CN120253016A - A through-type contact detection sensor based on piezoelectric ceramics - Google Patents
A through-type contact detection sensor based on piezoelectric ceramics Download PDFInfo
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- CN120253016A CN120253016A CN202510757906.6A CN202510757906A CN120253016A CN 120253016 A CN120253016 A CN 120253016A CN 202510757906 A CN202510757906 A CN 202510757906A CN 120253016 A CN120253016 A CN 120253016A
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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Abstract
本发明涉及一种接触检测传感器，具体涉及一种基于压电陶瓷的中通式接触检测传感器。一种基于压电陶瓷的中通式接触检测传感器，包括：外壳，具有位于中心处的通孔及环绕在通孔周向侧的容纳腔，所述通孔与容纳腔不连通；压电陶瓷组件，位于所述容纳腔内，包括压电陶瓷；绝缘组件，设置于压电陶瓷与外壳之间；信号处理组件，包含至少两个电荷放大器，分别与对应的压电陶瓷相连；电源组件，为压电陶瓷组件和信号处理组件提供工作电压。本发明具有能提高检测精度、不影响镜头/刀头正常使用，且便于走线的优点。
The present invention relates to a contact detection sensor, and in particular to a through-type contact detection sensor based on piezoelectric ceramics. A through-type contact detection sensor based on piezoelectric ceramics comprises: a housing having a through hole located at the center and a receiving cavity surrounding the circumferential side of the through hole, wherein the through hole is not connected to the receiving cavity; a piezoelectric ceramic component located in the receiving cavity and comprising a piezoelectric ceramic; an insulating component disposed between the piezoelectric ceramic and the housing; a signal processing component comprising at least two charge amplifiers respectively connected to corresponding piezoelectric ceramics; and a power supply component providing a working voltage for the piezoelectric ceramic component and the signal processing component. The present invention has the advantages of being able to improve detection accuracy, not affecting the normal use of the lens/tool head, and being convenient for wiring.
Description
Technical Field
The invention relates to a contact detection sensor, in particular to a medium-sized contact detection sensor based on piezoelectric ceramics.
Background
The ultra-precise technology is widely applied to manufacturing processes of optical free surfaces (lenses, reflectors, windows and laser elements), micro-nano structure surfaces (micro-lens arrays, micro-prism arrays and compound eye micro-structure arrays), precise grinding tools and the like required by military weapons. In ultra-precision machining, a white light interferometer is usually used, a contact sensor is arranged on the lens side of the white light interferometer, and when the contact sensor judges that the lens is subjected to micro force, a signal is sent in real time to enable an executing mechanism to drive the lens to deviate, so that the lens is prevented from collision. The following problem exists in above-mentioned scheme, and contact sensor sets up the position and is far away from the camera lens position, perhaps can paste and lead to the camera lens volume grow at camera lens circumference side, generally adopts strain type contact sensor, like application number 202180059986.8's pressure sensor, and detection accuracy is lower, and feedback response is slower, and relevant circuit wiring position is different, leads to the structure complicacy, is unfavorable for ultra-precise machining equipment's use.
Disclosure of Invention
The invention aims to provide a piezoelectric ceramic-based medium-sized contact detection sensor which can improve detection precision, does not influence normal use of a lens/a cutter head and is convenient to wire.
The piezoelectric ceramic-based medium-sized contact detection sensor comprises a shell, a piezoelectric ceramic component, an insulating component and a signal processing component, wherein the shell is provided with a through hole positioned at the center and a containing cavity surrounding the circumferential side of the through hole, the through hole is not communicated with the containing cavity, the piezoelectric ceramic component is positioned in the containing cavity and comprises piezoelectric ceramic, when contact force is applied to the shell, the piezoelectric ceramic generates charge signals due to piezoelectric effect, the insulating component is arranged between the piezoelectric ceramic and the shell and is used for realizing insulation of the piezoelectric ceramic and the shell and preventing the charge signals from losing, the signal processing component comprises at least two charge amplifiers which are respectively connected with the corresponding piezoelectric ceramic and is used for converting the charge signals generated by the piezoelectric ceramic into measurable voltage signals and compensating signal errors caused by factors such as environmental temperature drift through difference of the two charge amplifier signals, and the power supply component is used for providing working voltage for the piezoelectric ceramic component and the signal processing component and guaranteeing normal operation of the sensor.
The shell of the invention adopts a medium-pass structure, is convenient for the layout of internal circuits and light paths, meets the requirement of ultra-precision processing equipment on space utilization, avoids the mess of circuits, simplifies the equipment structure, is beneficial to use, can be directly fixed on the axial front side of the shell, has a closer detection sensor to a stress point, has quicker response, and can ensure the detection precision.
The insulating sheet prevents the loss of charge signals, ensures that the charge signals generated by the piezoelectric ceramic are accurately transmitted to the signal processing assembly, and improves the detection precision. The piezoelectric ceramic is sensitive to tiny mechanical stress, weak contact force acting on the shell can be accurately detected, and the piezoelectric ceramic is suitable for a high-precision detection scene. The two charge amplifiers are adopted to perform difference processing on the signals, so that signal errors caused by factors such as environmental temperature drift are effectively compensated, and detection accuracy and reliability are improved.
Preferably, the shell comprises a first shell and a second shell which are sequentially arranged along the axial direction of the through hole, the first shell and the second shell comprise an inner ring part and an outer ring part, the connecting parts are connected between the inner ring part and the outer ring part, the inner cavity is formed among the connecting parts at two sides in the axial direction, the inner ring part at the inner side in the circumferential direction and the outer ring part at the outer side in the circumferential direction, the piezoelectric ceramic is close to the first shell, and the insulating component is arranged between at least the connecting part of the first shell and the piezoelectric ceramic. The piezoelectric ceramic component, the signal processing component and the power supply component are convenient to install, and the assembly precision and the assembly efficiency can be improved.
Preferably, the chamber is provided with at least two of the piezoelectric ceramic components in annular space. The annular spacing arrangement helps to reduce errors and disturbances that may be associated with single point detection. Even if a certain piezoelectric ceramic component is locally disturbed or damaged, other components still can work normally, so that the stability and fault tolerance of the whole sensor system are improved. By combining the piezoelectric ceramic components which are arranged at intervals with the differential signal processing technology, signal errors caused by factors such as environmental temperature drift can be effectively compensated, the detection precision is further improved, and the influence of environmental factors on the detection result is reduced.
Preferably, the piezoelectric ceramic and the insulating sheet are both annular and have through holes, the piezoelectric ceramic and the insulating sheet are fixed with the housing through the fasteners, and the fasteners are matched at the through holes. The piezoelectric ceramic and the insulating sheet are annular and have through holes, so that the piezoelectric ceramic and the insulating sheet are conveniently connected and fixed with the shell, the piezoelectric ceramic is ensured to work stably, and displacement or looseness is prevented from affecting the detection accuracy.
Preferably, the piezoelectric ceramics and the charge amplifiers are at least two, and the piezoelectric ceramics and the charge amplifiers are in one-to-one correspondence. The difference between the two charge amplifier signals can compensate signal errors caused by environmental temperature drift and the like, and the contact force sensing minimum threshold value is improved.
Preferably, the piezoelectric ceramic is connected to the charge amplifier through a silver-plated signal wire having a diameter of 0.3 mm. The 0.3mm diameter silver-plated signal wire is used for connecting the piezoelectric ceramic and the charge amplifier, so that the piezoelectric ceramic has low resistance and high conductivity, the signal transmission loss is reduced, and the signal transmission efficiency and quality are improved.
Preferably, the charge amplifier adopts a high-precision operational amplifier chip as a core to form an amplifying circuit, and is provided with a low-temperature-drift capacitor and a low-temperature-drift resistor to form a feedback loop so as to improve the signal amplifying precision and stability.
Preferably, the power supply assembly comprises a voltage inverter and two linear voltage regulators, wherein the input voltage is 5-9V direct current voltage, and the output + -2.5V constant voltage supplies power for the charge amplifier. The voltage inverter and the linear voltage stabilizer are used for converting 5-9V direct current voltage into + -2.5V constant voltage, so that a stable power supply is provided for the charge amplifier, normal operation of the charge amplifier is ensured, and system reliability is improved.
Preferably, the voltage inverter includes an HT7660 chip and peripheral circuits thereof, and the forward voltage linear regulator includes a TPS7a4901 chip and peripheral circuits thereof, and the reverse voltage linear regulator includes a TPS7a3001 chip and peripheral circuits thereof. The HT7660 chip is adopted to realize voltage inversion, the TPS7A4901 and TPS7A3001 chips respectively form a forward voltage linear voltage stabilizer and a reverse voltage linear voltage stabilizer, and the advantages of high precision, low noise, good stability and the like are achieved, and the precision and the stability of output voltage are ensured.
Preferably, the sensor output interface adopts an XH2.54-5P plug-in interface, and the five wiring lines are respectively a positive power supply stage, a ground power supply stage, a charge amplifier signal, and another charge amplifier signal and a signal ground stage. Five wires respectively correspond to the positive power supply stage, the ground power supply stage, the charge amplifier signals and the like by adopting an XH2.54-5P plug-in interface, so that the connection with other equipment is convenient, the rapid signal transmission is realized, and the compatibility and the universality of the equipment are improved.
The invention has the advantages of improving the detection precision, not affecting the normal use of the lens/tool bit and being convenient for wiring.
Drawings
Fig. 1 is an exploded view of an embodiment of the present invention.
Fig. 2 is a cross-sectional view of an embodiment of the present invention.
Fig. 3 is a schematic diagram of a charge amplifier implementation in a sensor according to an embodiment of the invention.
Fig. 4 is a schematic diagram of a voltage inverter implementation principle in a power module in a sensor according to an embodiment of the present invention.
Fig. 5 is a schematic diagram of a linear voltage regulator implementation in a power module of a sensor according to an embodiment of the present invention.
FIG. 6 is a schematic diagram of a test result of a sensor according to an embodiment of the present invention.
FIG. 7 is a schematic diagram of another test result of a sensor according to an embodiment of the present invention.
Detailed Description
The invention is further described below with reference to the drawings and specific embodiments.
As shown in fig. 1 and 2, the embodiment discloses a medium-sized contact detection sensor based on piezoelectric ceramics, which comprises a shell made of stainless steel alloy, a piezoelectric ceramic component, an insulating component, a signal processing component and a power supply component. The piezoelectric ceramic sensor comprises a shell, a piezoelectric ceramic component, an insulating component and a power supply component, wherein the shell is provided with a through hole which is arranged at the center and is used for wiring, and a containing cavity which surrounds the circumferential side of the through hole, the through hole is not communicated with the containing cavity, the piezoelectric ceramic component is arranged in the containing cavity and comprises piezoelectric ceramic 9, when a contact force is applied to the shell, the piezoelectric ceramic 9 generates a charge signal due to a piezoelectric effect, the insulating component is arranged between the piezoelectric ceramic 9 and the shell and comprises a ceramic insulating sheet 8 and is used for realizing insulation between the piezoelectric ceramic 9 and the shell to prevent the charge signal from losing, the signal processing component comprises two charge amplifiers 5, the two charge amplifiers 5 are respectively connected with the corresponding piezoelectric ceramic and are used for converting the charge signal generated by the piezoelectric ceramic 9 into a measurable voltage signal, and signal errors caused by factors such as environmental temperature drift are compensated through the difference of the signals of the two charge amplifiers 5, and the power supply component 10 provides working voltage for the piezoelectric ceramic component and the signal processing component, and the normal operation of the sensor is ensured.
The shell includes first shell 3 and second shell 4 that set gradually around through-hole axial, first shell 3 is located 4 fronts of second shell, and it is fixed through fastener 2, first shell 3 and second shell 4 all include interior ring portion, outer ring portion, connect the connecting portion between interior ring portion and outer ring portion, the inner chamber constitutes between the connecting portion of axial both sides, the inboard interior ring portion of circumference and the outside outer ring portion of circumference, the interior ring portion of first shell 3 is protruding forward, the interior ring portion of second shell 4 is protruding backward, the interior ring portion circumference outer wall of first shell 3 and the interior ring portion circumference outer wall of second shell 4 all are equipped with the helicitic texture in order to be connected with equipment and tool bit/camera lens.
The cavity is provided with two piezoelectric ceramic components which are symmetrically arranged. The piezoelectric ceramic 9 is close to the first housing 3, and ceramic insulating sheets 8 are arranged between the connecting parts of the piezoelectric ceramic 9 and the first housing 3 and the connecting parts of the piezoelectric ceramic 9 and the second housing 4. The piezoelectric ceramics 9 and the insulating sheet 8 are both annular and have through holes through which the fasteners 2 pass, and the fasteners 2 of this embodiment are used not only for assembly of the housing but also for fixation of the piezoelectric ceramics 8 and the insulating sheet 9 with the housing. Wherein the power supply assembly 10 is fixed to the housing by a first bolt 7 and the charge amplifier 5 is stacked and placed in the housing by a stud 6. The number of the piezoelectric ceramics 9 and the number of the charge amplifiers 5 are two, the piezoelectric ceramics 9 are in one-to-one correspondence with the charge amplifiers 5, and the piezoelectric ceramics 9 are connected with the charge amplifiers 5 through silver-plated signal wires (not shown in the figure) with the diameter of 0.3 mm.
When a contact force acts on the housing, the piezo ceramic 9 generates a charge signal due to the piezo effect, which signal is converted by a charge amplifier into a voltage signal of a measurable magnitude. The sensor output interface of the embodiment adopts an XH2.54-5P plug-in interface, and five wires are respectively a positive power supply stage, a ground power supply stage, two charge amplifier signals, and another charge amplifier signal and a signal ground stage. When two pieces of piezoelectric ceramics 9 are connected to the charge amplifier 5, one piezoelectric ceramics is connected in a reverse mode to the other piezoelectric ceramics, so that when a contact force acts on the sensor, the two charge amplifiers 5 output two signals with opposite polarities. The interference such as temperature drift is of the same polarity as the charge amplifier 5, so that the difference between the two signals can offset the interference such as temperature drift, and a smaller contact force sensing threshold value is obtained.
As shown in FIG. 3, an LMP7721 operational amplifier is used as a core to form a charge amplifying circuit, a low temperature drift 10nF patch capacitor C 1 and a low temperature drift 100MΩ patch resistor R1 form a feedback loop of the amplifying circuit, wherein the temperature coefficient of capacitance is lower than 30ppm/°C, the temperature coefficient of resistance is lower than 10ppm/°C, and the amplifying gain A is approximately equal to
Is the unit of gain (F is the unit of capacitance, farad) which represents that the input charge signal is converted to a voltage signal and amplified 10 9 times. The charge is input from a QIN input stage, R 2 is an input stage protection resistor, R 1 is used for unloading a charge stabilizing system, a voltage signal obtained by converting the charge is output as V out after passing through R 3, and an LMP7721 positive-phase input stage is grounded and connected with a voltage follower formed by an LMP7715 after passing through R 5.
As shown in fig. 4 and 5, the charge amplifier 5 uses a high-precision operational amplifier chip as a core to form an amplifying circuit, and the high-precision operational amplifier chip uses LMP7721. The LMP7715 precise operational amplifier chip and the peripheral circuit thereof form a charge amplifying circuit protection loop, R 6 and C 10 are feedback resistance capacitors of a voltage follower, and output signals of the feedback resistance capacitors are output to an input stage protection loop GUARD of the LMP7721 after passing through R 4. The two charge amplifiers are respectively and compactly arranged on two PCBs with the area of about 1.8cm 2, and the PCBs are stacked in the alloy shell to increase the space utilization rate. The PCB adopts a 4-layer structure, the layout of components is concentrated on the first layer (at the position of the axially forefront side), and the filter capacitor (C 2~C9) is arranged on the bottom layer.
The power supply assembly 10 is composed of a voltage inverter and two linear voltage regulators, and is arranged on a PCB board with an area of 2.8cm 2. The power supply assembly 10 is connected to the charge amplifier 5 by silver-plated signal wires having a diameter of 0.3 mm. The input voltage of the power supply module is 5-9V direct current voltage, and constant voltage of +/-2.5V is output to supply power for the charge amplifier. As shown in fig. 4, the voltage inverter is composed of an HT7660 chip and its peripheral circuits, and the input power V DD is inverted and stepped down to V out=-VDD voltage output after passing through the HT7660 chip. In addition, a10 μf tantalum capacitor is connected across chip cap+ and CAP-, and a10 μf tantalum capacitor is connected across chip V OUT and ground. The LV and VSS pins are grounded, and the BOOST pin and the OSC pin are suspended.
Of the two linear voltage regulators, the forward voltage linear voltage regulator is composed of a TPS7A4901 chip and peripheral circuits thereof, and the reverse voltage linear voltage regulator is composed of a TPS7A3001 chip and peripheral circuits thereof. The input voltage V DD is stepped down to +2.5V via the forward voltage linear regulator and the input voltage V DD is stepped up to-2.5V via the reverse voltage linear regulator. The TPS7a4901 and TPS7a3001 output voltages are configured using feedback resistors, with the same configuration scheme. Fig. 5 shows a schematic diagram of the TPS7a4901 feedback resistor configuration. The calculated relationship between the output voltage V out and the feedback resistors R 1 and R 2 is that
Taking R 2 = 3.24kΩ, when V out = +2.5v, R 1=3.6KΩ;CIN、CNR/SS、CFF、COUT is a chip ceramic capacitor packaged as C0603, the capacitance values of which are given in the figure.
To verify the function of the present invention, the sensor of the present invention was tested using a 500mg numeric weight in an M1 weight. During testing, the sensor is vertically arranged on the vibration isolation table, and a tray with the outer diameter larger than the holes in the sensor is arranged at the top end of the sensor so as to place weights. The sensor is powered by a positive point atomic digital control power supply DP100, and the power supply voltage is 5V. Data acquisition was performed using a NIUSB-6210 type acquisition card. In fig. 6, weights are placed on the tray at about 4.5s, and the sensor data are shown in the graph, and Signal1 and Signal2 are signals output by two charge amplifiers, respectively, and their polarities are opposite. Notably, the signal contained a drift error of about-50 mV, and further a significant addition of periodic interference noise (three signal humps shown in the figure, originating from electromagnetic coupling interference) resulted in almost coverage of the signal at 4.5 s. Fig. 7 shows the difference between the two signals, the signal noise and drift error is significantly reduced, and the contact signal at 4.5s is enhanced. Experiments prove that the piezoelectric ceramic-based medium-sized contact detection sensor can effectively sense contact force as low as 4.9mN by taking the gravity acceleration of 9.8mm/s 2.
The embodiment has the advantages of improving the detection precision, not affecting the normal use of the lens/tool bit and being convenient for wiring.
Claims (10)
1. A piezoelectric ceramic-based medium-sized contact detection sensor, characterized by comprising:
The shell is provided with a through hole positioned at the center and a containing cavity surrounding the circumferential side of the through hole, and the through hole is not communicated with the containing cavity;
the piezoelectric ceramic component is positioned in the accommodating cavity and comprises piezoelectric ceramic, and when a contact force is applied to the shell, the piezoelectric ceramic generates a charge signal due to a piezoelectric effect;
The insulation component is arranged between the piezoelectric ceramic and the shell and is used for realizing insulation of the piezoelectric ceramic and the shell and preventing charge signals from being lost;
the signal processing assembly comprises at least two charge amplifiers which are respectively connected with the corresponding piezoelectric ceramics and are used for converting charge signals generated by the piezoelectric ceramics into measurable voltage signals and compensating signal errors caused by factors such as environmental temperature drift and the like through difference of the two charge amplifier signals;
and the power supply component provides working voltage for the piezoelectric ceramic component and the signal processing component and ensures the normal operation of the sensor.
2. The sensor of claim 1, wherein the housing comprises a first housing and a second housing disposed in sequence along the axis of the through hole, the first housing and the second housing each comprise an inner ring portion and an outer ring portion, the connecting portions are connected between the inner ring portion and the outer ring portion, the inner cavity is formed between the connecting portions on two sides in the axial direction, the inner ring portion on the inner side in the circumferential direction and the outer ring portion on the outer side in the circumferential direction, the piezoelectric ceramic is close to the first housing, and the insulating assembly is disposed between at least the connecting portion of the first housing and the piezoelectric ceramic.
3. The sensor of claim 1, wherein the chamber is provided with at least two piezoelectric ceramic components at annular intervals.
4. The sensor of claim 1, 2 or 3, wherein the piezoelectric ceramic and the insulating sheet are ring-shaped and have through holes, the piezoelectric ceramic and the insulating sheet are fixed to the housing by the fastening members, and the fastening members are fitted in the through holes.
5. The sensor of claim 3, wherein the piezoelectric ceramic and the charge amplifier are at least two, and the piezoelectric ceramic corresponds to the charge amplifier one by one.
6. A contact detection sensor according to claim 1, 2 or 3, wherein the piezoelectric ceramic is connected to the charge amplifier via a silver-plated signal line having a diameter of 0.3 mm.
7. The piezoelectric ceramic-based medium-sized contact detection sensor according to claim 1, 2 or 3, wherein the charge amplifier is an amplifying circuit using a high-precision operational amplifier chip as a core, and is provided with a low-temperature-drift capacitor and resistor to form a feedback loop.
8. The piezoelectric ceramic-based medium-sized contact detection sensor according to claim 1, 2 or 3, wherein the power supply assembly comprises a voltage inverter and two linear voltage regulators, the input voltage is 5-9V direct current voltage, and the output + -2.5V constant voltage supplies power to the charge amplifier.
9. The piezoelectric ceramic based medium-sized contact detection sensor of claim 8, wherein the voltage inverter comprises an HT7660 chip and peripheral circuits thereof, and wherein the forward voltage linear voltage regulator comprises a TPS7A4901 chip and peripheral circuits thereof, and the reverse voltage linear voltage regulator comprises a TPS7A3001 chip and peripheral circuits thereof.
10. The piezoelectric ceramic-based medium-sized contact detection sensor according to claim 1, 2 or 3, wherein the sensor output interface is an XH2.54-5P plug-in interface, and the five wires are respectively a positive power stage, a ground power stage, a charge amplifier signal, another charge amplifier signal and a signal ground stage.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202510757906.6A CN120253016B (en) | 2025-06-09 | 2025-06-09 | Medium-pass type contact detection sensor based on piezoelectric ceramics |
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| CN202510757906.6A CN120253016B (en) | 2025-06-09 | 2025-06-09 | Medium-pass type contact detection sensor based on piezoelectric ceramics |
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| CN120253016A true CN120253016A (en) | 2025-07-04 |
| CN120253016B CN120253016B (en) | 2025-11-18 |
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| CN114427888A (en) * | 2022-01-24 | 2022-05-03 | 上海海事大学 | Two sets of piezoelectric ceramic vibration pressure sensors |
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2025
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| US3942049A (en) * | 1973-08-30 | 1976-03-02 | Ckd Praha, Oborovy Podnik | Piezoelectric pick-up device for measuring pressures within hollow bodies |
| US5377547A (en) * | 1992-09-11 | 1995-01-03 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric pressure sensor having tubular charge detecting unit and method of assembling same |
| US20050223858A1 (en) * | 2003-10-31 | 2005-10-13 | Massachusetts Institute Of Technology | Variable reluctance fast positioning system and methods |
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