CN110699722A - Preparation of Ti5Si3Method for producing high temperature alloy film - Google Patents
Preparation of Ti5Si3Method for producing high temperature alloy film Download PDFInfo
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Abstract
本发明公开了一种制备Ti5Si3高温合金膜的方法,属于冶金技术领域,其工艺步骤为:(1)采用无水氯化钙为熔盐电解质,二氧化硅以及二氧化钛为原料,氧化钙为助溶剂,形成电沉积系统;(2)以石墨片作为阴极,石墨棒作为阳极,在850℃恒电流/恒电压条件下电沉积制备Ti5Si3高温合金膜;(3)本发明可通过周期性加入二氧化硅以及二氧化钛原料,实现连续制备厚度可调的Ti5Si3高温合金膜。本发明可在较低温度(850℃)条件下,实现直接制备超高熔点高温合金致密膜/镀层,同时可通过改变电流密度、电沉积时间等参数来实现对薄膜厚度及微观形貌的控制。本发明方法具有流程短、能耗低等特点。
The invention discloses a method for preparing a Ti 5 Si 3 superalloy film, which belongs to the technical field of metallurgy. Calcium is used as a co-solvent to form an electrodeposition system; (2) the graphite sheet is used as the cathode and the graphite rod is used as the anode, and the Ti 5 Si 3 superalloy film is prepared by electrodeposition under the condition of constant current/constant voltage at 850°C; (3) the present invention The Ti 5 Si 3 superalloy film with adjustable thickness can be continuously prepared by periodically adding silicon dioxide and titanium dioxide raw materials. The invention can directly prepare the ultra-high melting point superalloy dense film/coating at a lower temperature (850°C), and at the same time, the film thickness and microscopic morphology can be controlled by changing parameters such as current density and electrodeposition time. . The method of the invention has the characteristics of short process flow, low energy consumption and the like.
Description
技术领域technical field
本发明涉及冶金技术领域,尤其涉及一种制备Ti5Si3高温合金膜的方法。The invention relates to the technical field of metallurgy, in particular to a method for preparing a Ti 5 Si 3 superalloy film.
背景技术Background technique
Ti5Si3作为钛和硅的典型的金属间化合物,具有高熔点(2123℃)、高强度、高硬度和良好的高温抗氧化性、抗蠕变性等特点,广泛应用于航天航空、电子器件材料、镀膜材料等领域。As a typical intermetallic compound of titanium and silicon, Ti 5 Si 3 has the characteristics of high melting point (2123 ° C), high strength, high hardness, good high temperature oxidation resistance, creep resistance, etc., and is widely used in aerospace, electronics, etc. Device materials, coating materials and other fields.
目前,制备Ti5Si3粉体的方法有很多,例如自蔓延高温合成(SHS)、机械合金化(MA)、放电等离子烧结(SPS)等。但是,Ti5Si3高温合金膜的制备一直是个难题,其主要原因是超高熔点使得很难在融化条件下制备Ti5Si3高温合金膜。现阶段制备Ti5Si3膜的方法主要有热蒸发法和常压化学气相沉积法(APCVD)。其中,热蒸发法是通过对原料进行加热至气化,然后沉积在基体表面;该工艺可制备高纯的Ti5Si3膜,但是所需设备价格昂贵,可控程度低。APCVD法具有生产成本低、装置简单,镀膜面积广;但是该技术对反应体系的要求严苛,沉积产物的收集过程复杂,膜的质量可控性差。At present, there are many methods for preparing Ti 5 Si 3 powder, such as self-propagating high temperature synthesis (SHS), mechanical alloying (MA), spark plasma sintering (SPS) and so on. However, the preparation of Ti 5 Si 3 superalloy films has always been a difficult problem, mainly because the ultra-high melting point makes it difficult to prepare Ti 5 Si 3 superalloy films under melting conditions. At present, the methods for preparing Ti 5 Si 3 films mainly include thermal evaporation and atmospheric pressure chemical vapor deposition (APCVD). Among them, the thermal evaporation method is to heat the raw material to vaporize, and then deposit it on the surface of the substrate; this process can prepare a high-purity Ti 5 Si 3 film, but the required equipment is expensive and the degree of control is low. The APCVD method has the advantages of low production cost, simple device and wide coating area; however, this technology has strict requirements on the reaction system, complicated collection process of the deposited products, and poor controllability of the film quality.
发明内容SUMMARY OF THE INVENTION
有鉴于现有技术的上述缺陷,本发明所要解决的技术问题是发明一种对反应体系要求简单,沉积产物收集简单,Ti5Si3膜质量可靠性高的方法。In view of the above-mentioned defects of the prior art, the technical problem to be solved by the present invention is to invent a method with simple requirements for the reaction system, simple collection of deposition products, and high quality reliability of the Ti 5 Si 3 film.
为实现上述目的,本发明提供了一种制备Ti5Si3高温合金膜的方法,其特征在于按照以下工艺步骤进行:In order to achieve the above purpose, the present invention provides a method for preparing a Ti 5 Si 3 superalloy film, which is characterized in that it is carried out according to the following process steps:
a.熔盐电解质的预处理:以无水CaCl2为熔盐介质,SiO2、TiO2为原料,CaO为辅助溶剂,将CaCl2-(2-5%)SiO2-(1-5%)TiO2-(2-5%)CaO(质量百分比)加入氧化铝坩埚或石英坩埚中,然后在真空或惰性气氛保护下加热,保温以去除熔盐中的结晶水;再在惰性气氛保护下加热至850℃,保温24–48h,使SiO2、TiO2原料在熔盐介质中充分溶解形成电沉积体系;a. Pretreatment of molten salt electrolyte: with anhydrous CaCl 2 as molten salt medium, SiO 2 and TiO 2 as raw materials, CaO as auxiliary solvent, CaCl 2 -(2-5%)SiO 2 -(1-5% )TiO 2 -(2-5%) CaO (mass percentage) is added to alumina crucible or quartz crucible, then heated under vacuum or inert atmosphere protection, and kept warm to remove crystal water in molten salt; then under inert atmosphere protection Heating to 850°C, keeping the temperature for 24-48h, so that the SiO 2 and TiO 2 raw materials are fully dissolved in the molten salt medium to form an electrodeposition system;
b.预电解除杂:放入石墨棒作为阳极和阴极,将电压调至2.5V进行预电解,预电解时间为1–4h;b. Pre-electrolysis to remove impurities: put graphite rods as anode and cathode, adjust the voltage to 2.5V for pre-electrolysis, and the pre-electrolysis time is 1-4h;
c.电沉积Ti5Si3高温合金膜:采用石墨棒为阳极,阴极基体在惰性气氛保护气氛下及电流密度5–30mA/cm2条件下进行熔盐电沉积。c. Electrodeposition of Ti 5 Si 3 superalloy film: A graphite rod is used as the anode, and the cathode matrix is electrodeposited with molten salt under the protective atmosphere of an inert atmosphere and a current density of 5–30 mA/cm 2 .
进一步地,所述步骤b,预电解可根据需要重复多次。Further, in the step b, the pre-electrolysis can be repeated as many times as needed.
进一步地,所述步骤c中,电沉积时间1–24h可调从而直接获得不同厚度Ti5Si3高温合金膜。Further, in the step c, the electrodeposition time can be adjusted from 1 to 24 h so as to directly obtain Ti 5 Si 3 superalloy films with different thicknesses.
进一步地,所述步骤c中的电沉积过程,可以通过改变电流密度和电沉积时间来控制产物的厚度及微观形貌,获得致密Ti5Si3高温合金膜。Further, in the electrodeposition process in the step c, the thickness and microscopic morphology of the product can be controlled by changing the current density and the electrodeposition time, so as to obtain a dense Ti 5 Si 3 superalloy film.
进一步地,可通过周期性加入二氧化硅以及二氧化钛原料,实现连续制备厚度可调的Ti5Si3高温合金膜。Further, by periodically adding silicon dioxide and titanium dioxide raw materials, it is possible to continuously prepare a Ti 5 Si 3 superalloy film with adjustable thickness.
进一步地,添加的二氧化硅以及二氧化钛原料为微/纳米粉。Further, the added silica and titania raw materials are micro/nano powders.
进一步地,还可以制备Ti5Si3高温合金粉末。Further, Ti 5 Si 3 superalloy powder can also be prepared.
进一步地,所述阴极基体可为石墨及金属/合金等基体。Further, the cathode substrate can be a substrate such as graphite and metal/alloy.
进一步地,所述真空或惰性气氛保护下加热至400–600℃。Further, heating to 400-600°C under the protection of vacuum or inert atmosphere.
进一步地,所述保温以去除熔盐中的结晶水的时间为12–24h。Further, the time for the heat preservation to remove crystal water in the molten salt is 12-24h.
本发明与现有技术相比,具有如下优势:工艺流程短、能耗低、无污染、制备成本低、产品可控性好;可以在低温(850℃)条件下直接由低廉原料(SiO2和TiO2)电沉积制备Ti5Si3高温合金膜和Ti5Si3粉体两种产物,其厚度、微观形貌均可调控。Compared with the prior art, the present invention has the following advantages: short process flow, low energy consumption, no pollution, low preparation cost, and good product controllability ; and TiO 2 ) electrodeposition to prepare Ti 5 Si 3 superalloy film and Ti 5 Si 3 powder, whose thickness and microstructure can be controlled.
以下将结合附图对本发明的构思、具体结构及产生的技术效果作进一步说明,以充分地了解本发明的目的、特征和效果。The concept, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, characteristics and effects of the present invention.
附图说明Description of drawings
图1是本发明一个较佳实施例一制备的Ti5Si3高温合金膜的SEM图;1 is a SEM image of a Ti 5 Si 3 superalloy film prepared in a preferred embodiment of the present invention;
图2是本发明一个较佳实施例一制备的Ti5Si3高温合金膜横截面的EDS面扫图;2 is an EDS surface scan of the cross section of the Ti 5 Si 3 superalloy film prepared in a preferred embodiment of the present invention;
图3是本发明一个较佳实施例一制备的Ti5Si3高温合金膜的XRD图;3 is an XRD pattern of a Ti 5 Si 3 superalloy film prepared in a preferred embodiment of the present invention;
图4是本发明一个较佳实施例二制备的Ti5Si3高温合金膜横截面的SEM图;Fig. 4 is the SEM image of the cross section of the Ti 5 Si 3 superalloy film prepared in a
图5是本发明一个较佳实施例三制备的Ti5Si3高温合金膜横截面的SEM图;Fig. 5 is the SEM image of the cross section of the Ti 5 Si 3 superalloy film prepared in a
图6是本发明一个较佳实施例四制备的Ti5Si3高温合金膜横截面的SEM图;6 is a SEM image of the cross section of the Ti 5 Si 3 superalloy film prepared in a
图7是本发明一个较佳实施例五制备的枝状Ti5Si3的SEM图;Fig. 7 is the SEM image of dendritic Ti 5 Si 3 prepared in a
图8是本发明一个较佳实施例五制备的枝状Ti5Si3的EDS图;Fig. 8 is the EDS figure of the dendritic Ti 5 Si 3 prepared by a
图9是本发明一个较佳实施例六制备的颗粒状Ti5Si3的SEM图及EDS图。9 is a SEM image and an EDS image of granular Ti 5 Si 3 prepared in a
具体实施方式Detailed ways
以下参考说明书附图介绍本发明的多个优选实施例,使其技术内容更加清楚和便于理解。本发明可以通过许多不同形式的实施例来得以体现,本发明的保护范围并非仅限于文中提到的实施例。The following describes several preferred embodiments of the present invention with reference to the accompanying drawings, so as to make its technical content clearer and easier to understand. The present invention can be embodied in many different forms of embodiments, and the protection scope of the present invention is not limited to the embodiments mentioned herein.
在附图中,结构相同的部件以相同数字标号表示,各处结构或功能相似的组件以相似数字标号表示。附图所示的每一组件的尺寸和厚度是任意示出的,本发明并没有限定每个组件的尺寸和厚度。In the drawings, structurally identical components are denoted by the same numerals, and structurally or functionally similar components are denoted by like numerals throughout. The size and thickness of each component shown in the drawings are arbitrarily shown, and the present invention does not limit the size and thickness of each component.
本发明一个较佳实施例一:A preferred embodiment one of the present invention:
在本实施例中,主要介绍一种采用低温熔盐电沉积直接制备Ti5Si3高温合金膜的方法,具体操作步骤如下:In this embodiment, a method for directly preparing Ti 5 Si 3 superalloy film by low-temperature molten salt electrodeposition is mainly introduced. The specific operation steps are as follows:
a.熔盐电解质的预处理:以100g无水CaCl2为熔盐介质,2.0g SiO2及2.0g TiO2为原料,2.0g CaO为辅助溶剂,将以上物质加入石英坩埚中,然后放置于竖式电阻炉。在真空中加热至400–500℃,保温12–24h以去除熔盐中的结晶水;再在高纯氩气保护下加热至850℃,保温24–48h,使SiO2和TiO2原料在熔盐介质中充分溶解;a. Pretreatment of molten salt electrolyte: take 100g anhydrous CaCl 2 as molten salt medium, 2.0g SiO 2 and 2.0g TiO 2 as raw materials, 2.0g CaO as auxiliary solvent, add the above substances into a quartz crucible, and then place it in a Vertical resistance furnace. Heating to 400–500 °C in vacuum, holding for 12–24 h to remove crystal water in the molten salt; then heating to 850 °C under the protection of high-purity argon, holding for 24–48 h, so that the SiO 2 and TiO 2 raw materials are melted in the molten salt. Fully dissolved in salt medium;
b.预电解除杂:以两根石墨棒作为阴极和阳极,在2.5V条件下进行预电解,预电解时间为4h;b. Pre-electrolysis to remove impurities: two graphite rods are used as cathode and anode, and pre-electrolysis is carried out under the condition of 2.5V, and the pre-electrolysis time is 4h;
c.电沉积Ti5Si3高温合金膜:以高纯石墨片为阴极基体,石墨棒为阳极,在高纯氩气保护气氛下,将电流密度调至15mA/cm2,进行熔盐电沉积,电沉积4h后得到产物。其SEM图如图1所示,EDS面扫能谱图如图2所示,XRD图如图3所示,证明沉积获得的是Ti5Si3膜。c. Electrodeposition of Ti 5 Si 3 superalloy film: with high-purity graphite sheet as cathode matrix and graphite rod as anode, under the protective atmosphere of high-purity argon, the current density is adjusted to 15mA/cm 2 , and molten salt electrodeposition is carried out , the product was obtained after electrodeposition for 4 h. The SEM image is shown in Figure 1, the EDS surface scan energy spectrum is shown in Figure 2, and the XRD pattern is shown in Figure 3, which proves that the Ti 5 Si 3 film is obtained by deposition.
本发明一个较佳实施例二:A preferred embodiment two of the present invention:
在本实施例中,主要介绍一种采用低温熔盐电沉积直接制备Ti5Si3高温合金膜的方法,具体操作步骤如下:In this embodiment, a method for directly preparing Ti 5 Si 3 superalloy film by low-temperature molten salt electrodeposition is mainly introduced. The specific operation steps are as follows:
a.熔盐电解质的预处理:本步骤与实施例一相同;a. Pretreatment of molten salt electrolyte: this step is the same as in Example 1;
b.预电解除杂:本步骤与实施例一相同;b. Pre-electrolysis to remove impurities: this step is the same as the first embodiment;
c.电沉积Ti5Si3高温合金膜:以高纯石墨片为阴极基体,石墨棒为阳极,在氩气保护气氛下,将电流密度调至~15mA/cm2,进行熔盐电沉积,电沉积1h后得到产物,其SEM图如图4所示。c. Electrodeposition of Ti 5 Si 3 superalloy film: take high-purity graphite sheet as cathode matrix and graphite rod as anode, under argon protective atmosphere, adjust the current density to ~15mA/cm 2 to conduct molten salt electrodeposition, The product was obtained after electrodeposition for 1 h, and its SEM image is shown in FIG. 4 .
本发明一个较佳实施例三:A preferred embodiment three of the present invention:
在本实施例中,主要介绍一种采用低温熔盐电沉积直接制备Ti5Si3高温合金膜的方法,具体操作步骤如下:In this embodiment, a method for directly preparing Ti 5 Si 3 superalloy film by low-temperature molten salt electrodeposition is mainly introduced. The specific operation steps are as follows:
a.熔盐电解质的预处理:本步骤与实施例一相同;a. Pretreatment of molten salt electrolyte: this step is the same as in Example 1;
b.预电解除杂:本步骤与实施例一相同;b. Pre-electrolysis to remove impurities: this step is the same as the first embodiment;
c.电沉积Ti5Si3高温合金膜:以高纯石墨片为阴极基体,石墨棒为阳极,在氩气保护气氛下,将电流密度调至15mA/cm2,进行熔盐电沉积,电沉积3h后得到产物,其SEM图如图5所示。c. Electrodeposition of Ti 5 Si 3 superalloy film: with high-purity graphite sheet as cathode matrix, graphite rod as anode, under argon protective atmosphere, the current density is adjusted to 15mA/cm 2 , and molten salt electrodeposition is carried out. The product was obtained after 3 h of deposition, and its SEM image is shown in FIG. 5 .
本发明一个较佳实施例四:A preferred embodiment four of the present invention:
在本实施例中,主要介绍一种采用低温熔盐电沉积直接制备Ti5Si3高温合金膜的方法,具体操作步骤如下:In this embodiment, a method for directly preparing Ti 5 Si 3 superalloy film by low-temperature molten salt electrodeposition is mainly introduced. The specific operation steps are as follows:
a.熔盐电解质的预处理:本步骤与实施例一相同;a. Pretreatment of molten salt electrolyte: this step is the same as in Example 1;
b.预电解除杂:本步骤与实施例一相同;b. Pre-electrolysis to remove impurities: this step is the same as the first embodiment;
c.电沉积Ti5Si3高温合金膜:以高纯石墨片为阴极基体,石墨棒为阳极,在氩气保护气氛下,将电流密度调至15mA/cm2,进行熔盐电沉积,电沉积5h后得到产物,其SEM图如图6所示。c. Electrodeposition of Ti 5 Si 3 superalloy film: with high-purity graphite sheet as cathode matrix, graphite rod as anode, under argon protective atmosphere, the current density is adjusted to 15mA/cm 2 , and molten salt electrodeposition is carried out. The product was obtained after 5 h of deposition, and its SEM image is shown in Figure 6.
本发明一个较佳实施例五:A preferred embodiment five of the present invention:
在本实施例中,主要介绍一种采用低温熔盐电沉积直接制备Ti5Si3高温合金膜的方法,具体操作步骤如下:In this embodiment, a method for directly preparing Ti 5 Si 3 superalloy film by low-temperature molten salt electrodeposition is mainly introduced. The specific operation steps are as follows:
a.熔盐电解质的预处理:本步骤与实施例一相同;a. Pretreatment of molten salt electrolyte: this step is the same as in Example 1;
b.预电解除杂:本步骤与实施例一相同;b. Pre-electrolysis to remove impurities: this step is the same as the first embodiment;
c.电沉积Ti5Si3高温合金膜:以高纯石墨片为阴极基体,石墨棒为阳极,在氩气保护气氛下,将电流密度调至10mA/cm2,进行熔盐电沉积,电沉积3h后得到枝状产物,其SEM图如图7所示,EDS图如图8所示。c. Electrodeposition of Ti 5 Si 3 superalloy film: with high-purity graphite sheet as cathode matrix, graphite rod as anode, under argon protective atmosphere, the current density is adjusted to 10mA/cm 2 , and molten salt electrodeposition is carried out. The dendritic product was obtained after 3 h of deposition, the SEM image of which is shown in Fig. 7 and the EDS image as shown in Fig. 8 .
本发明一个较佳实施例六:A preferred embodiment six of the present invention:
在本实施例中,主要介绍一种采用低温熔盐电沉积直接制备Ti5Si3高温合金膜的方法,具体操作步骤如下:In this embodiment, a method for directly preparing Ti 5 Si 3 superalloy film by low-temperature molten salt electrodeposition is mainly introduced. The specific operation steps are as follows:
a.熔盐电解质的预处理:本步骤与实施例一相同;a. Pretreatment of molten salt electrolyte: this step is the same as in Example 1;
b.预电解除杂:本步骤与实施例一相同;b. Pre-electrolysis to remove impurities: this step is the same as the first embodiment;
c.电沉积Ti5Si3高温合金粉末:以高纯石墨片为阴极基体,石墨棒为阳极,在氩气保护气氛下,将电流密度调至25mA/cm2,进行熔盐电沉积,电沉积3h后得到颗粒状产物,其SEM图及EDS面扫能谱图如图9所示。c. Electrodeposition of Ti 5 Si 3 superalloy powder: with high-purity graphite sheet as cathode matrix, graphite rod as anode, under argon protective atmosphere, the current density is adjusted to 25mA/cm 2 , and molten salt electrodeposition is carried out. A granular product was obtained after deposition for 3 hours, and its SEM image and EDS surface scan energy spectrum are shown in FIG. 9 .
本发明与现有技术相比,具有如下优势:工艺流程短、能耗低、无污染、制备成本低、产品可控性好;可以在850℃条件下直接由低廉原料(SiO2和TiO2)电沉积制备Ti5Si3高温合金膜和Ti5Si3粉体两种产物,其厚度、微观形貌均可调控。Compared with the prior art, the present invention has the following advantages: short process flow, low energy consumption, no pollution, low preparation cost, and good product controllability ; ) Electrodeposition prepares two products, Ti 5 Si 3 superalloy film and Ti 5 Si 3 powder, whose thickness and microstructure can be controlled.
以上详细描述了本发明的较佳具体实施例。应当理解,本领域的普通技术无需创造性劳动就可以根据本发明的构思作出诸多修改和变化。因此,凡本技术领域中技术人员依本发明的构思在现有技术的基础上通过逻辑分析、推理或者有限的实验可以得到的技术方案,皆应在由权利要求书所确定的保护范围内。The preferred embodiments of the present invention have been described in detail above. It should be understood that many modifications and changes can be made according to the concept of the present invention by those skilled in the art without creative efforts. Therefore, any technical solutions that can be obtained by those skilled in the art through logical analysis, reasoning or limited experiments on the basis of the prior art according to the concept of the present invention shall fall within the protection scope determined by the claims.
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