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CN1553195B - Clean room for trace element and isotope analysis - Google Patents

Clean room for trace element and isotope analysis Download PDF

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Publication number
CN1553195B
CN1553195B CN03132374.XA CN03132374A CN1553195B CN 1553195 B CN1553195 B CN 1553195B CN 03132374 A CN03132374 A CN 03132374A CN 1553195 B CN1553195 B CN 1553195B
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China
Prior art keywords
clean
room
return air
air
acid
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Expired - Fee Related
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CN03132374.XA
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Chinese (zh)
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CN1553195A (en
Inventor
王银喜
李惠民
杨杰东
王百诚
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Nanjing University
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Nanjing University
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Priority to CN03132374.XA priority Critical patent/CN1553195B/en
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Publication of CN1553195B publication Critical patent/CN1553195B/en
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Abstract

痕量元素与同位素分析用洁净室,洁净室是一个正压区,送排风管道结构如下:所有进入超净区的风经过设在管道上的三级过滤器,空气进风管上设有粗效过滤器和中效过滤器,然后经过主管道送至各房间的静压箱中,再经过高效过滤器输人室内,室内设有回风口。本发明提供了一种能提供大区域的洁净室,并有化学防酸防腐功能,满足仪器测量的要求,包括进行痕量元素与同位素分析,单颗粒锆石分析,也用于各种无机和有机理化分析和高纯材料的制备用洁净室。超净工作台洁净度,每立方英尺空气中含≥0.5μm尘粒数经检测低于30粒,按我国洁净厂房设计规范(GBJ73-84)优于100级,符合设计要求。The clean room is used for trace element and isotope analysis. The clean room is a positive pressure area. The coarse-effect filter and the medium-effect filter are then sent to the static pressure box of each room through the main pipeline, and then sent to the room through the high-efficiency filter, and the room is equipped with a return air outlet. The invention provides a clean room that can provide a large area, and has chemical anti-acid and anti-corrosion functions, meets the requirements of instrument measurement, including trace element and isotope analysis, single particle zircon analysis, and is also used for various inorganic and Clean room for organic physical and chemical analysis and preparation of high-purity materials. The cleanliness of the ultra-clean workbench, the number of dust particles ≥ 0.5 μm per cubic foot in the air has been tested to be less than 30 particles, which is better than 100 according to my country's clean workshop design specification (GBJ73-84), and meets the design requirements.

Description

Trace element and isotope analysis toilet
One, technical field
The present invention relates to a kind of toilet, especially trace element and isotope analysis are with the clean chamber of earning of acid-proof.
Two, background technology
The purposes of toilet is more and more many, as the detection of preparation, trace and the trace element of high-purity material, have a wide range of applications in industries such as electronics, biology, pharmacy.The dustless environment of high-tech product needed guarantees its quality; Need such toilet during detection, toilet and clean bench are removed particulate, carry out air filtration.Purification rank as existing superclean bench reaches 100 grades, mean wind speed (M/S): 0.2-0.4, but workspace size (mm) is less: 870*500*450.The air of operational zone high-cleanness, high working environment can only be provided.This equipment adopts horizontal or vertical one-way air stream, and room air enters plenum chamber through prefilter, passes through high efficiency particle air filter again, the last vertical one-way air stream that forms high cleaning in the operational zone.Other has the cleaning ambient of high level and good operability as biological superclean bench, and compact structure and certain work space are provided.Filtering material adopts low step-down HEPA filtrator (0.3 μ m particle, 99.99% dust catching efficiency) to provide clean air to the workspace.Toilet's cost height in existing big zone, the design of air cleaning system may not be reasonable, and difficulty satisfies high-grade standard. and especially in electronics, biology, pharmaceutical field, generally adopt metal material can not satisfy the standard of high-grade inorganic elements and isotope analysis in the toilet.
Three, summary of the invention
The object of the invention is: a kind of toilet that big zone can be provided is provided, satisfy acceptance specification JGJ71-90, and has an anti-acid function of chemistry, satisfy the requirement of high precision apparatus measures, comprise and carry out micro-example trace element and isotope analysis, the individual particle zircon is analyzed, and also is used for the preparation toilet of various inorganic and organic physico-chemical analysis and high-purity material.
The present invention seeks to realize like this: the toilet is a zone of positive pressure, its supply and exhaust situation: all enter the wind in ultra-clean district through behind the three-stage filtration, air intake duct is provided with serial low efficient filter and medium effeciency filter, deliver in the plenum chamber in each room through trunk line then, indoor through the defeated people of high efficiency particulate air filter again, each chamber rate of ventilation reach 50 times/per hour, make each chamber under main air blower or blower fan duty on duty, can both reach indoor malleation.Other is provided with the circulation return air duct, the air of indoor nontoxic no acid gas is sent into the blast main road again from return air duct, be used to save the energy that input air freezes or heats, reducing the consumption of purification filtering material and reduce operating cost. high efficiency particulate air filter is failed the indoor and worktable of people, be provided with sucktion fan in the clean work station space, all directly discharge the harmful gases such as waste gas of worktable outdoor, thereby can guarantee the physical and mental health of combustion gas support personnel when experiment like this, each clean room air quantity configuration suitably reaches designing requirement.
The decontamination chamber is under the primary air fan duty, and noise is the 47-53 decibel, and under the machine duty, noise is the 42-48 decibel on duty.
Further improvement of the present invention also comprises: all enter to flow back to the airduct road and all adopt plastic conduit.Indoor purifying worktable, ventilation toxin-expelling cabinet and experimental work table top all adopt plastic plate, acrylic plastering sheet material especially, and it is compared with traditional polyvinyl chloride plastic plate, and acrylic plastering sheet material has environmental protection, nontoxic, and is high temperature resistant.Decontamination chamber's metope and end face adopt double applying face polyamine alkene high-density plate.Acrylic plastering sheet material and high-density plate all have acid-proof, alkali prevention, heatproof and smooth characteristics.The epoxy resin self-leveling terrace is adopted on ground, decontamination chamber.
Characteristics of the present invention are: a kind of toilet that big zone can be provided is provided, and chemical acid-proof anti-corrosion function arranged, satisfy the requirement of apparatus measures, comprise and carry out trace element and isotope analysis, the individual particle zircon is analyzed, and also is used for the preparation toilet of various inorganic and organic physico-chemical analysis and high-purity material.The superclean bench cleanliness factor, contain in every cubic foot of air 〉=0.5 μ m grit number is lower than 30 after testing, and (GBJ73-84) is better than 100 grades by China's Code for design of industrial clean rooms, adheres to specification.The purification cleanliness factor in 2 districts and 3 districts: contain in every cubic foot of air 〉=0.5 μ m grit number is lower than 150, is better than 1000 grades by standard, adhere to specification.The purification cleanliness factor in 4 districts and 5 districts: contain in every cubic foot of air 〉=0.5 μ m grit is lower than 400, is better than 4000 grades by standard, adhere to specification.Earning rank between passageway and buffering be contain in every cubic foot of air 〉=0.5 μ m grit is lower than 1900, is better than 5000 grades by standard, adhere to specification.The waste gas of worktable is all directly discharged outdoor, thereby can guarantee the physical and mental health of combustion gas support personnel when experiment like this, each clean room air quantity configuration is suitable.Integrated poured epoxy gravity flow level ground does not have seam, and no electrostatic precipitation meets the purification Laboratory Request.Meet decontamination chamber's standard.Especially all right angles all adopt R angle circular arc plastics junctor in the acid-proof decontamination chamber, reduce to greatest extent to purify dead angle area; Between newly-designed dressing cubicle and buffering is one, has the effect of Airshower chamber, easy to use, saves the energy, reduces construction costs: in clean bench,, the brightness of clean bench is obviously improved by having adorned the Philip corrosion-proof luminaire, and easy to operate; In dressing cubicle, have health drip washing chamber concurrently, make the staff improve self cleaning, guaranteed indoor cleanliness factor.In addition,, closely link to each other, also guaranteed the certain cleanliness factor between instrument with purifying area though the instrument room belongs to non-purifying area, rationally distributed, have good peripheral greening environment.The decontamination chamber is under the primary air fan duty, and noise is the 47-53 decibel, and under blower fan duty on duty, noise is the 42-48 decibel.The design of blower fan on duty can be saved the barotropic state that energy guarantees the chamber.
Four, description of drawings
The invention will be further described below in conjunction with accompanying drawing and by embodiment:
Fig. 1 is an air supply duct system architecture synoptic diagram of the present invention
Fig. 2 is a return air duct system architecture synoptic diagram of the present invention
Fig. 3 is a Working table structure synoptic diagram of the present invention
As shown in the figure: main air blower 1, blower fan on duty 2, main ajutage 3, the return air person in charge 4, indoor return air inlet 5, indoor air outlet 6, coarse filter 7, medium effeciency filter 8, clean work station 9, clean work station lamp 10, high efficiency particulate air filter 11, worktable blower fan air outlet 12, worktable suction opeing 13, bench apron 14, worktable transparent face mask 15.Among variable valve 20 on the up and down door of organic glass 16, speed governing pressure fan 17, air intake filtering layer 18, exhaust duct 19, the exhaust duct, Fig. 2, backwind tube connects between the blast pipe 22 of original blower fan, the blast pipe 21 that connects original blower fan, air draught inlet 23, fan house 26, corridor 27, buffering 28, workplace 29.
Five, embodiment
As shown in the figure, the present invention is provided with main air blower and blower fan on duty simultaneously.Blower fan on duty is one group of miniwatt blower fan, works on one's own time, keeps malleation slightly, and saves electric energy.Other is provided with the circulation return air duct, and the indoor return air inlet that is provided with connects return air duct, and indoor nontoxic air is sent into the blast main road again from return air duct.
Trace element of the present invention and isotope analysis acid-proof toilet, poisonous or have the work of the acid gas of volatilization all to require in clean work station, to carry out, indoor earning worktable as shown in the figure, from the room air intake again by connecing an adjustable speed fan 17 behind the air intake filtering layer 18, enter worktable by high efficiency particulate air filter 11, so, the clean index of worktable reaches the highest, and high efficiency particulate air filter 11 filtering materials adopt low step-down HEPA filtrator (0.3 μ m particle, 99.99% dust catching efficiency).Work space is provided with sucktion fan and exhaust duct 19, and exhaust duct 19 is provided with variable valve 20 and air draught inlet 23, can effectively regulate the air-flow of worktable, thus the quality of room air when guaranteeing test.All directly discharge the waste gas of worktable outdoor.
Toxin-expelling cabinet and the experimental work table top of now ventilating all adopts acrylic plastering sheet material, and it is compared with traditional polyvinyl chloride plastic plate, and acrylic plastering sheet material has environmental protection, nontoxic, and is high temperature resistant.Decontamination chamber's metope and end face adopt double applying face polyamine alkene high-density plate.Acrylic plastering sheet material and high-density plate all have acid-proof, alkali prevention, heatproof and smooth characteristics.Distinguishedly be, the raw material and the technology on the epoxy resin gravity flow level ground that Guangdong Coud company produces is adopted on ground, decontamination chamber, and its characteristics are integrated poured, compare with block-shaped plastic floor, and epoxy gravity flow level ground does not have seam, and no electrostatic precipitation meets the purification Laboratory Request.This project overall design is reasonable, meets decontamination chamber's standard.Especially all right angles all adopt R angle circular arc plastics junctor in the acid-proof decontamination chamber, reduce to greatest extent to purify dead angle area; Between newly-designed dressing cubicle and buffering is one, has the effect of Airshower chamber, easy to use, saves the energy, reduces the engineering valency: in clean bench,, the brightness of clean bench is obviously improved by having adorned the anticorrosion Cleaning luminaire in Philip, and easy to operate; In dressing cubicle, have health drip washing chamber concurrently, make the staff improve self cleaning, guaranteed indoor cleanliness factor.In addition,, closely link to each other, also guaranteed the certain cleanliness factor between instrument with purifying area though the instrument room belongs to non-purifying area, rationally distributed, have good peripheral greening environment.
Supply and exhaust pipe structure: as shown in the figure, all enter the wind in ultra-clean district through behind the three-stage filtration structure of one-level secondary three-stage filtration, deliver to by trunk line in the plenum chamber in each room, indoor through the defeated people of high efficiency particulate air filter again, each chamber rate of ventilation reach 50 times/per hour, make each chamber under main air blower or blower fan duty on duty, can both reach indoor malleation.Each clean room air quantity configuration suitably reaches designing requirement.
The decontamination chamber is under the primary air fan duty, and noise is the 47-53 decibel, and under the machine duty, noise is the 42-48 decibel on duty.
The most of macromolecule acid-proof anti-corrosion materials such as polypropylene and Polyvinylchloride that adopt of the present invention, the more use of experiment container be teflon.The present invention also comprises application: material science, environmental science, geoscience, chemistry and chemical industry science, life science, the preparation of various inorganic elements such as nuclear energy science and isotope and organic compound physico-chemical analysis and high-purity material.

Claims (1)

1. trace element and isotope analysis acid-proof toilet, the toilet is a zone of positive pressure, it is characterized in that the supply and exhaust pipe structure is as follows: all enter the wind in ultra-clean district through being located at the tertiary filter on the pipeline, the air blast pipe is provided with low efficient filter and medium effeciency filter, deliver in the plenum chamber in each room through trunk line then, indoor through the high efficiency particulate air filter input again, the indoor return air inlet that is provided with; Other is provided with the circulation return air duct, and the indoor return air inlet that is provided with connects return air duct, and indoor nontoxic air is sent into the blast main road again from return air duct; All right angles all adopt R angle circular arc plastics junctor in the acid-proof toilet; The epoxy resin self-leveling terrace is adopted on ground, acid-proof toilet; Be provided with clean work station, the clean work station top is provided with plate washer (14), and the clean work station space is provided with all directly discharges outdoor sucktion fan with the waste gas of worktable; Supply and exhaust pipe is provided with main air blower and blower fan on duty, and clean work station, ventilation toxin-expelling cabinet and experimental work table top all adopt acid-proof or anti-rot plastic sheet material.
CN03132374.XA 2003-08-18 2003-08-18 Clean room for trace element and isotope analysis Expired - Fee Related CN1553195B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN03132374.XA CN1553195B (en) 2003-08-18 2003-08-18 Clean room for trace element and isotope analysis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN03132374.XA CN1553195B (en) 2003-08-18 2003-08-18 Clean room for trace element and isotope analysis

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CN1553195B true CN1553195B (en) 2010-04-28

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101711999B (en) * 2009-11-11 2011-08-17 南通大学 Air wall sealing type double positive pressure purification workbench
CN104983234A (en) * 2015-07-23 2015-10-21 苏州蓝威健医疗科技有限公司 Assembled biological environmental friendly nurse station

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85107425A (en) * 1985-10-09 1987-04-15 高砂热学工业株式会社 Versatile Adaptable Cleanroom System
CN1373824A (en) * 1999-09-07 2002-10-09 斯皮德法姆-艾佩克公司 Clean room and its method
CN2549366Y (en) * 2002-05-30 2003-05-07 复旦大学 Assembled tubular filtering clean room with vent
US6602128B1 (en) * 2002-05-24 2003-08-05 Charles W. Spengler Clean air room with a blower including a HEPA filter and ducts

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85107425A (en) * 1985-10-09 1987-04-15 高砂热学工业株式会社 Versatile Adaptable Cleanroom System
CN1373824A (en) * 1999-09-07 2002-10-09 斯皮德法姆-艾佩克公司 Clean room and its method
US6602128B1 (en) * 2002-05-24 2003-08-05 Charles W. Spengler Clean air room with a blower including a HEPA filter and ducts
CN2549366Y (en) * 2002-05-30 2003-05-07 复旦大学 Assembled tubular filtering clean room with vent

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
南京大学现代分析中心.南京大学现代分析中心非标防酸洁净室竣工评审鉴定报告.质谱学报24 2.2003,24(2),
南京大学现代分析中心.南京大学现代分析中心非标防酸洁净室竣工评审鉴定报告.质谱学报24 2.2003,24(2), *
李子麟.100级管道式过滤结构洁净通道的研制.暖通空调 1996年第3期.1996,(19963),36页.
李子麟.100级管道式过滤结构洁净通道的研制.暖通空调 1996年第3期.1996,(19963),36页. *
李子麟等.一个实验动物饲养区空调系统的改造.上海实验动物科学16 2.1996,16(2),73页.
李子麟等.一个实验动物饲养区空调系统的改造.上海实验动物科学16 2.1996,16(2),73页. *

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Granted publication date: 20100428

Termination date: 20100818