CN111766659A - A kind of controllable preparation device and method of nano-fiber - Google Patents
A kind of controllable preparation device and method of nano-fiber Download PDFInfo
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- 239000002121 nanofiber Substances 0.000 title claims abstract description 85
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Abstract
本发明公开了一种纳米光纤的可控制备装置,能够实现待加工微米光纤待拉位置纳米光纤的制备,包括:提供激光的脉冲激光器;支撑台,所述待加工微米光纤悬空定位在该支撑台上;将待加工微米光纤一端与所述脉冲激光器输出端连接的裸光纤适配器;置于所述微米光纤待拉位置、能够与其形成近场效应的微米片。通过调整并固定微米片与微米光纤的相对位置,可制备不同梯度分布的纳米光纤,控制出射激光的脉冲个数与单脉冲能量,可实现对纳米光纤直径的精确调控,操作简单,容易操作,在纳米尺度下可对拉制过程实时监控。
The invention discloses a controllable preparation device for nano-fiber, which can realize the preparation of nano-fiber at the position where the micro-fiber to be processed is to be pulled. A bare fiber adapter connecting one end of the micron fiber to be processed with the output end of the pulsed laser; a micron sheet placed at the position where the micron fiber is to be pulled and capable of forming a near-field effect therewith. By adjusting and fixing the relative positions of the micro-sheet and the micro-fiber, nano-fibers with different gradient distributions can be prepared, and the number of pulses and single-pulse energy of the outgoing laser can be controlled, and the precise control of the diameter of the nano-fiber can be realized. The operation is simple and easy to operate. The drawing process can be monitored in real time at the nanoscale.
Description
技术领域technical field
本发明涉及纳米光纤制备领域,特别涉及一种纳米光纤的可控制备与方法,可实现纳米光纤直径、梯度的精确调控,在微纳光子学器件、微纳光学传感等领域有着重要的应用前景。The invention relates to the field of nano-fiber preparation, in particular to a controllable preparation and method of a nano-fiber, which can realize precise regulation of the diameter and gradient of the nano-fiber, and has important applications in the fields of micro-nano photonics devices, micro-nano optical sensing and the like prospect.
背景技术Background technique
光与物质的相互作用是近年来被广泛研究的课题,特别是单光子与单原子作用的研究。因为单原子的共振吸收截面积在~λ2量级,λ是被吸收光的波长,这种相互作用通常比较微弱。许多方法已经被用来增强光与原子的相互作用,其一是提高原子密度,其二是增强光场,以实现更有效、更强的相互作用。The interaction of light and matter is a subject that has been widely studied in recent years, especially the study of the interaction between single photons and single atoms. Because the resonant absorption cross-sectional area of a single atom is on the order of ~λ2, where λ is the wavelength of the absorbed light, this interaction is usually weak. A number of methods have been used to enhance the interaction of light with atoms, one by increasing the atomic density and the other by enhancing the light field for more efficient and stronger interactions.
微纳光纤是指直径在微米至纳米量级的光导纤维,它具有较小的尺寸以及对光场较强的束缚能力,从而实现较高的功率密度,在很多方面都具有广泛的应用,如精密光谱,光学耦合器件,量子存储以及光学操控等。Micro-nano fiber refers to an optical fiber with a diameter in the order of micrometers to nanometers. It has a small size and a strong binding ability to the light field, so as to achieve high power density and has a wide range of applications in many aspects, such as Precision spectroscopy, optical coupling devices, quantum storage and optical manipulation, etc.
而可以高效的制备可重复性的纳米光纤是其实用化的关键。目前,通常采用熔拉法制备纳米光纤,熔拉法是指利用加热设备对光纤进行局部加热,当光纤处于熔融状态时在光纤的两端施加拉力,光纤将沿轴向变细,最后在一端范围内形成纳米光纤。该制备方法具有方向性好、制备过程简单以及制作成本低等优点,但存在以下问题:一、熔拉法利用半手工拉制纳米光纤,需要操作人员反复尝试才能制备出理想的纳米光纤,如未拉制光纤固定的松紧度不一致性、未拉制光纤位于加热源的温度位置不一致都会影响纳米光纤的质量,可重复性不高;二、在拉制过程中,加热温度、拉制速度、环境温度和环境气流等不可控的因素都会影响拉制效果;三、由标准光纤制备成纳米光纤,通常需要拉长至少四十厘米,此时长距离具有微纳米直径的光纤受轻微的环境气流波动,加热区域的气流冲击容易发生断裂。对纳米光纤直径和表面形貌的稍许偏差将会导致其传感器件灵敏度的波动,使得对传感器件的验收和校准造成一定的影响,制约了基于微纳光纤的光学器件进一步发展。The efficient preparation of repeatable nanofibers is the key to its practical application. At present, nanofibers are usually prepared by fusion drawing method. The fusion drawing method refers to the use of heating equipment to locally heat the optical fiber. When the optical fiber is in a molten state, a pulling force is applied to both ends of the optical fiber, and the optical fiber will become thinner in the axial direction, and finally at one end form nanofibers. The preparation method has the advantages of good directionality, simple preparation process and low production cost, but has the following problems: 1. The fusion-drawing method uses semi-manual drawing of nano-fibers, which requires operators to repeatedly try to prepare ideal nano-fibers, such as The inconsistency of the tightness of the undrawn fiber fixation and the inconsistent temperature position of the undrawn fiber at the heating source will affect the quality of the nanofiber, and the repeatability is not high; 2. During the drawing process, the heating temperature, drawing speed, Uncontrollable factors such as ambient temperature and ambient airflow will affect the drawing effect; 3. Nano-fibers prepared from standard fibers usually need to be stretched at least 40 cm. At this time, long-distance fibers with micro-nano diameters are affected by slight ambient airflow fluctuations , the airflow impact in the heating area is prone to breakage. A slight deviation in the diameter and surface morphology of the nanofiber will lead to fluctuations in the sensitivity of the sensing device, which will have a certain impact on the acceptance and calibration of the sensing device, and restrict the further development of optical devices based on micro-nanofiber.
因此,研究一种可控的纳米光纤制备装置与方法,对于提高纳米光纤在微纳光子器件领域的发展具有一定的价值意义。Therefore, researching a controllable nanofiber preparation device and method has certain value and significance for improving the development of nanofibers in the field of micro-nano photonic devices.
发明内容SUMMARY OF THE INVENTION
本发明针对现有技术种纳米光纤在制备过程中重复性差、精度难以控制等问题,提出一种纳米光纤的可控制备装置与方法,可以改善现有技术纳米光纤制备过程中可重复性不高、受外界环境影响容易断裂等问题,最终拉制出直径、梯度可精确控制的纳米光纤。Aiming at the problems of poor repeatability and difficult control of precision in the preparation process of the nano-fiber in the prior art, the present invention proposes a controllable preparation device and method for the nano-fiber, which can improve the low repeatability in the preparation process of the nano-fiber in the prior art , and easily broken due to the influence of the external environment, and finally a nanofiber whose diameter and gradient can be precisely controlled are drawn.
为实现上述目的,本发明所采取的技术方案是:To achieve the above object, the technical scheme adopted by the present invention is:
一种纳米光纤的可控制备装置,能够实现待加工微米光纤待拉位置纳米光纤的制备,包括:A controllable preparation device for nano-fiber, which can realize the preparation of nano-fiber at the position where the micro-fiber to be processed is to be pulled, including:
提供激光的脉冲激光器;Pulsed lasers that provide laser light;
支撑台,所述待加工微米光纤悬空定位在该支撑台上;a support table, on which the micron fiber to be processed is suspended and positioned;
将待加工微米光纤一端与所述脉冲激光器输出端连接的裸光纤适配器;A bare fiber adapter connecting one end of the micron fiber to be processed with the output end of the pulsed laser;
置于所述微米光纤待拉位置、能够与其形成近场效应的微米片。A micron sheet placed at the position where the micron optical fiber is to be pulled and capable of forming a near-field effect therewith.
本发明的纳米光纤的可控制备装置主要包括微米片和脉冲激光器,微米片置于待加工微米光纤上,所述的脉冲激光器出射的激光耦合到微米光纤上,待拉位置即是微米片与微米光纤接触的位置,通过控制脉冲激光以及微米光纤的参数,可实现不同直径与锥度的纳米光纤可控制备。The controllable preparation device for nano-fiber of the present invention mainly includes a micro-chip and a pulsed laser. The micro-chip is placed on the micro-fiber to be processed, and the laser light emitted by the pulsed laser is coupled to the micro-fiber, and the position to be pulled is the micro-chip and the micro-fiber. By controlling the contact position of the micron fiber, by controlling the parameters of the pulsed laser and the micron fiber, the controllable preparation of nanofibers with different diameters and tapers can be realized.
本发明中,所述的脉冲激光器脉冲个数可主动调控,通过控制出射激光的脉冲个数,制备得到具有不同直径的纳米光纤。控制微米光纤的直径,可实现对纳米光纤锥度的调控,调控精度可达0.7°。In the present invention, the number of pulses of the pulsed laser can be actively controlled, and nanofibers with different diameters can be prepared by controlling the number of pulses of the outgoing laser. By controlling the diameter of the micro-fiber, the taper of the nano-fiber can be adjusted, and the adjustment accuracy can reach 0.7°.
本发明中,所述微米光纤进一步优选为直径在1~20微米范围内的光纤。对于直径较大的微米光纤(直径一般为6微米到20微米),沿着激光出射的方向,微米片一侧的微米光纤会受到一定的拉伸作用力,从而导致微米片两侧的微米光纤直径产生差异,实现梯度光纤的制备。In the present invention, the micron optical fiber is further preferably an optical fiber with a diameter in the range of 1-20 microns. For microfibers with larger diameters (generally 6 microns to 20 microns in diameter), along the direction of the laser output, the microfibers on one side of the microplate will be subjected to a certain tensile force, resulting in the microfibers on both sides of the microplate. The difference in diameter enables the preparation of gradient fibers.
对于直径较小的微米光纤(直径一般为5微米及以下),由于光纤倐逝场较强,加热更明显,微米片在加热的过程中会渐渐的把光纤包起来,因此可在对应的位置均匀加热,实现均匀纳米光纤的制备。For micron fibers with smaller diameters (generally 5 microns or less in diameter), due to the strong evanescent field of the optical fibers, the heating is more obvious. Uniform heating to realize the preparation of uniform nanofibers.
作为优选,还包括将所述待加工微米光纤悬空定位在所述支撑台上的光纤夹具。Preferably, it also includes an optical fiber clamp for suspending and positioning the micron optical fiber to be processed on the support table.
作为优选,还包括:Preferably, it also includes:
电子枪,发射电子束扫描待拉位置;Electron gun, emitting electron beam to scan the position to be pulled;
探测器,接收反射电子束信息,对待拉位置进行实时监控。The detector receives the reflected electron beam information and monitors the position to be pulled in real time.
作为优选,包括对待拉位置进行实时监控的电子束显微镜。利用扫描电子显微镜的电子束以及探测器对该纳米光纤的拉制过程进行实时监控。利用电子显微镜的电子枪发射电子束扫描待拉位置;利用电子显微镜的探测器,接收反射电子束信息,对待拉位置进行实时监控。Preferably, an electron beam microscope is included for real-time monitoring of the position to be pulled. The drawing process of the nanofiber was monitored in real time by the electron beam of the scanning electron microscope and the detector. The electron gun of the electron microscope is used to emit an electron beam to scan the position to be pulled; the detector of the electron microscope is used to receive the information of the reflected electron beam, and the position to be pulled is monitored in real time.
作为优选,所述微米片包括具有吸收激光性质的金属微米片、半导体微米片。Preferably, the microflakes include metal microflakes and semiconductor microflakes with properties of absorbing laser light.
作为优选,所述的脉冲激光器可以为宽谱光源,包括超连续激光,也可以为单波长光源,包括纳秒脉冲激光,皮秒脉冲激光;所述的微米光纤包括单模光纤、多模光纤。所述的脉冲激光器脉冲个数可主动调控。Preferably, the pulsed laser can be a broad-spectrum light source, including a supercontinuum laser, or a single-wavelength light source, including a nanosecond pulsed laser and a picosecond pulsed laser; the micron fiber includes a single-mode fiber, a multi-mode fiber . The number of pulses of the pulsed laser can be actively adjusted.
作为优选,还包括对所述脉冲激光器的工作参数进行控制的控制器。脉冲激光器所述控制器可以为计算机、控制芯片或者控制电路板等,主要是对脉冲激光器的脉冲激光的数目以及单脉冲的能量实现控制,进而实现对拉伸尺寸和拉伸精度的控制。Preferably, it also includes a controller for controlling the working parameters of the pulsed laser. The controller of the pulsed laser can be a computer, a control chip or a control circuit board, etc., mainly to control the number of pulsed lasers of the pulsed laser and the energy of a single pulse, thereby realizing the control of the stretching size and stretching accuracy.
作为优选,本发明提供了一种实现纳米光纤的可控制备装置,包括一根微米光纤,一对光纤夹具,一个微米片和一个脉冲激光器,一个裸光纤适配器,支撑台,电子枪以及探测器。微米光纤的两端固定在光纤夹具上,光纤夹具置于支撑台上,使得微米光纤处于悬空状态,微米片置于微米光纤上,所述的脉冲激光器出射的激光通过裸光纤适配器耦合到微米光纤上,待拉位置即是微米片与微米光纤接触的位置,通过调整并固定微米片与微米光纤的相对位置,可制备呈不同直径梯度分布的纳米光纤,控制出射激光的脉冲个数,制备得到具有不同直径的纳米光纤,拉伸的实时过程可通过电子束以及探测器进行实时监控。Preferably, the present invention provides a controllable preparation device for realizing nano-fiber, including a micro-fiber, a pair of fiber clamps, a micro-chip and a pulsed laser, a bare fiber adapter, a support table, an electron gun and a detector. Both ends of the micro-fiber are fixed on the fiber clamp, the fiber clamp is placed on the support table, so that the micro-fiber is in a suspended state, and the micro-chip is placed on the micro-fiber, and the laser emitted by the pulsed laser is coupled to the micro-fiber through a bare fiber adapter. The position to be pulled is the position where the micron sheet is in contact with the micron fiber. By adjusting and fixing the relative positions of the micron sheet and the micron fiber, nanofibers with different diameter gradient distributions can be prepared, and the number of pulses of the outgoing laser can be controlled. With nanofibers of different diameters, the real-time process of stretching can be monitored in real time by electron beams and detectors.
所述的微米光纤方向与光纤拉伸方向相同。The direction of the micron fiber is the same as the stretching direction of the fiber.
作为优选,所述支撑台一侧为凸台结构,一侧为凹台结构,所述为凸台结构和凹台结构对接形成整体的Z字型台阶结构,所述光纤夹具为设置在凸台结构上的两组,分别用于固定微米光纤的两端。定位完成后,所述微米纤维悬空设置在所述凹台结构处。Preferably, one side of the support table is a boss structure, and one side is a concave platform structure, the boss structure and the concave platform structure are connected to form an integral Z-shaped stepped structure, and the optical fiber clamp is arranged on the boss platform. The two groups on the structure are used to fix the two ends of the micron fiber respectively. After the positioning is completed, the micron fibers are suspended at the concave platform structure.
在加工过程中,没有设置微米片的部分支撑力度较强,为加工过程中的待拉位置提供足够的支撑力。同时,微米片通过范德华力黏附在微米光纤上,进一步增强了微米片的稳定性。且通激光后,由于在接触面上部分融化,两者之间的作用力进一步增强。In the process of processing, the part where the microchips are not provided has a strong support force, which provides sufficient support force for the position to be pulled during the process. At the same time, the microflakes are adhered to the micron fibers by van der Waals force, which further enhances the stability of the microflakes. And after the laser is turned on, the force between the two is further enhanced due to the partial melting on the contact surface.
本发明对于微米片的具体尺寸没有严格要求,一般为几微米到百微米。比如一般为5~500微米。选择何种尺寸的微米片时,首先需要满足能够被微米光纤稳定支撑。同时,需要根据加工梯度要求进行选择。具体需要选择哪种尺寸的微米片,还需要根据实际待加工梯度要求,加工精度要求等等进行选择。当某一尺寸的微米片选择后,可以针对该微米片进行多次预先的实验,确定某一强度的脉冲激光加后,对应得到的拉伸尺寸,经过多次实验,可以快速确定,针对该尺寸的微米片,施加的激光的脉冲数以及脉冲强度与光纤拉伸尺寸之间的定量关系,进而在后续的加工时,实现自动控制。当然,针对超连续激光,也可以通过多次实现,确定激光施加时间、激光强度与光纤拉伸尺寸之间的定量关系,在后续加工时,实现自动控制。The present invention does not have strict requirements on the specific size of the microflakes, which are generally several micrometers to hundreds of micrometers. For example, it is generally 5 to 500 microns. When choosing the size of the microchip, it must first be able to be stably supported by the microfiber. At the same time, it needs to be selected according to the processing gradient requirements. The specific size of microchips to be selected also needs to be selected according to the actual gradient requirements to be processed, processing accuracy requirements, and so on. When a certain size of microchip is selected, several pre-experiments can be carried out for the microchip to determine the corresponding tensile size obtained by applying a pulsed laser of a certain intensity. After many experiments, it can be quickly determined. The size of the microflakes, the number of applied laser pulses, and the quantitative relationship between the pulse intensity and the fiber stretched size can be automatically controlled during subsequent processing. Of course, for supercontinuum lasers, the quantitative relationship between laser application time, laser intensity and fiber stretch size can also be determined through multiple implementations, and automatic control can be realized during subsequent processing.
一种纳米光纤的可控制备方法,包括:利用上述任一项技术方案所述的装置进行制备:A controllable preparation method of a nano-fiber, comprising: using the device described in any of the above technical solutions to prepare:
(1)将待加工微米光纤一端通过裸光纤适配器与脉冲激光器输出端固定;(1) Fix one end of the micron fiber to be processed with the output end of the pulsed laser through a bare fiber adapter;
(2)并将待加工微米光纤悬空定位在支撑台上;(2) The micron fiber to be processed is suspended and positioned on the support table;
(3)将微米片搭放在待加工微米光纤的待拉位置;(3) Lay the micron sheet on the to-be-pulled position of the micron fiber to be processed;
(4)开启脉冲激光器,通过控制激光参数,制成目标尺寸的纳米光纤;(4) Turn on the pulsed laser, and make nanofibers of target size by controlling the laser parameters;
步骤(1)和步骤(2)顺序可以调换或者同时进行。The order of step (1) and step (2) can be reversed or performed simultaneously.
作为优选,所述待加工微米光纤为微米光纤阵列。采用该技术方案,可以实现对多个微米光纤待拉位置的纳米拉伸加工。Preferably, the micro-fiber to be processed is a micro-fiber array. By adopting the technical solution, nano-stretching processing of multiple micron optical fibers to be pulled can be realized.
本发明可以通过一对光纤夹具夹持微米光纤阵列,光纤夹具置于支撑台上,使微米光纤处于悬空状态,微米片置于微米光纤上,在微米光纤的一端通入脉冲激光,然后通过裸光纤适配器将脉冲激光器中的激光耦合到微米光纤中,通过调整并固定微米片与微米光纤的相对位置,可制备不同梯度分布的纳米光纤,通过控制脉冲激光的数目以及单脉冲的能量,可制成具有不同直径的纳米光纤,最终制备后得到直径和梯度可控的纳米光纤,在整个拉伸过程中,利用电子束成像以及探测器对纳米级的拉伸过程进行实时监控,拉伸精度可达在1纳米;控制微米光纤的直径,可实现对纳米光纤锥度的调控,调控精度可达0.7°。The invention can clamp the micrometer fiber array by a pair of optical fiber clamps, the fiber clamp is placed on the support table, the micrometer fiber is in a suspended state, the micrometer sheet is placed on the micrometer fiber, the pulse laser is passed through one end of the micrometer fiber, and then the micrometer fiber is passed through the bare fiber. The fiber adapter couples the laser light in the pulsed laser to the micrometer fiber. By adjusting and fixing the relative position of the micrometer sheet and the micrometer fiber, nanofibers with different gradient distributions can be prepared. Nanofibers with different diameters are obtained, and finally nanofibers with controllable diameter and gradient are obtained. During the whole drawing process, electron beam imaging and detectors are used to monitor the nanoscale drawing process in real time, and the drawing precision can be improved. up to 1 nanometer; by controlling the diameter of the micron fiber, the taper of the nanofiber can be adjusted, and the adjustment accuracy can reach 0.7°.
作为优选,对其中一个待拉位置加工完成后,去除该位置残留的微米片,取新的微米片,按照步骤(3)和步骤(4)对该微米光纤其他待拉位置进行加工处理,制备带有多个纳米光纤结构的纳米光纤。采用该技术方案,可以实现对同一个微米光纤上不同位置纳米光纤的加工。Preferably, after processing one of the to-be-pulled positions, remove the remaining micron flakes at this position, take a new micron flake, and process the other to-be-pulled positions of the micron fiber according to steps (3) and (4) to prepare Nanofibers with multiple nanofiber structures. By adopting the technical solution, the processing of nano-fibers at different positions on the same micro-fiber can be realized.
去除所述残留的微米片的方法一般选择化学溶液去除法。The method of removing the residual microflakes generally selects a chemical solution removal method.
本发明与现有技术相比,优势在于:Compared with the prior art, the present invention has the advantages of:
(1)本发明在微米光纤的基础上制备纳米光纤,避免了基于熔拉法直接制备纳米光纤长度过长而导致断裂的问题,大大提高了纳米光纤的制备效率和成功率。此外,该方法有效的降低了基于纳米光纤器件性能受外界环境(如气流,振动等)影响的问题。(1) The present invention prepares the nano-fiber on the basis of the micro-fiber, avoids the problem that the length of the nano-fiber directly prepared based on the fusion drawing method is too long and leads to breakage, and greatly improves the preparation efficiency and success rate of the nano-fiber. In addition, the method effectively reduces the problem that the performance of the nanofiber-based device is affected by the external environment (such as airflow, vibration, etc.).
(2)本发明可以通过脉冲激光的脉冲个数,实现对纳米光纤直径的精确控制,控制精度可达1纳米。(2) The present invention can realize precise control of the diameter of the nano-fiber through the number of pulses of the pulsed laser, and the control precision can reach 1 nanometer.
(3)本发明可以通过控制微米片与微米光纤的直径,实现对纳米光纤梯度的精确调控,控制精度可达0.7°。(3) The present invention can realize the precise regulation of the nano-fiber gradient by controlling the diameters of the micro-sheet and the micro-fiber, and the control precision can reach 0.7°.
(4)本发明所涉及的纳米光纤拉制系统可在真空中进行,可利用电子显微镜对纳米光纤的直径与锥度进行实时的监控。(4) The nanofiber drawing system involved in the present invention can be performed in a vacuum, and the diameter and taper of the nanofiber can be monitored in real time by using an electron microscope.
附图说明Description of drawings
图1为本发明的制备装置结构的立体图。FIG. 1 is a perspective view of the structure of the preparation device of the present invention.
图2为本发明的制备的直径可控的纳米光纤的结构示意图,(a)微米光纤;(b)直径可控的纳米光纤;(c)锥度可控的纳米光纤。2 is a schematic structural diagram of the diameter-controllable nano-fiber prepared by the present invention, (a) a micro-fiber; (b) a diameter-controllable nano-fiber; (c) a taper-controllable nano-fiber.
图3为本发明的制备装置结构与电子显微系统的集成立体图。3 is an integrated perspective view of the structure of the preparation device and the electron microscope system of the present invention.
图中:1-第一光纤夹具,2-第二光纤夹具,3-微米光纤,4-微米片,5-脉冲激光器,6-裸光纤适配器,7-支撑台,8-电子枪,9-探测器;In the figure: 1-first fiber fixture, 2-second fiber fixture, 3-micron fiber, 4-micron sheet, 5-pulse laser, 6-bare fiber adapter, 7-support table, 8-electron gun, 9-detection device;
图4为梯度纳米光纤的拉制实物图;在该装置中,微米光纤的直径为7.28微米,微米片的横向尺寸为31.48微米,纵向尺寸为30.38微米,该器件拉伸时间为30秒,激光器的重复频率为100kHz,脉冲激光个数为300万个,单脉冲能量为4微焦,单脉冲宽度为4纳秒,均匀纳米光纤的拉伸精度为0.8667纳米。Figure 4 is a drawing of the gradient nanofiber; in this device, the diameter of the microfiber is 7.28 microns, the lateral size of the micron sheet is 31.48 microns, and the longitudinal size is 30.38 microns, the device stretching time is 30 seconds, the laser The repetition rate is 100 kHz, the number of pulsed lasers is 3 million, the single pulse energy is 4 microjoules, the single pulse width is 4 nanoseconds, and the stretching precision of the uniform nanofiber is 0.8667 nanometers.
图5为均匀纳米光纤的拉制实物图;在该装置中,微米光纤的直径为3.24微米,微米片的横向尺寸为29.94微米,纵向尺寸为23.11微米,该器件的拉伸时间为22秒,激光器的重复频率为100kHz,脉冲激光个数为220万个,单脉冲能量为4微焦,单脉冲宽度为4纳秒,梯度纳米光纤的拉伸精度为0.6955度。Figure 5 is a drawing of a uniform nanofiber; in this device, the diameter of the microfiber is 3.24 microns, the lateral size of the micron sheet is 29.94 microns, and the longitudinal size is 23.11 microns, and the drawing time of the device is 22 seconds. The repetition rate of the laser is 100 kHz, the number of pulsed lasers is 2.2 million, the single pulse energy is 4 microjoules, the single pulse width is 4 nanoseconds, and the stretching accuracy of the gradient nanofiber is 0.6955 degrees.
具体实施方式Detailed ways
下面结合附图和具体实施实例对本发明作进一步详细的描述,但本发明的实施方式不限于此。The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments, but the embodiments of the present invention are not limited thereto.
一种纳米光纤的可控制备装置及方法,包括光纤夹具,微米片和脉冲激光器,裸光纤适配器,支撑台,电子枪以及探测器。待加工微米光纤的两端固定在光纤夹具上,光纤夹具置于支撑台上,使得微米光纤处于悬空状态,微米片置于微米光纤上,所述的脉冲激光器出射的激光通过裸光纤适配器耦合到微米光纤上,待拉位置即是微米片与微米光纤接触的位置,通过调整并固定微米片与微米光纤的相对位置,可制备呈不同直径梯度分布的纳米光纤,控制出射激光的脉冲个数,制备得到具有不同直径的纳米光纤,拉伸的实时过程可通过电子束以及探测器进行实时监控。A controllable preparation device and method for nano-optical fibers, comprising an optical fiber fixture, a microchip and a pulsed laser, a bare optical fiber adapter, a support table, an electron gun and a detector. Both ends of the micro-fiber to be processed are fixed on the fiber fixture, and the fiber fixture is placed on the support table, so that the micro-fiber is in a suspended state, and the micro-chip is placed on the micro-fiber. The laser emitted by the pulsed laser is coupled to the On the micron fiber, the position to be pulled is the position where the micron sheet and the micron fiber are in contact. By adjusting and fixing the relative positions of the micron sheet and the micron fiber, nanofibers with different diameter gradient distributions can be prepared, and the number of pulses of the outgoing laser can be controlled. Nanofibers with different diameters are prepared, and the real-time process of stretching can be monitored in real time by electron beams and detectors.
其中,所述的微米光纤方向与光纤拉伸方向相同。Wherein, the direction of the micron fiber is the same as the stretching direction of the fiber.
其中,所述的微米光纤包括单模光纤,多模光纤。Wherein, the micron optical fibers include single-mode optical fibers and multi-mode optical fibers.
其中,所述的微米片包括金属微米片,半导体微米片。Wherein, the micro flakes include metal micro flakes and semiconductor micro flakes.
其中,所述的脉冲激光器脉冲个数可主动调控。Wherein, the number of pulses of the pulsed laser can be actively adjusted.
其中,所述的脉冲激光器为宽谱激光器或单波长激光器。Wherein, the pulsed laser is a broad-spectrum laser or a single-wavelength laser.
其中,电子枪与探测器是电子束显微镜中的电子枪和探测器。Among them, the electron gun and detector are the electron gun and detector in the electron beam microscope.
如图1所示,一种纳米光纤的可控制备装置,一对光纤夹具分别是第一光纤夹具1和第二光纤夹具2,微米片4置于微米光纤3上,微米光纤3的两端分别固定在第一光纤夹具1和第二光纤夹具2上,光纤夹具置于支撑台9上,使微米光纤处于悬空状态,脉冲激光器5通过裸光纤适配器6将出射的激光耦合到微米光纤1中,可配合使用控制器(如信号发生器)控制脉冲激光器的工作参数(脉冲发射频率,脉冲数量,脉冲强度等等),通过控制脉冲激光器的脉冲个数、单脉冲能量,以实现对纳米光纤直径和梯度的精确调控。As shown in Figure 1, a controllable preparation device for nano-optical fibers, a pair of optical fiber fixtures are respectively a first
如图3所示,可以将该本发明的装置置于电子显微镜系统中,形成集成一体的结构,利用电子显微镜系统的电子枪8出射的电子对样品进行成像,并利用探测器9进行探测,以实现对纳米光纤制备过程的实时监控。As shown in FIG. 3 , the device of the present invention can be placed in an electron microscope system to form an integrated structure, and the electrons emitted by the
一种纳米光纤可控制备方法,该方法步骤如下:A method for controllable preparation of nano-fiber, the method steps are as follows:
(1)将待加工微米光纤一端通过裸光纤适配器与脉冲激光器输出端固定;(1) Fix one end of the micron fiber to be processed with the output end of the pulsed laser through a bare fiber adapter;
(2)并将待加工微米光纤悬空定位在该支撑台上;(2) and suspend the micron fiber to be processed on the support table;
(3)将微米片搭放在待加工微米光纤的待拉位置;(3) Lay the micron sheet on the to-be-pulled position of the micron fiber to be processed;
(4)开启脉冲激光器,通过控制激光参数,制成具有不同直径的纳米光纤;(4) Turn on the pulsed laser, and make nano-fibers with different diameters by controlling the laser parameters;
步骤(1)和步骤(2)顺序可以调换或者同时进行。The order of step (1) and step (2) can be reversed or performed simultaneously.
本发明的加工原理如下:在微米光纤与微米片所组成的集成系统中,由于微米光纤较强的倐逝场效应,可将一部分光能量从波导模式耦合到外部环境的消逝场中,该消逝场与微米片相互作用,形成近场增强效应,瞬时局域的光场转化成热场,该集成系统由于近场效应在微米片的两端形成温度梯度,从而形成沿着微米光纤轴向的梯度力,实现对微米光纤的拉制效应,在该系统中,梯度力的大小可由脉冲激光单脉冲能量控制,单脉冲能量越高,梯度力越大,拉伸的次数可由脉冲个数控制,进而实现在亚纳米精度范围内的纳米光纤制备。The processing principle of the present invention is as follows: in the integrated system composed of micron optical fibers and micron sheets, due to the strong evanescent field effect of the micron optical fibers, a part of the light energy can be coupled from the waveguide mode into the evanescent field of the external environment, and the evanescent field of the external environment can be coupled. The field interacts with the microchip to form a near-field enhancement effect, and the instantaneous localized optical field is converted into a thermal field. The integrated system forms a temperature gradient at both ends of the microchip due to the near-field effect, thereby forming an axial direction along the microfiber. Gradient force, realizes the drawing effect on micron fibers. In this system, the magnitude of the gradient force can be controlled by the single pulse energy of the pulsed laser. In turn, nanofiber fabrication in the sub-nanometer precision range is realized.
上述待加工微米光纤可以为微米光纤阵列。采用该技术方案,可以实现对多个微米光纤待拉位置的纳米拉伸加工。The micro-fiber to be processed may be a micro-fiber array. By adopting the technical solution, nano-stretching processing of multiple micron optical fibers to be pulled can be realized.
对其中一个待拉位置加工完成后,去除该位置残留的微米片,取新的微米片,按照步骤(3)和步骤(4)对该微米光纤其他待拉位置进行加工处理,制备带有多个纳米光纤结构的纳米光纤。After processing one of the to-be-pulled positions, remove the remaining micron flakes at this position, take a new micron flake, and process the other to-be-pulled positions of the micron fiber according to steps (3) and (4). A nanofiber with a nanofiber structure.
图2为采用本发明方法制备的直径可控的纳米光纤的结构示意图,(a)微米光纤;(b)直径可控的纳米光纤;(c)锥度可控的纳米光纤。其中(a)为待加工的微米光纤,(b)为采用直径为2~4微米的微米光纤加工得到的纳米光纤,(c)为采用直径为6~10微米的微米光纤加工得到的微米光纤;利用本发明的装置和方法,通过调整并固定微米片与微米光纤的相对位置,可制备不同梯度分布的纳米光纤,通过控制脉冲激光的数目以及单脉冲的能量,可制成具有不同直径的纳米光纤,最终制备后得到直径和梯度可控的纳米光纤,在整个拉伸过程中,利用电子束成像以及探测器对纳米级的拉伸过程进行实时监控,拉伸精度可达在1纳米;控制微米光纤的直径,可实现对纳米光纤锥度的调控,调控精度可达0.7°。2 is a schematic structural diagram of the diameter-controllable nano-fiber prepared by the method of the present invention, (a) micro-fiber; (b) diameter-controllable nano-fiber; (c) taper-controllable nano-fiber. Wherein (a) is the micro-fiber to be processed, (b) is the nano-fiber processed by using the micro-fiber with a diameter of 2-4 microns, (c) is the micro-fiber processed by using the micro-fiber with a diameter of 6-10 microns ;Using the device and method of the present invention, by adjusting and fixing the relative positions of the micron sheet and the micron fiber, nanofibers with different gradient distributions can be prepared, and by controlling the number of pulsed lasers and the energy of a single pulse, it can be made into different diameters. Nano-fiber, nano-fiber with controllable diameter and gradient is obtained after final preparation. During the whole drawing process, electron beam imaging and detector are used to monitor the nano-scale drawing process in real time, and the drawing precision can reach 1 nanometer; By controlling the diameter of the micro-fiber, the taper of the nano-fiber can be adjusted, and the adjustment accuracy can reach 0.7°.
图4为梯度纳米光纤的拉制实物图;在该装置中,微米光纤的直径为7.28微米,微米片的横向尺寸为31.48微米,纵向尺寸为30.38微米,该器件拉伸时间为30秒,激光器的重复频率为100kHz,脉冲激光个数为3000k个,单脉冲能量为4微焦,单脉冲宽度为4纳秒,均匀纳米光纤的拉伸精度为0.8667纳米。Figure 4 is a drawing of the gradient nanofiber; in this device, the diameter of the microfiber is 7.28 microns, the lateral size of the micron sheet is 31.48 microns, and the longitudinal size is 30.38 microns, the device stretching time is 30 seconds, the laser The repetition rate is 100kHz, the number of pulsed lasers is 3000k, the single pulse energy is 4 microjoules, the single pulse width is 4 nanoseconds, and the stretching precision of the uniform nanofiber is 0.8667 nanometers.
图5为均匀纳米光纤的拉制实物图;在该装置中,微米光纤的直径为3.24微米,微米片的横向尺寸为29.94微米,纵向尺寸为23.11微米,该器件的拉伸时间为22秒,激光器的重复频率为100kHz,脉冲激光个数为2200k个,单脉冲能量为4微焦,单脉冲宽度为4纳秒,梯度纳米光纤的拉伸精度为0.6955度。Figure 5 is a drawing of a uniform nanofiber; in this device, the diameter of the microfiber is 3.24 microns, the lateral size of the micron sheet is 29.94 microns, and the longitudinal size is 23.11 microns, and the drawing time of the device is 22 seconds. The repetition rate of the laser is 100 kHz, the number of pulsed lasers is 2200k, the single pulse energy is 4 microjoules, the single pulse width is 4 nanoseconds, and the stretching accuracy of the gradient nanofiber is 0.6955 degrees.
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| CN113534348A (en) * | 2021-07-13 | 2021-10-22 | 西湖大学 | A driving method, device and application of an on-chip micro-nano object based on optical power |
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