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CN112233894A - Alloy material multilayer inductor manufacturing method - Google Patents

Alloy material multilayer inductor manufacturing method Download PDF

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Publication number
CN112233894A
CN112233894A CN201910636123.7A CN201910636123A CN112233894A CN 112233894 A CN112233894 A CN 112233894A CN 201910636123 A CN201910636123 A CN 201910636123A CN 112233894 A CN112233894 A CN 112233894A
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Prior art keywords
powder
printing
sheet
namely
terminal electrode
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Chinese (zh)
Inventor
邱明杰
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Chilisin Electronics Corp
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Chilisin Electronics Corp
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Priority to CN201910636123.7A priority Critical patent/CN112233894A/en
Publication of CN112233894A publication Critical patent/CN112233894A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0206Manufacturing of magnetic cores by mechanical means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • H01F1/14766Fe-Si based alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • H01F1/14766Fe-Si based alloys
    • H01F1/14791Fe-Si-Al based alloys, e.g. Sendust
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0206Manufacturing of magnetic cores by mechanical means
    • H01F41/0213Manufacturing of magnetic circuits made from strip(s) or ribbon(s)
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041Printed circuit coils
    • H01F41/046Printed circuit coils structurally combined with ferromagnetic material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/10Connecting leads to windings

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)

Abstract

The invention discloses a method for manufacturing an alloy material laminated inductor, which comprises the following steps: the method comprises the steps of material preparation, powder bead beating, powder mixing, printing slurry preparation, strip/cut piece preparation, thin strip leveling, punching, printing, stacking, pressing, cutting, burning, sintering, printed terminal electrode transfer and electroplating. The inductance manufacturing method can make the gap between the alloy powder smaller so as to achieve the effect of improving the magnetic conductivity.

Description

Method for manufacturing alloy material laminated inductor
Technical Field
The invention relates to a method for manufacturing an inductor, in particular to a method for manufacturing an alloy material laminated inductor.
Background
Referring to fig. 1, a typical multilayer inductor manufacturing method mainly includes stacking a plurality of thin strips 11, wherein the thin strips 11 have inductor patterns, and the plurality of thin strips 11 are stacked and connected by conductive paste 12 to form inductor patterns, thereby achieving the effect of inductor miniaturization.
Although the conventional method for manufacturing a laminated inductor can manufacture a miniaturized laminated inductor, the magnetic conductance is insufficient due to the miniaturization, and when the magnetic conductance is to be increased, the magnetic conductance increasing effect of a fixed volume is limited due to the gap between the circular alloy powder 111 and the circular alloy powder 111, which causes inconvenience in changing materials or increasing the volume.
Therefore, in view of the above-mentioned shortcomings, the inventors have earnestly studied and developed innovations, and have conducted many years of research and study with great interest, and finally developed a method for increasing the permeability without increasing the volume of the multilayer inductor.
Disclosure of Invention
The invention mainly aims to provide a method for manufacturing an alloy material layer inductor, which comprises the following steps:
the method comprises a material preparation step of preparing ferroalloy powder, wherein the grain diameter of the ferroalloy powder is 1-20 mu m, the ferroalloy powder is ferrosilicon-chromium alloy powder or ferrosilicon-aluminum alloy powder, the ferrosilicon-chromium alloy powder comprises 82-97 wt% of iron (wt% is mass percentage concentration or weight percentage concentration), 2-9 wt% of silicon and 1-9 wt% of chromium, and the ferrosilicon-aluminum alloy powder comprises 82-97 wt% of iron, 2-9 wt% of silicon and 1-9 wt% of aluminum.
A powder bead beating step, namely placing the ferroalloy powder in the material preparation step into a grinding barrel, and placing a ball body into the grinding barrel, wherein the diameter of the ball body is 1-10 mm, the ball body is zirconia beads or alumina beads, the grinding barrel is provided with a motor, the motor is connected with a stirring rod, the stirring rod is provided with a plurality of disturbance parts, the stirring rod rotates to enable the disturbance parts to disturb the ball body in the grinding barrel to impact the ferroalloy powder, so that the ferroalloy powder is impacted into flat alloy powder, the rotation speed of the stirring rod is 50-200 rpm (Revolution Per Minute) and the rotation time of the stirring rod is 2-8 hours.
And a powder mixing step, mixing the flat alloy powder generated in the powder bead beating step with the adhesive and a solvent in a ratio of 1: 5-1: 10 to prepare slurry, wherein the adhesive is PVB (polyvinyl butyral), and the solvent is alcohol or toluene.
And a printing slurry preparation step, namely uniformly mixing and stirring the slurry obtained in the powder mixing step to prepare the printing slurry.
A strip/cut-off step, wherein the slurry obtained in the powder mixing step is baked by a roll-to-roll coating device and an oven to obtain a raw thin strip with the thickness of 10-50 μm, and the raw thin strip is cut into 15 × 15-22 × 22cm2The speed of the roll-to-roll coating equipment is 1 to10m/min, and the baking temperature of the oven is 40-90 ℃.
Leveling the sheet-like thin strip in the strip/cut piece making step by pressing the surface of the sheet-like thin strip in an oil pressure manner to make the sheet-like thin strip more flat so as to facilitate the contact surface of the silver paste to be more closely adhered during the subsequent printing, wherein the pressure of the oil pressure is 1 to 2 tons/cm2
A punching step, punching the sheet-like thin strip of the thin strip leveling step into the required hole part by laser or machinery.
Printing, namely printing conductive slurry on the sheet-shaped thin strip in the punching step in an alignment manner, printing the printing slurry in the printing slurry manufacturing step on the sheet-shaped thin strip to form an inductance coil pattern, and baking the sheet-shaped thin strip by an oven at the baking temperature of 55-80 ℃ for 30-60 min, wherein the conductive slurry is used for connecting the inductance coil patterns of the upper and lower sheet-shaped thin strips, and the conductive slurry is silver paste or copper paste.
And a stacking step, stacking the sheet thin strips subjected to the printing step to a required thickness to form a plurality of inductance coil patterns.
And a pressing step, heating and pressurizing the stacked sheet-shaped thin strip formed in the stacking step to enable the stacked sheet-shaped thin strip to be tightly compacted and adhered with the inductor coil pattern, wherein the heating temperature is 40-85 ℃, and the pressurizing pressure is 50000-150000 psi (Pound per Square Inch).
And a cutting step, cutting and molding the stacked sheet thin strips in the pressing step to form a co-fired assembly green body.
And a burning-out step, namely burning out the adhesive and the lipid in the inductor coil pattern and the sheet-shaped thin belt by continuously heating the co-fired assembly green blank obtained in the cutting step at 250-450 ℃ for 2-6 hr.
And a sintering step, wherein sintering is carried out at 600-800 ℃ for 2-6 hours after the burning-out step, so as to form the high-strength and high-hardness alloy material laminated inductor body.
And transferring the printed terminal electrode, namely transferring the printed terminal electrode to the alloy material laminated inductor body formed in the sintering step by using conductive paste, wherein the conductive paste is silver paste or copper paste, and the terminal electrode forms testable and weldable pins and is baked for 30-60 min at the temperature of 55-80 ℃ in an oven.
And an electroplating step, namely plating nickel on the terminal electrode for protection after the terminal electrode transfer printing step, and plating tin on the nickel to ensure that the terminal electrode has good weldability.
The iron alloy powder is impacted into flat alloy powder through the ball, the flat alloy powder is made into thin strips, the thin strips are stacked and hot pressed and sintered to form the laminated inductor, and the effect of improving the magnetic conductivity can be achieved due to the smaller gap between the flat alloy powder.
Drawings
FIG. 1 is a schematic diagram of a conventional multilayer inductor;
FIG. 2 is a schematic view of a manufacturing process of the present invention;
FIG. 3 is a schematic diagram of a powder bead blasting procedure according to the present invention;
FIG. 4 is a schematic view of a thin strip stack according to the present invention;
FIG. 5 is a schematic view of the structure of the present invention.
Description of the symbols:
s1 Material preparation step S2 powder bead beating step
S3 powder mixing step S41 printing paste producing step
S42 tape/cut-part making step S43 thin tape leveling step
S5 punching step S6 printing step
S7 Stacking step S8 stitching step
S9 cutting step S10 burning step
S11 sintering step S12 printed terminal electrode transferring step
S13 electroplating step 1 conventional laminated inductor
11 thin strip 111 round alloy powder
12 conductive paste 2 motor
21 stirring rod 22 disturbance part
3 grinding barrel and 4 ferroalloy powder
41 sphere 5 alloy material layer inductor
51 thin strip 511 flat alloy powder
52 inductor pattern 53 hole portion
54 conductive paste
Detailed Description
In order to make the other features and advantages of the present invention and the achieved effects thereof more apparent, the present invention will be described in detail with reference to the accompanying drawings, wherein:
referring to fig. 2, a primary object of the present invention is to provide a method for manufacturing a bulk inductor of an alloy material, which comprises the following steps:
a material preparation step S1, wherein in the material preparation step S1, ferroalloy powder 4 is prepared, the grain size of the ferroalloy powder 4 is 1-20 μm, the ferroalloy powder 4 is ferrosilicon-chromium alloy powder or ferrosilicon-aluminum alloy powder, the ferrosilicon-chromium alloy powder comprises 82-97 wt% of iron (wt% is mass percentage concentration or weight percentage concentration), 2-9 wt% of silicon and 1-9 wt% of chromium, and the ferrosilicon-aluminum alloy powder comprises 82-97 wt% of iron, 2-9 wt% of silicon and 1-9 wt% of aluminum.
A powder ball striking step S2, placing the ferroalloy powder 4 of the material preparation step S1 into a milling barrel 3, and placing a ball 41 into the milling barrel 3, wherein the diameter of the ball 41 is 1-10 mm, the ball 41 is zirconia beads or alumina beads, the milling barrel 3 is provided with a motor 2, the motor 2 is connected to a stirring rod 21, the stirring rod 21 is provided with a plurality of disturbance parts 22, the stirring rod 21 rotates to make the disturbance parts 22 disturb the ball 41 in the milling barrel 3 to strike the ferroalloy powder 4, so that the ferroalloy powder 4 is struck into flat alloy powder 511, the rotation speed of the stirring rod 21 is 50-200 rpm, and the rotation time of the stirring rod 21 is 2-8 hours, as shown in fig. 3 and fig. 5.
A powder mixing step S3, mixing the flat alloy powder 511 generated in the powder bead beating step S2 with the adhesive and the solvent in a ratio of 1:5 to 1:10 to prepare a slurry, wherein the adhesive is PVB, and the solvent is alcohol or toluene.
The printing paste preparing step S41 is to prepare a printing paste by uniformly mixing and stirring the paste of the powder mixing step S3.
A tape/cut-off step S42, wherein the slurry obtained in the powder mixing step S3 is baked by a roll-to-roll coating device and an oven to form a raw thin tape with a thickness of 10-50 μm, and the raw thin tape 51 is cut into 15 × 15-22 × 22cm2The driving speed of the roll-to-roll coating equipment is 1-10 m/min, and the baking temperature of the oven is 40-90 ℃.
A thin strip leveling step S43, wherein the sheet-like thin strip 51 of the strip/cut-part making step S42 is hydraulically flattened to make the surface of the sheet-like thin strip 51 more flat, so that the contact surface of the conductive paste is more closely adhered in the subsequent printing step S6, and the pressure of the oil pressure is 1 to 2 tons/cm2
The punching step S5 punches the sheet-like thin strip 51 of the thin strip leveling step S43 into the desired hole 53 by laser or machine, as shown in fig. 4.
Printing step S6, printing conductive paste 54 by aligning the sheet-like thin strip 51 of the punching step S5, printing the printing paste of the printing paste manufacturing step S41 on the sheet-like thin strip 51 to form an inductor coil pattern 52, and baking the sheet-like thin strip by an oven at a baking temperature of 55-80 ℃ for 30-60 min, wherein the conductive paste 54 is used for connecting the inductor coil patterns 52 of the upper and lower sheet-like thin strips 51, and the conductive paste 54 is silver paste or copper paste.
In the stacking step S7, the sheet-like thin strips 51 obtained in the printing step S6 are stacked to a desired thickness to form a plurality of inductor coil patterns 52.
And a pressing step S8, heating and pressing the stacked sheet-like thin strip 51 formed in the stacking step S7 to make the stacked sheet-like thin strip 51 and the inductor coil pattern 52 compact and tightly fit, wherein the heating temperature is 40-85 ℃ and the pressing pressure is 50000-150000 psi.
And a cutting step S9, cutting and molding the stacked sheet-shaped thin strip 51 pressed in the pressing step S8 to form a co-fired assembly green body.
And a burning-out step S10, wherein the green co-fired assembly blank obtained in the cutting step S9 is subjected to the temperature of 250-450 ℃ for 2-6 hours, and the adhesive and the lipid in the induction coil pattern 52 and the sheet-shaped thin strips are burnt out.
A sintering step S11, which is to perform sintering at 600-800 ℃ for 2-6 hr after the burning-out step S10, to form a high-strength and high-hardness bulk inductor body made of alloy material, as shown in FIG. 5.
And a step S12 of transferring the printed terminal electrode, wherein the alloy material laminated inductor body formed in the step S11 is subjected to transferring the printed terminal electrode by using conductive paste, the conductive paste is silver paste or copper paste, and the terminal electrode forms a testable and weldable pin position and is baked for 30-60 min at 55-80 ℃ in an oven.
In the electroplating step S13, after the step S12 of transferring the printed terminal electrode, nickel is plated on the terminal electrode for protection, and tin is plated on the nickel to make the terminal electrode have good solderability.
The iron alloy powder is impacted into flat alloy powder through the ball, the flat alloy powder is made into thin strips, the thin strips are stacked and hot pressed and sintered to form the laminated inductor, and the effect of improving the magnetic conductivity can be achieved due to the smaller gap between the flat alloy powder.
The above detailed description is specific to one possible embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, but rather, equivalent implementations or modifications without departing from the spirit of the present invention are intended to be included in the scope of the present invention.

Claims (6)

1. A method for manufacturing an alloy material layer inductor is characterized by comprising the following steps:
a material preparation step, wherein ferroalloy powder is prepared in the material preparation step, the grain size of the ferroalloy powder is 1-20 μm, the ferroalloy powder is ferrosilicon-chromium alloy powder or ferrosilicon-aluminum alloy powder, the ferrosilicon-chromium alloy powder comprises 82-97 wt% of iron, 2-9 wt% of silicon and 1-9 wt% of chromium, and the ferrosilicon-aluminum alloy powder comprises 82-97 wt% of iron, 2-9 wt% of silicon and 1-9 wt% of aluminum;
a powder bead beating step, namely placing the ferroalloy powder in the material preparation step into a grinding barrel, and placing a plurality of spheres into the grinding barrel, wherein the grinding barrel is provided with a motor which is connected with a stirring rod, the stirring rod is provided with a plurality of disturbance parts, the rotation speed of the stirring rod in the powder bead beating step is 50-200 rpm, and the rotation time of the stirring rod is 2-8 hr;
a powder mixing step, mixing the flat alloy powder generated in the powder bead beating step with the adhesive and the solvent in a ratio of 1: 5-1: 10 to prepare slurry;
a printing slurry preparation step, namely uniformly mixing and stirring the slurry obtained in the powder mixing step to prepare printing slurry;
a strip/cut piece making step, wherein slurry obtained in the powder mixing step is baked by a roll-to-roll coating device and an oven to prepare a raw thin strip with the thickness of 10-50 mu m, the raw thin strip is cut into sheet thin strips, and the baking temperature of the oven is 40-90 ℃;
leveling thin strip, namely flattening the surface of the sheet thin strip in the strip/cut piece making step in an oil pressure mode, wherein the pressure of the oil pressure is 1-2 tons/cm2
Punching the sheet-like thin strip of the thin strip leveling step into a required hole part by laser or machinery;
printing, namely printing conductive slurry on the sheet-shaped thin belt subjected to the punching step in an alignment manner, printing the printing slurry obtained in the printing slurry manufacturing step on the sheet-shaped thin belt to form an inductance coil pattern, and baking the sheet-shaped thin belt by an oven at the temperature of 55-80 ℃ for 30-60 min;
stacking, namely stacking the sheet thin strips subjected to the printing step to form an inductance coil pattern;
a pressing step, heating and pressurizing the stacked flaky thin strip formed in the stacking step, wherein the heating temperature is 40-85 ℃, and the pressurizing pressure is 50000-150000 psi;
cutting, namely cutting and molding the stacked sheet thin strips in the pressing step to form a co-fired assembly green body;
a burning-out step, namely burning out the green blank of the co-fired component in the cutting step to burn out the adhesive and the lipid, wherein the burning-out temperature is 250-450 ℃ and lasts for 2-6 hours;
a sintering step, sintering the alloy inductor body after the burning-out step, wherein the sintering temperature is 600-800 ℃ and lasts for 2-6 hours;
transferring the printed terminal electrode, namely transferring the printed terminal electrode to the alloy material laminated inductor body formed in the sintering step by using conductive paste, and baking the alloy material laminated inductor body at the baking temperature of 55-80 ℃ for 30-60 min;
and an electroplating step, namely plating nickel on the terminal electrode and then plating tin on the terminal electrode after the terminal electrode transferring step.
2. The method according to claim 1, wherein the diameter of the ball in the step of powder bead blasting is 1-10 mm, and the ball is zirconia beads or alumina beads.
3. The method of claim 1, wherein the binder of the powder mixing step is PVB and the solvent of the powder mixing step is alcohol or toluene.
4. The method for manufacturing a laminated inductor of an alloy material according to claim 1, wherein the roll-to-roll coating device in the step of manufacturing the tape/cut piece is driven at a speed of 1 to 10 m/min.
5. The method according to claim 1, wherein the conductive paste of the printing step is silver paste or copper paste.
6. The method of claim 1, wherein the conductive paste of the step of transferring the printed terminal electrode is silver paste or copper paste.
CN201910636123.7A 2019-07-15 2019-07-15 Alloy material multilayer inductor manufacturing method Pending CN112233894A (en)

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CN201910636123.7A CN112233894A (en) 2019-07-15 2019-07-15 Alloy material multilayer inductor manufacturing method

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Application Number Priority Date Filing Date Title
CN201910636123.7A CN112233894A (en) 2019-07-15 2019-07-15 Alloy material multilayer inductor manufacturing method

Publications (1)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10106839A (en) * 1996-10-02 1998-04-24 Tokin Corp Multilayer high-frequency inductor
CN103366919A (en) * 2012-03-26 2013-10-23 Tdk株式会社 Planar coil element
CN103887053A (en) * 2014-04-10 2014-06-25 深圳市宏业翔科技有限公司 Method for manufacturing multi-layer inductor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10106839A (en) * 1996-10-02 1998-04-24 Tokin Corp Multilayer high-frequency inductor
CN103366919A (en) * 2012-03-26 2013-10-23 Tdk株式会社 Planar coil element
CN103887053A (en) * 2014-04-10 2014-06-25 深圳市宏业翔科技有限公司 Method for manufacturing multi-layer inductor

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Application publication date: 20210115