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CN110828399A - Chip device, circuit board and digital currency mining machine - Google Patents

Chip device, circuit board and digital currency mining machine Download PDF

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CN110828399A
CN110828399A CN201810909439.4A CN201810909439A CN110828399A CN 110828399 A CN110828399 A CN 110828399A CN 201810909439 A CN201810909439 A CN 201810909439A CN 110828399 A CN110828399 A CN 110828399A
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die
chip device
chip
dielectric layer
metal dielectric
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卢战勇
刘亭婷
张楠赓
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Canaan Creative Co Ltd
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    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
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    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
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    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
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    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
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    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15172Fan-out arrangement of the internal vias
    • H01L2924/15174Fan-out arrangement of the internal vias in different layers of the multilayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
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    • H01L2924/181Encapsulation

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Abstract

本公开提出了一种芯片器件,包括:至少一个芯片,所述芯片包括晶粒,所述晶粒的背部是裸露的;以及形成并覆盖在所述晶粒的裸露背部上的金属介质层;其中,所述金属介质层的、背离所述晶粒的背面是不平坦的。通过以上结构,增大了芯片器件的散热面积,改善了该芯片器件的散热效率。另外还公开了一种包括该芯片器件的电路板以及数字货币挖矿机。

Figure 201810909439

The present disclosure proposes a chip device, comprising: at least one chip, the chip includes a die, and a backside of the die is exposed; and a metal dielectric layer formed and covered on the exposed backside of the die; Wherein, the back surface of the metal dielectric layer facing away from the crystal grains is uneven. Through the above structure, the heat dissipation area of the chip device is increased, and the heat dissipation efficiency of the chip device is improved. In addition, a circuit board including the chip device and a digital currency mining machine are also disclosed.

Figure 201810909439

Description

芯片器件、电路板及数字货币挖矿机Chip devices, circuit boards and digital currency mining machines

技术领域technical field

本发明涉及芯片散热技术领域,具体涉及芯片器件、包括该芯片器件的电路板及数字货币挖矿机,其中该芯片器件带有高效散热结构。The invention relates to the technical field of chip heat dissipation, in particular to a chip device, a circuit board including the chip device, and a digital currency mining machine, wherein the chip device has an efficient heat dissipation structure.

背景技术Background technique

随着芯片技术的不断发展,芯片的运行速度越来越快,处理能力越来越强,同时芯片在运行时产生的热量通常也会越多,这就需要采用更加高效的散热结构对芯片进行散热,避免芯片在运行时温度过高而导致芯片运行速度下降甚至芯片损坏。With the continuous development of chip technology, the running speed of the chip is getting faster and the processing capacity is getting stronger and stronger. At the same time, the heat generated by the chip usually increases during operation, which requires the use of a more efficient heat dissipation structure for the chip. Dissipate heat to prevent the chip from being overheated during operation, which may cause the chip to slow down or even damage the chip.

在现有技术中,例如在中国专利申请公开CN106445037A中公开了一种部分浸没式液冷服务器冷却系统,其中将主板、芯片和散热组片浸没在密闭腔体内的冷却液中,冷却液在泵的驱动下循环流动,从而对主板、芯片和散热组片进行散热。但是,该散热组片是通过导热硅脂而贴合在芯片表面上,这存在导热硅脂在使用中受到冷却液的影响以及随着时间而粘性降低从而使得散热组件与芯片接触不佳或者脱落进而导致散热不稳定的风险,而且导热硅脂也会一定程度上不利于热量从芯片传递到散热组件,使得影响对芯片的散热。In the prior art, for example, Chinese Patent Application Publication CN106445037A discloses a partially immersed liquid-cooled server cooling system, in which the main board, chips and heat dissipation fins are immersed in cooling liquid in a closed cavity, and the cooling liquid is pumped in a pump It circulates under the drive of the radiator, so as to dissipate heat from the motherboard, chips and heat sinks. However, the heat sink is attached to the surface of the chip through thermal grease, which may cause the thermal grease to be affected by the cooling liquid during use and its viscosity will decrease over time, so that the heat dissipation component is not in good contact with the chip or falls off. This will lead to the risk of unstable heat dissipation, and the thermal grease will also be detrimental to the transfer of heat from the chip to the heat dissipation component to a certain extent, which will affect the heat dissipation of the chip.

发明内容SUMMARY OF THE INVENTION

鉴于上述问题,提出了一种克服上述问题或者至少部分地解决上述问题的芯片器件、电路板及数字货币挖矿机,用于解决现有技术中存在的芯片散热不够稳定和高效的缺陷。In view of the above problems, a chip device, a circuit board and a digital currency mining machine that overcome the above problems or at least partially solve the above problems are proposed, which are used to solve the defects in the prior art that the heat dissipation of the chips is not stable and efficient.

依据本发明的第一方面,提供了一种芯片器件,包括:According to a first aspect of the present invention, a chip device is provided, comprising:

至少一个芯片,所述芯片包括晶粒,所述晶粒的背部是裸露的;以及at least one chip, the chip including a die, the backside of the die being exposed; and

形成并覆盖在所述晶粒的裸露背部上的金属介质层;a metal dielectric layer formed and overlying the exposed backside of the die;

其中,所述金属介质层的、背离所述晶粒的背面是不平坦的。Wherein, the back surface of the metal dielectric layer facing away from the crystal grains is uneven.

上述晶粒的背部是指当芯片安装在电路板上时,晶粒的、背向电路板的那一表面,即,与晶粒的面向电路板的表面相对的表面。背部裸露的晶粒的封装形式可以为ExposedDie形式,但是又不限于该封装形式,例如也可以是Bare Die、FCBGA(Flip Chip Ball GridArray,覆晶式球栅阵列封装结构)、FCCSP(Flip Chip Chip Scale Package,倒装芯片芯片级封装)、WLCSP(Wafer Level Chip Scale Package,晶圆级芯片级封装)、InFO(Integrated Fan-Out,集成扇出型晶圆级封装结构)/FOWLP(Fan Out Wafer LevelPackage,扇出型晶圆级封装结构)/FOPLP(Fan-Out Panel Level Package,扇出型面板级封装结构)、LGA(Land Grid Array,栅格阵列封装)等其它封装形式,只要晶粒背部裸露未被封装即可用于本发明的技术方案中,甚至晶粒的背面及四周均未封装时亦可适用于本发明的技术方案,或者在对晶粒封装之后再对该封装进行处理以使晶粒背部裸露出来的情形也适用于本发明的技术方案,本发明不限于此。The above-mentioned backside of the die refers to the surface of the die that faces away from the circuit board when the chip is mounted on the circuit board, that is, the surface opposite to the surface of the die that faces the circuit board. The package form of the exposed die on the back can be in the form of ExposedDie, but it is not limited to this package form, for example, it can also be Bare Die, FCBGA (Flip Chip Ball GridArray, flip chip ball grid array packaging structure), FCCSP (Flip Chip Chip Array) Scale Package, flip-chip chip-scale package), WLCSP (Wafer Level Chip Scale Package, wafer-level chip-scale package), InFO (Integrated Fan-Out, integrated fan-out wafer-level package structure)/FOWLP (Fan Out Wafer) LevelPackage, Fan-Out Wafer Level Package)/FOPLP (Fan-Out Panel Level Package, Fan-Out Panel Level Package), LGA (Land Grid Array, Grid Array Package) and other packaging forms, as long as the back of the die The technical solution of the present invention can be used in the technical solution of the present invention if it is exposed without being encapsulated, even when the backside and the surrounding of the die are not encapsulated. The situation where the backside of the die is exposed is also applicable to the technical solution of the present invention, and the present invention is not limited thereto.

金属介质层背面可以设有任何形式和数量的不平坦形状,例如可以包括各种形状的凸起,只要能够增大与冷却液的接触面积并且空间上允许即可。The backside of the metal medium layer may be provided with any form and number of uneven shapes, for example, may include protrusions of various shapes, as long as the contact area with the cooling liquid can be increased and the space allows.

优选地,在所述芯片器件中,金属介质层通过晶背金属化过程(BackSideMetallization process)形成在晶粒的背部上。Preferably, in the chip device, the metal dielectric layer is formed on the backside of the die through a backside metallization process.

优选地,在所述芯片器件中,金属介质层的背面上包括至少一个选自如下的凸起:锥形凸起、截锥形凸起、山丘状凸起、半球状凸起、波浪状凸起、柱状凸起和/或片状凸起。Preferably, in the chip device, the backside of the metal dielectric layer includes at least one protrusion selected from the group consisting of: cone-shaped protrusions, frusto-conical protrusions, hill-shaped protrusions, hemispherical protrusions, and wave-shaped protrusions. Protrusions, columnar protrusions and/or lamellar protrusions.

优选地,在所述芯片器件中,所述至少一个凸起具有相同或不同的高度。Preferably, in the chip device, the at least one protrusion has the same or different heights.

优选地,在所述芯片器件中,芯片还包括封装所述晶粒的封装部,封装部暴露晶粒的背部,且金属介质层覆盖晶粒以及晶粒周围的至少一部分封装部。Preferably, in the chip device, the chip further includes an encapsulation part for encapsulating the die, the encapsulation part exposes the back of the die, and the metal dielectric layer covers the die and at least a part of the encapsulation part around the die.

优选地,在所述芯片器件中,金属介质层与晶粒直接接触。Preferably, in the chip device, the metal dielectric layer is in direct contact with the die.

优选地,在所述芯片器件中,金属介质层为钛层,或者金属介质层包括钛层以及形成在钛层上的铝层。Preferably, in the chip device, the metal dielectric layer is a titanium layer, or the metal dielectric layer includes a titanium layer and an aluminum layer formed on the titanium layer.

根据本发明的另一方面,提供了一种电路板,包括:PCB板(印刷电路板);固定在PCB板上的如上所述的芯片器件;以及密封壳体,其内部具有用于容纳所述芯片器件和绝缘冷却液的空腔,所述密封壳体将所述芯片器件容纳在所述空腔内,相对于所述PCB板密封固定,并且设有供绝缘冷却液流入的流体入口及供绝缘冷却液流出的流体出口。According to another aspect of the present invention, there is provided a circuit board, comprising: a PCB board (printed circuit board); the above-mentioned chip device fixed on the PCB board; The cavity of the chip device and the insulating cooling liquid, the sealed casing accommodates the chip device in the cavity, is sealed and fixed relative to the PCB board, and is provided with a fluid inlet for the insulating cooling liquid to flow into and Fluid outlet for insulating coolant.

优选地,所述电路板还包括:设置在所述密封壳体上的散热片,所述散热片通过热界面材料或焊接而贴合在所述密封壳体上。Preferably, the circuit board further includes: a heat sink disposed on the sealed casing, the heat sink is attached to the sealed casing through thermal interface material or welding.

优选地,所述电路板还包括:流体管路,其与所述密封壳体的流体入口和流体出口连接以形成流体循环通路;绝缘冷却液,其用于在所述流体管路和所述电路板的密封壳体内循环流动;液体泵,其连接在所述流体管路中,用于泵送所述绝缘冷却液以对所述芯片器件进行散热;吸热装置,其连接在所述流体管路中,用于从所述绝缘冷却液吸收热量。Preferably, the circuit board further comprises: a fluid pipeline, which is connected with the fluid inlet and the fluid outlet of the sealed housing to form a fluid circulation path; an insulating cooling liquid for connecting the fluid pipeline and the fluid outlet. The circuit board circulates in the sealed casing; the liquid pump is connected in the fluid pipeline and is used for pumping the insulating cooling liquid to dissipate the heat of the chip device; the heat absorption device is connected with the fluid pipeline for absorbing heat from the insulating coolant.

优选地,在所述电路板中,密封壳体由金属制成。Preferably, in the circuit board, the sealed case is made of metal.

根据本发明的另一方面,提供了一种数字货币挖矿机,包括运算板,所述运算板包括如上所述的电路板。According to another aspect of the present invention, there is provided a digital currency mining machine, comprising an operation board, and the operation board includes the above-mentioned circuit board.

在本发明中,由于晶粒的背部是裸露的,而且在晶粒背部形成的金属介质层的背面是不平坦的,从而增大了金属介质层的散热面积,有利于芯片产生的热量向外散发。另外,由于金属介质层是通过晶背金属化过程(BSM)形成在晶粒背部上的,所以金属介质层与晶粒背部的结合紧密,有利于实现彼此间高效的热传递,而且金属介质层与晶粒背部结合牢固,在使用过程中不会引起金属介质层从晶粒背部松脱,从而增加了散热可靠性以及产品使用寿命。In the present invention, since the backside of the die is exposed, and the backside of the metal dielectric layer formed on the backside of the die is uneven, the heat dissipation area of the metal dielectric layer is increased, which is beneficial for the heat generated by the chip to go out. disseminate. In addition, since the metal dielectric layer is formed on the backside of the die through the backside metallization process (BSM), the metal dielectric layer and the backside of the die are closely combined, which is conducive to efficient heat transfer between each other, and the metal dielectric layer is It is firmly combined with the back of the die, and the metal dielectric layer will not be loosened from the back of the die during use, thereby increasing the reliability of heat dissipation and the service life of the product.

此外,与晶粒背部的裸露面积相比,散热层的面积更大,使得能够更加快速有效地从晶粒背部吸收热量,进而将吸收的热量高效地散发出去以传递到冷却液中。In addition, the larger area of the heat dissipation layer compared to the exposed area of the backside of the die allows for more rapid and efficient absorption of heat from the backside of the die, which in turn can be efficiently dissipated for transfer to the coolant.

而且,本发明的芯片器件的金属介质层即构成高效散热结构,配合冷却液实现了高效散热,所以该散热结构加工工艺较少,加工过程简单,加工成本较低。Moreover, the metal dielectric layer of the chip device of the present invention constitutes a high-efficiency heat dissipation structure, and cooperates with the cooling liquid to achieve high-efficiency heat dissipation, so the heat dissipation structure has less processing technology, simple processing process and low processing cost.

上述说明仅是本发明技术方案的概述,以便能够更清楚地了解本发明的技术手段,从而可依照说明书的内容予以实施。为了让本发明的上述和其它目的、特征和优点能够更明显易懂,以下特举说明本发明的具体实施方式。The above description is only an overview of the technical solution of the present invention, so that the technical means of the present invention can be more clearly understood, so that it can be implemented according to the content of the description. In order to make the above and other objects, features and advantages of the present invention more clearly understood, specific embodiments of the present invention are described below.

附图说明Description of drawings

通过阅读下文优选实施方式的详细描述,各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的,而并不认为是对本发明的限制。而且在整个附图中,用相同的参考符号表示相同的部件。在附图中:Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be considered limiting of the invention. Also, the same components are denoted by the same reference numerals throughout the drawings. In the attached image:

图1是根据本发明实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;1 is a schematic diagram of a chip device according to an embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;

图1a是图1中所示芯片器件的金属介质层的示意性立体图;Fig. 1a is a schematic perspective view of a metal dielectric layer of the chip device shown in Fig. 1;

图1b是示出根据本发明实施例的金属介质层背面设有圆柱形凸起的示意图;Fig. 1b is a schematic diagram showing that the backside of the metal dielectric layer is provided with cylindrical protrusions according to an embodiment of the present invention;

图1c是示出根据本发明实施例的金属介质层背面设有波浪形凸起的示意图;Fig. 1c is a schematic diagram showing that the backside of the metal dielectric layer is provided with wave-shaped protrusions according to an embodiment of the present invention;

图2是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;2 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;

图3是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;3 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;

图4是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;4 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;

图5是根据本发明另一实施例的具有本发明的芯片器件的电路板的示意图,其中示出了该电路板的剖视图;5 is a schematic diagram of a circuit board having the chip device of the present invention according to another embodiment of the present invention, wherein a cross-sectional view of the circuit board is shown;

图6是根据本发明另一实施例的具有本发明的电路板的数字货币挖矿机的示意图。6 is a schematic diagram of a digital currency mining machine having the circuit board of the present invention according to another embodiment of the present invention.

具体实施方式Detailed ways

下面将参照附图更详细地描述本公开的示例性实施例。虽然附图中显示了本公开的示例性实施例,然而应当理解,可以以各种形式实现本公开而不应被这里阐述的实施例所限制。相反,提供这些实施例是为了能够更透彻地理解本公开,并且能够将本公开的范围完整的传达给本领域的技术人员。Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure will be more thoroughly understood, and will fully convey the scope of the present disclosure to those skilled in the art.

图1是根据本发明实施例的芯片器件100的示意图,具体是沿着垂直于芯片器件100的背面的平面截取的剖视图。FIG. 1 is a schematic diagram of a chip device 100 according to an embodiment of the present invention, particularly a cross-sectional view taken along a plane perpendicular to the backside of the chip device 100 .

如图1所示,该芯片器件100包括:As shown in FIG. 1 , the chip device 100 includes:

至少一个芯片101,该芯片101包括晶粒102,该晶粒102的背部102a是裸露的;以及at least one chip 101, the chip 101 including a die 102, the backside 102a of the die 102 being exposed; and

形成并覆盖在晶粒102的裸露背部102a上的金属介质层104,该金属介质层104的、背离晶粒102的背面104a是不平坦的。该金属介质层104可以通过晶背金属化过程(BSM)形成在晶粒102的背部102a上。A metal dielectric layer 104 is formed and covers the exposed backside 102a of the die 102, the backside 104a of the metal dielectric layer 104 facing away from the die 102 being uneven. The metal dielectric layer 104 may be formed on the backside 102a of the die 102 through a backside metallization (BSM).

在这里,金属介质层104从芯片101吸收由晶粒102产生的热量,金属介质层104优选是完全覆盖晶粒102的背部102a的所有裸露部分,更优选的是,金属介质层104在与背部102a平行的平面的面积大于背部102a的面积,从而芯片101产生的热量能够快速通过其背部102a传递到金属介质层104,进而从金属介质层104散发到周围的导热介质(例如将在下文中所述的冷却液)中。Here, the metal dielectric layer 104 absorbs the heat generated by the die 102 from the chip 101 , and the metal dielectric layer 104 preferably completely covers all exposed parts of the backside 102 a of the die 102 , more preferably, the metal dielectric layer 104 is in contact with the backside The area of the parallel planes 102a is larger than that of the backside 102a, so that the heat generated by the chip 101 can be quickly transferred to the metal dielectric layer 104 through its backside 102a, and then dissipated from the metal dielectric layer 104 to the surrounding thermally conductive medium (for example, as will be described below). coolant).

金属介质层104的背面104a的不平坦形状可以通过各种形式实现,只要能够增大背面104a与冷却液的接触面积并且空间上允许即可。例如,如图1和图1a所示,金属介质层104的背面104a上可以设有多个凸起,例如多个方柱106,方柱可以规则排列呈如图1a中所示的4×8阵列形式,也可以不规则排列,本文对此没有限制。这些方柱106的大小和高度可以彼此相同,如图1a中所示,也可以彼此不同,本文对此没有限制。The uneven shape of the back surface 104a of the metal dielectric layer 104 can be realized in various forms, as long as the contact area of the back surface 104a and the cooling liquid can be increased and space is allowed. For example, as shown in FIG. 1 and FIG. 1a, the backside 104a of the metal dielectric layer 104 may be provided with a plurality of protrusions, such as a plurality of square pillars 106, and the square pillars may be regularly arranged to form 4×8 as shown in FIG. 1a Arrays can also be arranged irregularly, which is not limited in this article. The square pillars 106 may be the same size and height as each other, as shown in FIG. 1a, or different from each other, which is not limited herein.

在这里,金属介质层104的背面104a上设置的凸起的形式不受限制,例如图1b中示出了所述凸起为圆柱形凸起106a的示意图,图1c中示出了所述凸起为波浪形凸起106b的示意图。当然,金属介质层104的背面104a上设置的凸起也可以为锥形凸起、截锥形凸起、山丘状凸起、半球状凸起、和/或片状凸起如鳍片状凸起、波浪片状凸起等等。这些不同种类的凸起也可以组合使用。Here, the form of the protrusions provided on the back surface 104a of the metal dielectric layer 104 is not limited. For example, FIG. 1b shows a schematic diagram of the protrusions being cylindrical protrusions 106a, and FIG. 1c shows the protrusions It is a schematic diagram of the wavy protrusion 106b. Of course, the protrusions provided on the back surface 104a of the metal dielectric layer 104 may also be conical protrusions, frusto-conical protrusions, hill-shaped protrusions, hemispherical protrusions, and/or sheet-shaped protrusions such as fin-shaped protrusions Bumps, wavy flaky bumps, etc. These different kinds of protrusions can also be used in combination.

芯片101也可以包括封装该晶粒102的封装部103,封装部103暴露晶粒102的背部102a。如图1所示,芯片101采用Exposed die封装形式,封装部103可以为模塑料(moldingcompound)。在这种情况下,形成的金属介质层104覆盖晶粒102的整个背部102a以及晶粒102周围的至少一部分封装部103,当然也可以覆盖晶粒102的整个背部102a以及晶粒102周围的全部封装部103。The chip 101 may also include an encapsulation portion 103 encapsulating the die 102 , and the encapsulation portion 103 exposes the backside 102 a of the die 102 . As shown in FIG. 1 , the chip 101 is packaged in an Exposed die package, and the package portion 103 may be a molding compound. In this case, the formed metal dielectric layer 104 covers the entire backside 102 a of the die 102 and at least a part of the encapsulation portion 103 around the die 102 , and of course can also cover the entire backside 102 a of the die 102 and all around the die 102 Package part 103 .

晶粒102通过设置于基底108中的导电线路110以及管脚109与例如外部电路板电连接。The die 102 is electrically connected to, for example, an external circuit board through conductive traces 110 and pins 109 provided in the substrate 108 .

在图1中,示出芯片102的背部102a是全部裸露的,当然也可以是该背部102a的一部分是裸露的。In FIG. 1, it is shown that the back 102a of the chip 102 is completely exposed, but of course, a part of the back 102a may also be exposed.

在这里,芯片101也可以没有封装部103,即,晶粒102是完全裸露的,不仅其背部102a裸露,而且其四周也是裸露的。Here, the chip 101 may also have no encapsulation part 103 , that is, the die 102 is completely exposed, not only the back 102a of the chip 102 is exposed, but also the surrounding areas are also exposed.

在本文中,晶粒102的背部102a是指当芯片101安装在电路板上时,晶粒102上背向该电路板的那一表面,即,与晶粒102的面向电路板的表面相对的表面。在本文中,背部裸露的晶粒102的封装形式可以为Exposed Die形式,但是又不限于该封装形式,例如也可以是Bare Die/FCBGA(如图2所示)、WLCSP(如图3所示)、InFO/FOWLP/FOPLP(如图4所示)等其它封装形式。也就是说,本发明的技术方案不仅适用于Exposed Die封装形式,也同样适用于其它使晶粒背部裸露的封装形式,例如Bare Die/FCBGA、WLCSP、InFO/FOWLP/FOPLP、FCCSP、LGA等其它封装形式,只要芯片的晶粒背部是裸露未封装的即可,或者也可以是不对晶粒进行封装,或者在对晶粒封装之后再对该封装进行处理以使晶粒背部裸露出来,本发明不限于此。In this context, the backside 102a of the die 102 refers to the surface of the die 102 facing away from the circuit board when the chip 101 is mounted on the circuit board, ie, opposite to the surface of the die 102 facing the circuit board surface. In this paper, the package form of the back exposed die 102 may be in the form of Exposed Die, but is not limited to this package form, for example, it may also be Bare Die/FCBGA (as shown in FIG. 2 ), WLCSP (as shown in FIG. 3 ) ), InFO/FOWLP/FOPLP (as shown in Figure 4) and other packaging forms. That is to say, the technical solution of the present invention is not only applicable to the Exposed Die package form, but also to other package forms that expose the back of the die, such as Bare Die/FCBGA, WLCSP, InFO/FOWLP/FOPLP, FCCSP, LGA, etc. The package form, as long as the back of the die of the chip is exposed and unpackaged, or the die may not be packaged, or the package may be processed after the die is packaged to expose the back of the die. Not limited to this.

由于晶粒102的背部102a是裸露的,而且在晶粒背部102a与金属介质层104之间不存在影响热传递的非金属介质,使得芯片101产生的热能够快速有效地传递到金属介质层104,从而进一步通过芯片器件周围的冷却液散热。此外,与晶粒背部102a的裸露面积相比,金属介质从104的散热面积更大,使得能够更加快速有效地从晶粒背部102a吸收热量(也相当于增大了晶粒背部的散热面积),进而将吸收的热量高效地散发出去以及传递到冷却液中。Since the backside 102a of the die 102 is bare, and there is no non-metallic medium that affects heat transfer between the backside 102a of the die and the metal dielectric layer 104, the heat generated by the chip 101 can be quickly and efficiently transferred to the metal dielectric layer 104 , thereby further dissipating heat through the coolant around the chip device. In addition, compared with the exposed area of the backside of the die 102a, the heat dissipation area of the metal dielectric from the backside 104 is larger, so that the heat can be absorbed from the backside of the die 102a more quickly and effectively (also equivalent to increasing the heat dissipation area of the backside of the die). , and then efficiently dissipate the absorbed heat and transfer it to the coolant.

但是在现有技术中,没有设置类似于本发明中的背面不平坦的金属介质层104。而且,在现有技术中,散热片往往通过非金属热界面材料与芯片贴合,在这种情况下,由于非金属热界面材料的导热性不佳,而且芯片的晶粒并非裸露,使得从晶粒到散热片的热传递效率较低,影响散热效果。然而,本发明的上述技术方案中直接在裸露的晶粒背部上形成金属介质层,而且通过将金属介质层的背部做成不平坦形状,从而增大了其散热面积,从而避免了现有技术中存在的这些问题。However, in the prior art, the metal dielectric layer 104 with uneven back surface similar to that in the present invention is not provided. Moreover, in the prior art, the heat sink is often attached to the chip through a non-metallic thermal interface material. In this case, due to the poor thermal conductivity of the non-metallic thermal interface material, and the die of the chip is not exposed, the The heat transfer efficiency from the die to the heat sink is low, which affects the heat dissipation effect. However, in the above technical solution of the present invention, the metal dielectric layer is directly formed on the backside of the exposed die, and the backside of the metal dielectric layer is made into an uneven shape, thereby increasing the heat dissipation area, thereby avoiding the prior art. of these problems.

在本发明的实施例中,金属介质层104可以通过晶背金属化过程(BackSideMetallization process)形成在晶粒102的背部102a上,例如,在晶背金属化过程中,可以通过在晶粒背部102a蒸镀或溅镀一层或多层金属来形成金属介质层104。In the embodiment of the present invention, the metal dielectric layer 104 may be formed on the backside 102a of the die 102 through a backside metallization process. For example, in the backside metallization process, the backside 102a of the die may be formed One or more layers of metal are evaporated or sputtered to form the metal dielectric layer 104 .

在本发明的实施例中,金属介质层104与晶粒102直接接触,这样,利用了金属的良好导热性,使得晶粒102产生的热量能够畅通地传递到金属介质层104。而且由于金属之间的结合紧密且牢固,使得金属介质层104能够牢固地固定在晶粒102的背部102a上。而在现有技术中,在晶粒或芯片与散热片之间往往存在非金属热界面材料层,而非金属热界面材料层的热传递性能往往不佳,从而影响了由晶粒/芯片产生的热量到散热片的热传递效率。In the embodiment of the present invention, the metal dielectric layer 104 is in direct contact with the die 102 , so that the heat generated by the die 102 can be smoothly transferred to the metal dielectric layer 104 by utilizing the good thermal conductivity of metal. Moreover, the metal dielectric layer 104 can be firmly fixed on the backside 102 a of the die 102 due to the tight and firm bonding between the metals. In the prior art, a non-metallic thermal interface material layer often exists between the die or chip and the heat sink, and the heat transfer performance of the non-metallic thermal interface material layer is often poor, which affects the generation of heat transfer efficiency to the heat sink.

在本发明的实施例中,金属介质层104的不平坦背部可以通过各种工艺形成,例如通过电镀、溅射、阳极氧化、物理气相沉积(PVD)、化学气相乘积(CVD)、光刻、蚀刻、激光等工艺或艺术工艺形成,具体工艺此处不做限定。金属介质层104的形成工艺也可以包括但不限于:电镀、溅射、阳极氧化、物理气相沉积(PVD)、化学气相乘积(CVD)、光刻、蚀刻、激光等工艺,也可以是以上工艺的组合。In embodiments of the present invention, the uneven backside of the metal dielectric layer 104 may be formed by various processes, such as by electroplating, sputtering, anodizing, physical vapor deposition (PVD), chemical vapor product (CVD), photolithography, It is formed by etching, laser and other processes or artistic processes, and the specific process is not limited here. The formation process of the metal dielectric layer 104 may also include, but is not limited to, electroplating, sputtering, anodizing, physical vapor deposition (PVD), chemical vapor product (CVD), photolithography, etching, laser and other processes, and may also be the above processes The combination.

金属介质层104的背部上的凸起的高度可以根据晶背金属化过程以及实际需要来设定,例如可以具有在1mm至100mm的范围内的高度,但是本发明并不限于此,金属介质层104背部上的凸起也可以具有其它适当高度。The height of the protrusion on the backside of the metal dielectric layer 104 can be set according to the crystal back metallization process and actual needs, for example, it can have a height in the range of 1 mm to 100 mm, but the present invention is not limited to this, the metal dielectric layer The protrusions on the back of 104 may also have other suitable heights.

在本发明的实施例中,金属介质层104可以是、但不限于由如下材料形成:钛Ti、镍Ni、锡Sn、银Ag、金Au、钒V、铝Al、钯Pd、铜Cu、锌Zn、铬Cr、钼Mo、钨W和锆Zr之一或者以上所列材料的组合(即合金),例如金属介质层104可以是钛层。金属介质层104也可以是多层结构,例如为两层或更多层不同金属材料的结构,例如为钛合金层。其中,钛具有重量轻、强度高、耐高温的特点,而且钛与其他金属的结合牢固,因此在本发明实施例中与晶粒102背部的连接良好,同时由于钛的化学物理特性稳定,因此不易扩散到相邻金属层中,可以起到很好的扩散阻挡作用In the embodiment of the present invention, the metal dielectric layer 104 may be, but is not limited to, formed of the following materials: titanium Ti, nickel Ni, tin Sn, silver Ag, gold Au, vanadium V, aluminum Al, palladium Pd, copper Cu, One of zinc Zn, chromium Cr, molybdenum Mo, tungsten W, and zirconium Zr, or a combination of the above-listed materials (ie, alloys), for example, the metal dielectric layer 104 may be a titanium layer. The metal dielectric layer 104 may also be a multi-layer structure, such as a structure of two or more layers of different metal materials, such as a titanium alloy layer. Among them, titanium has the characteristics of light weight, high strength and high temperature resistance, and the combination of titanium and other metals is firm. Therefore, in the embodiment of the present invention, the connection with the back of the die 102 is good. At the same time, due to the stable chemical and physical properties of titanium, so It is not easy to diffuse into adjacent metal layers, and can play a good diffusion barrier function

本发明的技术方案也可以适用于其它封装形式的芯片,只要其中芯片的晶粒的背部是未封装而裸露的即可。下面结合图2-4进行进一步说明。The technical solutions of the present invention can also be applied to chips in other packaging forms, as long as the backside of the die of the chip is unpackaged and exposed. Further description will be given below with reference to Figures 2-4.

图2是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件200的剖视图。FIG. 2 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device 200 is shown.

图2所示实施例中的芯片器件200与图1所示实施例中的芯片器件100的区别在于芯片201和封装部203。由于芯片器件200中的芯片201采用BareDie/FCBGA封装形式,所以封装部203(即底部填充胶)的高度在从晶粒102的四周边缘向外的方向上逐渐降低而形成斜坡203a,而图1中所示实施例中的封装部103的高度保持不变,从而封装部103与金属介质层104贴合。The difference between the chip device 200 in the embodiment shown in FIG. 2 and the chip device 100 in the embodiment shown in FIG. 1 lies in the chip 201 and the packaging part 203 . Since the chip 201 in the chip device 200 adopts the BareDie/FCBGA package form, the height of the package portion 203 (ie, the underfill) gradually decreases from the peripheral edge of the die 102 outward to form a slope 203a, while FIG. 1 The height of the encapsulation part 103 in the embodiment shown in the figure remains unchanged, so that the encapsulation part 103 is attached to the metal dielectric layer 104 .

虽然图2中示出金属介质层104限于晶粒102的背部范围内,但是金属介质层104也可以进一步延伸到斜坡203a上以进一步扩大金属介质层104的散热表面。Although it is shown in FIG. 2 that the metal dielectric layer 104 is limited to the backside of the die 102 , the metal dielectric layer 104 may further extend to the slope 203 a to further expand the heat dissipation surface of the metal dielectric layer 104 .

需要注意,图2所示实施例中的、与图1所示实施例中的部件具有相同编号的部件与图1中所示的相同,因此在此不再赘述。It should be noted that the components in the embodiment shown in FIG. 2 that have the same numbers as the components in the embodiment shown in FIG. 1 are the same as those shown in FIG. 1 , and thus will not be repeated here.

图3是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件300的剖视图。FIG. 3 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device 300 is shown.

图3所示实施例中的芯片器件300与图1所示实施例中的芯片器件100的区别在于芯片301。由于芯片器件300中的芯片301采用WLCSP封装形式,所以晶粒102周围没有封装部,不仅背部102a是裸露的,其四周侧面也是裸露的。另外,由于采用WLCSP封装,因此基底108中相应采用了WLCSP RDL(重布线层)310,而非普通导电线路110。The difference between the chip device 300 in the embodiment shown in FIG. 3 and the chip device 100 in the embodiment shown in FIG. 1 lies in the chip 301 . Since the chip 301 in the chip device 300 adopts the WLCSP packaging form, there is no packaging part around the die 102, and not only the back 102a is exposed, but also the surrounding sides are exposed. In addition, since the WLCSP package is used, the WLCSP RDL (Redistribution Layer) 310 is correspondingly used in the substrate 108 instead of the ordinary conductive traces 110 .

图3中示出金属介质层104完全覆盖晶粒102的背部102a范围。It is shown in FIG. 3 that the metal dielectric layer 104 completely covers the range of the backside 102 a of the die 102 .

需要注意,图3所示实施例中的、与图1所示实施例中的部件具有相同编号的部件与图1中所示的相同,因此在此不再赘述。It should be noted that the components in the embodiment shown in FIG. 3 that have the same numbers as the components in the embodiment shown in FIG. 1 are the same as those shown in FIG. 1 , and thus are not repeated here.

图4是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件400的剖视图。FIG. 4 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device 400 is shown.

图4所示实施例中的芯片器件400与图1所示实施例中的芯片器件100的区别在于芯片401。由于芯片器件400中的芯片401采用InFO/FOWLP/FOPLP封装形式,所以晶粒102的背部102a也是裸露的,晶粒102a四周例如采用模塑料进行封装。另外,由于采用InFO/FOWLP/FOPLP封装,因此基底108中相应采用了RDL(重布线层)410,而非普通导电线路110。The difference between the chip device 400 in the embodiment shown in FIG. 4 and the chip device 100 in the embodiment shown in FIG. 1 lies in the chip 401 . Since the chip 401 in the chip device 400 is packaged in InFO/FOWLP/FOPLP form, the backside 102a of the die 102 is also exposed, and the periphery of the die 102a is packaged with, for example, molding compound. In addition, since the InFO/FOWLP/FOPLP package is used, the RDL (Redistribution Layer) 410 is correspondingly used in the substrate 108 instead of the ordinary conductive trace 110 .

需要注意,图4所示实施例中的、与图1所示实施例中的部件具有相同编号的部件与图1中所示的相同,因此在此不再赘述。It should be noted that the components in the embodiment shown in FIG. 4 that have the same numbers as the components in the embodiment shown in FIG. 1 are the same as those shown in FIG. 1 , and thus are not repeated here.

需要指出的是,在图2、图3、图4所示实施例的芯片器件200、300、400中,也可以采用图1b或图1c中所示的金属介质层104来替代图2、图3、图4中所示的金属介质层104,或者采用在背部带有任何其它形状凸起的任何其它金属介质层来替代图2、图3、图4中所示的金属介质层104。It should be pointed out that in the chip devices 200 , 300 and 400 of the embodiments shown in FIGS. 2 , 3 and 4 , the metal dielectric layer 104 shown in FIG. 1 b or FIG. 1 c may also be used to replace the 3. The metal dielectric layer 104 shown in FIG. 4 , or any other metal dielectric layer with protrusions of any other shape on the backside is used to replace the metal dielectric layer 104 shown in FIG. 2 , FIG. 3 , and FIG. 4 .

根据本发明的另一实施例,如图5所示,提供了一种电路板500,包括:PCB板501;固定在PCB板501上的如上实施例中所述的任何芯片器件100、200、300或400;以及密封壳体504,其内部具有用于容纳芯片器件和绝缘冷却液505的空腔,密封壳体504将芯片器件容纳在所述空腔内,相对于PCB板501密封固定,并且设有供绝缘冷却液流入空腔中的流体入口502及供绝缘冷却液流出空腔的流体出口503。According to another embodiment of the present invention, as shown in FIG. 5 , a circuit board 500 is provided, including: a PCB board 501 ; any chip device 100 , 200 , 300 or 400; and a sealed casing 504, which has a cavity for accommodating the chip device and the insulating cooling liquid 505 inside, the sealed casing 504 accommodates the chip device in the cavity, and is sealed and fixed relative to the PCB board 501, And a fluid inlet 502 for the insulating cooling liquid to flow into the cavity and a fluid outlet 503 for the insulating cooling liquid to flow out of the cavity are provided.

该电路板500还包括流体管路506、沿着流体管路506设置的流体泵508和吸热装置507,其中流体泵508用于沿一个方向驱动流体管路506中的冷却液,而吸热装置507用于从冷却液中吸收热量,使得冷却后的冷却液重新用于从芯片器件吸收热量。The circuit board 500 also includes a fluid line 506, a fluid pump 508 arranged along the fluid line 506, and a heat absorption device 507, wherein the fluid pump 508 is used to drive the cooling liquid in the fluid line 506 in one direction, while absorbing heat The device 507 is used to absorb heat from the cooling liquid, so that the cooled cooling liquid is reused to absorb heat from the chip device.

在本实施例中,芯片器件100、200、300或400浸没在绝缘冷却液505中,绝缘冷却液505在空腔及流体管路506形成的密闭循环中循环流动,芯片器件的金属介质层104与绝缘冷却液505充分接触,从而将金属介质层104上的热量传递给冷却液505,实现对芯片器件的散热。In this embodiment, the chip device 100 , 200 , 300 or 400 is immersed in the insulating cooling liquid 505 , and the insulating cooling liquid 505 circulates in a closed loop formed by the cavity and the fluid pipeline 506 , and the metal dielectric layer 104 of the chip device It is in sufficient contact with the insulating cooling liquid 505, so that the heat on the metal dielectric layer 104 is transferred to the cooling liquid 505, and the heat dissipation of the chip device is realized.

在电路板中,密封壳体504可以由金属或其它能实现冷却液密封以及有利于散热的材料制成。In a circuit board, the hermetic housing 504 may be made of metal or other materials that can seal against the coolant and facilitate heat dissipation.

为了进一步加强散热能力,电路板还可以进一步包括:设置在所述密封壳体504上的散热片(未示出),所述散热片可通过热界面材料或焊接而贴合在密封壳体504上。In order to further enhance the heat dissipation capability, the circuit board may further include: a heat sink (not shown) disposed on the sealed casing 504, and the heat sink can be attached to the sealed casing 504 through thermal interface material or welding superior.

根据本发明的另一实施例,如图6所示,提供了一种数字货币挖矿机600,包括至少一个运算板601,所述运算板601包括如上实施例中所述的电路板500。According to another embodiment of the present invention, as shown in FIG. 6 , a digital currency mining machine 600 is provided, which includes at least one computing board 601 , and the computing board 601 includes the circuit board 500 described in the above embodiment.

在本说明书中描述了大量具体细节。然而,能够理解,本发明的实施例可以在没有这些具体细节的情况下实施。在一些实例中,并未详细示出公知的方法、结构和技术,以避免对本说明书的理解模糊不清。Numerous specific details are described in this specification. It will be understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures and techniques have not been shown in detail in order to avoid obscuring an understanding of this description.

本领域那些技术人员可以理解,可以对实施例中的装置中的模块进行自适应性地改变并且把它们设置在与该实施例不同的一个或多个装置中。可以把实施例中的若干模块组合成一个模块或单元或组件,以及此外可以把它们分成多个模块或单元或组件。除了这样的特征和/或过程或者模块中的至少一些是相互排斥之外,可以采用任何组合对本说明书(包括伴随的权利要求、摘要和附图)中公开的所有特征以及如此公开的任何方法或者设备的所有过程或单元进行组合。除非另外明确陈述,本说明书(包括伴随的权利要求、摘要和附图)中公开的每个特征可以由提供相同、等同或相似目的替代特征来代替。Those skilled in the art will appreciate that the modules in the apparatus in the embodiment can be adaptively changed and arranged in one or more apparatuses different from the embodiment. Several modules in the embodiments may be combined into one module or unit or component, and further they may be divided into multiple modules or units or components. All features disclosed in this specification (including accompanying claims, abstract and drawings) and any method so disclosed may be employed in any combination, unless at least some of such features and/or procedures or modules are mutually exclusive. All processes or units of equipment are combined. Each feature disclosed in this specification (including accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise.

应该注意的是上述实施例对本发明进行说明而不是对本发明进行限制,并且本领域技术人员在不脱离所附权利要求的范围的情况下可设计出替换实施例。It should be noted that the above-described embodiments illustrate rather than limit the invention, and that alternative embodiments may be devised by those skilled in the art without departing from the scope of the appended claims.

Claims (12)

1.一种芯片器件,包括:1. A chip device, comprising: 至少一个芯片,所述芯片包括晶粒,所述晶粒的背部是裸露的;以及形成并覆盖在所述晶粒的裸露背部上的金属介质层;at least one chip, the chip including a die, the backside of the die is exposed; and a metal dielectric layer formed and covering the exposed backside of the die; 其中,所述金属介质层的、背离所述晶粒的背面是不平坦的。Wherein, the back surface of the metal dielectric layer facing away from the crystal grains is uneven. 2.根据权利要求1所述的芯片器件,其中所述金属介质层通过晶背金属化过程形成在所述晶粒的背部上。2. The chip device of claim 1, wherein the metal dielectric layer is formed on the backside of the die by a backside metallization process. 3.根据权利要求1所述的芯片器件,其中所述金属介质层的背面上包括至少一个选自如下的凸起:锥形凸起、截锥形凸起、山丘状凸起、半球状凸起、波浪状凸起、柱状凸起和/或片状凸起。3. The chip device according to claim 1, wherein the backside of the metal dielectric layer comprises at least one protrusion selected from the group consisting of: conical protrusions, frustoconical protrusions, hill-shaped protrusions, hemispherical protrusions Raised, wavy, cylindrical and/or flaky. 4.根据权利要求3所述的芯片器件,其中所述至少一个凸起具有相同或不同的高度。4. The chip device of claim 3, wherein the at least one bump has the same or different heights. 5.根据权利要求1至4中任一项所述的芯片器件,所述芯片还包括封装所述晶粒的封装部,所述封装部暴露所述晶粒的背部,且所述金属介质层覆盖所述晶粒以及所述晶粒周围的至少一部分所述封装部。5. The chip device according to any one of claims 1 to 4, the chip further comprising an encapsulation part for encapsulating the die, the encapsulation part exposing the back of the die, and the metal dielectric layer covering the die and at least a part of the encapsulation part around the die. 6.根据权利要求1至4中任一项所述的芯片器件,其中所述金属介质层为钛层或钛合金层。6. The chip device according to any one of claims 1 to 4, wherein the metal dielectric layer is a titanium layer or a titanium alloy layer. 7.根据权利要求1至4中任一项所述的芯片器件,其中所述金属介质层包括钛层以及形成在钛层上的铝层。7. The chip device according to any one of claims 1 to 4, wherein the metal dielectric layer comprises a titanium layer and an aluminum layer formed on the titanium layer. 8.一种电路板,其特征在于,包括:8. A circuit board, characterized in that, comprising: PCB板;PCB board; 根据权利要求1至7中任一项所述的芯片器件,其固定在所述PCB板上;以及The chip device according to any one of claims 1 to 7, which is fixed on the PCB; and 密封壳体,其内部具有用于容纳所述芯片器件和绝缘冷却液的空腔,所述密封壳体将所述芯片器件容纳在所述空腔内,相对于所述PCB板密封固定,并且设有供绝缘冷却液流入的流体入口及供绝缘冷却液流出的流体出口。a sealed case with a cavity for accommodating the chip device and insulating cooling liquid inside, the sealed case accommodates the chip device in the cavity, and is sealed and fixed relative to the PCB board, and A fluid inlet for the inflow of the insulating cooling liquid and a fluid outlet for the outflow of the insulating cooling liquid are provided. 9.根据权利要求8所述的电路板,还包括:设置在所述密封壳体上的散热片,所述散热片通过热界面材料或焊接而贴合在所述密封壳体上。9 . The circuit board according to claim 8 , further comprising: a heat sink disposed on the sealing case, the heat sink being attached to the sealing case by thermal interface material or welding. 10 . 10.根据权利要求8或9所述的电路板,还包括:10. The circuit board of claim 8 or 9, further comprising: 流体管路,其与所述密封壳体的流体入口和流体出口连接以形成流体循环通路;a fluid line connected with the fluid inlet and the fluid outlet of the sealed housing to form a fluid circulation path; 绝缘冷却液,其用于在所述流体管路和所述电路板的密封壳体内循环流动;an insulating cooling fluid for circulating the fluid line and the sealed housing of the circuit board; 液体泵,其连接在所述流体管路中,用于泵送所述绝缘冷却液以对所述芯片器件进行散热,a liquid pump connected in the fluid pipeline for pumping the insulating cooling liquid to dissipate heat from the chip device, 吸热装置,其连接在所述流体管路中,用于从所述绝缘冷却液吸收热量。A heat sink connected in the fluid line for absorbing heat from the insulating cooling liquid. 11.根据权利要求8或9所述的电路板,其中所述密封壳体由金属制成。11. The circuit board of claim 8 or 9, wherein the sealed housing is made of metal. 12.一种数字货币挖矿机,包括运算板,所述运算板包括根据权利要求8至11中任一项所述的电路板。12. A digital currency mining machine comprising a computing board comprising the circuit board according to any one of claims 8 to 11.
CN201810909439.4A 2018-08-10 2018-08-10 Chip device, circuit board and digital currency mining machine Pending CN110828399A (en)

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