CN111716235A - Heat-assisted chemical-mechanical composite abrasive flow polishing device and method - Google Patents

Abstract

The invention provides a heating-assisted chemical-mechanical composite abrasive flow polishing device and method, comprising a hydraulic system, a temperature measurement and feedback control system, a heating system, an oxidant injection system, an oxidant discharge system, abrasives, an upper abrasive cylinder, a lower abrasive cylinder, The upper piston, the lower piston and the clamp; the clamp is connected to the upper abrasive cylinder and the lower abrasive cylinder. The upper and lower abrasive cylinders are respectively provided with an upper piston and a lower piston. Under the action of reciprocating motion, the abrasive is arranged in the upper abrasive cylinder and/or the lower abrasive cylinder; the clamping area of the fixture is the polishing reaction area, and the temperature measurement and feedback control system can control the temperature of the heating system heating the polishing reaction area; the oxidant injection system And the oxidant discharge system can inject and discharge the oxidant to the upper and lower abrasive cylinders respectively. The invention adopts the method of mechanical polishing combined with chemical polishing and then assisted by heating, so as to improve the polishing efficiency and quality.

Description

Heat-assisted chemical-mechanical composite abrasive flow polishing device and method

technical field

The invention relates to the technical field of ultra-precision machining, in particular to a heating-assisted chemical-mechanical composite abrasive flow polishing device and method.

Background technique

Abrasive Flow Machining (AFM) is suitable for surface polishing of complex shapes, but its basic material removal principle is abrasive wear, and the abrasive flow used is a mixture of fluid carrier and abrasive particles, so it is not suitable for hard and ultra The polishing efficiency of hard materials is very low. Taking the diamond film with the highest hardness as an example, it is almost difficult to polish the intrinsic micron diamond film with high purity by traditional abrasive flow processing. Grain refinement can improve the initial surface finish of the diamond film, reduce the surface hardness, and improve the polishing efficiency to a certain extent. The effect is limited.

With the development of Hot Filament Chemical Vapor Deposition (HFCVD) technology, the preparation and application of diamond films on complex surfaces (such as diamond film-coated complex-shaped tools and special-shaped dies, etc.) For the surface polishing process, it is necessary to develop a new type of composite abrasive flow polishing method and device on the basis of abrasive flow processing.

Patent Publication No. CN1069859C "Abrasive Flow Machining and Polishing Apparatus" describes a classic abrasive flow machining and polishing apparatus comprising a hydraulically driven, reciprocating piston and an extrusion media chamber that accepts abrasive viscoelastic dispersion and extrude it unidirectionally through the inner surface of the workpiece with internal passages to grind the surface, in addition to the fixture assembly, collector, extrusion media chamber inlet, etc. Patent Publication No. CN101602182A, "An Abrasive Flow Machining Machine Tool" describes a machine tool that can realize automatic control of the stroke of a material cylinder in an abrasive flow machining machine tool and self-positioning and clamping functions of parts during processing. An abrasive flow processing machine tool in this patent document is characterized in that the extension strokes of the upper and lower pushing cylinders pass through the lock nut, the stroke limit nut, the upper gland, the sealing ring, the compression nut, the compression spring, the cone The material cylinder limit device composed of block, travel switch and switch bracket is used to limit the position. The mechanism is simple, the structure is compact, and the reliability is high. During self-positioning clamping, the spherical surface constraint is adopted between the spherical surface pressing sleeve and the unloading cylinder, so that the workpiece can be deflected with the deflection of the clamping beam during the clamping process, so as to ensure the effective clamping of the workpiece and eliminate the friction between the workpiece and the material cylinder. This device is suitable for surface processing or polishing of conventional materials with complex shapes, but when applied to hard and superhard materials, the processing force is small and the processing efficiency is extremely low, which cannot meet the application requirements.

SUMMARY OF THE INVENTION

In view of the defects in the prior art, the purpose of the present invention is to provide a heating-assisted chemical-mechanical composite abrasive flow polishing device and method.

According to one aspect of the present invention, a heating-assisted chemical-mechanical composite abrasive flow polishing device is provided, comprising a hydraulic system, a temperature measurement and feedback control system, a heating system, an oxidant injection system, an oxidant discharge system, abrasives, an upper abrasive cylinder, and a lower abrasive cylinder , upper piston, lower piston and clamp;

The clamp can clamp the workpiece to be polished, the upper end of the clamp is connected to the upper abrasive cylinder, the lower end of the clamp is connected to the lower abrasive cylinder, an upper piston is arranged inside the upper abrasive cylinder, and a lower piston is arranged inside the lower abrasive cylinder. The upper piston and the lower piston are respectively Connected to the hydraulic system and capable of reciprocating motion under the action of the hydraulic system, the abrasive is arranged in the upper abrasive cylinder and/or the lower abrasive cylinder;

The clamping area of the fixture is a polishing reaction area, the heating system can heat the polishing reaction area, the temperature measurement and feedback control system is connected to the heating system, and the temperature measurement and feedback control system can measure and control the polishing reaction area. temperature;

The oxidant injection system can inject oxidant into the upper abrasive cylinder and the lower abrasive cylinder, and the oxidant discharge system can discharge the oxidant in the upper abrasive cylinder and the lower abrasive cylinder.

Preferably, the heating system is integrated in any one or more of the following:

- workpiece to be polished;

- Fixtures;

- Upper abrasive cylinder;

- Lower abrasive cylinder.

Preferably, the temperature measurement and feedback control system includes a measurement module and a control module, and the control module is connected to the measurement module and the heating system;

The measurement module can measure the temperature of the polishing reaction zone in real time and feed it back to the control module, and the control module can control the heating system to work according to the set temperature and the temperature information fed back by the measurement module to keep the temperature of the polishing reaction zone at the set temperature.

Preferably, the surfaces of the upper abrasive cylinder, the lower abrasive cylinder, the upper piston, the lower piston and the gripper contacting the abrasive are made of anti-oxidative materials.

Preferably, between the upper abrasive cylinder and the fixture, between the lower abrasive cylinder and the fixture, between the upper piston and the upper abrasive cylinder, and between the lower piston and the lower abrasive cylinder are watertight connections.

Preferably, the abrasive is selected from a material with a viscosity in the range of -Pa·s.

Preferably, the oxidant injection system is connected to the upper abrasive cylinder and/or the lower abrasive cylinder through a one-way valve, and the oxidant injection system and the upper abrasive cylinder and/or the lower abrasive cylinder are watertightly connected;

The oxidant injection system also includes a flow meter capable of metering the volume of oxidant added to the upper and/or lower abrasive cylinders.

Preferably, the oxidant discharge system is connected to the upper abrasive cylinder and/or the lower abrasive cylinder through a one-way valve, and the oxidant discharge system and the upper abrasive cylinder and/or the lower abrasive cylinder are watertightly connected.

According to another aspect of the present invention, a heating-assisted chemical-mechanical composite abrasive flow polishing method is provided, comprising the steps of:

Step 1: Move the upper abrasive cylinder upward, and inject the abrasive into the lower abrasive cylinder;

Step 2: The workpiece to be polished is clamped and fixed by a fixture, the fixture that clamps the workpiece to be polished is placed on the lower abrasive cylinder, and then the upper abrasive cylinder is controlled to move down to compress the fixture;

Step 3: set the heating temperature and heat the polishing reaction zone through the heating system;

Step 4: After the polishing reaction zone is heated to the set temperature, the pressure of the upper abrasive cylinder and the lower abrasive cylinder is set through the hydraulic system, and the number of reciprocating movements of the upper piston and the lower piston is set, that is, the predetermined number of times of processing;

Step 5: inject oxidant into the upper abrasive cylinder through the oxidant injection system, the oxidant will cover the surface to be processed of the workpiece to be polished, start the hydraulic system, and the reciprocating motion of the upper piston and the lower piston starts processing;

Step 6: After the upper piston and the lower piston move for a set number of times, push the upper piston to move down, press the abrasive into the lower abrasive cylinder, and then inject oxidant into the upper abrasive cylinder through the oxidant injection system and continue processing;

Step 7: Repeat step 6 until the upper piston and the lower piston reciprocate to a predetermined number of times to complete the processing;

Step 8: After finishing the processing, move the upper abrasive cylinder upwards, remove the polished workpiece to be polished from the fixture, take out the abrasive from the lower abrasive cylinder, and discharge the oxidant from the oxidant discharge system.

Preferably, the heating-assisted chemical-mechanical composite abrasive flow polishing device is used for polishing.

Compared with the prior art, the present invention has the following beneficial effects:

1. The present invention adopts the method of mechanical polishing combined with chemical polishing and then heating-assisted, aiming at the complex shape surface prepared by easily oxidizable hard and superhard materials, by introducing oxidant in the polishing process of abrasive flow, and heating device to reduce the polishing temperature. Raised to a temperature prone to oxidation reaction, through the combination and mutual promotion of chemical action and mechanical action, the polishing efficiency and quality are improved.

2. The present invention is simple in structure and simple in operation, and can be applied to the polishing of workpieces of different materials by changing the types of abrasives and oxidants.

3. The present invention is suitable for surface polishing of hard or superhard materials with complex shapes. Taking micron-scale diamond film materials as an example, the surface roughness decline rate can be increased by more than two times, and the surface graphite caused by polishing can be effectively avoided. phenomenon.

Description of drawings

Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings:

FIG. 1 is a schematic structural diagram of the heating-assisted chemical-mechanical composite abrasive flow polishing device of the present invention.

FIG. 2 is a flow chart of the heating-assisted chemical-mechanical composite abrasive flow polishing method of the present invention.

The figure shows:

Hydraulic System 1 Abrasive 7

Temperature measurement and feedback control system 2 Upper abrasive cylinder 8

Heating System 3 Lower Abrasive Tank 9

Oxidant injection system 4 Upper piston 10

Oxidant discharge system 5 Lower piston 11

Workpiece to be polished 6 Fixture 12

Detailed ways

The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that, for those skilled in the art, several changes and improvements can be made without departing from the inventive concept. These all belong to the protection scope of the present invention.

In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying the indicated device. Or elements must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as a limitation of the present application.

A heating-assisted chemical-mechanical composite abrasive flow polishing device provided according to the present invention, as shown in FIG. 1, includes a hydraulic system 1, a temperature measurement and feedback control system 2, a heating system 3, an oxidant injection system 4, an oxidant discharge system 5, Abrasive 7, upper abrasive cylinder 8, lower abrasive cylinder 9, upper piston 10, lower piston 11 and fixture 12; the fixture 12 can clamp the workpiece 6 to be polished, the upper end of the fixture 12 is connected to the upper abrasive cylinder 8, and the lower end of the fixture 12 Connect the lower abrasive cylinder 9, the upper abrasive cylinder 8 is provided with an upper piston 10, the lower abrasive cylinder 9 is provided with a lower piston 11, the upper piston 10 and the lower piston 11 are respectively connected to the hydraulic system 1 and can reciprocate under the action of the hydraulic system 1 The abrasive 7 is arranged in the upper abrasive cylinder 8 and/or the lower abrasive cylinder 9; the clamping area of the fixture 12 is a polishing reaction zone, and the heating system 3 can heat the polishing reaction zone, and the temperature The measurement and feedback control system 2 is connected to the heating system 3, and the temperature measurement and feedback control system 2 can measure and control the temperature of the polishing reaction zone; the oxidant injection system 4 can inject oxidant into the upper abrasive cylinder 8 and the lower abrasive cylinder 9, the oxidant The discharge system 5 can discharge the oxidant in the upper abrasive cylinder 8 and the lower abrasive cylinder 9 . The chemical polishing effect is provided by injecting oxidant, the hydraulic system drives the upper and lower pistons and the reciprocating motion of the abrasive to provide the mechanical polishing effect, and the temperature required for the chemical reaction is provided by the temperature measurement and feedback control and heating system, which is suitable for hard or super-hard materials with complex shapes The surface of the material is polished, with higher polishing efficiency and quality.

The heating system 3 is integrated into any one or more of the following devices:

- workpiece 6 to be polished;

- Clamp 12;

- Upper abrasive cylinder 8;

- Lower abrasive cylinder 9.

The temperature measurement and feedback control system 2 includes a measurement module and a control module, the control module is connected to the measurement module and the heating system 3; the measurement module can measure the temperature of the polishing reaction zone in real time and feed it back to the control module, the control module The heating system 3 can be controlled to work according to the set temperature and the temperature information fed back by the measurement module to keep the temperature of the polishing reaction zone at the set temperature. The heating system 3 can heat the surface of the workpiece 6 to be polished to a set temperature, preferably the set temperature is 30-150°C; the temperature measurement and feedback control system can maintain the surface temperature of the workpiece to be polished at the set temperature.

The surfaces of the upper abrasive cylinder 8, the lower abrasive cylinder 9, the upper piston 10, the lower piston 11 and the clamp 12 in contact with the abrasive 7 are made of anti-oxidative materials, that is, all contact areas with the abrasive 7 are made of anti-oxidative materials. The upper abrasive cylinder 8 and the clamp 12 , the lower abrasive cylinder 9 and the clamp 12 , the upper piston 10 and the upper abrasive cylinder 8 , and the lower piston 11 and the lower abrasive cylinder 9 are all watertight connections. The abrasive 7 is selected from a material with a viscosity in the range of 1-1,000,000 Pa·s, that is, at a predetermined temperature, the viscosity of the abrasive 7 is controlled in the range of 1-1,000,000 Pa·s. The hydraulic system 1 can provide the pressure (0-50MPa) required for the reciprocating motion of the upper and lower pistons and the abrasive.

Preferably, both the upper abrasive cylinder 8 and the lower abrasive cylinder 9 include transverse baffles, and the transverse baffles can move along the radial direction of the upper abrasive cylinder 8 and the lower abrasive cylinder 9, thereby changing the upper abrasive cylinder 8 or the lower abrasive cylinder 9. The contact area of the abrasive 7 in the abrasive cylinder 9 with the workpiece 6 to be polished is suitable for polishing the workpiece 6 to be polished with different shapes. The jig 12 has various models, and different jigs 12 are selected according to the shape of the workpiece 6 to be polished.

The oxidant injection system 4 is connected to the upper abrasive cylinder 8 and/or the lower abrasive cylinder 9 through a one-way valve, and the oxidant injection system 4 is watertightly connected to the upper abrasive cylinder 8 and/or the lower abrasive cylinder 9; the oxidant injection system 4 also includes a flow meter capable of metering the volume of oxidant added to the upper abrasive cylinder 8 and/or the lower abrasive cylinder 9. The oxidant discharge system 5 is connected to the upper abrasive cylinder 8 and/or the lower abrasive cylinder 9 through a one-way valve, and the oxidant discharge system 5 and the upper abrasive cylinder 8 and/or the lower abrasive cylinder 9 are watertightly connected. The opening and closing of the oxidant injection port and the discharge port can be controlled as required, the injection port is controlled by a one-way valve, and the injection flow can be controlled, preferably, the injection flow is controlled between 0.01-100 mL/s. During the polishing process, the oxidant inlet and outlet are kept closed and have good watertight properties.

A heating-assisted chemical-mechanical composite abrasive flow polishing method provided according to the present invention, as shown in Figure 2, comprises the following steps:

Step 1: move the upper abrasive cylinder 8 upward, and inject the abrasive 7 into the lower abrasive cylinder 9; preferably, the quality of the abrasive 7 is 1-10kg;

Step 2: The workpiece 6 to be polished is clamped and fixed by the fixture 12, the fixture 12 that clamps the workpiece 6 to be polished is placed on the lower abrasive cylinder 9, and then the upper abrasive cylinder 8 is controlled to move downward to hold the clamping fixture 12; The shape and size of the workpiece 6 to be polished are selected from different types of fixtures;

Step 3: setting the heating temperature and heating the polishing reaction zone through the heating system 3;

Step 4: After the polishing reaction zone is heated to the set temperature, the pressure of the upper abrasive cylinder 8 and the lower abrasive cylinder 9 is set through the hydraulic system 1, and the number of reciprocating movements of the upper piston 10 and the lower piston 11 is set, that is, the predetermined number of times of processing ;

Step 5: inject oxidant into the upper abrasive cylinder 8 through the oxidant injection system 4, the oxidant will cover the to-be-processed surface of the workpiece 6 to be polished, start the hydraulic system 1, and the reciprocating motion of the upper piston 10 and the lower piston 11 starts processing;

Step 6: After the upper piston 10 and the lower piston 11 move for a set number of times, push the upper piston 10 to move down, press the abrasive 7 into the lower abrasive cylinder 9, and then inject the oxidant into the upper abrasive cylinder 8 through the oxidant injection system 4. continue processing;

Step 7: Repeat Step 6 until the upper piston 10 and the lower piston 11 reciprocate for a predetermined number of times to complete the processing; preferably, the flow rate of the oxidant injection is controlled at 0.01-100mL/s, and the volume of the oxidant added each time is controlled at 0.01-100mL;

Step 8: After finishing the processing, move the upper abrasive cylinder 8 upward, remove the polished workpiece 6 from the fixture 12, take out the abrasive 7 from the lower abrasive cylinder 9, and discharge the oxidant from the oxidant discharge system 5; After finishing processing, if there is still abrasive 7 in the upper abrasive cylinder 8, push the upper piston 10 to move downward, press the abrasive 7 into the lower abrasive cylinder 9, and then move the upper abrasive cylinder 8 upward.

Preferably, the heating-assisted chemical-mechanical composite abrasive flow polishing device is used for polishing.

The basic embodiments of the present application have been described above, and the present application will be described in more detail below with reference to the preferred examples and/or modified examples of the basic embodiments.

Example 1

The workpiece in this embodiment has a through hole with a diameter of 2 mm, the workpiece substrate is made of silicon carbide ceramics, and an intrinsic micro-diamond film with a thickness of 20 μm is deposited on the surface of the inner hole, and the initial surface roughness of the film is _Ra ~450 nm.

A simple fixture is used to fix the workpiece, and the fixture and the workpiece are heated by induction, and the temperature is controlled at 50-60 °C.

The abrasive with a viscosity of 5000-10000 Pa·s in the above temperature range is used, and the abrasive flows through the through hole of the workpiece.

The pressure of the upper and lower abrasive cylinders is 15MPa, and the total number of reciprocating times of the abrasive is 100 times. Work in the order shown in Figure 2, and an oxidant is added after every 10 reciprocating times.

The surface roughness of the film after polishing is _Ra ∼ 110 nm, and the surface roughness of the thin film after polishing with the same traditional abrasive flow processing equipment and parameters is _Ra ∼300 nm.

Example 2

The workpiece in this embodiment is a wire drawing die with a diameter of 4 mm in the sizing area, the workpiece substrate is made of cemented carbide, and the inner hole surface is deposited with an intrinsic micron diamond film with a thickness of 30 μm, and the initial surface roughness of the film is _Ra ~ 410nm.

A special fixture is used to fix the workpiece, and a resistance wire heating system is integrated inside the fixture, and the surface temperature of the workpiece is controlled at 55-60 °C.

The abrasive with a viscosity of 10,000 to 15,000 Pa·s in the above temperature range is used, and the abrasive flows through the hole of the workpiece.

The pressure of the upper and lower abrasive cylinders is 17MPa, and the total number of reciprocating times of the abrasive is 120 times. Work in the sequence shown in Figure 2, and an oxidant is added after every 8 reciprocations.

The surface roughness of the thin film after polishing is _Ra ∼ 90 nm, and the surface roughness of the thin film after polishing using the same traditional abrasive flow processing equipment and parameters is _Ra ∼320 nm.

Example 3

The workpiece in this embodiment is a helical milling cutter with a shank diameter and a blade diameter of 8 mm, the base material of the milling cutter is cemented carbide, and an intrinsic nano-diamond film with a thickness of 10 μm is deposited on the surface, and the initial surface roughness of the film is R _a ~ 170nm.

The workpiece is fixed by a special fixture, and the resistance wire heating system is integrated inside the fixture, and the surface temperature of the workpiece is controlled at 65-70 °C.

The abrasive with a viscosity of 10,000 to 15,000 Pa·s in the above temperature range is used, and the abrasive flows through the pores formed on the surface of the jig and the tool.

The pressure of the upper and lower abrasive cylinders is 15MPa, and the total number of reciprocating times of the abrasive is 150 times. Work in the order shown in Figure 2, and an oxidant is added after every 15 reciprocating times.

The surface roughness of the thin film after polishing is _Ra ∼ 80 nm, and the surface roughness of the thin film after polishing with the same traditional abrasive flow processing equipment and parameters is _Ra ∼135 nm.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the above-mentioned specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essential content of the present invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily, provided that there is no conflict.

Claims (10)

1. A heating-assisted chemical mechanical composite abrasive flow polishing device is characterized by comprising a hydraulic system (1), a temperature measurement and feedback control system (2), a heating system (3), an oxidant injection system (4), an oxidant discharge system (5), an abrasive (7), an upper abrasive cylinder (8), a lower abrasive cylinder (9), an upper piston (10), a lower piston (11) and a clamp (12);

the polishing machine comprises a clamp (12), an upper grinding cylinder (8), a lower grinding cylinder (9), an upper piston (10), a lower piston (11), a hydraulic system (1), an abrasive (7) and a polishing head, wherein the clamp (12) can clamp a workpiece (6) to be polished, the upper end of the clamp (12) is connected with the upper grinding cylinder (8), the lower end of the clamp (12) is connected with the lower grinding cylinder (9), the upper piston (10) is arranged in the upper grinding cylinder (8), the lower piston (11) is arranged in the lower grinding cylinder (9), the upper piston (10) and the lower piston (11) are respectively connected with the hydraulic system (1) and can reciprocate under the action of the hydraulic system (1), and;

the polishing reaction area is arranged in the clamping area of the clamp (12), the heating system (3) can heat the polishing reaction area, the temperature measurement and feedback control system (2) is connected with the heating system (3), and the temperature measurement and feedback control system (2) can measure and control the temperature of the polishing reaction area;

the oxidant injection system (4) can inject oxidant into the upper abrasive cylinder (8) and the lower abrasive cylinder (9), and the oxidant discharge system (5) can discharge the oxidant in the upper abrasive cylinder (8) and the lower abrasive cylinder (9).

2. A heat assisted chemical mechanical composite abrasive flow polishing apparatus according to claim 1, characterized in that the heating system (3) is integrated in any one or more of the following:

-a workpiece (6) to be polished;

-a clamp (12);

-an upper grinding cylinder (8);

-a lower grinding cylinder (9).

3. The heat assisted chemical mechanical composite abrasive flow polishing apparatus according to claim 1, wherein the temperature measurement and feedback control system (2) comprises a measurement module and a control module, the control module connecting the measurement module and the heating system (3);

the measuring module can measure the temperature of the polishing reaction zone in real time and feed the temperature back to the control module, and the control module can control the heating system (3) to work according to the set temperature and the temperature information fed back by the measuring module so as to keep the temperature of the polishing reaction zone at the set temperature.

4. The heat assisted chemical mechanical composite abrasive flow polishing device according to claim 1, characterized in that the upper abrasive cylinder (8), the lower abrasive cylinder (9), the upper piston (10), the lower piston (11) and the surfaces of the clamp (12) contacting the abrasive (7) are made of oxidation resistant materials.

5. A heat assisted chemical mechanical composite abrasive flow polishing device according to claim 1, characterized in that between the upper abrasive cylinder (8) and the clamp (12), between the lower abrasive cylinder (9) and the clamp (12), between the upper piston (10) and the upper abrasive cylinder (8), and between the lower piston (11) and the lower abrasive cylinder (9) are watertight connections.

6. A heat assisted chemical mechanical composite abrasive flow polishing device according to claim 1, characterized in that the abrasive (7) is of a material selected for its viscosity in the range of 1-1000000 Pa-s.

7. The heat assisted chemical mechanical composite abrasive flow polishing device according to claim 1, characterized in that the oxidizer injection system (4) is connected to the upper abrasive cylinder (8) and/or the lower abrasive cylinder (9) by a one-way valve, and the oxidizer injection system (4) is in watertight connection with the upper abrasive cylinder (8) and/or the lower abrasive cylinder (9);

the oxidant injection system (4) further comprises a flow meter capable of metering the volume of oxidant added to the upper mill vat (8) and/or the lower mill vat (9).

8. A heat assisted chemical mechanical composite abrasive flow polishing device according to claim 1, characterized in that the oxidizer removal system (5) is connected to the upper abrasive cylinder (8) and/or the lower abrasive cylinder (9) by a one-way valve, and the oxidizer removal system (5) is in watertight connection with the upper abrasive cylinder (8) and/or the lower abrasive cylinder (9).

9. A method for polishing by heating auxiliary chemical mechanical composite abrasive flow is characterized by comprising the following steps:

the method comprises the following steps: the upper grinding material cylinder (8) is moved upwards and lifted, and grinding materials (7) are injected into the lower grinding material cylinder (9);

step two: clamping and fixing a workpiece (6) to be polished through a clamp (12), placing the clamp (12) for clamping the workpiece (6) to be polished on a lower grinding cylinder (9), and then controlling an upper grinding cylinder (8) to move downwards to compress the clamp (12);

step three: setting a heating temperature and heating the polishing reaction zone through a heating system (3);

step four: after the polishing reaction zone is heated to a set temperature, setting the pressure of an upper abrasive cylinder (8) and a lower abrasive cylinder (9) through a hydraulic system (1), and setting the reciprocating times of an upper piston (10) and a lower piston (11), namely the preset processing times;

step five: an oxidant is injected into the upper abrasive cylinder (8) through an oxidant injection system (4), the oxidant can cover the surface to be machined of the workpiece (6) to be polished, the hydraulic system (1) is started, and the upper piston (10) and the lower piston (11) reciprocate to start machining;

step six: after the upper piston (10) and the lower piston (11) move for a set number of times, the upper piston (10) is pushed to move downwards, the grinding materials (7) are pressed into the lower grinding material cylinder (9), then the oxidizing agents are injected into the upper grinding material cylinder (8) through the oxidizing agent injection system (4), and then the machining is continued;

step seven: repeating the step six until the upper piston (10) and the lower piston (11) reciprocate to process for a preset number of times to finish processing;

step eight: after finishing the processing, the upper grinding cylinder (8) is moved upwards, the workpiece (6) to be polished after finishing the polishing is taken off from the clamp (12), the grinding material (7) is taken out from the lower grinding cylinder (9), and the oxidizing agent is discharged from the oxidizing agent discharge system (5).

10. The method of claim 9, wherein the polishing is performed using the apparatus of any one of claims 1-8.

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