CN204496136U - Anti-static device and flat pannel display manufacturing equipment - Google Patents

Abstract

The utility model discloses an antistatic device and flat panel display manufacturing equipment, relates to the field of flat panel display manufacturing, can solve the problem of electrostatic damage to the display panel caused by static electricity accumulation and release in the flat panel display industry, and has low cost, easy installation, use and maintenance. convenient. The anti-static device provided by the utility model includes: an adjustable air supply system for providing compressed gas; a plurality of air outlets, through which the compressed air provided by the adjustable air supply system blows air to the substrate; a discharge needle , arranged in the air outlet, used to ionize the air passing through the vicinity of the needle tip of the discharge needle through discharge, so that the gas blown by the air outlet contains ions.

Description

Antistatic devices and flat panel display manufacturing equipment

technical field

The utility model relates to the field of flat panel display manufacturing, in particular to an antistatic device and flat panel display manufacturing equipment.

Background technique

In the production process of flat panel display panels, the display panels need to be frequently moved and transported, and alignment machines are used in production lines with a high degree of automation to realize these functions. The alignment machine is equipped with a vacuum suction cup. During the transportation process, the vacuum suction cup and the display panel need to frequently contact, fit and separate. The alignment machine and the display panel will cause friction due to these movements, resulting in static electricity accumulation. In addition, the high-speed operation of the alignment machine itself will also generate static electricity accumulation. The accumulated static electricity is released on the contact surface between the alignment machine and the display panel, which is likely to cause electrostatic damage to the display panel, affect product quality, and cause losses.

At present, the way to solve the problem of static electricity is to irradiate X-rays above the substrate. Although X-ray irradiation can achieve the purpose of removing static electricity, X-rays are relatively harmful to the human body (people are required to operate in the work area), and the X-ray generating device Installation, use and maintenance costs are relatively high.

Utility model content

The embodiment of the utility model provides an antistatic device and flat panel display manufacturing equipment, which can solve the problem of static electricity damage to the display panel caused by static electricity accumulation and discharge in the flat panel display industry, and the cost is low, and installation, use and maintenance are convenient.

In order to achieve the above object, the embodiments of the present utility model adopt the following technical solutions:

The utility model provides an antistatic device, which is used in the field of flat panel display manufacturing, comprising: an adjustable gas supply system for providing compressed gas; a plurality of air outlets, the compressed gas provided by the adjustable gas supply system passes through the The air outlet blows air to the substrate; the discharge needle is arranged in the air outlet, and is used to ionize the air passing through the vicinity of the needle tip of the discharge needle through discharge, so that the gas blown by the air outlet contains ions.

Optionally, the air outlet is disposed on a surface of the manufacturing equipment that is in contact with the substrate.

Further, the anti-static device further includes: a control module, configured to control the discharge voltage of the discharge needle, the gas flow rate of the air outlet of the adjustable air supply system, and/or the distance between the air outlet and the The distance from the substrate surface to adjust the concentration of ions reaching the substrate surface.

Further, the antistatic device further includes: a movable device, and a drive control part that drives and controls the movement of the movable device; the plurality of air outlets are arranged on the movable device, and the drive control part connected to the control module.

Optionally, the adjustable air supply system includes a flow control module for controlling the flow of the outlet air, and the flow control module is connected to the control module.

Optionally, a voltage supply circuit for the discharge needle is further included, the voltage supply circuit includes a voltage regulation module, and the voltage regulation module is connected to the control module.

Preferably, a gas injection device is provided in the air outlet, or the air outlet is directly formed by the gas injection device; the gas injection device includes a filter, an air channel and a nozzle; the air inlet of the gas injection device The end is connected with the gas outlet of the adjustable gas supply system through a pipeline, and the compressed gas provided by the adjustable gas supply system enters from the inlet port, and is sprayed out from the nozzle after passing through the filter and the air channel. .

Preferably, the gas flow channel of the gas injection device is further equipped with a pressure control device, which is used to measure and adjust the pressure of the gas sprayed from the spray head, and is connected to the control module.

Preferably, the air path from the adjustable air supply system to the air outlet is further provided with: a uniform pressure chamber formed in a closed space; The air outlet port of the chamber; the air inlet port of the uniform pressure chamber communicates with the air outlet of the adjustable air supply system through a pipeline.

Optionally, the inlet port of the equal pressure chamber is a pipe that gradually becomes thicker.

Optionally, a solenoid valve is provided on the air path between the adjustable air supply system and the air outlet, and the solenoid valve is connected to the control module.

Optionally, the air path from the adjustable air supply system to the air outlet is provided with: a gas branching device, the inlet end of which communicates with the air supply pipeline, and a plurality of air outlet ends, which are connected to the air outlet respectively. The multiple air outlets are connected or directly form the multiple air outlets.

Optionally, the adjustable air supply system is an air compressor.

The utility model also provides a flat panel display manufacturing equipment, which includes any one of the antistatic devices.

Optionally, the flat panel display manufacturing equipment further includes: a distance sensor, configured to sense the distance between the substrate and the flat panel display manufacturing equipment.

Optionally, the flat panel display manufacturing equipment is thermal curing equipment, or testing equipment requiring pressurization, or an alignment/rotation machine.

Optionally, the flat panel display manufacturing equipment is an alignment/rotation machine, a cavity is provided in the main structure of the alignment/rotation machine, and the adjustable air supply of the anti-static device is arranged in the cavity System; the main structure is also formed with a surface in contact with the substrate, and a motion guide groove is arranged on the surface, and the movable device of the antistatic device moves along the motion guide groove.

Optionally, the drive control part of the anti-static device includes a drive gear and a toothed belt; the central axis of the movable device is fixed on the toothed belt, and the toothed belt meshes with the drive gear , so that when the driving gear drives the toothed belt to move, the movable device moves along the moving guide groove.

The antistatic device and the flat panel display manufacturing equipment provided by the embodiment of the present invention set the discharge needle in the air outlet, so that the compressed gas blown to the bottom surface of the substrate contains ions, and the ions in the gas neutralize the static electricity caused by the friction of the substrate to avoid Static electricity is accumulated, so as to avoid static electricity damage to the display panel caused by static electricity discharge, and the device has low cost and is easy to install, use and maintain.

Description of drawings

In order to illustrate the technical solutions in the embodiments of the utility model more clearly, the accompanying drawings required in the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the utility model , for those skilled in the art, other drawings can also be obtained based on these drawings without creative work.

Figure 1 is a schematic diagram of the principle of an antistatic method used in the field of flat panel display manufacturing provided by Embodiment 1 of the present invention;

Fig. 2 is a partial structural schematic diagram of the antistatic device provided by the second embodiment of the utility model;

Fig. 3 is a schematic diagram of the control system of the antistatic device provided by the second embodiment of the utility model;

Fig. 4 is a schematic diagram of the air outlet of the antistatic device provided by the second embodiment of the utility model;

Fig. 5 is a schematic structural view of the gas injection device in the second embodiment of the utility model;

Fig. 6 is a structural schematic diagram of the antistatic device in the second embodiment of the utility model;

Fig. 7 is a schematic diagram of the principle of the thermal curing equipment provided by the second embodiment of the utility model;

Fig. 8 is a schematic structural view of the heating chamber of the thermosetting equipment provided by the second embodiment of the utility model;

Fig. 9 is a schematic diagram of the specific structure of the detection chamber of the detection device provided by the second embodiment of the utility model;

Fig. 10 is a top view structural schematic diagram of an existing alignment machine in Embodiment 2 of the present utility model;

Fig. 11 is a schematic top view structure diagram of the alignment machine provided by the second embodiment of the present invention;

Fig. 12 is a top view with a screen of the alignment machine equipped with an anti-static device in the second embodiment of the utility model;

Fig. 13 is a top view of the driving structure of the anti-static device on the alignment machine in the second embodiment of the utility model;

Fig. 14 is a gas pipeline diagram of the static elimination device on the alignment machine in the second embodiment of the present invention.

reference sign

7-positive ions, 8-negative ions, 9-display panel, 10-substrate, 101-bottom surface, 11-compressed gas,

20-the table of the machine, 21-air outlet, 22-discharge needle, 23-control module, 24-movable device,

241-drive control part, 25-adjustable air supply system, 251-flow control module,

26-voltage supply circuit, 261-voltage regulation module, 27-equal pressure chamber, 271-gas outlet port of equal pressure chamber,

272-the inlet port of the uniform pressure chamber, 28-solenoid valve, 29-gas branching device I,

291-gas distribution device II, 292-gas distribution device III, 30-gas injection device, 31-filter,

32-airway, 33-nozzle, 34-pressure control device, 40-heating chamber, 41-cavity, 42-heating cavity,

43-heating plate, 44-infrared thermometer, 45-thermocouple, 50-detection cavity,

51-low-radiation protective glass cover, 52-detection cavity, 53-polarizer, 54-diffusion plate,

55-backlight group, 56-heating plate, 60-main part of alignment machine, 61-distance sensor,

62-drive control part, 63-vacuum suction cup, 64-drive control part, 65-movement guide groove, 66-center shaft,

67- toothed belt, 68- driving gear, 69- driven wheel of toothed belt, 70- center shaft,

71-connect the air supply pipe of each air outlet, 72-the total air supply pipe.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example.

Embodiment one

The embodiment of the present invention provides an antistatic method used in the field of flat panel display manufacturing. As shown in FIG. Surfaces that are in contact with the manufacturing equipment are shown, such as the lower surface of the substrate 10 shown in FIG. 1 .

During the flat panel display manufacturing process, the flat panel display manufacturing equipment such as alignment machines, manipulators, etc. need to frequently contact, attach and separate the substrate (the substrate in this embodiment is used to collectively refer to the display panel and its semi-finished products), which will Static electricity is accumulated due to friction. In order to solve this problem, in this embodiment, when it is necessary to remove static electricity or prevent static electricity from being generated, the gas containing ions is blown to the bottom surface 101 of the substrate 10. On the one hand, the ions in the gas can neutralize the substrate caused by friction. Static electricity caused; on the other hand, it can also reduce the friction between the manufacturing equipment and the bottom surface 101 of the substrate 10, thereby avoiding the accumulation of static electricity, thereby avoiding the static electricity damage to the display panel caused by the discharge of static electricity, and the method is low in cost, and the corresponding static removal device is installed and used , Easy maintenance.

Specifically, the air outlet can be arranged on the flat-panel display manufacturing equipment to receive the substrate, on the surface that is in contact with the substrate and rubs against it. The bottom surface 101 blows gas containing ions. Further preferably, for manufacturing equipment that needs to perform alignment operations on the substrate 10, such as alignment machines, etc., the substrate 10 can also be held up for alignment by blowing compressed gas containing ions to the bottom surface 101 of the substrate 10 to avoid Static electricity builds up due to friction.

On the basis of the above antistatic method, the utility model provides an antistatic device used in the field of flat panel display manufacturing. The device can be specifically applied to various flat panel display manufacturing equipment to reduce friction and neutralize static electricity on the substrate, thereby Avoid static electricity damage to the display panel caused by electrostatic discharge, low cost, and easy to implement.

Embodiment two

The embodiment of the utility model provides an antistatic device, which is used in the field of flat panel display manufacturing. As shown in Figures 1 and 2, the antistatic device includes: an adjustable air supply system (not shown in the figure) for providing compression Gas; a plurality of air outlets 21, the compressed gas provided by the adjustable air supply system blows air to the bottom surface 101 of the substrate 10 through the air outlet 21, and the bottom surface is the surface where the substrate 10 is in contact with the flat panel display manufacturing equipment; discharge needles 22, Installed in the air outlet 21, it is used to ionize the air passing through the vicinity of the needle tip of the discharge needle 22 through discharge, so that the gas blown by the air outlet 21 contains ions.

Static electricity is generally generated when substrates and flat-panel display manufacturing equipment rub against each other during frequent contact, lamination, alignment, and separation. The contact surface between the manufacturing equipment and the substrate blows the gas containing ions to neutralize the static electricity caused by friction, avoid static electricity accumulation, and eliminate static electricity damage. Among them, preferably, the air outlet 21 blows air to the bottom surface 101 of the substrate 10 (the surface that is in contact with the flat panel display manufacturing equipment and is prone to static electricity accumulation), which can be directly from the bottom to the top of the substrate 10 as shown in FIG. 1 Air can be blown to the bottom surface 101 of the substrate, or blowing air can be selected from the side of the substrate 10 to the bottom surface 101 of the substrate and the contact surface between the two according to actual conditions. In the case of the first type of air blowing from bottom to top to the substrate bottom surface 101, the air outlet 21 can be formed in the flat panel display manufacturing equipment for receiving the substrate, the surface that contacts and rubs with the substrate (the table top 20 of the machine platform) ), the air outlet 21 can be slit-like as shown in FIG. 2 , and can also be discretely distributed air holes.

Wherein, the adjustable gas supply system is used to provide compressed gas (such as compressed air), and the flow rate and pressure of the compressed gas are controllable and can be adjusted according to actual conditions. Usually the air pressure required to compress the gas is 3-5 atmospheres, which is a relatively low pressure in compressed air, and can be achieved by using an ordinary air compressor. This can reduce equipment investment on the one hand, and reduce energy consumption.

The discharge needle 22 is used for discharging after the discharge high voltage is turned on, and ionizes the air near the needle tip, and is generally needle-shaped metal. Specifically, the discharge needles 22 can be arranged according to a certain geometric rule or density, and the discharge high voltage can usually reach 5K to 50KV.

The air outlet 21 is used to blow out the compressed air to form a laminar wind, which is used to bring the ions in the vicinity of the needle tip of the discharge needle 22 to the surface of the substrate where static electricity is accumulated. The air outlet 2 can be slit-shaped, or long and flat, similar to an air source generating device. Of course, the shape of the air outlet 21 can be designed according to the actual situation, so as to eliminate the accumulation of static electricity on the surface of the substrate, and is not limited to the above. In addition, the air outlet 21 is located upwind of the discharge needle 22, that is, the end away from the substrate surface, so that the formed laminar flow can blow the ions ionized by the discharge needle 22 to the substrate surface.

Further, the anti-static device further includes: a control module, which is used to control the discharge voltage of the discharge needle 22, adjust the gas flow rate of the gas outlet of the gas supply system, and/or the distance between the air outlet 21 and the surface of the substrate 10, to adjust the concentration of ions reaching the surface of the substrate 10 . The control module can be set independently, or can directly use the inherent control module of the flat panel display manufacturing equipment itself, as long as the above-mentioned control can be realized.

Specifically, as shown in Figure 3, the anti-static device also includes: a movable device 24 and a drive control part 241 that drives and controls the movement of the movable device, and the plurality of air outlets 21 are arranged on the movable device 24 , the drive control part 241 is connected to the control module 23 , and the movable device 24 cooperates with the drive control part 241 so that the distance from the air outlet 21 to the surface of the substrate 10 can be adjusted by the control module 23 . The adjustable air supply system 25 includes a flow control module 251 for controlling the outlet air flow, and the flow control module 251 is connected with the control module 23 . The voltage supply circuit 26 of the discharge needle 21 includes a voltage regulation module 261 , and the voltage regulation module 261 is connected with the control module 23 . The control module 23 adjusts the concentration of ions reaching the surface of the substrate 10 by controlling the discharge voltage of the discharge needle 22 , adjusting the gas flow rate of the gas outlet of the gas supply system 25 and the distance between the air outlet 21 and the surface of the substrate 10 . Furthermore, an electrostatic measurement module may also be provided to test the result of the electrostatic removal, so as to control whether to continue spraying ion gas to the substrate for electrostatic removal.

For the antistatic device provided in this embodiment, its control method is briefly introduced as follows: Step 1, connect the discharge needle 22 to the discharge high voltage, so that the discharge needle 22 ionizes the air near it through needle tip discharge; Step 2, adjustable The air supply system inputs compressed air to the air outlet 21, and the flow rate and air pressure of the compressed air are controllable, which can be adjusted by the control module 23 according to actual needs; step 3, the compressed air is blown out through the air outlet 21 to form Laminar flow wind is used to bring the ions in the vicinity of the needle tip of the discharge needle 22 to the surface of the substrate with static electricity accumulation; step 4, by controlling the discharge voltage of the discharge needle 22, the gas flow at the gas outlet of the gas supply system 25 and the air outlet 21 can be adjusted The distance from the surface of the substrate 10 is used to adjust the concentration of ions reaching the surface of the substrate 10 to achieve a good electrostatic removal effect. It should be noted that the above steps are not in order. During the use of the antistatic device, the actual demand for ion concentration can be determined by adjusting the discharge high voltage, the gas flow rate of the input port, and the distance from the air outlet to the surface of the substrate. adjust.

Further optionally, in the case where the alignment operation of the substrate is required, the gas ejected from the antistatic device can also be used to lift the substrate for alignment, so as to avoid static electricity accumulation caused by mutual friction during the alignment process. As shown in Figure 4, in order to achieve the purpose of good control of the airflow to support the substrate, a gas injection device 30 is arranged in the air outlet 21, or the air outlet 21 is directly formed by a gas injection device; the gas injection device includes as shown in Figure 5 Filter 31, air duct 32 and nozzle 33; the air inlet end of the gas injection device is connected to the air outlet 21 of the adjustable air supply system through a pipeline, and the compressed gas provided by the adjustable air supply system enters from the air inlet end and passes through the filter 31 , the air channel 32 and spray out from the nozzle 33. Preferably, the gas channel 32 of the gas injection device is a spiral gas channel, which can spray spiral gas to form an air cushion, thereby generating greater lifting force and making it easier to float the substrate.

Preferably, the gas flow channel of the gas injection device (the gas flow channel here is a general term from the inlet end to the gas outlet end of the gas injection device, and the gas channel 32 above only refers to a short section of the gas flow channel before it is ejected from the nozzle) A pressure control device 34 is also installed on the top, which is used to measure and adjust the pressure of the gas ejected from the nozzle, and is connected with the control module 23 . By adding a gas injection device 30, the lower part is blown, and the spiral air channel is used to form an air cushion to hold up the substrate, suspend it for alignment, reduce friction, fundamentally eliminate the source of static electricity, and reduce static electricity accumulation. The gas injection device 30, combined with the previous control of the gas flow rate at the input port and the distance from the air outlet to the substrate surface, can control the intensity of the air flow ejected by the anti-static device more finely, and cooperate with the alignment control to achieve frictionless counterpoint.

As shown in Figure 6, in a preferred embodiment, the air path from the adjustable air supply system to the air outlet is also provided with: a uniform pressure chamber 27 formed in a closed space; The inlet end of injection device 30 is connected, and the inlet port 272 of uniform pressure storehouse 27 is connected with the air outlet of adjustable air supply system 25 through pipeline; Consistent, to avoid the substrate tilt or uneven and affect the manufacturing process. Optionally, the inlet port 272 of the uniform pressure chamber 27 is a gradually thicker pipe or is provided with devices such as baffles, so as to prevent the gas rushing in from the inlet port 272 from affecting the pressure of the gas outlet, so that each outlet The pressure of the gas ejected from the tuyere 21 is consistent. In addition, if the gas injection device 30 is not installed in the air outlet 21, the air outlet port 271 of the equal pressure chamber 27 can also be directly connected to a plurality of air outlets 21, or the plurality of air outlets 21 are directly arranged on the equal pressure chamber 27, The air outlet port 271 of the equal pressure chamber 27 directly forms the air outlet 21 .

Further preferably, a solenoid valve 28 is provided on the gas path between the adjustable gas supply system 25 and the air outlet 21 , for example, before the compressed gas enters the equal pressure chamber 27 , and the solenoid valve 28 is connected to the control module 23 . Specifically, the gas path from the adjustable gas supply system 25 can be divided into multiple branches through the gas branching device I29, and a solenoid valve 28 is installed on each branch, and then each branch is separated by the gas branching device II 291. Branches are combined into one gas path. Installing the solenoid valve 28 in this way can increase the controllability of the gas flow.

The antistatic device provided by the embodiment of the utility model can be specifically applied to various flat panel display manufacturing equipment to reduce friction and neutralize static electricity on the substrate, so as to avoid static electricity damage to the display panel caused by static electricity discharge, which is low in cost and easy to implement. On the other hand, through the adjustable gas supply system 25 of the anti-static device, the solenoid valve 28, and the gas injection device 30, the gas is regulated, and combined with the previous control of the distance from the air outlet to the surface of the substrate, the anti-static device can be sprayed. The airflow intensity can be controlled more finely, and in cooperation with the alignment control, frictionless alignment can be achieved.

The embodiment of the present utility model also provides a flat panel display manufacturing equipment, including the antistatic device described in any one item.

The anti-static device can be specifically installed on various flat panel display manufacturing equipment, such as electrospinning equipment, thermal curing equipment, testing equipment that needs to be pressurized, and alignment/rotation machines, etc., to reduce the interaction between the substrate and the equipment. Friction neutralizes the static electricity on the substrate, thereby avoiding static electricity damage to the display panel caused by static electricity discharge, which is low in cost and easy to implement.

Optionally, the above flat panel display manufacturing equipment further includes: a distance sensor, configured to sense the distance between the substrate and the flat panel display manufacturing equipment. The distance sensor is used to sense the distance between the substrate and the flat panel display manufacturing equipment, so as to realize the cooperation between the gas injection and the connection and delivery of the substrate.

In order for those skilled in the art to better understand the technical solutions provided by the embodiments of the present invention, the structure of the antistatic device and the flat panel display manufacturing equipment provided by the present invention will be described in detail below through specific embodiments.

(1) Electrospinning equipment

Electrospinning is a special fiber manufacturing process in which a polymer solution or melt is jet-spun in a strong electric field. Under the action of the electric field, the droplet at the needle will change from a spherical shape to a conical shape (that is, "Taylor cone"), and extend from the tip of the cone to obtain a fiber filament. In this way, polymer filaments with nanoscale diameters can be produced. Electrospinning technology is also a simple and efficient technology for preparing micro-nano fiber films. Due to the low cost of equipment and experiments required by this technology, the unique advantages of the prepared fibers such as large specific surface area and wide applicability, it has attracted much attention in recent years. . During the manufacture of liquid crystal screens, this technology is used to prepare thin films such as ITO transparent conductive films.

In the process of LCD manufacturing, in order to neutralize the accumulation of static electricity on the surface of the substrate, an antistatic device is used to control it. The air outlet of the antistatic device is arranged in the gap between the electrospinning modules. Among them, the discharge voltage is usually between 5k-50kv, the gas flow rate at the input port is usually between 500-3000m ³ /h, and the distance between the air outlet and the surface of the substrate is usually selected between 5-40cm. The advantage of the above numerical range in practical application is that it will not interfere with the smooth progress of liquid crystal screen manufacturing while neutralizing the surface charge of the electrospun substrate. High voltage, high gas flow and small distance make the neutralization effect better, but this will also disturb the electrospinning process, so the adjustment of the above process parameters is in the balance range between LCD screen manufacturing and neutralization effect .

Experimental data 1

In the process of manufacturing the liquid crystal screen, in order to neutralize the accumulation of static electricity on the surface of the substrate, the above-mentioned antistatic device is used to eliminate static electricity. The spinneret of the liquid crystal screen manufacturing equipment sprays out a 10wt% polyvinyl alcohol/dimethyl sulfoxide solution. The specific experimental parameters are as follows: the discharge voltage of the discharge needle is 5kv, the pressure of the compressed gas provided by the adjustable gas supply system is 3 atmospheres, the distance between the air outlet and the surface of the substrate is 20cm, and the air flow at the air outlet is 1000m ³ /h. After using the above-mentioned anti-static device to eliminate static electricity, the LCD screen manufacturing equipment can run continuously for 48 hours without spinning failure; before using the above-mentioned anti-static device, the LCD screen manufacturing machine cannot continue every 3 hours of operation work steadily.

Experimental data 2

The spinneret of the liquid crystal screen manufacturing equipment sprays PE melt, and the melt temperature is 250°C. The specific experimental parameters are as follows: the discharge voltage of the discharge needle is 30kv, the pressure of the compressed gas provided by the adjustable gas supply system is 5 atmospheres, the distance between the air outlet and the surface of the substrate is 40cm, and the air flow at the air outlet is 2000m ³ /h. After using the above-mentioned anti-static device to eliminate static electricity, the LCD screen manufacturing equipment can run continuously for 48 hours without spinning failure; before using the above-mentioned anti-static device, the LCD screen manufacturing equipment cannot continue every 2 hours of operation work steadily.

The utility model can ionize the air through the discharge needle of the above-mentioned anti-static device, and form a laminar flow wind by the compressed air to blow the ions to the surface of the substrate to neutralize the accumulation of static electricity, the direction is accurate, and it is safe and controllable.

(2), thermal curing equipment

In the manufacturing process of flat panel display (such as liquid crystal display), the box process needs to be pressurized. The purpose of pressurization is to make the liquid crystal screen reach the state supported by the columnar spacer (PS). This process is completed by heat curing equipment. When there is a certain air pressure around the substrate, the contact between the glue and the glass is closer, and the curing state of the glue is very good, so the curing effect is better. Therefore, the thermal curing equipment provided by the embodiment of the present invention uses the gas ejected from the above-mentioned antistatic device as Press box gas.

As shown in Figure 7, the thermal curing equipment provided by the embodiment of the utility model uses the above-mentioned anti-static device to spray high-pressure airflow containing ions in the lower part of the heating chamber 40, uses the airflow jetting to provide pressure to the substrate 10, and uses parallel heating in the upper part. The plate is heated evenly. In addition, it is also possible to directly make the above-mentioned antistatic device spray high-temperature and high-pressure airflow, and provide heat treatment while pressurizing.

Specifically, as shown in FIG. 8 , the heating chamber 40 includes: a cavity 41 formed of high-temperature-resistant ceramics, a heating cavity 42 for accommodating the substrate is formed in the cavity 41, and the top/upper part of the heating cavity 42 A heating plate 43 (such as a silicone rubber heating plate) is provided as a heat source, and the bottom/lower part of the heating cavity 42 is provided with an infrared temperature detector 44 and a thermocouple 45 for measuring temperature, as well as an infrared distance sensing device. The bottom/lower part of the heating cavity 42 is also provided with an air outlet formed by a gas injection device 30. By blowing air from the lower part, the spiral gas forms an air cushion to suspend the substrate to the box, which can effectively avoid black abnormal points (black gaps) caused by uneven box thickness. ). Of course, the gas outlet formed by the gas injection device 30 can also be arranged in other positions of the heating chamber 40, as long as the gas ejected from the gas outlet of the antistatic device can be used as the pressurized gas.

(3), pressurized testing equipment

The antistatic device provided by the utility model can also be applied to testing equipment that needs to be pressurized to remove static electricity and provide the pressure required for testing to products to be tested. The detection device provided in this embodiment uses the gas ejected from the antistatic device as the pressurized gas in the detection chamber of the detection device.

Fig. 9 shows a schematic diagram of the specific structure of the detection chamber. The detection chamber 50 includes: a low-radiation protective glass cover (detection window) 51 , a detection cavity 52 , a polarizer 53 , a diffusion plate 54 , a backlight group 55 and a heating plate 56 . The difference from the existing detection equipment is that the detection cavity 50 of this embodiment sets the air outlet of the antistatic device provided by the utility model on the cavity wall of the detection cavity 52 to remove static electricity and provide the products to be tested with the required components for detection. pressure. Other than that, the structure is roughly the same as that of the existing detection equipment, and will not be described in detail.

(3) Alignment machine

The antistatic device provided by the utility model can also be applied to an alignment/rotation machine. Specifically, the alignment/rotation machine uses the gas ejected from the antistatic device to hold up the substrate for alignment.

As shown in FIG. 10 , it is a top view of an alignment machine platform in the prior art. The alignment machine includes a main structure 60 , a driving control part 64 , a distance sensor 61 and a vacuum chuck 63 . The main structure 60 of the alignment machine has a certain strength and thickness, is hollow, and is equipped with necessary pipelines and circuits such as vacuum tubes and sensor wires. The distance sensor 61 is arranged on the front end of the table of the main structure 60, which can sense the distance between the substrate and the surface of the alignment machine. The drive control part 62 is responsible for the motion control and related electrical control of the alignment machine. Combined with the detection signal of the distance sensor 61, Realize the cooperation between the vacuum chuck 63 and the connection and delivery of the substrate.

The new alignment machine provided by the embodiment of the utility model is equipped with the antistatic device provided by the utility model. There are various specific design structures, and only two are listed below for reference.

The new alignment machine table provided by the embodiment of the utility model is roughly similar to the above-mentioned existing structure except that a movable anti-static device is added. As shown in Figures 11 to 14, specifically, a movable device 24 is also formed on the alignment machine, and the air outlet 21 of the antistatic device is arranged on the movable device 24, and the movable device 24 is controlled by the drive control part 64. It can move up and down along the Y-axis under the action of the anti-static device. Because of different sizes, it is necessary to set the corresponding anti-static position of the anti-static device. Through electrical control and the movement of the movable device 24 along the Y-axis, it is possible to handle panels of different sizes. Automatically reach the effective static removal distance. Similar to the existing alignment machine, the main structure 60 of the alignment machine has a certain strength and thickness, and a cavity is arranged inside. In addition to setting necessary pipelines and lines such as vacuum tubes and sensor wires, there are also The gas circuit equipped with anti-static devices such as adjustable gas supply system, gas pipeline and solenoid valve 28; the front end of the alignment machine is equipped with a distance sensor 61, which can sense the distance between the display panel and the surface of the alignment machine; the alignment machine A vacuum chuck 63 is arranged on the table top of the table, and the vacuum chuck 63 is connected to vacuum equipment such as a vacuum tube in the cavity at the bottom, and the display panel can be fixed on the alignment machine by vacuum adsorption; the drive control part 64 is responsible for the alignment machine. And the motion control of the anti-static device and related electrical control, realize the cooperation between the gas injection of the anti-static device, the adsorption of the vacuum chuck 63, and the connection and delivery of the substrate. The drive control part 64 can be understood as the function expansion of the drive control part 62 of the existing alignment machine, so that it not only includes the existing alignment control function, but also includes the control module function in the antistatic device, and the control module for the movable device 24. The function of driving control and the cooperation between these functions, etc. In short, the driving control part 64 of this embodiment can realize the control and mutual cooperation of various mechanical and electrical components in the process of receiving and sending substrates and performing substrate alignment.

Fig. 12 is a top view with a screen of an alignment machine equipped with an anti-static device according to an embodiment of the present invention, wherein: 9 is a display panel, which is fixed on the alignment machine by vacuum suction cup 63; 7 and 8 are anti-static The positive and negative ions generated by the device indicate that the distance Z represents the distance between the air outlet 21 of the antistatic device and the edge of the display panel 9. In order to ensure the effect of eliminating static electricity, during specific implementation, the movable device 24 is controlled by the drive control module 62 to move along the Y axis. The distance of Z should generally be >50mm.

How the movable device 24 moves along the Y-axis and how to realize the control of the distance Z is not limited by this embodiment of the present utility model, and may be any implementation method known to those skilled in the art. The following is only for the convenience of understanding by those skilled in the art, and an implementation manner is given as an example. It should be understood that the example is not intended to limit the present invention.

Fig. 13 is a top view of the driving structure of the antistatic device on the alignment table according to the embodiment of the present invention. The main body structure 60 of the alignment machine is also formed with a surface in contact with the substrate (table top of the alignment machine), on which a motion guide groove 65 is arranged, and the movable device 24 of the antistatic device moves along the motion guide groove 65 . The driving control part 64 comprises a driving gear 68 and a toothed belt 67; the central axis 70 of the movable device 24 is fixed on the toothed belt 67, and the toothed belt 67 is engaged with the driving gear 68 so that the driving gear 68 drives the toothed belt 67 When moving, the movable device 24 can move along the motion guide groove 65, so that the distance Z from the air outlet 21 on the movable device 24 to the edge of the display panel 9 is adjustable and controllable. Wherein, 69 is the driven wheel of toothed belt 67. For display panels 9 of different sizes, the position of the anti-static device needs to be set to a corresponding value, and the movement of the drive gear 68 and the toothed belt 67 is controlled by the drive control part 64, so that during the handling of panels of different sizes, it can be automatically adjusted. The distance Z from the air outlet 21 of the movable device 24 to the edge of the display panel 9, so that the movable device 24 automatically reaches the position where the static electricity is effectively removed, and after the static electricity is removed, the mobile device 24 can also be automatically removed from the static removal device , without hindering the subsequent manufacturing process or testing process.

Fig. 14 is a gas pipeline diagram of the static elimination device on the above-mentioned alignment machine, wherein, 21 is an air outlet of the static removal device, 71 is an air supply pipe connected to each air outlet 21 of the static elimination device, and 72 is a general air supply pipe; 292 is the gas branch device III that connects the air supply pipe 71 of the total air supply pipe 72 and each air outlet. Specifically, the gas pipeline of the static electricity removal device is as follows: the gas path from the adjustable gas supply system is divided into a plurality of branches by the gas branch device 129, and an electromagnetic valve 28 is installed on each branch, and then passed through the gas branch. Circuit device II 291 synthesizes each branch circuit into a total air supply circuit. Then the gas supply path is led to the movable device 24 by the total gas supply pipe 72, the movable device 24 is provided with a plurality of air outlets 21, and the total gas supply pipe 72 is divided into a plurality of branches by the gas branching device III 292, Each branch is connected to an air outlet 21 through an air supply pipe. The gas branching device III 292 and the air outlet 21 are arranged on the movable device 24, and can move along the Y axis along with the movable device 24.

The distance signal between the display panel 9 and the alignment machine sensed by the distance sensor 61, when the distance between the display panel 9 and the alignment machine is within a certain range, the power of the static removal device is turned on, and the movable device 24 moves along the Y When the axis moves to the distance Z from the edge of the display panel 9 (Z can be set according to the actual situation), the solenoid valve 28 is opened at the same time, and the gas outlet 21 of the static elimination device sprays compressed gas containing ions, and the entire display panel 9 and the alignment Static electricity is eliminated during the process of machine contact, lamination, and moving alignment. After the alignment is completed, the static elimination device is closed, the gas outlet 21 stops ejecting gas, and the display panel 9 is adsorbed and fixed on the alignment machine by the vacuum chuck 63 for subsequent manufacturing or testing process (at this time, the movable device 24 can be removed to avoid obstructing the manufacturing or testing process). Of course, if necessary, in the subsequent manufacturing or testing process, the static elimination device can continue to spray the compressed gas containing ions until the display panel 9 leaves the alignment machine. When the display panel 9 leaves the alignment machine, the static elimination device can also continue to spray compressed gas containing ions to eliminate static electricity. After the display panel 9 leaves, the distance between the display panel 9 and the alignment machine becomes larger. According to the distance sensor 61 induction signal, the solenoid valve 28 is closed, and the power supply of the static removal device is closed simultaneously. The whole process not only eliminates static electricity but also takes into account the requirements of saving electricity and gas. At the same time, according to the size of the panel being transported, the distance Z between the movable device 24 and the edge of the display panel 9 is controlled, and different numbers of solenoid valves 28 are opened at the same time to control the air output to adjust reasonably. In addition to the strength of static electricity.

Another new type of alignment machine provided by the embodiment of the present invention, as shown in Figures 4 and 6, is different from the new type of alignment machine in this embodiment in that the alignment machine of this embodiment The movable device 24 is not designed, but the air outlet 21 of the static elimination device is directly arranged on the table top 20 of the alignment machine. Of course, although it is not shown in FIG. 6, the table 20 of the alignment machine is also provided with Vacuum chuck, distance sensor, etc. The gas path connected with the air outlet 21, such as the uniform pressure chamber 27, the solenoid valve 28, the gas branch device I 291, the gas branch device II 29, and the pipelines connecting these devices are all arranged in the space of the main structure of the alignment machine. cavity. When the distance sensor senses that the distance between the display panel and the alignment machine is within a certain range, the power of the static removal device is turned on, and the solenoid valve 28 is opened at the same time, and the gas outlet 21 of the static removal device ejects compressed gas containing ions upward. , in the subsequent moving alignment process, the substrate is lifted up for alignment, and static electricity is eliminated at the same time. After the alignment is completed, the static electricity removal device is turned off, the gas outlet 21 stops spraying gas, and the display panel is fixed on the alignment machine by a vacuum suction cup for subsequent manufacturing or testing processes. When the display panel wants to leave the alignment machine, the static electricity removal device is first turned on, and the air outlet 21 sprays compressed gas containing ions to eliminate static electricity and at the same time make the display panel leave the alignment machine. When the distance between the display panel and the alignment machine becomes larger, according to the induction signal of the distance sensor, the solenoid valve 28 is closed, and the power of the static removal device is turned off simultaneously.

The alignment machine provided by the embodiment of the utility model reduces the friction between the substrate and the alignment machine by blowing compressed gas containing ions to the substrate, and at the same time neutralizes the static electricity in the substrate by the ions in the gas to avoid the accumulation of static electricity , so as to avoid electrostatic damage to the display panel caused by electrostatic discharge, and the installation, use and maintenance of the static removal device are convenient.

The embodiment of the utility model also provides another new type of rotary machine table. The gas ejected from the static electricity removal device can be used when exchanging substrates between the manipulator and the flipper, and can also be used for alignment.

Add a static elimination device to the flipping device, use the gas ejected from the static removal device to receive the display substrate, make the display substrate separate from the flipper, and use the ion-containing compressed gas ejected from the static removal device to perform alignment, which can effectively reduce static electricity generation. The setting of the static elimination device on the rotary machine table can refer to the above-mentioned alignment machine table, and will not be described in detail here.

The embodiment of the utility model uses compressed ion wind gas (compressed gas containing ions) to blow air on the friction surface between the substrate and the machine, so that the static electricity generated on the substrate is effectively controlled, that is, energy is saved, and it is possible to effectively control The source of static electricity, the static removal rate is greatly improved. Specifically, it can be applied to equipment with pressurized detection chambers, heating chambers, etc., using the gas ejected from the static removal device to generate the required pressure for the equipment and eliminate static electricity, and can also be applied to equipment involving alignment, friction, and transportation. Reduces friction and eliminates static electricity.

Each embodiment in this specification is described in a progressive manner, the same and similar parts of each embodiment can be referred to each other, and each embodiment focuses on the differences from other embodiments.

Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be implemented through computer programs to instruct related hardware, and the programs can be stored in a computer-readable storage medium. During execution, it may include the processes of the embodiments of the above-mentioned methods. Wherein, the storage medium may be a magnetic disk, an optical disk, a read-only memory (Read-Only Memory, ROM) or a random access memory (Random Access Memory, RAM), etc.

The above is only a specific embodiment of the present utility model, but the scope of protection of the present utility model is not limited thereto. Any skilled person familiar with the technical field can easily think of changes within the technical scope disclosed by the utility model Or replacement, all should be covered within the scope of protection of the present utility model. Therefore, the protection scope of the present utility model should be based on the protection scope of the claims.

Claims (18)

1. An antistatic device, used in the field of flat panel display manufacturing, is characterized in that, comprising: Adjustable gas supply system for providing compressed gas; A plurality of air outlets, the compressed gas provided by the adjustable air supply system blows air to the bottom surface of the substrate through the air outlets, and the bottom surface is the surface of the substrate in contact with the flat panel display manufacturing equipment; The discharge needle is arranged in the air outlet, and is used for ionizing the air passing through the vicinity of the needle tip of the discharge needle through discharge, so that the gas blown by the air outlet contains ions. 2 . The antistatic device according to claim 1 , wherein the air outlet is arranged on a surface of the manufacturing equipment that is in contact with the substrate. 3 . 3. The antistatic device according to claim 1, further comprising: A control module, configured to adjust the gas flow rate reaching the substrate by controlling the discharge voltage of the discharge needle, the gas flow rate of the gas outlet of the adjustable gas supply system, and/or the distance between the gas outlet and the surface of the substrate The concentration of ions on the surface. 4. The antistatic device according to claim 3, further comprising: a movable device, and a drive control part that drives and controls the movement of the movable device; The plurality of air outlets are arranged on the movable device, and the driving control part is connected with the control module. 5 . The antistatic device according to claim 3 , wherein the adjustable air supply system includes a flow control module for controlling the flow of the outlet air, and the flow control module is connected to the control module. 6 . The antistatic device according to claim 3 , further comprising a voltage supply circuit for the discharge needle, the voltage supply circuit comprising a voltage regulation module connected to the control module. 7. The antistatic device according to claim 3, wherein a gas injection device is arranged in the air outlet, or the air outlet is directly formed by the gas injection device; the gas injection device includes a filter , an air channel and a nozzle; the air inlet end of the gas injection device is connected to the air outlet of the adjustable air supply system through a pipeline, and the compressed gas provided by the adjustable air supply system enters from the air inlet, passes through After the filter and the air channel, it is sprayed out from the spray head. 8. The antistatic device according to claim 7, characterized in that, the gas flow channel of the gas injection device is also equipped with: The pressure control device is used to measure and adjust the pressure of the gas ejected from the nozzle, and is connected with the control module. 9. The anti-static device according to claim 3, characterized in that, the air path from the adjustable air supply system to the air outlet is further provided with: an equal pressure chamber formed in a closed space; The air outlet port of the equal pressure chamber communicates with the plurality of air outlets, or directly forms the air outlet; the air inlet port of the equal pressure chamber is connected to the air outlet of the adjustable air supply system through a pipeline Pass. 10. The antistatic device according to claim 9, characterized in that, The air inlet port of the equal pressure chamber is a pipe that gradually becomes thicker. 11. The anti-static device according to claim 3 or 9, characterized in that a solenoid valve is arranged on the air path between the adjustable air supply system and the air outlet, and the solenoid valve and the control module connected. 12. The antistatic device according to claim 1, characterized in that, the air path from the adjustable air supply system to the air outlet is provided with: As for the gas branching device, its inlet end communicates with the gas supply pipeline, and its gas outlet ends are multiple, respectively communicating with the plurality of air outlets or directly forming the plurality of air outlets. 13. The antistatic device according to claim 1, wherein the adjustable air supply system is an air compressor. 14. A flat panel display manufacturing equipment, characterized by comprising the antistatic device according to any one of claims 1-13. 15. The flat panel display manufacturing equipment according to claim 14, further comprising: a distance sensor for sensing the distance between the substrate and the flat panel display manufacturing equipment. 16 . The flat panel display manufacturing equipment according to claim 15 , wherein the flat panel display manufacturing equipment is thermal curing equipment, or testing equipment requiring pressurization, or alignment/rotation machine. 17. The flat panel display manufacturing equipment according to claim 16, characterized in that, the flat panel display manufacturing equipment is an alignment/rotation machine, and a cavity is provided in the main structure of the alignment/rotation machine, the An adjustable air supply system for the anti-static device is set in the cavity; The main structure is also formed with a surface in contact with the substrate, on which a motion guide groove is provided, and the movable device of the antistatic device moves along the motion guide groove. 18. The flat panel display manufacturing equipment according to claim 17, wherein the drive control part of the antistatic device comprises a drive gear and a toothed belt; the central axis of the movable device is fixed on the toothed belt Above, the toothed belt meshes with the driving gear, so that when the driving gear drives the toothed belt to move, the movable device moves along the moving guide groove.