CN1325538A - Light bulbs coated with rare earth oxides on the inner surface - Google Patents
Light bulbs coated with rare earth oxides on the inner surface Download PDFInfo
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- CN1325538A CN1325538A CN99813065A CN99813065A CN1325538A CN 1325538 A CN1325538 A CN 1325538A CN 99813065 A CN99813065 A CN 99813065A CN 99813065 A CN99813065 A CN 99813065A CN 1325538 A CN1325538 A CN 1325538A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
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Abstract
灯泡(1)包括一个透光外壳(2)、装入该外壳内的填充材料和沉积在外壳内表面的涂层(3),所述填充材料在被激发时形成等离子体放电,所述涂层抑制了等离子体放电和外壳(2)的反应。所述涂层(3)包含与填充材料同样稀土金属的氧化物。涂布灯泡外壳(2)内壁的方法包括下列步骤:制备含有要求涂料前体的溶胶凝胶溶液,在灯泡内表面上分布该溶胶凝胶,进行干燥和焙烧获得涂布的灯泡。
A light bulb (1) comprises a light-transmitting shell (2), a filling material placed in the shell, and a coating (3) deposited on the inner surface of the shell. The filling material forms a plasma discharge when excited, and the coating inhibits the reaction between the plasma discharge and the shell (2). The coating (3) comprises an oxide of the same rare earth metal as the filling material. A method for coating the inner wall of the light bulb shell (2) comprises the following steps: preparing a sol-gel solution containing a desired coating precursor, distributing the sol-gel on the inner surface of the light bulb, and drying and firing the solution to obtain a coated light bulb.
Description
相关申请related application
本申请基于并要求于1998年11月13日申请的美国专利申请60/108,440和于1999年4月26日申请的美国专利申请60/130,979为优先权,上述两个文献均完全参考结合于此。This application is based on and claims priority to U.S. Patent Application 60/108,440, filed November 13, 1998, and U.S. Patent Application 60/130,979, filed April 26, 1999, both of which are hereby incorporated by reference in their entirety .
发明背景Background of the invention
1.发明领域1. field of invention
本发明涉及放电灯,具体而言涉及用于放电灯的灯泡,在其内表面上有一层涂层,以减少灯泡壁和填充材料的反应。The present invention relates to discharge lamps and in particular to bulbs for discharge lamps which have a coating on their inner surfaces to reduce the reaction of the bulb wall and the filling material.
2.相关领域2. Related areas
由于要求的光性质,已知各种稀土金属卤化物用作灯泡内的填充材料。例如,美国专利5363,015和5,479,072公开镨和钕作为无汞灯的合适填充材料。Due to the required optical properties, various rare earth metal halides are known for use as filling materials in bulbs. For example, US Patents 5,363,015 and 5,479,072 disclose praseodymium and neodymium as suitable fill materials for mercury-free lamps.
然而,这些物质在灯的常规操作温度下,会与灯泡材料熔凝石英进行不同程度的反应,而且灯的颜色特性在较短时间内也会变差。However, these substances react to varying degrees with the bulb material fused quartz at the normal operating temperature of the lamp, and the color characteristics of the lamp deteriorate over a short period of time.
已知可使用灯泡内部的涂层来减少灯填充材料和灯泡壁的反应。然而,现有技术中具有这些涂层的灯其使用寿命仍有限,并且不一定适合使用稀土金属卤化物这类填充材料。现有技术涂层的另一个问题是,当涂层厚度足够能防止不适宜的反应时,却由于例如不同的热膨胀系数而嫌太厚难以粘合到灯泡壁上;而当涂层厚度足够薄能避免膨胀问题时,却对防止不适宜的反应来说又太薄。It is known to use coatings on the inside of the bulb to reduce the reaction of the lamp fill material and the bulb wall. However, prior art lamps with these coatings still have a limited lifetime and are not necessarily suitable for use with fill materials such as rare earth metal halides. Another problem with prior art coatings is that while the coating is thick enough to prevent undesired reactions, it is too thick to adhere to the bulb wall due to, for example, different coefficients of thermal expansion; Too thin to prevent undesired reactions while avoiding swelling problems.
发明概述Summary of the invention
本发明的一个目的是提供一种放电灯泡,当它使用包含稀土金属的灯泡填充材料时,其使用寿命较长。It is an object of the present invention to provide a discharge bulb which has a longer service life when a bulb filling material containing a rare earth metal is used.
本发明的放电灯泡在其内表面涂布有稀土氧化物,这种稀土氧化物涂层能抑制包含同样稀土金属的填充材料和灯泡壁材料之间的反应。例如,对包含一种稀土金属的填充材料,在灯泡内壁上施涂一层稀土氧化物的涂层。可通过溶胶凝胶溶液方式施涂该涂料,该溶胶凝胶溶液的配方能使得对涂布的灯泡外壳进行干燥并在较高温度焙烧后,形成要求的稀土氧化物涂层。The discharge bulb of the present invention is coated on its inner surface with a rare earth oxide coating which inhibits the reaction between the filling material containing the same rare earth metal and the bulb wall material. For example, for a fill material containing a rare earth metal, a coating of rare earth oxide is applied to the inside of the bulb. The coating can be applied by means of a sol-gel solution formulated to allow the desired rare earth oxide coating to form after the coated bulb envelope has been dried and fired at a relatively high temperature.
溶胶凝胶涂布法的优点是最后的涂层相当薄(如约50-1000nm),但该厚度又足以抑制不适宜的反应。The advantage of the sol-gel coating method is that the final coating is relatively thin (eg, about 50-1000 nm), but thick enough to suppress undesirable reactions.
一个实施例中,在灯泡内壁上施涂镨氧化物。该镨氧化物涂层有利于使用镨填充材料,能明显抑制熔凝石英灯泡的析晶现象,因为此时没有温度依赖的导致析晶的化学倾向。In one embodiment, praseodymium oxide is applied to the inner wall of the bulb. The praseodymium oxide coating facilitates the use of praseodymium filling materials and significantly inhibits devitrification of fused silica bulbs, since there is no temperature-dependent chemical tendency to cause devitrification.
下面是本发明施涂稀土氧化物涂料的一个示例方法。使用一种稀土氧化物前体制备溶胶凝胶溶液。将该溶胶凝胶溶液倒入灯泡的预型件中,然后以控制方式将其倒出,留下均匀厚度的涂层。也可以将溶胶凝胶溶液旋转涂布在灯泡内表面上,然后对该涂层进行干燥和焙烧。以此方式可以施涂数层。稀土氧化物前体的例子包括异丙醇镨[Pr(OC3H7)3]和甲氧基乙醇镨。The following is an exemplary method of applying the rare earth oxide coating according to the present invention. A sol-gel solution was prepared using a rare earth oxide precursor. This sol-gel solution is poured into the bulb preform, which is then poured out in a controlled manner, leaving a coating of uniform thickness. It is also possible to spin coat the sol-gel solution on the inner surface of the bulb, then dry and fire the coating. Several layers can be applied in this way. Examples of rare earth oxide precursors include praseodymium isopropoxide [Pr(OC 3 H 7 ) 3 ] and praseodymium methoxyethoxide.
本发明的前述方面和其它方面可以各自做到或同时做到。除非权利要求明确要求,本发明不应限于这两个方面或几个方面。The foregoing and other aspects of the invention may be performed individually or simultaneously. The invention should not be limited to these two or several aspects unless explicitly required by the claims.
附图简述Brief description of the drawings
由下面对附图中说明的实施方案的具体描述,能更好地理解本发明的前述和其它目的、特征和优点。附图中的同样数字一般表示各图中的同样部件。附图并不一定是按比例绘制的,重点只是说明本发明的原理。The foregoing and other objects, features and advantages of the present invention will be better understood from the following detailed description of the embodiments illustrated in the accompanying drawings. Like numerals in the drawings generally refer to like parts in the various drawings. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention.
图1是根据本发明第一方面进行涂布的灯泡的剖面图。Figure 1 is a cross-sectional view of a bulb coated according to the first aspect of the invention.
图2是根据本发明第二方面进行涂布的灯泡的剖面图。Figure 2 is a cross-sectional view of a bulb coated according to a second aspect of the invention.
图3是根据本发明一方面,涂布灯泡内壁第一种方法的流程图。Figure 3 is a flow chart of a first method of coating the interior of a light bulb in accordance with one aspect of the present invention.
图4是根据本发明一方面,涂布灯泡内壁第二种方法的流程图。Figure 4 is a flow diagram of a second method of coating the interior of a light bulb in accordance with an aspect of the present invention.
图5是灯泡内使用了含镨填充材料,涂布氧化镨灯泡的光谱分布图。Fig. 5 is a spectrum distribution diagram of a bulb coated with praseodymium oxide using a filling material containing praseodymium in the bulb.
本发明描述Description of the invention
在下面的描述中,用于说明目的但不构成限制,提出一些具体细节如具体结构、界面、方法等等是为了提供对本发明的完整理解。然而,本领域的技术人员应当理解,以偏离这些所述具体细节的其它方式实施本发明会带来益处。有些情况下,省略了已知设备、线路和方法的描述,以免以不必要的细节妨碍对本发明描述的理解。In the following description, for purposes of illustration and not limitation, some specific details are set forth, such as specific structures, interfaces, methods, etc., in order to provide a complete understanding of the present invention. However, those skilled in the art will appreciate that the present invention may be practiced to advantage in other ways that depart from these specific details set forth. In some instances, descriptions of known devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
图1中,放电灯泡1是一个熔凝石英外壳2,在其内表面上有涂层3。图2中,灯泡1还包括在熔凝石英外壳2和涂层3之间的扩散膜4。灯泡1可用于微波激发的无电极放电灯,例如5,404,076中所述。灯泡1还可用于电感偶合无电极放电灯,例如在PCT公报WO99/36940中所述。灯泡1还可用于电容偶合无电极放电灯,如美国专利5,825,132中所述,或行波无电极放电灯。In Fig. 1, the discharge bulb 1 is a
根据本发明,涂层3中包含对应于稀土金属填充材料的稀土氧化物。本发明施涂涂层3的方法是溶胶凝胶涂布法,下面将详细描述。稀土氧化物涂层能减轻灯泡填充材料中相同稀土金属卤化物引起的泡壳石英析晶现象,这种析晶是受下述反应(不平衡)的温度敏感性驱动的:According to the invention, coating 3 contains rare earth oxides corresponding to rare earth metal filling materials. The method of applying the coating layer 3 in the present invention is a sol-gel coating method, which will be described in detail below. Rare earth oxide coatings mitigate blister quartz devitrification caused by the same rare earth metal halides in the bulb fill material, which is driven by the temperature sensitivity of the following reactions (imbalances):
3Ml3+5SiO2=M2SiO7+MOl(g)+SiO(g)+SiOln(g)+Sil4(g) (式1)其中,3Ml 3 +5SiO 2 =M 2 SiO 7 +MOl(g)+SiO(g)+SiOl n (g)+Sil 4 (g) (Formula 1) where,
M是稀土金属;l是卤素,非平衡形式;g指气相物质;n为整数。M is a rare earth metal; l is a halogen, a non-equilibrium form; g refers to a gas phase substance; n is an integer.
挥发产物的平衡分压随温度下降而降低,产物的挥发性推动着玻璃态石英由灯泡较热区域通过气相向灯泡较冷区域迁移,在其上面沉积无定形或结晶态的石英。The equilibrium partial pressure of volatile products decreases as the temperature decreases, and the volatility of the products drives the glassy quartz to migrate from the hotter region of the bulb through the gas phase to the cooler region of the bulb, depositing amorphous or crystalline quartz on it.
根据本发明,在灯泡内壁涂布对应于填充材料中稀土元素的稀土氧化物,就可以抑制上述反应。例如,如果三溴化镨是填充材料,在灯泡内壁涂布上一种镨氧化物,就发生填充材料和涂层间的反应如下(不平衡):According to the present invention, the above-mentioned reaction can be suppressed by coating the rare earth oxide corresponding to the rare earth element in the filling material on the inner wall of the bulb. For example, if praseodymium tribromide is the filling material and a praseodymium oxide is coated on the inner wall of the bulb, the reaction between the filling material and the coating occurs as follows (unbalanced):
PrBr3+Pr6O11=PrBr3+Pr6O11+Pr2O3+PrOxBry (式2)PrBr 3 +Pr 6 O 11 =PrBr 3 +Pr 6 O 11 +Pr 2 O 3 +PrO x Br y (Formula 2)
熔点很高的各种形式的镨氧化物(如Pr6O11、Pr2O3)能进一步稳定上述反应。涂层中Pr与O的确切比例由灯的操作温度和沉积涂层的处理温度来决定。Various forms of praseodymium oxides with very high melting points (such as Pr 6 O 11 , Pr 2 O 3 ) can further stabilize the above reaction. The exact ratio of Pr to O in the coating is determined by the operating temperature of the lamp and the process temperature of the deposited coating.
图3是本发明在灯泡内壁施涂涂料第一种方法的流程图。本发明的溶胶凝胶法与涂布灯泡内壁的其它方法相比,其优点是价廉和简单。首先,制备或提供包含稀土氧化物前体的溶胶凝胶溶液(步骤11)。之后,将溶胶凝胶溶液倒入作为灯泡毛坯的灯泡预型件中(步骤13)。然后,以控制方式倒出该溶液,留下均匀厚度的涂层(步骤15)。然后干燥和焙烧该涂层(步骤17)。按照这种方式可施涂上数层。然后在灯泡中充入填充材料和起始气体(如果有的话)并密封之。Fig. 3 is a flowchart of the first method of applying paint to the inner wall of the bulb according to the present invention. The sol-gel method of the present invention has the advantage of being cheap and simple compared to other methods of coating the inside walls of bulbs. First, a sol-gel solution containing a rare earth oxide precursor is prepared or provided (step 11). Thereafter, the sol-gel solution is poured into the bulb preform as the bulb blank (step 13). The solution is then decanted in a controlled manner, leaving a coating of uniform thickness (step 15). The coating is then dried and fired (step 17). Several layers can be applied in this way. The bulb is then filled with filling material and starting gas (if any) and sealed.
这种溶液中的一种前体是异丙醇镨[Pr(OC3H7)3],它是一种粉末状对湿度敏感的固体,储存在干燥气氛的手套箱内。异丙醇镨可从Strem Chemicals购得。也可以使用其它前体(如甲氧基乙醇镨)。使用这些化学品时要适当小心。制备溶胶凝胶溶液的一个示例性方法如下:One precursor in this solution is praseodymium isopropoxide [Pr(OC 3 H 7 ) 3 ], a powdered moisture-sensitive solid stored in a dry atmosphere glove box. Praseodymium isopropoxide is commercially available from Strem Chemicals. Other precursors (such as praseodymium methoxyethoxide) may also be used. Exercise due care when working with these chemicals. An exemplary method of preparing a sol-gel solution is as follows:
1)在25毫升的三颈烧瓶中放入一磁力搅拌器。用suba封料封闭一个颈口。在第二颈口中放入一个有四氟乙烯活塞的90°弯管。随后通过第三颈口加入前体。1) Put a magnetic stirrer in a 25 ml three-necked flask. Close one neck with suba sealant. A 90° elbow with a tetrafluoroethylene plunger is placed in the second neck. The precursor is then added through the third neck.
2)有装有前体的烧瓶和一个塞子放入手套箱中。通过第三个敞开的颈口沉积约0.32克(1毫摩尔)。有少量粉末损失并不要紧。2) There is a flask containing the precursor and a stopper placed in the glove box. About 0.32 g (1 mmol) was deposited through the third open neck. A small amount of powder loss is not critical.
3)用塞子封住第三颈口,并用parafilm包住。然后从手套箱中取出该烧瓶。3) Seal the third neck with a stopper and wrap it with parafilm. The flask was then removed from the glove box.
4)烧瓶固定在烟罩下面的搅拌板上,通过90°弯管,通入干燥氮气(缓和气流),小心不要使前体溶液暴露于大气。4) The flask is fixed on the stirring plate under the fume hood, and dry nitrogen gas (moderate airflow) is introduced through a 90° elbow, being careful not to expose the precursor solution to the atmosphere.
5)用2毫升2-甲氧基乙醇[CH3OCH2CH2OH](99.9+%,HPLC级)制备注入液。通过suba密封将其加入到前体中。溶液在N2气氛中搅拌约1小时。之后,异丙醇盐完全溶解。5) Prepare an infusion solution with 2 mL of 2-methoxyethanol [CH 3 OCH 2 CH 2 OH] (99.9+%, HPLC grade). It is added to the precursor through the suba seal. The solution was stirred for about 1 h under N2 atmosphere. Afterwards, the isopropoxide was completely dissolved.
6)用0.2毫升乙酸(99.7%A.C.S.Reagent)制备注入液,通过suba密封在溶液中加入该乙酸注入液。搅拌溶液约10分钟(约90分钟后开始形成沉淀)。乙酸是螯合剂,有减慢醇盐水解和缩合的作用。6) Prepare an infusion with 0.2 ml of acetic acid (99.7% A.C.S. Reagent) and add the acetic acid infusion in solution through the suba seal. The solution was stirred for about 10 minutes (a precipitate started to form after about 90 minutes). Acetic acid is a chelating agent that slows down the hydrolysis and condensation of alcohol salts.
制成的溶液透明。若使用甲氧基乙醇镨为前体,在2-甲氧基乙醇中的(2-甲氧基乙醇)2镨预制溶胶凝胶溶液可从Chemat Technologies,Inc.购得。使用更复杂的烷氧基团或加入螯合剂(如乙酸),可降低醇盐溶液前体的湿度敏感性。The resulting solution is transparent. Prefabricated sol-gel solutions of (2-methoxyethanol) 2 praseodymium in 2-methoxyethanol are available from Chemat Technologies, Inc. if using praseodymium methoxyethanol as a precursor. purchased. The moisture sensitivity of the alkoxide solution precursors can be reduced by using more complex alkoxy groups or adding chelating agents such as acetic acid.
还有另一些可采取的步骤,包括在涂布前水解前体。水解有助于减少涂料中残余有机物含量,降低对环境湿度的敏感性。对每摩尔醇盐加入2摩尔H2O来水解前体,导致被羟基的取代。在没有螯合剂存在条件下,在前体溶液中加入水,溶液立刻变得混浊。若存在螯合剂,约1小时后,溶液变混浊。Still other steps that can be taken include hydrolyzing the precursors prior to coating. Hydrolysis helps reduce residual organic content in the coating and reduces sensitivity to ambient humidity. Addition of 2 moles of H2O per mole of alkoxide hydrolyzes the precursor, resulting in substitution by hydroxyl groups. In the absence of chelating agent, water was added to the precursor solution, and the solution immediately became cloudy. If a chelating agent is present, the solution becomes cloudy after about 1 hour.
试验结果test results
在三个12.5×12.5毫米(1/2×1/2英寸)的熔凝石英基材上进行试验,确定氧化物相以及涂层与石英之间的反应。按照下面所述涂布基材。以约3000rpm速度,在基材上旋转涂布溶液约60秒。然后将基材放在约175℃的热板上4分钟,蒸发去溶剂。旋转涂布和加热进行三次,形成三层涂层。Tests were performed on three 12.5 x 12.5 mm (1/2 x 1/2 in) fused silica substrates to determine the oxide phase and the reaction between the coating and the quartz. Coat the substrate as described below. The solution was spin coated on the substrate at about 3000 rpm for about 60 seconds. The substrate was then placed on a hot plate at about 175°C for 4 minutes to evaporate the solvent. Spin coating and heating were performed three times to form a three-layer coating.
然后对沉积的涂层进行焙烧。加热和冷却速度约为5℃/分钟。三个试验样品均在约900℃进行首次焙烧约30分钟,之后,观察到淡黄色外观。然后这三个样品分别在约1100℃分别焙烧约1小时(样品#1),2小时(样品#2)和5小时(样品#3)。第二次焙烧步骤后膜变透明。用tencor轮廓测定仪测定这三个样品涂层的厚度,分别为183nm(样品#1)、203nm(样品#2)和170nm(样品#3)。The deposited coating is then fired. The heating and cooling rate is about 5°C/min. All three test samples were first fired at about 900° C. for about 30 minutes, after which a light yellow appearance was observed. These three samples were then fired at about 1100°C for about 1 hour (sample #1), 2 hours (sample #2) and 5 hours (sample #3), respectively. The film became transparent after the second firing step. The coating thicknesses of the three samples were measured with a tencor profilometer and were 183 nm (sample #1), 203 nm (sample #2) and 170 nm (sample #3).
另一种焙烧方法是首先将样品加热至500℃,然后以约5℃/分钟的速度升温至1100℃。样品在1100℃保温约30分钟。制成的膜透明。具体而言,1000℃的SEM显微照片显示是镨氧化物紧密填充的纳米级晶粒,这是光学透明性所要求的显微结构。Another method of firing is to first heat the sample to 500 °C, and then increase the temperature to 1100 °C at a rate of about 5 °C/min. The samples were incubated at 1100°C for about 30 minutes. The resulting film was transparent. Specifically, SEM micrographs at 1000 °C revealed densely packed nanoscale grains of praseodymium oxide, a microstructure required for optical transparency.
用UV-VIS光谱仪测定涂层吸光度随波长变化的关系。发现,吸光度一般随波长增加(在190-820nm范围)而下降。旋转涂布样品的X射线衍射试验表明,有结晶相存在,包括在约1000℃会还原为Pr2O3的Pr6O11相。UV-VIS spectrometer was used to measure the relationship between the absorbance of coating and the change of wavelength. It was found that the absorbance generally decreased with increasing wavelength (in the range of 190-820 nm). X-ray diffraction experiments on spin-coated samples showed the presence of crystalline phases, including a Pr 6 O 11 phase that reduces to Pr 2 O 3 at about 1000 °C.
差热分析(DTA)表明,以甲氧基乙醇盐为前体时,Pr6O11在约650℃结晶出来,而以异丙醇盐为前体时,在约500℃结晶出来。以异丙醇盐为前体生成的薄膜上结晶相生长分析表明,Pr6O11为主要相,但是在1000℃有一种未鉴明的相形成。加热到更高温度,还出现一些未鉴明的相,可能是由于内扩散形成的。用异丙醇盐为前体时,加热到1000℃后,出现方英石,表明熔凝石英的析晶。Differential thermal analysis (DTA) showed that Pr 6 O 11 crystallized at about 650 °C with methoxyethanolate as precursor and at about 500 °C with isopropoxide as precursor. Analysis of crystallographic phase growth on films formed with isopropoxide as precursor showed that Pr 6 O 11 was the main phase, but an unidentified phase formed at 1000°C. Upon heating to higher temperatures, some unidentified phases also appear, probably due to internal diffusion. When isopropoxide is used as the precursor, cristobalite appears after heating to 1000°C, indicating the crystallization of fused quartz.
以甲氧基乙醇盐为前体时,对薄膜上结晶相生长的分析表明,Pr6O11在高于以异丙醇盐为前体的结晶温度下才结晶,且未出现未鉴明相。在约900℃ Pr6O11转变成Pr2O3。以甲氧基乙醇盐为前体,没有观察到方英石。When using methoxyethanolate as precursor, the analysis of crystalline phase growth on the film shows that Pr 6 O 11 crystallizes at a higher crystallization temperature than isopropoxide as precursor, and no unidentified phase appears . Pr 6 O 11 transforms into Pr 2 O 3 at about 900°C. With methoxyethanolate as precursor, no cristobalite was observed.
使用奥歇电子能谱仪的深度分析表明,在试验的基材表面上没有Si。进一步的分析表明,使用Ar,由该膜溅射出约108nm后,有Si存在。Depth analysis using Auger electron spectroscopy showed no Si on the surface of the tested substrates. Further analysis showed the presence of Si after about 108 nm sputtered from the film using Ar.
卢瑟福背散射谱表明,加热到1100℃约1小时的样品以(异丙醇盐为前体)上,出现Pr和Si的互扩散。The Rutherford backscattering spectrum shows that the interdiffusion of Pr and Si occurs on the sample heated to 1100°C for about 1 hour (isopropoxide as the precursor).
随施涂温度的不同,某一个路线可能比另一个路线(指采用另一种前体)更适合。如前面指出的,异丙醇盐路线在较低温度下产生结晶。然而,涂布在熔凝石英上的甲氧基乙醇盐溶液仅产生Pr6O11相。例如,这种甲氧基乙醇盐路线产生的稳定多晶镨氧化物相,对长期工作的放电灯的发光度和/或颜色的稳定性都很重要。Depending on the application temperature, one route may be more suitable than another (meaning using another precursor). As noted previously, the isopropoxide route produces crystallization at lower temperatures. However, the methoxyethanolate solution coated on fused silica produced only the Pr6O11 phase. For example, the stable polycrystalline praseodymium oxide phase produced by this methoxyethanolate route is important for the stability of the luminosity and/or the color of long-term discharge lamps.
高温试验表明,在约1000℃会发生镨氧化物和石英间的互扩散。因此,在放电灯中,保持灯泡工作温度低于1000℃,较好为950℃或更低,能抑制这种互扩散。High-temperature tests have shown that interdiffusion between praseodymium oxide and quartz occurs at about 1000°C. Therefore, in a discharge lamp, keeping the bulb operating temperature below 1000°C, preferably 950°C or lower, suppresses this interdiffusion.
灯泡数据bulb data
图4是本发明涂布灯泡内表面第二种方法的流程图。按照上面所述,制备或提供溶胶凝胶溶液(步骤21)。将该溶胶凝胶溶液通入灯泡预型件中(步骤23)。将该预型件以充分的速度旋转,使溶胶凝胶溶液在该预型件内表面上分布开来(步骤25)。从预型件除去过量的溶胶凝胶溶液(步骤27,如倒出过量溶液)。涂布后的预型件按照上面所述干燥和焙烧之(步骤29)。Figure 4 is a flow chart of a second method of coating the interior surface of a light bulb according to the present invention. A sol-gel solution is prepared or provided as described above (step 21). The sol-gel solution is passed into the bulb preform (step 23). The preform is rotated at a sufficient speed to distribute the sol-gel solution over the inner surface of the preform (step 25). Excess sol-gel solution is removed from the preform (
如下将上述过程应用于外径9毫米,内径8毫米的灯泡。在石英棒的一端上形成灯泡,其夹断部位有个仍未封住的开口。将一滴按照异丙醇盐路线制备的溶胶凝胶溶液加入灯泡内部。然后以3000rpm速度旋转该灯泡,并用圆筒形加热垫对其在90℃加热。灯泡旋转约2分钟,然后旋转的轴向反转180°,灯泡再旋转2分钟。该过程重复3次,总的旋转时间约为8分钟。也可以采用其它使溶胶凝胶均匀分布的方法(如对灯泡预型体进行振动或摇摆)。然后从灯泡抽去残余的溶胶凝胶液体。灯泡在约200℃干燥15分钟。以此方式施涂数层。之后,灯泡在1000℃炉内,以5℃/分钟的加热/冷却速度,焙烧30分钟。Apply the above procedure to a light bulb with an outer diameter of 9 mm and an inner diameter of 8 mm as follows. A bulb is formed on one end of the quartz rod, with a pinch-off opening that remains unsealed. Add a drop of the sol-gel solution prepared according to the isopropoxide route to the inside of the bulb. The bulb was then rotated at 3000 rpm and heated at 90°C with a cylindrical heating pad. The bulb rotates for about 2 minutes, then the axis of rotation is reversed 180°, and the bulb rotates for another 2 minutes. The process was repeated 3 times for a total spin time of approximately 8 minutes. Other methods of uniformly distributing the sol-gel (such as vibrating or rocking the bulb preform) may also be used. The residual sol-gel liquid was then aspirated from the bulb. The bulbs were dried at about 200°C for 15 minutes. Several layers are applied in this way. Thereafter, the bulb was fired in a furnace at 1000°C for 30 minutes at a heating/cooling rate of 5°C/min.
然后灯泡中加入填充材料和合适的起始气体(如50乇氪),此实施例中填充材料为2毫克的三氯化镨(PrCl3)。图5是含有这种填充材料的涂布灯泡的光谱功率分布图。其测定是将灯泡装在具有一个直径5毫米圆孔的反射陶瓷夹套中。用电感偶合灯线路,在该灯泡上施加约150瓦的RF能量。由图5可知,该填充材料提供能在整个很宽的可视连续光谱范围输出光。Then a filling material and a suitable starting gas (such as 50 Torr Krypton) are added to the bulb. In this embodiment, the filling material is 2 mg of praseodymium trichloride (PrCl 3 ). Figure 5 is a graph of the spectral power distribution of a coated bulb containing this fill material. It is measured by fitting the bulb in a reflective ceramic jacket having a circular hole with a diameter of 5 mm. Approximately 150 watts of RF power was applied to the bulb using inductively coupled lamp wiring. As can be seen from FIG. 5, the filling material provides light output over a wide continuous visible spectral range.
本发明涂布灯泡的优点是能保持比含有同样填充材料但未涂布的灯泡良好光输出长几倍的时间。初步结果显示,使用本发明涂层的灯泡的使用寿命比未涂布灯泡长至少一个数量级,很可能是提供几个数量级的使用寿命。An advantage of coated bulbs according to the invention is that they maintain good light output several times longer than uncoated bulbs containing the same fill material. Preliminary results show that bulbs using the coatings of the present invention last at least an order of magnitude longer than uncoated bulbs, and likely provide several orders of magnitude longer lifetimes.
阻挡膜barrier film
如上所述,在灯泡的高温度下,存在镨扩散进入石英基材的可能。对于灯外壳在高温下要求很长的使用寿命,如图2所示,在沉积镨氧化物之前,在熔凝石英灯泡壳上首先沉积明显透明的扩散阻挡膜是有利的。合适的阻挡膜包括氧化铝、氮化铝、氮化硅、氮化镨和二氧化钛的薄膜。As mentioned above, at the high temperature of the bulb, there is a possibility of diffusion of praseodymium into the quartz substrate. For lamp envelopes requiring a long service life at high temperatures, as shown in Figure 2, it is advantageous to first deposit a clearly transparent diffusion barrier film on the fused silica bulb envelope before depositing the praseodymium oxide. Suitable barrier films include thin films of aluminum oxide, aluminum nitride, silicon nitride, praseodymium nitride, and titanium dioxide.
二氧化钛(TiO2)是本发明合适扩散阻挡膜的一个例子。TiO2在低于约1400℃下不会与SiO2反应。根据本发明的这一方面,按照下面所述,通过溶胶凝胶法施涂扩散阻挡膜涂层:Titanium dioxide ( TiO2 ) is an example of a suitable diffusion barrier film of the invention. TiO2 does not react with SiO2 below about 1400°C. According to this aspect of the invention, the diffusion barrier film coating is applied by the sol-gel method as follows:
1)将Ti(Ⅳ)异丙醇作为前体与异丙醇溶剂混合。1) Mix Ti(IV) isopropanol as a precursor with isopropanol solvent.
2)加入一种螯合剂,前体;螯合剂的比值保持在1∶2摩尔。2) Add a chelating agent, precursor; the ratio of chelating agent is kept at 1:2 moles.
3)在该体系中滴加H2O(每摩尔前体10摩尔水)。3) Add H 2 O (10 moles of water per mole of precursor) dropwise into the system.
4)几分钟后,加入一滴HCl作为胶溶剂。4) After a few minutes, add a drop of HCl as a peptizer.
以3000rpm速度在熔凝石英基材上旋转涂布上述的二氧化钛前体溶液60秒。旋转涂布后,将经涂布的基材在105℃加热4分钟,蒸发去溶剂。按此方式沉积四层。然后,将经涂布的基材以5℃/分钟,在700℃焙烧30分钟。所得涂层厚度约为300nm。该涂层在700℃形成锐钛矿相,加热至1000℃为金红石相。The above titania precursor solution was spin-coated on a fused silica substrate at a speed of 3000 rpm for 60 seconds. After spin coating, the coated substrate was heated at 105°C for 4 minutes to evaporate the solvent. Four layers were deposited in this manner. The coated substrate was then fired at 700°C for 30 minutes at 5°C/min. The resulting coating thickness was about 300 nm. The coating forms an anatase phase at 700°C and turns into a rutile phase when heated to 1000°C.
然后,按照上面所述,再在基材上涂布稀土氧化物。在约700℃,在锐钛矿相的扩散阻挡层上形成Pr6O11相。在1000℃加热30分钟,该稀土氧化物相与下层的金红石相相互作用,形成Pr-O-Ti相。X-射衍射试验表明,在1000℃,保持金红石相,未发生其与SiO2的反应。也未观察到形成方英石。The substrate is then coated with a rare earth oxide as described above. At about 700 °C, a Pr6O11 phase forms on the diffusion barrier layer of the anatase phase. Heating at 1000 °C for 30 minutes, the rare earth oxide phase interacts with the underlying rutile phase to form a Pr-O-Ti phase. X-ray diffraction experiments show that at 1000°C, the rutile phase remains and no reaction with SiO2 occurs. Formation of cristobalite was also not observed.
已经结合较好的实施例描述了本发明,对本领域的技术人员来说可以进行各种变动。例如,有具有内电极和还有其它稀土金属填充材料的灯泡中可使用本发明的涂层。各种形状的灯泡都可以使用这种涂层。因此,前面的描述应被认为是仅用于说明,不构成限制,本发明的精神和范围由权利要求书限定。The invention has been described with reference to preferred embodiments, and various changes will occur to those skilled in the art. For example, the coatings of the invention can be used in bulbs having internal electrodes and also other rare earth metal filling materials. Bulbs of all shapes can use this coating. Accordingly, the foregoing description should be considered as illustrative only and not restrictive, with the spirit and scope of the invention being defined by the appended claims.
Claims (16)
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| US10844098P | 1998-11-13 | 1998-11-13 | |
| US60/108,440 | 1998-11-13 | ||
| US13097999P | 1999-04-26 | 1999-04-26 | |
| US60/130,979 | 1999-04-26 |
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| CN102169808A (en) * | 2010-02-26 | 2011-08-31 | 优志旺电机株式会社 | Fluorescent lamp |
| CN119663252A (en) * | 2024-11-18 | 2025-03-21 | 华中科技大学 | A rare earth oxide coating with adjustable components and preparation method thereof |
| US12426506B2 (en) | 2019-07-19 | 2025-09-23 | Evatec Ag | Piezoelectric coating and deposition process |
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| EP1279187B1 (en) | 2000-04-26 | 2004-07-14 | Cornell Research Foundation, Inc. | Lamp utilizing fiber for enhanced starting field |
| US6897615B2 (en) | 2001-11-01 | 2005-05-24 | Axcelis Technologies, Inc. | Plasma process and apparatus |
| KR100459454B1 (en) * | 2002-05-16 | 2004-12-03 | 엘지전자 주식회사 | Pollution control apparatus of plasma lighting system |
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| US5451838A (en) * | 1994-03-03 | 1995-09-19 | Hamamatsu Photonics K.K. | Metal halide lamp |
| DE4418198A1 (en) * | 1994-05-25 | 1995-11-30 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Quartz glass with UV doping |
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1999
- 1999-11-12 KR KR1020017004286A patent/KR20010079994A/en not_active Withdrawn
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| CN102169808A (en) * | 2010-02-26 | 2011-08-31 | 优志旺电机株式会社 | Fluorescent lamp |
| US12426506B2 (en) | 2019-07-19 | 2025-09-23 | Evatec Ag | Piezoelectric coating and deposition process |
| CN119663252A (en) * | 2024-11-18 | 2025-03-21 | 华中科技大学 | A rare earth oxide coating with adjustable components and preparation method thereof |
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| EP1138054A1 (en) | 2001-10-04 |
| AU2149900A (en) | 2000-06-05 |
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| IL142077A0 (en) | 2002-03-10 |
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