CN111277108A - Driving and guiding integrated device - Google Patents
Driving and guiding integrated device Download PDFInfo
- Publication number
- CN111277108A CN111277108A CN202010126008.8A CN202010126008A CN111277108A CN 111277108 A CN111277108 A CN 111277108A CN 202010126008 A CN202010126008 A CN 202010126008A CN 111277108 A CN111277108 A CN 111277108A
- Authority
- CN
- China
- Prior art keywords
- permanent magnet
- base
- iron core
- stator assembly
- guide mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
Description
技术领域technical field
本发明涉及机电一体化设计领域,具体涉及一种驱动导向一体化装置。The invention relates to the field of mechatronics design, in particular to a drive-guidance integrated device.
背景技术Background technique
柔性导向机构受力变形,通过变形传递位移,使其具有高线性度,无摩擦,无反向间隙的优点,被广泛应用于位移精度需要达到纳米级的场合。在百微米级行程以下时,可以采用压电陶瓷致动器作为柔性导向机构的驱动装置,但由于压电陶瓷堆叠数量和器件尺寸的限制,其行程范围小于一百微米。尽管压电陶瓷致动器可以采用尺蠖结构提高行程范围,但使用寿命短是最大的限制因素。The flexible guiding mechanism is deformed by force and transmits displacement through deformation, so that it has the advantages of high linearity, no friction, and no backlash. It is widely used in applications where the displacement accuracy needs to reach the nanometer level. When the stroke is below one hundred microns, the piezoelectric ceramic actuator can be used as the driving device of the flexible guiding mechanism, but due to the limitation of the number of piezoelectric ceramic stacks and the size of the device, the stroke range is less than one hundred microns. Although piezo actuators can use the inchworm structure to increase the stroke range, the short lifespan is the biggest limiting factor.
采用直线电机作为驱动装置能够提高柔性导向机构的行程范围,为了提高装置性能指标,直线电机需要:1.减小运动部分质量;2.提高推力密度;3.行程范围内推力平稳;4.电机散热合理。Using a linear motor as a driving device can improve the stroke range of the flexible guide mechanism. In order to improve the performance index of the device, the linear motor needs to: 1. Reduce the mass of the moving part; 2. Improve the thrust density; 3. The thrust is stable within the stroke range; 4. The motor Reasonable heat dissipation.
但是,目前柔性导向机构和电机是独立设计的,两者通过紧固件连接,导致整体占用较大空间。另外,现有直线电机大部分是三相电机,推力平稳程度难以达标。音圈电机是一种单相电机,其推力平稳,但是采用动圈式结构的音圈电机,则面临动子质量较大,散热困难的问题;采用动磁式结构的音圈电机导致系统中基本无阻尼,系统极易振动,降低定位精度。However, at present, the flexible guide mechanism and the motor are designed independently, and the two are connected by fasteners, resulting in a large overall space occupation. In addition, most of the existing linear motors are three-phase motors, and the level of thrust stability is difficult to meet the standard. The voice coil motor is a single-phase motor, and its thrust is stable, but the voice coil motor using the moving coil structure is faced with the problem of large mover mass and difficult heat dissipation; the voice coil motor using the moving magnet structure causes the system to suffer. Basically no damping, the system is very easy to vibrate, reducing the positioning accuracy.
发明内容SUMMARY OF THE INVENTION
本发明针对上述技术现状,提供一种驱动导向一体化装置,该装置一体化设计导向机构和驱动电机,能够输出高精度位移,可用于高精度运动、定位等领域。Aiming at the above-mentioned technical situation, the present invention provides an integrated drive and guide device, which integrates a design of a guide mechanism and a drive motor, can output high-precision displacement, and can be used in the fields of high-precision movement and positioning.
本发明的技术方案为:一种驱动导向一体化装置,包括导向组件与定子组件;The technical scheme of the present invention is as follows: a drive-guidance integrated device, comprising a guide assembly and a stator assembly;
所述定子组件包括铁芯以及绕行在铁芯上的线圈;The stator assembly includes an iron core and a coil wound on the iron core;
所述导向组件包括基座、柔性导向机构与永磁动子;基座上设置用于安装柔性导向机构与永磁动子的第一定位槽;基座上还设置第二定位槽,定子组件通过第二定位槽固定安装在基座上;当永磁动子安装在第一定位槽,定子组件固定安装在基座上时,所述铁芯的端面与永磁体存间隙相对;The guide assembly includes a base, a flexible guide mechanism and a permanent magnet mover; the base is provided with a first positioning groove for installing the flexible guide mechanism and the permanent magnet mover; a second positioning groove is also set on the base, and the stator assembly It is fixedly installed on the base through the second positioning slot; when the permanent magnet mover is installed in the first positioning slot and the stator assembly is fixedly installed on the base, the end face of the iron core is opposite to the permanent magnet with a gap;
线圈通电,永磁体受到电磁力作用而运动,力传递到柔性导向机构,柔性导向机构受力变形产生位移,通过输出轴传递位移。When the coil is energized, the permanent magnet moves under the action of electromagnetic force, and the force is transmitted to the flexible guide mechanism. The flexible guide mechanism is deformed by force to generate displacement, and the displacement is transmitted through the output shaft.
所述永磁动子采用永磁材料构成,可提供激励磁场,并且线圈通电时永磁体受到电磁力作用而运动。The permanent magnet mover is made of permanent magnet material, which can provide an excitation magnetic field, and the permanent magnet moves under the action of electromagnetic force when the coil is energized.
所述柔性导向机构受力变形,通过变形传递位移,其结构不限,可以具有一定的拓扑结构。作为优选,所述柔性导向机构采用高强度、高弹性的材料,通过机械加工形成特定的拓扑形状。The flexible guiding mechanism is deformed by force and transmits displacement through deformation, and its structure is not limited, and can have a certain topology structure. Preferably, the flexible guide mechanism adopts high-strength and high-elasticity materials, and is machined to form a specific topological shape.
所述线圈采用导电性材料。作为一种实现方式,所述线圈绕制成型后嵌装在铁芯上。The coil is made of conductive material. As an implementation manner, the coil is wound and formed and then embedded on the iron core.
所述定子组件安装在基座的至少一侧。例如,所述定子组件安装在基座的上侧、下侧,或者上侧与下侧。安装在基座上的定子组件数目不限,一个基座可以安装一个、两个或者多个定子组件。The stator assembly is mounted on at least one side of the base. For example, the stator assembly is mounted on the upper side, the lower side, or both the upper side and the lower side of the base. The number of stator assemblies installed on the base is not limited, and one base can be installed with one, two or more stator assemblies.
作为优选,所述铁芯中与永磁体相对的端面设置导电片,当线圈通电,永磁体受到电磁力作用而运动时,与所述导电片产生相对位移,永磁体激励的磁场将在导电片中产生涡流,从而使永磁体受到与速度成正比的阻尼力,能够提高装置的抗扰动性,提升稳定性,同时改善装置的可控性。作为进一步优选,可通过调控导电片厚度得到合适的阻尼力。Preferably, a conductive sheet is arranged on the end face of the iron core opposite to the permanent magnet. When the coil is energized and the permanent magnet moves under the action of electromagnetic force, a relative displacement is generated with the conductive sheet, and the magnetic field excited by the permanent magnet will be on the conductive sheet. Eddy currents are generated in the vortex, so that the permanent magnets are subjected to a damping force proportional to the speed, which can improve the anti-disturbance of the device, improve the stability, and at the same time improve the controllability of the device. As a further preference, a suitable damping force can be obtained by adjusting the thickness of the conductive sheet.
作为优选,所述定子组件外围设置外壳,用于加固和保护定子组件,外壳通过固定件固定在基座上。作为进一步优选,所述定子组件嵌入外壳,通过灌胶固结为一体。Preferably, a casing is arranged on the periphery of the stator assembly for strengthening and protecting the stator assembly, and the casing is fixed on the base through a fixing member. As a further preference, the stator assembly is embedded in the casing and consolidated into one body by gluing.
作为一种实现方式,所述永磁动子与柔性导向机构固定连接。As an implementation manner, the permanent magnet mover is fixedly connected to the flexible guide mechanism.
作为一种实现方式,如图4所示,所述铁芯的两端向同一方向弯折,大体形成U型结构,这种结构的铁芯称为U型铁芯,经弯折的部分称为齿部,连接齿部的部分称为轭部,线圈绕行在齿部。所述齿部顶端称为齿顶,齿顶面与所述永磁动子存间隙相对。所述齿顶可通过设计形成各种形状。作为优选,所述齿顶向两边横向扩展,与齿部其余部分形成T型结构,这种结构有利于拓宽磁场,并提升磁场的均匀性。当定子组件具有该T型结构的齿部时,所述第二定位槽结构与齿顶结构相匹配,齿顶可嵌入第二定位槽中,从而使定子组件固定安装在基座上。As an implementation, as shown in FIG. 4, both ends of the iron core are bent in the same direction to form a U-shaped structure. The iron core of this structure is called a U-shaped iron core, and the bent part is called a U-shaped iron core. It is a tooth part, and the part connecting the tooth part is called a yoke part, and the coil is wound around the tooth part. The top of the tooth portion is called a tooth top, and the tooth top surface is opposite to the permanent magnet mover with a gap. The tooth top can be formed into various shapes by design. Preferably, the tooth tip extends laterally to both sides, forming a T-shaped structure with the rest of the tooth portion, and this structure is beneficial to widen the magnetic field and improve the uniformity of the magnetic field. When the stator assembly has the teeth of the T-shaped structure, the second positioning groove structure matches the tooth top structure, and the tooth top can be embedded in the second positioning groove, so that the stator assembly is fixedly installed on the base.
与现有技术相比,本发明驱动导向一体化装置具有如下有益效果:Compared with the prior art, the driving and guiding integrated device of the present invention has the following beneficial effects:
(1)本发明采用定子组件和导向组件,通过机加工的定位槽配合,装配精度高,且装配简化,实现了直线驱动电机与柔性导向机构一体化,避免了柔性导向机构和电机相分离而导致的体积大、精度损失的问题,可提供高精度的位移;(1) The present invention adopts the stator assembly and the guide assembly, which is matched with the machined positioning groove, and has high assembly precision and simplified assembly, realizes the integration of the linear drive motor and the flexible guide mechanism, and avoids the separation of the flexible guide mechanism and the motor. The resulting problems of large volume and loss of precision can provide high-precision displacement;
(2)本发明采用动磁式直线电机结构,运动部分的质量主要集中在永磁体上,减少了运动部分的质量;铁芯端面与永磁体定位槽配合,保证了气隙厚度的一致性;在行程范围内推力波动小,且输出力和电流基本成正比,安装简便且出力大,能够有效驱动柔性机构实现高速、高精位移;(2) The present invention adopts a moving magnet linear motor structure, and the mass of the moving part is mainly concentrated on the permanent magnet, which reduces the mass of the moving part; the end face of the iron core is matched with the permanent magnet positioning groove to ensure the consistency of the thickness of the air gap; The thrust fluctuation is small within the stroke range, and the output force and current are basically proportional, the installation is simple and the output is large, and the flexible mechanism can be effectively driven to achieve high-speed and high-precision displacement;
(3)作为优选,本发明在铁芯与永磁体相对的端面设置导电片,当永磁体运动时产生阻尼,提高了装置的抗扰能力和可控性;(3) as a preference, in the present invention, a conductive sheet is arranged on the opposite end face of the iron core and the permanent magnet, and damping is generated when the permanent magnet moves, which improves the anti-interference ability and controllability of the device;
(4)作为优选,本发明中的铁芯包括齿部与轭部,齿部结构可增强气隙磁场,提高线圈与永磁体的相互电磁作用,提高推力密度;(4) Preferably, the iron core in the present invention includes a tooth portion and a yoke portion, and the tooth portion structure can enhance the air gap magnetic field, improve the mutual electromagnetic interaction between the coil and the permanent magnet, and improve the thrust density;
(5)本发明中,柔性导向机构限制永磁体仅能在限定的方向运动,其位移的传递利用柔性导向机构的变形,电磁力无接触作用于永磁体,实现无摩擦,无反向间隙的定位功能。(5) In the present invention, the flexible guide mechanism restricts the permanent magnet to move only in a limited direction, and the transmission of its displacement utilizes the deformation of the flexible guide mechanism, and the electromagnetic force acts on the permanent magnet without contact, realizing frictionless and backlash-free GPS.
(6)本发明中,定子组件的导热性良好,可以快速传导线圈产生的热,从而限制温升。(6) In the present invention, the thermal conductivity of the stator assembly is good, and the heat generated by the coil can be quickly conducted, thereby limiting the temperature rise.
因此,本发明驱动导向一体化装置具有体积小、轻量化、推力密度高的优点,能够输出高精度位移,并且安装简单,稳定性高,可自带阻尼,能够有效抑制外界扰动,在高精度运动、定位等技术领域中具有良好的应用前景。Therefore, the integrated drive and guide device of the present invention has the advantages of small size, light weight, and high thrust density, can output high-precision displacement, is simple in installation, has high stability, can have its own damping, can effectively suppress external disturbances, and can be used in high-precision It has good application prospects in technical fields such as sports and positioning.
附图说明Description of drawings
图1是本发明实施例1中驱动导向一体化装置的组装结构示意图。FIG. 1 is a schematic view of the assembly structure of the drive and guide integrated device in
图2是本发明实施例1中驱动导向一体化装置的分解结构示意图。FIG. 2 is a schematic diagram of an exploded structure of the integrated drive and guide device in
图3是图2中导向组件的俯视图。FIG. 3 is a top view of the guide assembly of FIG. 2 .
图4是本发明实施例1中由永磁体、线圈、铁芯组成的电磁部件的截面示意图。4 is a schematic cross-sectional view of an electromagnetic component composed of a permanent magnet, a coil, and an iron core in
图1至图4中的附图标记为:定子组件1、导向组件2、定子机壳11a、定子机壳固定件11b、线圈12a、铁芯12b、第一凸起12bI、第二凸起12bII、导电片12c、基座21、永磁体22、输出轴23、柔性导向机构24。1 to 4 are:
具体实施方式Detailed ways
下面结合附图实施例对本发明作进一步详细描述,需要指出的是,以下所述实施例旨在便于对本发明的理解,而对其不起任何限定作用。The present invention will be further described in detail below with reference to the embodiments of the accompanying drawings. It should be noted that the embodiments described below are intended to facilitate the understanding of the present invention, but do not have any limiting effect on it.
实施例1:Example 1:
如图1所示,本实施例的驱动导向一体化装置包括定子组件1和导向组件2。定子组件对称分布于导向组件的水平面的上下部分,形成三明治结构。As shown in FIG. 1 , the integrated drive and guide device of this embodiment includes a
如图2、4所示,定子组件包括线圈12a与U型铁芯12b。As shown in FIGS. 2 and 4 , the stator assembly includes a
如图2、3所示,导向组件2包括基座21、永磁体22以及柔性导向机构24。基座21上开设第一定位槽,用于安装永磁体22以及柔性导向机构24。基座上还设置第二定位槽21a,定子组件1通过第二定位槽21a固定安装在基座上。As shown in FIGS. 2 and 3 , the
如图4所示,本实施例中,驱动导向一体化装置的电磁部件包括线圈12a、铁芯12b、导电片12c和永磁体22。线圈12a绕在铁芯12b的齿部。铁芯12b采用导磁性良好的材料,其齿顶向两边横向扩展,即,设有第一凸起12bI和第二凸起12bII,与齿部其余部分形成T型结构,这种结构有利于拓宽磁场,并提升磁场的均匀性。齿顶端面贴合设置导电片12c。如图2所示,第二定位槽21a的结构与该齿顶结构相匹配,齿顶可嵌入第二定位槽21a中,从而使定子组件固定安装在基座上。As shown in FIG. 4 , in this embodiment, the electromagnetic components of the integrated driving and guiding device include a
如图2所示,定子组件外围设置定子机壳11a用于加固和保护定子组件。定子机壳11a为底部开口的容器结构。定子机壳11a可与定子组件灌封为整体,通过定子机壳固定件11b固定在基座21上。As shown in FIG. 2 , a
永磁体22为硬磁材料,可提供磁场激励。The
柔性导向机构24采用高强度、高弹性的材料,通过机械加工形成一定的拓扑结构,受力发生塑形形变,通过输出轴23传递位移,输出轴23从基座伸出,提供与外界交互的接口。The
线圈12a通电产生磁场,磁场穿过永磁体22产生电磁相互作用,永磁体22受到电磁力后产生运动,带动柔性导向机构24发生塑形形变,通过输出轴23传递位移至外界。在运动的过程中,柔性导向机构24仅发生塑性形变,电磁力和其驱动的位移是线性关系,因此该装置能够提供高精度的位移,可用于高精度运动、定位等。另外,永磁体22在运动时与导体片12c产生相对位移,永磁体22激励的磁场将在导体片12c中产生涡流,永磁体22受到与速度成正比的阻尼力,在精密定位场合中,这个阻尼力能够提高抗扰动性,提升系统稳定性,同时改善系统的可控性。The
以上所述的实施例对本发明的技术方案进行了详细说明,应理解的是以上所述仅为本发明的具体实施例,并不用于限制本发明,凡在本发明的原则范围内所做的任何修改、补充或类似方式替代等,均应包含在本发明的保护范围之内。The above embodiments describe the technical solutions of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Anything done within the scope of the principles of the present invention Any modifications, additions or substitutions in similar manners, etc., shall be included within the protection scope of the present invention.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010126008.8A CN111277108A (en) | 2020-02-27 | 2020-02-27 | Driving and guiding integrated device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010126008.8A CN111277108A (en) | 2020-02-27 | 2020-02-27 | Driving and guiding integrated device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111277108A true CN111277108A (en) | 2020-06-12 |
Family
ID=71000485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010126008.8A Pending CN111277108A (en) | 2020-02-27 | 2020-02-27 | Driving and guiding integrated device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111277108A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115603543A (en) * | 2022-12-12 | 2023-01-13 | 深圳市克洛诺斯科技有限公司(Cn) | A linear motor with a guiding mechanism |
| CN116191809A (en) * | 2022-09-07 | 2023-05-30 | 上海镭望光学科技有限公司 | Array voice coil motor suitable for uniformity correction |
| CN119315791A (en) * | 2024-10-08 | 2025-01-14 | 哈尔滨工程大学 | A moving magnetic drive magnetic circuit and a hydrostatic pressure resistant high-power double moving magnetic drive stack |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200709536A (en) * | 2006-03-02 | 2007-03-01 | Magtronics Technology Inc | A voice coil motor and method of using magnetic restoring force achieving displacement control |
| CN102948053A (en) * | 2010-06-08 | 2013-02-27 | 株式会社日立制作所 | Linear motor |
| CN104584403A (en) * | 2012-10-24 | 2015-04-29 | 株式会社日立制作所 | Linear motor and linear motor drive system |
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN109450216A (en) * | 2018-12-22 | 2019-03-08 | 中国科学院宁波材料技术与工程研究所 | A kind of linear motor with lightweight mover |
| CN211352010U (en) * | 2020-02-27 | 2020-08-25 | 中国科学院宁波材料技术与工程研究所 | Driving and guiding integrated device |
-
2020
- 2020-02-27 CN CN202010126008.8A patent/CN111277108A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200709536A (en) * | 2006-03-02 | 2007-03-01 | Magtronics Technology Inc | A voice coil motor and method of using magnetic restoring force achieving displacement control |
| CN102948053A (en) * | 2010-06-08 | 2013-02-27 | 株式会社日立制作所 | Linear motor |
| CN104584403A (en) * | 2012-10-24 | 2015-04-29 | 株式会社日立制作所 | Linear motor and linear motor drive system |
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN109450216A (en) * | 2018-12-22 | 2019-03-08 | 中国科学院宁波材料技术与工程研究所 | A kind of linear motor with lightweight mover |
| CN211352010U (en) * | 2020-02-27 | 2020-08-25 | 中国科学院宁波材料技术与工程研究所 | Driving and guiding integrated device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116191809A (en) * | 2022-09-07 | 2023-05-30 | 上海镭望光学科技有限公司 | Array voice coil motor suitable for uniformity correction |
| CN116191809B (en) * | 2022-09-07 | 2024-04-09 | 上海镭望光学科技有限公司 | Array voice coil motor suitable for uniformity correction |
| CN115603543A (en) * | 2022-12-12 | 2023-01-13 | 深圳市克洛诺斯科技有限公司(Cn) | A linear motor with a guiding mechanism |
| CN115603543B (en) * | 2022-12-12 | 2023-03-14 | 深圳市克洛诺斯科技有限公司 | A linear motor with a guiding mechanism |
| CN119315791A (en) * | 2024-10-08 | 2025-01-14 | 哈尔滨工程大学 | A moving magnetic drive magnetic circuit and a hydrostatic pressure resistant high-power double moving magnetic drive stack |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209120034U (en) | A kind of linear motor with lightweight mover | |
| CN111277108A (en) | Driving and guiding integrated device | |
| CN102130567A (en) | A voice coil motor | |
| CN105099122A (en) | Moving-magnet type long-stroke ultra-precision linear motion mechanism | |
| CN109639086B (en) | Induction powered voice coil motor | |
| CN211352010U (en) | Driving and guiding integrated device | |
| CN106958531B (en) | A kind of low-loss magnetic suspension turbine molecular pump | |
| WO2022047941A1 (en) | Linear motor | |
| CN103178685A (en) | Electromagnetic force actuator for active support of astronomical telescope mirror face | |
| CN117335633A (en) | Method stress electromagnetic actuator with embedded compliant mechanism | |
| CN204858933U (en) | A C-type Ironless Linear Motor | |
| CN108462359A (en) | A kind of segmented secondary formula permanent magnetic linear synchronous motor | |
| CN211209558U (en) | Cylindrical voice coil motor magnetic gravity compensator, voice coil motor and voice coil motor assembly | |
| US12483107B2 (en) | Ultra-micro voice coil motor based on micro-electro-mechanical system three-dimensional coil | |
| CN115208124A (en) | Precise motion platform integrated with active damping and control framework thereof | |
| CN101860173B (en) | Direct magnetic suspension permanent magnet linear synchronous motor for numerical control feeding platform | |
| CN218958766U (en) | High-driving-force quick-response linear motor based on electromagnetic damping | |
| CN204835886U (en) | Nose bar formula does not have iron core linear motor | |
| CN117081347A (en) | Electromagnetic and piezoelectric hybrid drive permanent magnet linear synchronous motor | |
| CN108527910B (en) | Stator permanent magnet linear motor driving pressure machine | |
| CN109450216A (en) | A kind of linear motor with lightweight mover | |
| CN116418192A (en) | High-precision linear motion device with adjustable motion damping | |
| CN204886524U (en) | A driving device capable of rotating and linear two-degree-of-freedom operation | |
| CN100553082C (en) | An ultra-thin planar motor with 3 degrees of freedom | |
| CN114598125A (en) | U-shaped short primary permanent magnet synchronous linear motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |