CN110567303A - Temperature-equalizing plate structure with convex part and manufacturing method thereof - Google Patents

Abstract

The present invention provides a temperature equalizing plate structure with a convex portion and a manufacturing method thereof, comprising: a body and a working fluid, wherein the body has a condensation zone, an evaporation zone and a chamber, wherein the condensation zone and the evaporation zone are arranged on both sides of the chamber, and the evaporation portion has a first side surface and a second side surface, wherein the first side surface has a convex portion; the working fluid is filled in the aforementioned chamber, and the convex portion is formed by mechanical processing as a supporting structure and to increase the structural strength, so that the manufacturing cost can be greatly reduced.

Description

Vaporizing plate structure with convex portion and manufacturing method thereof

This application is a divisional application, and its parent case is a Chinese invention patent application with the application number of 201310284895.1, the application date of July 8, 2013, and the invention titled "The temperature equalizing plate structure and its manufacturing method".

technical field

The invention belongs to a temperature uniformity plate structure and a manufacturing method thereof, in particular to a temperature uniformity plate structure and a manufacturing method thereof which can greatly reduce the manufacturing cost.

Background technique

As the current electronic equipment is gradually advertised as thin and light, all components must be reduced in size. However, the heat generated by the reduction in the size of electronic equipment has become a major obstacle to improving the performance of electronic equipment and systems. Despite the ever shrinking dimensions of the semiconductors that form electronic components, there is a continuing need for increased performance.

As the semiconductor size shrinks, the resulting heat flux increases, and the increased heat flux creates a challenge to cool the product beyond just the overall heat increase, because the increased heat flux results in overheating at different times and at different length dimensions, potentially causing the electrons to overheat. malfunction or damage.

Therefore, those skilled in the art use a VC (Vapor chamber) Heat Sink above the chip to serve as a heat sink to solve the problem of the above-mentioned prior art due to the narrow heat dissipation space. , foaming column and other capillary structures are used to support as the return channel, but because the upper and lower wall thicknesses of the micro-evening plate are thin (applied below 1.5mm), the conventional structure using the above-mentioned capillary structure as a support is used in the micro-evening plate. On the other hand, it will cause the micro-leveling plate to be supported only where there are copper pillars, sintered pillars or foamed pillars, and the rest of the places that are not provided will form collapses or depressions, resulting in the overall plane of the micro-leveling plate structure. The strength and strength cannot be maintained, so thinning cannot be achieved.

When the working fluid in the above-mentioned vaporizing plate is evaporated by the heating area of the evaporation area, the working fluid is converted from liquid state to vapor state, and the working fluid in vapor state is condensed from vapor state to liquid state after reaching the condensation area of the vaporizing plate, and then flows back to the vapor state. The evaporation area continues to circulate, and the condensation area of the vapor chamber is usually a smooth surface, or has a sintered capillary structure. However, the structure of the conventional condensation area is smooth, so that the condensed liquid water droplets need to be stored to a certain volume before they drop by gravity, resulting in insufficient reflux efficiency. Due to the too slow return rate of the liquid working fluid, there is no working fluid in the evaporation area, resulting in a dry burning state, which greatly reduces the heat transfer efficiency. To enhance the return efficiency of the working fluid, a capillary structure is added, which is an indispensable structure in the prior art. , but the setting of such a capillary structure (such as a sintered body or a grid) makes the vapor chamber unable to achieve the effect of thinning.

The thinned hot plate is mainly formed by etching grooves on the plate to form a capillary structure or to form a support structure on the plate. Or the manufacturing cost of the vapor chamber cannot be reduced.

SUMMARY OF THE INVENTION

In order to solve the above-mentioned shortcomings of the prior art, the present invention provides a vapor chamber structure that can reduce the manufacturing cost.

Another object of the present invention is to provide a method for manufacturing a vapor chamber that can greatly reduce the manufacturing cost of the vapor chamber.

In order to achieve the above object, the present invention provides a temperature equalizing plate structure, comprising: a body having a condensation area, an evaporation area and a chamber, the condensation area and the evaporation area are arranged on both sides of the chamber; a The convex part is selected to be formed by any one of the evaporating zone or the condensation zone; a capillary structure is arranged on the surface of the chamber; a working fluid is filled in the chamber.

The protruding portion has a plurality of protruding bodies, the protruding bodies are formed by the evaporation area extending in a direction opposite to the evaporation area, and the body adjacent to the periphery of the protruding body is correspondingly concave.

The protruding portion has a plurality of protruding bodies, the protruding bodies are formed by the condensation area extending in a direction opposite to the condensation area, and the body adjacent to the periphery of the protruding body is correspondingly concave.

The main body has a first plate body and a second plate body. The first and second plate bodies correspond to covers and jointly define the aforementioned chamber. The condensation area is arranged on one side of the first plate body, and the evaporation area is arranged on one side of the second plate body.

The body is a flat tube body.

The convex body has a free end, and the free end is connected with the condensation area, that is, the convex body and the condensation area have the aforementioned capillary structure.

The protruding portion has a plurality of protruding bodies, the protruding bodies are formed by the evaporation area extending in a direction opposite to the evaporation area, and the body is correspondingly concave on the other side of the protruding body.

The protruding portion has a plurality of protruding bodies, the protruding bodies are formed by the condensation area extending in a direction opposite to the condensation area, and the body is correspondingly concave on the opposite side of the protruding body.

In order to achieve the above purpose, the present invention provides a method for manufacturing a vapor chamber structure, which includes the following steps: providing a first plate body and a second plate body; selecting any one of the first and second plate bodies by machining forming at least one convex body; covering the first and second plate bodies correspondingly, sealing their surroundings, and performing the operations of vacuuming and filling the working fluid.

A method for manufacturing a vapor chamber structure, comprising the following steps: providing a first plate body and a second plate body; selecting at least one convex body from any one of the first and second plate bodies by machining; The first and second plate bodies are covered correspondingly, and the surrounding areas are closed and the operations of vacuuming and filling the working fluid are carried out.

The machining selection is any of stamping, embossing, forging, rolling, engraving, or casting.

After the step of forming at least one convex body in any one of the first and second plates by machining, there is a further step of forming capillary structures on the corresponding sides of the first and second plates.

The present invention provides a method for manufacturing a temperature equalizing plate structure, which includes the following steps: providing a flat tube body; forming at least one protrusion on one side of the inner part of the tube body by machining; sealing both ends of the tube body and pumping Vacuuming and filling with working fluid.

After the step of forming at least one convex body on one side of the inside of the tube body by machining, there is a further step of forming a capillary structure inside the tube body.

The machining is selected to be any one of stamping, embossing, forging, rolling, engraving, or casting.

According to the present invention, the manufacturing cost of the vapor chamber can be greatly reduced, and the manufacturing accuracy can be further improved.

Description of drawings

1 is an exploded perspective view of the first embodiment of the vapor chamber structure of the present invention;

FIG. 2 is a three-dimensional combined view of the first embodiment of the vapor chamber structure of the present invention;

3 is a cross-sectional view of the first embodiment of the vapor chamber structure of the present invention;

4 is a cross-sectional view of the second embodiment of the vapor chamber structure of the present invention;

5 is a cross-sectional view of a third embodiment of the vapor chamber structure of the present invention;

6 is a cross-sectional view of the fourth embodiment of the vapor chamber structure of the present invention;

7 is a flow chart of steps of the first embodiment of the method for manufacturing a vapor chamber structure according to the present invention;

8 is a flow chart of the steps of the second embodiment of the method for manufacturing a vapor chamber structure according to the present invention;

9 is a flow chart of steps of a third embodiment of a method for manufacturing a vapor chamber structure according to the present invention;

FIG. 10 is a flow chart of the steps of the fourth embodiment of the method for manufacturing the vapor chamber structure of the present invention.

Description of reference numbers:

Body 11

The first plate body 11a

Second plate body 11b

Bump 111

Convex 1111

Free end 1111a

capillary 2

Working fluid 3

Condensation zone 112

Evaporation zone 113

Chamber 114

Detailed ways

The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments:

The above objects of the present invention and their structural and functional characteristics will be described with reference to the preferred embodiments of the accompanying drawings.

Please refer to FIG. 1 , FIG. 2 , and FIG. 3 , which are three-dimensional exploded, assembled and cross-sectional views of the first embodiment of the vapor chamber structure of the present invention. As shown in the figures, the vapor chamber structure includes: a main body 11 , a convex part 111, a capillary structure 2, a working fluid 3;

The main body 11 has a condensation zone 112, an evaporation zone 113 and a chamber 114, and the main body 11 further has a first plate body 11a and a second plate body 11b. The first and second plate bodies 11a, 11b corresponds to the cover and jointly defines the aforementioned chamber 114, the condensation area 112 is provided on one side of the first plate body 11a, the evaporation area 113 is provided on the side of the second plate body 11b, that is, the condensation area 112 and the The evaporation areas 113 are located on two sides of the chamber 114 and correspond to each other.

The protruding portion 111 is selected to be formed by either or both of the evaporation zone 113 or the condensation zone 112 (evaporation zone 113 and condensation zone 112 ). The protruding portion 111 in this embodiment has a plurality of The convex body 1111 is formed by the evaporation area 113 extending in the opposite direction to the evaporation area 113, and the convex body 1111 has a free end 1111a, the free end 1111a is connected with the condensation area 112, the The periphery of the main body 11 adjacent to the convex body 1111 is correspondingly concave. The convex body 1111 in this embodiment is formed by embossing, so the other side of the convex body 1111 is flat.

The capillary structure 2 is disposed on the surface of the cavity 114 , that is, the capillary structure 2 is formed between the convex body 1111 and the condensation area 112 , and the working fluid 3 is filled in the cavity 114 .

Please refer to FIG. 4, which is a cross-sectional view of the second embodiment of the vapor chamber structure of the present invention. As shown in the figure, this embodiment has the same structural and technical features as the first embodiment, so it will not be repeated here, but The difference between this example and the aforementioned first embodiment is that the opposite side of the plurality of protrusions 1111 of the evaporation area 113 is concave.

Please refer to FIG. 5, which is a cross-sectional view of the third embodiment of the vapor chamber structure of the present invention. As shown in the figure, this embodiment has the same structural and technical features as the first embodiment, so it will not be repeated here. The difference between this embodiment and the first embodiment is that the protruding portion 111 has a plurality of protruding bodies 1111 , and the protruding bodies 1111 are formed by the condensation area 112 extending in the opposite direction to the condensation area 112 . The periphery of 11 adjacent to the convex body 1111 is correspondingly concave.

Please refer to FIG. 6 , which is a cross-sectional view of the fourth embodiment of the vapor chamber structure of the present invention. As shown in the figure, this embodiment has the same structural and technical features as the first, second, and third embodiments described above, so it will not be discussed here. Again, the only difference between this example and the first, second, and third embodiments is that the main body 11 is a flat tube.

Please refer to FIG. 7 , which is a flow chart of the steps of the first embodiment of the method for manufacturing a vapor chamber structure according to the present invention, and refer to the aforementioned FIGS. 1 to 6 together. As shown in the figures, the method for manufacturing a vapor chamber structure includes: The following steps:

S1: provide a first plate body and a second plate body;

A first plate body 11a and a second plate body 11b are provided, and the first and second plate bodies 11a and 11b are made of materials with better thermal conductivity, such as copper or aluminum.

S2: Selecting at least one convex body from any one of the aforementioned first and second plate bodies by machining;

By choosing to form at least one convex body 1111 on any one of the first and second plate bodies 11a, 11b by mechanical processing, the mechanical processing can be any one of stamping processing, embossing processing or forging processing, so The stamping process can also be selected to form the convex body by embossing method, compression molding method or embossing method.

S3: Cover the first and second plates correspondingly, seal their surroundings, and perform the operations of vacuuming and filling the working fluid.

After the protruding body 1111 is formed by machining, the first and second plate bodies 11a and 11b are correspondingly covered, and the first and second plate bodies 11a and 11b are sealed by welding or diffusion bonding, and vacuuming and Fill in the work such as working fluid 3. Please refer to FIG. 8 , which is a flow chart of the steps of the second embodiment of the method for manufacturing a vapor chamber structure according to the present invention, and refer to FIGS. 1 to 6 together. As shown in the figures, the method for manufacturing a vapor chamber structure includes the following step:

S1: provide a first plate body and a second plate body;

S2: Selecting at least one convex body from any one of the aforementioned first and second plate bodies by machining;

S3: Cover the first and second plates correspondingly, seal their surroundings, and perform the operations of vacuuming and filling the working fluid.

Part of the steps in this embodiment are the same as those in the aforementioned first embodiment, so they will not be repeated here, but the difference between this embodiment and the aforementioned first embodiment is that the step S2 is selected by machining in the aforementioned first embodiment. Either one of the one or two plate bodies is formed with at least one convex body. After this step, there is a step S4:.

The capillary structure 2 can be additionally provided with a sintered powder structure, a grid body or a groove formed on the first and second plate bodies 11a and 11b.

Please refer to FIG. 9 , which is a flow chart of the steps of the third embodiment of the method for manufacturing a vapor chamber structure according to the present invention, and refer to FIGS. 1 to 6 together. As shown in the figures, the method for manufacturing a vapor chamber structure includes the following step:

A1: Provide a flat tube body;

A flat tubular body with at least one end being open is provided.

A2: At least one convex body is formed on the inner side of the aforementioned pipe body by machining;

By choosing to form at least one convex body 1111 on the inner side of the aforementioned pipe body by machining, the machining can be any one of stamping, embossing or forging, and the stamping can also be selected as The convex body 1111 is formed by any one of embossing method, stamping method or embossing method.

A3: The two ends of the tube body are closed and vacuumed and filled with working fluid.

The open end of the flat tube body after the protruding body is formed by machining is closed by welding or diffusion bonding, and the operations such as vacuuming and filling of the working fluid are performed.

Please refer to FIG. 10, which is a flow chart of the steps of the fourth embodiment of the method for manufacturing a vapor chamber structure according to the present invention, and refer to FIGS. 1 to 6 together. As shown in the figures, the method for manufacturing a vapor chamber structure includes the following step:

A1: Provide a flat tube body;

A2: At least one convex body is formed on the inner side of the aforementioned pipe body by machining;

A3: The two ends of the tube body are closed and vacuumed and filled with working fluid.

Part of the steps in this embodiment are the same as those in the aforementioned third embodiment, so they will not be repeated here, but the difference between this embodiment and the aforementioned first embodiment is step A2: machining the inside of the aforementioned pipe body by machining At least one convex body is formed on one side. After this step, there is a further step A4: forming a capillary structure 2 inside the tube body. A capillary structure 2 is additionally arranged inside the tube body.

The mechanical processing described in the above embodiments can be selected from any one of stamping processing, embossing processing, forging processing, rolling processing, engraving processing or casting processing.

The vapor chamber structure and the manufacturing method thereof of the present invention can further provide a vapor chamber structure and a manufacturing method that can save manufacturing man-hours and improve manufacturing accuracy.

Claims (14)

1. A vapor chamber structure with a convex portion, characterized in that, comprising: a body, having a condensation area, an evaporation area and a chamber, the condensation area and the evaporation area are arranged on both sides of the chamber; a convex portion, selected to be configured by any one of the evaporating zone or the condensation zone; a working fluid, filled in the chamber; a first capillary structure, disposed on the surface of the chamber, is sintered powder or grid; Wherein, the main body has a first plate body and a second plate body; the first plate body and the second plate body correspond to the cover and jointly define the cavity; the first plate body has a first outer surface and a first inner side surface, in which the condensation area is arranged; the second plate body has a second outer side surface and a second inner side surface, and the evaporation area is arranged therein; the convex portion is formed by the first plate body The first inner surface of the second plate is convex; the first capillary structure is arranged on the second inner surface of the second plate body in the chamber; the capillary structure on the second inner surface of the second plate body is uniform extending the second inner side surface, the convex portion directly contacts the first capillary structure of the second inner side surface of the second plate body; A second capillary structure, one side of the second capillary structure is attached to the first capillary structure, and the other side of the second capillary structure is fully or partially attached to any one of the first inner side surface and the convex portion of the first plate body For a fit, the second capillary structure is a braided body. 2 . The vapor chamber structure with a convex portion according to claim 1 , wherein the convex portion has a plurality of convex bodies, and the convex bodies are directed from the evaporation area to the opposite direction to the evaporation area. 3 . It is formed by extending, and the periphery of the main body adjacent to the convex body is correspondingly concave. 3 . The vapor chamber structure with a convex portion as claimed in claim 1 , wherein the convex portion has a plurality of convex bodies, and the convex bodies are directed from the condensation area to the opposite direction to the condensation area. 4 . It is formed by extending, and the periphery of the main body adjacent to the convex body is correspondingly concave. 4 . The vapor chamber structure with a convex portion as claimed in claim 1 , wherein the body is a flat tube body. 5 . 5 . The vapor chamber structure with a convex portion according to claim 2 , wherein the convex body has a free end, the free end is connected with the condensation area, and the convex body is connected to the condensing area. 6 . The condensation section has the capillary structure. 6 . The vapor chamber structure with convex parts according to claim 1 , wherein the convex part has a plurality of convex bodies, and the convex bodies are directed from the evaporation area to the opposite direction to the evaporation area. 7 . Constructed by extension, the other side of the main body opposite to the convex body is correspondingly concave. 7 . The vapor chamber structure with a convex portion as claimed in claim 1 , wherein the convex portion has a plurality of convex bodies, and the convex bodies are directed from the condensation area to the opposite direction to the condensation area. 8 . Constructed by extension, the other side of the main body opposite to the convex body is correspondingly concave. 8 . The vapor chamber structure with a convex portion as claimed in claim 1 , wherein the convex portion has a plurality of convex bodies, and the convex bodies are formed by the condensation area extending in a direction opposite to the condensation area. 9 . It is formed, and the other side of the main body opposite to the convex body is correspondingly concave. 9. A method for manufacturing a vapor chamber structure with a convex portion, characterized in that it comprises the following steps: providing a first plate body and a second plate body; At least one convex body is selected from any one of the first plate body and the second plate body by machining; The first and second plate bodies are correspondingly covered, and the surrounding areas are closed, and the operations of vacuuming and filling the working fluid are carried out. 10 . The method for manufacturing a vapor chamber structure with a convex portion according to claim 9 , wherein the machining is selected from stamping, embossing, forging, rolling, engraving, or casting. 11 . either. 11 . The method for manufacturing a vapor chamber structure with a convex portion as claimed in claim 9 , wherein at least one convex portion is selected from any one of the first plate body and the second plate body by machining. 12 . After this step, there is also a step of forming capillary structures on the corresponding sides of the first plate body and the second plate body. 12. A method for manufacturing a vapor chamber structure with a convex portion, characterized in that it comprises the following steps: providing a flat tube body; At least one convex body is formed on the inner side of the aforementioned pipe body by means of machining; The two ends of the pipe body are closed and the operations of vacuuming and filling the working fluid are carried out. 13 . The method for manufacturing a vapor chamber structure with a convex portion as claimed in claim 12 , wherein the step of forming at least one convex body on the inner side of the pipe body by machining also has a In the step, a capillary structure is formed inside the tube body. 14. The method for manufacturing a vapor chamber structure with a convex portion according to claim 12, wherein the machining is selected from stamping, embossing, forging, rolling, engraving, or casting either.