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CN1218163C - 传感器 - Google Patents

传感器 Download PDF

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Publication number
CN1218163C
CN1218163C CN011217057A CN01121705A CN1218163C CN 1218163 C CN1218163 C CN 1218163C CN 011217057 A CN011217057 A CN 011217057A CN 01121705 A CN01121705 A CN 01121705A CN 1218163 C CN1218163 C CN 1218163C
Authority
CN
China
Prior art keywords
sensor
sensing element
resonance frequency
detect
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN011217057A
Other languages
English (en)
Chinese (zh)
Other versions
CN1329243A (zh
Inventor
T·克维斯特雷
J·亨里克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensonor AS
Original Assignee
SENSANNOL CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SENSANNOL CO Ltd filed Critical SENSANNOL CO Ltd
Publication of CN1329243A publication Critical patent/CN1329243A/zh
Application granted granted Critical
Publication of CN1218163C publication Critical patent/CN1218163C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN011217057A 2000-06-16 2001-06-18 传感器 Expired - Fee Related CN1218163C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00305111A EP1164378B1 (en) 2000-06-16 2000-06-16 Acceleration Sensor
EP00305111.7 2000-06-16

Publications (2)

Publication Number Publication Date
CN1329243A CN1329243A (zh) 2002-01-02
CN1218163C true CN1218163C (zh) 2005-09-07

Family

ID=8173067

Family Applications (1)

Application Number Title Priority Date Filing Date
CN011217057A Expired - Fee Related CN1218163C (zh) 2000-06-16 2001-06-18 传感器

Country Status (6)

Country Link
US (1) US6576968B2 (ko)
EP (1) EP1164378B1 (ko)
JP (1) JP2002062311A (ko)
KR (1) KR20020005417A (ko)
CN (1) CN1218163C (ko)
BR (1) BR0102382A (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100695294B1 (ko) * 2003-06-25 2007-03-14 정지융 좌변기용 위생커버 및 이의 공급장치
DE102004030380B4 (de) * 2004-06-23 2010-07-29 Eads Deutschland Gmbh Mikromechanischer Drucksensor und Verfahren zum Selbsttest eines solchen
US8184389B2 (en) * 2006-04-14 2012-05-22 Seagate Technology Llc Sensor resonant frequency identification and filter tuning
DE102006032911A1 (de) * 2006-07-15 2008-01-24 Conti Temic Microelectronic Gmbh Verfahren zur Bewertung der mechanischen Befestigung eines Sensors in einem Fahrzeug
FR2919067B1 (fr) * 2007-07-19 2009-08-28 Sagem Defense Securite Procede de mesure d'une acceleration au moyen d'un accelerometre vibrant piezo-electrique et dispositif de mesure correspondant
CA2806486C (en) * 2011-02-07 2017-03-21 The Governors Of The University Of Alberta Piezoresistive load sensor
US10051095B2 (en) * 2011-02-22 2018-08-14 Apple Inc. Low Z linear vibrator
CN105222932B (zh) * 2015-09-11 2017-10-13 东南大学 一种高灵敏度压阻式压力传感器及其制备方法
CN106771366B (zh) * 2016-12-29 2023-07-14 中国工程物理研究院电子工程研究所 一种mems加速度计健康状态监测装置及监测方法
JP6616550B2 (ja) * 2017-02-21 2019-12-04 日立オートモティブシステムズ株式会社 センサ装置
CN106946211A (zh) * 2017-04-28 2017-07-14 华南理工大学 一种梁膜机构的微机电系统压力传感器芯片及其制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4598381A (en) * 1983-03-24 1986-07-01 Rosemount Inc. Pressure compensated differential pressure sensor and method
US4765188A (en) * 1986-11-24 1988-08-23 Bourns Instruments, Inc. Pressure transducer with integral digital temperature compensation
US5060526A (en) * 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element
EP0419021A3 (en) * 1989-08-30 1991-10-09 Schlumberger Industries Limited Sensors with vibrating elements
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
US5461918A (en) * 1993-04-26 1995-10-31 Ford Motor Company Vibrating beam accelerometer
US5458000A (en) * 1993-07-20 1995-10-17 Honeywell Inc. Static pressure compensation of resonant integrated microbeam sensors
US5417115A (en) * 1993-07-23 1995-05-23 Honeywell Inc. Dielectrically isolated resonant microsensors
US5447073A (en) * 1994-02-04 1995-09-05 The Foxboro Company Multimeasurement replaceable vortex sensor
US5834646A (en) * 1995-04-12 1998-11-10 Sensonor Asa Force sensor device
DE19845185B4 (de) * 1998-10-01 2005-05-04 Eads Deutschland Gmbh Sensor mit Resonanzstruktur sowie Vorrichtung und Verfahren zum Selbsttest eines derartigen Sensors

Also Published As

Publication number Publication date
EP1164378B1 (en) 2012-03-14
EP1164378A1 (en) 2001-12-19
US20020011637A1 (en) 2002-01-31
US6576968B2 (en) 2003-06-10
JP2002062311A (ja) 2002-02-28
CN1329243A (zh) 2002-01-02
KR20020005417A (ko) 2002-01-17
BR0102382A (pt) 2002-02-19

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: INFINEON TECHNOLOGIES SEN SUO NUO ER CO., LTD.

Free format text: FORMER NAME OR ADDRESS: SUNSONGNOR LTD.

CP03 Change of name, title or address

Address after: Norway Horten

Patentee after: Sensonor AS

Address before: Norway Horton

Patentee before: Sensannol Co., Ltd.

C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20050907

Termination date: 20100618