CN121018628A - A two-finger robotic arm and its control method, a wafer transfer robot - Google Patents

Abstract

The invention discloses a double-finger mechanical arm, a control method thereof and a wafer transmission robot, which are used for supporting the flexible storage/taking of two wafers each time. The double-finger mechanical arm comprises a double-shaft concentric driver, a large arm unit, a small arm unit and an end effector, wherein two fingers which are arranged in opposite directions are arranged on the end effector, the large arm unit comprises a large arm support and a large arm belt wheel mechanism, the small arm unit comprises a small arm support and a small arm belt wheel mechanism, the driven end of the large arm belt wheel mechanism is connected with a first protruding shaft arranged at the first end of the large arm support in a shaft mode, the inner driving shaft and the outer driving shaft of the double-shaft concentric driver are respectively connected with the driving end of the large arm belt wheel mechanism and the second end of the large arm support, the first end of the small arm support is connected with the driven end of the large arm belt wheel mechanism, the elbow end of the small arm belt wheel mechanism is connected with the first protruding shaft, one end of the driving end of the small arm belt wheel mechanism is connected with a second protruding shaft arranged at the second end of the small arm support, and the other end of the small arm belt wheel mechanism is connected with the shaft center of the end effector.

Description

Double-finger mechanical arm, control method thereof and wafer transmission robot

Technical Field

The present invention relates to a wafer transfer device, and more particularly, to a robot arm with an end effector having a double-end finger structure, a control method thereof, and a wafer transfer robot.

Background

In the chip processing industry, the transfer and the transportation of wafers are commonly realized by a high-precision mechanical arm. One of the wafer transfer robots is in the form of a humanoid mechanical arm, and mainly comprises a large arm, a small arm and fingers. The robot mainly simulates arm movement of a person to finish the picking and placing actions of the wafer, namely, the rotation of the whole arm is realized by the rotation of the large arm joint, the rotation of the small arm is finished by the rotation of the small arm joint, and the rotation of the finger joint drives the rotation of the finger. The mechanical arm of the type is flexible in movement and small in volume, and is suitable for completing the transmission work of wafers in a small chamber.

At present, the tail end of the existing humanoid mechanical arm is generally provided with only one finger, so that the mechanical arm can only store/take one wafer each time when being stretched, and the transfer efficiency of the mechanical arm is limited.

Disclosure of Invention

Therefore, the main objective of the present invention is to provide a two-finger robot arm, a control method thereof, and a wafer transfer robot for supporting the storage/retrieval of two wafers at a time.

In order to achieve the aim, according to one aspect of the invention, a double-finger mechanical arm is provided, which comprises a double-shaft concentric driver, a large arm unit, a small arm unit and an end effector, wherein two fingers which are arranged in opposite directions are arranged on the end effector, the large arm unit comprises a large arm frame and a large arm belt wheel mechanism, the small arm unit comprises a small arm frame and a small arm belt wheel mechanism, the driven end of the large arm belt wheel mechanism is in shaft connection with a first protruding shaft arranged at the first end of the large arm frame, the inner driving shaft and the outer driving shaft of the double-shaft concentric driver are respectively connected with the driving end of the large arm belt wheel mechanism and the second end of the large arm frame, the first end of the small arm frame is connected with the driven end of the large arm belt wheel mechanism, the elbow end of the small arm belt wheel mechanism is connected with the first protruding shaft, one end of the driving end of the small arm belt wheel mechanism is in shaft connection with a second protruding shaft arranged at the second end of the small arm frame, and the other end of the driving end of the small arm belt wheel mechanism is connected with the shaft center of the end effector.

In a possible preferred embodiment, the large arm belt wheel mechanism comprises a large arm fixed wheel, a small arm rotating wheel, a first traction belt and a second traction belt, wherein the upper layer and the lower layer of the wheel bodies of the large arm fixed wheel and the small arm rotating wheel are respectively provided with a fixed groove communicated with the wheel surface tangentially so that the first traction belt and the second traction belt are inserted and fixed, and the two sides of the large arm fixed wheel and the small arm rotating wheel are wound and pulled by the same layer belt wheels respectively.

In a possible preferred embodiment, the double-finger mechanical arm further comprises a tensioning assembly, wherein the tensioning assembly comprises a belt head piece, a tensioning head and an adjusting bolt, at least any one of the big arm fixed wheel and the small arm rotating wheel is provided with a tensioning groove communicated with the fixed groove, the tensioning assembly is arranged in the tensioning groove, one end of any one of the first traction belt and the second traction belt corresponding to the tensioning groove is connected with the belt head piece, the belt head piece is in fit connection with the tensioning head, the joint surfaces of the belt head piece and the tensioning head piece are in a slope shape, and the adjusting bolt is inserted into the tensioning head to be in fit connection with an adjusting screw hole in the tensioning groove to adjust the longitudinal displacement of the tensioning head to extrude the belt head piece to form transverse tensioning displacement.

In a possible preferred embodiment, the large arm fixed wheel comprises a first wheel body, a first bearing, a first flange and a first pressing plate, wherein a pipe shaft is arranged at the first end of the large arm support, the first wheel body is connected with the pipe shaft through the first bearing in an axial mode, the first bearing is sleeved and covered with the pipe shaft through the first pressing plate, the first flange is connected with the first wheel body, and an inner driving shaft of the double-shaft concentric driver is connected with the first flange through the pipe shaft.

In a possible preferred embodiment, the small arm rotating wheel comprises a second wheel body, a second pressing plate and a second bearing, wherein an elbow hole is formed in the second pressing plate, the second wheel body is in shaft connection with the first protruding shaft through a second bearing, the second pressing plate is connected with the second wheel body, the second bearing is pressed, and the elbow end of the small arm belt wheel mechanism penetrates through the elbow hole to be in coaxial connection with the first protruding shaft, and meanwhile the second bearing is limited.

In a possible preferred embodiment, the forearm belt wheel mechanism comprises an elbow wheel, a finger rotating wheel, a third traction belt and a fourth traction belt, wherein the elbow wheel and the finger rotating wheel are different in diameter and size and have a preset transmission ratio, the upper layer and the lower layer of the wheel body of the elbow wheel and the finger rotating wheel are respectively provided with a fixed groove communicated with the wheel surface tangentially so that the third traction belt and the fourth traction belt can be inserted and fixed, rotate along with the small arm support, wind and drag the same layer of belt wheels on the two sides of the elbow wheel and the finger rotating wheel respectively, and drive each finger on the end effector to rotate and alternate at a wafer access position.

In a possible preferred embodiment, the double-finger mechanical arm further comprises a tensioning assembly, wherein the tensioning assembly comprises a belt head piece, a tensioning head and an adjusting bolt, at least any one of the elbow wheel and the finger rotating wheel is provided with a tensioning groove communicated with the fixed groove, the tensioning assembly is arranged in the tensioning groove, one end of any one of the third traction belt and the fourth traction belt corresponding to the tensioning groove is connected with the belt head piece, the belt head piece is in fit connection with the tensioning head, the joint surfaces of the belt head piece and the tensioning head piece are in slope shape, and the adjusting bolt is inserted into the tensioning head to be in fit connection with an adjusting screw hole in the tensioning groove to adjust the longitudinal displacement of the tensioning head to squeeze the belt head piece to form transverse tensioning displacement.

In a possible preferred embodiment, the finger rotating wheel comprises a third wheel body, an inner pressing plate, an outer pressing plate and a third bearing, wherein the outer pressing plate is annular, the third wheel body is connected with the second convex shaft in a shaft mode through the third bearing, the outer pressing plate is connected with the third wheel body, the third bearing is pressed, and the inner pressing plate penetrates through an inner annular hole of the outer pressing plate to be connected with the second convex shaft and limit the third bearing.

In order to achieve the above object, according to another aspect of the present invention, there is also provided a control method of a two-finger mechanical arm, including the steps of:

And starting an outer driving shaft and an inner driving shaft of the double-shaft concentric driver, respectively controlling the large arm support to rotate to an arm telescopic position, and driving the driven end of the large arm belt wheel mechanism to drive the small arm support to rotate by a preset angle, synchronously promoting the second protruding shaft to revolve relative to the elbow end of the small arm belt wheel mechanism while completing the arm telescopic movement until the driving end of the small arm belt wheel mechanism is reversely linked to drive each finger on the end effector to rotate alternately at the wafer access position.

In order to achieve the above object, corresponding to the above mechanical arm, according to another aspect of the present invention, there is also provided a wafer transfer robot including the two-finger mechanical arm as described in any one of the above.

According to the double-finger mechanical arm, the control method thereof and the wafer transmission robot, the transmission structure of the large arm unit and the small arm unit is skillfully designed to support that only two concentric shafts are adopted for driving, the mechanical arm can be synchronously controlled to stretch and retract, and the double fingers on the end effector are driven to rotate and alternately access the wafer to make complex movement, so that the mechanical arm can be supported to stretch and access two wafers each time, the wafer transmission beat is greatly improved, the limitation of the transmission efficiency of the existing single-finger wafer transmission mechanical arm is effectively broken through, the complexity of planning the movement path of the mechanical arm during use is remarkably simplified, and the production operation efficiency of the wafer is integrally improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application. In the drawings:

FIG. 1 is a schematic view of the overall structure of a two-finger mechanical arm of the present invention;

FIG. 2 is a schematic perspective view of a transmission mechanism of a two-finger mechanical arm of the present invention;

FIG. 3 is a schematic diagram of the assembly structure of the transmission mechanism of the two-finger mechanical arm of the present invention;

FIG. 4 is a schematic diagram of a defect structure of a conventional steel belt transmission mechanism;

Fig. 5 to 7 are schematic cross-sectional structures of a large arm unit and a small arm unit in the two-finger mechanical arm of the present invention;

fig. 8 to 9 are schematic structural views of a large arm pulley mechanism of a two-finger mechanical arm according to the present invention;

Fig. 10 to 11 are schematic views of the structure of the small arm pulley mechanism of the two-finger mechanical arm of the present invention;

FIGS. 12-13 are schematic views of a tensioning assembly in a two-finger mechanical arm according to the present invention;

Fig. 14 to 15 are schematic views of a dual-axis concentric actuator structure in a two-finger mechanical arm according to the present invention.

Description of the reference numerals

The dual-shaft concentric driver 1, the large arm unit 2, the small arm unit 3, the end effector 4, the fixed groove 5, the tension assembly 6, the first frameless torque motor 11, the second frameless torque motor 12, the motor housing 13, the motor housing 14, the t1 transmission shaft 15, the t2 transmission shaft 16, the t1 transfer flange 17, the t2 transfer flange 18, the t2 transfer shaft 19, the large arm frame 21, the large arm pulley mechanism 22, the small arm frame 31, the small arm pulley mechanism 32, the finger 41, the head piece 61, the tension head 62, the adjusting bolt 63, the tension groove 64, the first protruding shaft 211, the large arm fixed wheel 221, the small arm rotating wheel 222, the first traction belt 223, the second traction belt 224, the tube shaft 225, the shaft opening 311, the second protruding shaft 312, the elbow wheel 321, the finger rotating wheel 322, the third traction belt 323, the fourth traction belt 324, the notch 611, the first 2211, the first bearing 2212, the first flange 2213, the first pressure plate 2214, the second wheel 2221, the second pressure plate 2, the second pressure plate 3223, the second pressure plate 3224, the third bearing 3224, the outer bearing 3222, the outer bearing 3223, the steel belt 322303, the outer bearing 3223, the outer bearing roller 322303.

Detailed Description

In order that those skilled in the art can better understand the technical solutions of the present application, the following description will clearly and completely describe the specific technical solutions of the present application in conjunction with the embodiments to help those skilled in the art to further understand the present application. It will be apparent that the embodiments described herein are merely some, but not all embodiments of the application. It should be noted that embodiments of the present application and features of embodiments may be combined with each other by those of ordinary skill in the art without departing from the spirit of the present application and without conflicting with each other. All other embodiments, which are derived from the embodiments herein without creative effort for a person skilled in the art, shall fall within the disclosure and the protection scope of the present application.

Furthermore, the terms first, second, S1, S2 and the like in the description and in the claims and drawings are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the features so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those described herein. While the stages recited in the various steps are not necessarily performed in the same step, it should be understood that the order in which the stages of each step are performed may be modified or interchanged without violating the inventive concepts so that the step embodiments of the present invention described herein may be performed in orders other than those described herein. Furthermore, the terms "comprising," "including," and "having," and any variations thereof herein, are intended to cover a non-exclusive inclusion. Unless specifically stated or limited otherwise, the terms "disposed," "configured," "mounted," "connected," "coupled" and "connected" are to be construed broadly, and may, for example, be fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, or indirectly connected through an intermediary, or may be in communication with the interior of two elements. The specific meaning of the terms in this case will be understood by those skilled in the art in view of the specific circumstances and in combination with the prior art.

In order to support the robot arm to store/fetch two wafers at a time, as shown in fig. 1 to 3, the present invention provides a two-finger robot arm, examples of which include a biaxial concentric driver 1, a large arm unit 2, a small arm unit 3, and an end effector 4.

As shown in fig. 2 to 3, two fingers 41 which are arranged in opposite directions by 180 degrees are arranged on the end effector 4, the large arm unit 2 comprises a large arm support 21 and a large arm belt wheel mechanism 22, and the small arm unit 3 comprises a small arm support 31 and a small arm belt wheel mechanism 32.

Specifically, as shown in fig. 14 to 15, the biaxial concentric driver 1 comprises a first frameless torque motor 11, a second frameless torque motor 12, a motor housing 13, a motor frame 14, a T1 transmission shaft 15, a T2 transmission shaft 16, a T1 adapter flange 17, a T2 adapter flange 18, and a T2 adapter shaft 19. The first frameless torque motor 11 and the second frameless torque motor 12 are coaxially arranged on the upper portion and the lower portion of the motor frame 14, the motor housing 13 is covered outside the motor frame 14, a shaft hole is formed in the center of the T1 transfer flange 17, the T1 transfer flange 17 is covered on the motor frame 14, the T1 transmission shaft 15 is a tubular shaft, is connected with the transmission end of the first frameless torque motor 11 in a matched mode and passes through the shaft hole of the T1 transfer flange 17 to be connected with the T2 transfer flange 18 to form an outer driving shaft, the T2 transmission shaft 16 is connected with the transmission end of the second frameless torque motor 12 in a matched mode, passes through the inner tube of the T1 transmission shaft 15 to be connected with the T2 transfer shaft 19 to form an inner driving shaft, and the T2 transfer shaft 19 passes through the center Kong Waishen of the T2 transfer flange 18 to form a fall and is arranged in a concentric shaft.

As shown in fig. 2 to 3, a first end of the large arm support 21 is provided with a first protruding shaft 211, the large arm pulley mechanism 22 is disposed in the large arm support 21, a driven end of the large arm pulley mechanism 22 is in shaft connection with the first protruding shaft 211 disposed in the large arm support 21, an inner driving shaft and an outer driving shaft of the dual-shaft concentric driver 1 are respectively connected with a driving end of the large arm pulley mechanism 22 and a second end of the large arm support 21, a first end of the small arm support 31 is connected with the driven end of the large arm pulley mechanism 22, an elbow end of the small arm pulley mechanism 32 is connected with the first protruding shaft 211, one end of the driving end is in shaft connection with a second protruding shaft 312 disposed at a second end of the small arm support 31, and the other end of the small arm pulley mechanism is connected with an axial center of the end effector 4.

As shown in fig. 4, considering the joint transmission of the existing mechanical arm, the joint transmission is mainly realized through a steel belt pulley transmission mechanism in the arm, and since the steel belt pin 303 for fixing the steel belt 301 in the prior art is usually exposed outside the pulley 302 when connected, the pulley 302 collides with the steel belt pin 303 in the process of rotating and driving the steel belt 301 to wind, so that the joint rotation angle among the big arm, the small arm and the fingers of the mechanical arm is limited, and the flexibility of the mechanical arm is greatly limited.

Therefore, the following examples will disclose a structural example of the steel belt pulley mechanism, so as to break through the defect that the joint rotation angle of the traditional steel belt pulley mechanism is limited, increase the maximum rotation angle, and improve the flexibility of the mechanical arm.

Specifically, as shown in fig. 5 to 6 and 8 to 9, the large arm pulley mechanism 22 includes a large arm fixed pulley 221, a small arm pulley 222, a first traction belt 223, and a second traction belt 224. The large arm fixed wheel 221 is in transmission connection with an inner driving shaft of the double-shaft concentric driver 1, the small arm rotating wheel 222 is in shaft connection with a first protruding shaft 211 of the large arm support 21, fixing grooves 5 which are tangentially communicated with a wheel surface are respectively arranged at the upper layer and the lower layer of the wheel body of the large arm fixed wheel 221 and the small arm rotating wheel 222, so that a first traction belt 223 and a second traction belt 224 are inserted and fixed, and the large arm fixed wheel 221 and the small arm rotating wheel 222 are wound and pulled by the same-layer belt wheels at two sides of the large arm fixed wheel 221 and the small arm rotating wheel 222 respectively.

With this arrangement, the belt pins of the first traction belt 223 and the second traction belt 224 can be hidden in the wheel body, and the belt body is guided to rotate along with the wheel surface to be wound with the wheel surface in a tangential transition manner, so that the interference between the belt pins and the wheel surface can be avoided, and meanwhile, the winding turns of the belt body and the wheel surface can be ensured to be unobstructed, thereby increasing the winding turns of the belt body and the wheel surface, and realizing the effect of increasing the maximum rotation angle of the large-arm belt wheel mechanism 22.

Further, as shown in fig. 5, the fixed large arm wheel 221 includes a first wheel body 2211, a first bearing 2212, a first flange 2213, and a first pressing plate 2214, wherein a first end of the large arm support 21 is provided with a pipe shaft 225, the first wheel body 2211 is connected with the pipe shaft 225 through the first bearing 2212 in a shaft-joint manner, the first bearing 2212 is covered with the pipe shaft 225 through the first pressing plate 2214 to form a fixed state, the first flange 2213 is connected with the first wheel body 2211, and an inner driving shaft of the dual-shaft concentric driver 1 is connected with the first flange 2213 through the pipe shaft 225, so that the first wheel body 2211 is driven to rotate by driving the first flange 2213.

Further, as shown in fig. 6, the example of the small arm runner 222 includes a second wheel body 2221, a second pressing plate 2222, and a second bearing 2223, where the second pressing plate 2222 is provided with an elbow hole 2224, the second wheel body 2221 is connected with the first protruding shaft 211 through the second bearing 2223, the second pressing plate 2222 is connected with the second wheel body 2221, the pressing cover second bearing 2223 forms a fixation, the first end of the small arm support 31 is provided with a shaft opening 311, the second wheel body 2221 is connected with the first end of the small arm support 31, and the elbow wheel 321 of the small arm pulley mechanism 32 passes through the shaft opening 311 and the elbow hole 2224, and is coaxially connected with the first protruding shaft 211, while limiting the second bearing 2223.

Similarly, as shown in fig. 6 to 7 and 10 to 11, the forearm pulley mechanism 32 includes an elbow 321, a finger pulley 322, a third traction belt 323, and a fourth traction belt 324. The elbow wheel 321 is fixedly connected with the first protruding shaft 211 in a coaxial manner, and the finger rotating wheel 322 is connected with the second protruding shaft 312 at the second end of the small arm support 31 in a shaft manner.

As shown in fig. 7, the finger wheel 322 includes a third wheel body 3221, an inner pressure plate 3222, an outer pressure plate 3223, and a third bearing 3224, the outer pressure plate 3223 is annular, the third wheel body 3221 is axially connected with the second protruding shaft 312 through the third bearing 3224, the outer pressure plate 3223 is connected with the third wheel body 3221, the third bearing 3224 is pressed, and the inner pressure plate 3222 is connected with the second protruding shaft 312 through an inner ring hole of the outer pressure plate 3223 and limits the third bearing 3224.

In addition, it should be noted that, in this example, the diameters of the elbow wheel 321 and the finger wheel 322 are different, as shown in fig. 10 to 11, the diameter of the elbow wheel 321 is smaller than that of the finger wheel 322, and the two wheels have a preset transmission ratio, and the setting of the transmission ratio can be correspondingly set according to the angle required to drive the two wheels 41 to rotate (i.e. the relative rotation angle of the two fingers 41 on the end effector 4) when the mechanical arm stretches and contracts as a whole, and the setting of the transmission ratio of the belt wheel is common knowledge in the prior art, which is not repeated here. Those skilled in the art can design the direct dimensions between elbow wheel 321 and finger wheel 322 to meet the desired gear ratio settings, as the case may be.

Further, as shown in fig. 10 to 11, the upper layer and the lower layer of the wheel body of the elbow wheel 321 and the finger wheel 322 are respectively provided with a fixing groove 5 tangentially communicated with the wheel surface for inserting and fixing the third traction belt 323 and the fourth traction belt 324, and rotate along with the small arm frame 31, and respectively wind and drag the two layers of the wheel wheels on the two sides of the elbow wheel 321 and the finger wheel 322 to drive each finger 41 on the end effector 4 to rotate and alternate in the wafer access position. The maximum rotation angle of the small arm belt wheel mechanism 32 is increased, and simultaneously, the mechanical arm can be synchronously controlled to stretch and retract by adopting only two concentric shafts to drive the two fingers on the end effector 4 to rotate and alternate so as to access the complex movement of the wafer, so that the mechanical arm can be supported to stretch and access two wafers each time.

Further, considering that the belt pulley mechanism is required to be adjusted/debugged after initial assembly or long-time operation, as shown in fig. 8 to 13, the present example further provides the belt pulley mechanism with a tensioning assembly 6, which example comprises a belt head piece 61, a tensioning head 62 and an adjusting bolt 63, wherein, for example, the belt pulley mechanism 22 is assembled, at least one of the large arm fixed wheel 221 and the small arm rotating wheel 222 can be provided with a tensioning slot 64 communicated with the fixed slot 5, for example, the large arm fixed wheel 221 is arranged on the present example, the tensioning assembly 6 is arranged in the tensioning slot 64, one end of the tensioning slot 64 corresponding to the large arm fixed wheel 221 passes through the fixed slot 5 and enters the tensioning slot 64 to be laterally connected with the belt head piece 61, the belt head piece 61 is jointed with the tensioning head 62 in the tensioning slot 64, and the jointing surfaces of the two are in a slope shape, and the adjusting bolt 63 is inserted into the tensioning head 62 and the tensioning slot 64 to be adjusted and matched in order to enable the tensioning assembly 6 to be assembled in the tensioning mechanism in a movable manner in the tensioning slot 64.

When the longitudinal displacement of the tensioning head 62 is adjusted, the head 61 can be displaced along the joint surface of the two to form a transverse tensioning displacement, so that the first traction belt 223 is pulled to form a tensioning. In other alternative embodiments, the tensioning assembly 6 and the tensioning groove 64 may be optionally disposed on the forearm runner 222 to correspond to the tensioning adjustment of the second traction belt 224, which may be specifically described with reference to the examples above.

Similarly, the tensioning assembly 6 may be alternatively implemented in the forearm pulley mechanism 32, as shown in fig. 10 to 11, where, taking the fitting finger pulley 322 as an example, a tensioning slot 64 communicating with the fixed slot 5 is provided on the finger pulley 322, the tensioning assembly 6 is disposed in the tensioning slot 64, one end of the third traction belt 323 corresponding to the tensioning slot 64 passes through the fixed slot 5 and enters the tensioning slot 64 to connect with the side of the belt head 61, the belt head 61 is engaged with the tensioning head 62, and the engaging surfaces of the belt head 61 and the tensioning head 62 are in a slope shape, and when the adjusting bolt 63 is inserted into the tensioning head 62 to engage with the adjusting screw hole in the tensioning slot 64, the adjusting bolt 62 is longitudinally displaced to squeeze the belt head 61 to form a transverse tensioning displacement, so as to adjust the tension of the third traction belt 323.

On the other hand, in order to control the adjustment amount of the tensioning assembly 6, as shown in fig. 12 to 13, a limiting component, such as a limiting screw, may be disposed at one end of the tensioning groove 64, one side of the belt head piece 61 is provided with a notch 611, and the joint of the limiting screw and the notch 611 may be provided with limiting heads of different sizes, so that when the tensioning head 62 is adjusted to longitudinally displace and squeeze the belt head piece 61 to the tensioning limit, the limiting head is abutted against the notch 611 at one side of the belt head piece 61, and the adjustment travel of the tensioning assembly 6 may be controlled, thereby avoiding damage to the traction belt due to excessive limitation.

In operation, the two-finger mechanical arm of the above example is firstly started to drive the outer driving shaft and the inner driving shaft of the dual-shaft concentric driver 1 to respectively control the large arm support 21 to rotate to the arm telescopic position, and drive the driven end of the large arm pulley mechanism 22 to drive the small arm support 31 to rotate by a preset angle, and simultaneously drive the second protruding shaft 312 of the small arm support 31 to revolve relative to the elbow wheel 321 of the small arm pulley mechanism 32 when the arm telescopic movement is completed, at this time, because the elbow wheel 321 is fixed with the first protruding shaft 211 of the large arm support 21, the third traction belt 323 and the fourth traction belt 324 are driven to rotate along with the rotating arm of the second protruding shaft 312, so as to induce the reverse linkage finger wheel 322 to drive the end effector 4 to rotate to adjust the positions of the fingers 41 thereon, so that the rotation of the small arm support 31 is alternated in the wafer access position, thereby realizing the synchronous realization of two wafers at one time and only requiring two concentric shaft driving as a whole.

On the other hand, the invention also provides a control method of the double-finger mechanical arm, which comprises the following steps:

step S1, starting an external driving shaft of the double-shaft concentric driver 1, and controlling the large arm support 21 to rotate to an arm telescopic position;

Step S2 starts the inner driving shaft of the dual-shaft concentric driver 1, drives the driven end of the large arm pulley mechanism 22 to drive the small arm support 31 to rotate by a preset angle, and synchronously drives the second protruding shaft 312 to revolve relative to the elbow end of the small arm pulley mechanism 32 while completing the arm telescoping motion until the driving end of the reverse linkage small arm pulley mechanism 32 drives each finger 41 on the end effector 4 to rotate alternately in the wafer access position.

On the other hand, corresponding to the two-finger mechanical arm, the invention also provides a wafer transmission robot, which comprises the two-finger mechanical arm as described in any example.

In summary, through the two-finger mechanical arm, the control method thereof and the wafer transmission robot provided by the invention, the transmission structures of the large arm unit 2 and the small arm unit 3 are skillfully designed to support the operation and control of the mechanical arm expansion and contraction can be synchronously realized by adopting only two concentric shafts for driving, and the complex movement of the two-finger rotation alternate access wafer on the end effector 4 is driven to support the expansion and contraction access of the two wafers each time by the mechanical arm, so that the wafer transmission beat is greatly improved, the limitation of the transmission efficiency of the existing single-finger wafer transmission mechanical arm is effectively broken through, the complexity of the mechanical arm movement path planning during the use is obviously simplified, and the wafer production operation efficiency is integrally improved.

The preferred embodiments of the invention disclosed above are intended only to assist in the explanation of the invention. The preferred embodiments are not exhaustive or to limit the invention to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention. The invention is to be limited only by the following claims and their full scope and equivalents, and any modifications, equivalents, improvements, etc., which fall within the spirit and principles of the invention are intended to be included within the scope of the invention.

Furthermore, all or part of the steps in implementing the methods of the embodiments described above may be implemented by a program, where the program is stored in a storage medium and includes several instructions for causing a single-chip microcomputer, chip or processor (processor) to execute all or part of the steps in the methods of the embodiments of the application. The storage medium includes a U disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, an optical disk, or other various media capable of storing program codes.

In addition, any combination of various embodiments of the present invention may be performed, so long as the concept of the embodiments of the present invention is not violated, and the disclosure of the embodiments of the present invention should also be considered.

Claims (10)

1. The double-finger mechanical arm comprises a double-shaft concentric driver, a large arm unit, a small arm unit and an end effector, wherein two fingers which are arranged in opposite directions are arranged on the end effector, the large arm unit comprises a large arm support and a large arm belt wheel mechanism, the small arm unit comprises a small arm support and a small arm belt wheel mechanism, the driven end of the large arm belt wheel mechanism is in shaft connection with a first convex shaft arranged at the first end of the large arm support, the inner driving shaft and the outer driving shaft of the double-shaft concentric driver are respectively connected with the driving end of the large arm belt wheel mechanism and the second end of the large arm support, the first end of the small arm support is connected with the driven end of the large arm belt wheel mechanism, the elbow end of the small arm belt wheel mechanism is connected with the first convex shaft, one end of the driving end of the small arm support is in shaft connection with a second convex shaft arranged at the second end of the small arm support, and the other end of the driving end of the small arm belt wheel mechanism is connected with the shaft center of the end effector.

2. The two-finger mechanical arm according to claim 1, wherein the large arm belt wheel mechanism comprises a large arm fixed wheel, a small arm rotating wheel, a first traction belt and a second traction belt, wherein the upper layer and the lower layer of the wheel bodies of the large arm fixed wheel and the small arm rotating wheel are respectively provided with a fixed groove communicated with the wheel surface tangentially so as to enable the first traction belt and the second traction belt to be inserted and fixed, and the two sides of the large arm fixed wheel and the small arm rotating wheel are respectively wound and pulled by belt wheels on the same layer.

3. The double-finger mechanical arm of claim 2, further comprising a tensioning assembly, wherein the tensioning assembly comprises a belt head piece, a tensioning head and an adjusting bolt, at least any one of the big arm fixed wheel and the small arm rotating wheel is provided with a tensioning groove communicated with the fixed groove, the tensioning assembly is arranged in the tensioning groove, one end of any one of the first traction belt and the second traction belt corresponding to the tensioning groove is connected with the belt head piece, the belt head piece is in fit connection with the tensioning head, the joint surfaces of the belt head piece and the tensioning head piece are in a slope shape, the adjusting bolt is inserted into the tensioning head to be in fit connection with an adjusting screw hole in the tensioning groove, and the longitudinal displacement of the tensioning head is adjusted to squeeze the belt head piece to form transverse tensioning displacement.

4. A two-finger mechanical arm according to any one of claims 2 or 3, wherein the large arm fixed wheel comprises a first wheel body, a first bearing, a first flange and a first pressing plate, wherein the first end of the large arm support is provided with a pipe shaft, the first wheel body is connected with the pipe shaft through the first bearing in an axial mode, the first pressing plate is connected with the pipe shaft in a sleeved mode to cover the first bearing in a covering mode, the first flange is connected with the first wheel body, and an inner driving shaft of the double-shaft concentric driver penetrates through the pipe shaft to be connected with the first flange.

5. A two-finger mechanical arm according to any one of claims 2 or 3, wherein the forearm pulley comprises a second pulley body, a second pressing plate and a second bearing, the second pressing plate is provided with an elbow hole, the second pulley body is connected with the first protruding shaft through a second bearing in a shaft mode, the second pressing plate is connected with the second pulley body in a shaft mode, the second bearing is pressed, and the elbow end of the forearm pulley mechanism penetrates through the elbow hole to be connected with the first protruding shaft in a shaft mode, and meanwhile the second bearing is limited.

6. The two-finger mechanical arm according to claim 1, wherein the small arm belt wheel mechanism comprises an elbow wheel, a finger rotating wheel, a third traction belt and a fourth traction belt, the diameter sizes of the elbow wheel and the finger rotating wheel are different, the two-finger mechanical arm has a preset transmission ratio, the upper layer and the lower layer of the wheel body of the elbow wheel and the finger rotating wheel are respectively provided with a fixed groove which is tangentially communicated with a wheel surface so that the third traction belt and the fourth traction belt can be inserted and fixed, rotate along with the small arm support, wind and drag with the belt wheels on the two sides of the elbow wheel and the finger rotating wheel respectively, and drive each finger on the end effector to rotate and alternate in a wafer access position.

7. The two-finger mechanical arm of claim 4, further comprising a tensioning assembly, wherein the tensioning assembly comprises a belt head piece, a tensioning head and an adjusting bolt, at least any one of the elbow wheel and the finger wheel is provided with a tensioning groove communicated with the fixed groove, the tensioning assembly is arranged in the tensioning groove, one end of any one of the third traction belt and the fourth traction belt corresponding to the tensioning groove is connected with the belt head piece, the belt head piece is in fit connection with the tensioning head, the fit surfaces of the belt head piece and the tensioning head piece are in slope shape, the adjusting bolt is inserted into the tensioning head to be in fit connection with an adjusting screw hole in the tensioning groove, and the longitudinal displacement of the tensioning head is adjusted to squeeze the belt head piece to form transverse tensioning displacement.

8. The double-finger mechanical arm according to any one of claims 6 or 7, wherein the finger rotating wheel comprises a third wheel body, an inner pressing plate, an outer pressing plate and a third bearing, the outer pressing plate is annular, the third wheel body is connected with the second convex shaft through the third bearing in a shaft mode, the outer pressing plate is connected with the third wheel body, the third bearing is pressed, and the inner pressing plate penetrates through an inner annular hole of the outer pressing plate to be connected with the second convex shaft and limit the third bearing.

9. A control method of the two-finger robot arm according to any one of claims 1 to 8, comprising the steps of:

And starting an outer driving shaft and an inner driving shaft of the double-shaft concentric driver, respectively controlling the large arm support to rotate to an arm telescopic position, and driving the driven end of the large arm belt wheel mechanism to drive the small arm support to rotate by a preset angle, synchronously promoting the second protruding shaft to revolve relative to the elbow end of the small arm belt wheel mechanism while completing the arm telescopic movement until the driving end of the small arm belt wheel mechanism is reversely linked to drive each finger on the end effector to rotate alternately at the wafer access position.

10. A wafer transfer robot comprising a two-finger robot arm as claimed in any one of claims 1 to 8.