CN111999035A - F-P filter transmission curve calibration method using frequency stabilization He-Ne laser - Google Patents
F-P filter transmission curve calibration method using frequency stabilization He-Ne laser Download PDFInfo
- Publication number
- CN111999035A CN111999035A CN202010793773.5A CN202010793773A CN111999035A CN 111999035 A CN111999035 A CN 111999035A CN 202010793773 A CN202010793773 A CN 202010793773A CN 111999035 A CN111999035 A CN 111999035A
- Authority
- CN
- China
- Prior art keywords
- laser
- filter
- ccd
- calibrated
- transmittance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000006641 stabilisation Effects 0.000 title 1
- 238000011105 stabilization Methods 0.000 title 1
- 238000002834 transmittance Methods 0.000 claims abstract description 17
- 230000003595 spectral effect Effects 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000001444 catalytic combustion detection Methods 0.000 description 20
- 238000003384 imaging method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
本发明公开了一种利用稳频He‑Ne激光器的F‑P滤光器透射曲线标定方法,该标定方法可以非常准确地标定F‑P滤光器的透射曲线;利用带宽极窄的稳频He‑Ne激光器产生稳频激光并扩束准直,利用分光比为1:1的分光镜将激光分为2束,一束直接进入第二CCD,另一束通过待标定F‑P滤光器后由第一CCD接收,在实验前先对使用的CCD响应特性及分光镜的分光比进行定标。多次调节F‑P滤光器的调谐位置,同时测量激光出射光强以及对应不同调谐位置的透射光功率,利用CCD响应特性及分光镜的分光比校正测量值并计算透射率,使用高斯函数拟合得到透射率‑调谐波长的关系曲线,多次重复测量求取平均值,即为F‑P滤光器的透射曲线,进一步可以计算滤光器的半宽、峰值透射率等主要应用参数。
The invention discloses a method for calibrating the transmission curve of an F-P filter using a frequency-stabilized He-Ne laser, which can very accurately calibrate the transmission curve of the F-P filter; The He-Ne laser generates a frequency-stabilized laser and expands and collimates the beam. The laser is divided into two beams by a beam splitter with a beam splitting ratio of 1:1. One beam directly enters the second CCD, and the other beam is filtered by the F-P to be calibrated. After the device is received by the first CCD, the response characteristics of the used CCD and the beam splitting ratio of the beam splitter are calibrated before the experiment. Adjust the tuning position of the F‑P filter multiple times, measure the laser output light intensity and the transmitted light power corresponding to different tuning positions at the same time, correct the measured value and calculate the transmittance using the CCD response characteristics and the spectral ratio of the beam splitter, and use the Gaussian function The relationship curve between transmittance and tuning wavelength is obtained by fitting, and the average value is obtained by repeating the measurement several times, which is the transmission curve of the F-P filter, and the main application parameters such as the half-width and peak transmittance of the filter can be calculated. .
Description
技术领域technical field
本发明涉及一种F-P滤光器透射曲线的标定方法,特别涉及一种利用稳频He-Ne激光器的F-P滤光器透射曲线标定方法。The invention relates to a method for calibrating the transmission curve of an F-P filter, in particular to a method for calibrating the transmission curve of an F-P filter using a frequency-stabilized He-Ne laser.
背景技术Background technique
F-P滤光器是一种性能优良的滤光器件,其主要基于平行平板的多光束干涉原理研制,广泛用于天文观测作为扫描成像光谱仪。在F-P正式应用于扫描成像之前,必须要先对其主要性能参数进行定标,以确保可以在成像时得到准确的数据。F-P filter is a filter device with excellent performance, which is mainly developed based on the principle of multi-beam interference of parallel plates, and is widely used in astronomical observation as a scanning imaging spectrometer. Before F-P is formally used in scanning imaging, its main performance parameters must be calibrated to ensure that accurate data can be obtained during imaging.
峰值透过率、半宽是F-P的主要应用性能参数,为了对其进行准确标定,一般需要测量其透射曲线。Peak transmittance and half width are the main application performance parameters of F-P. In order to accurately calibrate it, it is generally necessary to measure its transmission curve.
发明内容SUMMARY OF THE INVENTION
本发明要解决的技术问题是:提出一种系统地对F-P滤光器主要应用性能参数进行高精度定标的方法。The technical problem to be solved by the present invention is to propose a method for systematically calibrating the main application performance parameters of the F-P filter with high precision.
本发明解决其技术问题所采用的技术方案是:一种利用稳频He-Ne激光器的F-P滤光器透射曲线标定方法,包括如下步骤:The technical solution adopted by the present invention to solve the technical problem is: a method for calibrating the transmission curve of an F-P filter using a frequency-stabilized He-Ne laser, comprising the following steps:
步骤1,利用带宽极窄的稳频He-Ne激光器产生稳频激光并扩束准直;
步骤2,不放入待标定F-P滤光器,定标第一CCD、第二CCD的响应以及分光镜分光比;
步骤3,利用分光镜将激光分为2束,一束直接进入第二CCD,另一束通过待标定F-P滤光器后由第一CCD接收;
步骤4,调节待标定F-P滤光器调谐位置于某一调谐波长λi处,同时测量激光出射光功率以及激光经过待标定F-P滤光器的透射光功率;
步骤5,利用第一CCD、第二CCD响应特性及分光镜的分光比校正测量值并计算透射率;
步骤6,改变λi,重复步骤4、5,测量多组透射率A-调谐波长λ数据,用高斯函数拟合曲线,计算曲线半宽及峰值透射率。
本发明与现有技术相比的有益效果是:The beneficial effects of the present invention compared with the prior art are:
(1)本发明所涉及的F-P滤光器的标定方法实验装置及操作简单,且可以较为准确地定标F-P滤光器的透射曲线。(1) The experimental device and operation of the calibration method of the F-P filter involved in the present invention are simple, and the transmission curve of the F-P filter can be calibrated more accurately.
(2)同时测量激光出射光强以及激光经过F-P滤光器的透射光强计算透射率,避免光源输出功率变化对透射率计算的影响,对光源输出功率稳定性要求较低。(2) Simultaneously measure the laser light intensity and the transmitted light intensity of the laser through the F-P filter to calculate the transmittance, so as to avoid the influence of the light source output power change on the transmittance calculation, and the stability of the light source output power is relatively low.
附图说明Description of drawings
图1为本发明定标F-P滤光器的透射曲线方法的流程图;Fig. 1 is the flow chart of the transmission curve method of calibration F-P filter of the present invention;
图2为定标的实验装置示意图;Fig. 2 is the schematic diagram of the experimental device of calibration;
图中附图标记含义为:1为稳频He-Ne激光器,2为扩束准直镜,3为分光镜,4为待标定F-P滤光器,5为第一CCD,6为第二CCD。The meanings of the reference symbols in the figure are: 1 is the frequency-stabilized He-Ne laser, 2 is the beam expanding collimator, 3 is the beam splitter, 4 is the F-P filter to be calibrated, 5 is the first CCD, and 6 is the second CCD .
具体实施方式Detailed ways
下面结合附图以及具体实施方式进一步说明本发明。The present invention will be further described below with reference to the accompanying drawings and specific embodiments.
如图2所示,定标时稳频He-Ne激光器1产生窄带稳频激光,经过扩束准直镜2后由分光镜3分为等强度的两路,其中一路直接由第二CCD 6测量光功率,另一路透过待标定F-P滤光器4再进入第一CCD 5,由计算机控制待标定F-P滤光器4的调谐以及第一CCD 5、第二CCD 6的图像采集。为了避免CCD响应差异以及分光镜3分光误差对测量产生影响,在对待标定F-P滤光器4定标前要先对2个CCD的响应以及分光镜3分光比进行定标。如图1所示,定标待标定F-P滤光器4具体过程如下:As shown in Figure 2, the frequency-stabilized He-Ne
步骤1,利用带宽极窄的稳频He-Ne激光器1产生稳频激光并经过扩束准直镜2扩束准直;
步骤2,不放入待标定F-P滤光器4,定标第一CCD 5、第二CCD 6的响应以及分光镜3分光比;
步骤3,利用分光镜3将激光分为2束,一束直接进入第二CCD 6,另一束通过待标定F-P滤光器4后由第一CCD 5接收;
步骤4,调节待标定F-P滤光器4调谐位置于某一调谐波长λi处,同时测量激光出射光功率以及激光经过待标定F-P滤光器4的透射光功率;
步骤5,利用第一CCD 5、第二CCD 6响应特性及分光镜3的分光比校正测量值并计算透射率;
步骤6,改变λi,重复步骤4、5,测量多组透射率A-调谐波长λ数据,用高斯函数拟合曲线,计算曲线半宽及峰值透射率。设拟合的高斯函数曲线为:
则有,then there is,
Am=aA m = a
式中,A为透射率,a,b,λ0为待计算的拟合参数,Am为待标定F-P滤光器峰值透射率,w为待标定F-P滤光器半宽。In the formula, A is the transmittance, a, b, λ 0 are the fitting parameters to be calculated, Am is the peak transmittance of the FP filter to be calibrated, and w is the half-width of the FP filter to be calibrated.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010793773.5A CN111999035A (en) | 2020-08-10 | 2020-08-10 | F-P filter transmission curve calibration method using frequency stabilization He-Ne laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010793773.5A CN111999035A (en) | 2020-08-10 | 2020-08-10 | F-P filter transmission curve calibration method using frequency stabilization He-Ne laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111999035A true CN111999035A (en) | 2020-11-27 |
Family
ID=73463010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010793773.5A Pending CN111999035A (en) | 2020-08-10 | 2020-08-10 | F-P filter transmission curve calibration method using frequency stabilization He-Ne laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111999035A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113884199A (en) * | 2021-09-28 | 2022-01-04 | 深圳市海谱纳米光学科技有限公司 | A calibration device and calibration method for MEMS Fabry cavity chip |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106687781A (en) * | 2014-06-27 | 2017-05-17 | 光谱引擎股份公司 | Method for determining the spectral scale of a spectrometer and apparatus |
| CN107894283A (en) * | 2017-10-24 | 2018-04-10 | 中国科学院上海技术物理研究所 | The suppressing method of wide spectral range F P tunable optic filter multistage transmission peaks |
| CN108489606A (en) * | 2018-03-20 | 2018-09-04 | 中国科学院光电技术研究所 | Tunable optical filter online calibration method applied to sun observation |
| CN109738162A (en) * | 2019-01-08 | 2019-05-10 | 中国科学院合肥物质科学研究院 | A device and method for measuring F-P etalon parameters using angle tuning |
| CN110501141A (en) * | 2019-08-21 | 2019-11-26 | 中国科学院合肥物质科学研究院 | Device and method for measuring transmittance curve of FP by using frequency comb light source |
| CN110530609A (en) * | 2019-08-28 | 2019-12-03 | 中国科学院合肥物质科学研究院 | The device and method for surveying FP transmittance curve using Whispering-gallery-mode laser light source |
-
2020
- 2020-08-10 CN CN202010793773.5A patent/CN111999035A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106687781A (en) * | 2014-06-27 | 2017-05-17 | 光谱引擎股份公司 | Method for determining the spectral scale of a spectrometer and apparatus |
| CN107894283A (en) * | 2017-10-24 | 2018-04-10 | 中国科学院上海技术物理研究所 | The suppressing method of wide spectral range F P tunable optic filter multistage transmission peaks |
| CN108489606A (en) * | 2018-03-20 | 2018-09-04 | 中国科学院光电技术研究所 | Tunable optical filter online calibration method applied to sun observation |
| CN109738162A (en) * | 2019-01-08 | 2019-05-10 | 中国科学院合肥物质科学研究院 | A device and method for measuring F-P etalon parameters using angle tuning |
| CN110501141A (en) * | 2019-08-21 | 2019-11-26 | 中国科学院合肥物质科学研究院 | Device and method for measuring transmittance curve of FP by using frequency comb light source |
| CN110530609A (en) * | 2019-08-28 | 2019-12-03 | 中国科学院合肥物质科学研究院 | The device and method for surveying FP transmittance curve using Whispering-gallery-mode laser light source |
Non-Patent Citations (2)
| Title |
|---|
| 梁永茂: "《临床激光医学》", 31 December 1993, pages: 27 * |
| 詹达三: "《光学(下)》", 31 July 1983, pages: 982 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113884199A (en) * | 2021-09-28 | 2022-01-04 | 深圳市海谱纳米光学科技有限公司 | A calibration device and calibration method for MEMS Fabry cavity chip |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100538258C (en) | Optical Bandwidth Meter for Extremely Narrow Bandwidth Laser Emissions | |
| US8804780B2 (en) | Method for adjusting spectral line width of narrow-band laser | |
| US11874169B2 (en) | Device for measuring transmittance curve of Fabry-Perot using frequency comb light source and method using the same | |
| JP5511163B2 (en) | Distance measuring method and apparatus by light wave interference | |
| US11079686B2 (en) | Excimer laser apparatus and electronic-device manufacturing method | |
| US20080037010A1 (en) | Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light | |
| CN109855541B (en) | Air refractive index self-calibration system and method based on optical frequency comb | |
| CN109738162A (en) | A device and method for measuring F-P etalon parameters using angle tuning | |
| JP7674534B2 (en) | Highly stable excimer laser device | |
| US20230194348A1 (en) | Device and method for online measuring spectrum for laser device | |
| CN111412989A (en) | Fourier transform infrared light splitting device | |
| CN102155997A (en) | Optical fiber type laser wavelength meter | |
| US20070014326A1 (en) | Line narrowed laser apparatus | |
| JP4773957B2 (en) | Improved bandwidth estimation method | |
| JP2010261890A (en) | Lightwave interference measuring device | |
| CN111999035A (en) | F-P filter transmission curve calibration method using frequency stabilization He-Ne laser | |
| CN203135206U (en) | Line width stabilization controlling apparatus for narrow-linewidth excimer laser | |
| CN110231098B (en) | Ultrashort laser pulse multipath delay synchronization test method | |
| CN103078247B (en) | Constant linewidth control device for narrow linewidth excimer laser | |
| Sandstrom | Measurements of beam characteristics relevant to DUV microlithography on a KrF excimer laser | |
| CN104316185B (en) | Method and apparatus that are a kind of while monitoring laser spectrum and spectral power distribution | |
| CN110702236A (en) | High-precision spectrum calibration method for optical fiber wavelength standard device | |
| CN117629426A (en) | Optical wavelength measurement method and system traceable to high-accuracy time-frequency reference | |
| JP5730428B2 (en) | Narrow-band laser device and spectral width adjustment method thereof | |
| WO2016046871A1 (en) | Laser device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20201127 |
|
| WD01 | Invention patent application deemed withdrawn after publication |