CN111684243A - Spectrometer, method for making a spectrometer and method for operating a spectrometer - Google Patents
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Abstract
Description
技术领域technical field
本发明的出发点是一种根据独立权利要求的前序部分所述的设备或方法。本发明的主题也是一种计算机程序。The starting point of the invention is a device or a method according to the preambles of the independent claims. The subject of the invention is also a computer program.
背景技术Background technique
光谱仪例如被用于检查物质或对象的材料成分。这样,例如可以将与对象相互作用的电磁辐射、如可见光或红外光分解成其波长成分,这些波长成分取决于材料地不一样强烈地被吸收。得到如下光谱,该光谱的形状对于特定的物质或者物质的混合物来说是表征性的。所谓的法布里-珀罗光谱仪提供了一种以所希望的方式来分解光的途径,该法布里-珀罗光谱仪的核心包含法布里-珀罗干涉仪、也称为标准具(Etalon)。Spectrometers are used, for example, to examine the material composition of substances or objects. In this way, for example, electromagnetic radiation, such as visible light or infrared light, which interacts with the object can be broken down into its wavelength components, which are absorbed differently depending on the material. A spectrum is obtained whose shape is characteristic for a particular substance or mixture of substances. The so-called Fabry-Perot spectrometer, which at its heart contains the Fabry-Perot interferometer, also known as the etalon ( Etalon).
在此,入射光束进入到法布里-珀罗干涉仪中,该法布里-珀罗干涉仪由两个对置的平面平行的镜面组成,光在所述镜面上多次被反射。在每次反射时,光的一部分被透射。在法布里-珀罗干涉仪后面形成具有相干的部分光束的射束,这些相干的部分光束可以彼此干涉。如果d是在镜之间的间距,则建设性干涉的条件为2d*cosα = mλ,其中α是入射光束与光轴之间的角度而m是自然数(光谱级)。如果只考虑第一级和平行于光轴入射的光,则只有波长λ的光(和更高级)被透射。通过改变间距d,可以改变法布里-珀罗干涉仪的透射波长。因此,得到可调滤波器,利用该可调滤波器可以在使用相对应的探测器的情况下按顺序记录光谱。如果光没有准确地平行于光轴,则也可能根据入射角α而使其它(蓝移的)波长透射。在没有附加措施的情况下,不同波长的光叠加地射到探测器上。为了将这些波长分开,可以在法布里-珀罗干涉仪后面放置透镜或者一般来说聚焦光学元件。由此,在间距d的情况下透射的、不同的透射波长被映射到探测平面中的同心环上,该同心环的半径取决于入射角α和透镜的焦距。通过使用透镜,可以提高光谱分辨率,而且在静态情况下、也就是说在间距d固定的情况下,在相对应的入射角分布的情况下得到针对有限的光谱范围的光谱。Here, the incident light beam enters a Fabry-Perot interferometer, which consists of two opposing plane-parallel mirrors, on which the light is reflected multiple times. At each reflection, a portion of the light is transmitted. After the Fabry-Perot interferometer, a beam is formed with coherent partial beams that can interfere with each other. If d is the spacing between the mirrors, the condition for constructive interference is 2d*cosα = mλ, where α is the angle between the incident beam and the optical axis and m is a natural number (spectral order). If only light of the first order and incident parallel to the optical axis is considered, only light of wavelength λ (and higher orders) is transmitted. By changing the spacing d, the transmission wavelength of the Fabry-Perot interferometer can be changed. Thus, a tunable filter is obtained, with which the spectra can be recorded sequentially using corresponding detectors. If the light is not exactly parallel to the optical axis, other (blue-shifted) wavelengths may also be transmitted depending on the angle of incidence α. Without additional measures, light of different wavelengths strikes the detector superimposed. To separate these wavelengths, a lens or generally focusing optics can be placed behind the Fabry-Perot interferometer. As a result, the different transmitted wavelengths that are transmitted at the distance d are mapped onto concentric rings in the detection plane, the radius of which depends on the angle of incidence α and the focal length of the lens. By using a lens, the spectral resolution can be increased and, in the static case, that is to say with a fixed distance d, a spectrum for a limited spectral range can be obtained with a corresponding distribution of angles of incidence.
在US 2002/0126279 A1中描述了一种微型化塔尔博特(Talbot)光谱仪。借助于周期性结构,在该周期性结构的不同间距的情况下产生塔尔博特图像,这些塔尔博特图像由探测器来探测。取决于间距的强度分布被傅里叶变换,以便确定光的光谱。A miniaturized Talbot spectrometer is described in US 2002/0126279 A1. With the aid of the periodic structure, Talbot images are generated with different spacings of the periodic structure, which are detected by the detectors. The pitch-dependent intensity distribution is Fourier transformed in order to determine the light spectrum.
在DE 10121499 A1中描述了一种光谱设备。这里充分利用了塔尔博特效应,以便选择到达探测器的一种或各个模式。A spectroscopic device is described in DE 10121499 A1. The Talbot effect is exploited here in order to select a mode or modes of arrival at the detector.
发明内容SUMMARY OF THE INVENTION
在该背景下,利用这里所提出的方案,提出了根据独立权利要求所述的一种光谱仪、一种用于制造光谱仪的方法、一种用于运行光谱仪的方法、一种使用该方法的设备和一种相对应的计算机程序。通过在从属权利要求中提及的措施,对在独立权利要求中说明的设备的有利的扩展方案和改进方案都是可能的。Against this background, with the solution proposed here, a spectrometer, a method for manufacturing a spectrometer, a method for operating a spectrometer, a device using the method according to the independent claims are proposed and a corresponding computer program. By means of the measures mentioned in the dependent claims, advantageous modifications and improvements of the devices specified in the independent claims are possible.
法布里-珀罗光谱仪由于其扁平的结构类型而可以非常好地微型化。在此,能轻易实现低于一毫米的结构高度。不过,微型化的问题是上文所描述的可选的透镜,因为该透镜为了有足够的聚焦质量而需要一定的焦距或数值孔径。这样,在孔径直径为1mm的情况下,焦距为1mm是符合实际的。如果想要增大光谱仪的光学滤波器的面积,以便聚集更多光,则也应该会相对应地增大孔径并且借此也应该会相对应地增大透镜的焦距。这可能将整个光谱仪的厚度提高到几毫米的量级,由此该模块对于一些应用、诸如集成到智能手机中来说已经没有吸引力。这里所描述的方案通过省去聚焦元件并且将角度选择性转移到相对应地构造的探测器中来解决该问题。这里所描述的方案的优点在于:通过使用这种角度敏感的探测器并且与之相关联地省去在探测器与光学滤波器之间的透镜或其它聚焦元件,可以将光谱仪建造得小得多。Fabry-Perot spectrometers can be miniaturized very well due to their flat structure type. Here, structure heights of less than one millimeter can easily be achieved. The problem with miniaturization, however, is the optional lens described above, since the lens requires a certain focal length or numerical aperture in order to have sufficient focusing quality. Thus, in the case of an aperture diameter of 1 mm, a focal length of 1 mm is practical. If one wants to increase the area of the optical filter of the spectrometer in order to collect more light, the aperture and thereby the focal length of the lens should also be correspondingly increased. This could increase the thickness of the entire spectrometer to the order of a few millimeters, whereby the module has become unattractive for some applications, such as integration into smartphones. The solution described here solves this problem by omitting the focusing element and transferring the angular selectivity into a correspondingly configured detector. The advantage of the approach described here is that by using such an angle-sensitive detector and the associated omission of lenses or other focusing elements between the detector and the optical filter, the spectrometer can be built much smaller .
提出了一种光谱仪,其具有如下特征:A spectrometer is proposed, which has the following characteristics:
光学滤波器,用于从电磁辐射中滤出所要分析的波长范围;和Optical filters for filtering out the wavelength range to be analyzed from electromagnetic radiation; and
探测器,该探测器具有至少一个角度敏感像素、尤其是多个角度敏感像素,用于根据从该光学滤波器透过的透射辐射的入射角来探测该透射辐射的强度。A detector having at least one angle-sensitive pixel, in particular a plurality of angle-sensitive pixels, for detecting the intensity of the transmitted radiation transmitted through the optical filter as a function of its angle of incidence.
光谱仪可以被理解为用于测量或呈现电磁频谱的仪器。光学滤波器例如可以被理解为光学谐振器、尤其是静态或可调的法布里-珀罗干涉仪、布拉格(Bragg)滤波器、带通滤波器或者所提到的光学滤波器中的至少两个光学滤波器的组合。探测器例如可以被理解为光电二极管、光电晶体管、CMOS或CCD传感器或者由多个这种光敏器件构成的装置。角度敏感像素、也称为angle-sensitive pixel(ASP)可以被理解为探测器的具有至少一个衍射光栅的探测器元件。角度敏感像素可以构造用于在充分利用所谓的塔尔博特效应的情况下根据光束关于像素表面的相应的入射角来探测这些光束的强度。透射辐射可以被理解为电磁辐射的通过光学滤波器被滤出的辐射部分。探测器例如可以实施为由多个这种角度敏感像素构成的阵列。光学滤波器和探测器例如可以扁平地彼此重叠。光学滤波器和探测器尤其可以在紧凑的层复合体中彼此连接。A spectrometer can be understood as an instrument used to measure or present the electromagnetic spectrum. An optical filter can be understood to mean, for example, an optical resonator, in particular a static or tunable Fabry-Perot interferometer, a Bragg filter, a bandpass filter or at least one of the optical filters mentioned. A combination of two optical filters. A detector can be understood to be, for example, a photodiode, a phototransistor, a CMOS or CCD sensor or an arrangement consisting of a plurality of such photosensitive devices. An angle-sensitive pixel, also called an angle-sensitive pixel (ASP), can be understood as a detector element of a detector having at least one diffraction grating. The angle-sensitive pixels can be configured to detect the intensity of the light beams as a function of their respective angle of incidence with respect to the pixel surface, taking advantage of the so-called Talbot effect. Transmitted radiation can be understood as the radiation portion of electromagnetic radiation that is filtered out by an optical filter. The detector can be implemented, for example, as an array of a plurality of such angle-sensitive pixels. The optical filter and the detector can, for example, overlap each other flat. In particular, the optical filter and the detector can be connected to one another in a compact layer complex.
按照一个实施方式,像素可以构造用于探测作为入射角的正弦函数的强度。由此,根据入射角可以计算花费低地确定强度。According to one embodiment, the pixels can be configured to detect the intensity as a sine function of the angle of incidence. As a result, the intensity can be determined computationally inexpensively as a function of the angle of incidence.
此外,像素可以具有:衍射光栅,用于在使用透射辐射的情况下产生具有取决于入射角的相位的强度图案;和传感元件,用于在使用该强度图案的情况下产生表示该强度图案的强度信号。衍射光栅、也称为diffraction grating可以被理解为像素的利用多个彼此以预先确定的间距布置的通孔来结构化的覆盖层或中间层。传感元件可以被理解为在衍射光栅下游的光敏器件,比如光电二极管或CMOS传感器。传感元件可以与衍射光栅对置地布置。强度图案可以被理解为由于光束在衍射光栅上的衍射而产生的干涉图案、尤其是近场干涉图案,也称为塔尔博特效应。强度图案例如可以是正弦形的。通过该实施方式,像素可以特别紧凑地被实施。In addition, the pixel may have: a diffraction grating for generating an intensity pattern with a phase that depends on the angle of incidence when using transmitted radiation; and a sensing element for generating, using the intensity pattern, representing the intensity pattern strength signal. A diffraction grating, also known as diffraction grating, can be understood as a cover layer or intermediate layer of a pixel that is structured with a plurality of through-holes arranged at a predetermined distance from one another. A sensing element can be understood as a photosensitive device downstream of the diffraction grating, such as a photodiode or a CMOS sensor. The sensor element can be arranged opposite the diffraction grating. An intensity pattern can be understood as an interference pattern, especially a near-field interference pattern, due to the diffraction of a light beam on a diffraction grating, also known as the Talbot effect. The intensity pattern can be sinusoidal, for example. With this embodiment, the pixel can be implemented particularly compactly.
有利的是:像素具有至少一个布置在传感元件与衍射光栅之间的中间光栅,用于在使用该强度图案的情况下产生附加强度图案。在此,传感元件可以构造用于在使用该附加强度图案的情况下产生强度信号。中间光栅可以被理解为像素的另一衍射光栅。中间光栅、也称为analyzer grating(分析栅)可以以距衍射光栅有预先确定的间距来布置。例如,中间光栅可以以距衍射光栅有与所谓的塔尔博特深度相对应的间距来布置。中间光栅可具有与衍射光栅相同或类似的结构或者也可具有与衍射光栅不同的结构。通过该实施方式,可以提高光谱仪的测量精度。Advantageously, the pixel has at least one intermediate grating arranged between the sensor element and the diffraction grating for generating an additional intensity pattern using this intensity pattern. In this case, the sensor element can be designed to generate an intensity signal using this additional intensity pattern. The intermediate grating can be understood as another diffraction grating of the pixel. The intermediate grating, also called analyzer grating, can be arranged at a predetermined distance from the diffraction grating. For example, the intermediate gratings may be arranged at a spacing from the diffraction grating corresponding to the so-called Talbot depth. The intermediate grating may have the same or similar structure as the diffraction grating or may also have a different structure than the diffraction grating. With this embodiment, the measurement accuracy of the spectrometer can be improved.
中间光栅可以构造为用于确定强度图案的相移的分析栅。由此,可以确定在透射辐射垂直入射时的强度图案与在透射辐射斜入射时的强度图案之间的相移。The intermediate grating can be configured as an analysis grating for determining the phase shift of the intensity pattern. Thereby, the phase shift between the intensity pattern at normal incidence of the transmitted radiation and the intensity pattern at oblique incidence of the transmitted radiation can be determined.
按照另一实施方式,探测器可具有探测器矩阵,该探测器矩阵具有该像素和至少一个角度敏感的其它像素,用于根据入射角来探测强度。在此,该其它像素可具有:与该衍射光栅不同的另一衍射光栅,用于在使用透射辐射的情况下产生具有取决于入射角的相位的另一强度图案;和另一传感元件,用于在使用该另一强度图案的情况下产生表示该另一强度图案的另一强度信号。探测器矩阵可以被理解为由至少两个角度敏感像素构成的阵列。由此,可以保证在入射角与强度之间的唯一关联。According to a further embodiment, the detector may have a detector matrix with the pixel and at least one other angle-sensitive pixel for detecting the intensity as a function of the angle of incidence. In this case, the further pixel can have: a different diffraction grating than the diffraction grating for generating another intensity pattern with a phase dependent on the angle of incidence when using transmitted radiation; and a further sensing element, for generating another intensity signal representative of the other intensity pattern using the other intensity pattern. A detector matrix can be understood as an array of at least two angle-sensitive pixels. Thereby, a unique correlation between angle of incidence and intensity can be guaranteed.
也有利的是:光学滤波器实施为光学谐振器。光学谐振器例如可以是可调的法布里-珀罗干涉仪。由此,光学滤波器可以以紧凑的结构形式并且花费低地被提供。It is also advantageous if the optical filter is implemented as an optical resonator. The optical resonator may be, for example, a tunable Fabry-Perot interferometer. As a result, the optical filter can be provided in a compact design and at low cost.
光学滤波器和探测器可以有利地彼此组合成层复合体。由此,光谱仪可以特别紧凑地被制造。The optical filter and the detector can advantageously be combined with one another to form a layer composite. As a result, the spectrometer can be produced particularly compact.
这里所提出的方案还提供了一种用于制造光谱仪的方法,其中该方法包括如下步骤:The proposed scheme also provides a method for manufacturing a spectrometer, wherein the method comprises the steps of:
将用于从电磁辐射中滤出所要分析的波长范围的光学滤波器与具有至少一个角度敏感像素、尤其是多个角度敏感像素的探测器组合,以便借助于该像素和/或这些像素根据从该光学滤波器透过的透射辐射的入射角来探测该透射辐射的强度。An optical filter for filtering out the wavelength range to be analyzed from electromagnetic radiation is combined with a detector having at least one angle-sensitive pixel, in particular a plurality of angle-sensitive pixels, in order to use this pixel and/or these pixels according to the The intensity of the transmitted radiation is detected by the incident angle of the transmitted radiation transmitted by the optical filter.
这里所提出的方案还提供了一种用于运行按照上文的实施方式之一的光谱仪的方法,其中该方法包括如下步骤:The solution proposed here also provides a method for operating a spectrometer according to one of the above embodiments, wherein the method comprises the steps of:
对光学滤波器进行操控,以便从电磁辐射中滤出所要分析的波长范围;并且operating optical filters to filter out the wavelength range to be analyzed from electromagnetic radiation; and
响应于该操控,对表示在使用该像素和/或这些像素的衍射光栅的情况下所产生的具有取决于入射角的相位的强度图案的强度信号进行分析,以便依据该强度图案来确定光谱。In response to the manipulation, an intensity signal representing an intensity pattern with a phase dependent on the angle of incidence generated using the pixel and/or the diffraction grating of the pixels is analyzed in order to determine the spectrum from the intensity pattern.
该方法例如可以以软件或硬件或者以软件和硬件的混合形式来实现,例如在控制设备中实现。The method can be implemented, for example, in software or hardware or in a mixture of software and hardware, for example in a control device.
这里所提出的方案还提供了一种设备,该设备被构造用于在相对应的装置中执行、操控或实现这里所提出的方法的变型方案的步骤。通过本发明的以设备为形式的这些实施变型方案,也可以快速并且高效地解决本发明所基于的任务。The solution presented here also provides an apparatus which is designed to carry out, control or implement the steps of the variants of the method proposed here in a corresponding device. The tasks on which the invention is based can also be solved quickly and efficiently by means of these implementation variants of the invention in the form of devices.
为此,该设备可具有:至少一个计算单元,用于处理信号或数据;至少一个存储单元,用于存储信号或数据;至少一个与传感器或执行器的接口,用于从传感器读入传感器信号或者用于将数据信号或控制信号输出给执行器;和/或至少一个通信接口,用于读入或输出嵌入到通信协议中的数据。计算单元例如可以是信号处理器、微控制器或者诸如此类的,其中存储单元可以是闪速存储器、EPROM或者磁存储单元。通信接口可以被构造用于无线地和/或有线地读入或输出数据,其中可读入或输出有线数据的通信接口可以例如电地或光学地从相对应的数据传输线中读入这些数据或者可以例如电地或光学地将这些数据输出到相对应的数据传输线中。For this purpose, the device can have: at least one computing unit for processing signals or data; at least one memory unit for storing signals or data; at least one interface with sensors or actuators for reading in sensor signals from the sensors Or for outputting data signals or control signals to the actuator; and/or at least one communication interface for reading in or outputting data embedded in the communication protocol. The computing unit may be, for example, a signal processor, a microcontroller or the like, wherein the storage unit may be a flash memory, an EPROM or a magnetic storage unit. The communication interface can be designed to read in or output data wirelessly and/or wiredly, wherein the communication interface that can read in or output wired data can, for example, read in the data electrically or optically from a corresponding data transmission line or These data can be output into corresponding data transmission lines, for example, electrically or optically.
在当前情况下,设备可以被理解为电气设备,该电气设备对传感器信号进行处理并且根据此来输出控制和/或数据信号。该设备可具有接口,所述接口可以硬件式地和/或软件式地来构造。在硬件式的构造方案中,接口例如可以是所谓的系统ASIC的部分,所述系统ASIC包含该设备的各种各样的功能。然而也可能的是,这些接口是特有的集成电路或者至少部分地由分立式器件组成。在软件式的构造方案中,这些接口可以是软件模块,所述软件模块例如在微控制器上存在于其它软件模块旁边。In the present context, a device can be understood as an electrical device which processes sensor signals and outputs control and/or data signals in accordance therewith. The device can have an interface, which can be configured in hardware and/or software. In a hardware-based configuration, the interface can, for example, be part of a so-called system ASIC, which contains the various functions of the device. However, it is also possible that these interfaces are dedicated integrated circuits or at least partly consist of discrete components. In a software-based configuration, these interfaces can be software modules, which are present alongside other software modules, for example on a microcontroller.
也有利的是一种具有程序代码的计算机程序产品或计算机程序,所述程序代码可以存储在机器可读载体或者存储介质(如半导体存储器、硬盘存储器或光学存储器)上而且尤其是当该程序产品或该程序在计算机或设备上实施时被用于执行、实现和/或操控根据上述实施方式之一所述的方法的步骤。Also advantageous is a computer program product or computer program with a program code which can be stored on a machine-readable carrier or a storage medium such as a semiconductor memory, hard disk memory or optical memory and in particular when the program product is Or the program, when implemented on a computer or device, is used to carry out, implement and/or manipulate the steps of the method according to one of the above-mentioned embodiments.
附图说明Description of drawings
本发明的实施例在附图中示出并且在随后的描述中进一步予以阐述。其中:Embodiments of the invention are illustrated in the drawings and are further explained in the description that follows. in:
图1示出了按照实施例的光谱仪的示意图;Figure 1 shows a schematic diagram of a spectrometer according to an embodiment;
图2示出了按照实施例的光谱仪的示意图;Figure 2 shows a schematic diagram of a spectrometer according to an embodiment;
图3示出了图1和2中的角度敏感像素的示意图;FIG. 3 shows a schematic diagram of the angle-sensitive pixel of FIGS. 1 and 2;
图4示出了用于呈现在光垂直入射时通过按照实施例的角度敏感像素所产生的强度图案的图表;Figure 4 shows a graph for presenting the intensity pattern produced by an angle-sensitive pixel according to an embodiment at normal incidence of light;
图5示出了用于呈现在光斜入射时通过按照实施例的角度敏感像素所产生的强度图案的图表;5 shows a graph for presenting intensity patterns produced by angle-sensitive pixels according to embodiments at oblique incidence of light;
图6示出了在光垂直入射时按照实施例的角度敏感像素的示意图;6 shows a schematic diagram of an angle-sensitive pixel according to an embodiment when light is at normal incidence;
图7示出了在光斜入射时图6中的角度敏感像素的示意图;FIG. 7 shows a schematic diagram of the angle-sensitive pixel of FIG. 6 when light is obliquely incident;
图8示出了用于呈现在入射角不同时并且在光栅参数不同时通过按照实施例的角度敏感像素所产生的强度图案的图表;8 shows a graph for presenting intensity patterns produced by angle-sensitive pixels according to embodiments at different angles of incidence and at different grating parameters;
图9示出了用于运行按照实施例的光谱仪的设备的示意图;Figure 9 shows a schematic diagram of an apparatus for operating a spectrometer according to an embodiment;
图10示出了用于运行按照实施例的光谱仪的方法的流程图;以及10 shows a flowchart of a method for operating a spectrometer in accordance with an embodiment; and
图11示出了用于制造按照实施例的光谱仪的方法的流程图。FIG. 11 shows a flowchart of a method for manufacturing a spectrometer according to an embodiment.
在随后对本发明的有利的实施例的描述中,相同或者类似的附图标记被用于在不同的附图中示出的并且起类似作用的要素,其中省去了对这些要素的重复描述。In the subsequent description of advantageous embodiments of the invention, the same or similar reference numerals are used for elements that are shown in different figures and serve a similar function, wherein a repeated description of these elements is omitted.
具体实施方式Detailed ways
图1示出了按照实施例的光谱仪100的示意图。光谱仪100、例如显微光谱仪,包括光学滤波器102,用于从电磁辐射中滤出所要分析的波长范围。示例性地,按照在图1中示出的实施例的光学滤波器102实施为可调的法布里-珀罗干涉仪。光学滤波器102与具有至少一个角度敏感像素106的角度敏感探测器104连接。按照该实施例,光学滤波器102和探测器104彼此组合成层复合体,其中光学滤波器102直接被涂覆到探测器104的表面上并且角度敏感像素106与光学滤波器102对置。像素106构造用于:根据从光学滤波器102透过的透射辐射在射到像素106上时的入射角来探测该透射辐射的强度。通过使用角度敏感探测器104,可以省去附加的、在光学滤波器102下游的透镜。由此,光谱仪100可以特别紧凑地被制造。FIG. 1 shows a schematic diagram of a
如从图1中可见,光学滤波器102的大小以及借此集光面积只由探测器104来决定。探测器104例如具有几毫米的伸展。As can be seen from FIG. 1 , the size of the
可选地,在光学滤波器102上布置另一滤波器108,用于抑制不符合期望的波长、例如更高透射级。同样可选的光学漫射体110保证了入射光具有一定的角度分布。光学漫射体110在该另一滤波器108上游并且例如直接被涂覆到该另一滤波器上。Optionally, a
法布里-珀罗干涉仪的透射特性、也就是说作为在特定的镜间距d的情况下入射角的函数的透射波长被假定为已知并且可以被模拟或测量。因为探测器104执行被透射的光强度与入射角的关联,所以整个系统可以执行波长或入射角与强度的关联,即针对光的在所设定的镜间距的情况下对于所有入射角来说都被透射的那个部分计算光谱。为此,既不需要聚焦元件也不需要角度限制元件。可选的漫射体110保证了:在法布里-珀罗干涉仪上存在光束的足够大的角度分布,例如在光被镜面反射或者光准直入射的情况下在法布里-珀罗干涉仪上存在光束的足够大的角度分布。The transmission characteristic of the Fabry-Perot interferometer, that is to say the transmission wavelength as a function of the angle of incidence at a specific mirror spacing d, is assumed to be known and can be simulated or measured. Since the
图2示出了按照实施例的光谱仪100的示意图。类似于在图1中示出的光谱仪,在图2中示出的光谱仪100分多个层来构造,区别在于:按照该实施例的光学滤波器102不是实施为可调的法布里-珀罗干涉仪,而是实施为由不同的光学滤波器构成的矩阵,例如由静态法布里-珀罗干涉仪或布拉格滤波器构成的矩阵,所述不同的光学滤波器用作取决于角度的带通滤波器并且覆盖多个更小的波长范围。其它滤波器、比如线性可变滤波元件也是可能的。这些各个滤波器的透射光谱要么不相交要么彼此部分重叠。如在图1中那样,按照图2的光谱仪100具有可选的另一滤波器108以及可选的光学漫射体110。FIG. 2 shows a schematic diagram of a
图3示出了按照实施例的角度敏感像素106的示意图。以放大图示例性地示出了上文依据图1所描述的像素。按照该实施例,像素106具有层状构造,该层状构造具有:衍射光栅300,作为覆盖层;传感元件302、这里示例性地是光电二极管;和布置在衍射光栅300与传感元件302之间的另一衍射光栅,作为中间光栅304。这两个衍射光栅300、304相对于彼此以预先给定的垂直光栅间距z来布置并且各具有多个通孔306,用于使透射辐射透过或衍射。这些通孔306相对于彼此以光栅间距d来布置。视实施例而定,光栅间距d对于两个衍射光栅300、304来说被选择得相同或不同。这些衍射光栅的相位以及取向也可能发生变化。这两个衍射光栅300、304的通孔306例如彼此水平错开。替选地,衍射光栅300的各一个通孔306对置于中间光栅304的各一个通孔306。FIG. 3 shows a schematic diagram of an angle-
衍射光栅300构造用于:视入射角而定使入射的透射辐射不一样强烈地发生衍射,并且由此产生具有取决于相应的入射角的相位的例如正弦形的强度图案。传感元件302被构造用于:将强度图案转化成相对应的电强度信号306,该电强度信号例如为了记录光谱而被进一步处理。
在此,中间光栅304用作分析栅,以便探测在光斜入射时所产生的强度图案相对于在光垂直入射时所产生的强度图案的相移。Here, the
图3示出了角度敏感像素106的原理性设计。在此,衍射光栅300、也称为diffraction grating,被用于产生近场干涉图案、也称为塔尔博特效应。在特定的间距、即所谓的塔尔博特深度的情况下,该周期性图案具有与生成光栅相同的空间频率并且以相对应的方式来改变在光斜入射时的相位。中间光栅304被用作分析栅、也称为analyzergrating,以便探测光的入射角。FIG. 3 shows a schematic design of the angle-
光谱仪100例如实现为法布里-珀罗标准具或者起类似作用的光学滤波器与角度敏感探测器104的组合。这种探测器也可以被称为无透镜成像仪(lensless imager)或者平面傅里叶捕获阵列(planar fourier capture array)。探测器拥有一个或多个角度敏感像素106,所述一个或多个角度敏感像素的感光度描述了入射角的正弦函数。在这种情况下涉及如下系统,该系统在不使用透镜或者类似的聚焦元件的情况下就允许反推出入射光束的传播方向。The
衍射光栅300产生取决于角度的近场衍射图案。在塔尔博特效应下,该强度分布具有与衍射光栅300相同的频率,是正弦形的并且随着入射角发生变化而被移动。为了测量所造成的相移,使用分析栅,使得在传感元件302上造成总强度的取决于角度的波动,如图6、7和8所示。
如果光以不同的入射角落到这种像素106上,则强度与入射角的关联也许有可能不唯一。为了克服这一点,将像素与不一样成型的光栅集合成探测器矩阵。通过数值后处理来实现入射方向与强度的最终关联。If light strikes such a
探测器104例如能以常规的CMOS工艺来制造并且因此良好地适合于批量制造。这种角度敏感探测器与法布里-珀罗干涉仪的组合的一个特别优点是:省去用于选择入射角或波长的光学元件,这能够实现结构高度的大幅度降低。因为省去了额外装配光学元件,所以整个系统还可以以半导体工艺来制造,这带来了成本以及鲁棒性优点。The
图4示出了用于呈现在光垂直入射时通过按照实施例的角度敏感像素106、比如通过上文依据图1至3描述的像素所产生的强度图案的图表400。这里,在入射角为0度的情况下入射的平面波402产生具有取决于入射角的相位的正弦形的强度图案。FIG. 4 shows a
图5示出了用于呈现在光斜入射时通过按照实施例的角度敏感像素106所产生的强度图案的图表500。这里以与0度不同的入射角来入射的波402产生强度图案,该强度图案与在光垂直入射时的强度图案相比有相移。FIG. 5 shows a
图6示出了在光垂直入射时的角度敏感像素106的示意图。不同于图4和5,按照该实施例的像素106具有充当分析栅的中间光栅304。FIG. 6 shows a schematic diagram of the angle-
图7示出了在光斜入射时、这里示例性地在入射角为10度时图6中的角度敏感像素106的示意图。FIG. 7 shows a schematic diagram of the angle-
从图6和7可见:由于添加第二光栅,在像素106上发生取决于入射角的总强度调制。It can be seen from Figures 6 and 7 that due to the addition of the second grating, a total intensity modulation depending on the angle of incidence occurs on the
图8示出了用于呈现在入射角不同的情况下通过按照实施例的四个角度敏感像素所产生的强度图案的图表,在这四个角度敏感像素中,衍射光栅300和中间光栅304具有彼此不同的相位。图表800示例性地示出了针对在-20°与20°之间的入射角的四个强度图案,这四个强度图案与在衍射光栅300与中间光栅304之间的四个相位角α = 0、α = π/2、α =π、α = 3π/2中的各一个相位角相关联。FIG. 8 shows a graph for presenting the intensity patterns produced by four angle-sensitive pixels according to an embodiment in which the
图9示出了用于运行按照实施例的光谱仪、比如上文依据图1至8所描述的光谱仪的设备900的示意图。设备900包括用于提供操控信号912的操控单元910,该操控信号用于操控光学滤波器、也就是说用于设定要借助于该光谱仪来分析的波长范围。分析单元920在使用操控信号912的情况下对强度信号306进行分析,以便依据通过该强度信号所表示的强度图案来记录光谱。在此,分析单元920产生表示该光谱的分析结果922。FIG. 9 shows a schematic diagram of an
图10示出了用于运行按照实施例的光谱仪、比如上文依据图1至9所描述的光谱仪的方法1000的流程图。在此,在步骤1010中,对光学滤波器进行操控,以便在该光学滤波器上设定所要分析的波长范围。在接下来的步骤1020中,对强度信号进行分析,以便依据通过该强度信号所表示的强度图案来记录光谱。FIG. 10 shows a flowchart of a
图11示出了用于制造按照实施例的光谱仪、比如上文依据图1至10所描述的光谱仪的方法1100的流程图。在此,在可选的准备步骤1110中,制作光学滤波器和探测器,例如以半导体工艺来制作光学滤波器和探测器。在接下来的步骤1120中,将光学滤波器和探测器彼此组合成光谱仪。在此,例如将光学滤波器直接涂覆到探测器上。例如,在步骤1110中,光学滤波器可以通过涂覆到探测器上来被制作或者反过来探测器可以通过涂覆到光学滤波器上来被制作,使得对层复合体的制作伴随着对光谱仪的这两个组件中的至少一个组件的制作。FIG. 11 shows a flowchart of a method 1100 for manufacturing a spectrometer according to an embodiment, such as the spectrometer described above with reference to FIGS. 1 to 10 . Here, in an optional preparation step 1110, optical filters and detectors are fabricated, eg, in a semiconductor process. In the next step 1120, the optical filter and detector are combined with each other into a spectrometer. Here, for example, the optical filter is applied directly to the detector. For example, in step 1110, an optical filter may be fabricated by coating onto a detector or conversely a detector may be fabricated by coating an optical filter, such that fabrication of the layer complex accompanies this fabrication of the spectrometer. Fabrication of at least one of the two components.
如果一个实施例包括在第一特征与第二特征之间的“和/或”逻辑关系,那么这被察知为使得该实施例按照一个实施方式不仅具有第一特征而且具有第二特征,而按照另一实施方式要么只具有第一特征要么只具有第二特征。If an embodiment includes an "and/or" logical relationship between a first feature and a second feature, then this is understood such that the embodiment, according to one embodiment, has not only the first but also the second feature, but not according to Another embodiment has either only the first feature or only the second feature.
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| US20120091372A1 (en) * | 2008-07-25 | 2012-04-19 | Cornell University | Light field image sensor, method and applications |
| US20150145084A1 (en) * | 2013-11-27 | 2015-05-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diffraction Grating with Multiple Periodic Widths |
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| DE10121499B4 (en) | 2001-05-03 | 2007-08-02 | Campus Technologies Ag | Apparatus and method for optical spectroscopy and optical sensor technology and use of the device |
| KR101468520B1 (en) * | 2008-03-04 | 2014-12-03 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | Angle sensor, system and method employing guided-mode resonance |
| CN112985603B (en) * | 2015-09-01 | 2024-07-02 | 苹果公司 | Reference switch architecture for non-contact sensing of substances |
| DE102016216842B4 (en) * | 2016-09-06 | 2019-12-24 | Robert Bosch Gmbh | Method and device for operating a spectrometer |
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2018
- 2018-02-01 DE DE102018201519.8A patent/DE102018201519A1/en not_active Withdrawn
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2019
- 2019-01-16 CN CN201980011251.0A patent/CN111684243A/en active Pending
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| US20020126279A1 (en) * | 2000-11-10 | 2002-09-12 | Kung Helen L. | Miniaturized talbot spectrometer |
| US20070298533A1 (en) * | 2006-06-26 | 2007-12-27 | Micron Technology, Inc. | Method and apparatus providing imager pixel array with grating structure and imager device containing the same |
| US20120091372A1 (en) * | 2008-07-25 | 2012-04-19 | Cornell University | Light field image sensor, method and applications |
| CN102262253A (en) * | 2010-05-27 | 2011-11-30 | 原子能与替代能源委员会 | Optical filter suitable for dealing with a radiation of variable incidence and detector including said filter |
| US20150145084A1 (en) * | 2013-11-27 | 2015-05-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diffraction Grating with Multiple Periodic Widths |
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| WO2019149526A1 (en) | 2019-08-08 |
| DE102018201519A1 (en) | 2019-08-01 |
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