CN112994416B - Power output method, power output device, electronic equipment and storage medium - Google Patents
Power output method, power output device, electronic equipment and storage medium Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
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- H—ELECTRICITY
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Abstract
The application provides a power output method, a power output device, electronic equipment and a storage medium, and relates to the technical field of power output control. The method comprises the steps of firstly receiving target output power, then adjusting the capacitance value of a vacuum capacitor from small to large according to a first step length, obtaining the output power of a power output system in real time, determining a first capacitance value of the vacuum capacitor when the difference value between the output power and the target output power is minimum, controlling the vacuum capacitor to work according to the first capacitance value, adjusting the capacitance value of the vacuum capacitor from small to large according to the first step length, obtaining the current output power of the power output system in real time, determining a second capacitance value of the vacuum capacitor when the difference value between the output power and the target output power is minimum, and controlling the vacuum capacitor to work according to the second capacitance value so that the power output system outputs the target power. This application power regulation efficiency is faster, and the higher effect of degree of accuracy.
Description
Technical Field
The present disclosure relates to the field of power output control technologies, and in particular, to a power output method, a power output apparatus, an electronic device, and a storage medium.
Background
The radio frequency power supply is a power supply which can generate sine wave voltage with fixed frequency, the frequency is in a radio frequency range (about 3 KHz-300 GHz), and the power supply has certain power. Radio frequency power supplies have been widely used in semiconductor processing equipment; LED and solar photovoltaic industry; plasma generation in scientific experiments; radio frequency induction heating; medical treatment and beauty treatment; the field of normal pressure plasma disinfection and cleaning, etc.
In the practical application process, a user may specify the output power, and the existing radio frequency power supply cannot rapidly and accurately output the specified power.
Disclosure of Invention
The present application is directed to a power output method, apparatus, electronic device and storage medium, so as to solve the problem that a radio frequency power supply in the prior art cannot output a specified power quickly and accurately.
In order to achieve the above purpose, the embodiments of the present application employ the following technical solutions:
in a first aspect, an embodiment of the present application provides a power output method, which is applied to a controller of a power output system, where the power output system includes a radio frequency matching adjustment unit, the controller is connected to the radio frequency matching adjustment unit, and the radio frequency matching adjustment unit includes a first vacuum capacitor and a second vacuum capacitor, and the power output method includes:
receiving a target output power;
adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length, and acquiring the output power of the power output system in real time;
when the difference value between the output power and the target output power is minimum, determining a first capacitance value of the second vacuum capacitor;
controlling the second vacuum capacitor to work according to the first capacitance value, adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length, and acquiring the current output power of the power output system in real time;
when the difference value between the output power and the target output power is minimum, determining a second capacitance value of the first vacuum capacitor, and controlling the first vacuum capacitor to work according to the second capacitance value so that the power output system outputs the target power.
Optionally, after the step of determining a second capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, and controlling the first vacuum capacitor to operate according to the second capacitance value, the method further includes:
adjusting the capacitance value of the first vacuum capacitor within a preset interval according to a second step length to determine a first target capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, wherein the second step length is smaller than the first step length;
and controlling the first vacuum capacitor to work according to the first target capacitance value so that the power output system outputs the target power.
Optionally, when the minimum difference between the output power and the target output power is greater than 0, adjusting the capacitance value of the second vacuum capacitor in a preset interval according to a second step length, and adjusting the capacitance value of the first vacuum capacitor in the preset interval according to the second step length at each step length until the second target capacitance value of the second vacuum capacitor and the third target capacitance value of the first vacuum capacitor are determined to be equal to the target output power or the difference between the output power and the target output power is minimum;
and controlling the second vacuum capacitor to work according to a second target capacitance value, and simultaneously controlling the first vacuum capacitor to work according to a third target capacitance value.
Optionally, after the step of controlling the first vacuum capacitor to operate at the second capacitance value, the method further includes:
detecting a forward level and a reverse level of current output power, and calculating a standing-wave ratio according to the forward level and the reverse level;
when the standing-wave ratio is larger than a threshold value, controlling the power output system to stop power output;
and when the standing-wave ratio is smaller than a threshold value, controlling the power output system to continuously output power.
Optionally, before the step of adjusting the capacitance value of the second vacuum capacitor from small to large by the first step length, the method further includes:
acquiring an adjusting mode instruction;
and when the adjusting mode instruction is an automatic adjusting instruction, executing a step of adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length.
In a second aspect, an embodiment of the present application further provides a power output apparatus applied to a controller of a power output system, where the power output system includes a radio frequency matching adjustment unit, the controller is connected to the radio frequency matching adjustment unit, and the radio frequency matching adjustment unit includes a first vacuum capacitor and a second vacuum capacitor, and the power output apparatus includes:
a signal receiving module for receiving a target output power;
the capacitance value adjusting module is used for adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length and acquiring the output power of the power output system in real time;
the capacitance value determining module is used for determining a first capacitance value of the second vacuum capacitor when the difference value between the output power and the target output power is minimum;
the capacitance value adjusting module is further used for controlling the second vacuum capacitor to work according to the first capacitance value, adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length, and acquiring the current output power of the power output system in real time;
and the capacitance value determining module is further configured to determine a second capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, and control the first vacuum capacitor to work according to the second capacitance value, so that the power output system outputs the target power.
Optionally, the apparatus further comprises:
the capacitance value determining module is further configured to adjust a capacitance value of the first vacuum capacitor within a preset interval according to a second step length to determine a first target capacitance value of the first vacuum capacitor when a difference between the output power and the target output power is minimum, wherein the second step length is smaller than the first step length;
and the capacitance value determining module is further used for controlling the first vacuum capacitor to work according to the first target capacitance value so that the power output system outputs the target power.
Optionally, the capacitance value determining module is further configured to, when the minimum difference between the output power and the target output power is greater than 0, adjust the capacitance value of the second vacuum capacitor in a preset interval according to a second step length, and adjust the capacitance value of the first vacuum capacitor in the preset interval according to the second step length at each step length until it is determined that the output power is equal to the target output power or the difference between the output power and the target output power is minimum, the second target capacitance value of the second vacuum capacitor and a third target capacitance value of the first vacuum capacitor;
and the capacitance value determining module is also used for controlling the second vacuum capacitor to work according to a second target capacitance value and controlling the first vacuum capacitor to work according to a third target capacitance value.
In a third aspect, the present application further provides an electronic device, including: a memory for storing one or more programs; a processor; the one or more programs, when executed by the processor, implement the power output method described above.
In a fourth aspect, a computer-readable storage medium has stored thereon a computer program which, when executed by a processor, implements the power output method described above.
Compared with the prior art, the method has the following beneficial effects:
the application provides a power output method, a device, an electronic device and a storage medium, the power output method is applied to a controller of a power output system, the power output system comprises a radio frequency matching adjustment unit, the controller is connected with the radio frequency matching adjustment unit, the radio frequency matching adjustment unit comprises a first vacuum capacitor and a second vacuum capacitor, firstly, target output power is received, then, the capacitance value of the second vacuum capacitor is adjusted from small to large according to a first step length, the output power of the power output system is obtained in real time, when the difference value between the output power and the target output power is minimum, the first capacitance value of the second vacuum capacitor is determined, then, the second vacuum capacitor is controlled to work according to the first capacitance value, the capacitance value of the second vacuum capacitor is adjusted from small to large according to the first step length, the current output power of the power output system is obtained in real time, and when the difference value between the output power and the target output power is minimum, and determining a second capacitance value of the first vacuum capacitor, and controlling the first vacuum capacitor to work according to the second capacitance value so that the power output system outputs the target power. Because the power output system that this application provided includes first vacuum capacitor and second vacuum capacitor to when adjusting first vacuum capacitor and second vacuum capacitor, adjust it according to certain step length in proper order, make governing rate faster. In addition, the capacitance value of the capacitor is determined according to the difference value of the output power and the target output power during each adjustment, so that the accuracy is higher.
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and it will be apparent to those skilled in the art that other related drawings can be obtained from the drawings without inventive effort.
Fig. 1 is a schematic block diagram of an electronic device according to an embodiment of the present disclosure.
Fig. 2 is a block diagram of a power output system according to an embodiment of the present disclosure.
Fig. 3 is a first flowchart of a power output method according to an embodiment of the present disclosure.
Fig. 4 is a second flowchart of a power output method according to an embodiment of the present disclosure.
Fig. 5 is a block diagram of a power output apparatus according to an embodiment of the present disclosure.
In the figure: 100-an electronic device; 101-a processor; 102-a memory; 103-a communication interface; 200-a power output system; 210-a controller; 300-a power output device; 310-a signal receiving module; 320-capacity value adjusting module; 330-volume value determination module.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In the description of the present application, it should be noted that the terms "upper", "lower", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally found in use of products of the application, and are used only for convenience in describing the present application and for simplification of description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application.
In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
Some embodiments of the present application will be described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.
As described in the background, the conventional rf power supply cannot output a designated power quickly and accurately.
In view of this, the present application provides a power output method, which realizes that a radio frequency power supply outputs a power supply matched with a target output power quickly and accurately by sequentially adjusting capacitance values of a second vacuum capacitor and a first vacuum capacitor.
It should be noted that the power output method provided by the present application can be applied to an electronic device 100, and fig. 1 shows a schematic structural block diagram of the electronic device 100 provided by the embodiment of the present application, where the electronic device 100 includes a memory 102, a processor 101, and a communication interface 103, and the memory 102, the processor 101, and the communication interface 103 are electrically connected to each other directly or indirectly to implement data transmission or interaction. For example, the components may be electrically connected to each other via one or more communication buses or signal lines.
The memory 102 may be used to store software programs and modules, such as program instructions or modules corresponding to the power output apparatus provided in the embodiment of the present application, and the processor 101 executes the software programs and modules stored in the memory 102 to execute various functional applications and data processing, thereby executing the steps of the power output method provided in the embodiment of the present application. The communication interface 103 may be used for communicating signaling or data with other node devices.
The Memory 102 may be, but is not limited to, a Random Access Memory (RAM), a Read Only Memory (ROM), a Programmable Read-Only Memory (PROM), an Erasable Read-Only Memory (EPROM), an electrically Erasable Programmable Read-Only Memory (EEPROM), and the like.
The processor 101 may be an integrated circuit chip having signal processing capabilities. The Processor 101 may be a general-purpose Processor, including a Central Processing Unit (CPU), a Network Processor (NP), and the like; but also Digital Signal Processors (DSPs), Application Specific Integrated Circuits (ASICs), Field Programmable Gate Arrays (FPGAs) or other Programmable logic devices, discrete Gate or transistor logic devices, discrete hardware components.
It will be appreciated that the configuration shown in FIG. 1 is merely illustrative and that electronic device 100 may include more or fewer components than shown in FIG. 1 or have a different configuration than shown in FIG. 1. The components shown in fig. 1 may be implemented in hardware, software, or a combination thereof.
The power output method provided by the embodiment of the present application is exemplarily described below with the electronic device 100 as a schematic execution subject. The electronic device 100 may be a controller 210 in the power output system 200, as shown in fig. 2, the power output system further includes a radio frequency matching adjusting unit, and the controller 210 is connected to the radio frequency matching adjusting unit.
In addition, in an alternative implementation manner, the power output system further includes other functional units, such as a signal source generating unit, a gain control unit, a parameter adjusting unit, a protection control unit, a human-computer interaction unit, a remote communication unit, and the like, wherein the controller is connected to each of the above units, which is not limited herein.
The following is an exemplary description of the power output method provided by the present application:
as an alternative implementation, referring to fig. 3, the power output method includes:
s102, receiving the target output power.
And S104, adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length, and acquiring the output power of the power output system in real time.
S106, when the difference value between the output power and the target output power is minimum, determining a first capacitance value of the second vacuum capacitor.
And S108, controlling the second vacuum capacitor to work according to the first capacitance value, adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length, and acquiring the current output power of the power output system in real time.
And S110, when the difference value between the output power and the target output power is minimum, determining a second capacitance value of the first vacuum capacitor, and controlling the first vacuum capacitor to work according to the second capacitance value so that the power output system outputs the target power.
As an implementation manner, the power output system provided by the application includes motors, the motors are respectively connected with a controller and a first vacuum capacitor and a second vacuum capacitor of the radio frequency matching adjusting unit, and the motors of the application include two motors, which are respectively a first motor and a second motor, wherein the first motor is connected with the second vacuum capacitor, and the second motor is connected with the first vacuum capacitor.
After the target output power input by the user is obtained, the controller can control the radio frequency switch to be switched on and control the two motors to operate so as to adjust the second vacuum capacitor and the first vacuum capacitor to the original point, initialization is realized, and then the capacity values of the second vacuum capacitor and the first vacuum capacitor are automatically adjusted.
As an implementation mode, when the motor is controlled to rotate and the capacitance value of the capacitor is driven to change, the capacitance value of the second vacuum capacitor is adjusted according to the mode of the first step length, the output power of the power output system is obtained in real time in the adjusting process, and then the output power is compared with the target output power.
For example, the capacitance value of the second vacuum capacitor is 100F at maximum, and the first step length is set to 5F, the output power of the power output system is obtained at capacitance values of 5F, 10F, 15F, and 20F … in order during adjustment, and on this basis, generally speaking, by adjusting the second vacuum capacitor, although the output power cannot be made completely equal to the target output power, the capacitance value of the second vacuum capacitor corresponding to when the difference between the target output powers is minimum can be obtained by adjusting the capacitance value of the second vacuum capacitor. It should be noted that, the difference between the output power and the target output power described in the present application refers to an absolute value obtained by subtracting the output power from the target output power.
For example, the target output power is 100W, when the capacitance value of the second vacuum capacitor is 5F, the output power is 50W, the difference is 50W, when the capacitance value of the second vacuum capacitor is 100F, the output power is 150F, the difference is also 50W, when the output power is 50F, the output power is 90W, the difference between the two is 10W, and the excess value is minimum, the first capacitance value of the second vacuum capacitor is determined to be 50F.
Meanwhile, after the controller determines the first capacitance value, the controller controls the running state of the first motor so as to adjust the second vacuum capacitor to the position of the first capacitor.
After the capacitance value of the second vacuum capacitor is determined, the controller can also adjust the capacitance value of the first vacuum capacitor, and similarly, the controller realizes the control of the capacitance value of the first vacuum capacitor by controlling the operation of the second motor.
When the capacitance value of the first vacuum capacitor is controlled, the capacitance value of the first vacuum capacitor is adjusted in a first step length mode, the adjusting mode of the capacitance value is consistent with that of the second vacuum capacitor, and details are not repeated here.
For example, when the capacitance value of the first vacuum capacitor is 60F, the output power is 98W, and the difference from the target output power is minimum, the second capacitance value of the first vacuum capacitor is determined to be 60F. And then controlling the second electrode to enable the first vacuum capacitor to work according to the second capacitance value so as to enable the power output system to output the target power.
On the basis of adjusting the first capacitance value and the second capacitance value, because the second vacuum capacitor and the first vacuum capacitor are mutually influenced, the output power of the power output system can only be close to the target output power but cannot be equal to the target output power under the adjustment of the first time step. In the above example, the output power is 98W, and there is a certain gap between the target output powers. On this basis, as an implementation manner, referring to fig. 4, after S110, the method further includes:
s112, adjusting the capacitance value of the first vacuum capacitor in a preset interval according to a second step length to determine a first target capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, wherein the second step length is smaller than the first step length.
And S114, controlling the first vacuum capacitor to work according to the first target capacitance value so that the power output system outputs the target power.
When the second capacitance value of the first vacuum capacitor is determined according to the first step length, because the first step length is larger, a coarse adjustment process is actually performed when the first vacuum capacitor is determined, and therefore a certain error may exist between the output power and the target output power.
Therefore, the capacitance value of the first vacuum capacitor is adjusted according to a second step length, wherein the second step length is smaller than the first step length, for example, when the first step length is 5F, the second step length is 1F. Meanwhile, in order to quickly equalize the output power with the target output power, a certain preset interval needs to be set, and the capacitance value of the first vacuum capacitor is changed within the range of the preset interval. For example, the value of the predetermined interval is associated with the value of the first step and the second capacitance, i.e. the range is (X-Y, X + Y), where X represents the second capacitance of the first vacuum capacitor, and Y represents the size of the first step.
On the basis, the controller controls the capacitance value of the first vacuum capacitor to change in the preset interval according to the second step length so as to determine a first target capacitance value corresponding to the first vacuum capacitor when the difference value between the output power and the target output power is minimum. Meanwhile, the controller controls the first vacuum capacitor to work according to the first target capacitance value.
It should be noted that, since the second vacuum capacitor and the first vacuum capacitor are mutually influenced, in actual operation, the following two situations may occur:
firstly, through the above adjusting mode, the output power is equal to the target output power, so that the optimal capacitance value of the second vacuum capacitor and the first vacuum capacitor is determined, and the operation is performed according to the capacitance value.
Second, the output power cannot be adjusted to be equal to the target output power even if the adjustment is performed in accordance with the second step length due to the mutual influence between the second vacuum capacitor and the first vacuum capacitor.
For example, the target output power is 100W, and when the output power is closest to the target output power after adjustment as described above, 99W is output. In view of this, after S114, the method further includes:
s116, when the minimum difference between the output power and the target output power is larger than 0, adjusting the capacitance value of the second vacuum capacitor in a preset interval according to a second step length, and adjusting the capacitance value of the first vacuum capacitor in the preset interval according to the second step length at each step length until the second target capacitance value of the second vacuum capacitor and the third target capacitance value of the first vacuum capacitor are determined to be equal to the target output power or the difference between the output power and the target output power is minimum.
And S118, controlling the second vacuum capacitor to work according to the second target capacitance value, and simultaneously controlling the first vacuum capacitor to work according to the third target capacitance value.
As an implementation manner, the controller may control the second vacuum capacitor to adjust according to the second step length, and at the same time, adjust the capacitance value of the first vacuum capacitor at each step length, and since the preset interval is determined according to the first step length and the second capacitance value, it means that when the output power is equal to the target output power, the first vacuum capacitor is a certain value within the preset interval.
Similarly, the preset interval of the second vacuum capacitor can also be determined according to the first capacitance value and the first step length, and then the capacitance values of the second vacuum capacitor and the first vacuum capacitor are sequentially adjusted, so that only the second target capacitance value and the third target capacitance value are determined.
For example, the first capacitance value is 50F, the first target capacitance value is 60F, the first step is 5F, and the second step is 1F, when in actual adjustment, the second vacuum capacitor is controlled to be at the first capacitance value first, then the capacitance values of the first vacuum capacitor, such as 60F, 61F, 62F … 59F, 58F …, are gradually changed, and when the output power is equal to the target output power, the second target capacitance value of the second vacuum capacitor and the third target capacitance value of the first vacuum capacitor are determined. If the capacitance values of the second vacuum capacitors are not equal, the capacitance value of the second vacuum capacitor is adjusted to 51F, the steps are repeatedly executed until the capacitance value of the output power equal to the target output power is determined, or when the capacitance values of the second vacuum capacitors between 45F and 55F are adjusted and the output power is not equal to the target output power, the corresponding capacitance value is determined when the difference value between the output power and the target output power is minimum in the adjusting process, and therefore the second target capacitance value of the second vacuum capacitor and the third target capacitance value of the first vacuum capacitor are determined.
Simultaneously, the power output system that this application provided not only can carry out the regulation of second vacuum capacitor and first vacuum capacitor automatically, can also realize adjusting through manual mode.
On this basis, before S108, the method further includes:
s1071, acquiring an adjusting mode instruction.
S1072, when the adjusting mode command is an automatic adjusting command, executing the step of adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length.
S1073, when the adjusting mode command is a manual adjusting command, adjusting the capacitance values of the first vacuum capacitor and the second vacuum capacitor according to the received information.
Optionally, the power output system provided by the application includes an LCD screen, and in the manual mode, the user controls the motor to rotate through the LCD screen after turning on the power supply and the radio frequency switch and setting the power, so as to adjust the variable first vacuum capacitor and the variable second vacuum capacitor, and make the output power and the reflected power reach the optimal state.
Meanwhile, after the user finishes one-time matching in the automatic matching mode, as long as the manual mode is not switched, the power supply and the radio frequency switch are switched on next time, and then the power matching is not required to be carried out again.
Further, to ensure that the system does not fail, after S118, the method includes:
and S120, detecting the forward level and the reverse level of the current output power, and calculating the standing-wave ratio according to the forward level and the reverse level.
And S122, controlling the power output system to stop power output when the standing-wave ratio is larger than the threshold value.
And S124, when the standing wave ratio is smaller than the threshold value, controlling the power output system to continuously output power.
In the present application, the threshold is set to 3, the controller in the present application may determine whether the standing-wave ratio is less than 3, and if so, the control system operates normally. If the current is more than 3, the radio frequency and the power switch are closed, and the power output system is protected.
Based on the foregoing implementation manner, please refer to fig. 5, an embodiment of the present application further provides a power output apparatus 300, which is applied to a controller of a power output system, the power output system includes a radio frequency matching adjusting unit, the controller is connected to the radio frequency matching adjusting unit, the radio frequency matching adjusting unit includes a first vacuum capacitor and a second vacuum capacitor, and the power output apparatus 300 includes:
a signal receiving module 310, configured to receive the target output power.
It is understood that S102 may be performed by the signal receiving module 310.
The capacitance value adjusting module 320 is used for adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length and acquiring the output power of the power output system in real time;
it is understood that S104 may be performed by the capacity adjustment module 320.
The capacitance determining module 330 determines a first capacitance of the second vacuum capacitor when the difference between the output power and the target output power is minimum.
It is understood that S106 may be performed by the capacity value determining module 330.
And the capacitance value adjusting module 320 is further configured to control the second vacuum capacitor to work according to the first capacitance value, adjust the capacitance value of the second vacuum capacitor from small to large according to the first step length, and obtain the current output power of the power output system in real time.
It is understood that S108 may be performed by the capacity adjustment module 320.
The capacitance value determining module 330 is further configured to determine a second capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, and control the first vacuum capacitor to operate according to the second capacitance value, so that the power output system outputs the target power.
It is understood that S110 may be performed by the capacity value determining module 330.
Naturally, each step in the above implementation manner has a corresponding functional module, and since the above embodiment has been described in detail, no further description is provided herein.
In summary, the present application provides a power output method and apparatus, which are applied to a server of a power output system, where the power output system further includes a plurality of devices to be monitored and a plurality of electric energy meters, each device to be monitored is electrically connected to one electric energy meter, and each electric energy meter is in communication connection with the server; the method comprises the following steps: receiving a current value fed back by each electric energy meter; the current value is the current value of the equipment to be monitored, which is acquired by the electric energy meter; determining the state of each device to be monitored from the corresponding relation between the preset current value and the state according to the current value; the state of the equipment to be monitored comprises a shutdown state, a standby state and a working state. Because the electric energy meter is added in the power output system, the current of the equipment to be monitored can be directly obtained through the electric energy meter. And because the current of the equipment to be monitored is different when the equipment to be monitored is in different states, the state of the equipment to be monitored can be effectively determined by the mode, and related data does not need to be acquired from a controller, so that the equipment is simpler to access the industrial internet.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. The apparatus embodiments described above are merely illustrative and, for example, the flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of apparatus, methods and computer program products according to embodiments of the present application. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s).
It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved.
It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
In addition, the functional modules in the embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
The functions, if implemented in the form of software functional modules and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present application or portions thereof that substantially contribute to the prior art may be embodied in the form of a software product stored in a storage medium and including instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present application. And the aforementioned storage medium includes: u disk, removable hard disk, read only memory, random access memory, magnetic or optical disk, etc. for storing program codes.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (8)
1. A power output method is applied to a controller of a power output system, the power output system comprises a radio frequency matching adjusting unit, the controller is connected with the radio frequency matching adjusting unit, the radio frequency matching adjusting unit comprises a first vacuum capacitor and a second vacuum capacitor, and the power output method comprises the following steps:
receiving a target output power;
adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length, and acquiring the output power of the power output system in real time;
when the difference value between the output power and the target output power is minimum, determining a first capacitance value of the second vacuum capacitor;
controlling the second vacuum capacitor to work according to the first capacitance value, adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length, and acquiring the current output power of the power output system in real time;
when the difference value between the output power and the target output power is minimum, determining a second capacitance value of the first vacuum capacitor, and controlling the first vacuum capacitor to work according to the second capacitance value;
after the step of determining a second capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, and controlling the first vacuum capacitor to work according to the second capacitance value, the method further includes:
adjusting the capacitance value of the first vacuum capacitor within a preset interval according to a second step length to determine a first target capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, wherein the second step length is smaller than the first step length;
and controlling the first vacuum capacitor to work according to the first target capacitance value so that the power output system outputs the target power.
2. A power output method as claimed in claim 1, wherein after the step of controlling the first vacuum capacitor to operate at the first target capacitance value, when the minimum difference between the output power and the target output power is greater than 0, the capacitance value of the second vacuum capacitor is adjusted within a preset interval by a second step size, and at each step size, the capacitance value of the first vacuum capacitor is adjusted within a preset interval by the second step size until it is determined that the output power is equal to the target output power or the difference between the output power and the target output power is minimum, the second target capacitance value of the second vacuum capacitor and a third target capacitance value of the first vacuum capacitor;
and controlling the second vacuum capacitor to work according to a second target capacitance value, and simultaneously controlling the first vacuum capacitor to work according to a third target capacitance value.
3. The power output method of claim 1, wherein after the step of controlling the first vacuum capacitor to operate at the second capacitance value, the method further comprises:
detecting a forward level and a reverse level of current output power, and calculating a standing-wave ratio according to the forward level and the reverse level;
when the standing-wave ratio is larger than a threshold value, controlling the power output system to stop power output;
and when the standing-wave ratio is smaller than a threshold value, controlling the power output system to continuously output power.
4. The power output method of claim 1, wherein prior to the step of adjusting the capacitance of the second vacuum capacitor from small to large by the first step size, the method further comprises:
acquiring an adjusting mode instruction;
and when the adjusting mode instruction is an automatic adjusting instruction, executing a step of adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length.
5. A power output device applied to a controller of a power output system, wherein the power output system comprises a radio frequency matching adjustment unit, the controller is connected with the radio frequency matching adjustment unit, the radio frequency matching adjustment unit comprises a first vacuum capacitor and a second vacuum capacitor, and the power output device comprises:
a signal receiving module for receiving a target output power;
the capacitance value adjusting module is used for adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length and acquiring the output power of the power output system in real time;
the capacitance value determining module is used for determining a first capacitance value of the second vacuum capacitor when the difference value between the output power and the target output power is minimum;
the capacitance value adjusting module is also used for controlling the second vacuum capacitor to work according to the first capacitance value and adjusting the capacitance value of the second vacuum capacitor from small to large according to the first step length;
the capacitance value determining module is further configured to determine a second capacitance value of the first vacuum capacitor when the difference between the output power and the target output power is minimum, and control the first vacuum capacitor to work according to the second capacitance value, so that the power output system outputs the target power;
the capacitance value determining module is further configured to adjust a capacitance value of the first vacuum capacitor within a preset interval according to a second step length to determine a first target capacitance value of the first vacuum capacitor when a difference between the output power and the target output power is minimum, wherein the second step length is smaller than the first step length;
and the capacitance value determining module is further used for controlling the first vacuum capacitor to work according to the first target capacitance value so that the power output system outputs the target power.
6. The power output apparatus according to claim 5, wherein the capacitance determining module is further configured to adjust the capacitance of the second vacuum capacitor within a preset interval by a second step size when the minimum difference between the output power and the target output power is greater than 0, and adjust the capacitance of the first vacuum capacitor within a preset interval by a second step size at each step size until the second target capacitance of the second vacuum capacitor and the third target capacitance of the first vacuum capacitor are determined to be equal to the target output power or the minimum difference between the output power and the target output power;
and the capacitance value determining module is also used for controlling the second vacuum capacitor to work according to a second target capacitance value and controlling the first vacuum capacitor to work according to a third target capacitance value.
7. An electronic device, comprising:
a memory for storing one or more programs;
a processor;
the one or more programs, when executed by the processor, implement the method of any of claims 1-4.
8. A computer-readable storage medium, on which a computer program is stored which, when being executed by a processor, carries out the method according to any one of claims 1-4.
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| CN101718700A (en) * | 2009-12-02 | 2010-06-02 | 江苏天瑞仪器股份有限公司 | Output matching circuit of inductive coupling plasma power supply |
| CN102611373B (en) * | 2011-01-19 | 2014-08-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and device for controlling stepper motor and impedance matcher |
| US9331689B2 (en) * | 2012-04-27 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Power supply circuit and semiconductor device including the same |
| US9780688B2 (en) * | 2013-01-18 | 2017-10-03 | Diversified Technologies, Inc. | System for regulating the output of a high-voltage, high-power, DC supply |
| CN105827216A (en) * | 2016-03-16 | 2016-08-03 | 江苏鲁汶仪器有限公司 | Device and method of automatically matching radio frequency impedance |
| CN111192752B (en) * | 2018-11-14 | 2021-08-31 | 江苏鲁汶仪器有限公司 | Power distribution inductive coupling coil and plasma processing device with same |
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