CN113091652B - A measuring system and method with roll angle self-correction function - Google Patents
A measuring system and method with roll angle self-correction function Download PDFInfo
- Publication number
- CN113091652B CN113091652B CN202110340492.9A CN202110340492A CN113091652B CN 113091652 B CN113091652 B CN 113091652B CN 202110340492 A CN202110340492 A CN 202110340492A CN 113091652 B CN113091652 B CN 113091652B
- Authority
- CN
- China
- Prior art keywords
- light
- quadrant
- photoelectric detector
- angle
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000005096 rolling process Methods 0.000 claims abstract description 34
- 238000012544 monitoring process Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 13
- 230000009977 dual effect Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention belongs to the technical field of motion precision measurement of linear working tables, and discloses a measuring system and a measuring method with a rolling angle self-correcting function. The mode of measuring the roll angle through two light beams needs to guarantee that two bundles of light are parallel in principle and can measure accurate roll angle error, however, because the right-angle reflecting mirror is installed on a small-size two-dimensional angle adjusting frame, its internal spring part is difficult to avoid having small change after a long time, and the laser itself is angle drift and other reasons, all can lead to producing small angle change between its two bundles of light, thereby make two light beams produce the measuring accuracy that the roll angle error is influenced by non-parallelism, the condition that two bundles of light produced non-parallelism is as shown in figure 4. The non-parallelism between the two beams of light can be reflected on two real collimators for measuring the pitch angle error, so that the change between the non-parallelism of the two beams of light can be monitored in real time through the double collimators, and then the change is compensated into a roll angle, so that the real roll angle error can be obtained.
Description
Technical Field
The invention belongs to the technical field of motion precision measurement of linear workbenches, and particularly relates to a five-degree-of-freedom error measurement system and method with a function of monitoring double-beam nonparallelism.
Background
With the development of modern science and technology, in the high-end manufacturing fields of aerospace, military and national defense, medical instruments and the like, because of extremely high requirements on the processing precision of parts, higher and higher requirements are put forward on the processing precision of a numerical control machine tool playing a role in core productivity. The precision of the linear workbench on the machine tool directly influences the machining precision of the numerical control machine tool, so that the error measurement of the linear workbench is a critical step for improving the machining precision of the machine tool.
When the linear worktable of the machine tool moves, because the machining process and the assembly mode have inevitable deviation, geometric errors with six degrees of freedom can be generated, as shown in figure 1, including a positioning error (delta) in the direction of a motion axisx) Error of two straightness (delta)ZAnd δ y), yaw angle error (ε)z) Pitch angle error (epsilon)y) And roll angle error (epsilon)x). Among the six errors, the roll angle error is the most difficult to measure. At present, at home and abroadThe rolling angle measurement methods developed can be roughly classified into three types, which are an interferometric method, a polarization method, and a geometric optical method. Although a large number of rolling angle measuring methods exist, the defects of difficult precision guarantee, difficult application realization, complicated optical path, impossible integration, overlarge volume and the like exist respectively. For example, based on an interferometry, Lee C designs a measuring system for measuring six-degree-of-freedom motion errors of an ultra-precise guide rail, wherein the angular resolution can reach 0.02' and the measuring range is shorter; in the roll angle error measurement based on the polarization method, the polarization difference measurement method using 1/4 wave plates as sensitive units is provided by the aid of the rectifier and the like, the method is simple in structure, but the requirements on the stability of a light source are high, and the roll angle sensitivity is not high; among the geometric methods, k.c. fan proposes a parallel dual beam method to measure roll angle indirectly, but this method has a very high requirement for parallelism between the two beams.
The self-developed five-freedom system adopts a double parallel beam method which has simple structure, is convenient to integrate and has low manufacturing cost to measure the rolling angle, and the double parallel beam method can accurately measure the rolling angle only by strictly ensuring the parallelism of double beams, so the monitoring of the non-parallelism of the double beams is particularly important.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a five-degree-of-freedom error measuring system and a method with a function of monitoring the non-parallelism of double beams, and the monitoring function is realized based on a double collimator so as to improve the measuring precision of the rolling angle error.
The specific technical scheme is as follows: a measuring system with a rolling angle self-correcting function comprises a semiconductor laser, a first beam splitter prism, a first right-angle reflector, a second beam splitter prism, a first four-quadrant photodetector, a first focusing lens, a second four-quadrant photodetector, a third beam splitter prism, a third four-quadrant photodetector, a second focusing lens, a fourth four-quadrant photodetector, a laser ranging module and a second beam splitter prism, wherein the first four-quadrant photodetector is positioned on the upper surface of the semiconductor laser;
the semiconductor laser, the first beam splitter prism and the right-angle reflecting mirror are arranged at the fixed end; the second beam splitter prism, the first four-quadrant photodetector, the first focusing lens, the second four-quadrant photodetector, the third beam splitter prism, the third four-quadrant photodetector, the second focusing lens, the fourth four-quadrant photodetector and the laser ranging module are arranged at the moving end;
the method comprises the steps that a light beam generated by a semiconductor laser is divided into two parts after passing through a first beam splitter prism, the transmission light of the light beam is emitted into a second beam splitter prism, the transmission light of the second beam splitter prism is received by a first four-quadrant photoelectric detector, the displacement of a light spot detected by the first four-quadrant photoelectric detector is used as the two-dimensional linearity error of a linear platform, the reflection light of the second beam splitter prism is emitted into a second four-quadrant photoelectric detector after passing through a first focusing lens, and the displacement of the light spot detected by the second four-quadrant photoelectric detector is used as the pitch angle error and the yaw angle error of the linear platform; reflected light of the first beam splitter prism is reflected by the right-angle reflector and then parallelly emitted into a third beam splitter prism, transmitted light of the first beam splitter prism is emitted into a third four-quadrant photoelectric detector, and a vertical direction straightness error measured by the third four-quadrant photoelectric detector and a vertical direction straightness error measured by the first four-quadrant photoelectric detector are subjected to difference processing to obtain a rolling angle error; the reflected light of the third beam splitting prism is reflected into a fourth quadrant photoelectric detector through the second focusing lens, and the fourth quadrant photoelectric detector is matched with the second quadrant photoelectric detector to play a role in monitoring the unparallel degree of the double beams; the laser ranging module is used for measuring the distance between the fixed end and the movable end in real time to realize the compensation of the rolling angle.
Because the right-angle reflecting mirror is arranged on the small two-dimensional angle adjusting frame, the internal spring part of the right-angle reflecting mirror is difficult to avoid small change after a long time, and the angle of the laser is floated, and other reasons can cause the reflected light to generate small angle change, so that the measurement precision of the rolling angle error is influenced by the non-parallelism of the two beams. Theoretically, the angle errors measured by the double collimator under the condition of leveling the double beams should be the same, namely the actual angle error of the guide rail. However, actually, the reading of the dual collimator deviates due to the installation error, and the difference between the two is the installation error. Under the normal test state of the five-degree-of-freedom system, the difference value of the double collimators is a fixed value, and when the difference value changes, the fact that the double collimators monitor that the parallelism of the double beams changes relative to the initial state is shown. The rolling angle error actually measured by the device is composed of the influence of the non-parallelism of the double beams on the rolling angle error and the actual rolling angle error of the guide rail due to the non-parallelism of the double beams. Therefore, the influence value of the non-parallelism of the double beams on the rolling angle error can be compensated to the rolling angle error, thereby realizing the improvement of the measurement of the rolling angle error of the guide rail.
When the roll angle is measured in a traditional mode, two light beams need to be adjusted to be in a parallel state through a level meter or other modes, when a roll angle error is generated, the positions of light spots on a first four quadrant and a third four quadrant can be changed, the measurement principle is as shown in an attached drawing 3, and the roll angle is expressed as:
in the formula (1), epsilonxIs the roll angle error; l is a fixed distance between the first four quadrant and the third four quadrant; y is1And y2The positions of the light spots in the vertical direction of the first four-quadrant and the third four-quadrant are respectively.
Therefore, to measure an accurate roll angle error, it is necessary to keep the parallel state of the two beams, however, in practical situations, because the right-angle mirror is mounted on the small two-dimensional angle adjusting bracket, the internal spring part thereof inevitably has a slight change after a long time, and the laser itself has an angle drift, etc., which all result in the non-parallelism of the two beams, and the state of the two beams is as shown in fig. 4.
The method for compensating the rolling angle error by adopting the measuring system with the rolling angle self-correcting function comprises the following steps:
step 1, monitoring the change of the non-parallelism;
when the first and second beams of light produce unevenness in the vertical direction, the indications of both the second and fourth quadrant photodetectors in the vertical direction are caused to change.
The values of roll angle are expressed as:
in the formula (2), Δ y1And Δ y2The changes in the four quadrant position readings due to the non-parallelism of the first and second beams, respectively, are expressed in relation to the non-parallelism as:
in the formula (3), θ1And theta2The non-parallelism of the first beam of light and the second beam of light generated in the vertical direction is respectively, and the readings of the non-parallelism are obtained by monitoring the collimator, namely the readings of the second four-quadrant and the fourth four-quadrant; d is the relative distance between the movable end and the fixed end and is obtained by the laser ranging module;
the roll angle error after compensation is expressed as:
according to the formula (4), the error of the roll angle indication caused by the non-parallelism of the two beams is related to the relative non-parallelism between the two beams, so that the roll angle can be compensated by monitoring the non-parallelism change of the two beams in the vertical direction in real time through a double collimator, namely the difference value between the second four quadrant and the third four quadrant.
The invention has the beneficial effects that: the measuring method adopts the semiconductor laser to measure the five-degree-of-freedom error, the designed optical path structure is simple, the cost is low, the integration is easy, and the double collimator is designed to monitor the influence of the non-parallelism of the double beams on the rolling angle error, so that the measuring precision of the rolling angle error is effectively improved.
Drawings
FIG. 1 is a schematic view of linear motion error of a guide rail;
in the figure: deltazAnd δ Y are straightness errors in the Z and Y directions, respectively; deltaxIs a positioning error; epsilonxIs the roll angle error; epsilonyIs the pitch angle error; epsilonzRespectively, the yaw angle error.
FIG. 2 is a diagram of an optical path of a five-DOF error measurement system with a function of monitoring the non-parallelism of two beams;
FIG. 3 is a schematic diagram of a principle of dual beam roll angle measurement;
in the figure: l is the distance between the first four quadrant photoelectric detectors and the third four quadrant photoelectric detectors; y is1Is the position of the first beam of light in the vertical direction of the first four-quadrant photodetector; y is2Is the position of the second beam of light in the vertical direction of the third four quadrant photodetector.
FIG. 4 is a schematic diagram illustrating the effect of dual beam non-parallelism on roll angle error based on dual collimator monitoring;
in the figure: 1, a semiconductor laser; 2 a first beam splitter prism; 3 a right angle mirror; 4 a second beam splitter prism; 5 a first four quadrant photodetector; 6 a first focusing lens; 7 a second four quadrant photodetector; 8 a third beam splitter prism; 9 a third four quadrant photodetector; 10 a second focusing lens; 11 a fourth quadrant photodetector; 12 laser ranging module; theta1And theta2The non-parallelism of the two beams of light in the vertical direction is generated respectively.
Detailed Description
The invention is described in further detail below with reference to the figures and examples in order to facilitate the understanding and implementation of the invention by those of ordinary skill in the art.
As shown in the attached figure 2, the technical scheme adopted by the invention is as follows: a five-degree-of-freedom error measuring system with a function of monitoring the non-parallelism of double beams comprises a semiconductor laser 1, a first beam splitter prism 2, a right-angle reflector 3, a second beam splitter prism 4, a first four-quadrant photodetector 5, a first focusing lens 6, a second four-quadrant photodetector 7, a third beam splitter prism 8, a third four-quadrant photodetector 9, a second focusing lens 10, a fourth four-quadrant photodetector 11 and a laser ranging module 12; the semiconductor laser 1, the first beam splitter prism 2 and the right-angle reflecting mirror 3 are arranged at the fixed end; a second beam splitter prism 4, a first four-quadrant photodetector 5, a first focusing lens 6, a second four-quadrant photodetector 7, a third beam splitter prism 8, a third four-quadrant photodetector 9, a second focusing lens 10, a fourth four-quadrant photodetector 11 and a laser ranging module 12 are arranged at the moving end; the fixed end is fixedly arranged on the plane of the linear workbench, and the movable end moves on the linear platform to be measured.
A light beam generated by the semiconductor laser is divided into two parts after passing through a first beam splitter prism, the transmission light of the light beam is transmitted into a second beam splitter prism, the transmission light of the second beam splitter prism is received by a first four-quadrant photodetector, the light spot displacement detected by the first four-quadrant photodetector is used as the two-dimensional straightness error of the linear platform, the reflected light of the second beam splitter prism is transmitted into a second four-quadrant photodetector after passing through a first focusing lens, and the light spot displacement detected by the second four-quadrant photodetector is used as the pitch angle error and the yaw angle error of the linear platform; and the reflected light of the first beam splitter prism is reflected by the right-angle reflector and then parallelly emitted into the third beam splitter prism, the transmitted light of the first beam splitter prism is emitted into the third four-quadrant photoelectric detector, and the vertical direction straightness error measured by the third four-quadrant photoelectric detector and the vertical direction straightness error measured by the first four-quadrant photoelectric detector are subjected to difference processing to obtain the rolling angle error. The reflected light of the third beam splitter prism is reflected into a fourth quadrant photoelectric detector through the second focusing lens, the fourth quadrant photoelectric detector and the second quadrant photoelectric detector are matched to play a role in monitoring the non-parallelism of the double beams, and then the non-parallelism is compensated to a rolling angle in real time so that a real rolling angle error can be obtained.
In experimental verification, a double light beam is firstly leveled by using a level gauge, then two light beams are adjusted to generate 2.2 ' of non-parallelism, then the two light beams are compensated to a rolling angle error according to different distances, the compensated rolling angle error is compared with the level gauge, the difference between the two rolling angle errors is within +/-1.5 ', and the error which is not compensated and can generate 60 ' with the level gauge can be generated at the maximum rolling angle error.
The five-degree-of-freedom error measurement system is low in cost, simple in designed optical path structure and convenient to integrate, can realize five-degree-of-freedom error measurement of a linear motion shaft, can monitor the non-parallelism of double beams particularly based on a double collimator, and effectively improves the measurement precision of the rolling angle error.
Claims (2)
1. A measuring system with a rolling angle self-correcting function is characterized by comprising a semiconductor laser (1), a first beam splitter prism (2), a first right-angle reflector (3), a second beam splitter prism (4), a first four-quadrant photodetector (5), a first focusing lens (6), a second four-quadrant photodetector (7), a third beam splitter prism (8), a third four-quadrant photodetector (9), a second focusing lens (10), a fourth four-quadrant photodetector (11) and a laser ranging module (12);
the semiconductor laser (1), the first light splitting prism (2) and the first right-angle reflecting mirror (3) are arranged at the fixed end; a second beam splitter prism (4), a first four-quadrant photodetector (5), a first focusing lens (6), a second four-quadrant photodetector (7), a third beam splitter prism (8), a third four-quadrant photodetector (9), a second focusing lens (10), a fourth four-quadrant photodetector (11) and a laser ranging module (12) are arranged at the moving end;
the light beam generated by the semiconductor laser is divided into two parts after passing through the first beam splitter prism, the transmitted light of the light beam is emitted into the second beam splitter prism, the transmitted light of the second beam splitter prism is received by the first four-quadrant photoelectric detector, and the light spot displacement detected by the first four-quadrant photoelectric detector is used as the two-dimensional linearity error of the linear platform; reflected light of the second beam splitting prism is reflected into a second four-quadrant photoelectric detector after passing through the first focusing lens, and light spot displacement detected by the second four-quadrant photoelectric detector is used as a pitch angle error and a yaw angle error of the linear platform; reflected light of the first beam splitter prism is reflected by the right-angle reflector and then parallelly emitted into a third beam splitter prism, transmitted light of the first beam splitter prism is emitted into a third four-quadrant photoelectric detector, and a vertical direction straightness error measured by the third four-quadrant photoelectric detector and a vertical direction straightness error measured by the first four-quadrant photoelectric detector are subjected to difference processing to obtain a rolling angle error; the reflected light of the third beam splitting prism is reflected into a fourth quadrant photoelectric detector through the second focusing lens, and the fourth quadrant photoelectric detector is matched with the second quadrant photoelectric detector to play a role in monitoring the unparallel degree of the double beams; the laser ranging module is used for measuring the distance between the fixed end and the movable end in real time to realize the compensation of the rolling angle.
2. A method of using the measuring system with roll angle self-correction function according to claim 1, characterized by comprising the steps of:
step 1, monitoring the change of the non-parallelism;
when the first and second beams of light are not parallel in the vertical direction, the indication of the second four-quadrant photoelectric detector (7) and the indication of the fourth four-quadrant photoelectric detector (11) in the vertical direction are changed;
the values of roll angle are expressed as:
in the formula (2), L is the distance between the first four-quadrant photodetector and the third four-quadrant photodetector; y is1Is the position of the first beam of light in the vertical direction of the first four-quadrant photodetector; y is2Is the position of the second beam of light in the vertical direction of the third four-quadrant photodetector; Δ y1And Δ y2The change in the four quadrant position readings due to the non-parallelism of the first and second beams of light, respectively, is expressed as:
in the formula (3), θ1And theta2The non-parallelism of the first beam of light and the second beam of light generated in the vertical direction is respectively obtained by reading monitoring of a second four-quadrant photoelectric detector (7) and a fourth four-quadrant photoelectric detector (11); d is the relative distance between the movable end and the fixed end and is obtained by the laser ranging module;
step 2, calculating the compensated rolling angle error;
the roll angle error after compensation is expressed as:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110340492.9A CN113091652B (en) | 2021-03-30 | 2021-03-30 | A measuring system and method with roll angle self-correction function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110340492.9A CN113091652B (en) | 2021-03-30 | 2021-03-30 | A measuring system and method with roll angle self-correction function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113091652A CN113091652A (en) | 2021-07-09 |
| CN113091652B true CN113091652B (en) | 2022-01-04 |
Family
ID=76671830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110340492.9A Active CN113091652B (en) | 2021-03-30 | 2021-03-30 | A measuring system and method with roll angle self-correction function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113091652B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115218826B (en) * | 2022-06-02 | 2025-04-29 | 大连理工大学 | A roll angle measurement system based on the principle of autocollimation |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5030004A (en) * | 1988-10-14 | 1991-07-09 | British Aerospace Public Limited Company | Process and apparatus for controlling the alignment of a transmit laser beam of a coherent detection optical communications transmitter/receiver terminal |
| JPH07110225A (en) * | 1993-10-08 | 1995-04-25 | Nec Corp | Angle detecting device |
| CN101221044A (en) * | 2008-01-29 | 2008-07-16 | 北京理工大学 | Device and Method for Parallel Adjustment of Large Distance Light |
| CN110715603A (en) * | 2019-11-12 | 2020-01-21 | 大连理工大学 | System and method for simultaneously measuring five-degree-of-freedom errors of machine tool workbench |
| CN111351430A (en) * | 2020-03-13 | 2020-06-30 | 大连理工大学 | Semiconductor laser motion error measurement system and method based on automatic beam stabilization |
| CN111412832A (en) * | 2020-03-13 | 2020-07-14 | 大连理工大学 | Semiconductor laser six-degree-of-freedom error measurement system based on interferometer module |
-
2021
- 2021-03-30 CN CN202110340492.9A patent/CN113091652B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5030004A (en) * | 1988-10-14 | 1991-07-09 | British Aerospace Public Limited Company | Process and apparatus for controlling the alignment of a transmit laser beam of a coherent detection optical communications transmitter/receiver terminal |
| JPH07110225A (en) * | 1993-10-08 | 1995-04-25 | Nec Corp | Angle detecting device |
| CN101221044A (en) * | 2008-01-29 | 2008-07-16 | 北京理工大学 | Device and Method for Parallel Adjustment of Large Distance Light |
| CN110715603A (en) * | 2019-11-12 | 2020-01-21 | 大连理工大学 | System and method for simultaneously measuring five-degree-of-freedom errors of machine tool workbench |
| CN111351430A (en) * | 2020-03-13 | 2020-06-30 | 大连理工大学 | Semiconductor laser motion error measurement system and method based on automatic beam stabilization |
| CN111412832A (en) * | 2020-03-13 | 2020-07-14 | 大连理工大学 | Semiconductor laser six-degree-of-freedom error measurement system based on interferometer module |
Non-Patent Citations (1)
| Title |
|---|
| 一种导轨直线度与平行度测量系统的研究与应用;王明海 等;《现代机械》;20181028(第5期);第20-24页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113091652A (en) | 2021-07-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110160471B (en) | Error measurement system and method for high-precision linear guideway | |
| CN108981614B (en) | A device and method for measuring spindle rotation error with circular grating and autocollimator | |
| CN111351430B (en) | Semiconductor laser motion error measuring system and method based on automatic beam stabilization | |
| CN103278110B (en) | A kind of compensation method to guide rail coupling error | |
| CN101339012B (en) | A grating-based roll angle measurement method and device | |
| CN113310434B (en) | Method for measuring perpendicularity of two-dimensional linear motion platform | |
| CN109470176B (en) | High-precision three-dimensional angle measuring method and device based on double gratings | |
| CN110081823B (en) | Five-degree-of-freedom geometric motion error measurement system of machine tool | |
| CN207180619U (en) | Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation | |
| CN110715603A (en) | System and method for simultaneously measuring five-degree-of-freedom errors of machine tool workbench | |
| US20230384090A1 (en) | High-precision dual-axis laser inclinometer based on wavefront homodyne interference and measuring method | |
| CN110455226B (en) | Calibration system and method for laser collimation transceiving integrated straightness measurement | |
| CN114459516B (en) | Absolute six-degree-of-freedom grating encoder | |
| CN113091653B (en) | Device and method for measuring angle freedom degree error of linear guide rail based on pentaprism | |
| US9025165B2 (en) | Normal vector tracing ultra-precision shape measurement method | |
| Quan et al. | Design and testing of a compact optical angle sensor for pitch deviation measurement of a scale grating with a small angle of diffraction | |
| CN113091652B (en) | A measuring system and method with roll angle self-correction function | |
| CN209706746U (en) | A kind of lathe five degree of freedom geometric moving error measuring system | |
| CN113483726B (en) | Method and system for measuring three-dimensional angle motion error in miniaturized and high-precision manner | |
| TWI502170B (en) | Optical measurement system and method for measuring linear displacement, rotation and rolling angles | |
| Kuang et al. | A novel method to enhance the sensitivity for two-degrees-of-freedom straightness measurement | |
| Xu et al. | Development and verification of a high-precision laser measurement system for straightness and parallelism measurement | |
| CN110666592B (en) | Receiving-transmitting split five-degree-of-freedom measuring device and method with optical path drift compensation | |
| Chen et al. | Effects of incident beam deviation from the center of a cat's eye retro-reflector on the measurement accuracy of a laser tracing system | |
| CN114719753B (en) | Six-degree-of-freedom error detection system for motion bearing guides |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |