CN113280873A - Semiconductor cleaning equipment and solution flow monitoring device thereof - Google Patents
Semiconductor cleaning equipment and solution flow monitoring device thereof Download PDFInfo
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- CN113280873A CN113280873A CN202110671140.1A CN202110671140A CN113280873A CN 113280873 A CN113280873 A CN 113280873A CN 202110671140 A CN202110671140 A CN 202110671140A CN 113280873 A CN113280873 A CN 113280873A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/14—Casings, e.g. of special material
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Abstract
The embodiment of the application provides a solution flow monitoring device of semiconductor cleaning equipment. The solution flow monitoring device is arranged in a semiconductor cleaning device and used for monitoring the flow of an organic solution of the semiconductor cleaning device, and comprises: explosion-proof boxes and ultrasonic flow meters; the explosion-proof box is arranged in the semiconductor cleaning equipment, and a sealed accommodating space is arranged in the explosion-proof box; ultrasonic flowmeter sets up inside the accommodation space to ultrasonic flowmeter's inlet and liquid outlet all set up on the box wall of explosion-proof box, and ultrasonic flowmeter's axial sets up along the horizontal direction, and inlet and liquid outlet have one in ultrasonic flowmeter's axial and predetermine the interval, predetermine interval more than or equal to 108 millimeters, and less than or equal to 115 millimeters. The embodiment of the application can avoid bending the pipeline connected with the ultrasonic flowmeter, and the horizontal arrangement of the ultrasonic flowmeter can greatly reduce the content of bubbles in the organic solution, so that the detection accuracy is improved.
Description
Technical Field
The application relates to the technical field of semiconductor processing, in particular to a semiconductor cleaning device and a solution flow monitoring device thereof.
Background
At present, with the rapid development of the field of domestic semiconductor cleaning equipment, customers put higher requirements on the safety performance of the semiconductor cleaning equipment. The semiconductor cleaning equipment adopting the organic solution is used for removing etching glue on a special medium or a metal surface on a wafer, the organic solution is usually EKC265, NMP, ST250 and other solutions, and in practical application, the organic solution can generate a large amount of volatile gas, and the volatile gas is flammable and explosive in chemical characteristics, so that the semiconductor cleaning equipment needs to adopt a metal shell, and key parts inside the semiconductor cleaning equipment need to pass related explosion-proof level certification. In order to effectively monitor the flow of the organic solution, a flow meter is required to be arranged on a circulation pipeline in the semiconductor cleaning equipment to monitor the flow of the organic solution in the circulation pipeline and a process tank, so that the problem of unqualified quality such as standard exceeding of particles (particles) generated on a wafer is avoided.
In the prior art, the flow meter is usually arranged near a process tank in the semiconductor cleaning equipment, and a cable of the flow meter needs to pass through an air path area in the semiconductor cleaning equipment and then is connected with an electrical box. In the actual use process, because the flowmeter is laterally placed and is matched with the structure of the multiple bent pipelines, a large amount of bubbles can be generated in the organic solution, and the bubbles can block the traveling route of ultrasonic waves emitted by the flowmeter, so that the detection accuracy of the flowmeter is reduced.
Disclosure of Invention
The application aims at the defects of the prior art and provides a semiconductor cleaning device and a solution flow monitoring device thereof, which are used for solving the technical problem that the flow meter in the prior art is low in detection accuracy.
In a first aspect, an embodiment of the present application provides a solution flow monitoring device for a semiconductor cleaning apparatus, which is disposed in the semiconductor cleaning apparatus, and is used for performing flow monitoring on an organic solution of the semiconductor cleaning apparatus, and the solution flow monitoring device includes: explosion-proof boxes and ultrasonic flow meters; the explosion-proof box is arranged in the semiconductor cleaning equipment, and a sealed accommodating space is formed in the explosion-proof box; the ultrasonic flowmeter set up in inside the accommodation space to ultrasonic flowmeter's inlet and liquid outlet all set up in on the box wall of explosion-proof box, ultrasonic flowmeter's axial sets up along the horizontal direction, the inlet reaches the liquid outlet is in ultrasonic flowmeter's the axial has a preset interval, preset interval more than or equal to 108 millimeters, and less than or equal to 115 millimeters.
In an embodiment of the present application, a cable of the ultrasonic flowmeter extends out of the accommodating space to be connected with an electrical box of the semiconductor cleaning device; the solution flow monitoring device further comprises a shielding pipe assembly, wherein two ends of the shielding pipe assembly are respectively connected with the explosion-proof box and the electrical box in a sealing mode and used for shielding and sealing a cable of the ultrasonic flowmeter.
In an embodiment of the present application, the predetermined distance is 110 mm.
In an embodiment of the present application, the explosion-proof box is disposed in a liquid medicine area of the semiconductor cleaning apparatus, and the liquid inlet and the liquid outlet are respectively provided with a straight connecting pipe for connecting with an organic solution supply source and a heater of the semiconductor cleaning apparatus.
In an embodiment of this application, ultrasonic flowmeter includes test tube and detector, the axial of test tube sets up along the horizontal direction, the inlet reaches the liquid outlet is followed the axial of test tube is arranged, two the detector install respectively in the both ends of test tube, be used for to transmission or receipt ultrasonic wave in the test tube.
In an embodiment of the present application, the shielding tube assembly includes a flexible tube and a ferrule connector, two ends of the flexible tube are respectively connected to the explosion-proof box and the electrical box through the ferrule connector, and the flexible tube is used for nesting a cable of the ultrasonic flow meter.
In one embodiment of the present application, the flexible tube includes a bellows structure made of corrosion-resistant material.
In an embodiment of this application, the cutting ferrule connects the cutting ferrule that is the metal material to the one end that the cutting ferrule connects with explosion-proof box reaches electric box adopts spiro union mode sealing connection, the other end with flexible pipe adopts joint mode sealing connection.
In an embodiment of this application, explosion-proof box is the cuboid structure of metal material, ultrasonic flowmeter's axial with the length direction parallel arrangement of explosion-proof box, the inlet reaches the liquid outlet all is located on the roof of explosion-proof box, the shielding pipe subassembly with the roof sealing connection of explosion-proof box.
In an embodiment of the application, the solution flow monitoring device further includes an air inlet joint and an air outlet joint, and the air inlet joint and the air outlet joint are respectively connected to the side wall of the explosion-proof box in a sealing manner, and are used for introducing and discharging protective gas into the accommodating space.
In an embodiment of the application, the bottom of the explosion-proof box is provided with a mounting plate, a plurality of connecting holes are formed in the periphery of the mounting plate, and the mounting plate is connected with the semiconductor cleaning equipment through a plurality of fasteners.
In a second aspect, embodiments of the present application provide a semiconductor cleaning apparatus including the solution flow rate monitoring device as provided in the first aspect.
The technical scheme provided by the embodiment of the application has the following beneficial technical effects:
this application embodiment is through setting up ultrasonic flowmeter in explosion-proof box, extends the setting with ultrasonic flowmeter axial along the horizontal direction to all set up ultrasonic flowmeter's inlet and liquid outlet on explosion-proof box's box wall, avoid buckling with the pipeline that ultrasonic flowmeter is connected, and the ultrasonic flowmeter level sets up the bubble content that can reduce by a wide margin in the organic solution, thereby improves the accuracy nature that detects. Further, the distance between the liquid inlet and the liquid outlet of the ultrasonic flowmeter is set to be 108-115 mm, and the detection accuracy of the ultrasonic flowmeter is in direct proportion to the preset distance between the liquid inlet and the liquid outlet, so that the detection accuracy of the ultrasonic flowmeter can be further improved by adopting the design.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic rear view of a semiconductor cleaning apparatus according to an embodiment of the present disclosure;
fig. 2 is a schematic front view of a solution flow monitoring device according to an embodiment of the present disclosure;
fig. 3 is a schematic top view of a solution flow monitoring device according to an embodiment of the present disclosure;
FIG. 4 is a schematic structural diagram of a flexible pipe according to an embodiment of the present disclosure;
fig. 5 is a schematic structural diagram of a ferrule adapter according to an embodiment of the present application.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.
The embodiment of the application provides a solution flow monitoring device of semiconductor cleaning equipment, set up in semiconductor cleaning equipment for carry out flow monitoring to semiconductor cleaning equipment's organic solution, this solution flow monitoring device's schematic structure diagram is shown as figure 1, includes: an explosion-proof box 1 and an ultrasonic flowmeter 2; the explosion-proof box 1 is arranged in the semiconductor cleaning equipment, and a sealed accommodating space 11 is arranged in the explosion-proof box 1; ultrasonic flowmeter 2 sets up inside accommodation space 11 to ultrasonic flowmeter 2's inlet 21 and liquid outlet 22 all set up on explosion-proof box 1's box wall, and ultrasonic flowmeter 2's axial sets up along the horizontal direction, and inlet 21 and liquid outlet 22 have a predetermined interval L in ultrasonic flowmeter 2's axial, predetermined interval L more than or equal to 108 millimeters, and less than or equal to 115 millimeters. Optionally, the preset spacing L is 110 mm.
As shown in fig. 1, the explosion-proof box 1 is specifically disposed inside the semiconductor cleaning device, and may be made of a metal material, and an accommodating space 11 may be formed inside the explosion-proof box 1. The ultrasonic flow meter 2 is disposed inside the accommodating space 11, and both the liquid inlet 21 and the liquid outlet 22 of the ultrasonic flow meter 2 may be disposed on a box wall of the explosion-proof box 1, so as to be connected to a circulation pipeline 102 of the semiconductor cleaning apparatus. The explosion-proof case 1 may be provided to extend in the horizontal direction so that the axial direction of the ultrasonic flowmeter 2 is provided in the horizontal direction. The liquid inlet 21 and the liquid outlet 22 can be both located on the same side of the explosion-proof box 1, so that the pipeline connected with the ultrasonic flowmeter 2 is prevented from being bent, and the detection accuracy is improved. Further, the ultrasonic flowmeter 2 specifically adopts the principle of ultrasonic reflection, when the organic solution from the liquid inlet 21 to the liquid outlet 22 flows, the time for transmitting the ultrasonic wave emitted by the ultrasonic flowmeter 2 from the liquid inlet 21 to the liquid outlet 22 is different from the time for transmitting the ultrasonic wave from the liquid outlet 22 to the liquid inlet 21 (influenced by the resistance of the organic solution), the flow velocity of the organic solution can be calculated according to the time difference between the two, and further the specific flow of the organic solution can be calculated and deduced. Because the ultrasonic wave perception will reflect behind the organic solution, and the bubble in the organic solution can influence ultrasonic flowmeter 2's the detection precision, consequently reduce the bubble in the organic solution and can improve ultrasonic flowmeter 2's the detection precision, detect the precision and still predetermine interval L with inlet 21 and outlet 22 and be directly proportional. Through experiments and calculation, the content of bubbles in the organic solution can be greatly reduced by horizontally arranging the ultrasonic flowmeter 2, so that the detection accuracy is greatly improved. In addition, setting the preset intervals L to be 108, 109, 110, 112, 113, and 115 millimeters can further reduce the bubble content in the organic solution, thereby further improving the detection accuracy.
This application embodiment is through setting up ultrasonic flowmeter in explosion-proof box, extends the setting with ultrasonic flowmeter axial along the horizontal direction to all set up ultrasonic flowmeter's inlet and liquid outlet on explosion-proof box's box wall, avoid buckling with the pipeline that ultrasonic flowmeter is connected, and ultrasonic flowmeter level sets up and can also reduce the bubble content in the organic solution by a wide margin, thereby improves the accuracy nature that detects. Further, the distance between the liquid inlet and the liquid outlet of the ultrasonic flowmeter is set to be 108-115 mm, and the detection accuracy of the ultrasonic flowmeter is in direct proportion to the preset distance between the liquid inlet and the liquid outlet, so that the detection accuracy of the ultrasonic flowmeter can be further improved by adopting the design.
It should be noted that the embodiment of the present application does not limit the specific material and the installation manner of the explosion-proof box 1, for example, the explosion-proof box 1 may be made of a non-metal material having a certain strength, and the extending direction of the explosion-proof box 1 may be in other directions as long as the ultrasonic flow meter 2 is installed in the horizontal direction. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
In an embodiment of the present application, as shown in fig. 1, the cable 23 of the ultrasonic flow meter 2 extends out of the accommodating space 11 and is connected to an electrical box 101 of the semiconductor cleaning apparatus; the solution flow monitoring device further comprises a shielding pipe assembly 3, wherein two ends of the shielding pipe assembly 3 are respectively connected with the explosion-proof box 1 and the electric box 101 in a sealing mode and used for shielding and sealing a cable 23 of the ultrasonic flowmeter 2. Specifically, the ultrasonic flowmeter 2 is provided with cables 23 for power supply and signal transmission at both ends, the cables 23 can extend out of the accommodating space 11 through the top wall of the explosion-proof box 1 and are connected with an electrical box 101 of the semiconductor cleaning equipment, and the electrical box 101 is used for storing electrical components of the semiconductor cleaning equipment so as to realize power supply and transmission of detection signals. The shielding tube assembly 3 is made of an insulating material, and two ends of the shielding tube assembly are respectively connected with the explosion-proof box 1 and the electrical box 101 in a sealing manner, and the cable 23 is inserted into the shielding tube assembly 3. In practical application, when the volatile gas solubility of the organic solution is high, the ultrasonic flowmeter 2 is arranged in the sealed accommodating space 11, so that the ultrasonic flowmeter 2 is prevented from contacting with the volatile gas, and the ultrasonic flowmeter 2 is prevented from igniting or igniting the volatile gas due to static electricity and electric sparks; since the cable 23 is provided in the shield tube assembly 3, it is possible to prevent static electricity and electric spark generated when the cable 23 is operated from igniting or exploding volatile gas. By adopting the design, the ultrasonic flowmeter 2 is completely isolated from volatile gas of organic solution, and the ultrasonic flowmeter 2 and a cable thereof are prevented from generating static electricity and electric sparks to ignite or detonate the volatile gas, so that the implementation safety of the application is greatly improved.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, the explosion-proof box 1 is disposed in a chemical liquid region 104 of the semiconductor cleaning apparatus, and the liquid inlet 21 and the liquid outlet 22 are respectively provided with a straight connecting pipe 24 for connecting with an organic solution supply source 105 and a heater 106 of the semiconductor cleaning apparatus.
As shown in fig. 1 and 2, a process tank (not shown) is disposed on the front side of the semiconductor cleaning apparatus, an electrical box 101, a gas path region 103 and a chemical solution region 104 are sequentially disposed on the rear side from top to bottom, the gas path region 103 can recover volatile gas and other gases generated from the process tank, and the chemical solution region 104 is provided with a circulation pipeline 102, an organic solution supply source 105 and a heater 106 for supplying an organic solution to the process tank. Explosion-proof box 1 specifically can set up in liquid medicine district 104, and explosion-proof box 1 wraps up ultrasonic flowmeter 2, and two pipelines on the ultrasonic flowmeter 2 are respectively through the box wall sealing connection of spiral shell dress cassette 25 with explosion-proof box 1 to make inlet 21 and liquid outlet 22 set up on the box wall of explosion-proof box 1. The aperture of screw dress cassette 25 matches with the pipe diameter of two pipelines of ultrasonic flowmeter 2 to realize closely laminating and guarantee the leakproofness, but this application implementation does not take this as the limit, and two pipelines of ultrasonic flowmeter 2 can directly weld with explosion-proof box 1 for example. The liquid inlet 21 and the liquid outlet 22 of the ultrasonic flowmeter 2 are provided with straight connecting pipes 24 to be connected to an organic solution supply source 105 and a heater 106 through a circulation pipe 102, respectively. One end of the direct connecting pipe 24 is hermetically connected with the liquid inlet 21 and the liquid outlet 22, and the other end of the direct connecting pipe is connected with the circulating pipeline 102, so that too many bent joints are prevented from being used for local arrangement, the organic solution flows more smoothly, and bubbles in the pipeline are greatly reduced to improve the detection accuracy. By adopting the design, the circulating pipeline 102 and the cable 23 of the ultrasonic flowmeter 2 are reasonable in layout, so that bubbles in the circulating pipeline 102 are reduced, the detection accuracy is further improved, and the embodiment of the application is convenient to disassemble, assemble and maintain. It should be noted that, the embodiment of the present application does not limit the specific position of the explosion-proof box 1, and a person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, the ultrasonic flowmeter includes a detecting tube 26 and two detectors 27, the detecting tube 26 is disposed along a horizontal direction, the liquid inlet and the liquid outlet are arranged along an axial direction of the detecting tube 26, and the two detectors 27 are respectively mounted at two ends of the detecting tube 26 for transmitting or receiving ultrasonic waves into the detecting tube 26.
As shown in fig. 1 and 2, the detection tube 26 may have a circular tubular structure, and both ends of the detection tube 26 are sealed by two mounting seats 261. The two detectors 27 are respectively arranged at the tops of the two mounting seats 261, the top of each of the two mounting seats 261 is provided with a pipeline communicated with the detection tube 26, namely, the top ends of the two pipelines on the detection tube 26 are respectively connected with the box wall of the explosion-proof box 1 in a sealing manner through the screw clamping seat 25, so that the liquid inlet 21 and the liquid outlet 22 are arranged on the box wall of the explosion-proof box 1. In practical application, the organic solution enters the detection tube 26 from the liquid inlet 21 and then flows out from the liquid outlet 22, and the ultrasonic wave emitted by the detector 27 at the left end is received by the detector 27 at the right end to detect the time for the ultrasonic wave to be transmitted from the liquid inlet 21 to the liquid outlet 22; the ultrasonic wave emitted by the detector 27 at the right end is received by the detector 27 at the left end to detect the time for the ultrasonic wave to be transmitted from the liquid outlet 22 to the liquid inlet 21, and the flow velocity of the organic solution can be calculated according to the time difference between the two due to the difference of the time (influenced by the resistance of the organic solution), so that the specific flow of the organic solution can be calculated and deduced. By adopting the design, the structure of the embodiment of the application is simple, and the detection accuracy can be further improved.
In an embodiment of the present application, as shown in fig. 1 to 4, the shielding tube assembly 3 includes a flexible tube 31 and a ferrule 32, two ends of the flexible tube 31 are hermetically connected to the explosion-proof box 1 and the electrical box 101 through the ferrule 32, respectively, and the flexible tube 31 is used for nesting the cable 23 of the ultrasonic flowmeter 2. Optionally, the flexible tube 31 comprises a bellows structure of a corrosion resistant material. Optionally, the ferrule 32 is made of metal, and one end of the ferrule 32 is hermetically connected to the explosion-proof box 1 and the electrical box 101 by a screw connection method, and the other end of the ferrule is hermetically connected to the flexible tube 31 by a clamping connection method.
As shown in fig. 1 to 5, the flexible tube 31 is a tubular structure made of soluble Polytetrafluoroethylene (PFA) or Polytetrafluoroethylene (PTFE), and the above materials have the characteristics of acid and alkali resistance and reliable performance, so that the service life of the flexible tube 31 can be prolonged while the safety is improved, but the embodiment of the present application is not limited thereto, and the flexible tube 31 may be made of other corrosion-resistant materials. The concrete structure of flexible pipe 31 can also be set up to bellows structure to the external diameter of flexible pipe 31 is 9.53mm, the internal diameter is 7.53mm and the wall thickness is 1mm, but this application embodiment does not restrict its concrete specification, adopts this design to make flexible pipe 31 softer and bend radius less, thereby the wiring design of being convenient for, and then improves dismouting maintenance efficiency. One end of the ferrule connector 32 can be hermetically connected with the explosion-proof box 1 or the electrical box 101 through NPT threads, and the other end is hermetically connected with the end of the flexible tube 31 through a clamping manner, so as to realize the clamping and sealing of the ferrule connector 32 and the flexible tube 31, but the implementation of the present application is not limited thereto, and for example, the ferrule connector 32 can also be hermetically connected with the explosion-proof box 1 and the electrical box 101 through common threads. Because the shielding pipe assembly 3 is hermetically connected with the explosion-proof box 1, the protective gas in the explosion-proof box 1 is always kept in a positive pressure state.
In an embodiment of the present application, as shown in fig. 1 to fig. 3, the explosion-proof box 1 is a rectangular parallelepiped structure made of a metal material, the axial direction of the ultrasonic flow meter 2 is parallel to the length direction of the explosion-proof box 1, the liquid inlet 21 and the liquid outlet 22 are both located on the top wall of the explosion-proof box 1, and the shielding tube assembly 3 is hermetically connected to the top wall of the explosion-proof box 1. Specifically, the explosion-proof box 1 is a rectangular parallelepiped structure surrounded by a plurality of plate-shaped structures, and the plurality of plate-shaped structures are made of stainless steel or other metal materials. The length direction of explosion-proof box 1 sets up along the horizontal direction, and the axial of ultrasonic flowmeter 2 sets up with explosion-proof box 1's length direction parallel to save the space occupation of this application embodiment. Since the liquid inlet 21 and the liquid outlet 22 are both located on the top wall of the explosion-proof box 1, the shielding tube assembly 3 is connected with the top wall of the explosion-proof box 1 in a sealing manner, i.e. the cable 23 of the ultrasonic flowmeter extends out of the top wall of the explosion-proof box 1. By adopting the design, the pipeline of the embodiment of the application is more convenient to arrange, and the occupied space is further reduced.
In an embodiment of the present application, as shown in fig. 1 to 3, the solution flow monitoring device further includes an air inlet joint 41 and an air outlet joint 42, where the air inlet joint 41 and the air outlet joint 42 are respectively connected to the sidewalls of two end portions of the explosion-proof box 1 in a sealing manner, and are used for introducing and discharging the shielding gas into and out of the accommodating space 11. Particularly, explosion-proof box 1 both ends are provided with inlet connector 41 and air outlet connector 42 respectively, and both can all be through threaded mode and explosion-proof box 1 sealing connection, and inlet connector 41 can communicate factory affair nitrogen gas trachea, and air outlet connector 42 then can be connected to the exhaust system of factory affair to realize the circulation of protective gas in explosion-proof box 1, thereby further improve the security performance of this application embodiment. However, the embodiments of the present application are not limited to a specific type of the shielding gas, and for example, the shielding gas may be other inert gases.
In an embodiment of the present application, as shown in fig. 1 to 3, a mounting plate 12 is disposed at the bottom of the explosion-proof box 1, a plurality of connecting holes 13 are disposed at the periphery of the mounting plate 12, and the mounting plate 12 is connected to the semiconductor cleaning apparatus by a plurality of fasteners (not shown). The mounting plate 12 is a plate-shaped structure made of metal, and may be disposed at the bottom of the explosion-proof box 1 by using a plurality of bolts, but the embodiment of the present application is not limited thereto. The length of the mounting plate 12 is greater than the length of the explosion-proof box 1, for example, and a plurality of connecting holes 13 are provided at the peripheries of both ends thereof, and the connecting holes 13 may be through holes, but the embodiment of the present application is not limited thereto. The plurality of fasteners are specifically arranged corresponding to the plurality of connecting holes 13, the fasteners can be bolts, and the fasteners are connected with the semiconductor cleaning equipment after penetrating through the connecting holes 13. By adopting the design, the mounting plate 12 is arranged in the semiconductor cleaning equipment through the connecting hole 13 and the fastener, so that the embodiment of the application can be arranged at any suitable position in the semiconductor cleaning equipment, the flexibility of the embodiment of the application is greatly improved, the dismounting maintenance efficiency is greatly improved, and the occupied space is saved.
Based on the same inventive concept, embodiments of the present application provide a semiconductor cleaning apparatus including a solution flow rate monitoring device as provided in the above embodiments.
By applying the embodiment of the application, at least the following beneficial effects can be realized:
this application embodiment is through setting up ultrasonic flowmeter in explosion-proof box, extends the setting with ultrasonic flowmeter axial along the horizontal direction to all set up ultrasonic flowmeter's inlet and liquid outlet on explosion-proof box's box wall, avoid buckling with the pipeline that ultrasonic flowmeter is connected, and ultrasonic flowmeter level sets up and can also reduce the bubble content in the organic solution by a wide margin, thereby improves the accuracy nature that detects. Further, the distance between the liquid inlet and the liquid outlet of the ultrasonic flowmeter is set to be 108-115 mm, and the detection accuracy of the ultrasonic flowmeter is in direct proportion to the preset distance between the liquid inlet and the liquid outlet, so that the detection accuracy of the ultrasonic flowmeter can be further improved by adopting the design.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (12)
1. A solution flow monitoring device of a semiconductor cleaning device, which is arranged in the semiconductor cleaning device and is used for monitoring the flow of an organic solution of the semiconductor cleaning device, is characterized by comprising: explosion-proof boxes and ultrasonic flow meters;
the explosion-proof box is arranged in the semiconductor cleaning equipment, and a sealed accommodating space is formed in the explosion-proof box;
the ultrasonic flowmeter set up in inside the accommodation space to ultrasonic flowmeter's inlet and liquid outlet all set up in on the box wall of explosion-proof box, ultrasonic flowmeter's axial sets up along the horizontal direction, the inlet reaches the liquid outlet is in ultrasonic flowmeter's the axial has a preset interval, preset interval more than or equal to 108 millimeters, and less than or equal to 115 millimeters.
2. The solution flow rate monitoring device according to claim 1, wherein a cable of the ultrasonic flowmeter extends out of the accommodating space to be connected with an electrical box of the semiconductor cleaning equipment;
the solution flow monitoring device further comprises a shielding pipe assembly, wherein two ends of the shielding pipe assembly are respectively connected with the explosion-proof box and the electrical box in a sealing mode and used for shielding and sealing a cable of the ultrasonic flowmeter.
3. The solution flow rate monitoring device according to claim 1, wherein the predetermined distance is 110 mm.
4. The solution flow rate monitoring device according to claim 1, wherein the explosion-proof box is disposed in a chemical solution area of the semiconductor cleaning apparatus, and the liquid inlet and the liquid outlet are respectively provided with a straight connecting pipe for connecting with an organic solution supply source and a heater of the semiconductor cleaning apparatus.
5. The solution flow rate monitoring device according to claim 1, wherein the ultrasonic flowmeter comprises a detecting tube and two detectors, the detecting tube is disposed along a horizontal direction, the liquid inlet and the liquid outlet are arranged along an axial direction of the detecting tube, and the two detectors are respectively mounted at two ends of the detecting tube for transmitting or receiving ultrasonic waves into the detecting tube.
6. The solution flow monitoring device according to claim 2, wherein the shielding tube assembly comprises a flexible tube and a ferrule fitting, two ends of the flexible tube are hermetically connected with the explosion-proof box and the electrical box through the ferrule fitting respectively, and the flexible tube is used for nesting cables of the ultrasonic flow meter.
7. The solution flow monitoring device according to claim 6, wherein the flexible tube comprises a bellows structure of corrosion resistant material.
8. The solution flow monitoring device according to claim 6, wherein the ferrule connector is made of metal, and one end of the ferrule connector is hermetically connected to the explosion-proof box and the electrical box by screw connection, and the other end of the ferrule connector is hermetically connected to the flexible tube by clamping connection.
9. The solution flow rate monitoring device according to claim 2, wherein the explosion-proof box is a rectangular parallelepiped made of metal, the axial direction of the ultrasonic flowmeter is parallel to the length direction of the explosion-proof box, the liquid inlet and the liquid outlet are both located on the top wall of the explosion-proof box, and the shielding pipe assembly is hermetically connected to the top wall of the explosion-proof box.
10. The solution flow rate monitoring device according to claim 9, further comprising an inlet connector and an outlet connector, wherein the inlet connector and the outlet connector are respectively connected to the sidewall of the explosion-proof box in a sealing manner, and are used for introducing and discharging a shielding gas into and out of the accommodating space.
11. The solution flow rate monitoring device according to any one of claims 1 to 10, wherein a mounting plate is provided at a bottom of the explosion-proof box, and a plurality of connection holes are provided at a periphery of the mounting plate for providing a plurality of fasteners to connect with the semiconductor cleaning apparatus.
12. A semiconductor cleaning apparatus comprising the solution flow rate monitoring device according to any one of claims 1 to 11.
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| CN202110671140.1A CN113280873A (en) | 2021-06-17 | 2021-06-17 | Semiconductor cleaning equipment and solution flow monitoring device thereof |
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| CN202110671140.1A CN113280873A (en) | 2021-06-17 | 2021-06-17 | Semiconductor cleaning equipment and solution flow monitoring device thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2025200995A1 (en) * | 2024-03-25 | 2025-10-02 | 北京北方华创微电子装备有限公司 | Semiconductor protection apparatus and semiconductor process device |
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