[go: up one dir, main page]

CN1269994C - Apparatus for spraying printed circuit-board - Google Patents

Apparatus for spraying printed circuit-board Download PDF

Info

Publication number
CN1269994C
CN1269994C CN 02107722 CN02107722A CN1269994C CN 1269994 C CN1269994 C CN 1269994C CN 02107722 CN02107722 CN 02107722 CN 02107722 A CN02107722 A CN 02107722A CN 1269994 C CN1269994 C CN 1269994C
Authority
CN
China
Prior art keywords
suction
printed circuit
circuit board
pcb
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 02107722
Other languages
Chinese (zh)
Other versions
CN1438361A (en
Inventor
D·赛菲尔特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universal PCB Equipment Co Ltd
Original Assignee
PILL REGISTERED BUSINESSMAN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27672143&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN1269994(C) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by PILL REGISTERED BUSINESSMAN filed Critical PILL REGISTERED BUSINESSMAN
Priority to CN 02107722 priority Critical patent/CN1269994C/en
Publication of CN1438361A publication Critical patent/CN1438361A/en
Application granted granted Critical
Publication of CN1269994C publication Critical patent/CN1269994C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

The present invention relates to a device used for carrying out spraying treatment on a printed circuit board, which is provided with a conveying device used for conveying a printed circuit board (2), wherein the plane of the printed circuit board penetrates through the conveying device and extends horizontally. A spraying nozzle (16) is arranged above a conveying plane (7) and is used for spraying liquid treatment media onto the upper surface of the printed circuit board (2). The spraying treatment device is provided with a suction device (26) which is capable of sucking the treatment media sprayed on the upper side (13) of the printed circuit board (2) in spraying treatment. The treatment media are prevented from blocking, and treatment operation with high quality and high output value can be realized by means of the method.

Description

Printed circuit board (PCB) is carried out the device of spraying
Technical field
The present invention relates to a kind of being used for carries out the device of spraying in the manufacturing processed of printed circuit board (PCB) to printed circuit board (PCB), and it has the e Foerderanlage that is used to carry printed circuit board (PCB), and this e Foerderanlage has the printed wiring board plane of horizontal alignment; Have the tuyere arrangement of the transporting flat top that is arranged on printed circuit board (PCB), this tuyere arrangement is used for spraying a kind of fluid handling media at the upside of printed circuit board (PCB), and this fluid handling media is stored in the storage vessel; Also has a suction unit that is used for siphoning away from the upside of printed circuit board (PCB) the treatment media of spraying at course of injection.
Background technology
A kind of such treatment unit is disclosed among the DE4121032A1.It for example is used for the printed circuit board (PCB) manufacturing printed circuit board (PCB) in the frame is carried out etch processes.In the printed circuit board (PCB) manufacturing, generally exist following problem, the treatment liq that is sprayed onto from above on the printed circuit board (PCB) of horizontal feed can not flow away fast enough, therefore, liquid can occur and stop up, this will cause inhomogeneous processing, even finally cause the substandard products of printed circuit board (PCB).In order to tackle this problem, in known this class device, always from top processed printed circuit board (PCB) is sprayed and aspirates simultaneously.Printed circuit board (PCB) is sprayed required liquid when passing described device, for example corrosive fluid, developing solution or washing fluid, and at this, course of injection and aspiration procedure begin simultaneously, finish simultaneously, and in framework, the liquid of spraying siphons away from the printed circuit board (PCB) top immediately.Prevent the obstruction of liquid by this method, hinder in common employing under the situation of installation method of liquid flooding technology that printed circuit board (PCB) separates with the liquid of remnants very effectively.Be appreciated that suction unit usually can not be with whole treatment media eliminatings.Yet, can select suction intensity like this, the force fluid eliminating effect of adjusting has very active influence to result.
In known treatment unit, suction function is produced by a vacuum pump, and this vacuum pump connects a container, and this container is used for the liquid-to-air component separating of will be aspirated.Air is discharged from, and isolated treatment media is sent to storage vessel, as new inject process.
In order in suction branch, air to be isolated from treatment media, need input not allow the cost of ignoring.The air that filters to isolate also enters atmosphere with it and needs equally very high cost.
DE19830212 discloses a kind of device of handled object, and described object for example is a printed circuit board (PCB).In this device, processed object is handled the bath translation to one carry, and make its rotation in described processing is bathed.A suction unit can aspirate the liquid that sticks on the object.By the device that is fit to, for example water jet pump produces in this required negative pressure.
Summary of the invention
Task of the present invention is under the prerequisite that keeps high-quality uniform printed circuit board (PCB) treatment process, reduces equipment cost and the cost of investment relevant with suction method.
This task is finished by a circulation loop that is equipped with a recycle pump, comprises a blowoff by recycle pump supply treatment media in this circulation loop, in the required negative pressure of suction one side formation pumping operation of this blowoff.
In this way, can in treatment unit, in a closed cycle loop, self produce the required negative pressure of suction.In blowoff, the round-robin treatment media is used to produce required suction function, therefore, also must carry out expensive air-separating technology air is separated with treatment media.Corresponding therewith, under the very high situation of aspiration, the cost of device is very little, thereby production cost is also very little.
Suitable is to design tuyere arrangement like this, makes it limit an inlet zone at least, and the suction district of suction unit is arranged at the place ahead of looking on the throughput direction of printed circuit board (PCB) and/or rear.If not only be provided with, and the suction district be set, then the best results of Pen Sheing at the rear of inlet zone in the place ahead of each inlet zone.Because in this case, the treatment media of spraying is not only taken away in front but also in the back reliably, and has prevented the formation of blocking.
A particularly advantageous form of implementation is that a plurality of inlet zones that separate each other one by one are set on the throughput direction of printed circuit board (PCB).The place ahead of each inlet zone and rear are provided with a suction district respectively, and two suction districts are separately positioned on both sides.
Particularly, suction unit designs like this, and its suction function extends on the whole width of printed circuit board (PCB).
Suction unit preferably has a suction nozzle with battery unit device, its be set directly at printed circuit board (PCB) transporting flat the top and have at least one suction nozzle with battery unit unit, described suction nozzle with battery unit unit is made of perpendicular to suction nozzle with battery unit that transporting flat extends one or several.In the special simple proposal, described suction nozzle with battery unit unit is made of a plurality of suction tubes on a structure, and suction tube has one or several slit-like opening, and suction nozzle with battery unit is just represented in these holes.
The e Foerderanlage of printed circuit board (PCB) has lower roller, and in injection and aspiration procedure, printed circuit board (PCB) moves on these rollers.In addition upper roller can be set, the upper surface of these roller contact print circuit cards so that guide printed circuit board (PCB) exactly, thereby guarantees and guarantees with respect to the reliable location from top suction effect.Last suction roll can move by in the vertical direction, so that automatically adapt to the thickness of each printed circuit board (PCB).
If suction unit is designed so that it only works a suction district, perhaps work in the several suction districts that on throughput direction, separate, then can the suction nozzle with battery unit unit that extend perpendicular to throughput direction be set at least one suction district, such suction nozzle with battery unit unit preferably all is set in each suction district, suction tube for example, not only there is conveying roller its front, and also there is conveying roller its back.In each suction nozzle with battery unit unit one cooperates with adjacent upper roller and to constitute the independent pump unit operated, and such pump unit can be independent of other pump unit and install and change.
Conveying roller can for example be made of one roller, and these one rollers have common axis of rotation, and spaced from each other, but also can adopt the design of roller.
Description of drawings
For a more detailed description below in conjunction with accompanying drawing to the present invention.
Fig. 1 illustrates the side-view of first structure formation of device of the present invention, and this figure simplifies to a great extent;
Fig. 2 shows the part II that encloses with long and short dash line among Fig. 1 enlargedly;
Fig. 3 illustrates the vertical view of the part III among Fig. 2.
Embodiment
Treatment unit to number 1 expression shown in Figure 1 is the device that is used for printed circuit board (PCB) is carried out inject process in printed circuit board (PCB) processing.For example, this device is used for printed circuit board (PCB) is carried out etch processes, development treatment and/or flushing processing.
Preferably, treatment unit 1 is an inject process assembly, that is, be an assembly type unit, and it can form a device in mode arbitrarily with another work package.
Treatment unit 1 has a housing 3, its inner processing space 4 that limits.Processed printed circuit board (PCB) 2 passes on the direction 5 that an arrow shows handles space 4.E Foerderanlage 6 limits a horizontally extending transporting flat 7, and the plane of the printed circuit board (PCB) 2 of same horizontal alignment is passed on this plane on throughput direction 5.
In the present embodiment, e Foerderanlage 6 comprises some lower rollers 8, and these rollers constitute a roller-way, and can adjust, they to small part be drive roll, thereby printed circuit board (PCB) is fed forward.In passing the process of handling space 4, the flat downside of printed circuit board (PCB) 2 be supported on lower roller 8 above, flatly support by it.
In addition, in the present embodiment, e Foerderanlage 6 has upper roller 12, and they distribute along this transporting flat on transporting flat 7, and the upside up 13 of the printed circuit board (PCB) 2 that passes treatment unit 1 is rolled.These upper rollers 12 preferably do not drive, and only are used for level attitude stable of printed circuit board (PCB) 2.They can have following compression functions.By means of the means that are not shown specifically among the figure, for example the turning axle that moves in vertical groove can guarantee that upper roller 12 moves vertically, to adjust its height, adapts to the thickness of printed circuit board (PCB).
In the process of carrying along transporting flat, printed circuit board (PCB) 2 generally be form a line one by one mobile.Their two big face sides are towards last or following.Passing treatment unit 1 is to carry out in a kind of mode that moves continuously.
When passing treatment unit 1, on printed circuit board (PCB) 2, spray a kind of liquid medium.Under the situation of etch processes, adopt a kind of corrosive liquid, it is based on a kind of cuprous chloride or a kind of alkaline medium.Adopt known method, make corrosive fluid erode unwanted copper composition of layer on the printed circuit board (PCB) upper surface, only keep the required conductor belt of conduction.In another kind of processing mode, adopt another kind of corresponding treatment solution.
Fluid handling media is ejected into the printed circuit board (PCB) face up of each printed circuit board (PCB) 2 with the form of spray beam 14 from above, this face is referred to as upside 13.Spray beam 14 is produced by some immobilized nozzles 15, and this nozzle combines with the tuyere arrangement 16 that also is referred to as nozzle member.This device is positioned at the top of handling the transporting flat 7 that space 4 printed circuit board (PCB)s 2 are passed.
All nozzles 15 only illustrate injection channel system 17 part, that be made of pipeline usually in the drawings briefly by one and connect with a supply pump 18, and supply pump is supplied with treatment media.Treatment media to number 22 expressions, is arranged in a storage vessel 23 of treatment unit 1 in Fig. 1, this container is positioned under the processing space 4 that is designed to processing vessel 24.Structural unit of processing vessel 24 and storage vessel 23 preferred formations, their fluids are communicated with, and spray into the treatment media of handling in the space 4 and can turn back in the storage vessel 23.In treating processes, treatment media keeps circulation by supply pump 18.
In addition, treatment unit 1 can also have another tuyere arrangement 25, and it is also by supply pump 18 feed flows, and is arranged under the transporting flat 7 of handling printed circuit board (PCB) 2 in the space 4.The lower surface of this another tuyere arrangement 25 jet printing circuit card 2 when treatment unit 1 running.
The problem that runs into when handling printed circuit board (PCB) 2 is the processing to up printed circuit board (PCB) face, and this face is in front with upside 13 expressions.Because the intensity of spray beam 14 is very big and output is very high, the treatment media of spraying can not flow away soon, therefore form liquid and stop up, thus the very long residence time that causes the treatment solution on the printed circuit board (PCB) upside 13.If as present embodiment, make the part of e Foerderanlage 6-cooperate with the upside 13 of printed circuit board (PCB) 2 for upper roller 12-at this, then this problem is obvious especially, because can produce extra resistance to the flowing away of treatment media of spraying like this.This problem does not occur when the downside of inject process printed circuit board (PCB) because treatment media under the effect of gravity towards the whereabouts.
In order to address the above problem, treatment unit 1 also is furnished with a suction unit 26, and its details is mainly shown in Fig. 1 and 2.It can be taken the treatment media of spraying from above away from the upside 13 of printed circuit board (PCB) 2, handled printed circuit board (PCB) 2 is also experiencing course of injection simultaneously.The overwhelming majority of the treatment media of spraying just is sucked device at once and takes away after being sprayed onto on the printed circuit board (PCB) 2, at this, preferably select one at least with the corresponding suction tube of injection capacity, therefore, in principle, all treatment media of spraying all are sucked away.Be appreciated that not to be that all treatment media of spraying all are sucked away usually, this is because their part can flow away from the lateral edge of printed circuit board (PCB) 2 and fall.
Be that treatment unit has one or preferred several inlet zones spaced from each other on throughput direction 5 27 accordingly with the design of tuyere arrangement 16.Inlet zone is positioned at a spray beam 14 and runs into transporting flat 7 or one on the position of the printed circuit board (PCB) 2 that moves on this plane.
Suction unit 26 is design so preferably, make each inlet zone 27 on the throughput direction 5 between two suction districts 28 that suction takes place.Each inlet zone can be furnished with two suction districts 28, and their front and back on throughput direction 5 are provided with.
In addition, a spray beam 14 is dropping on (incidence zone 32) on the printed circuit board (PCB) 2 that passes inlet zone 27 on the width of whole printed circuit board (PCB) in inlet zone 27.At this, spray beam 14 is distributed in the incidence zone 32 shown in Fig. 2 and 3, forms two main flow 14a and 14b, and one of them is opposite with throughput direction 5, and another and throughput direction 5 and flow through the width b of whole printed circuit board (PCB) in the same way.Stream 14a and 14b arrive the suction district 28 that is arranged on inlet zone 27 front and back, are upwards taken away by suction unit 26 there.The treatment media that major part is sprayed is drained from the upper surface of printed circuit board (PCB) 2 by suction.The treatment media that remainder is sprayed may for example flow away perpendicular to the lateral edge of throughput direction from printed circuit board (PCB) 2, and is dropped in the processing vessel 24.
Preferably, take a main flow of two adjacent spray beam 14 simultaneously away from each suction district 28 between two adjacent inlet zones 27.
Preferably, the treatment media of spraying is carried out by means of the suction nozzle with battery unit device 33 of the top of a transporting flat 7 that is directly installed on printed circuit board (PCB) 2.In the present embodiment, this suction unit is included in that in each suction district 28 one is parallel to transporting flat 7 and perpendicular to the suction nozzle with battery unit unit 34 of throughput direction 5 (particularly rectangular with this direction), this suction nozzle with battery unit unit is suction tube 35 in a preferred embodiment.The downward of each suction tube 35 has at least one (preferably several) suction nozzle with battery unit 36 on the peripheral part of transporting flat 7, these suction nozzle with battery unit have covered the overall with b of printed circuit board (PCB) together.Preferably, suction nozzle with battery unit 36 is the slit-like opening on the suction tube 35, and under the situation of multiple setting shown in Figure 3, these slit-like openings can constitute a suction nozzle with battery unit row who overlaps with the extension of suction tube 35, overlap each other on pipe is vertical at this suggestion suction nozzle with battery unit 36.
Suction nozzle with battery unit unit 34 or suction tube 35 can be fixed on the fixed head 37 in the front side, can removably be fixed on the processing vessel 24 like this.
Relevant therewith, this favourable possibility below also having, that is, each suction nozzle with battery unit unit 34 constitutes the pump unit 38 that can operate separately with adjacent upper roller 12.Can realize a kind of modular assembly at an easy rate in this way.Particularly, can be two upper rollers 12 of each suction nozzle with battery unit unit 34 configuration, they extend perpendicular to throughput direction 5, and one of them is arranged on the place ahead of suction nozzle with battery unit unit 34 on throughput direction 5, and another is arranged on the rear.These upper rollers 12 can be supported in the distolateral maintenance 37 rotatably.
For example according to Fig. 3, upper roller 12 can be made of (lower roller also is so usually) independent roller 42, and these rollers have common axis of rotation 43, spaced from each other being distributed in one by one on the whole width b of printed circuit board (PCB).Yet should be appreciated that being formed on the principle of conveying roller group is random, for example also can be drum-type.Preferably such design, spray beam 14 has a kind of like this possibility after striking printed circuit board (PCB) 2 and reflection, that is, arrive in the range of influence of adjacent therewith suction nozzle with battery unit unit 34 through upper roller 12.
Suction nozzle with battery unit device 33 and a suction channel system 44 link, and like this, produce desirable suction effect in the zone of suction nozzle with battery unit 36.Suction channel system 44 is similar to injection channel system 17, is made of pipeline to small part, and is only schematically illustrated in the drawings.The tubing system that is fit to for example can be joined with fixed head 37, and the internal space of formation and each suction tube that distributes 35 connects like this.Be understandable that, also can directly connect.
The suction side of suction channel system 44 and a blowoff 45 link, and this blowoff for example is arranged on the storage vessel 23 interior or suitable positions in the treatment unit 1.Blowoff 45 is connected on outside the circulation loop 46, and this circulation loop is furnished with a recycle pump 47.Circulation loop 46 seals, and at this, recycle pump 47 is suction process medium 22 from storage vessel 23, and effusive medium is got back to again in the storage vessel 23 from blowoff 45.In working cycle, the effect of blowoff 45 is to make the round-robin treatment media form a negative pressure on the suction joint 48 of blowoff 45, and this negative pressure further guides treatment media to suction nozzle with battery unit device 33 by suction channel system 44.
According to illustrated principle of work, the treatment media of taking away from the upside of printed circuit board (PCB) 2 also sends back to the storage vessel 23 by the suction joint 48 of blowoff 45.
Therefore, the entire treatment medium has the closed circulation loop of an inside, and pumping equipment is outside this circulation loop, and separation or filtration procedure are unnecessary.
On blowoff 45, dispose a Venturi tube in known manner.In order to satisfy power requirement, a plurality of such Venturi tubes can at will be set, suction nozzle with battery unit device 33 can also be provided by staged, the negative pressure that provide individually at different levels.
Illustrated treatment unit has been showed a kind of favourable form of implementation, in this form of implementation, the suction district 28 of direct neighbor approximately separates 10 centimetres on throughput direction 5, measure on same direction, and the beamwidth of the spray beam 14 of extending between this is greatly between 5 millimeters to 15 millimeters.

Claims (17)

1. be used for it being carried out the device of inject process in the printed circuit board (PCB) course of processing, has the e Foerderanlage (6) that is used to carry printed circuit board (PCB) (2) on the printed wiring board plane of level, to move, the top of a transporting flat (7) that is arranged on printed circuit board (PCB) (2) also is used for spraying a kind of tuyere arrangement (16) that is stored in the fluid handling media of storage vessel (23) at the upside (13) of printed circuit board (PCB) (2), a suction unit (26) that is used for aspirating the treatment media of the upside that is ejected into printed circuit board (PCB) (2) in the inject process process, it is characterized in that a circulation loop (46) that has a recycle pump (47), this loop comprises that one provides the blowoff (45) of treatment media by recycle pump (47), forms the required negative pressure of pumping operation in the suction side of this blowoff (45).
2. device as claimed in claim 1, it is characterized in that: comprise an inlet zone (27) that is limited by tuyere arrangement (16) at least, suction unit (26) has the suction district (28) that is positioned at before or after the inlet zone (27) on the throughput direction (5) of printed circuit board (PCB) (2).
3. device as claimed in claim 2 is characterized in that: be provided with a plurality of inlet zones that separate each other (27) on the throughput direction of printed circuit board (PCB) (2), respectively establish a suction district (28) before and after it.
4. as each device among the claim 1-3, it is characterized in that: suction unit (26) is designed so that its suction function reaches the width of whole printed circuit board (PCB).
5. as each device in the claim 1 to 3, it is characterized in that: suction unit (26) has a suction nozzle with battery unit device (33), its be positioned at printed circuit board (PCB) (2) transporting flat (7) directly over.
6. device as claimed in claim 5 is characterized in that: suction nozzle with battery unit device (33) has at least one suction nozzle with battery unit unit (34) that is made of one or more suction nozzle with battery unit (36) that extend perpendicular to throughput direction (5).
7. device as claimed in claim 6 is characterized in that: suction nozzle with battery unit device (33) is made of a suction tube (35) that has one or more suction nozzle with battery unit (36), and this suction tube extends perpendicular to throughput direction (5) in the top of transporting flat (7).
8. as the device of claim 6 or 7, it is characterized in that: each suction nozzle with battery unit (36) is made of a slit-like opening.
9. as each device in the claim 1 to 3, it is characterized in that: lower roller (8) is set in order to limit transporting flat (7), these lower roller supporting printing boards (2), upper roller (12) also is set, they can be from top contact print circuit card (2), and in the vertical direction is removable, so that adapt to the thickness of each printed circuit board (PCB).
10. device as claimed in claim 9, it is characterized in that: suction unit (26) is gone up effectively in the suction district (28) that one or several separates on throughput direction (5), in at least one suction district (28), be a suction nozzle with battery unit unit (34) that extends perpendicular to throughput direction (5) be provided with adjacent before or after upper roller (12).
11. the device as claim 10 is characterized in that: the pump unit that can operate separately (38) is formed with adjacent upper roller (12) at least one suction nozzle with battery unit unit (34).
12. as each device in the claim 1 to 3, it is characterized in that: it constitutes a spraying assembly.
13. as each device in the claim 1 to 3, it is characterized in that: described inject process is that a kind of etch processes, a kind of development treatment and/or a flushing are handled.
14. as each device in the claim 1 to 3, it is characterized in that: a storage vessel (23) that is used to receive the inject process medium is set, and the treatment media of taking away also is transported in this container.
15. as each device in the claim 1 to 3, it is characterized in that: blowoff (45) is contained in the storage vessel (23).
16. as each device in the claim 1 to 3, it is characterized in that: suction unit (26) has a suction nozzle with battery unit device (33), this device is provided by staged, the negative pressure that provide individually at different levels.
17. as each device in the claim 1 to 3, it is characterized in that: blowoff (45) is furnished with a plurality of Venturi tubes.
CN 02107722 2002-02-11 2002-02-11 Apparatus for spraying printed circuit-board Expired - Lifetime CN1269994C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 02107722 CN1269994C (en) 2002-02-11 2002-02-11 Apparatus for spraying printed circuit-board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 02107722 CN1269994C (en) 2002-02-11 2002-02-11 Apparatus for spraying printed circuit-board

Publications (2)

Publication Number Publication Date
CN1438361A CN1438361A (en) 2003-08-27
CN1269994C true CN1269994C (en) 2006-08-16

Family

ID=27672143

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 02107722 Expired - Lifetime CN1269994C (en) 2002-02-11 2002-02-11 Apparatus for spraying printed circuit-board

Country Status (1)

Country Link
CN (1) CN1269994C (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004002421A1 (en) * 2004-01-16 2005-08-18 Atotech Deutschland Gmbh nozzle assembly
CN102131349B (en) * 2010-01-14 2013-10-16 富葵精密组件(深圳)有限公司 Rolling device and method for rolling circuit board
CN102161251A (en) * 2010-11-30 2011-08-24 梅州市志浩电子科技有限公司 Film sticking equipment and film sticking process using same
CN103369850B (en) * 2012-03-30 2016-08-03 北大方正集团有限公司 Pcb spray etching production line
CN105200425B (en) * 2015-09-28 2018-05-18 惠州市特创电子科技有限公司 Etching apparatus
DE102015221646A1 (en) * 2015-11-04 2017-05-04 Gebr. Schmid Gmbh Treatment fluid suction device and etching device containing the same
CN109104821A (en) * 2018-08-27 2018-12-28 珠海研深科技有限公司 A kind of etch system
CN112822873A (en) * 2019-11-15 2021-05-18 宇泰和股份有限公司 High aspect ratio circuit board through hole chemical treatment / electrochemical treatment device
CN114143983B (en) * 2021-08-28 2024-04-05 深圳市赛姆烯金科技有限公司 Automatic manufacturing system and method for graphene metallization level of circuit board

Also Published As

Publication number Publication date
CN1438361A (en) 2003-08-27

Similar Documents

Publication Publication Date Title
KR101073340B1 (en) Substrate cleaning apparatus
CN1269994C (en) Apparatus for spraying printed circuit-board
KR101631420B1 (en) Device and method for the treatment of flat material to be treated
KR101503377B1 (en) Method and device for the wet chemical treatment of material feedstock
JP4117135B2 (en) Printed circuit board spray processing equipment
CN1633525A (en) Conveyor-type horizontal processing line and method for wet processing of workpieces
CN1278391C (en) Drying device
CN1447395A (en) Substrate processing apparatus
CN115213156A (en) Cleaning equipment and cleaning method
KR101218449B1 (en) Substrate processing apparatus
JPH1070103A (en) Semiconductor wafer wet-etching treatment device
CN1341489A (en) Pressure floatation device
CN1716531A (en) Substrate processor
KR101563229B1 (en) Extraction Roller Apparatus for Removing Puddling on Board in Wet Etching Process of Printed Circuit Board
KR101603504B1 (en) Extraction Apparatus for Removing Puddling on Board in Wet Etching Process of Printed Circuit Board
JP3901635B2 (en) Acid treatment equipment for plate materials
JP3173836U (en) Horizontal electrolytic plating apparatus provided with means for removing oxygen gas bubbles adhering to a plate-like workpiece
JP3382610B1 (en) Submerged plating system with plating solution jetting tube
JP4092971B2 (en) Surface treatment equipment for printed wiring boards
KR102545295B1 (en) Treatment fluid extraction device and etching device including the same
KR102432828B1 (en) Equipment for Treating Substrate
CN223056237U (en) Belt cleaning device that SMT paster processing line was used
CN112566383B (en) A kind of inverter motherboard etching equipment
CN1959951A (en) Carrying processing device
JP2004006631A (en) Substrate processing apparatus

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Assignee: Kai MEI COMPANY LIMITED

Assignor: Pill Registered Businessman

Contract record no.: 2010990000804

Denomination of invention: Apparatus for spraying printed circuit-board

Granted publication date: 20060816

License type: Exclusive License

Open date: 20030827

Record date: 20101009

ASS Succession or assignment of patent right

Owner name: ACER COMPUTER (CHINA) CO., LTD.

Free format text: FORMER OWNER: BEIDA FANGZHENG SCIENCE + TECHNOLOGY COMPUTER SYSTEM CO., LTD., SHANGHAI

Effective date: 20101029

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 102200 ROOM 204, SECONDARY BUILDING, FANGZHENG BUILDING, NO.9, SHANGDI STREET 5, HAIDIAN DISTRICT, BEIJING TO: 200001 3/F, NO.168, XIZANG MIDDLE ROAD, HUANGPU DISTRICT, SHANGHAI

TR01 Transfer of patent right

Effective date of registration: 20101104

Address after: Germany Wald auen

Patentee after: Pierre limited liability company

Address before: Orn Wald, Federal Republic of Germany

Patentee before: Pill Registered Businessman

ASS Succession or assignment of patent right

Owner name: UNIVERSE P. C. B. EQUIPMENT CO., LTD.

Free format text: FORMER OWNER: PEAL CO., LTD.

Effective date: 20130927

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; TO: HONG KONG, CHINA

TR01 Transfer of patent right

Effective date of registration: 20130927

Address after: Hongkong Road, No. 8 China Tun door center 15 floor, room 1510-1513, CIMB

Patentee after: Universal P.C.B. Equipment Ltd

Address before: Germany Wald auen

Patentee before: Pierre limited liability company

CX01 Expiry of patent term

Granted publication date: 20060816

CX01 Expiry of patent term