CN1285847C - Gate valve - Google Patents

Abstract

The present invention relates to a swing type gate valve which comprises a valve shell, a valve seat around the edge of a first opening, a valve disk, a rotary arm, a rotary arm driving device and a power conveying device, wherein the valve shell comprises a first opening and a second opening which corresponds to each other; the valve disk can be installed to move between a full opening position and a full closing position, and the valve disk is constructed in the following form, namely that when the valve disk moves to the closing position, the valve disk is engaged with the valve seat so that the first opening is sealed; the bottom end of the rotary arm is rotationally fixed on the valve shell; the rotary arm driving device is used for driving the top end of the rotary between the first position, namely that the valve disk is positioned in the full opening position, and the second position, namely that the valve disk is positioned in the full closing position; the power conveying device is used for transferring the motion of the rotary arm to the valve disk.

Description

gate

technical field

The present invention relates to a gate valve, especially a pendulum gate valve used in processing equipment for processing semiconductor wafers or the like.

Background technique

In processing equipment for processing semiconductor wafers, ie, liquid crystal substrates or the like, vacuum is applied to the processing chamber through an opening having a gate valve, such as a pendulum gate valve. It is necessary to prevent foreign matter from entering the processing chamber as much as possible.

Such a gate valve is described in US Patent 6,089,537. In this gate valve, the disc moves up and down while leaving the seat, and when the disc is positioned facing the seat, the disc is brought into contact with the seat by pushing the side of the disc against the seat with force.

Fig. 17 and Fig. 18 show a conventional pendulum gate valve, which has a hollow box-shaped valve casing 1 with an elliptical cross-sectional shape and defines an inner space. The valve housing 1 includes a pair of opposite circular openings 2 and 3. When the gate valve is opened, the workpiece to be processed and/or process gas enters the processing chamber through the pair of openings.

The gate valve includes a valve disc 5 . When the gate valve 5 is closed, the valve disc 5 is in contact with the valve seat 4 which is located in the inner space and surrounds the edge of the opening 2 . The valve disc 5 is clamped by a rotating arm 6 and moves between a fully open position and a fully closed position under the action of a rotating arm driving device 8 with a pivot 7 on the valve housing 1 as a center setting.

In the above-mentioned traditional swing gate valve, the valve disc 5 in the fully closed position is pushed towards the valve seat 4 by the top end of the rotating arm 6 under the action of the rotating arm driving device 8 . Therefore, it is necessary to adopt a rotating arm driving device 8 with a large power and a large size, and the diameter of the rotating arm 6 is also large.

Another conventional gate valve is disclosed in Japanese laid-open patent application 277,876/91. In this gate valve, a valve plate facing the valve disc is provided, and pressurized fluid is introduced into the space between the valve plate and the valve disc to isolate them from each other, so that the valve is closed by the reaction force of the force applied to the valve plate. The disc presses against the valve seat.

However, in such a gate valve, it is necessary to provide a device for introducing a pressure fluid into the above-mentioned space, so the size of the gate valve becomes large.

Contents of the invention

It is therefore an object of the present invention to provide a pendulum gate valve which does not have the aforementioned drawbacks.

The present invention can be summarized as follows.

The present invention is a pendulum gate valve, comprising: a valve casing including an inner space and first and second openings opposite to each other; a valve seat located in the inner space, the valve seat surrounds the edge of the first opening; a A valve disc, which is mounted relative to the valve housing so that the valve disc can move between a fully open position and a fully closed position in the interior space, the valve disc is constructed in such a way that when the valve disc is moved to the closed position, the valve disc Engaging with the valve seat and sealing the first opening; a rotating arm, the bottom end of which is rotatably fixed on the valve housing; an arm driving device, which is used for the first position, that is, the valve disc is in the fully open position and the second position , that is, the top of the rotating arm is driven when the valve disc is in the fully closed position; and a power transmission device for transmitting the movement of the rotating arm to the valve disc; it is characterized in that the power transmission device has: a valve formed on the valve disc A first roller guide groove; a valve disc support member rotatably fixed on the top end of the arm, which can move relative to the valve disc; a second roller guide groove formed on the valve disc support to face the first roller guide groove a roller guide groove; a third roller guide groove formed on the disc support; a fourth roller guide groove formed on the disc support to face the third roller guide groove; a a first roller engaging a second roller guide groove; and a second roller engaging a third and fourth roller guide groove, the first roller guide groove being an elongated slot extending obliquely downward to separate from the valve disc; the second roller guide groove is a slender and upwardly inclined groove to approach the valve disc, while the third roller guide groove is a slender and downwardly inclined groove to approach the valve disc; the fourth The roller guide groove is an inclined downwardly extending groove to separate from the valve disc.

The present invention also includes a pendulum gate valve comprising: a valve housing including an interior space and first and second openings opposite to each other; a valve seat located in the interior space surrounding the edge of the first opening; A valve disc mounted relative to the valve housing so that the valve disc can move within the interior space between a fully open position and a fully closed position, the valve disc being constructed in such a way that when the valve disc is moved to the closed position, the valve The disc engages with the valve seat and seals the first opening; a rotating arm, the bottom end of which is rotatably fixed on the valve housing; position, that is, the top of the rotating arm is driven between the valve disc in the fully closed position; and a power transmission device for transmitting the movement of the rotating arm to the valve disc; it is characterized in that: the power transmission device has: a valve disc formed on The first roller guide groove; a valve disc support member rotatably fixed on the top of the arm, it can move relative to the valve disc; a second roller guide groove formed on the valve disc support to face the first roller guide groove Two roller guide grooves; a third roller guide groove formed on the valve disc support member; a fourth roller guide groove formed on the valve disc support member facing the third roller guide groove; one and the first a first roller engaged with a second roller guide groove; and a second roller engaged with a third and a fourth roller guide groove, the first roller guide groove being a thin slant extending downwardly away from the valve disc. The long groove then extends generally vertically downward; the second roller guide groove is an elongated groove extending upwardly at an angle to approach the valve disc, and then extends approximately vertically upward; The elongated slot of the valve disc then extends generally vertically downwards; the fourth roller guide slot extends obliquely upwards away from the elongated slot of the valve disc and then extends generally vertically upwards.

The power transmission device further includes: a pair of holders facing each other with a space therebetween, installed on the back of the valve disc opposite to the valve seat; for supporting the first roller.

The pendulum gate valve has a member for elastically preventing the support plate from moving relative to the valve disc in the direction of movement of the pivot arm.

The pendulum gate valve has a member for elastically preventing the valve disc from moving relative to the valve disc support in the moving direction of the rotary arm.

Swing gate valves have a stop projecting downward from the lower end of the disc.

Other objects and advantages of the present invention will be more clearly manifested from the following description of preferred embodiments in conjunction with the accompanying drawings.

Description of drawings

Fig. 1 is under the state before the gate valve is closed, the longitudinal section front view of pendulum gate valve according to the present invention;

Fig. 2 is a cross-sectional view cut along X-X in Fig. 1;

Fig. 3 is a cross-sectional view cut along Y-Y in Fig. 1;

4 is a perspective view of a power transmission device of a pendulum gate valve according to the present invention;

5 is a perspective view of the power transmission device of the pendulum gate valve according to the present invention;

Fig. 6 is a side view of the first roller guide groove of the pendulum gate valve according to the present invention;

7 is a side view of the second and fourth roller guide grooves of the pendulum gate valve according to the present invention;

Fig. 8 is a perspective view of the power transmission device of the pendulum gate valve according to the present invention;

Fig. 9 is a perspective view of the power transmission device of the pendulum gate valve according to the present invention;

Fig. 10 is a side view of the third roller guide groove of the pendulum gate valve according to the present invention;

Fig. 11 is a longitudinal section front view of the pendulum gate valve according to the present invention in the state just before the gate valve is closed;

Fig. 12 is a cross-sectional view cut along X-X in Fig. 11;

Fig. 13 is a cross-sectional view cut along Y-Y in Fig. 11;

Fig. 14 is a longitudinal sectional front view of the pendulum gate valve according to the present invention when the gate valve is just closed;

Fig. 15 is a cross-sectional view cut along X-X in Fig. 14;

Fig. 16 is a cross-sectional view cut along Y-Y in Fig. 14;

17 is a perspective view of a power transmission device of a conventional pendulum gate valve;

Fig. 18 is a partial longitudinal sectional side view of a conventional gate valve.

Specific implementation

As shown in Figures 1 to 3, the pendulum gate valve according to the present invention includes: a hollow box-shaped valve casing 1 whose cross-sectional shape is elliptical and defines an internal space; a pair of opposite circular openings 2 and 3; a valve seat 4 located in the inner space of the valve housing 1, which surrounds the edge of the opening 2; a valve disc 5, which is in contact with the valve seat 4 when the valve disc 5 is in the closed position; An arm 6, whose top end is connected to the valve disc 5, and whose bottom end is rotatably connected to the pivot 7 on the valve housing 1; and a fully closed position (as shown in Figure 14) to drive the valve disc 5; and a power transmission device 9 for moving the valve disc 5 forward to the valve seat 4.

As shown in Figures 1 to 9, the power transmission device 9 includes: two pairs of holders 10 facing each other with a space therebetween, they are installed on the back side 5a of the valve disc 5 opposite to the valve seat 4; A roller guide groove 11, they are formed on the opposite surface of described holder 10; Two first rollers 12, both ends of each first roller 12 all insert described each pair of first rollers guide groove 11; a valve support 13, which is inserted between each pair of holders 10 and is rotatably fixed on said arm 6; and two second roller guide grooves 14, which pass through The valve disc supports 13 are respectively used to accommodate the first rollers 12 therebetween.

The first roller guide groove 11 formed on the holder 10 extends obliquely downward to leave the valve disc 5 , and then extends substantially vertically downward, as shown in FIGS. 3 and 6 . The shape of the first roller guide groove 11 is a long hole, and its width is basically the same as the diameter of the first roller 12 . The second roller guide groove 14 formed on the valve disc support member 13 extends obliquely upward to approach the valve disc 5, and then extends approximately vertically upward at a position corresponding to the first roller guide groove 11, as shown in FIG. 2 and shown in Figure 7. The shape of the second roller guide groove 14 is a long hole, and its width is basically the same as the diameter of the first roller 12 .

As shown in FIGS. 2 and 15 , when the valve disc support 13 moves up and down along the holder 10 , the valve disc 5 approaches and leaves the valve seat 4 relative to the valve disc support 13 .

In addition, in the present invention shown in Fig. 3, Fig. 5, Fig. 8 and Fig. 9, the power transmission device 9 includes: a pair of support plates 15 arranged on both sides of the valve disc support member 13; The connecting rod 16 connecting them together between the support plates 13; two pairs of third roller guide grooves 17 formed on the opposite faces of the support plate 15; two second rollers 18, each of the first Both ends of two rollers 18 are inserted into each pair of third roller guide grooves 17; slot 19; two pairs of leaf springs 20 for connecting each of the holders 10 and each of the corresponding support plates 15; a tension spring 21, one end of which is fixed on the top of the rotating arm 6 , the other end of which is fixed on said valve disc 5 so as to always press the rotating arm 6 in one direction relative to the valve disc 5; The lower end protrudes downwards.

The leaf spring 20 has the effect of preventing the holder 10 and the support plate 15 from moving relative to each other in the direction of motion of the pivot arm 6, but enabling them to move perpendicularly to the pivot arm 6 shown by the arrow in FIG. Relative movement in direction.

The third roller guide groove 17 formed on the support plate 15 extends obliquely downward to approach the valve disc 5, and then extends substantially vertically downward, as shown in FIGS. 3 and 10 . The shape of the third roller guide groove 17 is a long hole, and its width is basically the same as the diameter of the second roller 18 . The fourth roller guide groove 19 formed on the valve disc support member 13 extends obliquely upwards to leave the valve disc 5, and then extends approximately vertically upwards at a position corresponding to the third roller guide groove 17, as shown in Fig. 2 and Figure 7 shows. The shape of the fourth roller guide groove 19 is a long hole, and its width is basically the same as the diameter of the second roller 18 .

When the valve disc support 13 moves up and down along the holder 10 and the support plate 15 as shown in FIGS. 2 and 15 , the support plate 15 leaves and approaches the valve housing relative to the valve disc 5 1 opening 3.

According to the structure of the pendulum gate valve of the present invention as described above, therefore, when the rotating arm driving device 8 operates so as to make the rotating arm 6 from the position shown in Figure 1, that is, opening 2 and 3 are all open, swing to the position shown in Figure 11, that is, when the valve disc 5 faces the opening 2, the stopper 22 protruding from the lower end of the valve disc 5 contacts the inner surface of the valve housing 1 (as shown 11), the movement of the valve disc 5 stops. When the rotating arm 6 continues to move in the direction shown by the arrow in Figure 9, the valve disc support 13 fixed on the rotating arm 6 also overcomes the pulling force of the extension spring 21 and moves relative to the valve disc 5 (as shown in Figure 14 to Figure 9). 16), so that the first roller rotates and moves along the first roller guide groove 11, and finally reaches the lower vertical part of the first roller guide groove 11 (as shown in Figure 16), and also makes the first roller 12 moves rotationally along the second roller guide groove 14, and finally reaches the upper vertical portion of the second roller guide groove 14, as shown in FIG. 15 .

At the same time, the second roller 18 passing through the fourth roller guide groove 19 of the valve disc support member 13 rotates and moves along the third roller guide groove 17 of the support plate 15, and finally reaches the third roller guide groove 17 At the same time, the second roller 18 rotates and moves along the fourth roller guide groove 19, and finally reaches the upper vertical part of the fourth roller guide groove 19 of the valve disc support 13. part, as shown in Figure 15.

As a result, the support plate 15 is pressed against the valve housing 1 surrounding the edge of the opening 3 with a large force, and the reaction force of the valve housing 1 there acts on the valve disc 5, pushing the valve disc 5 strongly to the on seat 4.

In this case, even if the rotary arm driving device 8 cuts off the energy source to stop the rotary arm 6 from moving, the valve disc 5 can still be held on the valve seat 4 in a pressure contact state.

When the gate valve is to be opened, in order to move the valve disc 5 from the closed position to the open position, the rotating arm drive device 8 is rotated so that the valve disc support 13 is first relative to the holder 10 under the elastic force of the tension spring 21. The supporting plate 15 moves, and the first and second rollers 12 and 18 together with the disc support 13 are moved rotationally along the first and third roller guide grooves 11 and 17, respectively. As a result, the valve disc 5 leaves the valve seat 4 and the support plate 15 leaves the opening 3 . Continued movement of the arm 6 causes the valve disc 5 to move such that the openings 2 and 3 are fully opened.

In another embodiment of the present invention, the holder 10 and the valve disc 5 are integrated.

In another embodiment of the present invention, each of the first and second roller guide grooves 11 and 14 extends obliquely downward to leave the valve disc 5, and each of the third and fourth roller guide grooves 17 and 19 All extend downwards to be close to the valve disc 5 .

Invention effect

The present invention has important advantages over conventional gate valves. For example, the pendulum gate valve of the present invention adopts the power transmission device 9 with two rollers 12 and 18 and four roller guide grooves 11, 14, 17 and 19, so that the valve disc 5 can be pressed on the on seat 4. In addition, the rollers 12 and 18 rotate while moving in the roller guide grooves 11, 14, 17, and 19 without using any lubricant, so that, contrary to conventional gate valves, possible frictional movement of the rollers is prevented. foreign body. The valve disc 5 is pushed toward the valve seat 4 by the reaction force of the supporting plate 15, so that the structure of the rotating arm driving device 8 and the rotating arm 6 is simpler and smaller in size.

In addition, under the continuous swinging action of the rotating arm 6, the valve disc 5 moves toward the opening and presses the valve disc 5 to the valve seat 4, so that the gate valve can be closed, so that if the gate valve is used as a liquid flow control valve, continuous liquid flow can be carried out. control.

While the invention has been particularly shown and described herein with reference to preferred embodiments, it will be understood by those skilled in the art that modifications may be made to the invention without departing from the spirit and scope of the invention as defined in the appended claims. Made many improvements in form and detail.

Claims (10)

1. a pendulum gate valve comprises: a valve casing (1) that comprises inner space and first and second openings (2,3) relative to each other;

One is arranged in the valve seat (4) of inner space, and this seat ring is around the edge of first opening (2);

One valve disc (5), it is installed with respect to valve casing (1), make valve disc (5) in the inner space, between fully open position and full close position, to move, valve disc (5) is configured to following form, promptly when valve disc (5) when moving to closed position, valve disc (5) engages and seals first opening (2) with valve seat (4);

One pivoted arm (6), its bottom are rotatably mounted on the valve casing (1);

One arm drive unit (8), it is used in primary importance is that valve disc (5) is in fully open position and the second place is that valve disc (5) is in the top that drives pivoted arm (6) between the full close position; With

One is used for the transmission of movement of pivoted arm (6) is given the power transmission (9) of valve disc (5);

It is characterized in that: power transmission (9) has: first a roller guiding groove (11) that is formed on the valve disc (5); One is rotatably mounted to the valve disc supporting element (13) on pivoted arm (6) top, and it can move with respect to valve disc (5); One is formed at valve disc supporting element (13) goes up with the second roller guiding groove (14) in the face of the first roller guiding groove (11); One is formed at the 3rd roller guiding groove (17) on the valve disc supporting element (15); One is formed at valve disc supporting element (13) and goes up with the 4th roller guiding groove (19) in the face of the 3rd roller guiding groove (17); First roller (12) that the one and first and second roller guiding grooves (11,14) engage; With second roller (18) that engages with the third and fourth roller guiding groove (17,19), the first roller guiding groove (11) is an elongated slot, and the downward-sloping extension of this groove is to separate with valve disc (5); The second roller guiding groove (14) is that the elongated groove that extends of being inclined upwardly is with near valve disc (5), and the 3rd roller guiding groove (17) be the groove of an elongated downward-sloping extension with near valve disc (5), the 4th roller guiding groove (19) is one to tilt upwardly extending groove to separate with valve disc (5).

2. pendulum gate valve, comprising: one comprises the valve casing (1) of inner space and first and second openings (2,3) relative to each other;

A valve seat (4) that is arranged in the inner space, this seat ring is around the edge of first opening (2);

A valve disc (5), it is installed with respect to valve casing (1), make valve disc (5) in the inner space, between fully open position and full close position, to move, valve disc (5) is configured to following form, promptly when valve disc (5) when moving to closed position, valve disc (5) engages and seals first opening (2) with valve seat (4);

A pivoted arm (6), its bottom are rotatably mounted on the valve casing (1);

An arm drive unit (8), it is used in primary importance is that valve disc (5) is in fully open position and the second place is that valve disc (5) is in the top that drives pivoted arm (6) between the full close position; With

A power transmission (9) that is used for the transmission of movement of pivoted arm (6) is given valve disc (5);

It is characterized in that: power transmission (9) has: one is formed at the first roller guiding groove (11) on the valve disc (5); One is rotatably mounted to the valve disc supporting element (13) on pivoted arm (6) top, and it can move with respect to valve disc (5); One is formed at valve disc supporting element (13) goes up with the second roller guiding groove (14) in the face of the first roller guiding groove (11); One is formed at the 3rd roller guiding groove (17) on the valve disc supporting element (15); One is formed at top the 4th roller guiding groove (19) to the 3rd roller guiding groove (17) of valve disc supporting element (13); First roller (12) that the one and first and second roller guiding grooves (11,14) engage; With second roller (18) that engages with the third and fourth roller guiding groove (17,19), the first roller guiding groove (11) be downward-sloping extension to leave the elongated slot of valve disc (5), roughly extend straight down then; The second roller guiding groove (14) is to be inclined upwardly extension with the elongated slot near valve disc (5), roughly extends straight up then; The 3rd roller guiding groove (17) is the elongated slot of downward-sloping extension with close valve disc (5), roughly extends straight down then; The 4th roller guiding groove (19) is to be inclined upwardly to extend to leave the elongated slot of valve disc (5), roughly extends straight up then.

3. pendulum gate valve as claimed in claim 1, it is characterized in that: power transmission (9) also comprises: a pair of clamp holder (10) of facing and having a space mutually therebetween, they are installed in the back side of the valve disc (5) relative with valve seat (4), are used to support first roller (12).

4. pendulum gate valve as claimed in claim 2, it is characterized in that: power transmission (9) also comprises: a pair of clamp holder (10) of facing and having a space mutually therebetween, they are installed in the back side of the valve disc (5) relative with valve seat (4), are used to support first roller (12).

5. pendulum gate valve according to claim 1 also comprises a member (20), and this member is used for flexibly preventing that dunnage (15) from moving with respect to valve disc (5) on the movement direction of pivoted arm (6).

6. pendulum gate valve according to claim 2 also comprises a member (20), and this member is used for flexibly preventing that dunnage (15) from moving with respect to valve disc (5) on the movement direction of pivoted arm (6).

7. pendulum gate valve according to claim 1 also comprises a member (21), and this member is used for flexibly preventing that valve disc (5) from moving with respect to valve disc supporting element (13) on the movement direction of pivoted arm (6).

8. pendulum gate valve according to claim 2 also comprises a member (21), and this member is used for flexibly preventing that valve disc (5) from moving with respect to valve disc supporting element (13) on the movement direction of pivoted arm (6).

9. pendulum gate valve according to claim 1 also comprises a stopper (22) that stretches out from the lower ends downward of valve disc (5).

10. pendulum gate valve according to claim 2 also comprises a stopper (22) that stretches out from the lower ends downward of valve disc (5).

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