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CN1627993A - 喷嘴装置及具有喷嘴装置的基板处理装置 - Google Patents

喷嘴装置及具有喷嘴装置的基板处理装置 Download PDF

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Publication number
CN1627993A
CN1627993A CN02829087.9A CN02829087A CN1627993A CN 1627993 A CN1627993 A CN 1627993A CN 02829087 A CN02829087 A CN 02829087A CN 1627993 A CN1627993 A CN 1627993A
Authority
CN
China
Prior art keywords
liquid
substrate
treatment fluid
outlet
spray nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN02829087.9A
Other languages
English (en)
Chinese (zh)
Inventor
水川茂
村田贵
中田胜利
松元俊二
赤坂丈士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUMITOMO PRECISION INDUSTRY Co Ltd
Original Assignee
SUMITOMO PRECISION INDUSTRY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUMITOMO PRECISION INDUSTRY Co Ltd filed Critical SUMITOMO PRECISION INDUSTRY Co Ltd
Publication of CN1627993A publication Critical patent/CN1627993A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/20—Perforated pipes or troughs, e.g. spray booms; Outlet elements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Coating Apparatus (AREA)
  • Nozzles (AREA)
CN02829087.9A 2002-06-05 2002-06-05 喷嘴装置及具有喷嘴装置的基板处理装置 Pending CN1627993A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2002/005567 WO2003103845A1 (ja) 2002-06-05 2002-06-05 ノズル装置及びこれを備えた基板処理装置

Publications (1)

Publication Number Publication Date
CN1627993A true CN1627993A (zh) 2005-06-15

Family

ID=29727316

Family Applications (1)

Application Number Title Priority Date Filing Date
CN02829087.9A Pending CN1627993A (zh) 2002-06-05 2002-06-05 喷嘴装置及具有喷嘴装置的基板处理装置

Country Status (4)

Country Link
JP (1) JPWO2003103845A1 (ja)
CN (1) CN1627993A (ja)
TW (1) TW561071B (ja)
WO (1) WO2003103845A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102931119A (zh) * 2011-08-09 2013-02-13 株式会社Mm科技 用于处理衬底表面的叶片模块
CN105298531A (zh) * 2015-10-24 2016-02-03 山西晋城无烟煤矿业集团有限责任公司 掘锚机用喷雾装置
CN106111587A (zh) * 2016-06-23 2016-11-16 武汉华星光电技术有限公司 液刀
CN113942860A (zh) * 2020-07-17 2022-01-18 台郡科技股份有限公司 水平式输送基板的传动机构

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6178185B2 (ja) * 2013-09-24 2017-08-09 積水化学工業株式会社 スリットノズル

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3458313B2 (ja) * 1992-12-31 2003-10-20 株式会社サンツール カーテンファイバー状接着剤のスプレー塗布装置
JPH06210228A (ja) * 1993-01-16 1994-08-02 San Tool:Kk カーテンファイバー状スプレー塗布装置
JPH1157573A (ja) * 1997-08-13 1999-03-02 Sun Tool:Kk 外装被覆商品の製造方法および外装被覆商品の製造装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102931119A (zh) * 2011-08-09 2013-02-13 株式会社Mm科技 用于处理衬底表面的叶片模块
CN105298531A (zh) * 2015-10-24 2016-02-03 山西晋城无烟煤矿业集团有限责任公司 掘锚机用喷雾装置
CN106111587A (zh) * 2016-06-23 2016-11-16 武汉华星光电技术有限公司 液刀
CN106111587B (zh) * 2016-06-23 2018-09-11 武汉华星光电技术有限公司 液刀
CN113942860A (zh) * 2020-07-17 2022-01-18 台郡科技股份有限公司 水平式输送基板的传动机构

Also Published As

Publication number Publication date
JPWO2003103845A1 (ja) 2005-10-06
WO2003103845A1 (ja) 2003-12-18
TW561071B (en) 2003-11-11

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C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication