CN111366997A - Micro-lens array, biological identification module and electronic equipment thereof - Google Patents
Micro-lens array, biological identification module and electronic equipment thereof Download PDFInfo
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- CN111366997A CN111366997A CN202010298010.3A CN202010298010A CN111366997A CN 111366997 A CN111366997 A CN 111366997A CN 202010298010 A CN202010298010 A CN 202010298010A CN 111366997 A CN111366997 A CN 111366997A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
- G06V40/13—Sensors therefor
- G06V40/1324—Sensors therefor by using geometrical optics, e.g. using prisms
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Abstract
The invention relates to a micro-lens array, a biological identification module and electronic equipment thereof, wherein the micro-lens array comprises a transparent substrate, a micro-lens component and a light absorption component, wherein the transparent substrate comprises a first surface and a second surface opposite to the first surface; the micro-lens component comprises a plurality of micro-lenses which are arranged on the first surface in an array mode, and the light absorption component comprises a first light absorption layer and a second light absorption layer; the first light absorption layer is provided with a plurality of first light holes, and the second light absorption layer is provided with a plurality of second light holes; the micro-lens array can better improve the light-gathering efficiency of the micro-lens and improve the imaging effect through the combined action of the second light-absorbing layer and the first light-absorbing layer; and first light-absorbing layer and second light-absorbing layer are provided with a plurality of light trap respectively, only set up a light trap for the light-absorbing layer, and this kind of setting has not high requirements to the position setting of microlens and light trap, only need the appearance align can, can reduce the requirement of light trap and microlens counterpoint precision, and the preparation technology is simpler, and the cost is lower.
Description
Technical Field
The present invention relates to the field of microlenses, and more particularly, to a microlens array, a biometric identification module, and an electronic device using the same.
Background
The micro lens array is a permutation and combination of a certain number of micro-nano scale spherical or free-form surface lenses, not only has basic functions of focusing, imaging and the like of the traditional lens, but also has the characteristics of small unit size and high integration level, so that the micro lens array can complete the functions which cannot be completed by the traditional optical element and can form a plurality of novel optical systems. Generally, incident light irradiated onto the microlens array includes vertical light and non-vertical light. Perpendicular light refers to light that is perpendicular to the entrance face of the microlens, otherwise it is non-perpendicular light. The light intensity of vertical light after penetrating through the micro lens and the micro lens array is reduced slightly, so that the definition of the formed image is higher. And the non-vertical light is refracted when passing through the micro lens array, so that the light intensity of the non-vertical light is weakened more after passing through the micro lens array, and the definition of the formed image is lower. When the vertical light and the non-vertical light exist simultaneously, and the non-vertical light is incident to the micro lens or the transparent substrate, the consistency of the definition of an image formed after the incident light penetrates through the micro lens array is weak, so that the light condensing efficiency of the micro lens is low, and the imaging effect is influenced.
Disclosure of Invention
In view of the above, it is desirable to provide a microlens array that can improve the imaging effect.
The present invention provides a microlens array, comprising:
a transparent substrate comprising a first surface and a second surface opposite the first surface;
a microlens assembly including a plurality of microlenses arranged in an array on the first surface, the microlenses having a third surface, the third surface being attached to the first surface, an
The light absorption component comprises a first light absorption layer, and the first light absorption layer is arranged on the second surface; the first light absorption layer is provided with a plurality of first light holes; the edges of orthographic projections of the micro lenses on the first light absorption layer all fall on the first light absorption layer and are spaced from the edges of the first light absorption layer.
In general, the vertical light has little decrease in light intensity after passing through the microlens and the microlens array, so that the sharpness of the formed image is high. And the non-vertical light is refracted when passing through the micro lens array component, so that the light intensity of the non-vertical light is weakened more after passing through the micro lens array, and the definition of the formed image is lower. The first light absorbing layer is arranged on the second surface of each micro lens, non-vertical light entering the micro lenses through refraction can be absorbed by the first light absorbing layer, and finally only vertical light penetrates through the micro lenses, so that the aim of improving the collimation effect can be fulfilled, and the product performance can be improved.
In the process of manufacturing the micro-lens, such as forming a micro-lens array on a transparent substrate by an embossing process, the method adopts a separate manufacturing method, when manufacturing the light holes of the light absorption layer, generally, in order to have better imaging effect, one micro-lens is correspondingly provided with one light hole, the arrangement requires the requirement of the alignment precision of the micro-lens and the light holes of the light absorption layer (+/-1.5um), the manufacturing process is complex, the cost is high, and the performance of the obtained micro-lens is not ideal, but the invention adopts a multi-to-one or one-to-many mode to arrange, the cost can be reduced, the requirement of the jointing process precision of a back-end module is reduced, the light inlet quantity is not less than one-to-one, and the problem of the definition cannot be reduced, the light absorption layer of the invention is provided with a plurality of light holes, only one light hole is arranged relative to the light absorption layer, the arrangement has low requirement of the positions, only the appearance needs to be aligned, the basic performance requirements can be met, the manufacturing process of the structure is simpler, and the requirement on alignment precision can be reduced.
In one embodiment, the first light absorbing layer has a thickness of 800nm to 3 μm. The range setting not only can realize the requirement of ultra-thinness, but also can effectively play the role of light absorption.
In one embodiment, the first light absorbing layer is a combination of one or more of a titanium layer, a chromium layer, a silicon carbide layer, and a silicon dioxide layer. The titanium layer, the chromium layer, the silicon dioxide layer and the silicon carbide layer are all black light absorption layers with good light absorption.
In one embodiment, the number of the first light absorption layers is multiple, and the first light absorption layers are arranged in one-to-one correspondence with the micro lenses.
In one embodiment, the aperture of the first light-transmitting hole is 0.5-5 μm. The aperture is too small, and some perpendicular light is absorbed by the light absorption layer, can not see through the base, influences the performance, and the aperture of first through-hole is too big, and non-perpendicular light also sees through the base, can not effectual by the absorption.
In one embodiment, the light absorbing assembly further includes a second light absorbing layer disposed between the third surface and the first surface, the second light absorbing layer is provided with a plurality of second light transmitting holes, and the edges of orthographic projections of the microlenses on the second light absorbing layer all fall on the second light absorbing layer and are spaced from the edges of the second light absorbing layer. The single light absorption layer can hardly absorb the non-perpendicular light completely, so that part of the non-perpendicular light enters the transparent substrate, and the second light absorption layer is arranged on the first surface of the transparent substrate, so that stray light with a large incident angle and transmitted through the transparent substrate can be further absorbed. Therefore, the consistency of the definition of an image formed after the incident light penetrates through the micro lens is further improved, the light condensation efficiency of the micro lens is improved, and the imaging effect is improved. The second light absorption layer and the first light absorption layer act together, so that the light condensation efficiency of the micro lens can be better improved, and the imaging effect is improved.
In one embodiment, the number of the second light absorption layers is multiple, and the second light absorption layers are arranged in one-to-one correspondence with the micro lenses.
In one embodiment, the aperture of the second light-transmitting hole is 5-10 μm. The aperture of the second through hole is larger than that of the first through hole, the path of the light determines that the aperture of the second through hole above the transparent substrate is smaller than that of the first through hole below the transparent substrate, and the refracted non-vertical light can be effectively shielded, so that the light condensation efficiency of the micro lens is improved, and the imaging effect is improved.
In one embodiment, the second light absorbing layer has a thickness of 800nm to 3 μm. The range setting not only can realize the requirement of ultra-thinness, but also can effectively play a role in light absorption.
In one embodiment, the second light absorbing layer is a combination of one or more of a titanium layer, a chromium layer, a silicon carbide layer, or a silicon dioxide layer. The titanium layer, the chromium layer, the silicon dioxide layer and the silicon carbide layer are all black light absorption layers with good light absorption.
In one embodiment, the microlenses are polygonal microlenses.
In one embodiment, the microlenses are spherical microlenses.
The invention also provides a biological identification module which comprises the micro-lens array. Above-mentioned biological identification module can shelter from the great miscellaneous light of incident angle through first light-absorbing layer to improve the incident light and see through the uniformity of the definition of the image that forms behind the microlens, improve microlens spotlight efficiency, improve the imaging promptly.
The invention also provides electronic equipment comprising the biological identification module. Above-mentioned electronic equipment can shelter from the great parasitic light of incident angle through first light-absorbing layer to improve the incident light and see through the uniformity of the definition of the image that forms behind the microlens, improve microlens spotlight efficiency, improve the imaging promptly.
Drawings
FIG. 1 is a top view of a microlens array assembly according to an embodiment of the invention;
FIG. 2 is a cross-sectional view taken along line A-A of the microlens array assembly of FIG. 1;
FIG. 3 is a bottom view of the microlens array assembly of FIG. 1;
fig. 4 is a cross-sectional view of a microlens array assembly according to another embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1 to 3, the microlens array of one embodiment can be applied to the field of optoelectronic devices such as digital cameras and mobile phones. Wherein, the micro lens array comprises a transparent substrate 100, a micro lens assembly 200 and a light absorption assembly;
the transparent substrate 100 includes a first surface 101 and a second surface 102 opposite the first surface 101;
the thickness of the transparent substrate 100 can be set according to actual needs, and in some embodiments, the thickness of the transparent substrate 100 is 70 μm to 150 μm; substrates in this range have more suitable strength and surface effects.
Further, the transparent substrate 100 is made of an optically transparent material, and may be made of a transparent material having a refractive index of about 1.52, such as glass, mica sheet, and the like, and the transparent substrate 100 made of the above material has excellent optical properties, and has higher strength and surface effect.
The micro lens assembly 200 is used for focusing, imaging, etc.; the microlens assembly 200 includes a plurality of microlenses 201, the plurality of microlenses 201 are arranged in an array on the first surface 101 of the transparent substrate 100; adjacent microlenses 201 are arranged at intervals, or are arranged without intervals; the microlens 201 has a third surface 202 that is attached to the first surface 101.
Specifically, the microlenses 201 may be polygonal microlenses, and further, may be regular hexagonal microlenses, regular pentagonal microlenses, regular quadrangular microlenses, or regular triangular microlenses. When the microlenses 201 are polygonal microlenses, the microlenses can be arranged in a side-fitting manner.
The microlens 201 may also be a spherical microlens.
Generally, the incident light irradiated onto the microlens 201 includes vertical light and non-vertical light. The light absorption component is used for absorbing non-vertical light entering the micro lens 201, so that multiple refraction and reflection between the non-vertical light and the optical element used by the micro lens 201 in a combined mode are reduced, the problem of refraction weakening of the non-vertical light can be solved, and only the vertical light is received, so that the aim of improving the collimation effect is achieved, and the imaging effect is improved.
It should be noted that the vertical light refers to light perpendicular to the incident surface of the transparent substrate 100, i.e., light perpendicular to the first surface 101, and is not vertical light otherwise.
The light absorption component comprises a first light absorption layer 301, wherein the first light absorption layer 301 is arranged on the second surface 102 of the transparent substrate 100; further, the number of the first light absorption layers 301 is multiple, and the first light absorption layers are arranged in one-to-one correspondence with the microlenses 201; the first light absorbing layer 301 is provided with a plurality of first light holes 3011, an orthographic projection of the plurality of first light holes 3011 on the third surface 202 of the microlens 201 completely falls on the third surface 202, and has a gap with an edge of the third surface 202, that is, the plurality of first light holes 3011 are all completely covered by the microlens 201.
Further, the edges of the orthographic projection of the microlenses 201 on the first light absorbing layer 301 all fall on the first light absorbing layer 301, and are spaced from the edges of the first light absorbing layer 301. I.e. the first light absorbing layer 301 can completely cover the third surface 202.
Further, the first light holes 3011 have the same size, and the first light holes 3011 are uniformly distributed, that is, the distance between two adjacent first light holes 3011 is the same. Therefore, the light condensing efficiency of the edge of the light condensing position corresponding to each micro lens 201 is consistent, and the whole imaging effect of the micro lens array assembly is further improved.
The vertical light passes through the microlens 201 and then passes through the transparent substrate 100 through the first light transmission hole 3011; partial non-vertical light enters the micro lens 201 and is refracted, and the first light absorption layer 301 absorbs the light, so that only the vertical light can penetrate through the transparent substrate 100, the collimation effect is improved, the light condensation efficiency of the micro lens 201 is improved, and the imaging effect is improved.
Furthermore, in this embodiment, the first light-absorbing layer 301 blocks stray light with a large incident angle, so that stray light with a large incident angle can be effectively alleviated from being refracted to the light-gathering positions of other microlenses 201, and thus, crosstalk cannot be generated in sampling among different microlenses 201, and a parallax phenomenon of a formed image is avoided.
Further, the width of the first light absorbing layer 301 between any two adjacent first light transmitting holes 3011 is the same, so that the light condensing efficiency of the corresponding focusing position of each microlens 201 is the same, and it should be noted that, for the overall imaging effect of the microlens array assembly, the structure and the position of the corresponding first light absorbing layer 301 of each microlens are the same.
Specifically, the aperture of the first light-transmitting hole 3011 is 0.5 μm to 5 μm; specific examples thereof may be 0.5. mu.m, 1. mu.m, 2. mu.m, 3. mu.m, 4. mu.m, or 5. mu.m. The aperture of the first light hole 3011 is too small, and a part of vertical light is absorbed by the first light absorbing layer 301 and cannot pass through the substrate, which affects the imaging performance, while the aperture of the first light hole 3011 is too large, and non-vertical light also passes through the substrate and cannot be effectively absorbed. The first light transmission hole 3011 has a circular shape.
Specifically, the thickness of the first light absorption layer 301 is 800nm to 3 μm. May be 800nm, 1 μm, 2 μm or 3 μm. Due to the arrangement of the range, the requirement of ultra-thinness can be met, and meanwhile, the shading effect can be effectively achieved.
The first light absorbing layer 301 is a black light absorbing layer, which may be, but not limited to, one or more of a titanium layer, a chromium layer, a silicon carbide layer, or a silicon dioxide layer, and the light absorbing layer can effectively absorb light; the first light absorbing layer 301 can be disposed by a process commonly used in the art, for example, the first light absorbing layer 301 can be disposed on the first surface 101 of the transparent substrate by evaporating or coating a photoresist. The second light absorption layer formed by the process is smoother and more uniform.
As shown in fig. 4, the microlens array of the second embodiment is different from the microlens array of the above embodiments only in that the light absorbing member is different, and specifically, the light absorbing member of the present embodiment includes a first light absorbing layer 301, a second light absorbing layer 302;
the single light absorbing layer has difficulty in completely absorbing the non-perpendicular light, so that a part of the non-perpendicular light enters the transparent substrate, and the second light absorbing layer 302 is disposed to further absorb the stray light with a large incident angle transmitted through the transparent substrate 100. Therefore, the consistency of the definition of an image formed after the incident light penetrates through the micro lens 201 is further improved, and the light condensation efficiency of the micro lens 201, namely, the imaging effect is improved. That is, the first light absorbing layer 301 and the second light absorbing layer 302 work together to better improve the light condensing efficiency of the microlens 201 and improve the imaging effect.
A second light absorbing layer 302 is disposed between the third surface 202 and the first surface 101; further, the number of the second light absorbing layers 302 is plural, and the second light absorbing layers are arranged in one-to-one correspondence with the microlenses 201; the second light absorbing layer 302 is provided with a plurality of second light transmitting holes 3021, and an orthographic projection of the plurality of second light transmitting holes 3021 on the third surface 202 of the microlens 201 completely falls on the third surface 202 and is spaced from an edge of the third surface 202, that is, the plurality of second light transmitting holes 3011 are all completely covered by the microlens 201.
In a direction perpendicular to the first surface 101, a central axis of the second light-passing hole 3021 coincides with a central axis a of the corresponding first light-passing hole 3011.
Further, the edges of the orthographic projection of the microlens 201 on the second light absorbing layer 302 all fall on the second light absorbing layer 301, and are spaced from the edges of the second light absorbing layer 302. I.e., the second light absorbing layer 302 can completely cover the third surface 202.
Further, the plurality of second light holes 3021 have the same size, and the plurality of second light holes 3021 are uniformly distributed, that is, the distance between two adjacent second light holes 3021 is the same. Therefore, the light condensing efficiency of the edge of the light condensing position corresponding to each micro lens 201 is consistent, and the whole imaging effect of the micro lens array assembly is further improved.
The vertical light passes through the microlens 201 and then passes through the transparent substrate 100 through the second light transmission hole 3021; part of the non-vertical light entering the micro lens 201 through refraction can be absorbed by the second light absorption layer 302, so that only the vertical light penetrates through the transparent substrate 100, the aim of improving the collimation effect can be achieved, the light condensation efficiency of the micro lens 201 can be improved better, and the imaging effect is improved.
Furthermore, in this embodiment, the second light absorption layer 302 blocks the stray light with a large incident angle, so that the stray light with a large incident angle can be effectively alleviated from being refracted to the light-gathering positions of other microlenses 201, and thus, crosstalk cannot be generated in sampling among different microlenses 201, thereby preventing a parallax phenomenon from occurring in a formed image.
Further, the width of the second light absorbing layer 302 between any two adjacent second light transmitting holes 3021 is the same, so that the light condensing efficiency at the corresponding focusing position of each microlens 201 is uniform, and it should be noted that, for the overall imaging effect of the microlens array assembly, the structure, size and position of the corresponding first light absorbing layer 301 of each microlens are the same.
Specifically, the aperture of the second light-transmitting hole 3011 is 5 μm to 10 μm; the aperture of the second light hole 3021 is larger than that of the first light hole 3011, and the path of the light determines that only the first light hole 3011 below is smaller than that of the second light hole 3021 above, and the refracted non-perpendicular light can be effectively shielded, so that the aperture of the second light hole 3021 is larger than that of the first light hole 3021, and the shape of the second light hole 3021 is the same as that of the first light hole 3011;
in a specific example, the aperture of the second light-transmitting hole 3011 may be 5 μm, 6 μm, 7 μm, 8 μm, 9 μm, or 10 μm. The aperture of the second light-transmitting hole 3021 is too small, and a portion of the vertical light is absorbed by the second light-absorbing layer 302 and cannot pass through the substrate, which affects the imaging performance, while the aperture of the second light-transmitting hole 3021 is too large, and the non-vertical light also passes through the substrate and cannot be effectively absorbed. The second light-transmitting hole 3021 has a circular shape.
Specifically, the thickness of the second light absorbing layer 302 is 800nm to 3 μm. May be 800nm, 1 μm, 2 μm or 3 μm. Due to the arrangement of the range, the requirement of ultra-thinness can be met, and meanwhile, the shading effect can be effectively achieved.
The second light absorbing layer 301 may be, but is not limited to, one or a combination of titanium layer, chromium layer, silicon layer, and silicon carbide layer, which can effectively absorb light; the second light absorbing layer 302 may be disposed by a process commonly used in the art, such as by evaporating or coating a photoresist on the second surface 102 of the transparent substrate. The second light absorption layer formed by the process is smoother and more uniform.
The thicknesses of the first light absorbing layer 301 and the second light absorbing layer 302 may be the same or different.
The micro lens array has at least the following advantages:
1) by arranging the first light absorbing layer 301 on the first surface of the microlens 201, part of the non-vertical light entering the microlens 201 through refraction can be absorbed by the first light absorbing layer 301, and finally only the vertical light passes through the microlens 201, so that the aim of improving the collimation effect can be achieved, and the product performance can be improved.
2) In the manufacturing process of the microlens, for example, a microlens array is formed on a transparent substrate through an embossing process, in this way, a separate manufacturing method is adopted, when the first light-transmitting hole 3021 of the first light-absorbing layer 301 is manufactured, generally, in order to have a better imaging effect, a light-transmitting hole is correspondingly arranged for one microlens, and this arrangement requires that the requirement for the alignment precision of the microlens and the light-transmitting hole of the light-absorbing layer is higher (+/-1.5um), the manufacturing process is complex, the cost is high, the performance of the obtained microlens is not ideal, and the performance is not as good as that of the light-absorbing layer for integrally manufacturing the microlens; the invention adopts a many-to-one or one-to-many mode to set, thus reducing the cost, lowering the precision requirement of the back-end module attaching process, ensuring that the light inlet quantity is not less than one-to-one and the definition is not reduced; the first light absorbing layer 301 is provided with the plurality of first light holes 3021, and only one light hole is arranged relative to the first light absorbing layer 301, so that the requirement on the position setting of the micro lens and the light hole is not high, only the shape alignment is needed, and the basic performance requirement can be met.
3) The single light absorbing layer is difficult to completely absorb the non-perpendicular light, so that part of the non-perpendicular light enters the transparent substrate, and therefore, the light absorbing layer is respectively arranged on the first surface 101 and the second surface 102 of the transparent substrate 100 corresponding to each microlens, so that stray light with a large incident angle penetrating through the transparent substrate can be further absorbed. The non-perpendicular light enters the microlens 201 and then enters the second light absorbing layer 302, and is absorbed by the second light absorbing layer 302. The aperture of the second light-transmitting hole 3021 is larger than that of the first light-transmitting hole 3011, and the path of the light determines that only the first light-transmitting hole 3011 below is smaller than that of the second light-transmitting hole 3021 above, and the refracted non-perpendicular light can be effectively shielded, that is, the second light-absorbing layer 302 can further shield the stray light with a larger incident angle. In other words, the first light absorbing layer 301 and the second light absorbing layer 302 work together, and the minimum incident angle of the absorbable incident light decreases. Thereby further improving the uniformity of the sharpness of the image formed by the microlenses 201 and improving the light-gathering efficiency of the microlenses, i.e., improving the molding effect.
The invention further provides a biological identification module which comprises the micro lens array. Above-mentioned biological identification module can absorb the great miscellaneous light of incident angle through first light-absorbing layer and second light-absorbing layer to improve the incident light and see through the uniformity of the definition of the image that forms behind the microlens, improve microlens spotlight efficiency, improve the imaging effect promptly.
The invention further provides electronic equipment comprising the biological identification module.
Specifically, the electronic device may be a mobile phone, a camera, a tablet computer, or the like.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (14)
1. A microlens array, comprising:
a transparent substrate comprising a first surface and a second surface opposite the first surface;
a microlens assembly including a plurality of microlenses arranged in an array on the first surface, the microlenses having a third surface, the third surface being attached to the first surface, an
The light absorption component comprises a first light absorption layer, and the first light absorption layer is arranged on the second surface; the first light absorption layer is provided with a plurality of first light holes; the edges of orthographic projections of the micro lenses on the first light absorption layer all fall on the first light absorption layer and are spaced from the edges of the first light absorption layer.
2. The microlens array as claimed in claim 1, wherein the first light absorbing layer is plural in number and is disposed in one-to-one correspondence with the microlenses.
3. The microlens array of claim 1, wherein the first light absorbing layer has a thickness of 800nm to 3 μm.
4. The microlens array as in claim 1, wherein the first light absorbing layer is one or a combination of titanium layer, chromium layer, silicon carbide layer and silicon dioxide layer.
5. The microlens array as claimed in claim 1, wherein the first light-transmitting hole has an aperture of 0.5 μm to 5 μm.
6. The microlens array as claimed in claim 1, wherein the light absorbing member further includes a second light absorbing layer disposed between the third surface and the first surface, the second light absorbing layer being provided with a plurality of second light transmitting holes, and the edges of orthographic projections of the microlenses on the second light absorbing layer each fall on the second light absorbing layer with a space from the edges of the second light absorbing layer.
7. The microlens array as claimed in claim 6, wherein the second light absorbing layer is plural in number and is disposed in one-to-one correspondence with the microlenses.
8. The microlens array as claimed in claim 6, wherein the aperture of the second light-transmitting hole is 5 μm to 10 μm.
9. The microlens array of claim 6, wherein the second light absorbing layer has a thickness of 800nm to 3 μm.
10. The microlens array as in claim 6, wherein the second light absorbing layer is one or more of a titanium layer, a chromium layer, a silicon carbide layer and a silicon dioxide layer.
11. The microlens array as claimed in any one of claims 1 to 10, wherein the microlenses are polygonal microlenses.
12. The microlens array as claimed in any one of claims 1 to 10, wherein the microlenses are spherical microlenses.
13. A biometric module comprising the microlens array of any one of claims 1-12.
14. An electronic device comprising the biometric module of claim 13.
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| WO2024045342A1 (en) * | 2022-08-30 | 2024-03-07 | 武汉华星光电技术有限公司 | Display panel |
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