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CN110709992A - Semiconductor structure, chip and electronic device of image sensor - Google Patents

Semiconductor structure, chip and electronic device of image sensor Download PDF

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CN110709992A
CN110709992A CN201980001729.1A CN201980001729A CN110709992A CN 110709992 A CN110709992 A CN 110709992A CN 201980001729 A CN201980001729 A CN 201980001729A CN 110709992 A CN110709992 A CN 110709992A
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pixel
semiconductor structure
transistor
image sensor
source follower
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陈经纬
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Shenzhen Goodix Technology Co Ltd
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Shenzhen Huiding Technology Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/026Wafer-level processing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors

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Abstract

本申请公开了一种图像传感器的半导体结构及相关芯片和电子装置。所述图像传感器的半导体结构(600)包括半导体衬底(101)和设置于所述半导体衬底的多个像素,其中所述多个像素包括:第一像素(P5')和第二像素(P6),各包括:至少一光敏传感器(502、504、506、508),用来将光线转换为电荷;以及输出电路,用来依据所述电荷产生像素输出,所述输出电路包括源跟随晶体管(108)以及行选择晶体管(110);其中,从俯视图来看,所述第一像素的所述行选择晶体管和所述第二像素的所述行选择晶体管位于所述第一像素的所述源跟随晶体管和所述第二像素的所述源跟随晶体管之间。本申请对图像传感器的半导体结构的输出电路进行改良以降低面积并改善效能。

Figure 201980001729

The present application discloses a semiconductor structure of an image sensor and related chips and electronic devices. The semiconductor structure (600) of the image sensor includes a semiconductor substrate (101) and a plurality of pixels disposed on the semiconductor substrate, wherein the plurality of pixels includes: a first pixel (P5') and a second pixel (P5') P6), each comprising: at least one photosensor (502, 504, 506, 508) for converting light into electric charge; and an output circuit for generating pixel output according to the electric charge, the output circuit including a source follower transistor (108) and a row selection transistor (110); wherein, from a top view, the row selection transistor of the first pixel and the row selection transistor of the second pixel are located in the row selection transistor of the first pixel between a source follower transistor and the source follower transistor of the second pixel. The present application improves the output circuit of the semiconductor structure of an image sensor to reduce area and improve performance.

Figure 201980001729

Description

图像传感器的半导体结构、芯片及电子装置Semiconductor structure, chip and electronic device of image sensor

技术领域technical field

本申请涉及一种图像传感器的半导体结构及相关芯片和电子装置,尤其涉及一种能增加源跟随晶体管的沟道长度的图像传感器的半导体结构及相关芯片和电子装置。The present application relates to a semiconductor structure of an image sensor and related chips and electronic devices, and more particularly to a semiconductor structure of an image sensor and related chips and electronic devices that can increase the channel length of a source follower transistor.

背景技术Background technique

CMOS图像传感器已经得到大规模生产和应用,随著画质要求的提升,像素的数目也越来越大,为了尽量在有限的面积中增加像素的数目,单位像素的尺寸要尽可能地缩小,也就是说,单位像素中的光敏传感器和输出电路的尺寸都要跟著缩小。CMOS image sensors have been mass-produced and applied. With the improvement of image quality requirements, the number of pixels is also increasing. In order to increase the number of pixels in a limited area as much as possible, the size of a unit pixel should be reduced as much as possible. That is to say, the size of the photosensitive sensor and the output circuit in the unit pixel should be reduced accordingly.

然而,将输出电路的尺寸缩小,往往会影响到输出电路的效能,因此,如何兼顾面积与效能,已成为本领域的一个重要的工作项目。However, reducing the size of the output circuit often affects the performance of the output circuit. Therefore, how to balance the area and the performance has become an important work item in this field.

发明内容SUMMARY OF THE INVENTION

本申请的目的之一在于公开一种图像传感器的半导体结构及相关芯片和电子装置,来解决上述问题。One of the objectives of the present application is to disclose a semiconductor structure of an image sensor and related chips and electronic devices to solve the above problems.

本申请的一实施例公开了一种图像传感器的半导体结构,所述图像传感器的半导体结构包括半导体衬底和设置于所述半导体衬底的多个像素,其中所述多个像素包括:第一像素和第二像素,所述第一像素和所述第二像素均包括:至少一光敏传感器,用来将光线转换为电荷;以及输出电路,用来依据所述电荷产生像素输出,所述输出电路包括源跟随晶体管以及行选择晶体管,所述源跟随晶体管的一源/漏极电连接于所述行选择晶体管的一源/漏极;其中,从俯视图来看,所述第一像素的所述行选择晶体管和所述第二像素的所述行选择晶体管均位于所述第一像素的所述源跟随晶体管和所述第二像素的所述源跟随晶体管之间。An embodiment of the present application discloses a semiconductor structure of an image sensor. The semiconductor structure of the image sensor includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate, wherein the plurality of pixels includes: a first A pixel and a second pixel, the first pixel and the second pixel each include: at least one photosensitive sensor for converting light into electric charge; and an output circuit for generating pixel output according to the electric charge, the output The circuit includes a source follower transistor and a row selection transistor, a source/drain of the source follower transistor is electrically connected to a source/drain of the row selection transistor; wherein, from a top view, all the first pixels are Both the row select transistor and the row select transistor of the second pixel are located between the source follower transistor of the first pixel and the source follower transistor of the second pixel.

本申请的一实施例公开了一种芯片,包括上述的图像传感器的半导体结构。An embodiment of the present application discloses a chip including the above-mentioned semiconductor structure of an image sensor.

本申请的一实施例公开了一种电子装置,包括上述的图像传感器的半导体结构。An embodiment of the present application discloses an electronic device including the above-mentioned semiconductor structure of an image sensor.

本申请实施例针对图像传感器的半导体结构的输出电路之配置方式进行改良,可降低面积并改善输出电路的效能。The embodiments of the present application improve the configuration of the output circuit of the semiconductor structure of the image sensor, which can reduce the area and improve the performance of the output circuit.

附图说明Description of drawings

图1为本申请的图像传感器的半导体结构的第一实施例的俯视图。FIG. 1 is a top view of a first embodiment of a semiconductor structure of an image sensor of the present application.

图2为本申请的图像传感器的半导体结构的第二实施例的俯视图。FIG. 2 is a top view of a second embodiment of the semiconductor structure of the image sensor of the present application.

图3为图1和图2的图像传感器的像素的电路图。FIG. 3 is a circuit diagram of a pixel of the image sensor of FIGS. 1 and 2 .

图4为基于图1的图像传感器的半导体结构的拜耳像素组。FIG. 4 is a Bayer pixel group based on the semiconductor structure of the image sensor of FIG. 1 .

图5为基于图2的图像传感器的半导体结构的拜耳像素组。FIG. 5 is a Bayer pixel group based on the semiconductor structure of the image sensor of FIG. 2 .

图6为本申请的图像传感器的半导体结构的第三实施例的俯视图。FIG. 6 is a top view of a third embodiment of the semiconductor structure of the image sensor of the present application.

图7为本申请的图像传感器的半导体结构的第四实施例的俯视图。FIG. 7 is a top view of a fourth embodiment of the semiconductor structure of the image sensor of the present application.

图8为图6和图7的图像传感器的像素的电路图。FIG. 8 is a circuit diagram of a pixel of the image sensor of FIGS. 6 and 7 .

图9为基于图6的图像传感器的半导体结构的拜耳像素组。FIG. 9 is a Bayer pixel group based on the semiconductor structure of the image sensor of FIG. 6 .

图10为基于图7的图像传感器的半导体结构的拜耳像素组。FIG. 10 is a Bayer pixel group based on the semiconductor structure of the image sensor of FIG. 7 .

图11为本申请的图像传感器应用于电子装置中的实施例的示意图。FIG. 11 is a schematic diagram of an embodiment in which the image sensor of the present application is applied to an electronic device.

其中,附图标记说明如下:Among them, the reference numerals are described as follows:

100、200、500、600 图像传感器100, 200, 500, 600 image sensors

101 半导体衬底101 Semiconductor substrate

102、502、504、506、508 光敏传感器102, 502, 504, 506, 508 light sensor

104、510、512、514、516 传输门104, 510, 512, 514, 516 transmission gate

106 重置晶体管106 Reset transistor

108 源跟随晶体管108 Source follower transistor

110 行选择晶体管110 row select transistors

116、518 输出电路116, 518 output circuit

300、400、700、800 拜耳像素组300, 400, 700, 800 Bayer pixel sets

1100 电子装置1100 Electronics

1104 显示屏组件1104 Display Assembly

P1、P1'、P2、P3、P3'、P4、 像素P1, P1', P2, P3, P3', P4, pixels

P5、P5'、P6、P7、P7'、P8P5, P5', P6, P7, P7', P8

L 沟道长度L channel length

TX、TX1、TX2、TX3、TX4 传输门控制信号TX, TX1, TX2, TX3, TX4 transmission gate control signal

RST 重置信号RST reset signal

RSEL 行选择信号RSEL row select signal

POUT 输出端POUT output

WL 字线WL word line

BL 位线BL bit line

VSS 第一电压VSS first voltage

VDD 第二电压VDD second voltage

FD 浮置扩散区FD Floating Diffusion

B 蓝色B blue

Gr、Gb 绿色Gr, Gb green

R 红色R red

具体实施方式Detailed ways

以下揭示内容提供了多种实施方式或示例,其能用以实现本发明内容的不同特征。下文所述之组件与配置的具体例子系用以简化本发明内容。当可想见,这些叙述仅为例示,其本意并非用于限制本发明内容。举例来说,在下文的描述中,将一第一特征形成于一第二特征上或之上,可能包括某些实施例其中所述的第一与第二特征彼此直接接触;且也可能包括某些实施例其中还有额外的组件形成于上述第一与第二特征之间,而使得第一与第二特征可能没有直接接触。此外,本发明内容可能会在多个实施例中重复使用组件符号和/或标号。此种重复使用乃是基于简洁与清楚的目的,且其本身不代表所讨论的不同实施例和/或组态之间的关系。The following disclosure provides various implementations, or examples, that can be used to implement various features of the present disclosure. Specific examples of components and arrangements are described below to simplify the present disclosure. As can be appreciated, these descriptions are merely exemplary and are not intended to limit the present disclosure. For example, in the description below, forming a first feature on or over a second feature may include some embodiments in which the first and second features are in direct contact with each other; and may also include Certain embodiments may have additional components formed between the first and second features described above, such that the first and second features may not be in direct contact. Furthermore, this Summary may reuse reference numerals and/or reference numerals in various embodiments. Such reuse is for brevity and clarity, and does not in itself represent a relationship between the different embodiments and/or configurations discussed.

再者,在此处使用空间上相对的词汇,譬如「之下」、「下方」、「低于」、「之上」、「上方」及与其相似者,可能是为了方便说明图中所绘示的一组件或特征相对于另一或多个组件或特征之间的关系。这些空间上相对的词汇其本意除了图中所绘示的方位之外,还涵盖了装置在使用或操作中所处的多种不同方位。可能将所述设备放置于其他方位(如,旋转90度或处于其他方位),而这些空间上相对的描述词汇就应该做相应的解释。Furthermore, the use of spatially relative terms, such as "below", "below", "below", "above", "above" and the like, may be used to facilitate the description of the drawings. relationship between one component or feature shown with respect to another component or feature. These spatially relative terms are intended to encompass many different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be positioned in other orientations (eg, rotated 90 degrees or at other orientations) and these spatially relative descriptors should be interpreted accordingly.

虽然用以界定本申请较广范围的数值范围与参数皆是约略的数值,此处已尽可能精确地呈现具体实施例中的相关数值。然而,任何数值本质上不可避免地含有因个别测试方法所致的标准偏差。在此处,「约」通常系指实际数值在一特定数值或范围的正负10%、5%、1%或0.5%之内。或者是,「约」一词代表实际数值落在平均值的可接受标准误差之内,视本申请所属技术领域中具有通常知识者的考虑而定。当可理解,除了实验例之外,或除非另有明确的说明,此处所用的所有范围、数量、数值与百分比(例如用以描述材料用量、时间长短、温度、操作条件、数量比例及其他相似者)均经过「约」的修饰。因此,除非另有相反的说明,本说明书与附随申请专利范围所揭示的数值参数皆为约略的数值,且可视需求而更动。至少应将这些数值参数理解为所指出的有效位数与套用一般进位法所得到的数值。在此处,将数值范围表示成由一端点至另一端点或介于二端点之间;除非另有说明,此处所述的数值范围皆包括端点。Notwithstanding that the numerical ranges and parameters setting forth the broader scope of the application are approximations, the numerical values set forth in the specific examples have been reported as precisely as possible. Any numerical value, however, inherently contains the standard deviation resulting from individual testing methods. As used herein, "about" generally means within plus or minus 10%, 5%, 1%, or 0.5% of the actual value of a particular value or range. Alternatively, the word "about" means that the actual value lies within an acceptable standard error of the mean, as considered by one of ordinary skill in the art to which this application pertains. It should be understood that all ranges, quantities, numerical values and percentages used herein (for example, to describe material amounts, time durations, temperatures, operating conditions, quantity ratios and other similar) are modified by "about". Therefore, unless otherwise stated to the contrary, the numerical parameters disclosed in this specification and the accompanying claims are approximate numerical values and may be changed as required. At a minimum, these numerical parameters should be construed to mean the number of significant digits indicated and the numerical values obtained by applying ordinary rounding. Numerical ranges are expressed herein as from one endpoint to the other or between the endpoints; unless otherwise indicated, the numerical ranges recited herein are inclusive of the endpoints.

高分辨率甚至超高分辨率CMOS图像传感器的应用和需求越来越广泛,单位像素的尺寸必须跟著缩小,也就是说,单位像素中的光敏传感器和输出电路的尺寸都要跟著缩小,输出电路的效能不可避免地会遭遇一些影响。例如当输出电路中的源跟随晶体管的沟道长度缩小时,随机电报信号噪声会变大,本申请的图像传感器的半导体结构可藉由改变输出电路的配置,来减少像素的面积,并增加输出电路中的源跟随晶体管的沟道长度,因而降低随机电报信号噪声。此外,藉由改变输出电路的配置,本申请亦可使具有拜耳排列的同一像素组中的绿色像素(Gr和Gb)使用同一读取电路,达到避免绿色像素(Gr和Gb)因读取电路的不同而造成绿色像素(Gr和Gb)之间的影像失调问题。The application and demand of high-resolution and even ultra-high-resolution CMOS image sensors are becoming more and more extensive, and the size of the unit pixel must be reduced. performance will inevitably suffer some impact. For example, when the channel length of the source follower transistor in the output circuit is reduced, the random telegraph signal noise will increase. The semiconductor structure of the image sensor of the present application can reduce the pixel area and increase the output by changing the configuration of the output circuit. The source in the circuit follows the channel length of the transistor, thus reducing random telegraph signal noise. In addition, by changing the configuration of the output circuit, the present application can also use the same readout circuit for the green pixels (Gr and Gb) in the same pixel group with Bayer arrangement, so as to avoid the green pixels (Gr and Gb) from being affected by the readout circuit. The difference between the green pixels (Gr and Gb) causes the image misalignment problem between the green pixels (Gr and Gb).

图1为本申请的图像传感器的半导体结构的第一实施例的俯视图。图1中的图像传感器100包括像素P1和像素P2,且像素P1和像素P2共同形成单位像素组。应注意的是,尽管图1中的图像传感器100仅绘示了像素P1和像素P2,但图像传感器100可包括多个所述单位像素组。图3为图1的图像传感器的像素P1或像素P2的电路图,在此实施例中,像素P1与像素P2的电路图相同。FIG. 1 is a top view of a first embodiment of a semiconductor structure of an image sensor of the present application. The image sensor 100 in FIG. 1 includes a pixel P1 and a pixel P2, and the pixel P1 and the pixel P2 together form a unit pixel group. It should be noted that although the image sensor 100 in FIG. 1 only shows the pixel P1 and the pixel P2, the image sensor 100 may include a plurality of the unit pixel groups. FIG. 3 is a circuit diagram of a pixel P1 or a pixel P2 of the image sensor of FIG. 1 . In this embodiment, the circuit diagrams of the pixel P1 and the pixel P2 are the same.

请同时参阅图1和图3。图像传感器100包括半导体衬底101,且像素P1和像素P2设置于半导体衬底101。其中半导体衬底101可以是块状半导体衬底,诸如硅衬底或绝缘体上硅(SOI)衬底。像素P1和像素P2分别包括光敏传感器102以及输出电路116。光敏传感器102的阳极电连接至第一电压VSS,光敏传感器102用来将光线转换为电荷。请注意,图1为了简洁并未另标示出输出电路116的范围,输出电路116仅标示于图3。See also Figure 1 and Figure 3. The image sensor 100 includes a semiconductor substrate 101 , and the pixels P1 and P2 are disposed on the semiconductor substrate 101 . The semiconductor substrate 101 may be a bulk semiconductor substrate, such as a silicon substrate or a silicon-on-insulator (SOI) substrate. Pixel P1 and pixel P2 include photosensor 102 and output circuit 116, respectively. The anode of the photosensor 102 is electrically connected to the first voltage VSS, and the photosensor 102 is used to convert light into electric charges. Please note that the scope of the output circuit 116 is not indicated in FIG. 1 for brevity, and the output circuit 116 is only indicated in FIG. 3 .

输出电路116用来依据光敏传感器102产生的所述电荷产生所述像素输出,输出电路116包括传输门104、重置晶体管106、源跟随晶体管108以及行选择晶体管110。其中传输门104包括闸极和两源/漏极,传输门104的闸极依据传输门控制信号TX决定传输门104导通或断开,传输门104的两源/漏极分别电连接至光敏传感器102和浮置扩散区FD。源跟随晶体管108设置于重置晶体管106和行选择晶体管110之间,具体来说,源跟随晶体管108的闸极和重置晶体管106的一源/漏极都电连接至浮置扩散区FD,重置晶体管106的另一源/漏极电连接至第二电压VDD,第二电压VDD可相同或不同于第一电压VSS。重置晶体管106的闸极依据重置信号RST的控制决定是否导通,源跟随晶体管108串接于行选择晶体管110,源跟随晶体管108的一源/漏极电连接至行选择晶体管110的一源/漏极,源跟随晶体管108的另一源/漏极电连接至第二电压VDD。行选择晶体管110的另一源/漏极作为所述像素输出的输出端POUT并电连接至位线BL,行选择晶体管110的闸极依据字线WL上的行选择信号RSEL控制决定是否导通并将所述像素输出从输出端POUT输出至位线BL。The output circuit 116 is used to generate the pixel output according to the charge generated by the photosensor 102 . The output circuit 116 includes a transfer gate 104 , a reset transistor 106 , a source follower transistor 108 and a row select transistor 110 . The transmission gate 104 includes a gate and two sources/drains, the gate of the transmission gate 104 determines whether the transmission gate 104 is turned on or off according to the transmission gate control signal TX, and the two sources/drains of the transmission gate 104 are respectively electrically connected to the photosensitive Sensor 102 and floating diffusion FD. The source follower transistor 108 is disposed between the reset transistor 106 and the row select transistor 110. Specifically, the gate of the source follower transistor 108 and a source/drain of the reset transistor 106 are both electrically connected to the floating diffusion region FD, The other source/drain of the reset transistor 106 is electrically connected to a second voltage VDD, which may be the same as or different from the first voltage VSS. The gate of the reset transistor 106 determines whether to turn on or not according to the control of the reset signal RST. The source follower transistor 108 is connected in series with the row select transistor 110 , and a source/drain of the source follower transistor 108 is electrically connected to a row select transistor 110 . A source/drain, the other source/drain of the source follower transistor 108 is electrically connected to the second voltage VDD. The other source/drain of the row selection transistor 110 is used as the output terminal POUT of the pixel output and is electrically connected to the bit line BL. The gate of the row selection transistor 110 is controlled to determine whether to turn on or not according to the row selection signal RSEL on the word line WL. The pixel output is output from the output terminal POUT to the bit line BL.

从像素P1和像素P2的半导体结构的俯视图来看,像素P1的行选择晶体管110和像素P2的行选择晶体管110位于像素P1的源跟随晶体管108和像素P2的源跟随晶体管108之间,如此一来,像素P1的行选择晶体管110的所述另一源/漏极和像素P2的行选择晶体管110的所述另一源/漏极的位置便可重叠或接近。举例来说,在本实施例中,像素P1的行选择晶体管110的所述另一源/漏极和像素P2的行选择晶体管110的所述另一源/漏极的位置重叠,具体来说,像素P1的行选择晶体管110的所述另一源/漏极和像素P2的行选择晶体管110的所述另一源/漏极共享半导体衬底101的一区域,即像素P1的行选择晶体管110的所述另一源/漏极和像素P2的行选择晶体管110的所述另一源/漏极是彼此共享的,因此可节省一个源/漏极的面积,换句话说,像素P1和像素P2共享输出端POUT,并通过设置于所述区域上的通孔,使像素P1和像素P2电连接至位线BL。然在某些实施例中,所述区域上亦可设置超过一个通孔来将像素P1和像素P2电连接至位线BL。在某些实施例中,像素P1的行选择晶体管110的所述另一源/漏极和像素P2的行选择晶体管110的所述另一源/漏极的位置亦可接近但不重叠。From the top view of the semiconductor structures of pixel P1 and pixel P2, the row select transistor 110 of pixel P1 and the row select transistor 110 of pixel P2 are located between the source follower transistor 108 of pixel P1 and the source follower transistor 108 of pixel P2, such that Therefore, the positions of the other source/drain of the row selection transistor 110 of the pixel P1 and the other source/drain of the row selection transistor 110 of the pixel P2 may overlap or be close to each other. For example, in this embodiment, the positions of the other source/drain of the row selection transistor 110 of the pixel P1 and the other source/drain of the row selection transistor 110 of the pixel P2 overlap, specifically , the other source/drain of the row selection transistor 110 of the pixel P1 and the other source/drain of the row selection transistor 110 of the pixel P2 share a region of the semiconductor substrate 101, that is, the row selection transistor of the pixel P1 The other source/drain of the pixel P2 and the other source/drain of the row select transistor 110 of the pixel P2 are shared with each other, so the area of one source/drain can be saved, in other words, the pixels P1 and The pixel P2 shares the output terminal POUT, and the pixel P1 and the pixel P2 are electrically connected to the bit line BL through the through hole provided on the area. However, in some embodiments, more than one via hole may be provided in the region to electrically connect the pixel P1 and the pixel P2 to the bit line BL. In some embodiments, the location of the other source/drain of the row select transistor 110 of pixel P1 and the other source/drain of the row select transistor 110 of pixel P2 may also be close but not overlapping.

和传统的像素P1和像素P2各自的输出电路116完全分开设置相比,本申请将像素P1和像素P2配置为一组,并整合像素P1和像素P2的输出电路116,可节省面积,并将多出来的面积的部分或全部用来增加像素P1和像素P2的源跟随晶体管108的沟道长度L,以达到减少像素P1和像素P2的面积和降低随机电报信号噪声的目的。Compared with the traditional pixel P1 and the pixel P2 that have their respective output circuits 116 completely separated, the present application configures the pixel P1 and the pixel P2 as a group, and integrates the output circuits 116 of the pixel P1 and the pixel P2, which can save area and Part or all of the extra area is used to increase the channel length L of the source follower transistor 108 of the pixels P1 and P2 to reduce the area of the pixels P1 and P2 and reduce random telegraph signal noise.

进一步来说,从像素P1和像素P2的半导体结构的俯视图来看,在某些实施例中,像素P1的源跟随晶体管108和行选择晶体管110的配置方式对称于像素P2的源跟随晶体管108和行选择晶体管110的配置方式,也就是像素P1的源跟随晶体管108和行选择晶体管110对衬于像素P2的源跟随晶体管108和行选择晶体管110。或,在某些实施例中,像素P1的输出电路116和像素P2的输出电路116可以对衬设置,也就是像素P1的输出电路116对衬于像素P2的输出电路116。或,在某些实施例中,像素P1的光敏传感器102和输出电路116的配置方式可以对称于像素P2的光敏传感器102和输出电路116的配置方式,也就是像素P1的光敏传感器102和输出电路116对衬于像素P2的光敏传感器102和输出电路116。Further, from the top view of the semiconductor structure of pixel P1 and pixel P2, in some embodiments, the configuration of source follower transistor 108 and row select transistor 110 of pixel P1 is symmetrical to the source follower transistor 108 and the row select transistor of pixel P2. The configuration of the row select transistor 110 is that the source follower transistor 108 and the row select transistor 110 of the pixel P1 are opposite to the source follower transistor 108 and the row select transistor 110 of the pixel P2. Or, in some embodiments, the output circuit 116 of the pixel P1 and the output circuit 116 of the pixel P2 may be arranged opposite to each other, that is, the output circuit 116 of the pixel P1 is opposite to the output circuit 116 of the pixel P2. Or, in some embodiments, the configuration of the photosensor 102 and the output circuit 116 of the pixel P1 may be symmetrical to the configuration of the photosensor 102 and the output circuit 116 of the pixel P2, that is, the photosensor 102 and the output circuit of the pixel P1 116 opposes the photosensor 102 and the output circuit 116 of the pixel P2.

从像素P1和像素P2的半导体结构的俯视图来看,在某些实施例中,像素P1的源跟随晶体管108、行选择晶体管110和像素P2的行选择晶体管110、源跟随晶体管108依序排成一列形成晶体管列。进一步来说,在某些实施例中,像素P1的重置晶体管106、源跟随晶体管108、行选择晶体管110和像素P2的行选择晶体管110、源跟随晶体管108、重置晶体管106依序排成一列形成晶体管列。像素P1的光敏传感器102和像素P2的光敏传感器102设置在所述晶体管列(从上到下依序为106、108、110、110、108、106)的同一侧。From the top view of the semiconductor structures of pixel P1 and pixel P2, in some embodiments, the source follower transistor 108, the row select transistor 110 of pixel P1 and the row select transistor 110, source follower transistor 108 of pixel P2 are arranged in sequence A column forms a transistor column. Further, in some embodiments, the reset transistor 106 , the source follower transistor 108 , the row select transistor 110 of the pixel P1 and the row select transistor 110 , the source follower transistor 108 and the reset transistor 106 of the pixel P2 are arranged in sequence. A column forms a transistor column. The photosensor 102 of pixel P1 and the photosensor 102 of pixel P2 are arranged on the same side of the transistor column (106, 108, 110, 110, 108, 106 in order from top to bottom).

在某些实施例中,像素P1和像素P2的上方可设置有滤色片,并依照拜耳阵列排列为像素组,如图4所示,图4为基于图1的图像传感器的半导体结构的拜耳像素组。图4中的拜耳像素组300包括两个图1所示的单位像素组,即像素P1、P2所构成的单位像素组和像素P3、P4所构成的单位像素组。像素P1的光敏传感器102上方设置有蓝色(B)滤色片,以及像素P2的光敏传感器102上方设置有绿色(Gr)滤色片,像素P3的光敏传感器102上方设置有绿色(Gb)滤色片,以及像素P4的光敏传感器102上方设置有红色(R)滤色片。换句话说,若从俯视图来看,所述蓝色(B)滤色片重叠于像素P1,所述绿色(Gr)滤色片重叠于像素P2,所述绿色(Gb)滤色片重叠于像素P3,所述红色(R)滤色片重叠于像素P4。In some embodiments, color filters may be disposed above the pixels P1 and P2, and arranged into pixel groups according to a Bayer array, as shown in FIG. 4 , which is a Bayer view based on the semiconductor structure of the image sensor of FIG. pixel group. The Bayer pixel group 300 in FIG. 4 includes two unit pixel groups shown in FIG. 1 , that is, a unit pixel group formed by pixels P1 and P2 and a unit pixel group formed by pixels P3 and P4 . A blue (B) color filter is provided above the photosensitive sensor 102 of the pixel P1, a green (Gr) color filter is provided above the photosensitive sensor 102 of the pixel P2, and a green (Gb) color filter is provided above the photosensitive sensor 102 of the pixel P3. A color filter, and a red (R) color filter is provided above the photosensitive sensor 102 of the pixel P4. In other words, if viewed from the top view, the blue (B) color filter overlaps the pixel P1, the green (Gr) color filter overlaps the pixel P2, and the green (Gb) color filter overlaps the pixel P2. Pixel P3, the red (R) color filter overlaps pixel P4.

在某些实施例中,从像素P1和像素P2的半导体结构的俯视图来看,像素P1的光敏传感器102和像素P2的光敏传感器102设置在所述晶体管列(从上到下为106、108、110、110、108、106)的相对两侧。图2为本申请的图像传感器的半导体结构的第二实施例的俯视图。图2中的图像传感器200包括像素P1'和像素P2,且像素P1'和像素P2共同形成单位像素组。图1的图像传感器100和图2的图像传感器200的电路实际上并没有改变,和图1的图像传感器100的不同之处在于,图1的图像传感器100的像素P1和像素P2设置在所述晶体管列(从上到下为106、108、110、110、108、106)的同一侧,但图2的图像传感器200的像素P1'和像素P2设置在所述晶体管列(从上到下为106、108、110、110、108、106)的不同侧,且图像传感器200的像素P1'和像素P2仍共享输出端POUT,即像素P1'的输出端POUT和像素P2的输出端POUT共享通孔以电连接至位线BL。In some embodiments, from the top view of the semiconductor structures of the pixel P1 and the pixel P2, the photosensor 102 of the pixel P1 and the photosensor 102 of the pixel P2 are arranged in the transistor columns (106, 108, 110, 110, 108, 106) on opposite sides. FIG. 2 is a top view of a second embodiment of the semiconductor structure of the image sensor of the present application. The image sensor 200 in FIG. 2 includes a pixel P1 ′ and a pixel P2 , and the pixel P1 ′ and the pixel P2 together form a unit pixel group. The circuits of the image sensor 100 of FIG. 1 and the image sensor 200 of FIG. 2 are not actually changed, and the difference from the image sensor 100 of FIG. 1 is that the pixels P1 and P2 of the image sensor 100 of FIG. The same side of the transistor columns (106, 108, 110, 110, 108, 106 from top to bottom), but pixel P1' and pixel P2 of the image sensor 200 of FIG. 106, 108, 110, 110, 108, 106) on different sides, and the pixel P1' and the pixel P2 of the image sensor 200 still share the output terminal POUT, that is, the output terminal POUT of the pixel P1' and the output terminal POUT of the pixel P2 share the same connection. The hole is electrically connected to the bit line BL.

应注意的是,尽管图2中的图像传感器200仅绘示了像素P1'和像素P2,但图像传感器200可包括多个所述单位像素组。由于图1的图像传感器100和图2的图像传感器200的电路实际上并没有改变,只是改变半导体结构的配置方式,因此图3亦为图2的图像传感器的像素P1'或像素P2的电路图,在此实施例中,像素P1'或像素P2的电路图相同。It should be noted that although the image sensor 200 in FIG. 2 only shows the pixel P1 ′ and the pixel P2 , the image sensor 200 may include a plurality of the unit pixel groups. Since the circuits of the image sensor 100 of FIG. 1 and the image sensor 200 of FIG. 2 have not actually changed, but only the configuration of the semiconductor structure has been changed, FIG. 3 is also a circuit diagram of the pixel P1 ′ or the pixel P2 of the image sensor of FIG. 2 . In this embodiment, the circuit diagram of the pixel P1' or the pixel P2 is the same.

在某些实施例中,像素P1'和像素P2的上方可设置有滤色片,并依照拜耳排列为像素组,如图5所示,图5为基于图2的图像传感器的半导体结构的拜耳像素组。图5中的拜耳像素组400包括两个图2所示的单位像素组,即像素P1'、P2所构成的单位像素组和像素P3'、P4所构成的单位像素组。像素P1'的光敏传感器102上方设置有绿色(Gb)滤色片,以及像素P2的光敏传感器102上方设置有括绿色(Gr)滤色片,像素P3'的光敏传感器102上方设置有蓝色(B)滤色片,以及像素P4的光敏传感器102上方设置有红色(R)滤色片。换句话说,若从俯视图来看,所述绿色(Gb)滤色片重叠于像素P1',所述绿色(Gr)滤色片重叠于像素P2,所述蓝色(B)滤色片重叠于像素P3',所述红色(R)滤色片重叠于像素P4。In some embodiments, a color filter may be disposed above the pixel P1 ′ and the pixel P2 and arranged into a pixel group according to Bayer, as shown in FIG. 5 , which is a Bayer based on the semiconductor structure of the image sensor of FIG. 2 pixel group. The Bayer pixel group 400 in FIG. 5 includes two unit pixel groups shown in FIG. 2 , that is, a unit pixel group formed by pixels P1 ′ and P2 and a unit pixel group formed by pixels P3 ′ and P4 . A green (Gb) color filter is provided above the photosensitive sensor 102 of the pixel P1', a green (Gr) color filter is provided above the photosensitive sensor 102 of the pixel P2, and a blue (Gr) color filter is provided above the photosensitive sensor 102 of the pixel P3'. B) A color filter, and a red (R) color filter is provided above the photosensor 102 of the pixel P4. In other words, if viewed from a top view, the green (Gb) color filter overlaps the pixel P1', the green (Gr) color filter overlaps the pixel P2, and the blue (B) color filter overlaps In pixel P3', the red (R) color filter overlaps pixel P4.

图5的拜耳像素组400中,像素P1'和像素P2的上方皆设置绿色(Gb和Gr)滤色片,并且像素P1'和像素P2共享输出端POUT,也就是说,像素P1'和像素P2会通过同一条位线BL进入同一读取电路,好处在于避免绿色像素(Gr和Gb)因进入不同的读取电路而造成绿色像素(Gr和Gb)之间的影像失调问题,应注意的是,实际上读取电路之间难免存在偏差,因此若同一拜耳像素组中的绿色像素(Gr和Gb)进入不同的读取电路被读取,会造成上述的影像失调问题。因此图5的拜耳像素组400中和图4的拜耳像素组300相比,图5的拜耳像素组400可改善上述的影像失调问题。In the Bayer pixel group 400 of FIG. 5 , green (Gb and Gr) color filters are arranged above the pixels P1 ′ and P2 , and the pixels P1 ′ and P2 share the output terminal POUT, that is, the pixels P1 ′ and the pixels P2 P2 will enter the same read circuit through the same bit line BL. The advantage is to avoid the problem of image misalignment between the green pixels (Gr and Gb) caused by the green pixels (Gr and Gb) entering different read circuits. It should be noted that Yes, in fact, there is inevitably a deviation between the readout circuits. Therefore, if the green pixels (Gr and Gb) in the same Bayer pixel group are read by different readout circuits, the above-mentioned image misalignment problem will be caused. Therefore, compared with the Bayer pixel set 300 of FIG. 4 in the Bayer pixel set 400 of FIG. 5 , the Bayer pixel set 400 of FIG. 5 can improve the above-mentioned image misalignment problem.

在某些实施例中,可将图1的像素P1和像素P2分别变化为多个共享像素,例如以2×2为基础的共享像素。图6为本申请的图像传感器的半导体结构的第三实施例的俯视图。图6的图像传感器500包括2×2为基础的共享像素P5和2×2为基础的共享像素P6,具体来说,像素P5和像素P6分别包括四个子像素以形成2×2为基础的共享像素P5和P6,且像素P5和像素P6共同形成单位像素组。图6的图像传感器500和图1的图像传感器100的不同之处在于,图6的像素P5和P6分别包括四个光敏传感器502、504、506和508对应第一像素P5和第二像素P6各自的所述四个子像素。应注意的是,尽管图6中的图像传感器500仅绘示了像素P5和像素P6,但图像传感器500可包括多个所述单位像素组。图8为图6的图像传感器的像素P5或像素P6的电路图,在此实施例中,像素P5或像素P6的电路图相同。In some embodiments, the pixel P1 and the pixel P2 of FIG. 1 may be respectively changed into a plurality of shared pixels, eg, shared pixels on a 2×2 basis. FIG. 6 is a top view of a third embodiment of the semiconductor structure of the image sensor of the present application. The image sensor 500 of FIG. 6 includes a 2×2-based shared pixel P5 and a 2×2-based shared pixel P6. Specifically, the pixel P5 and the pixel P6 respectively include four sub-pixels to form a 2×2-based shared pixel The pixels P5 and P6, and the pixel P5 and the pixel P6 together form a unit pixel group. The difference between the image sensor 500 of FIG. 6 and the image sensor 100 of FIG. 1 is that the pixels P5 and P6 of FIG. 6 respectively include four photosensors 502 , 504 , 506 and 508 corresponding to the first pixel P5 and the second pixel P6 respectively of the four sub-pixels. It should be noted that although the image sensor 500 in FIG. 6 only shows the pixel P5 and the pixel P6, the image sensor 500 may include a plurality of the unit pixel groups. FIG. 8 is a circuit diagram of the pixel P5 or the pixel P6 of the image sensor of FIG. 6 . In this embodiment, the circuit diagram of the pixel P5 or the pixel P6 is the same.

图6的像素P5及像素P6的输出电路518和图1的像素P1及像素P2的输出电路116大致相同,差别在于像素P5或像素P6分别具有四个传输门510、512、514和516以对应四个光敏传感器502、504、506和508。除此之外,图6的像素P5或像素P6保留了图1的像素P1或像素P2的所有优点。The output circuits 518 of the pixels P5 and P6 of FIG. 6 are substantially the same as the output circuits 116 of the pixels P1 and P2 of FIG. 1 , the difference is that the pixels P5 and P6 respectively have four transfer gates 510 , 512 , 514 and 516 to correspond to Four photosensors 502 , 504 , 506 and 508 . Apart from that, pixel P5 or pixel P6 of FIG. 6 retains all the advantages of pixel P1 or pixel P2 of FIG. 1 .

图7为本申请的图像传感器的半导体结构的第四实施例的俯视图。图7的图像传感器600包括2×2为基础的共享像素P5'和2×2为基础的共享像素P6,且像素P5'和像素P6共同形成单位像素组。图7的图像传感器600和图6的图像传感器500的电路实际上并没有改变,和图6的图像传感器500的不同之处在于,图6的图像传感器500的像素P5和像素P6设置在所述晶体管列(从上到下为106、108、110、110、108、106)的同一侧,但图7的图像传感器600的像素P5'和像素P6设置在所述晶体管列(从上到下为106、108、110、110、108、106)的不同侧,且图像传感器600的像素P5'和像素P6仍共享输出端POUT,即像素P5'的输出端POUT和像素P6的输出端POUT共享通孔以电连接至位线BL。FIG. 7 is a top view of a fourth embodiment of the semiconductor structure of the image sensor of the present application. The image sensor 600 of FIG. 7 includes a 2×2-based shared pixel P5 ′ and a 2×2-based shared pixel P6 , and the pixel P5 ′ and the pixel P6 together form a unit pixel group. The circuits of the image sensor 600 of FIG. 7 and the image sensor 500 of FIG. 6 are not actually changed, and the difference from the image sensor 500 of FIG. 6 is that the pixels P5 and P6 of the image sensor 500 of FIG. The same side of the transistor columns (106, 108, 110, 110, 108, 106 from top to bottom), but pixel P5' and pixel P6 of the image sensor 600 of FIG. 106, 108, 110, 110, 108, 106) on different sides, and the pixel P5' and the pixel P6 of the image sensor 600 still share the output terminal POUT, that is, the output terminal POUT of the pixel P5' and the output terminal POUT of the pixel P6 share the same output terminal. The hole is electrically connected to the bit line BL.

应注意的是,尽管图7中的图像传感器600仅绘示了像素P5'和像素P6,但图像传感器600可包括多个所述单位像素组。由于图6的图像传感器500和图7的图像传感器600的电路实际上并没有改变,只是改变半导体结构的配置方式,因此图8亦为图7的图像传感器的像素P5'或像素P6的电路图,在此实施例中,像素P5'或像素P6的电路图相同。It should be noted that although the image sensor 600 in FIG. 7 only shows the pixel P5' and the pixel P6, the image sensor 600 may include a plurality of the unit pixel groups. Since the circuits of the image sensor 500 of FIG. 6 and the image sensor 600 of FIG. 7 have not actually changed, only the configuration of the semiconductor structure has been changed. Therefore, FIG. 8 is also a circuit diagram of the pixel P5 ′ or the pixel P6 of the image sensor of FIG. 7 . In this embodiment, the circuit diagram of the pixel P5' or the pixel P6 is the same.

图9为基于图6的图像传感器的半导体结构的拜耳像素组。图10为基于图7的图像传感器的半导体结构的拜耳像素组。相似于图4和图5之于图1和图2,图9和图10亦为增加滤色片后之拜耳像素组的排列实施例,其细节便不多做赘述。FIG. 9 is a Bayer pixel group based on the semiconductor structure of the image sensor of FIG. 6 . FIG. 10 is a Bayer pixel group based on the semiconductor structure of the image sensor of FIG. 7 . Similar to FIG. 4 and FIG. 5 to FIG. 1 and FIG. 2 , FIG. 9 and FIG. 10 are also examples of arrangement of Bayer pixel groups after adding color filters, and details thereof will not be repeated.

本申请还提供了一种芯片,其包括图像传感器100/200/300/400/500/600/700/800。本申请还提供了一种电子装置,图11为本申请的图像传感器应用于电子装置1100中的实施例的示意图,如图11所示,电子装置1100包括显示屏组件1104和图像传感器100/200/300/400/500/600/700/800。其中,电子装置1100可为例如智能型手机、个人数字助理、手持式计算机系统、平板计算机或数码相机等任何电子装置。The present application also provides a chip including the image sensor 100/200/300/400/500/600/700/800. The present application also provides an electronic device. FIG. 11 is a schematic diagram of an embodiment in which the image sensor of the present application is applied to an electronic device 1100. As shown in FIG. 11 , the electronic device 1100 includes a display screen assembly 1104 and an image sensor 100/200. /300/400/500/600/700/800. The electronic device 1100 may be any electronic device such as a smart phone, a personal digital assistant, a handheld computer system, a tablet computer, or a digital camera.

上文的叙述简要地提出了本申请某些实施例之特征,而使得本申请所属技术领域具有通常知识者能够更全面地理解本发明内容的多种态样。本申请所属技术领域具有通常知识者当可明了,其可轻易地利用本发明内容作为基础,来设计或更动其他工艺与结构,以实现与此处所述之实施方式相同的目的和/或达到相同的优点。本申请所属技术领域具有通常知识者应当明白,这些均等的实施方式仍属于本发明内容之精神与范围,且其可进行各种变更、替代与更动,而不会悖离本发明内容之精神与范围。The foregoing description briefly sets forth the features of certain embodiments of the present application, so that those skilled in the art to which the present application pertains can more fully understand the various aspects of the present disclosure. It should be apparent to those skilled in the art to which this application pertains that they can readily use the present disclosure as a basis for designing or modifying other processes and structures to achieve the same purposes and/or other aspects of the embodiments described herein. achieve the same advantages. Those with ordinary knowledge in the technical field to which this application belongs should understand that these equivalent embodiments still belong to the spirit and scope of the content of the present invention, and various changes, substitutions and alterations can be made without departing from the spirit of the content of the present invention. with scope.

Claims (16)

1. A semiconductor structure of an image sensor, comprising a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate, wherein the plurality of pixels comprises:
a first pixel and a second pixel, each of the first pixel and the second pixel including:
at least one photosensitive sensor for converting light into electric charge; and
an output circuit for generating a pixel output according to the charge, the output circuit including a source follower transistor and a row select transistor, a source/drain of the source follower transistor being electrically connected to a source/drain of the row select transistor;
wherein, from a top view, the row select transistor of the first pixel and the row select transistor of the second pixel are both located between the source follower transistor of the first pixel and the source follower transistor of the second pixel.
2. The semiconductor structure of claim 1, wherein, from a top view, the source follower transistor of the first pixel and the row select transistor of the first pixel are arranged symmetrically to the source follower transistor of the second pixel and the row select transistor of the second pixel.
3. The semiconductor structure of an image sensor as claimed in claim 1 or 2, further comprising a bit line, a via hole for electrically connecting row selection transistors of a first pixel and a second pixel to the bit line being disposed on the semiconductor substrate, wherein the output circuit of the first pixel outputs the pixel output by using the other source/drain of the row selection transistor as an output terminal; the output circuit of the second pixel outputs the pixel output by having the other source/drain of the row select transistor therein as an output terminal, and the output terminal of the first pixel and the output terminal of the second pixel share a via to be electrically connected to the bit line.
4. The semiconductor structure of an image sensor as claimed in claim 3, wherein the output circuit of the first pixel further comprises a reset transistor electrically connected to the source follower transistor of the first pixel; the output circuit of the second pixel further includes a reset transistor electrically connected to the source follower transistor of the second pixel.
5. The semiconductor structure of an image sensor as claimed in claim 4, wherein in the first pixel, the source follower transistor is disposed between the reset transistor and the row select transistor as viewed from a top view; and in the second pixel, the source follower transistor is disposed between the reset transistor and the row select transistor.
6. The semiconductor structure of claim 3, wherein said output circuit of said first pixel further comprises at least one transmission gate electrically connected between said at least one photosensor of said first pixel and said source follower transistor of said first pixel; the second pixel further comprises at least one transmission gate electrically connected between the at least one photosensor of the second pixel and the source follower transistor of the second pixel.
7. The semiconductor structure of an image sensor as in claim 1, wherein the first pixel and the second pixel each comprise four sub-pixels to form a 2 x2 shared pixel, and the first pixel and the second pixel each comprise four photosensors for the four sub-pixels of each of the first pixel and the second pixel.
8. The semiconductor structure of claim 3, wherein the source follower transistor of the first pixel, the row select transistor of the first pixel, the source follower transistor of the second pixel, and the row select transistor of the second pixel are arranged in a column to form a column of transistors when viewed from a top view.
9. The semiconductor structure of an image sensor as in claim 8, wherein the at least one photosensor of the first pixel and the at least one photosensor of the second pixel are disposed on a same side of the column of transistors from a top view.
10. The semiconductor structure of claim 9, further comprising a blue color filter and a green color filter respectively disposed over the first pixel and the second pixel, the blue color filter overlapping the first pixel and the green color filter overlapping the second pixel when viewed from a top view.
11. The semiconductor structure of claim 9, further comprising a green color filter and a red color filter disposed over the first pixel and the second pixel, respectively, the green color filter overlapping the first pixel and the red color filter overlapping the second pixel when viewed from a top view.
12. The semiconductor structure of an image sensor as in claim 8, wherein the at least one photosensor of the first pixel and the at least one photosensor of the second pixel are disposed on opposite sides of the column of transistors, respectively, as viewed from a top view.
13. The semiconductor structure of claim 12, further comprising a green color filter disposed over the first pixel and the second pixel, the green color filter overlapping the first pixel and the second pixel when viewed from a top view.
14. The semiconductor structure of claim 12, further comprising a blue color filter and a red color filter respectively disposed over the first pixel and the second pixel, the blue color filter overlapping the first pixel and the red color filter overlapping the second pixel when viewed from a top view.
15. A chip, comprising:
the semiconductor structure of an image sensor as in any one of claims 1-14.
16. An electronic device, comprising:
the semiconductor structure of an image sensor as in any one of claims 1-14.
CN201980001729.1A 2019-08-27 2019-08-27 Semiconductor structure, chip and electronic device of image sensor Pending CN110709992A (en)

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