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CN1845353A - A kind of preparation method of porous polymer piezoelectric electret film - Google Patents

A kind of preparation method of porous polymer piezoelectric electret film Download PDF

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CN1845353A
CN1845353A CNA2006100250093A CN200610025009A CN1845353A CN 1845353 A CN1845353 A CN 1845353A CN A2006100250093 A CNA2006100250093 A CN A2006100250093A CN 200610025009 A CN200610025009 A CN 200610025009A CN 1845353 A CN1845353 A CN 1845353A
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charging
porous polymer
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corona
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CN100435371C (en
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张晓青
夏钟福
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DONGGUAN LANMU MATERIAL TECHNOLOGY Co Ltd
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Tongji University
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Abstract

The invention belongs to the technical field of functional materials, and particularly relates to a preparation method of a porous polymer piezoelectric electret film. The method comprises two parts of preparation and charging of the porous polymer film, wherein the preparation process of the porous polymer film comprises the following steps: laminating polymer films with different melting points to form a composite film system, arranging a grid on one surface or two surfaces of the film, and then applying pressure at a certain temperature, wherein the pressure is 1 MPa-10 MPa, and the time is 2-120 minutes. And then charging the composite film system, wherein the charging mode can adopt corona charging, contact charging or electron beam charging. The method has simple process, and can obtain the porous polymer piezoelectric electret film with high thermal stability and high voltage activity.

Description

一种多孔聚合物压电驻极体薄膜的制备方法A kind of preparation method of porous polymer piezoelectric electret film

技术领域technical field

本发明属于功能材料技术领域,具体涉及一种多孔聚合物压电驻极体薄膜的制备方法。The invention belongs to the technical field of functional materials, and in particular relates to a preparation method of a porous polymer piezoelectric electret film.

技术背景technical background

多孔结构的聚合物薄膜经过适当的电极化处理以后表现突出的压电特性,它同时具有压电材料和驻极体的特点,被命名为多孔聚合物压电驻极体薄膜、压电驻极体或铁电驻极体,它是1990年前后发展起来的新一类机电传感器材料。多孔聚合物驻极体压电薄膜的压电d33系数比铁电聚合物PVDF及其共聚物P(VDF/TrFE)的压电活性高出一个量级;与压电陶瓷材料相比,多孔聚合物驻极体压电薄膜除具有较高的压电d33系数以外,还拥有聚合物的柔顺性、可大面积成膜、低成本、低电容率以及与空气和水相匹配的低声阻抗等突出特性。目前唯一商品化的多孔聚合物驻极体压电薄膜是以聚丙烯(PP)树脂为基本材料,经过化学或物理发泡工艺形成多孔结构。这种多孔PP驻极体压电薄膜材料已经在压力传感器、电声、声电、超声波传感器,以及报警器、临床医学等方面获得了应用,并且可望在通讯、保安、控制、生命科学及军事等领域有广阔的应用前景。The polymer film with a porous structure exhibits outstanding piezoelectric properties after proper electric polarization treatment. It has the characteristics of piezoelectric materials and electrets at the same time, and is named porous polymer piezoelectric electret film, piezoelectric electret Body or ferroelectret, it is a new type of electromechanical sensor material developed around 1990. The piezoelectric d 33 coefficient of the porous polymer electret piezoelectric film is an order of magnitude higher than the piezoelectric activity of the ferroelectric polymer PVDF and its copolymer P(VDF/TrFE); compared with piezoelectric ceramic materials, the porous In addition to the high piezoelectric d 33 coefficient, the polymer electret piezoelectric film also has the flexibility of polymers, large-area film formation, low cost, low permittivity, and low sound matching air and water. Prominent characteristics such as impedance. At present, the only commercialized porous polymer electret piezoelectric film is based on polypropylene (PP) resin, which is formed into a porous structure through chemical or physical foaming process. This porous PP electret piezoelectric film material has been applied in pressure sensors, electroacoustics, acoustic electricity, ultrasonic sensors, alarms, clinical medicine, etc., and is expected to be used in communications, security, control, life sciences and It has broad application prospects in military and other fields.

多孔聚合物压电驻极体薄膜材料的压电活性源于沉积在内部孔洞上下两壁极性相反的空间电荷和材料的孔洞结构。该材料的压电灵敏度与孔洞介质壁的驻极体性能、孔洞膜系的力学性能、孔洞的形貌大小、以及介质和气隙的体积比直接相关,而压电活性的热稳定主要取决于介质的驻极体热稳定性。商品多孔PP驻极体压电薄膜由于PP材料本身驻极体热稳定性的限制,其工作温度一般不能超过60℃,高于此温度,其压电活性因电荷的衰减加剧而降低、甚至消失,限制了这类功能材料的应用。而其它一些高热稳定性的驻极体材料(例如PTFE、FEP、COC、PET、PI等),由于受传统制膜工艺的限制无法形成理想的多孔结构,因此目前尚没有既具有高热稳定性又具有高压电活性的多孔聚合物压电驻极体薄膜的报道。The piezoelectric activity of the porous polymer piezoelectric electret film material originates from the space charge with opposite polarity deposited on the upper and lower walls of the inner hole and the hole structure of the material. The piezoelectric sensitivity of the material is directly related to the electret properties of the hole medium wall, the mechanical properties of the hole film system, the shape and size of the hole, and the volume ratio of the medium and the air gap, while the thermal stability of the piezoelectric activity mainly depends on the medium Electret thermal stability. Commodity porous PP electret piezoelectric film is limited by the thermal stability of the electret itself of the PP material, and its working temperature generally cannot exceed 60°C. Above this temperature, its piezoelectric activity will decrease or even disappear due to the aggravation of charge attenuation. , limiting the application of such functional materials. However, some other electret materials with high thermal stability (such as PTFE, FEP, COC, PET, PI, etc.) cannot form an ideal porous structure due to the limitations of traditional membrane-making processes. Report of porous polymer piezoelectric electret films with high-voltage electroactivity.

发明内容Contents of the invention

本发明的目的在于提出一种同时具有高热稳定性和高压电活性多孔聚合物驻极体压电薄膜的制备方法。The purpose of the present invention is to propose a preparation method for a porous polymer electret piezoelectric film with high thermal stability and high voltage electrical activity.

本发明提出的多孔聚合驻极体压电物薄膜的制备方法,包括多孔聚合物薄膜的制备和对该薄膜进行充电两个部分。其中,多孔聚合物薄膜的制备过程为:将一种、或两种、或两种以上不同熔点的聚合物(例如PTFE、FEP、COC、PET、PI、PE、PEN或PP等)薄膜(本文中,若采用两种及两种以上的聚合物薄膜,则最低熔点聚合物薄膜称为薄膜1,最高熔点聚合物薄膜称为薄膜2;若只采用一种聚合物薄膜,则视薄膜1和薄膜2的熔点和熔点相等。)层叠成为复合膜系,并在薄膜的一面或两面放置栅网,然后在高于或等于薄膜1熔点,低于或等于薄膜2熔点的温区内的一定值(T)下向复合膜系施加压力(P),经过时间(t)形成多孔膜,P的范围是1kPa-10MPa,t的范围是2min-120min。P的优选范围为1MPa-8MPa;t的优选范围为10-50分钟,The preparation method of the porous polymer electret piezoelectric thin film proposed by the invention includes two parts: preparation of the porous polymer thin film and charging the thin film. Wherein, the preparation process of the porous polymer film is: one, or two, or two or more polymers (such as PTFE, FEP, COC, PET, PI, PE, PEN or PP) films with different melting points (this paper Among them, if two or more polymer films are used, the polymer film with the lowest melting point is called film 1, and the polymer film with the highest melting point is called film 2; if only one polymer film is used, the film 1 and The melting point of film 2 is equal to the melting point.) Laminated into a composite film system, and a grid is placed on one or both sides of the film, and then a certain value in the temperature range higher than or equal to the melting point of film 1 and lower than or equal to the melting point of film 2 Apply pressure (P) to the composite membrane system under (T), and form a porous membrane after time (t). The range of P is 1kPa-10MPa, and the range of t is 2min-120min. The preferred range of P is 1MPa-8MPa; The preferred range of t is 10-50 minutes,

本发明中,对多孔聚合物薄膜充电制成压电驻极体薄膜,其充电方式可采用常规方法,主要有:In the present invention, the piezoelectric electret film is made by charging the porous polymer film, and its charging method can adopt conventional methods, mainly including:

(1)电晕充电,其步骤为:将多孔膜置于金属电极上展平(可以单面镀电极,也可以两面都不镀电极),在多孔膜上方安置一个电晕电极,电晕电极连接直流高压电源,在无栅压或栅压调控的条件下进行电晕充电,得到多孔聚合物驻极体压电薄膜;电晕充电条件是:电压为+2kV~+100kV或-2kV~-100kV,最高温度不高于薄膜2的熔点,通电时间为1秒-1小时,电极与多孔膜的距离为2cm~50cm。(1) Corona charging, the steps are: place the porous film on the metal electrode to flatten (the electrode can be plated on one side, or not plated on both sides), and a corona electrode is placed on the porous film. Connect a DC high-voltage power supply, and perform corona charging under the condition of no grid voltage or grid voltage regulation to obtain a porous polymer electret piezoelectric film; the corona charging condition is: the voltage is +2kV~+100kV or -2kV~- 100kV, the maximum temperature is not higher than the melting point of the thin film 2, the electrification time is 1 second to 1 hour, and the distance between the electrode and the porous membrane is 2 cm to 50 cm.

(2)接触法充电,其步骤为:将多孔膜的两面镀上电极,然后上下电极各分别连接到一个直流高压电源的两极,充电得到多孔聚合物驻极体压电薄膜;接触法充电条件是:电压为+2kV~+100kV或-2kV~-100kV,最高温度不高于薄膜2的熔点,通电时间为1秒-1小时。(2) contact method charging, its step is: the two sides of porous film are plated with electrodes, then the upper and lower electrodes are respectively connected to the two poles of a DC high-voltage power supply, charged to obtain porous polymer electret piezoelectric film; contact method charging conditions Yes: the voltage is +2kV~+100kV or -2kV~-100kV, the highest temperature is not higher than the melting point of the film 2, and the power-on time is 1 second-1 hour.

(3)电子束充电,电子束充电条件是:电子束能为5keV~100keV,最高温度不高于薄膜2的熔点,通电时间为1秒-1小时。(3) Electron beam charging, the electron beam charging conditions are: the energy of the electron beam is 5keV-100keV, the maximum temperature is not higher than the melting point of the film 2, and the electrification time is 1 second to 1 hour.

本发明中,栅网的材料可以采用金属或非金属材料。In the present invention, the material of the grid can be metal or non-metal material.

本发明中,栅网的目数为2-2000目,丝径为0.001-2mm,孔径为0.005-35mm。In the present invention, the mesh number of the grid is 2-2000 mesh, the wire diameter is 0.001-2mm, and the hole diameter is 0.005-35mm.

本发明中,栅网可以是独立的,也可以复合在压力轮或压力板上。In the present invention, the grid can be independent or composited on the pressure wheel or the pressure plate.

本发明中,栅网的网孔之间可以是横向贯通的,也可以是闭合的。In the present invention, the meshes of the grid can be horizontally connected or closed.

本发明中,各种类型的薄膜的层数为1或多层。In the present invention, the number of layers of various types of films is 1 or more.

本发明中,各种类型的膜可以是致密膜,也可以是多孔膜。In the present invention, various types of membranes may be dense membranes or porous membranes.

本发明中,电晕充电可以采用负电晕充电或正电晕充电。In the present invention, negative corona charging or positive corona charging can be used for corona charging.

本发明中,电晕充电电极是针状,或丝状,或刀口状。In the present invention, the corona charging electrode is needle-shaped, or wire-shaped, or knife-edge-shaped.

本发明中,电晕充电时,电晕电极和多孔薄膜之间可以采用栅网,通过栅网偏压来控制多孔膜的表面电位,也可以不用栅网。In the present invention, during corona charging, a grid can be used between the corona electrode and the porous film, and the surface potential of the porous film can be controlled by grid bias, or no grid can be used.

本发明的电晕充电工作原理如下:在一定气压下,在恒压,或恒流充电条件下,利用电极间存在的非均匀电场引起电极间气体局部放电,即电晕放电,电晕放电产生的离子通过沉积在多孔膜表面或与多孔膜表面进行电荷交换,使得多孔膜上下两表面产生一定的电势差,当这一电势差达到或超过多孔膜内部气隙的放电电压,将引起内部气隙放电,放电产生的极性相反的离子通过沉积在多孔膜内部孔洞的介质表面或与介质表面进行电荷交换,使得内部孔洞的上下两壁带有极性相反的电荷达到充电的目的。The working principle of the corona charging of the present invention is as follows: under a certain air pressure, under constant voltage or constant current charging conditions, the non-uniform electric field existing between the electrodes is used to cause partial discharge of the gas between the electrodes, that is, corona discharge, and corona discharge produces The ions are deposited on the surface of the porous membrane or exchanged with the surface of the porous membrane, so that a certain potential difference is generated on the upper and lower surfaces of the porous membrane. When this potential difference reaches or exceeds the discharge voltage of the internal air gap of the porous membrane, the internal air gap discharge will be caused. The ions of opposite polarity generated by discharge are deposited on the surface of the medium in the pores of the porous membrane or exchanged with the surface of the medium, so that the upper and lower walls of the internal pores have opposite charges to achieve the purpose of charging.

本发明中的接触法充电工作原理如下:在一定气压下,合理(受控)的直流电压下,当两面镀有电极的多孔膜上下表面的电势差达到一定值以后,引起薄膜内部气孔内气隙的气隙放电,放电产生的极性相反的离子通过沉积在多孔膜内部孔洞的介质表面或与介质表面进行电荷交换,使得内部孔洞的上下两壁带有极性相反的电荷达到充电的目的。The working principle of the contact method charging in the present invention is as follows: under a certain air pressure, under a reasonable (controlled) DC voltage, when the potential difference between the upper and lower surfaces of the porous membrane coated with electrodes on both sides reaches a certain value, air gaps in the pores inside the membrane are caused. The air gap discharge, the ions of opposite polarity generated by the discharge are deposited on the surface of the medium in the pores of the porous membrane or exchange charges with the surface of the medium, so that the upper and lower walls of the internal pores have opposite charges to achieve the purpose of charging.

本发明中,可以通过调控充电温度来提高多孔聚合物驻极体压电薄膜的热稳定性。In the present invention, the thermal stability of the porous polymer electret piezoelectric film can be improved by adjusting the charging temperature.

本发明工艺过程简单,构思新颖,能够得到高热稳定性和高压电活性的多孔聚合物压电驻极体薄膜。The invention has simple technological process and novel concept, and can obtain the porous polymer piezoelectric electret thin film with high thermal stability and high voltage electric activity.

附图说明Description of drawings

图1为多孔聚合物薄膜(薄膜1为两层,薄膜2为3层)制备工艺的示意图。Fig. 1 is the schematic diagram of the preparation process of porous polymer film (film 1 is two layers, film 2 is three layers).

图2为多孔聚合物薄膜横截面的扫描电镜图。Fig. 2 is a scanning electron microscope image of a cross-section of a porous polymer film.

图3为多孔聚合物驻极体压电薄膜的压强特性图。Fig. 3 is a pressure characteristic graph of a porous polymer electret piezoelectric film.

图4为多孔聚合物驻极体压电薄膜的频率特性图。Fig. 4 is a frequency characteristic diagram of a porous polymer electret piezoelectric film.

图5为多孔聚合物驻极体压电薄膜在90℃下的等温衰减图。Fig. 5 is the isothermal decay diagram of the porous polymer electret piezoelectric film at 90°C.

图6为经过预老化处理的多孔聚合物驻极体压电薄膜在90℃下的等温衰减图。Fig. 6 is an isothermal decay diagram of the pre-aged porous polymer electret piezoelectric film at 90°C.

图中标号:1为低融点聚合物薄膜,2为高融点聚合物薄膜,3为碾压力,4为栅网。Numbers in the figure: 1 is a low melting point polymer film, 2 is a high melting point polymer film, 3 is rolling pressure, and 4 is a grid.

具体实施方式Detailed ways

下面通过实施例进一步描述本发明。The present invention is further described below by way of examples.

实施例1,采用金属栅网,网孔为1mm×1mm正方形孔洞。薄膜1采用FEP薄膜(两层),膜厚12.7μm;薄膜2采用PTFE薄膜(三层),膜厚3μm。施压温度为280℃;施压时间15min;施压压力4kPa。电晕电极为针状;电晕电压32kV;无栅控电压;充电温度为20℃;充电时间为60s;电晕电极与样品的距离为7cm。多孔膜两面各真空蒸镀100nm的铝电极。Embodiment 1, a metal grid is used, and the mesh is a 1mm×1mm square hole. Film 1 is made of FEP film (two layers) with a film thickness of 12.7 μm; film 2 is made of PTFE film (three layers) with a film thickness of 3 μm. The pressing temperature is 280°C; the pressing time is 15 minutes; and the pressing pressure is 4kPa. The corona electrode is needle-shaped; the corona voltage is 32kV; there is no grid control voltage; the charging temperature is 20°C; the charging time is 60s; the distance between the corona electrode and the sample is 7cm. Aluminum electrodes of 100 nm were vacuum-deposited on both sides of the porous membrane.

实施例2,采用金属栅网,网孔为0.125mm×0.125mm正方形孔洞。薄膜1采用FEP薄膜(一层),膜厚12.7μm;薄膜2采用PTFE薄膜(二层),膜厚3μm。施压温度为280℃;施压时间5min;施压压力4kPa。电晕电极为针状;电晕电压64kV;无栅控电压;充电温度为25℃;充电时间为40s;电晕电极与样品的距离为4cm。多孔膜两面分别真空蒸镀100nm的铝电极。In embodiment 2, a metal grid is used, and the mesh is a square hole of 0.125mm×0.125mm. Film 1 is made of FEP film (one layer) with a film thickness of 12.7 μm; film 2 is made of PTFE film (two layers) with a film thickness of 3 μm. The pressing temperature is 280°C; the pressing time is 5 minutes; and the pressing pressure is 4kPa. The corona electrode is needle-shaped; the corona voltage is 64kV; there is no grid control voltage; the charging temperature is 25°C; the charging time is 40s; the distance between the corona electrode and the sample is 4cm. Aluminum electrodes of 100 nm were vacuum-evaporated on both sides of the porous membrane.

实施例3,采用金属栅网,网孔为0.125mm×0.125mm正方形孔洞。薄膜1采用FEP薄膜(一层),膜厚12.7μm;薄膜2采用PTFE薄膜(二层),膜厚3μm。施压温度为280℃;施压时间10min;施压压力4kPa。电晕电极为针状;电晕电压5kV;无栅控电压;充电温度为20℃;充电时间为10分钟;电晕电极与样品的距离为10cm。多孔膜两面各真空蒸镀100nm的铝电极。Embodiment 3, a metal grid is used, and the mesh is a square hole of 0.125mm×0.125mm. Film 1 is made of FEP film (one layer) with a film thickness of 12.7 μm; film 2 is made of PTFE film (two layers) with a film thickness of 3 μm. The pressing temperature is 280°C; the pressing time is 10 minutes; and the pressing pressure is 4kPa. The corona electrode is needle-shaped; the corona voltage is 5kV; there is no grid control voltage; the charging temperature is 20°C; the charging time is 10 minutes; the distance between the corona electrode and the sample is 10cm. Aluminum electrodes of 100 nm were vacuum-deposited on both sides of the porous membrane.

实施例4,采用金属栅网,网孔为0.125mm×0.125mm正方形孔洞。薄膜采用PP薄膜(三层),膜厚6μm。施压温度为190℃;施压时间2min;施压压力10kPa。电晕电极为针状;电晕电压20kV;无栅控电压;充电温度为20℃;充电时间为30s;电晕电极与样品的距离为4cm。多孔膜两面各真空蒸镀100nm的铝电极。Embodiment 4, a metal grid is used, and the mesh is a square hole of 0.125mm×0.125mm. The film adopts PP film (three layers) with a film thickness of 6 μm. The pressing temperature is 190°C; the pressing time is 2min; and the pressing pressure is 10kPa. The corona electrode is needle-shaped; the corona voltage is 20kV; there is no grid control voltage; the charging temperature is 20°C; the charging time is 30s; the distance between the corona electrode and the sample is 4cm. Aluminum electrodes of 100 nm were vacuum-deposited on both sides of the porous membrane.

实施例5,采用金属栅网,网孔为0.125mm×0.125mm正方形孔洞。采用FEP薄膜(一层,膜厚6μm);PP薄膜(一层,膜厚6μm);以及PTFE薄膜(一层,膜厚3μm)。施压温度为230℃;施压时间35min;施压压力1kPa。电晕电极为针状;电晕电压32kV;无栅控电压;充电温度为20℃;充电时间为60s;电晕电极与样品的距离为7cm。多孔膜两面分别真空蒸镀100nm的铝电极。In embodiment 5, a metal grid is used, and the mesh is a square hole of 0.125mm×0.125mm. FEP film (one layer, film thickness 6 μm); PP film (one layer, film thickness 6 μm); and PTFE film (one layer, film thickness 3 μm) were used. The pressing temperature is 230°C; the pressing time is 35 minutes; and the pressing pressure is 1kPa. The corona electrode is needle-shaped; the corona voltage is 32kV; there is no grid control voltage; the charging temperature is 20°C; the charging time is 60s; the distance between the corona electrode and the sample is 7cm. Aluminum electrodes of 100 nm were vacuum-evaporated on both sides of the porous membrane.

对上述的多孔FEP/PTFE复合驻极体压电薄膜的测试结果为:The test results of the above-mentioned porous FEP/PTFE composite electret piezoelectric film are:

1.多孔聚合物薄膜横截面的扫描电镜图(如图2所示)。1. Scanning electron microscope image of the cross-section of the porous polymer film (as shown in Figure 2).

2.多孔聚合物驻极体薄膜压电d33系数的压强特性试验结果(如图3所示)2. The pressure characteristic test results of the piezoelectric d 33 coefficient of the porous polymer electret film (as shown in Figure 3)

3.多孔聚合物驻极体薄膜压电d33系数的频率特性试验结果(如图4所示)3. The frequency characteristic test results of the piezoelectric d 33 coefficient of the porous polymer electret film (as shown in Figure 4)

4.多孔聚合物驻极体薄膜压电d33系数的等温衰减试验结果(如图5所示)4. Isothermal decay test results of porous polymer electret film piezoelectric d 33 coefficient (as shown in Figure 5)

5.预老化处理的多孔聚合物驻极体薄膜压电d33系数的等温衰减试验结果(如图6所示)5. The isothermal decay test results (as shown in Figure 6) of the porous polymer electret film piezoelectric d 33 coefficient of pre-aging treatment

Claims (6)

1, a kind of preparation method of porous polymer piezo-electric electret thin film, comprise the preparation of porous polymer film and to this film two parts of charging, the preparation process that it is characterized in that porous polymer film is as follows: with a kind of, or two kinds, or the thin polymer film of two or more different melting points is laminated into and is compound film system, and place aperture plate at the one or both sides of film, be greater than or equal to film 1 fusing point then, be less than or equal under the certain value T in the warm area of film 2 fusing points to the compound film system P that exerts pressure, elapsed time t forms perforated membrane, the scope of P is 1kPa-10MPa, and the scope of t is 2min-120min; Here, film 1 is the film of minimum fusing point in the thin polymer film, and film 2 is the film of peak melting point in the thin polymer film; Described polymer is PTFE, FEP, COC, PET, PI, PE, PEN or PP.
2, the preparation method of porous polymer piezo-electric electret thin film according to claim 1, it is characterized in that charging employing corona charging, the steps include: perforated membrane placed on the metal electrode and flatten, above perforated membrane, settle a corona electrode, corona electrode connects DC high-voltage power supply, under the condition of no grid voltage or grid voltage regulation and control, carry out corona charging, obtain porous polymer electret piezoelectric membrane; The corona charging condition is: voltage for+2kV~+ 100kV or-2kV~-100kV, maximum temperature is not higher than the fusing point of film 2, be 1 second-1 hour conduction time, the distance of electrode and perforated membrane is 2cm~50cm.
3, the preparation method of porous polymer piezo-electric electret thin film according to claim 1, it is characterized in that the charging of charging employing contact method, the steps include: the two sides of perforated membrane is plated electrode, upper/lower electrode respectively is connected respectively to the two poles of the earth of a DC high-voltage power supply then, and charging obtains porous polymer electret piezoelectric membrane; Charge condition is: voltage for+2kV~+ 100kV or-2kV~-100kV, maximum temperature is not higher than the fusing point of film 2, be 1 second-1 hour conduction time.
4, the preparation method of porous polymer piezo-electric electret thin film according to claim 1, it is characterized in that the charging of charging employing electron beam, condition is: electron beam can be 5keV~100keV, and maximum temperature is not higher than the fusing point of film 2, and be 1 second-1 hour conduction time.
5, the preparation method of porous polymer piezo-electric electret thin film according to claim 1, the order number that it is characterized in that described aperture plate is the 2-2000 order, and the silk footpath is 0.001-2mm, and the aperture is 0.005-35mm.
6, the preparation method of porous polymer piezo-electric electret thin film according to claim 1 is characterized in that using aperture plate between corona electrode and the porous polymer film.
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