CN120866786A

CN120866786A - Workpiece rotating frame and vacuum chamber

Info

Publication number: CN120866786A
Application number: CN202511175135.6A
Authority: CN
Inventors: 龙汝磊; 包川龙
Original assignee: Optorun Shanghai Co Ltd
Current assignee: Optorun Shanghai Co Ltd
Priority date: 2025-08-21
Filing date: 2025-08-21
Publication date: 2025-10-31

Abstract

This invention belongs to the field of vacuum coating technology and discloses a workpiece rotating frame and a vacuum chamber. The workpiece rotating frame includes several circumferentially distributed coating areas. A rotating shaft for supporting the workpiece is disposed within each coating area, and the rotation axis of the rotating shaft is angled to the central symmetry line of the coating area. The vacuum chamber includes the workpiece rotating frame disposed within its cavity. The vacuum chamber also includes a rotation mechanism, comprising a first rotation structure and a second rotation structure. The workpiece rotating frame is connected to the output end of the first rotation structure, which drives the workpiece rotating frame to rotate along its own central axis. The rotation shaft is connected to the output end of the second rotation structure, which drives the rotation shaft to rotate. The workpiece rotating frame and vacuum chamber of this invention can improve the coating uniformity of the workpiece's side surface and the two end faces along the length of the rotation axis, thereby improving the workpiece coating quality.

Description

Workpiece rotating frame and vacuum chamber

Technical Field

The invention relates to the technical field of vacuum coating, in particular to a workpiece rotating frame and a vacuum chamber.

Background

The vacuum coating equipment is used for coating films in the modes of evaporation or sputtering and the like so as to finish the deposition of film layers on the surface of a workpiece and form films with multiple functions. Currently, due to the development of vacuum coating technology, the shape of vacuum coated products tends to be diversified, wherein the coating demands for the surface of a solid of revolution workpiece having an end face and a side face are increasing.

A workpiece loading jig having a rotating structure is generally provided to achieve uniform coating of the surface of the workpiece of the revolution body. However, in the prior art, the thickness of the coating film on the end surface of the revolving body workpiece perpendicular to the rotation shaft is often smaller than that on the side surface of the revolving body workpiece, so that the problem of uneven coating film on the surface of the revolving body workpiece is caused.

Therefore, a workpiece turret and a vacuum chamber are needed to solve the above-mentioned problems.

Disclosure of Invention

The invention aims to provide a workpiece rotating frame and a vacuum chamber, which aim to solve the problem that the coating thickness of two end faces of a rotating body workpiece perpendicular to a rotating shaft is smaller than that of the side face of the rotating body workpiece in the prior art.

To achieve the purpose, the invention adopts the following technical scheme:

The workpiece rotating frame comprises a plurality of coating areas distributed along the circumferential direction, a rotating shaft used for supporting a workpiece is arranged in the coating areas, and the direction of a rotating shaft of the rotating shaft and the central symmetry line of the coating areas are arranged at an included angle.

In some possible embodiments, each of the plating areas includes two symmetrically disposed plating sections, and a rotation shaft for supporting the workpiece is disposed in each of the plating sections, and a smaller included angle between a rotation shaft direction of the rotation shaft and a symmetry line of the two plating sections of the corresponding plating area is greater than 45 °.

In some possible embodiments, the direction of the rotation axis is perpendicular to the symmetry line of the two coating sections of the corresponding coating region.

The vacuum chamber comprises the workpiece rotating frame according to any one of the schemes, the workpiece rotating frame is arranged in a cavity of the vacuum chamber, the vacuum chamber further comprises a rotating mechanism, the rotating mechanism comprises a first rotating structure and a second rotating structure, the workpiece rotating frame is connected with an output end of the first rotating structure, the first rotating structure can drive the workpiece rotating frame to rotate along a central shaft of the workpiece rotating frame, the rotating shaft is connected with an output end of the second rotating structure, and the second rotating structure can drive the rotating shaft to rotate.

In some possible embodiments, the vacuum chamber further comprises a coating source assembly disposed within a cavity of the vacuum chamber and below the workpiece turret, the coating source assembly comprising a coating source having a top view projection within at least one of the coating regions.

In some possible embodiments, the first rotating structure includes a first driving part and a bearing disc in transmission connection with an output end of the first driving part, the workpiece rotating frame includes a plurality of material frame groups, each material frame group includes two symmetrically arranged material frames, a plurality of material frame groups and a plurality of coating areas are in one-to-one correspondence, each material frame group includes two material frames and each coating area includes two coating areas in one-to-one correspondence, the material frames are fixedly connected with the bearing disc, and the rotating shaft is rotatably installed in the material frames.

In some possible embodiments, the second rotary structure includes a second driving member fixedly mounted in the cavity of the vacuum chamber and a power transmission structure, the power transmission structure includes a first gear assembly, a second gear assembly, a third gear assembly and a fourth gear assembly, the first gear assembly includes a planetary shaft rotatably penetrating through the bearing disc, a planetary gear disposed at one end of the planetary shaft, and a planetary bevel gear disposed at the other end of the planetary shaft, the planetary gear is meshed with an output end of the second driving member, the second gear assembly includes a driving shaft, a tandem driving gear mounted on the driving shaft, and a planetary sub-bevel gear mounted on one end of the driving shaft, the planetary sub-bevel gear is in transmission connection with the planetary bevel gear through the third gear assembly, and the shaft driving gear is in transmission connection with the rotary shaft through the fourth gear assembly.

In some possible embodiments, the third gear assembly includes a base and an angle adjustment bevel gear, the base is connected with the carrier plate, the angle adjustment bevel gear is disposed on the base, and the planetary bevel gear and the planetary sub-bevel gear are respectively meshed with the angle adjustment bevel gear.

In some possible embodiments, the fourth gear assembly includes a connection shaft and a tandem rotation gear disposed at one end of the connection shaft, the tandem rotation gear is engaged with the tandem driving gear, and the other end of the connection shaft is fixedly connected with one end of the rotation shaft through a connection structure.

In some possible embodiments, the vacuum chamber further comprises an angle adjusting structure and a gear case, wherein the gear case is arranged at intervals on the outer side of the driving shaft and is rotationally connected with the base, one end of the angle adjusting structure is connected with the bearing disc, and the other end of the angle adjusting structure is connected with the gear case.

In some possible embodiments, the angle adjusting structure includes a connection arm, two ends of the connection arm are respectively provided with a connection piece, a length of the connection piece can be adjusted, and two ends of the connection arm are respectively connected with the bearing disc and the gear case body through the connection piece.

The invention has the beneficial effects that:

in addition, the existing workpieces are generally distributed radially on the workpiece rotating frame, namely, the extending direction of the rotation axis of the workpiece is parallel to the radial direction of the workpiece rotating frame, so that the larger the distance from the rotation center in the radial direction of the workpiece rotating frame, the larger the space waste exists between the adjacent radial workpieces, and more rotating shafts can be distributed on the workpiece rotating frame by arranging the included angle between the rotation axis direction of the rotating shaft and the central symmetry line of the coating area, so that more workpieces can be supported, the loading capacity of the workpieces is improved, and the coating efficiency is further improved.

The vacuum chamber comprises the workpiece rotating frame, wherein the first rotating structure drives the workpiece rotating frame to rotate along the central shaft of the workpiece rotating frame during vapor deposition, the second rotating structure drives the rotating shaft to rotate, and the rotating shaft is arranged to form an included angle with the central symmetry line of a film coating area through the arrangement of the rotating shaft direction of the rotating shaft, so that the uniformity of film coating on the side surface of the workpiece and the two end surfaces along the length direction of the rotating shaft can be effectively improved, the quality of the workpiece is improved, and meanwhile, the rotating shaft can support more workpieces, the loading capacity of the workpiece is improved, and the film coating efficiency is further improved.

Drawings

FIG. 1 is a top view of a vacuum chamber provided by an embodiment of the present invention;

FIG. 2 is a schematic view of a swing mechanism according to an embodiment of the present invention;

fig. 3 is a schematic structural view of a swing mechanism in a first state according to an embodiment of the present invention;

Fig. 4 is a schematic structural view of a swing mechanism in a second state according to an embodiment of the present invention;

fig. 5 is a schematic diagram illustrating an included angle between a direction of a rotation axis of a rotation shaft and symmetry lines of two coating partitions of a corresponding coating region according to an embodiment of the present invention.

In the figure:

10. A vacuum chamber;

110. Coating area, 111, coating partition, 120, material frame, 200, revolving shaft, 311, first driving piece, 312, bearing disc, 321, second driving piece, 411, planetary shaft, 412, planetary gear, 413, planetary bevel gear, 421, driving shaft, 422, tandem driving gear, 423, planetary sub bevel gear, 431, base, 432, angle adjusting bevel gear, 441, tandem revolving gear, 500, transition gear, 600, bearing seat, 700, gear box, 800, angle adjusting structure, 810, connecting arm, 820, connecting piece, 900, connecting structure, 1000, workpiece, 1100 and bearing.

Detailed Description

The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.

In the description of the present invention, unless explicitly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may, for example, be fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, directly connected, indirectly connected through an intervening medium, or in communication between two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1, the present embodiment provides a workpiece turret, where the workpiece turret includes a plurality of coating areas 110 distributed along a circumferential direction, a rotation shaft 200 for supporting a workpiece 1000 is disposed in the coating areas 110, and a rotation axis direction of the rotation shaft 200 is disposed at an angle with a central symmetry line of the coating areas 110. In fig. 1, the center symmetry line of each plating region 110 is shown by a dash-dot line.

In addition, the existing workpiece 1000 is generally distributed radially on the workpiece turret, namely, the extending direction of the rotation axis of the workpiece 1000 is parallel to the radial direction of the workpiece turret, so that the larger the distance from the rotation center in the radial direction of the workpiece turret, the larger the space waste exists between the adjacent radial workpieces 1000, and by arranging the rotation axis of the rotation axis 200 and the central symmetry line of the film coating area 110, more rotation axes 200 can be distributed on the workpiece turret, so that the loading capacity of the workpiece 1000 can be supported, and the film coating efficiency can be improved.

Optionally, each plating region 110 includes two symmetrically disposed plating sections 111, and a rotation axis 200 for supporting the workpiece 1000 is disposed in each plating section 111, and the smaller of the included angles between the rotation axis direction of the rotation axis 200 and the symmetry line of the two plating sections 111 of the corresponding plating region 110 is greater than 45 °. As shown in fig. 5, the rotation axis of the rotation axis 200 is a, the symmetry line of the two coating sections 111 of the coating region 110 corresponding to the rotation axis 200 is B, and in one possible embodiment, the included angle between the rotation axis direction of the rotation axis 200 and the symmetry line of the two coating sections 111 of the corresponding coating region 110 includes an included angle α and an included angle θ, and the included angle θ is smaller. By setting the smaller included angle between the direction of the rotation axis of the rotation shaft 200 and the symmetry line of the two coating partitions 111 of the corresponding coating region 110 to be larger than 45 degrees, the evaporation path of the coating source has a relatively uniform evaporation area relative to the side and end surfaces of the workpiece 1000, and the side and end surfaces of the workpiece 1000 can be uniformly coated. In practice, each of the plating regions 110 may exist alone or may be joined to form a unitary body.

Preferably, the rotation axis direction of the rotation axis 200 is perpendicular to the symmetry line of the two plating sections 111 of the corresponding plating region 110. Therefore, the structural distribution can be optimized, and the overall stability is improved. Alternatively, both the plating source and the ion source may be disposed on the symmetry line of the plating area 110, so that an included angle between the connecting line of the plating source and the ion source and the length direction of the workpiece 1000 is 45 °, which is beneficial to uniformly plating both the side surface and the end surface of the workpiece 1000.

As shown in fig. 1 to 4, the present embodiment further provides a vacuum chamber 10, including the workpiece turret, where the workpiece turret is disposed in a cavity of the vacuum chamber 10. The vacuum chamber 10 further includes a rotating mechanism including a first rotating structure and a second rotating structure, the workpiece rotating frame is connected to an output end of the first rotating structure, the first rotating structure can drive the workpiece rotating frame to rotate along a central axis thereof, the rotating shaft 200 is connected to an output end of the second rotating structure, and the second rotating structure can drive the rotating shaft 200 to rotate.

The vacuum chamber 10 provided in this embodiment includes the workpiece turret, during vapor deposition, the first rotary structure drives the workpiece turret to rotate along its central axis, the second rotary structure drives the rotary shaft 200 to rotate, and the rotation axis direction of the rotary shaft 200 is set to form an included angle with the central symmetry line of the film coating region 110, so that the uniformity of film coating on the side surface of the workpiece 1000 and on the two end surfaces along the length direction of the rotary shaft 200 can be effectively improved, the film coating quality of the workpiece 1000 can be improved, and meanwhile, the rotary shaft 200 can support more workpieces 1000, the loading capacity of the workpiece 1000 can be improved, and the film coating efficiency can be further improved.

Illustratively, the workpiece 1000 in the present embodiment has a cylindrical structure, and the extending direction of the cylindrical structure is parallel to the direction of the rotation axis of the rotation shaft 200. The arrangement can improve the coating uniformity of the circumferential side surface and the two end surfaces of the cylinder structure.

Optionally, the vacuum chamber 10 further includes a film plating source assembly disposed within the cavity of the vacuum chamber 10 and below the workpiece turret, the film plating source assembly including a film plating source having a top view projection within the at least one film plating region 110. The arrangement is such that the coating path of the coating source has a certain included angle with the end face of the workpiece 1000 and the side face of the workpiece 1000, and in the rotating process of the workpiece turret, the two end faces of the workpiece 1000 can receive the coating materials which are relatively equal in quantity and are emitted from the coating source, and the difference between the amount of the coating materials which are received by the side face of the workpiece 1000 and are emitted from the coating source and the amount of the coating materials which are received by the two end faces is small, so that the uniformity of the coating film on the side face and the end face of the workpiece 1000 is further improved. Further, the vacuum chamber 10 also includes an ion source located below the workpiece turret, with a top-view projection of the ion source located within the remaining at least one coating region 110, which may be an evaporation source, such as an electron gun, for example.

In this embodiment, the first rotating structure includes a first driving member 311 and a carrying disc 312 connected with an output end of the first driving member 311, the workpiece rotating frame includes a plurality of material frame groups, each material frame group includes two symmetrically arranged material frames 120, the plurality of material frame groups are in one-to-one correspondence with the plurality of coating areas 110, two material frames 120 of each material frame group are in one-to-one correspondence with two coating areas 111 of each coating area 110, the material frames 120 are fixedly connected with the carrying disc 312, and the rotating shaft 200 is rotatably mounted on the material frames 120. When the first driving member 311 drives the carrying disc 312 to rotate, the carrying disc 312 drives the material frame 120 to rotate, and the arrangement of the material frame 120 can provide a larger supporting force for the rotating shaft 200. Preferably, both ends of the rotation shaft 200 are detachably rotatably mounted to the material frame 120 through bearings 1100 to reduce friction between the rotation shaft 200 and the material frame 120, ensure stability of movement of the rotation shaft 200, and improve convenience of assembly and disassembly. It is understood that the rotation of the first driving member 311, which drives the carrier plate 312, is revolution.

Optionally, the second rotating structure includes a second driving member 321 fixedly installed in the cavity of the vacuum chamber 10 and a power transmission structure, the power transmission structure includes a first gear assembly, a second gear assembly, a third gear assembly and a fourth gear assembly, the first gear assembly includes a planet shaft 411 rotatably penetrating through the bearing disc 312, a planet gear 412 disposed at one end of the planet shaft 411, and a planet bevel gear 413 disposed at the other end of the planet shaft 411, the planet gear 412 is meshed with an output end of the second driving member 321, the second gear assembly includes a driving shaft 421, a string shaft driving gear 422 installed on the driving shaft 421, and a planet bevel gear 423 installed at one end of the driving shaft 421, the planet bevel gear 423 is in transmission connection with the planet bevel gear 413 through the third gear assembly, and the string shaft driving gear 422 is in transmission connection with the rotating shaft 200 through the fourth gear assembly. In the operation process, the second driving piece 321 drives the planetary gear 412 to rotate, the planetary gear 412 drives the planetary shaft 411 connected with the planetary gear 412 to rotate in the rotation process, the planetary bevel gear 413 arranged on the planetary shaft 411 is driven to rotate in the rotation process, the planetary bevel gear 413 drives the planetary bevel gear 423 to rotate through the third gear assembly in the rotation process, the driving shaft 421 is further driven to rotate, the tandem driving gear 422 arranged on the driving shaft 421 is driven to rotate in the rotation process of the driving shaft 421, the rotary shaft 200 is driven to rotate through the fourth gear assembly in the rotation process of the tandem driving gear 422, the workpiece 1000 arranged on the rotary shaft 200 is driven to rotate in the rotation process of the rotary shaft 200, the transmission ratio of the gear assembly is accurate, the transmission efficiency is high, the working reliability of the gear assembly is high, and the service life is long. It should be understood that the aforementioned "the second driving member 321 drives the planetary gear 412 to rotate" means that the first driving member 311 drives the carrier plate 312 to rotate and also drives the planetary gear 412 to revolve. Since the second driving member 321 does not revolve, the revolution of the planetary gear 412 makes the second driving member 321 fixedly installed in the cavity of the vacuum chamber 10 react to the planetary gear 412, so that the planetary gear 412 engaged with the output end of the second driving member 321 rotates while revolving, thereby driving the planetary shaft 411 connected thereto to rotate.

Preferably, the bearing seat 600 is disposed on the bearing disc 312, and the planetary shaft 411 is rotatably connected with the bearing disc 312 through the bearing seat 600, so as to improve the rotation reliability of the planetary shaft 411. Alternatively, the planetary gear 412 and the second driving member 321 are engaged through the transition gear 500, and the transition gear 500 can function as a space fit and a buffer transmission impact, etc.

In one possible embodiment, the third gear assembly includes a base 431 and an angle adjustment bevel gear 432, the base 431 is connected to the carrier plate 312, the angle adjustment bevel gear 432 is disposed on the base 431, and the planetary bevel gear 413 and the planetary sub bevel gear 423 are respectively meshed with the angle adjustment bevel gear 432. The bevel gear adopts a helical or spiral tooth design, generates larger driving force from contact, and has higher transmission efficiency than that of a common straight tooth gear. In this embodiment, the angle adjustment bevel gear 432 can perform an axial steering function.

In this embodiment, the fourth gear assembly includes a connection shaft and a tandem rotary gear 441 disposed at one end of the connection shaft, the tandem rotary gear 441 is engaged with the tandem drive gear 422, and the other end of the connection shaft is fixedly connected to one end of the rotary shaft 200 through the connection structure 900. The gear assembly has accurate transmission ratio and high transmission efficiency, and the gear assembly has high working reliability and long service life.

Optionally, the connection structure 900 is provided as a screw or a magnetic connection. For example, the other end of the connecting shaft is detachably connected with the rotating shaft 200 through a screw, so that the assembly cost is reduced, or the end of the connecting shaft and the end of the rotating shaft 200 are both provided with magnetic connectors, and the connecting shaft and the rotating shaft 200 are mutually adsorbed through magnetic force, so that the assembly and the disassembly are convenient.

Preferably, the vacuum chamber 10 further includes an angle adjusting structure 800 and a gear housing 700, the gear housing 700 is disposed at intervals outside the driving shaft 421 and rotatably connected with the base 431, one end of the angle adjusting structure 800 is connected with the bearing plate 312, and the other end of the angle adjusting structure 800 is connected with the gear housing 700. The gear housing 700 can protect the driving shaft 421, the tandem driving gear 422, and the fourth gear assembly connected with the tandem driving gear 422 from external environment, thereby improving use reliability.

In the present embodiment, the bearing seats 600 are disposed at two ends of the interior of the gear housing 700, and two ends of the driving shaft 421 are rotatably connected with the gear housing 700 through the bearing seats 600, which is beneficial to improving the rotation reliability of the driving shaft 421.

Optionally, the angle adjusting structure 800 includes a connecting arm 810, two ends of the connecting arm 810 are respectively provided with a connecting member 820, and the length of the connecting member 820 can be adjusted, and two ends of the connecting arm 810 are respectively connected with the bearing disc 312 and the gear housing 700 through the connecting member 820. Referring to fig. 2 to 4, during angle adjustment, the gear housing 700 rotates relative to the base 431, and the length of the connecting piece 820 at both ends of the connecting arm 810 is adjusted, so that the included angle between the gear housing 700 and the base 431 can be adjusted, and the meshing positions of the planetary bevel gears 423 and the angle adjustment bevel gears 432 can be adjusted, so as to adjust the relative positional relationship between the rotating shaft 200 and the film coating source, which are in transmission connection with the tandem driving gear 422 of the driving shaft 421. Alternatively, the connecting piece 820 may be made of stainless steel, and the length of the connecting piece 820 may be adjusted according to needs in practical application. Or the connector 820 may be provided as a connecting string.

It is to be understood that the above examples of the present invention are provided for clarity of illustration only and are not limiting of the embodiments of the present invention. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the invention. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.

Claims

1. The workpiece rotating frame is characterized by comprising a plurality of coating areas (110) distributed along the circumferential direction, wherein a rotating shaft (200) for supporting a workpiece (1000) is arranged in the coating areas (110), and the rotating shaft direction of the rotating shaft (200) and the central symmetry line of the coating areas (110) form an included angle.

2. The workpiece turret according to claim 1, characterized in that each of the coating zones (110) comprises two symmetrically arranged coating segments (111), the swivel axis (200) for supporting the workpiece (1000) being arranged in each of the coating segments (111), the swivel axis (200) having a swivel axis direction which is more than 45 ° from the smaller of the symmetry lines of the two coating segments (111) of the respective coating zone (110).

3. Workpiece turret according to claim 2, characterized in that the direction of the rotation axis of the swivel axis (200) is perpendicular to the symmetry line of the two coating sections (111) of the respective coating zone (110).

4. A vacuum chamber, characterized by comprising the workpiece turret according to any one of claims 1-3, wherein the workpiece turret is arranged in a cavity of the vacuum chamber, the vacuum chamber further comprises a rotation mechanism, the rotation mechanism comprises a first rotation structure and a second rotation structure, the workpiece turret is connected with an output end of the first rotation structure, the first rotation structure can drive the workpiece turret to rotate along a central shaft of the workpiece turret, the rotation shaft (200) is connected with an output end of the second rotation structure, and the second rotation structure can drive the rotation shaft (200) to rotate.

5. The vacuum chamber of claim 4, further comprising a coating source assembly disposed within the cavity of the vacuum chamber and below the workpiece turret, the coating source assembly comprising a coating source having a top view projection within at least one of the coating regions (110).

6. The vacuum chamber of claim 4, wherein the first rotary structure comprises a first driving member (311) and a carrying disc (312) in transmission connection with an output end of the first driving member (311), the workpiece rotary frame comprises a plurality of material frame groups, each material frame group comprises two symmetrically arranged material frames (120), the material frame groups and the coating regions (110) are in one-to-one correspondence, each coating region (110) comprises two symmetrically arranged coating partitions (111), the two material frames (120) of each material frame group and the two coating partitions (111) of each coating region (110) are in one-to-one correspondence, the material frames (120) are fixedly connected with the carrying disc (312), and the rotary shaft (200) is rotatably arranged in the material frames (120).

7. The vacuum chamber of claim 6, wherein the second swivel structure comprises a second driving member (321) fixedly mounted to a cavity of the vacuum chamber and a power transmission structure comprising a first gear assembly, a second gear assembly, a third gear assembly and a fourth gear assembly, the first gear assembly comprises a planetary shaft (411) rotatably penetrating the carrier plate (312), a planetary gear (412) provided at one end of the planetary shaft (411) and a planetary bevel gear (413) provided at the other end of the planetary shaft (411), the planetary gear (412) is meshed with an output end of the second driving member (321), the second gear assembly comprises a driving shaft (421), a shaft driving gear (422) mounted to the driving shaft (421) and a planetary sub bevel gear (423) mounted to one end of the driving shaft (421), the planetary sub bevel gear (423) is in driving connection with the planetary bevel gear (413) through the third gear assembly, and the shaft driving gear (422) is in driving connection with the fourth gear assembly through the planetary bevel gear (200).

8. The vacuum chamber according to claim 7, wherein the third gear assembly comprises a base (431) and an angle adjustment bevel gear (432), the base (431) is connected with the carrier plate (312), the angle adjustment bevel gear (432) is provided on the base (431), and the planetary bevel gear (413) and the planetary sub bevel gear (423) are respectively meshed with the angle adjustment bevel gear (432).

9. The vacuum chamber of claim 7, wherein the fourth gear assembly comprises a connection shaft and a tandem turning gear (441) disposed at one end of the connection shaft, the tandem turning gear (441) is engaged with the tandem driving gear (422), and the other end of the connection shaft is fixedly connected with one end of the turning shaft (200) through a connection structure (900).

10. The vacuum chamber of claim 8, further comprising an angle adjustment structure (800) and a gear housing (700), the gear housing (700) being disposed around the outside of the driving shaft (421) at intervals and being rotatably connected to the base (431), one end of the angle adjustment structure (800) being connected to the carrier plate (312), the other end of the angle adjustment structure (800) being connected to the gear housing (700).

11. The vacuum chamber of claim 10, wherein the angle adjusting structure (800) comprises a connecting arm (810), wherein connecting members (820) are respectively disposed at two ends of the connecting arm (810), the length of the connecting members (820) can be adjusted, and two ends of the connecting arm (810) are respectively connected with the bearing disc (312) and the gear housing (700) through the connecting members (820).