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CN1390315A - Beamsplitter device producing parallel output beams - Google Patents

Beamsplitter device producing parallel output beams Download PDF

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Publication number
CN1390315A
CN1390315A CN00815589A CN00815589A CN1390315A CN 1390315 A CN1390315 A CN 1390315A CN 00815589 A CN00815589 A CN 00815589A CN 00815589 A CN00815589 A CN 00815589A CN 1390315 A CN1390315 A CN 1390315A
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China
Prior art keywords
output
input
component
polarized
coating
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Pending
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CN00815589A
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Chinese (zh)
Inventor
B·A·斯科特
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Corning Inc
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Corning Inc
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Publication of CN1390315A publication Critical patent/CN1390315A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/27—Optical coupling means with polarisation selective and adjusting means
    • G02B6/2706—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters
    • G02B6/2713—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters cascade of polarisation selective or adjusting operations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/27—Optical coupling means with polarisation selective and adjusting means
    • G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
    • G02B6/2773—Polarisation splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
    • G02B6/29362—Serial cascade of filters or filtering operations, e.g. for a large number of channels
    • G02B6/29365—Serial cascade of filters or filtering operations, e.g. for a large number of channels in a multireflection configuration, i.e. beam following a zigzag path between filters or filtering operations
    • G02B6/29367—Zigzag path within a transparent optical block, e.g. filter deposited on an etalon, glass plate, wedge acting as a stable spacer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

一种用于将具有多个分量的输入光束分成每个以实质上平行方式传播的多个相应输出光束的分束器装置。在一个实施例中,分束器装置作为偏振分束器装置加以配置,以使通过使用偏振涂层将输入光束分成分离的偏振分量。或者,在另一实施例中,分束器装置作为滤波分束器加以配置,以便通过使用多个波分复用(WDM)涂层将输入光束分成分离的波长分量。分束器装置包括具有实质上平行的第一和第二相反表面的平面透明结构片材或壁。输入面部分接收输入光束,而多个输出面部分则透射输出光束。反射材料内反射片材中的光。

A beam splitter device for splitting an input beam having a plurality of components into a plurality of corresponding output beams each propagating in a substantially parallel manner. In one embodiment, the beam splitter arrangement is configured as a polarizing beam splitter arrangement such that the input beam is split into separate polarization components by using a polarizing coating. Alternatively, in another embodiment, the beam splitter arrangement is configured as a filtering beam splitter to split the input beam into separate wavelength components by using a plurality of wavelength division multiplexing (WDM) coatings. The beam splitter device comprises a planar transparent structural sheet or wall having substantially parallel first and second opposing surfaces. The input facet part receives the input light beam, and the plurality of output facet parts transmits the output light beam. The reflective material internally reflects light in the sheeting.

Description

Produce the beam splitter apparatus of collimated output beam
Related application
The application requires the interests of the U.S. Provisional Application submitted on September 14th, 1999 number 60/153,913, and by being by with reference to all being merged
Background of invention
Invention field
The present invention relates to light control device, especially, relate to the beam splitter apparatus that the input beam that will have a plurality of different components is divided into a plurality of corresponding output beams of propagating with parallel direction in fact.
The description of association area
Beam splitter commonly used in scientific circles and the industry, the input beam that will have a plurality of components is separated into a plurality of output beams.Especially, some beam splitters are divided into the linear polarization output beam with polarized orthogonal axle with the light beam of unpolarized or partial polarization.Other beam splitter apparatus can be divided into corresponding a plurality of monochromatic in fact output beam with multicolour light beam or the broad band light beam with a plurality of wavelength component, or has the output beam of narrower spectral bandwidth.
Yet this beam splitter of two types does not provide the output beam of propagating with the parallel direction of essence.Therefore, if the expectation collimated output beam will use the optional feature that can make one or more output beams change direction so.Because optional feature is to separate assembling with beam splitter apparatus, therefore requires to aim at, this may cause having the output beam of the relatively poor depth of parallelism.
For example, polarization beam splitting cube is usually used in converting unpolarized input beam to point to respectively linear polarization output beam.Especially, typical polarization beam splitting cube comprises a transparent material, and it comprises input face and along first output face of the corresponding outside surface configuration of this cube.This cube also comprises along cube second output face of outside surface configuration so that vertical with first output face.This cube also have along cube the polarizing coating of inner opposite angle face configuration.
Therefore, if input beam enters input face with vertical mode, input beam impacts coating with 45 so.Incident angle with 45 °, polarizing coating is suitable for making p-component (the time variation amount that just is parallel to the electric field intensity of the coating) transmission of input beam by coating so instead, and the s-component time variation amount of the electric field intensity of coating (just perpendicular to) of input beam is coated to be reflected with 45 and make.So configuration first and second output faces make the p-component penetrate from first output face in vertical mode, and the s-component are penetrated from second output face with vertical mode.Therefore, typical polarization beam splitting cube provides p-polarization and the s-polarization of propagating with orthogonal directions.
For parallel polarization output beam is provided, use first and second polarization beam splittings cube usually.Particularly, first cube of p-polarization and s-light beam that is used to provide the quadrature sensing.Assemble discretely second cube with first cube, and be configured in the s-light beam from the path of first cube of outgoing with second cube, first and second cubes polarizing coating plane is parallel to each other in order to do making.So configuration is these two cubes, makes second output face of winning cube be parallel to second cube input face.Therefore, the s-light beam is by the reflection of second cube polarizing coating, thereby makes by the p-light beam of first cube of outgoing and parallel to each other by the s-light beam of second cube of outgoing.
Though the above combination of beam splitting cube provides general parallel output beam, it can not provide highly parallel output beam usually.Especially, the depth of parallelism of output beam is mainly by two cubes relative aligning decision.Owing to cube independently be assemblied in the optical system separately, thus be difficult to will be cube relative to each other accurate aligning.In addition, if in two cubes one amount relatively little with respect to another skew one is for example caused that by the environmental impact such as vibration and temperature variation the depth of parallelism will degenerate to unacceptable inferior grade so.
From above will be understood that, need a kind of improved beam splitter apparatus, it can provide the different output beams with higher level depth of parallelism.The device of the output beam that is separated according to polarization or wavelength especially, need be provided.In addition, also need the response environment influence and the device of the maintenance higher level depth of parallelism.
Summary of the invention
The present invention has satisfied above-mentioned needs, and according to an aspect, the present invention is first and second beam splitter apparatus of collimated output beam in fact that the input beam that will have at least the first and second components is divided into that corresponding space separates.This device comprises transparent component, and this member comprises input face with at least one input face part and the output face with at least two output face parts.Determine the direction of input face part, partly to reflect input beam to first output face, and first output face partly is suitable for the first component transmission that (a) make input beam by the first output face part instead, so that first output beam and (b) second component of reflection input beam are provided.Dispose the second output face part, receiving the second component of input beam, and be suitable for making the second component transmission of input beam by the second output face part, so that second output beam is provided it instead.So determine the direction of surface portion, make that first and second output beams are to be the output of parallel direction in fact.
In one embodiment, first and second components of input beam are first and second polarized components, the relative to each other cross polarization of first and second output beams.In another embodiment, first and second components of input beam are first and second wavelength component, and first and second output beams have narrower spectral bandwidth.
In another aspect of this invention, polarizing beam splitter device comprises a member, and this member comprises the transparent medium with parallel in fact surface, first and second planes.First surface refract light like this, the feasible unpolarized input beam that enters the light of first surface points to second surface.Second surface has the output with a certain material, and the first polarized component transmission that this material (a) makes input beam is by output, so that the first polarization output beam is provided and (b) second polarized component is reflexed to reflecting material on the first surface.Second polarized component of reflecting material reflection input beam is used for by the second surface refraction, so that the second polarization output beam so is provided, makes the first and second polarization output beams propagate with the parallel direction of essence.
In still another aspect of the invention, polarizing beam splitter device comprises a member, and this member comprises first and second plane surfaces that are configured in parallel in fact all, and is configured in the transparent medium between first and second surfaces.This device also comprises along the polarizing coating of first's configuration of second plane surface.This device is suitable for making the unpolarized input beam of the light that enters the first plane surface first to point to polarizing coating so instead.First polarized component of polarizing coating transmission input beam, so that the first polarization output beam is provided, and second polarized component that reflects input beam to the second portion of first plane surface.At the second portion place of first plane surface, second polarized component is to the second portion reflection of second plane surface.Second polarized component of the second portion transmission input beam of second plane surface is so that provide to be parallel to the second polarization output beam that the first polarization output beam direction is propagated in fact.
In still another aspect of the invention, the filtering beam splitter apparatus comprises a member, and this member comprises the transparent medium with parallel in fact surface, first and second planes.First surface refract light like this, the feasible input beam that enters the light of a plurality of wavelength component of having of first surface points to second surface.Second surface has first and second outputs.First output has certain material, and the first wavelength component transmission that this material (a) makes input beam is by first output, so that the first arrowband output beam is provided and (b) second wavelength component is reflexed to reflecting material on the first surface.Reflecting material reflexes to first output with second wavelength component of input beam.The second output transmission, second wavelength component so that the second arrowband output beam so is provided, makes the first and second arrowband output beams propagate with parallel in fact direction.
From above it is evident that, the preferred embodiment of beam splitter apparatus of the present invention can be divided into the input beam with first and second components first and second output beams of propagating with parallel direction in fact.Especially, in one aspect of the invention, the non-polarized light beam that beam splitter apparatus will have first and second polarized components is divided into first and second linear polarized beams with polarized orthogonal axle.In addition, in another aspect of the present invention, the polychrome input beam that beam splitter apparatus will have first and second wavelength component is divided into the corresponding first and second arrowband output beams.From following description in conjunction with the drawings, these and other objects of the present invention and advantage will be more obvious.
Description of drawings
Fig. 1 is the synoptic diagram that shows polarizing beam splitter device one side, and it has illustrated the non-polarized light beam of access to plant and with s-polarization and the p-polarization output beam of the parallel mode of essence from the device outgoing;
Fig. 2 is the synoptic diagram that shows polarization beam apparatus system one side, and it has illustrated first and second non-polarized light beams of access to plant and from first and second pairs of polarization output beams of device outgoing;
Fig. 3 is the synoptic diagram that shows filtering beam splitter apparatus one side, and it has illustrated the multicolour light beam of access to plant and with a plurality of beams of narrow-band light of the parallel mode of essence from the device outgoing;
Fig. 4 is the synoptic diagram of another embodiment one side of filtering beam splitter apparatus in the displayed map 3, it illustrated access to plant multicolour light beam and along first direction from the device outgoing first parallel beams of narrow-band light with along second direction from the device outgoing second batch of parallel beams of narrow-band light.
The detailed description of preferred embodiment
Description is wherein all represented similar part with similar label.As shown in Figure 1, polarizing beam splitter device 30 is divided into unpolarized input beam 32 the first and second polarization output beams of propagating with the essence parallel direction 34,36.Unpolarized input beam 32 is propagated by the external agency 38 such as air, and access to plant 30.Unpolarized input beam 32 generally comprises the combination of two linear polarization component with mutually orthogonal polarization axle.In addition, as will be described in detail, device 30 separates these components substantially, and other place is also referred to as first and second polarized components hereinafter, so that the first and second cross polarization output beams 34,36 are provided.In addition, first output beam 34 with first polarization penetrates from installing 30 along parallel in fact direction with second output beam 36 with second polarization.
As shown in Figure 1, beam splitter apparatus 30 has the input face that comprises an input face part 40 and comprises the output face of at least two output face parts 42,44.These faces are that the transparent material of T forms by a slice thickness, and this material provides the rigidity of structure.Sheet material 46 comprises first and second plane surfaces 48,50 that are configured in parallel in fact corresponding all planes.
The input face part 40 of input beam 32 accesss to plant 30, and in the experience refraction of first index ellipsoid, 52 places, so that first deflecting light beams 60 is provided.Input beam 32 defines the first incident angle θ with respect to the normal of sheet material 46 first surfaces 48 1In addition, first deflecting light beams 60 defines the first refraction angle θ according to following equation with respect to the normal of second surface 50 2:
n outsinθ 1＝n insinθ 2 (1)
N wherein OutBe the refractive index of the external agency 38 of apparatus adjacent 30, n InIt is the refractive index of sheet material 46.
In one embodiment, input face part 40 comprises along first antireflecting coating 62 of the relative thin of first index ellipsoid 52 configuration of first surface 48.The purpose of first antireflecting coating 62 is to strengthen the transmission of input beam 32 by first index ellipsoid 52.
First deflecting light beams 60 is propagated by sheet material 46, and the polarized regions 56 that enters second surface 50, so that define the second incident angle θ with respect to the normal of the second surface 50 of sheet material 46 3Because essence is parallel each other on first and second surfaces 48,50 of sheet material 46, so the second incident angle θ 3Essence equals the first refraction angle θ 2
Output face part 42 comprises along the polarizing coating 64 of polarized regions 56 configurations of second surface 50.Polarizing coating 64 transmissions have the linear polarized beam of first polarization, and this light beam is with the second incident angle θ 3Enter coating.In addition, second linear polarized beam with second polarization of the similar sensing of polarizing coating 64 reflections.In one embodiment, polarizing coating 64 is suitable for transmission p-polarized light instead, and reflection s-polarized light.
Therefore, first polarized component of first deflecting light beams 60 penetrates from installing 30 by the first output face part 42, so that the first polarization output beam 34 with first polarization is provided.Especially, first output beam 34 penetrates from the first output face part 42, so that define the first emergence angle φ according to following equation with respect to the normal of wall 46 second surfaces 50 1:
n insinθ 3＝n outsinφ 1 (2)
In addition, according to equation (1) and (2) and angle θ 3And θ 2Essence equates, the first emergence angle φ 1Equal the first incident angle θ in fact 1
As shown in Figure 1, second polarized component of first deflecting light beams 60 is from polarizing coating 64 reflections, so that first folded light beam 66 with second polarization is provided, it has defined the first reflection angle θ with respect to sheet material second surface normal 4In addition, according to reflection law, the first reflection angle θ 4Equal the second incident angle θ 3
As shown in Figure 1, first folded light beam 66 propagates into the reflectance coating that disposes on the reflector space 54 by sheet material 46, and reflector space 54 is along first surface 48 configurations of sheet material 46.66 definition of first folded light beam are with respect to the 3rd incident angle θ of the normal of wall 46 first surfaces 48 5Because first and second surfaces 48,50 of wall are parallel in fact each other, so the 3rd incident angle θ 5Equal the first reflection angle θ in fact 4
First folded light beam 66 with second polarization reflects away from the reflector space 54 of first surface 48, so that second folded light beam 68 with second polarization is provided, it defines the second reflection angle θ with respect to the normal of sheet material 46 first surfaces 48 6According to reflection law, the second reflection angle θ 6Equal the second incident angle θ 5Second folded light beam 68 propagates into the second output face part 44 by sheet material 46, incides second index ellipsoid 58 of sheet material 46 second surfaces 50 at this place's light beam.Light beam 68 is with respect to second surface 50 definition the 4th incident angle θ of sheet material 46 7Because first and second surfaces 48,50 are parallel in fact each other, so the 4th incident angle θ 7Equal the second reflection angle θ in fact 6Therefore, the 4th incident angle θ 7Equal the first refraction angle θ in fact 2
Second index ellipsoid, the 58 places refraction of second folded light beam 68 contiguous second output face part 44 on second surface 50 is so that provide the second polarization output beam 36 with second polarization.Output beam 36 is from 44 outgoing of the second output face part, so that definition is with respect to the second emergence angle φ of the normal of second surface 50 2Especially, second output beam 36 reflects according to following equation:
n insinθ 6＝n outsinφ 2 (3)
According to equation (1) and (3) and angle θ 6And θ 2Essence equates, the second emergence angle φ 2Equal the first incident angle θ in fact 1So output beam is parallel in fact each other.
In one embodiment, polarizing coating 64 is suitable for transmission p-polarized light instead, and it has the polarization axle that is parallel to coating 64 planes.In addition, coating 64 is suitable for reflecting the s-polarized light instead, and it has the polarization axle perpendicular to coating 64 planes.In this embodiment, first output beam 34 is p-polarizations, and second output beam 36 is s-polarizations.
In one embodiment, along the known reflectance coating 70 of reflector space 54 configurations of sheet material 46 first surfaces 48, so that high relatively reflectivity is provided.Therefore, most of energy of first folded light beam 66 all is reflected in second folded light beam 68.In addition, in one embodiment, along second index ellipsoid, 58 configurations, second antireflecting coating 72 of second surface 50.The purpose of antireflecting coating 72 is inhibitory reflexs and strengthens the transmission at second index ellipsoid, 58 places.
In one embodiment, sheet material 46 comprises rigidity and glass in fact, and as the BK7 that German company SchottGlass makes, its refractive index is about 1.5.Especially, so form sheet material 46, make that the parallel error on first and second surfaces 48,50 is 0.5 " in.As a result, output beam 34,36 parallel error each other is 0.75 " in.In addition because wall 46 is rigidity in fact, so the height of output beam 34,36 parallel can not be subjected to basically external vibration on influence.
Therefore, will be understood that with this area in the polarizing beam splitter device known relatively, polarizing beam splitter device 30 provides a plurality of advantages.Especially, because the depth of parallelism of output beam 34,36 is mainly determined by the depth of parallelism on first and second surfaces 48,50 of sheet material 46, and because the depth of parallelism of prior-art devices is definite by the aligning that separates between the built-up member, so 30 output beams 34,36 that can provide the depth of parallelism to be better than prior-art devices in fact are provided.In addition, device 30 need not complicated alignment procedures and just can realize this depth of parallelism.Moreover, because the geometry of device is not subjected to the influence of external action in fact, always provides and have the output beam 34,36 of parallel direction in fact so install 30.In addition, device 30 is two-way, makes it can be used for producing a plurality of output beams from an input beam, and also can be used for a plurality of input beams are combined into an output beam.
In one embodiment, adopt polarizing beam splitter device 30 that polarization converter assembly 31 is provided, it converts unpolarized in fact light to quite high efficient the polarized light of first polarization.Especially, assembly 31 comprises device 30, and the polarization axle whirligig, as 1/2 ripple retardation plate 74.More particularly, plate 74 is arranged in the path of one of output beam 34,36, so that aim at the polarization axle of output beam 34,36.
For example, as shown in Figure 1, in one embodiment, plate 74 is arranged in the path of second output beam 36.Plate 74 revolves the polarization axle of second output beam 36 and turn 90 degrees, and does not change the direction of propagation of second output beam 36 in fact.Therefore, plate 74 provides second output beam 34 with first polarization.Like this, the device 30 that has a plate 74 can convert nonpolarized light to the light with first polarization with 100% efficient in fact.Yet, in another embodiment, will be understood that plate 74 can be arranged in the path of first output beam 36, so that provide both all to have the output beam of second polarization.
Like this, will be understood that polarization converter assembly 31 converts nonpolarized light to a pair of linear polarized beam with identical in fact polarization.In addition, the output beam 34,36 that provides of assembly 31 has and is about 1.5 " quite little non-parallel deviation." polarizing beam splitter device 30 of non-parallel deviation makes this depth of parallelism become possibility only to produce 0.75.In addition, because plate 74 departs from the certain amount of incident direction of output beam, this amount depends on the depth of parallelism between the outside surface of plate, so the non-parallel deviation of 74 pairs of output beams of plate 34,36 only provides 0.75 ".
Refer now to Fig. 2, it has shown polarization beam apparatus system 80 according to a further aspect of the invention.Especially, system 80 is made of first and second polarizing beam splitter devices 82,84 that normal transparent sheet material 86 forms for this reason, makes beam splitter apparatus 82,84 forever aim at each other.In other respects, device 82,84 and the device of Fig. 1 structurally with function on all identical.
Therefore, as shown in Figure 2, the first unpolarized input beam 88 that enters system's 80 first input face parts 89 is separated by system 80, the feasible first output face part, 91 ejaculations, and the feasible second output face part, 98 ejaculations with second output beam 92 of second polarization from system 80 with first polarization output beam 90 of first polarization from system 80.First and second output beams 90,92 are propagated with parallel in fact direction, and this direction is aimed at the direction of first input beam 89 in fact.The second unpolarized input beam 94 that enters system's 80 second input face parts 95 is simultaneously separated by system 80, feasible the 3rd output face part 97 ejaculations with second output beam 96 of first polarization from system 80, and make the 4th output beam 98 penetrate from the 4th output face part 99 of system.Third and fourth output beam 96,98 is propagated with parallel in fact direction, and this direction is aimed at the direction of second input beam 94 in fact.
Like this, will be understood that polarization beam apparatus system 80 provides a plurality of advantages.Especially, system 80 can be divided into the input beam of two separation two groups of corresponding a plurality of output beams.Moreover first group of a plurality of output beam is parallel to first input beam in fact, and second group of a plurality of output beam is parallel to second input beam in fact, even input beam is also not parallel each other.
Refer now to Fig. 3, it has shown filtering beam splitter apparatus 100 according to a further aspect of the invention.The device 100 of Fig. 3 receives the input beam 102 with a plurality of wavelength component.Device 100 provides a plurality of spectral bandwidths in fact than the corresponding output beam 108 of the combination spectrum narrow bandwidth of input beam 102, makes output beam penetrate from installing 100 in parallel in fact mode.In one embodiment, output beam 108 is monochromatic in fact, and each output beam 108 has different wavelength.
As shown in Figure 3, filtering beam splitter apparatus 100 is similar to the polarizing beam splitter device 30 of Fig. 1.Especially, device 100 comprises the similar transparent configuration sheet material 106 with first and second parallel surfaces 108,110.First surface 108 comprises input face part 120, and it has the reflector space 114 that is used to receive first index ellipsoid 112 of input beam 102 and is suitable for internal reflection input beam 102 instead.Yet, replacing installing 30 the polarized regions 56 and second index ellipsoid 58 among Fig. 1, the second surface 110 of device 100 has a plurality of filter field 116, makes it be suitable for providing a plurality of output face parts 124 of penetrating by installing 100 with penetrating.In addition, zone 116 so provides the band resistance reflection of input beam 102, makes input beam 102 carry out internal reflection in sheet material.
As shown in Figure 3, in one embodiment, along second surface 110 configuration a plurality of known wavelength division multiplexers (WDM) coatings 118 of wall 106, so that a plurality of filter field 116 and output face part 124 are provided.Especially, make each coating 118 be suitable for receiving and have the wide relatively light beam of spectral range, and the centre of homology near specific wavelength in fact than the frequency of close limit.In addition, device a plurality of output face parts 124 of 100 outside surface that is WDM coatings 118.Moreover each WDM coating 118 is suitable for reflecting not by the light of transmission instead.
In one embodiment, WDM coating 118 comprises the first coating 118a, the second coating 118b and the 3rd coating 118c, and they are positioned on the second surface 110 continuously.In addition, coating 118a, 118b and 118c are suitable for the centre of homology instead and lay respectively at λ 1, λ 2And λ 3Near wavelength than close limit.
Has wavelength component λ 1, λ 2And λ 3The input face 120 of input beam 102 indicator devices 100 so that definition is with respect to the incident angle θ of the normal of first surface 108.In case enter input face part 120, input beam 102 just is refracted, so that first deflecting light beams of propagating to a WDM coating 118a 122 is provided.In case impacted a WDM coating 118a, had wavelength X 1Input beam 102 component transmissions by a WDM coating 118a be λ so that wavelength is provided 1The arrowband first output beam 104a, its definition equals the first emergence angle φ of incident angle θ in fact 1
As shown in Figure 3, a WDM coating 118a partial reflection first deflecting light beams 122 has wavelength component λ so that provide 2And λ 3First folded light beam 126.Especially, first folded light beam 126 is propagated by wall 106, and by reflector space 114 reflections of first surface 108, has wavelength component λ so that provide 2And λ 3Second folded light beam 128.Then, second folded light beam 128 is pointed to the 2nd WDM coating 118, is λ so that wavelength is provided 2The arrowband second output beam 104b, its definition equals the emergence angle φ of incident angle θ in fact 2
The 2nd WDM coating 118b partial reflection second folded light beam 128 has wavelength component λ so that provide 3The 3rd folded light beam 132.Especially, the 3rd folded light beam 132 is propagated by sheet material 106, and by reflector space 114 reflections of first surface 108, has wavelength component λ so that provide 3The 4th folded light beam 134.Then, the 4th folded light beam 134 is pointed to the 3rd WDM coating 118c, is λ so that wavelength is provided 3Arrowband the 3rd output beam 104c, its definition equals the 3rd emergence angle φ of incident angle θ in fact 3
Therefore, WDM coating 118 can make input beam 102 be separated according to wavelength.In addition, provide filter field 116, and, just derived in parallel in fact mode through the output beam 104 of filtering by first surface 108 cremasteric reflex zones 114 along sheet material 106 by second surface 110 along sheet material 106.
Refer now to Fig. 4, it has shown another embodiment of filtering beam splitter apparatus 100, and this device receives the multicolour light beam 140 with first and second groups of a plurality of wavelength component.The device 100 a plurality of arrowbands output beams 142 that provide corresponding to 140 first groups of a plurality of wavelength component of input beam, output beam 142 penetrates from installing 100 with first direction.The device 100 second group of a plurality of arrowbands output beam 144 that provides corresponding to 140 second groups of a plurality of wavelength component of input beam, output beam 144 penetrates from installing 100 with second direction.
In this embodiment, device 100 comprises the sheet material 106 with first and second parallel surfaces 108,110.In addition, first surface 108 forms the input face part 120 of contiguous index ellipsoid 112, makes it be suitable for receiving input beam 140.Moreover, along a plurality of WDM coatings 118 of second surface 110 configurations,, and provide the device 100 of a plurality of output face parts 124 in the mode of Fig. 3 with contiguous second surface 110 so that the second surface 110 with a plurality of filter field 116 is provided.
Yet in this embodiment, the reflector space 114 of first surface 108 is replaced by second group of a plurality of filter field 146 among Fig. 3 embodiment.Especially, along second group of a plurality of WDM coating 148 of first surface 108 configurations, so that second group of a plurality of output face part 150 of second filter field 146 and adjacent domain 146 is provided.Therefore, second group of a plurality of output beam 144 penetrates from second output face 150 along parallel in fact direction.Because along first surface 108 configurations second output face 150, so second output beam 144 penetrates from installing 100 along the direction that is different from first output beam 142.
Though preferred embodiment of the present invention shows, describes and pointed out to be applied to the of the present invention basic novel feature of this embodiment, but will be appreciated that, do not break away from spirit of the present invention, the person skilled in the art can carry out various omissions, substitute and change the form of shown device details.Therefore, scope of the present invention is not limited to above description, and should be limited by appended claim.

Claims (23)

1.一种分束器装置，它用于将具有至少第一和第二分量的输入光束分成相应的空间分离的第一和第二实质上平行的输出光束，其特征在于，该装置包括：1. A beam splitter device for splitting an input beam having at least first and second components into corresponding spatially separated first and second substantially parallel output beams, the device comprising: 透明构件，包括具有至少一个输入面部分的输入面和具有至少两个输出面部分的输出面，确定所述输入面部分的方向，以向第一输出面部分折射所述输入光束，使所述第一输出面部分适于(a)透射输入光束的第一分量通过第一输出面部分，以提供第一输出光束，和(b)反射输入光束的所述第二分量；配置所述第二输出面部分，以接收输入光束的第二分量，使所述第二输出面部分适于透射输入光束的第二分量通过第二输出面部分，以提供第二输出光束，为此确定所述各个面部分的方向，使得第一和第二输出光束以实质上平行的方向加以输出。a transparent member comprising an input face having at least one input face portion and an output face having at least two output face portions, orienting the input face portion to refract the input beam toward a first output face portion such that the The first output face portion is adapted to (a) transmit a first component of an input beam through the first output face portion to provide a first output beam, and (b) reflect said second component of an input beam; configuring said second an output face portion to receive a second component of the input beam, said second output face portion being adapted to transmit the second component of the input beam through the second output face portion to provide a second output beam, for which purpose said respective The surface portion is oriented such that the first and second output beams are output in substantially parallel directions. 2.如权利要求1所述的装置，其特征在于，所述各个面部分在平行的平面中加以取向。2. The device of claim 1, wherein the face portions are oriented in parallel planes. 3.如权利要求2所述的装置，其特征在于，还包括在一平面中配置的第一涂层，该平面实质上平行于第一输出面部分的平面，所述第一涂层透射输入光束的第一分量，所述第一涂层反射输入光束的第二分量。3. The device of claim 2, further comprising a first coating disposed in a plane substantially parallel to the plane of the first output face portion, the first coating transmitting the input a first component of the beam of light, and the first coating reflects a second component of the input beam of light. 4.如权利要求3所述的装置，其特征在于，在第一输出面部分的平面中实质配置第一涂层。4. The device of claim 3, wherein the first coating is disposed substantially in the plane of the first output face portion. 5.如权利要求2所述的装置，其特征在于，透明构件还包括在一平面中配置的反射部分，该平面实质上平行于输入面部分的平面，所述反射部分向第二输出面部分反射输入光束的第二分量。5. The device of claim 2, wherein the transparent member further comprises a reflective portion disposed in a plane substantially parallel to the plane of the input face portion, the reflective portion facing toward the second output face portion A second component of the input beam is reflected. 6.如权利要求5所述的装置，其特征在于，反射部分包括在输入面部分的平面中实质配置的反射涂层。6. The apparatus of claim 5, wherein the reflective portion comprises a reflective coating disposed substantially in the plane of the input face portion. 7.如权利要求2所述的装置，其特征在于，还包括邻近第二输出面部分配置的抗反射涂层，所述抗反射涂层增强输入光束第二分量通过第二输出面部分的透射。7. The apparatus of claim 2, further comprising an anti-reflection coating disposed adjacent to the second output face portion, the anti-reflection coating enhancing transmission of the second component of the input light beam through the second output face portion . 8.如权利要求7所述的装置，其特征在于，还包括邻近输入面部分配置的第二抗反射涂层，所述第二抗反射涂层增强输入光束通过输入面部分的透射。8. The apparatus of claim 7, further comprising a second anti-reflective coating disposed adjacent to the input face portion, the second anti-reflective coating enhancing transmission of the input light beam through the input face portion. 9.如权利要求1所述的装置，其特征在于，输入光束的第一和第二分量是第一和第二偏振分量，并且第一和第二输出光束相对于彼此正交偏振。9. The apparatus of claim 1, wherein the first and second components of the input beam are first and second polarization components, and wherein the first and second output beams are orthogonally polarized with respect to each other. 10.如权利要求9所述的装置，其特征在于，第一输出光束是p-偏振，第二输出光束是s-偏振。10. The apparatus of claim 9, wherein the first output beam is p-polarized and the second output beam is s-polarized. 11.如权利要求1所述的装置，其特征在于，输入光束的第一和第二分量是第一和第二波长分量，第一和第二输出光束具有较窄的光谱带宽。11. The apparatus of claim 1, wherein the first and second components of the input beam are first and second wavelength components, and the first and second output beams have narrower spectral bandwidths. 12.一种偏振分束器装置，其特征在于，它包括：12. A polarizing beam splitter device, characterized in that it comprises: 结构构件，包括具有第一和第二平面实质上平行之表面的透明介质，所述第一表面如此折射光，使得进入第一表面的非偏振输入光束指向第二表面，具有输出部分的所述第二表面带有材料，它(a)使输入光束的第一偏振分量透射通过输出部分，以提供第一偏振输出光束，和(b)将第二偏振分量反射到第一表面上的反射材料，所述反射材料反射输入光束的第二偏振分量，使之通过第二表面折射，以提供第二偏振输出光束，所述第一和第二偏振输出光束以实质上平行的方向传播。Structural member comprising a transparent medium having first and second planar substantially parallel surfaces, the first surface refracting light such that an unpolarized input beam entering the first surface is directed toward the second surface, having an output portion of the The second surface has a material that (a) transmits a first polarized component of the input beam through the output portion to provide a first polarized output beam, and (b) reflects a reflective material that reflects the second polarized component onto the first surface , the reflective material reflects a second polarized component of the input beam refracted by the second surface to provide a second polarized output beam, the first and second polarized output beams propagating in substantially parallel directions. 13.如权利要求9所述的装置，其特征在于，第二表面输出部分的材料是邻近结构构件第二表面实质配置的偏振涂层。13. The device of claim 9, wherein the material of the output portion of the second surface is a polarizing coating disposed substantially adjacent the second surface of the structural member. 14.如权利要求10所述的装置，其特征在于，第一表面上的反射材料是反射涂层。14. The device of claim 10, wherein the reflective material on the first surface is a reflective coating. 15.如权利要求11所述的装置，其特征在于，还包括分别配置在结构构件第一和第二表面上的第一和第二抗反射涂层，所述第一抗反射涂层增强输入光束通过第一表面的透射，所述第二抗反射涂层增强第二偏振输出光束的透射。15. The apparatus of claim 11, further comprising first and second antireflective coatings respectively disposed on the first and second surfaces of the structural member, the first antireflective coating enhancing input Transmission of the light beam through the first surface, the second anti-reflection coating enhances transmission of the second polarized output light beam. 16.一种偏振分束器装置，其特征在于，它包括：16. A polarizing beam splitter device, characterized in that it comprises: 结构构件，包括配置在实质上平行平面中的第一和第二平面表面以及配置在第一和第二表面之间的透明介质；a structural member comprising first and second planar surfaces disposed in substantially parallel planes and a transparent medium disposed between the first and second surfaces; 沿第二平面表面第一部分配置的偏振涂层，所述装置改成适于使进入第一平面表面之第一部分的非偏振输入光束指向偏振涂层，所述偏振涂层透射输入光束的第一偏振分量，以使提供第一偏振输出光束，所述偏振涂层向第一平面表面第二部分反射输入光束的第二偏振分量，在第一平面表面的第二部分处所述第二偏振分量向第二平面表面的第二部分反射，第二平面表面的所述第二部分透射输入光束的第二偏振分量，以便提供以实质上平行于第一偏振输出光束方向传播的第二偏振输出光束。a polarizing coating disposed along the first portion of the second planar surface, the means adapted to direct an unpolarized input beam entering the first portion of the first planar surface towards the polarizing coating, the polarizing coating transmitting a first portion of the input beam polarized components such that a first polarized output beam is provided, the polarizing coating reflects a second polarized component of the input beam towards a second portion of the first planar surface where the second polarized component reflecting towards a second portion of the second planar surface which transmits the second polarized component of the input beam to provide a second polarized output beam propagating in a direction substantially parallel to the first polarized output beam . 17.如权利要求16所述的装置，其特征在于，还包括沿第一平面表面的第二部分配置的反射涂层。17. The device of claim 16, further comprising a reflective coating disposed along the second portion of the first planar surface. 18.如权利要求17所述的装置，其特征在于，还包括沿第一平面表面的第一部分配置的第一抗反射涂层。18. The apparatus of claim 17, further comprising a first anti-reflective coating disposed along the first portion of the first planar surface. 19.如权利要求18所述的装置，其特征在于，还包括沿第一平面表面的第二部分配置的第二抗反射涂层。19. The device of claim 18, further comprising a second anti-reflective coating disposed along the second portion of the first planar surface. 20.一种滤波分束器装置，其特征在于，它包括：20. A filtering beam splitter device, characterized in that it comprises: 结构构件，包括具有第一和第二平面实质上平行之表面的透明介质，所述第一表面如此折射光，使得进入第一表面的具有多个波长分量的输入光束指向第二表面，所述第二表面具有第一和第二输出部分，所述第一输出部分具有材料，它(a)使输入光束的第一波长分量透射通过第一输出部分，以便提供第一窄带输出光束，和(b)将第二波长分量反射到第一表面上的反射材料，所述反射材料向第二输出部分反射输入光束的第二波长分量，所述第二输出部分透射第二波长分量，以便提供第二窄带输出光束，所述第一和第二窄带输出光束以实质上平行的方向传播。A structural member comprising a transparent medium having first and second planar substantially parallel surfaces, said first surface refracting light such that an input light beam having a plurality of wavelength components entering the first surface is directed toward the second surface, said The second surface has first and second output portions, the first output portion having a material that (a) transmits a first wavelength component of the input beam through the first output portion to provide a first narrowband output beam, and ( b) reflecting the second wavelength component onto a reflective material on the first surface, the reflective material reflecting the second wavelength component of the input light beam towards a second output portion which transmits the second wavelength component so as to provide the first Two narrowband output beams, said first and second narrowband output beams propagating in substantially parallel directions. 21.如权利要求20所述的装置，其特征在于，第一输出部分的材料将第三波长分量反射到第一表面上的反射材料，所述反射材料向第二输出部分反射第三波长分量，所述第二输出部分具有材料，它(a)使输入光束的第二波长分量透射通过第二输出部分，以便提供第二窄带输出光束，和(b)将第三波长分量反射到第一表面的反射材料，所述反射材料反射第三波长分量，通过第二表面折射，以便提供第三窄带输出光束，所述诸窄带输出光束以实质上平行的方向传播。21. The device of claim 20, wherein the material of the first output portion reflects the third wavelength component to reflective material on the first surface, the reflective material reflecting the third wavelength component toward the second output portion , the second output portion has a material that (a) transmits the second wavelength component of the input beam through the second output portion to provide a second narrowband output beam, and (b) reflects the third wavelength component to the first A reflective material of the surface that reflects the third wavelength component is refracted by the second surface to provide a third narrowband output beam, the narrowband output beams propagating in substantially parallel directions. 22.如权利要求21所述的装置，其特征在于，输出部分的材料包括多个波分复用器涂层。22. The apparatus of claim 21, wherein the material of the output portion comprises a plurality of wavelength division multiplexer coatings. 23.如权利要求22所述的装置，其特征在于，第一表面上的反射材料包括第二组多个波分复用器涂层，所述第二组多个涂层透射输入光束的第四和第五波长分量，以便提供以实质上平行方向传播的第四和第五窄带输出光束。23. The apparatus of claim 22, wherein the reflective material on the first surface comprises a second plurality of wavelength division multiplexer coatings, the second plurality of coatings transmitting the first of the input beams. fourth and fifth wavelength components to provide fourth and fifth narrowband output beams propagating in substantially parallel directions.
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