circulating pump is arranged in the tubular membrane module. 3.根据权利要求1所述的一种采用管式微滤膜的氢氟酸回收 3. a kind of hydrofluoric acid that adopts tubular microfiltration membrane according to claim 1 reclaims 处理系统,其特征在于:所述浓缩槽中设置有液位控制器。 The treatment system is characterized in that a liquid level controller is set in the concentration tank.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110482757A (en) * 2019-08-25 2019-11-22 武汉和时利自动化系统工程有限公司 A kind of on-line monitoring of pollution sources online detection instrument waste liquid and disposal system
CN111333211A (en) * 2018-12-18 2020-06-26 东睿材科股份有限公司 Tubular membrane filtration system and method of operation
CN112473377A (en) * 2020-12-18 2021-03-12 青岛润扬环境科技有限公司 Tubular micro-filtration circulating water tank
CN117509799A (en) * 2023-12-26 2024-02-06 苏州晶洲装备科技有限公司 A recovery device and method for hydrofluoric acid waste liquid
CN117865072A (en) * 2023-04-26 2024-04-12 福建省龙氟新材料有限公司 An electronic grade hydrofluoric acid recovery device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111333211A (en) * 2018-12-18 2020-06-26 东睿材科股份有限公司 Tubular membrane filtration system and method of operation
CN110482757A (en) * 2019-08-25 2019-11-22 武汉和时利自动化系统工程有限公司 A kind of on-line monitoring of pollution sources online detection instrument waste liquid and disposal system
CN112473377A (en) * 2020-12-18 2021-03-12 青岛润扬环境科技有限公司 Tubular micro-filtration circulating water tank
CN117865072A (en) * 2023-04-26 2024-04-12 福建省龙氟新材料有限公司 An electronic grade hydrofluoric acid recovery device
CN117509799A (en) * 2023-12-26 2024-02-06 苏州晶洲装备科技有限公司 A recovery device and method for hydrofluoric acid waste liquid

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