CN110568581A - A high-precision motorized mirror holder - Google Patents

Abstract

A high-precision electric mirror frame relates to an electric mirror frame. The drive chain of the existing mirror frame is long, and the pitch and yaw motions of the mirror frame are driven by a separate drive mechanism. The number of supports is large, resulting in limited precision, and the geometric size of the mirror frame itself is large, which is difficult to use. Where space is limited. The present invention comprises a mirror frame, a mirror frame back plate, a mirror frame platform, a first ball hinge pair, a second ball joint hinge pair and two drive modules, the plate surface of the mirror frame and the plate surface of the mirror frame back plate They are arranged side by side, and the two are connected by the first ball hinge pair and the second ball hinge pair arranged up and down. The mirror frame platform is vertically installed on the lower end of the outer surface of the mirror frame back plate. They are arranged side by side on both sides of the lower plate of the mirror frame platform, and the two drive modules are respectively vertically passed through the first round hole on the back plate of the mirror frame and connected to the inner plate of the mirror frame. The invention is mainly used for adjusting the two-dimensional orthogonal angle of the mirror.

Description

A high-precision motorized mirror holder

technical field

The invention relates to an electric mirror frame, in particular to a high-precision electric mirror frame.

Background technique

In the high-power laser transmission scenario, the main design function of the large-aperture mirror (approximately 500mm in diameter) is to complete the collimation and guidance of the laser and the near-field adjustment of the beam. It is the final adjustment element before the beam enters the terminal assembly. And the stability will directly affect the final shooting quality, and the angle error of 1μrad of the mirror will have an impact of more than 10μm on the final shooting accuracy; therefore, a motorized mirror with high installation accuracy and adjustment accuracy and good stability is developed The frame is very necessary and will help to improve the accuracy and reliability of laser targeting.

The reflector frame currently in service is designed and developed by Harbin Institute of Technology. It consists of six parts: the tightening device and the micro-drive device; the reflector is fixed on the transition frame by means of peripheral support, the transition frame is installed on the inner frame through a quick positioning device, the inner frame rotates around the outer frame, and the outer frame rotates around the bracket to realize reflection The two-dimensional orthogonal adjustment of the mirror, the mirror frame has the problem of long transmission chain and many supports, resulting in limited accuracy, the adjustment range is ±15mrad, and the single-step adjustment accuracy is 1.5μrad, and the geometric size of the mirror frame itself is relatively small. Large and difficult to use where space is limited.

Contents of the invention

The technical problem to be solved in the present invention is: the drive chain of the existing reflector frame is relatively long, which is an orthogonal structure, and the transmission error is large. Many, resulting in limited accuracy, the adjustment range is ±15mrad, and the single-step adjustment accuracy is 1.5μrad, and the geometric size of the mirror frame itself is large, which is difficult to use in places with limited space.

The technical scheme that the present invention adopts for solving the problems of the technologies described above is:

A high-precision motorized mirror frame includes a mirror frame 1, a mirror frame back plate 2, a mirror frame platform 5, a first ball hinge pair 4, a second ball hinge pair 6 and two drive modules 3, and the mirror frame The plate surface of 1 and the plate surface of the mirror frame back plate 2 are vertically arranged side by side, and the two are connected by the first ball hinge pair 4 and the second ball hinge pair 6 arranged up and down oppositely, the first ball joint The hinge pair 4 is at the middle position of the upper end of the mirror frame 1 or the mirror frame back plate 2, the second ball hinge pair 6 is at the middle position of the lower end of the mirror frame 1 or the mirror frame back plate 2, and the mirror frame platform 5 is installed vertically on the mirror frame back plate. At the lower end of the outer surface of the plate 2, two drive modules 3 are arranged side by side on both sides of the lower plate surface of the mirror frame platform 5, and the two drive modules 3 vertically pass through the first circular hole on the mirror frame back plate 2 and the reflector respectively. The inner panels of the mirror frame 1 are connected to each other.

Further, the high-precision motorized mirror frame also includes two length gauges 7 and two length gauge stop seats 8, and the two length gauge stop seats 8 are fixed on the lower end of the inner plate surface of the mirror frame 1, Two length gauges 7 are respectively arranged on the lower sides of the two drive modules 3 , and each length gauge 7 passes through the second round hole on the mirror frame back plate 2 and is connected to the length gauge stopper 8 respectively.

Further, each drive module 3 includes a servo motor 3-1, a reducer 3-2, a coupling 3-4, a bearing housing 3-5, a lead screw 3-6, a lead screw nut 3-7, a guide rail 3- 3. Guide rail slider 3-8, flexible hinge 3-10 and flexible hinge connection seat 3-11, the output shaft of the servo motor 3-1 is connected to the reducer 3-2, and the output shaft of the reducer 3-2 passes through the joint The shaft device 3-4 is connected with one end of the leading screw 3-6, and the outer cover of the leading screw 3-6 is provided with a bearing and a bearing seat 3-5, and the leading screw nut 3-7 is screwed on the leading screw 3-6, and the leading screw The nut 3-7 is fixedly connected with one end of the guide rail slider 3-8, the other end of the guide rail slider 3-8 is fixedly connected with one end of the flexible hinge 3-10, and the flexible hinge connecting seat 3-11 is fixedly mounted on the reflector frame 1 The other end of the flexible hinge 3-10 is fixedly connected to the flexible hinge connecting seat 3-11 on the inner side plate surface of the mirror frame platform 5, and the guide rail 3-3 is fixedly connected to the lower plate surface of the mirror frame platform 5, and the guide rail slider 3-8 is connected to the guide rail 3-3 Swipe to connect.

Further, the first ball joint pair 4 includes a first ball joint seat 4-1, a first ball joint seat 4-2 and a first ball joint groove 4-3, the first ball joint seat 4-1 is fixed on the inner surface of the mirror frame 1, the first ball hinge groove 4-3 is fixed on the inner surface of the mirror frame back plate 2, and one end of the first ball hinge 4-2 It is fixedly connected with the first ball joint seat 4-1, and the other end of the first ball joint 4-2 is rotatably connected in the first ball joint groove 4-3.

Further, the second ball joint pair 6 includes a second ball joint seat 6-1, a second ball joint seat 6-2 and a second ball joint groove 6-3, the second ball joint seat 6-1 is fixedly installed on the inner board surface of the mirror frame 1, the second ball hinge groove 6-3 is fixed on the inner board surface of the mirror frame back plate 2, and one end of the second ball hinge 6-2 It is fixedly connected with the second ball joint seat 6-1, and the other end of the second ball joint hinge 6-2 is rotatably connected in the second ball joint hinge groove 6-3;

The second ball hinge groove 6-3 has a through hole 6-3-1 along the axis direction of the groove, and the inner diameter of the groove along the vertical direction of the groove is larger than that of the second ball hinge 6-3. 2 outer diameters.

Further, the flexible hinge 3-10 is a polygonal prism, a connection part is provided at both ends of the prism, and a through hole 3-10-2 is opened along the axial direction of the prism, and on the side of the prism A plurality of rows of slit groups 3-10-1 penetrating through the through holes are evenly formed on the wall along the axial direction.

The beneficial effect that the present invention produces compared with prior art is:

1. The two driving chains in the present invention are parallel structures, the driving chains are short and the precision is high;

2. The pitching and yaw motions of the reflector frame in the present invention are respectively realized by the synchronous movement of two drive modules. When the modules rotate in reverse synchronously, the mirror frame performs yaw movement, and the pitch angle and yaw angle of the mirror are measured by the length meter and the control system. The step resolution is about 0.3 microradians, with higher precision, and Installed directly on the reflector frame, the overall occupied geometric size is smaller, which is suitable for more space.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the present invention;

Fig. 2 is the top view of the present invention;

Fig. 3 is a structural schematic diagram of the drive module;

Fig. 4 is a sectional view of the flexible hinge and the length gauge;

Fig. 5 is a side view of the present invention;

Fig. 6 is the longitudinal sectional view of A-A place in Fig. 1;

Fig. 7 is the partial enlarged view of I place among Fig. 6;

Fig. 8 is a structural schematic diagram of a flexible hinge;

Figure 9 is a half-sectional view of the flexible hinge;

Fig. 10 is a schematic diagram of the reflector installed on the reflector frame.

Detailed ways

The technical scheme of the present invention will be further described below in conjunction with the accompanying drawings and through specific embodiments:

Specific Embodiment 1: As shown in Figure 1 and Figure 2, in this embodiment, a high-precision electric mirror frame includes a mirror frame 1, a mirror frame back plate 2, a mirror frame platform 5, and a first ball hinge pair 4. The second ball hinge pair 6 and the two drive modules 3, the plate surface of the mirror frame 1 and the plate surface of the mirror frame back plate 2 are vertically arranged side by side, and the mirror frame 1 is arranged relative to the mirror frame back plate 2 The side plate surface of the mirror frame is set as the inner surface, and the side plate surface of the mirror frame back plate 2 relative to the mirror frame 1 is set as the inner surface, and the mirror frame 1 and the mirror frame back plate 2 are set through the first vertically opposite A ball hinge pair 4 is connected to a second ball hinge pair 6, the first ball hinge pair 4 is located in the middle of the upper end of the mirror frame 1 or the mirror frame back plate 2, and the second ball hinge pair 6 is located in the mirror frame 1 Or the middle position of the lower end of the mirror frame back plate 2, the mirror frame platform 5 is vertically installed on the lower end of the outer surface of the mirror frame back plate 2, two drive modules 3 are arranged side by side on both sides of the lower plate surface of the mirror frame platform 5, and two The driving modules 3 vertically pass through the first circular holes on the back plate 2 of the mirror frame and are respectively connected to the inner surface of the mirror frame 1 .

As shown in Figure 10, reflector 9 is installed on the outer plate surface of reflector frame 1;

As shown in Figure 5, under the joint action of the two drive modules 3 and the first ball joint 4 and the second ball joint 6, the electronic mirror frame can realize The connecting line direction (X-axis direction) of the ball-joint hinge pair 6 is rotated at a small angle. As shown in FIG. Swing at a small angle, and then adjust the pitch attitude and yaw attitude of the reflector 9, the specific implementation is as follows:

When the two drive modules rotate in the same direction synchronously, the guide rail sliders in the two drive modules move forward synchronously, and the deformation of the flexible hinge can realize that the mirror frame 1 can move along the horizontal line (Z axis) where the first ball joint 4 is located. direction) as the axis to make a small angle of swing; when the two drive modules rotate in different directions synchronously, the guide rail sliders in the two drive modules move in different directions, and the deformation of the flexible hinge can realize that the mirror frame 1 moves along the first ball head The direction (X-axis direction) of the connecting line between the hinge pair 4 and the second ball hinge pair 6 is the axis that rotates at a small angle.

Under the synchronous motion of the two drive modules, the mirror frame realizes the pitch motion and the yaw motion respectively, which makes the mirror frame more accurate. The original pitch motion of the mirror frame is driven by a drive module, and the yaw motion is realized by Another drive module is used for drive implementation, and the accuracy cannot meet the requirements.

Specific embodiment two: as shown in Fig. 1, Fig. 4 and Fig. 6, in the present embodiment, described a kind of high-precision electric mirror frame also includes two length gauges 7 and two length gauge stoppers 8, two A length meter block seat 8 is fixedly mounted on the lower end of the inner plate surface of the mirror frame 1, and two length meters 7 are respectively arranged on the lower sides of the two drive modules 3, and each length meter 7 passes through the mirror frame back plate respectively. The second round hole on the 2 is connected with the length gauge stop 8, wherein the probe of the length gauge is connected with the length gauge stop, when the two drive modules drive the mirror frame to produce pitch or yaw motion, the two length gauges The axis displacement of the connection between the mirror frame and the flexible hinge can be measured, and the control system can obtain the swing angle of the mirror frame through the distance ratio between the length gauge and the rotation axis (X-axis or Z-axis), and then obtain the attitude of the mirror frame. Then, the closed-loop control is performed on the drive module. The present invention uses the drive module and the length gauge to make the measurement of the pitch angle and yaw angle of the mirror frame more accurate, and the step resolution is about 0.3 microradians.

Other composition and connection methods are the same as those in Embodiment 1.

Specific embodiment three: as shown in Figure 1, Figure 3 and Figure 4, in this embodiment, each drive module 3 includes a servo motor 3-1, a reducer 3-2, a shaft coupling 3-4, and a bearing housing 3 -5, leading screw 3-6, leading screw nut 3-7, guide rail 3-3, guide rail slider 3-8, flexible hinge 3-10 and flexible hinge connection seat 3-11, the output shaft of servo motor 3-1 Connected to the reducer 3-2, the output shaft of the reducer 3-2 is connected to one end of the lead screw 3-6 through the coupling 3-4, the lead screw 3-6 is covered with a bearing and a bearing seat 3-5, Bearing housing 3-5 is provided with two ball bearings arranged side by side, in order to support the whole gravity of leading screw 3-6, leading screw nut 3-7 is screwed on the leading screw 3-6, and leading screw nut 3- 7 is fixedly connected with one end of the guide rail slider 3-8, and the other end of the guide rail slider 3-8 is fixedly connected with one end of the flexible hinge 3-10, and the flexible hinge connecting seat 3-11 is fixedly mounted on the inner side plate of the reflector frame 1 On the surface, the other end of the flexible hinge 3-10 is fixedly connected to the flexible hinge connecting seat 3-11, the guide rail 3-3 is fixedly connected to the lower surface of the mirror frame platform 5, and the guide rail slider 3-8 and the guide rail 3-3 Sliding connection, wherein the guide rail slider 3-8 is provided with a through hole along the axis direction, and the other end of the lead screw 3-6 is in the through hole of the guide rail slider 3-8.

Each of the drive modules 3 also includes a photoelectric switch baffle and two photoelectric switches 3-9, the photoelectric switch baffle is arranged on the guide rail slider 3-8, and the two photoelectric switches 3-9 are respectively arranged on the guide rail At both ends, the rotation angle output by the servo motor 3-1 is transformed into the translational displacement of the guide rail slider through the transmission of the reducer 3-2, coupling 3-4, lead screw 3-6 and lead screw nut 3-7 , its accuracy can reach within 20nm, the limit movement position of the guide rail slider is limited by the photoelectric switch 3-9 and the photoelectric switch baffle.

Usually, the servo motor is used to realize accurate torque output. The present invention uses the servo motor to realize the precise locking of the position of the slide block, prevents the phenomenon of displacement drift under gravity, inertia and other factors, and makes the motion control of the mirror frame achieve higher precision.

Other composition and connection methods are the same as those in Embodiment 1.

Embodiment 4: As shown in FIG. 6 , in this embodiment, the first ball joint pair 4 includes a first ball joint base 4-1, a first ball joint 4-2 and a first ball joint Hinge groove 4-3, the first ball hinge seat 4-1 is fixed on the inner plate surface of the mirror frame 1, the first ball hinge groove 4-3 is fixed on the inner plate of the mirror frame back plate 2 On the surface, one end of the first ball joint 4-2 is fixedly connected to the first ball joint seat 4-1, and the other end of the first ball joint 4-2 is rotatably connected to the first ball joint groove 4-3. Inside.

The first ball hinge groove 4-3 is a conventional groove, and the first ball hinge pair 4 has three rotational degrees of freedom.

Other composition and connection methods are the same as those in Embodiment 1.

Fifth specific embodiment: As shown in Figure 6 and Figure 7, in this embodiment, the second ball joint pair 6 includes a second ball joint seat 6-1, a second ball joint 6-2 and a second ball joint seat 6-1. Two ball hinge grooves 6-3, the second ball hinge seat 6-1 is fixed on the inner plate surface of the mirror frame 1, and the second ball hinge groove 6-3 is fixed on the mirror frame back plate 2 One end of the second ball joint 6-2 is fixedly connected to the second ball joint seat 6-1, and the other end of the second ball joint 6-2 is rotatably connected to the groove of the second ball joint within 6-3;

The second ball hinge groove 6-3 has a through hole 6-3-1 along the axis direction of the groove, and the inner diameter of the groove along the vertical direction of the groove is larger than that of the second ball hinge 6-3. 2, and the range of the second ball joint 6-2 moving up and down is relatively small, the second ball joint 6 has two translational degrees of freedom, that is, along the axis of the second ball joint groove 6-3 direction has one translational degree of freedom, along the vertical direction of the second ball joint hinge groove 6-3 has one translational degree of freedom, and the second ball joint joint 6 also has three rotational degrees of freedom, through the second ball joint The two translational degrees of freedom and three rotational degrees of freedom of the hinge pair 6 realize the pitching attitude of the mirror frame.

Other composition and connection methods are the same as those in Embodiment 1.

Specific embodiment six: As shown in Figure 8 and Figure 9, in this embodiment, the flexible hinge 3-10 is a polygonal prism, and two ends of the prism are respectively provided with a connecting part, one of which is used for Connect the guide rail slider, and the other connecting part is used to connect the flexible hinge connection seat. There are through holes 3-10-2 along the axial direction of the column, and multiple rows are evenly opened on the side wall of the column along the axial direction. Slit group 3-10-1 for through holes.

Wherein each row of slit groups includes two oppositely arranged slits, the first and last ends of the slits are respectively arranged on the two opposite side walls of the flexible hinge 3-10, and there is a gap between the first and last ends of the two oppositely arranged slits. There is a connection, when the servo motor drives the guide rail slider to move forward in a straight line, the mirror frame performs a pitching motion along the Z axis (the tail end of the mirror frame produces an arc-shaped movement), and the flexible hinge connected to the mirror frame requires Bending can only be realized. The bending angle is about plus or minus 0.86 degrees, and the angle range is very small. The deformation of the flexible hinge is realized through the extrusion and expansion of multiple rows of slits (the flexible hinge itself has three degrees of freedom). The device utilizes its bending degrees of freedom in two directions to realize deformation, and the flexible hinge itself has high axial stiffness, thereby realizing the conversion of the linear motion of the drive module into the pitch motion and yaw motion of the mirror frame.

Other compositions and connection methods are the same as any one of the specific embodiments 1 to 5.

Claims (6)

1. A high-precision electric mirror frame is characterized in that: it includes a mirror frame (1), a mirror frame backboard (2), a mirror frame platform (5), the first ball hinge pair (4), the first Two ball joint hinge pairs (6) and two drive modules (3), the plate surface of the reflector frame (1) and the plate surface of the mirror frame back plate (2) are vertically arranged side by side, and the two are passed up and down The opposite first ball joint (4) is connected to the second ball joint (6), and the first ball joint (4) is in the middle of the upper end of the mirror frame (1) or the mirror frame back plate (2) Position, the second ball hinge pair (6) is in the middle position of the lower end of the mirror frame (1) or the mirror frame backboard (2), and the mirror frame platform (5) is vertically installed on the outer surface of the mirror frame backboard (2) At the lower end, two drive modules (3) are arranged side by side on both sides of the lower plate surface of the mirror frame platform (5), and the two drive modules (3) vertically pass through the first round hole on the mirror frame back plate (2) respectively It is connected with the inner board surface of the reflector frame (1). 2. A kind of high-precision electric mirror holder according to claim 1, characterized in that: described a kind of high-precision electric mirror holder also includes two length gauges (7) and two length gauge stop seats ( 8), two length meter stoppers (8) are fixedly mounted on the lower end of the inner plate surface of the reflector frame (1), and the two length meters (7) are respectively arranged on the lower sides of the two drive modules (3), and Each length meter (7) passes through the second round hole on the mirror frame backboard (2) respectively and is connected with the length meter stopper (8). 3. A kind of high-precision electric mirror holder according to claim 1, characterized in that: each drive module (3) comprises a servo motor (3-1), a speed reducer (3-2), a coupling ( 3-4), bearing housing (3-5), lead screw (3-6), lead screw nut (3-7), guide rail (3-3), guide rail slider (3-8), flexible hinge (3 -10) and the flexible hinge connection seat (3-11), the output shaft of the servo motor (3-1) is connected on the speed reducer (3-2), and the output shaft of the speed reducer (3-2) passes through the coupling ( 3-4) Connect with one end of the leading screw (3-6), the outer cover of the leading screw (3-6) is equipped with bearings and bearing housings (3-5), and the leading screw nut (3-7) is screwed on the leading screw ( 3-6), and the lead screw nut (3-7) is fixedly connected with one end of the guide rail slider (3-8), and the other end of the guide rail slider (3-8) is connected with one end of the flexible hinge (3-10) Fixed connection, the flexible hinge connection seat (3-11) is fixed on the inner side plate surface of the reflector frame (1), and the other end of the flexible hinge (3-10) is fixedly connected with the flexible hinge connection seat (3-11), The guide rail (3-3) is fixedly connected to the lower plate surface of the mirror frame platform (5), and the guide rail slider (3-8) is slidably connected with the guide rail (3-3). 4. A high-precision motorized mirror holder according to claim 1, characterized in that: said first ball hinge pair (4) includes a first ball hinge seat (4-1), a first ball hinge The head hinge (4-2) and the first ball hinge groove (4-3), the first ball hinge seat (4-1) is fixed on the inner plate surface of the reflector frame (1), the first ball The head hinge groove (4-3) is fixed on the inner surface of the mirror frame backboard (2), and one end of the first ball joint hinge (4-2) is fixed to the first ball joint seat (4-1). Connected, the other end of the first ball joint (4-2) is rotatably connected in the first ball joint groove (4-3). 5. A high-precision motorized mirror holder according to claim 1, characterized in that: said second ball hinge pair (6) includes a second ball hinge seat (6-1), a second ball hinge The head hinge (6-2) and the second ball hinge groove (6-3), the second ball hinge seat (6-1) is fixed on the inner plate surface of the reflector frame (1), and the second ball The head hinge groove (6-3) is fixed on the inner surface of the mirror frame backboard (2), and one end of the second ball joint hinge (6-2) is fixed to the second ball joint seat (6-1). Connected, the other end of the second ball joint (6-2) is rotatably connected in the second ball joint groove (6-3); The second ball hinge groove (6-3) has a through hole (6-3-1) along the axis direction of the groove, and the inner diameter of the groove along the vertical direction of the groove is larger than that of the second ball joint The outer diameter of the head hinge (6-2). 6. A high-precision motorized mirror holder according to any one of claims 1 to 5, characterized in that: the flexible hinge (3-10) is a polygonal prism, and the two ends of the prism are respectively A connection part is provided, and a through hole (3-10-2) is opened along the axial direction of the cylinder, and a plurality of rows of slit groups (3-10-2) penetrating through the through hole are evenly formed on the side wall of the cylinder along the axial direction. -10-1).