CN110828399A - Chip device, circuit board and digital currency mining machine - Google Patents
Chip device, circuit board and digital currency mining machine Download PDFInfo
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Abstract
本公开提出了一种芯片器件,包括:至少一个芯片,所述芯片包括晶粒,所述晶粒的背部是裸露的;以及形成并覆盖在所述晶粒的裸露背部上的金属介质层;其中,所述金属介质层的、背离所述晶粒的背面是不平坦的。通过以上结构,增大了芯片器件的散热面积,改善了该芯片器件的散热效率。另外还公开了一种包括该芯片器件的电路板以及数字货币挖矿机。
The present disclosure proposes a chip device, comprising: at least one chip, the chip includes a die, and a backside of the die is exposed; and a metal dielectric layer formed and covered on the exposed backside of the die; Wherein, the back surface of the metal dielectric layer facing away from the crystal grains is uneven. Through the above structure, the heat dissipation area of the chip device is increased, and the heat dissipation efficiency of the chip device is improved. In addition, a circuit board including the chip device and a digital currency mining machine are also disclosed.
Description
技术领域technical field
本发明涉及芯片散热技术领域,具体涉及芯片器件、包括该芯片器件的电路板及数字货币挖矿机,其中该芯片器件带有高效散热结构。The invention relates to the technical field of chip heat dissipation, in particular to a chip device, a circuit board including the chip device, and a digital currency mining machine, wherein the chip device has an efficient heat dissipation structure.
背景技术Background technique
随着芯片技术的不断发展,芯片的运行速度越来越快,处理能力越来越强,同时芯片在运行时产生的热量通常也会越多,这就需要采用更加高效的散热结构对芯片进行散热,避免芯片在运行时温度过高而导致芯片运行速度下降甚至芯片损坏。With the continuous development of chip technology, the running speed of the chip is getting faster and the processing capacity is getting stronger and stronger. At the same time, the heat generated by the chip usually increases during operation, which requires the use of a more efficient heat dissipation structure for the chip. Dissipate heat to prevent the chip from being overheated during operation, which may cause the chip to slow down or even damage the chip.
在现有技术中,例如在中国专利申请公开CN106445037A中公开了一种部分浸没式液冷服务器冷却系统,其中将主板、芯片和散热组片浸没在密闭腔体内的冷却液中,冷却液在泵的驱动下循环流动,从而对主板、芯片和散热组片进行散热。但是,该散热组片是通过导热硅脂而贴合在芯片表面上,这存在导热硅脂在使用中受到冷却液的影响以及随着时间而粘性降低从而使得散热组件与芯片接触不佳或者脱落进而导致散热不稳定的风险,而且导热硅脂也会一定程度上不利于热量从芯片传递到散热组件,使得影响对芯片的散热。In the prior art, for example, Chinese Patent Application Publication CN106445037A discloses a partially immersed liquid-cooled server cooling system, in which the main board, chips and heat dissipation fins are immersed in cooling liquid in a closed cavity, and the cooling liquid is pumped in a pump It circulates under the drive of the radiator, so as to dissipate heat from the motherboard, chips and heat sinks. However, the heat sink is attached to the surface of the chip through thermal grease, which may cause the thermal grease to be affected by the cooling liquid during use and its viscosity will decrease over time, so that the heat dissipation component is not in good contact with the chip or falls off. This will lead to the risk of unstable heat dissipation, and the thermal grease will also be detrimental to the transfer of heat from the chip to the heat dissipation component to a certain extent, which will affect the heat dissipation of the chip.
发明内容SUMMARY OF THE INVENTION
鉴于上述问题,提出了一种克服上述问题或者至少部分地解决上述问题的芯片器件、电路板及数字货币挖矿机,用于解决现有技术中存在的芯片散热不够稳定和高效的缺陷。In view of the above problems, a chip device, a circuit board and a digital currency mining machine that overcome the above problems or at least partially solve the above problems are proposed, which are used to solve the defects in the prior art that the heat dissipation of the chips is not stable and efficient.
依据本发明的第一方面,提供了一种芯片器件,包括:According to a first aspect of the present invention, a chip device is provided, comprising:
至少一个芯片,所述芯片包括晶粒,所述晶粒的背部是裸露的;以及at least one chip, the chip including a die, the backside of the die being exposed; and
形成并覆盖在所述晶粒的裸露背部上的金属介质层;a metal dielectric layer formed and overlying the exposed backside of the die;
其中,所述金属介质层的、背离所述晶粒的背面是不平坦的。Wherein, the back surface of the metal dielectric layer facing away from the crystal grains is uneven.
上述晶粒的背部是指当芯片安装在电路板上时,晶粒的、背向电路板的那一表面,即,与晶粒的面向电路板的表面相对的表面。背部裸露的晶粒的封装形式可以为ExposedDie形式,但是又不限于该封装形式,例如也可以是Bare Die、FCBGA(Flip Chip Ball GridArray,覆晶式球栅阵列封装结构)、FCCSP(Flip Chip Chip Scale Package,倒装芯片芯片级封装)、WLCSP(Wafer Level Chip Scale Package,晶圆级芯片级封装)、InFO(Integrated Fan-Out,集成扇出型晶圆级封装结构)/FOWLP(Fan Out Wafer LevelPackage,扇出型晶圆级封装结构)/FOPLP(Fan-Out Panel Level Package,扇出型面板级封装结构)、LGA(Land Grid Array,栅格阵列封装)等其它封装形式,只要晶粒背部裸露未被封装即可用于本发明的技术方案中,甚至晶粒的背面及四周均未封装时亦可适用于本发明的技术方案,或者在对晶粒封装之后再对该封装进行处理以使晶粒背部裸露出来的情形也适用于本发明的技术方案,本发明不限于此。The above-mentioned backside of the die refers to the surface of the die that faces away from the circuit board when the chip is mounted on the circuit board, that is, the surface opposite to the surface of the die that faces the circuit board. The package form of the exposed die on the back can be in the form of ExposedDie, but it is not limited to this package form, for example, it can also be Bare Die, FCBGA (Flip Chip Ball GridArray, flip chip ball grid array packaging structure), FCCSP (Flip Chip Chip Array) Scale Package, flip-chip chip-scale package), WLCSP (Wafer Level Chip Scale Package, wafer-level chip-scale package), InFO (Integrated Fan-Out, integrated fan-out wafer-level package structure)/FOWLP (Fan Out Wafer) LevelPackage, Fan-Out Wafer Level Package)/FOPLP (Fan-Out Panel Level Package, Fan-Out Panel Level Package), LGA (Land Grid Array, Grid Array Package) and other packaging forms, as long as the back of the die The technical solution of the present invention can be used in the technical solution of the present invention if it is exposed without being encapsulated, even when the backside and the surrounding of the die are not encapsulated. The situation where the backside of the die is exposed is also applicable to the technical solution of the present invention, and the present invention is not limited thereto.
金属介质层背面可以设有任何形式和数量的不平坦形状,例如可以包括各种形状的凸起,只要能够增大与冷却液的接触面积并且空间上允许即可。The backside of the metal medium layer may be provided with any form and number of uneven shapes, for example, may include protrusions of various shapes, as long as the contact area with the cooling liquid can be increased and the space allows.
优选地,在所述芯片器件中,金属介质层通过晶背金属化过程(BackSideMetallization process)形成在晶粒的背部上。Preferably, in the chip device, the metal dielectric layer is formed on the backside of the die through a backside metallization process.
优选地,在所述芯片器件中,金属介质层的背面上包括至少一个选自如下的凸起:锥形凸起、截锥形凸起、山丘状凸起、半球状凸起、波浪状凸起、柱状凸起和/或片状凸起。Preferably, in the chip device, the backside of the metal dielectric layer includes at least one protrusion selected from the group consisting of: cone-shaped protrusions, frusto-conical protrusions, hill-shaped protrusions, hemispherical protrusions, and wave-shaped protrusions. Protrusions, columnar protrusions and/or lamellar protrusions.
优选地,在所述芯片器件中,所述至少一个凸起具有相同或不同的高度。Preferably, in the chip device, the at least one protrusion has the same or different heights.
优选地,在所述芯片器件中,芯片还包括封装所述晶粒的封装部,封装部暴露晶粒的背部,且金属介质层覆盖晶粒以及晶粒周围的至少一部分封装部。Preferably, in the chip device, the chip further includes an encapsulation part for encapsulating the die, the encapsulation part exposes the back of the die, and the metal dielectric layer covers the die and at least a part of the encapsulation part around the die.
优选地,在所述芯片器件中,金属介质层与晶粒直接接触。Preferably, in the chip device, the metal dielectric layer is in direct contact with the die.
优选地,在所述芯片器件中,金属介质层为钛层,或者金属介质层包括钛层以及形成在钛层上的铝层。Preferably, in the chip device, the metal dielectric layer is a titanium layer, or the metal dielectric layer includes a titanium layer and an aluminum layer formed on the titanium layer.
根据本发明的另一方面,提供了一种电路板,包括:PCB板(印刷电路板);固定在PCB板上的如上所述的芯片器件;以及密封壳体,其内部具有用于容纳所述芯片器件和绝缘冷却液的空腔,所述密封壳体将所述芯片器件容纳在所述空腔内,相对于所述PCB板密封固定,并且设有供绝缘冷却液流入的流体入口及供绝缘冷却液流出的流体出口。According to another aspect of the present invention, there is provided a circuit board, comprising: a PCB board (printed circuit board); the above-mentioned chip device fixed on the PCB board; The cavity of the chip device and the insulating cooling liquid, the sealed casing accommodates the chip device in the cavity, is sealed and fixed relative to the PCB board, and is provided with a fluid inlet for the insulating cooling liquid to flow into and Fluid outlet for insulating coolant.
优选地,所述电路板还包括:设置在所述密封壳体上的散热片,所述散热片通过热界面材料或焊接而贴合在所述密封壳体上。Preferably, the circuit board further includes: a heat sink disposed on the sealed casing, the heat sink is attached to the sealed casing through thermal interface material or welding.
优选地,所述电路板还包括:流体管路,其与所述密封壳体的流体入口和流体出口连接以形成流体循环通路;绝缘冷却液,其用于在所述流体管路和所述电路板的密封壳体内循环流动;液体泵,其连接在所述流体管路中,用于泵送所述绝缘冷却液以对所述芯片器件进行散热;吸热装置,其连接在所述流体管路中,用于从所述绝缘冷却液吸收热量。Preferably, the circuit board further comprises: a fluid pipeline, which is connected with the fluid inlet and the fluid outlet of the sealed housing to form a fluid circulation path; an insulating cooling liquid for connecting the fluid pipeline and the fluid outlet. The circuit board circulates in the sealed casing; the liquid pump is connected in the fluid pipeline and is used for pumping the insulating cooling liquid to dissipate the heat of the chip device; the heat absorption device is connected with the fluid pipeline for absorbing heat from the insulating coolant.
优选地,在所述电路板中,密封壳体由金属制成。Preferably, in the circuit board, the sealed case is made of metal.
根据本发明的另一方面,提供了一种数字货币挖矿机,包括运算板,所述运算板包括如上所述的电路板。According to another aspect of the present invention, there is provided a digital currency mining machine, comprising an operation board, and the operation board includes the above-mentioned circuit board.
在本发明中,由于晶粒的背部是裸露的,而且在晶粒背部形成的金属介质层的背面是不平坦的,从而增大了金属介质层的散热面积,有利于芯片产生的热量向外散发。另外,由于金属介质层是通过晶背金属化过程(BSM)形成在晶粒背部上的,所以金属介质层与晶粒背部的结合紧密,有利于实现彼此间高效的热传递,而且金属介质层与晶粒背部结合牢固,在使用过程中不会引起金属介质层从晶粒背部松脱,从而增加了散热可靠性以及产品使用寿命。In the present invention, since the backside of the die is exposed, and the backside of the metal dielectric layer formed on the backside of the die is uneven, the heat dissipation area of the metal dielectric layer is increased, which is beneficial for the heat generated by the chip to go out. disseminate. In addition, since the metal dielectric layer is formed on the backside of the die through the backside metallization process (BSM), the metal dielectric layer and the backside of the die are closely combined, which is conducive to efficient heat transfer between each other, and the metal dielectric layer is It is firmly combined with the back of the die, and the metal dielectric layer will not be loosened from the back of the die during use, thereby increasing the reliability of heat dissipation and the service life of the product.
此外,与晶粒背部的裸露面积相比,散热层的面积更大,使得能够更加快速有效地从晶粒背部吸收热量,进而将吸收的热量高效地散发出去以传递到冷却液中。In addition, the larger area of the heat dissipation layer compared to the exposed area of the backside of the die allows for more rapid and efficient absorption of heat from the backside of the die, which in turn can be efficiently dissipated for transfer to the coolant.
而且,本发明的芯片器件的金属介质层即构成高效散热结构,配合冷却液实现了高效散热,所以该散热结构加工工艺较少,加工过程简单,加工成本较低。Moreover, the metal dielectric layer of the chip device of the present invention constitutes a high-efficiency heat dissipation structure, and cooperates with the cooling liquid to achieve high-efficiency heat dissipation, so the heat dissipation structure has less processing technology, simple processing process and low processing cost.
上述说明仅是本发明技术方案的概述,以便能够更清楚地了解本发明的技术手段,从而可依照说明书的内容予以实施。为了让本发明的上述和其它目的、特征和优点能够更明显易懂,以下特举说明本发明的具体实施方式。The above description is only an overview of the technical solution of the present invention, so that the technical means of the present invention can be more clearly understood, so that it can be implemented according to the content of the description. In order to make the above and other objects, features and advantages of the present invention more clearly understood, specific embodiments of the present invention are described below.
附图说明Description of drawings
通过阅读下文优选实施方式的详细描述,各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的,而并不认为是对本发明的限制。而且在整个附图中,用相同的参考符号表示相同的部件。在附图中:Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be considered limiting of the invention. Also, the same components are denoted by the same reference numerals throughout the drawings. In the attached image:
图1是根据本发明实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;1 is a schematic diagram of a chip device according to an embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;
图1a是图1中所示芯片器件的金属介质层的示意性立体图;Fig. 1a is a schematic perspective view of a metal dielectric layer of the chip device shown in Fig. 1;
图1b是示出根据本发明实施例的金属介质层背面设有圆柱形凸起的示意图;Fig. 1b is a schematic diagram showing that the backside of the metal dielectric layer is provided with cylindrical protrusions according to an embodiment of the present invention;
图1c是示出根据本发明实施例的金属介质层背面设有波浪形凸起的示意图;Fig. 1c is a schematic diagram showing that the backside of the metal dielectric layer is provided with wave-shaped protrusions according to an embodiment of the present invention;
图2是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;2 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;
图3是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;3 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;
图4是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件的剖视图;4 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device is shown;
图5是根据本发明另一实施例的具有本发明的芯片器件的电路板的示意图,其中示出了该电路板的剖视图;5 is a schematic diagram of a circuit board having the chip device of the present invention according to another embodiment of the present invention, wherein a cross-sectional view of the circuit board is shown;
图6是根据本发明另一实施例的具有本发明的电路板的数字货币挖矿机的示意图。6 is a schematic diagram of a digital currency mining machine having the circuit board of the present invention according to another embodiment of the present invention.
具体实施方式Detailed ways
下面将参照附图更详细地描述本公开的示例性实施例。虽然附图中显示了本公开的示例性实施例,然而应当理解,可以以各种形式实现本公开而不应被这里阐述的实施例所限制。相反,提供这些实施例是为了能够更透彻地理解本公开,并且能够将本公开的范围完整的传达给本领域的技术人员。Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure will be more thoroughly understood, and will fully convey the scope of the present disclosure to those skilled in the art.
图1是根据本发明实施例的芯片器件100的示意图,具体是沿着垂直于芯片器件100的背面的平面截取的剖视图。FIG. 1 is a schematic diagram of a
如图1所示,该芯片器件100包括:As shown in FIG. 1 , the
至少一个芯片101,该芯片101包括晶粒102,该晶粒102的背部102a是裸露的;以及at least one
形成并覆盖在晶粒102的裸露背部102a上的金属介质层104,该金属介质层104的、背离晶粒102的背面104a是不平坦的。该金属介质层104可以通过晶背金属化过程(BSM)形成在晶粒102的背部102a上。A metal
在这里,金属介质层104从芯片101吸收由晶粒102产生的热量,金属介质层104优选是完全覆盖晶粒102的背部102a的所有裸露部分,更优选的是,金属介质层104在与背部102a平行的平面的面积大于背部102a的面积,从而芯片101产生的热量能够快速通过其背部102a传递到金属介质层104,进而从金属介质层104散发到周围的导热介质(例如将在下文中所述的冷却液)中。Here, the
金属介质层104的背面104a的不平坦形状可以通过各种形式实现,只要能够增大背面104a与冷却液的接触面积并且空间上允许即可。例如,如图1和图1a所示,金属介质层104的背面104a上可以设有多个凸起,例如多个方柱106,方柱可以规则排列呈如图1a中所示的4×8阵列形式,也可以不规则排列,本文对此没有限制。这些方柱106的大小和高度可以彼此相同,如图1a中所示,也可以彼此不同,本文对此没有限制。The uneven shape of the
在这里,金属介质层104的背面104a上设置的凸起的形式不受限制,例如图1b中示出了所述凸起为圆柱形凸起106a的示意图,图1c中示出了所述凸起为波浪形凸起106b的示意图。当然,金属介质层104的背面104a上设置的凸起也可以为锥形凸起、截锥形凸起、山丘状凸起、半球状凸起、和/或片状凸起如鳍片状凸起、波浪片状凸起等等。这些不同种类的凸起也可以组合使用。Here, the form of the protrusions provided on the
芯片101也可以包括封装该晶粒102的封装部103,封装部103暴露晶粒102的背部102a。如图1所示,芯片101采用Exposed die封装形式,封装部103可以为模塑料(moldingcompound)。在这种情况下,形成的金属介质层104覆盖晶粒102的整个背部102a以及晶粒102周围的至少一部分封装部103,当然也可以覆盖晶粒102的整个背部102a以及晶粒102周围的全部封装部103。The
晶粒102通过设置于基底108中的导电线路110以及管脚109与例如外部电路板电连接。The
在图1中,示出芯片102的背部102a是全部裸露的,当然也可以是该背部102a的一部分是裸露的。In FIG. 1, it is shown that the back 102a of the
在这里,芯片101也可以没有封装部103,即,晶粒102是完全裸露的,不仅其背部102a裸露,而且其四周也是裸露的。Here, the
在本文中,晶粒102的背部102a是指当芯片101安装在电路板上时,晶粒102上背向该电路板的那一表面,即,与晶粒102的面向电路板的表面相对的表面。在本文中,背部裸露的晶粒102的封装形式可以为Exposed Die形式,但是又不限于该封装形式,例如也可以是Bare Die/FCBGA(如图2所示)、WLCSP(如图3所示)、InFO/FOWLP/FOPLP(如图4所示)等其它封装形式。也就是说,本发明的技术方案不仅适用于Exposed Die封装形式,也同样适用于其它使晶粒背部裸露的封装形式,例如Bare Die/FCBGA、WLCSP、InFO/FOWLP/FOPLP、FCCSP、LGA等其它封装形式,只要芯片的晶粒背部是裸露未封装的即可,或者也可以是不对晶粒进行封装,或者在对晶粒封装之后再对该封装进行处理以使晶粒背部裸露出来,本发明不限于此。In this context, the
由于晶粒102的背部102a是裸露的,而且在晶粒背部102a与金属介质层104之间不存在影响热传递的非金属介质,使得芯片101产生的热能够快速有效地传递到金属介质层104,从而进一步通过芯片器件周围的冷却液散热。此外,与晶粒背部102a的裸露面积相比,金属介质从104的散热面积更大,使得能够更加快速有效地从晶粒背部102a吸收热量(也相当于增大了晶粒背部的散热面积),进而将吸收的热量高效地散发出去以及传递到冷却液中。Since the
但是在现有技术中,没有设置类似于本发明中的背面不平坦的金属介质层104。而且,在现有技术中,散热片往往通过非金属热界面材料与芯片贴合,在这种情况下,由于非金属热界面材料的导热性不佳,而且芯片的晶粒并非裸露,使得从晶粒到散热片的热传递效率较低,影响散热效果。然而,本发明的上述技术方案中直接在裸露的晶粒背部上形成金属介质层,而且通过将金属介质层的背部做成不平坦形状,从而增大了其散热面积,从而避免了现有技术中存在的这些问题。However, in the prior art, the
在本发明的实施例中,金属介质层104可以通过晶背金属化过程(BackSideMetallization process)形成在晶粒102的背部102a上,例如,在晶背金属化过程中,可以通过在晶粒背部102a蒸镀或溅镀一层或多层金属来形成金属介质层104。In the embodiment of the present invention, the
在本发明的实施例中,金属介质层104与晶粒102直接接触,这样,利用了金属的良好导热性,使得晶粒102产生的热量能够畅通地传递到金属介质层104。而且由于金属之间的结合紧密且牢固,使得金属介质层104能够牢固地固定在晶粒102的背部102a上。而在现有技术中,在晶粒或芯片与散热片之间往往存在非金属热界面材料层,而非金属热界面材料层的热传递性能往往不佳,从而影响了由晶粒/芯片产生的热量到散热片的热传递效率。In the embodiment of the present invention, the
在本发明的实施例中,金属介质层104的不平坦背部可以通过各种工艺形成,例如通过电镀、溅射、阳极氧化、物理气相沉积(PVD)、化学气相乘积(CVD)、光刻、蚀刻、激光等工艺或艺术工艺形成,具体工艺此处不做限定。金属介质层104的形成工艺也可以包括但不限于:电镀、溅射、阳极氧化、物理气相沉积(PVD)、化学气相乘积(CVD)、光刻、蚀刻、激光等工艺,也可以是以上工艺的组合。In embodiments of the present invention, the uneven backside of the
金属介质层104的背部上的凸起的高度可以根据晶背金属化过程以及实际需要来设定,例如可以具有在1mm至100mm的范围内的高度,但是本发明并不限于此,金属介质层104背部上的凸起也可以具有其它适当高度。The height of the protrusion on the backside of the
在本发明的实施例中,金属介质层104可以是、但不限于由如下材料形成:钛Ti、镍Ni、锡Sn、银Ag、金Au、钒V、铝Al、钯Pd、铜Cu、锌Zn、铬Cr、钼Mo、钨W和锆Zr之一或者以上所列材料的组合(即合金),例如金属介质层104可以是钛层。金属介质层104也可以是多层结构,例如为两层或更多层不同金属材料的结构,例如为钛合金层。其中,钛具有重量轻、强度高、耐高温的特点,而且钛与其他金属的结合牢固,因此在本发明实施例中与晶粒102背部的连接良好,同时由于钛的化学物理特性稳定,因此不易扩散到相邻金属层中,可以起到很好的扩散阻挡作用In the embodiment of the present invention, the
本发明的技术方案也可以适用于其它封装形式的芯片,只要其中芯片的晶粒的背部是未封装而裸露的即可。下面结合图2-4进行进一步说明。The technical solutions of the present invention can also be applied to chips in other packaging forms, as long as the backside of the die of the chip is unpackaged and exposed. Further description will be given below with reference to Figures 2-4.
图2是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件200的剖视图。FIG. 2 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the
图2所示实施例中的芯片器件200与图1所示实施例中的芯片器件100的区别在于芯片201和封装部203。由于芯片器件200中的芯片201采用BareDie/FCBGA封装形式,所以封装部203(即底部填充胶)的高度在从晶粒102的四周边缘向外的方向上逐渐降低而形成斜坡203a,而图1中所示实施例中的封装部103的高度保持不变,从而封装部103与金属介质层104贴合。The difference between the
虽然图2中示出金属介质层104限于晶粒102的背部范围内,但是金属介质层104也可以进一步延伸到斜坡203a上以进一步扩大金属介质层104的散热表面。Although it is shown in FIG. 2 that the
需要注意,图2所示实施例中的、与图1所示实施例中的部件具有相同编号的部件与图1中所示的相同,因此在此不再赘述。It should be noted that the components in the embodiment shown in FIG. 2 that have the same numbers as the components in the embodiment shown in FIG. 1 are the same as those shown in FIG. 1 , and thus will not be repeated here.
图3是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件300的剖视图。FIG. 3 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the chip device 300 is shown.
图3所示实施例中的芯片器件300与图1所示实施例中的芯片器件100的区别在于芯片301。由于芯片器件300中的芯片301采用WLCSP封装形式,所以晶粒102周围没有封装部,不仅背部102a是裸露的,其四周侧面也是裸露的。另外,由于采用WLCSP封装,因此基底108中相应采用了WLCSP RDL(重布线层)310,而非普通导电线路110。The difference between the chip device 300 in the embodiment shown in FIG. 3 and the
图3中示出金属介质层104完全覆盖晶粒102的背部102a范围。It is shown in FIG. 3 that the
需要注意,图3所示实施例中的、与图1所示实施例中的部件具有相同编号的部件与图1中所示的相同,因此在此不再赘述。It should be noted that the components in the embodiment shown in FIG. 3 that have the same numbers as the components in the embodiment shown in FIG. 1 are the same as those shown in FIG. 1 , and thus are not repeated here.
图4是根据本发明另一实施例的芯片器件的示意图,其中示出了芯片器件400的剖视图。FIG. 4 is a schematic diagram of a chip device according to another embodiment of the present invention, wherein a cross-sectional view of the
图4所示实施例中的芯片器件400与图1所示实施例中的芯片器件100的区别在于芯片401。由于芯片器件400中的芯片401采用InFO/FOWLP/FOPLP封装形式,所以晶粒102的背部102a也是裸露的,晶粒102a四周例如采用模塑料进行封装。另外,由于采用InFO/FOWLP/FOPLP封装,因此基底108中相应采用了RDL(重布线层)410,而非普通导电线路110。The difference between the
需要注意,图4所示实施例中的、与图1所示实施例中的部件具有相同编号的部件与图1中所示的相同,因此在此不再赘述。It should be noted that the components in the embodiment shown in FIG. 4 that have the same numbers as the components in the embodiment shown in FIG. 1 are the same as those shown in FIG. 1 , and thus are not repeated here.
需要指出的是,在图2、图3、图4所示实施例的芯片器件200、300、400中,也可以采用图1b或图1c中所示的金属介质层104来替代图2、图3、图4中所示的金属介质层104,或者采用在背部带有任何其它形状凸起的任何其它金属介质层来替代图2、图3、图4中所示的金属介质层104。It should be pointed out that in the
根据本发明的另一实施例,如图5所示,提供了一种电路板500,包括:PCB板501;固定在PCB板501上的如上实施例中所述的任何芯片器件100、200、300或400;以及密封壳体504,其内部具有用于容纳芯片器件和绝缘冷却液505的空腔,密封壳体504将芯片器件容纳在所述空腔内,相对于PCB板501密封固定,并且设有供绝缘冷却液流入空腔中的流体入口502及供绝缘冷却液流出空腔的流体出口503。According to another embodiment of the present invention, as shown in FIG. 5 , a
该电路板500还包括流体管路506、沿着流体管路506设置的流体泵508和吸热装置507,其中流体泵508用于沿一个方向驱动流体管路506中的冷却液,而吸热装置507用于从冷却液中吸收热量,使得冷却后的冷却液重新用于从芯片器件吸收热量。The
在本实施例中,芯片器件100、200、300或400浸没在绝缘冷却液505中,绝缘冷却液505在空腔及流体管路506形成的密闭循环中循环流动,芯片器件的金属介质层104与绝缘冷却液505充分接触,从而将金属介质层104上的热量传递给冷却液505,实现对芯片器件的散热。In this embodiment, the
在电路板中,密封壳体504可以由金属或其它能实现冷却液密封以及有利于散热的材料制成。In a circuit board, the
为了进一步加强散热能力,电路板还可以进一步包括:设置在所述密封壳体504上的散热片(未示出),所述散热片可通过热界面材料或焊接而贴合在密封壳体504上。In order to further enhance the heat dissipation capability, the circuit board may further include: a heat sink (not shown) disposed on the sealed
根据本发明的另一实施例,如图6所示,提供了一种数字货币挖矿机600,包括至少一个运算板601,所述运算板601包括如上实施例中所述的电路板500。According to another embodiment of the present invention, as shown in FIG. 6 , a digital
在本说明书中描述了大量具体细节。然而,能够理解,本发明的实施例可以在没有这些具体细节的情况下实施。在一些实例中,并未详细示出公知的方法、结构和技术,以避免对本说明书的理解模糊不清。Numerous specific details are described in this specification. It will be understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures and techniques have not been shown in detail in order to avoid obscuring an understanding of this description.
本领域那些技术人员可以理解,可以对实施例中的装置中的模块进行自适应性地改变并且把它们设置在与该实施例不同的一个或多个装置中。可以把实施例中的若干模块组合成一个模块或单元或组件,以及此外可以把它们分成多个模块或单元或组件。除了这样的特征和/或过程或者模块中的至少一些是相互排斥之外,可以采用任何组合对本说明书(包括伴随的权利要求、摘要和附图)中公开的所有特征以及如此公开的任何方法或者设备的所有过程或单元进行组合。除非另外明确陈述,本说明书(包括伴随的权利要求、摘要和附图)中公开的每个特征可以由提供相同、等同或相似目的替代特征来代替。Those skilled in the art will appreciate that the modules in the apparatus in the embodiment can be adaptively changed and arranged in one or more apparatuses different from the embodiment. Several modules in the embodiments may be combined into one module or unit or component, and further they may be divided into multiple modules or units or components. All features disclosed in this specification (including accompanying claims, abstract and drawings) and any method so disclosed may be employed in any combination, unless at least some of such features and/or procedures or modules are mutually exclusive. All processes or units of equipment are combined. Each feature disclosed in this specification (including accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise.
应该注意的是上述实施例对本发明进行说明而不是对本发明进行限制,并且本领域技术人员在不脱离所附权利要求的范围的情况下可设计出替换实施例。It should be noted that the above-described embodiments illustrate rather than limit the invention, and that alternative embodiments may be devised by those skilled in the art without departing from the scope of the appended claims.
Claims (12)
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