CN110600556A - Capacity-expanding film coating process for polycrystalline solar cell antireflection film - Google Patents
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Abstract
本发明提供了一种多晶太阳电池减反射膜的扩容镀膜工艺，属于电池片加工技术领域。它解决了现有电池片加工效率慢、色差大的等技术问题。一种多晶太阳电池减反射膜的扩容镀膜工艺，其特征在于，包括以下步骤：S1、对镀膜腔室内充入N2进行吹扫，将电池片制绒后放置石墨舟并置于镀膜腔室中进行加热；S2、对镀膜腔室抽空并形成真空状态；S3、对镀膜腔室内通入NH3、SiH4，启动射频发射器，功率为11250w，使其电池片表面形成第一层膜；S4、关闭射频发射器，并持续通入NH3、SiH4，镀膜腔室内压力提高至1600Pa，使其电池片的第一层膜表面形成第二层膜；S5、抽空；S6、出舟。本发明具有加工效率高、色差小的优点。
The invention provides a capacity expansion coating process of a polycrystalline solar cell anti-reflection film, which belongs to the technical field of cell processing. It solves the technical problems of slow processing efficiency and large chromatic aberration of existing cells. A capacity expansion coating process of polycrystalline solar cell anti-reflection film, which is characterized by comprising the following steps: S1, filling a coating chamber with N2 for purging, and placing a graphite boat after texturing the cell and placing it in the coating chamber Heating in the chamber; S2, evacuating the coating chamber and forming a vacuum state; S3, passing NH 3 and SiH 4 into the coating chamber, and starting the radio frequency transmitter with a power of 11250w to form the first layer of film on the surface of the cell. ; S4, turn off the radio frequency transmitter, and continue to pass in NH 3 and SiH 4 , the pressure in the coating chamber is increased to 1600Pa, so that the second layer of film is formed on the surface of the first film of the cell; S5, evacuated; S6, out of the boat . The invention has the advantages of high processing efficiency and small color difference.
Description
技术领域technical field
本发明属于电池片加工技术领域，特别是一种多晶太阳电池减反射膜的扩容镀膜工艺。The invention belongs to the technical field of cell processing, in particular to a capacity-expanding coating process for an anti-reflection film of a polycrystalline solar cell.
背景技术Background technique
光伏发电由于其成本太高，仍然无法取代传统能源，降低成本、提高太阳电池转换效率是光伏行业可以逐渐取代传统能源的关键。目前市场上光伏发电产品仍以多晶太阳电池组件为主，降低多晶太阳电池成本、提高多晶电池转换效率是降本关键。Photovoltaic power generation is still unable to replace traditional energy due to its high cost. Reducing costs and improving solar cell conversion efficiency are the keys for the photovoltaic industry to gradually replace traditional energy. At present, the photovoltaic power generation products on the market are still dominated by polycrystalline solar cell modules. Reducing the cost of polycrystalline solar cells and improving the conversion efficiency of polycrystalline cells are the keys to cost reduction.
多晶硅采用氢氟酸酸和硝酸体系制绒制备微米级蠕虫状结构，制绒后多晶硅片表面反射率控制在22-24％左右。The polysilicon is textured with hydrofluoric acid and nitric acid to prepare a micron-scale worm-like structure, and the surface reflectance of the polysilicon wafer after textured is controlled at about 22-24%.
但是，随着光伏发电，其电池片的生产加工也难以突破限制，传统的电池片镀膜工艺中，每舟240片，在一天总体加工镀膜的数量上较少，跟不上产量的需求，且传统镀膜工艺中，容易造成电池片颜色产生色差，报废率较高。However, with photovoltaic power generation, the production and processing of its cells is also difficult to break through the restrictions. In the traditional cell coating process, 240 cells per boat are processed in a day. In the traditional coating process, it is easy to cause chromatic aberration in the color of the cells, and the scrap rate is high.
发明内容SUMMARY OF THE INVENTION
本发明的目的是针对现有的技术存在上述问题，提出了一种多晶太阳电池减反射膜的扩容镀膜工艺，解决了加工效率慢、色差大的问题。The purpose of the present invention is to solve the above-mentioned problems in the existing technology, and propose a capacity expansion coating process for the anti-reflection film of polycrystalline solar cells, which solves the problems of slow processing efficiency and large color difference.
本发明的目的可通过下列技术方案来实现：The object of the present invention can be realized through the following technical solutions:
一种多晶太阳电池减反射膜的扩容镀膜工艺，其特征在于，包括以下步骤：A capacity expansion coating process of polycrystalline solar cell anti-reflection film is characterized in that, comprising the following steps:
S1、对镀膜腔室的五个温区进行升温，然后对镀膜腔室内充入N2进行吹扫，将电池片制绒后放置石墨舟并置于镀膜腔室中进行加热，对电池片加热60s；S1. Raise the temperature in the five temperature zones of the coating chamber, then fill the coating chamber with N 2 for purging, place the cell sheets in a graphite boat after texturing and place them in the coating chamber for heating, and heat the cell sheets 60s;
S2、使镀膜腔室保持常压，将温度回调至工艺所需温度后并持续加热500s，保持五个温区温度，然后对镀膜腔室抽空并形成真空状态；S2. Keep the coating chamber at normal pressure, adjust the temperature to the temperature required by the process and continue to heat for 500s, keep the temperature in five temperature zones, and then evacuate the coating chamber and form a vacuum state;
S3、对镀膜腔室内通入NH3，NH3流量为7000sccm，在300s后对镀膜腔室内压力增加，使其镀膜腔室压强提高至310Pa，持续10s，然后对镀膜腔室内同时通入NH3、SiH4，通入SiH4流量为1600sccm,通入NH3流量为7000sccm，在NH3、SiH4通入20s后启动射频发射器，功率为11250w，此时，镀膜腔室内压力为1600Pa，使其电池片表面形成第一层膜；S3. Pass NH 3 into the coating chamber, and the flow rate of NH 3 is 7000sccm. After 300s, the pressure in the coating chamber is increased, so that the pressure of the coating chamber is increased to 310Pa for 10s, and then NH 3 is fed into the coating chamber at the same time. , SiH 4 , the flow rate of SiH 4 is 1600sccm, the flow rate of NH 3 is 7000sccm, after NH 3 and SiH 4 are passed in for 20s, the radio frequency transmitter is started, and the power is 11250w. At this time, the pressure in the coating chamber is 1600Pa, so that The first layer of film is formed on the surface of the cell;
S4、关闭射频发射器，并持续通入NH3、SiH4，通入NH3流量为8500sccm，通入SiH4流量为800sccm,为第二层膜做稳压准备，持续时间640s，镀膜腔室内压力提高至1600Pa，其中，在通入NH3、SiH410s后，启动射频发射器，功率为13250w，使其电池片的第一层膜表面形成第二层膜；S4. Turn off the radio frequency transmitter, and continue to feed NH 3 and SiH 4 , the flow rate of NH 3 is 8500sccm, and the flow rate of SiH 4 is 800sccm, to prepare for voltage stabilization for the second layer of film, the duration is 640s, in the coating chamber The pressure was increased to 1600Pa, wherein, after NH 3 and SiH 4 were fed in for 10s, the radio frequency transmitter was started, and the power was 13250w, so that the surface of the first layer of the cell formed a second layer of film;
S5、抽空，并对镀膜腔室充N2吹扫；S5, evacuating, and filling the coating chamber with N 2 to purge;
S6、出舟。S6, get out of the boat.
氨硅比例为硅烷和氨气的比例。The ammonia-silicon ratio is the ratio of silane and ammonia.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，所述的五个温区温度沿预设方向依次为575℃、550℃、565℃、570℃、510℃。In the above-mentioned expansion coating process of the anti-reflection film for polycrystalline solar cells, the temperatures of the five temperature zones are 575°C, 550°C, 565°C, 570°C, and 510°C in sequence along the preset direction.
575℃为镀膜腔室进口温度。工艺所需温为575℃、550℃、565℃、570℃、510℃。575°C is the inlet temperature of the coating chamber. The temperature required for the process is 575°C, 550°C, 565°C, 570°C, and 510°C.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，所述的石墨舟舟页数量为27页，相邻舟页之间距离为1.7cm。In the above-mentioned expansion coating process of the anti-reflection film for polycrystalline solar cells, the number of the graphite boat pages is 27, and the distance between adjacent boat pages is 1.7 cm.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，所述的第一层膜厚度为30μm，所述的第二层膜厚度为50μm。In the above-mentioned capacity expansion coating process of the anti-reflection film for polycrystalline solar cells, the thickness of the first layer is 30 μm, and the thickness of the second layer is 50 μm.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，所述的第一层膜与第二层膜均为氮化硅膜。In the above-mentioned expansion coating process of the anti-reflection film for polycrystalline solar cells, the first layer film and the second layer film are both silicon nitride films.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，对镀膜腔室增压时，对镀膜腔室内充入N2进行增压。In the above-mentioned expansion coating process of the anti-reflection film of the polycrystalline solar cell, when the coating chamber is pressurized, N 2 is charged into the coating chamber for pressurization.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，在镀第一层膜时，镀膜腔室内的氨硅比例4.375：1。In the above-mentioned capacity expansion coating process of the anti-reflection film for polycrystalline solar cells, when the first layer of film is coated, the ratio of ammonia to silicon in the coating chamber is 4.375:1.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，在镀第二层膜时，镀膜腔室内的氨硅比例10.625：1。In the above-mentioned expansion coating process of the anti-reflection film of the polycrystalline solar cell, when the second film is coated, the ratio of ammonia to silicon in the coating chamber is 10.625:1.
在上述多晶太阳电池减反射膜的扩容镀膜工艺中，在镀第一层膜时氨硅总量和在镀第二层膜时第二层膜氨硅总量比例为1：2.248。以上为标准气压下的体积比。In the above-mentioned capacity expansion coating process of the anti-reflection film for polycrystalline solar cells, the ratio of the total amount of ammonia silicon in the first layer film to the total amount of ammonia silicon in the second layer film when the second layer film is applied is 1:2.248. The above is the volume ratio under standard air pressure.
与现有技术相比，本发明具有以下优点：Compared with the prior art, the present invention has the following advantages:
1、从常规的一舟240pcs扩产到一舟460pcs，加长石墨舟的长度，将原有的6格舟页改为8格舟页，对电极杆进一步的改短，使石墨舟可以尽量的放于镀膜腔室的中央位置，方便更好的控制温度，并根据实际情况对每个温区进行了调整，以适应大舟的需求。1. Expand the production from the conventional 240pcs per boat to 460pcs per boat, lengthen the length of the graphite boat, change the original 6 grid boat page to 8 grid boat page, and further shorten the electrode rod, so that the graphite boat can be as large as possible. It is placed in the central position of the coating chamber to facilitate better temperature control, and each temperature zone has been adjusted according to the actual situation to meet the needs of the boat.
2、改变镀膜时的气体氛围，提高射频功率，缩短工艺时间，达到增产目的。2. Change the gas atmosphere during coating, increase the RF power, shorten the process time, and achieve the purpose of increasing production.
3、通过温度与气体氛围调整，降低电池片表面颜色色差问题，降低报废率。3. Through the adjustment of temperature and gas atmosphere, the problem of color difference on the surface of the cell is reduced, and the scrap rate is reduced.
附图说明Description of drawings
图1是本发明的流程图。Figure 1 is a flow chart of the present invention.
具体实施方式Detailed ways
以下是本发明的具体实施例并结合附图，对本发明的技术方案作进一步的描述，但本发明并不限于这些实施例。The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.
如图1所示，一种多晶太阳电池减反射膜的扩容镀膜工艺，其特征在于，包括以下步骤：As shown in FIG. 1, a capacity expansion coating process of polycrystalline solar cell anti-reflection film is characterized in that, it includes the following steps:
S1、对镀膜腔室的五个温区进行升温，然后对镀膜腔室内充入N2进行吹扫，将电池片制绒后放置石墨舟并置于镀膜腔室中进行加热，对电池片加热60s；S1. Raise the temperature in the five temperature zones of the coating chamber, then fill the coating chamber with N 2 for purging, place the cell sheets in a graphite boat after texturing and place them in the coating chamber for heating, and heat the cell sheets 60s;
S2、使镀膜腔室保持常压，将温度回调至工艺所需温度后并持续加热500s，保持五个温区温度，然后对镀膜腔室抽空并形成真空状态；S2. Keep the coating chamber at normal pressure, adjust the temperature to the temperature required by the process and continue to heat for 500s, keep the temperature in five temperature zones, and then evacuate the coating chamber and form a vacuum state;
S3、对镀膜腔室内通入NH3，NH3流量为7000sccm，在300s后对镀膜腔室内压力增加，使其镀膜腔室压强提高至310Pa，持续10s，然后对镀膜腔室内同时通入NH3、SiH4，通入SiH4流量为1600sccm,通入NH3流量为7000sccm，在NH3、SiH4通入20s后启动射频发射器，功率为11250w，此时，镀膜腔室内压力为1600Pa，使其电池片表面形成第一层膜；S3. Pass NH 3 into the coating chamber, and the flow rate of NH 3 is 7000sccm. After 300s, the pressure in the coating chamber is increased, so that the pressure of the coating chamber is increased to 310Pa for 10s, and then NH 3 is fed into the coating chamber at the same time. , SiH 4 , the flow rate of SiH 4 is 1600sccm, the flow rate of NH 3 is 7000sccm, after NH 3 and SiH 4 are passed in for 20s, the radio frequency transmitter is started, and the power is 11250w. At this time, the pressure in the coating chamber is 1600Pa, so that The first layer of film is formed on the surface of the cell;
S4、关闭射频发射器，并持续通入NH3、SiH4，通入NH3流量为8500sccm，通入SiH4流量为800sccm,为第二层膜做稳压准备，持续时间640s，镀膜腔室内压力提高至1600Pa，其中，在通入NH3、SiH410s后，启动射频发射器，功率为13250w，使其电池片的第一层膜表面形成第二层膜；S4. Turn off the radio frequency transmitter, and continue to feed NH 3 and SiH 4 , the flow rate of NH 3 is 8500sccm, and the flow rate of SiH 4 is 800sccm, to prepare for voltage stabilization for the second layer of film, the duration is 640s, in the coating chamber The pressure was increased to 1600Pa, wherein, after NH 3 and SiH 4 were fed in for 10s, the radio frequency transmitter was started, and the power was 13250w, so that the surface of the first layer of the cell formed a second layer of film;
S5、抽空，并对镀膜腔室充N2吹扫；S5, evacuating, and filling the coating chamber with N 2 to purge;
S6、出舟。S6, get out of the boat.
氨硅比例为硅烷和氨气的比例。The ammonia-silicon ratio is the ratio of silane and ammonia.
具体地，五个温区温度沿预设方向依次为575℃、550℃、565℃、570℃、510℃。Specifically, the temperatures of the five temperature zones are 575°C, 550°C, 565°C, 570°C, and 510°C in sequence along the preset direction.
575℃为镀膜腔室进口温度。工艺所需温为575℃、550℃、565℃、570℃、510℃。575°C is the inlet temperature of the coating chamber. The temperature required for the process is 575°C, 550°C, 565°C, 570°C, and 510°C.
具体地，石墨舟舟页数量为27页，相邻舟页之间距离为1.7cm。Specifically, the number of graphite boat pages is 27 pages, and the distance between adjacent boat pages is 1.7 cm.
具体地，第一层膜厚度为30μm，第二层膜厚度为50μm。Specifically, the thickness of the first layer is 30 μm, and the thickness of the second layer is 50 μm.
具体地，第一层膜与第二层膜均为氮化硅膜。Specifically, the first layer film and the second layer film are both silicon nitride films.
具体地，对镀膜腔室增压时，对镀膜腔室内充入N2进行增压。Specifically, when the coating chamber is pressurized, N 2 is charged into the coating chamber to pressurize.
具体地，在镀第一层膜时，镀膜腔室内的氨硅比例4.375：1。Specifically, when the first film is coated, the ratio of ammonia to silicon in the coating chamber is 4.375:1.
具体地，在镀第二层膜时，镀膜腔室内的氨硅比例10.625：1。Specifically, when plating the second film, the ratio of ammonia to silicon in the coating chamber is 10.625:1.
具体地，在镀第一层膜时氨硅总量和在镀第二层膜时第二层膜氨硅总量比例为1：2.248。Specifically, the ratio of the total amount of ammonia silicon in the first layer of film and the total amount of ammonia and silicon in the second layer of film in the second layer of film is 1:2.248.
以上部件均为通用标准件或本技术领域人员知晓的部件，其结构和原理都为本技术人员均可通过技术手册得知或通过常规实验方法获知。The above components are all common standard components or components known to those skilled in the art, and their structures and principles are known to those skilled in the art through technical manuals or through routine experimental methods.
本文中所描述的具体实施例仅仅是对本发明精神作举例说明。本发明所属技术领域的技术人员可以对所描述的具体实施例做各种各样的修改或补充或采用类似的方式替代，但并不会偏离本发明的精神或者超越所附权利要求书所定义的范围。The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which the present invention pertains can make various modifications or additions to the described specific embodiments or substitute in similar manners, but will not deviate from the spirit of the present invention or go beyond the definitions of the appended claims range.
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