CN110401375A - A high-voltage piezoelectric ceramic drive power supply and control method - Google Patents

Abstract

The invention discloses a high-voltage piezoelectric ceramic driving power supply and a control method, which belong to the technical field of driving power supplies, and include a phase-shifting parallel circuit unit, including a control input terminal, a power supply input terminal and a power supply output terminal; the phase-shifting parallel circuit unit is based on The SPWM wave input at the control input terminal adjusts the DC voltage signal input at the power supply input terminal and generates a sine wave signal with continuously adjustable frequency and amplitude modulation at the output terminal of the power supply, thereby driving the piezoelectric ceramics to undergo micro-displacement; the phase-shifting parallel circuit unit includes The multiple phase-shifting parallel circuit modules are connected in series to increase the output voltage. The method includes adjusting the amplitude and frequency of an output signal according to the SPWM signal and the direct current signal. The driving power supply of the invention has the characteristics of high output voltage, large driving current, high output power and fast frequency response.

Description

A high-voltage piezoelectric ceramic drive power supply and control method

technical field

The invention relates to the technical field of driving power, in particular to a high-voltage piezoelectric ceramic driving power.

Background technique

Piezoelectric ceramics is a kind of information functional ceramic material that can convert mechanical energy and electrical energy to each other. It has positive and negative piezoelectric effects. It plays an important role in the field of micro-drive positioning. It can replace traditional pneumatic, mechanical and hydraulic drives with slow response, large inertia, poor reliability and complex structure. The main advantages are concentrated in its high positioning accuracy and high frequency response. and fast response speed. The displacement range can be accurate to the millimeter level, and the piezoelectric ceramic is compatible with the vacuum environment. In addition, under static working conditions, the load capacity is large and the power consumption is low. Therefore, piezoelectric ceramics are widely used in micro-positioning technology fields such as space shuttle micro-control, precision measurement processing, and electronic instruments. At the same time, piezoelectric ceramic micro-displacement drives also have considerable applications in key technologies of machine tools and robot flexible arms. It is even possible to take advantage of the resonant properties of piezoelectric ceramics to drive linear motors.

Piezoelectric ceramics on the market are divided into two types: high-voltage piezoelectric ceramics and low-voltage piezoelectric ceramics. As far as the inverse effect of piezoelectric ceramics is concerned, there is no difference in the output micro-displacement of the two, but high-voltage piezoelectric ceramics can output larger mechanical force. As a high-voltage piezoelectric ceramic drive power supply, it should also meet the requirements of high output voltage, good stability, small ripple, and can provide large current instantaneously to meet the output of greater mechanical force.

At present, the general problem of its application is that the output ripple of the piezoelectric ceramic drive power supply is large, the working voltage is low, the drive current is small, the power is low, the frequency response is low, and the volume is too large, which is not conducive to the practical application in some places, such as small aerial photography. Small size is a very important indicator for the driving power supply in man-machines.

In addition, in the patent document of the prior art publication number CN105429476, a full-bridge circuit is connected in series with multiple half-bridge circuits, and the PWM value of each bridge arm is analyzed and calculated by DSP, and then communicated with FPGA so that the FPGA outputs a corresponding PWM wave. Although this technology can increase the output voltage to a certain extent, the increase in series half-bridge circuits not only makes the circuit more complicated, but also increases the difficulty of control. The output current ripple cannot be guaranteed, and the response of the entire system will also change. very slowly. Moreover, the output current is limited, which cannot satisfy high-voltage and high-current piezoelectric ceramics well.

Therefore, designing a piezoelectric ceramic drive power supply that can achieve high voltage, high power, and portable has important theoretical significance and practical value for the domestic technical level and market application.

Contents of the invention

The purpose of the present invention is to overcome the disadvantages of low voltage, low drive current, low power and low frequency response of the existing high-voltage piezoelectric ceramic drive, and provide a high-voltage piezoelectric ceramic drive power supply.

The purpose of the present invention is achieved through the following technical solutions: a high-voltage piezoelectric ceramic drive power supply, including a phase-shifting parallel circuit unit including a phase-shifting parallel circuit unit, including a control input terminal, a power supply input terminal and a power supply output terminal; The phase-shifting parallel circuit unit adjusts the DC voltage signal input at the power supply input terminal according to the SPWM wave input at the control input terminal, and generates a continuous frequency-adjustable amplitude-modulated sine wave signal at the power supply output terminal, thereby driving the piezoelectric ceramics to undergo micro-displacement;

The phase-shifting parallel circuit unit includes multiple phase-shifting parallel circuit modules, and the multiple phase-shifting parallel circuit modules are connected in series to increase the output voltage.

Specifically, the phase-shifting parallel circuit module includes a plurality of filter circuit modules connected in series and multiple half-bridge inverter circuits connected in parallel, the filter circuit module includes several filter circuits connected in parallel, and each half-bridge inverter circuit The input end of the power supply receives the DC voltage signal, the control input end of each half-bridge inverter circuit receives the SPWM wave, the output end of each half-bridge inverter circuit is connected to the filter circuit, and the output end of the filter circuit is connected to the piezoelectric Ceramic connection.

Specifically, the half-bridge inverter circuits each include an upper half-bridge arm and a lower half-bridge arm connected in series. The upper half-bridge arm and the lower half-bridge arm have the same circuit structure, and each includes a switching device and a RCD absorption circuit; the drain of the switching device in the upper half bridge arm is connected to the positive pole of the power input terminal, and the source of the switching device in the lower half bridge arm is connected to the negative pole of the power input terminal; the upper half bridge bridge The common connection point of the arm and the lower half-bridge arm outputs the voltage signal of one of the half-bridge inverter circuits.

Specifically, the phase-shifting parallel circuit also includes an anti-surge circuit, an overvoltage protection circuit, and an overcurrent protection circuit. The anti-surge circuit, overvoltage protection circuit, and overcurrent protection circuit are connected in parallel, and the anti-surge The circuit, the overvoltage protection circuit and the overcurrent protection circuit are connected in parallel with the half-bridge inverter circuit.

Specifically, the driving power supply also includes a DSP control circuit and a multi-channel feedback circuit, the output end of the filter circuit module is connected to the feedback circuit, the output end of the feedback circuit is connected to the DSP control circuit, and the DSP control circuit is used to The signal obtained by the feedback circuit generates a corresponding SPWM wave.

Specifically, the feedback loop includes a sampling circuit and an ADC circuit, the output end of the filter circuit is connected to the sampling circuit, the output end of the sampling circuit is connected to the ADC circuit, and the output end of the ADC circuit is connected to the DSP control circuit connect.

Specifically, the drive power supply also includes a multi-channel drive circuit and a PWM rectifier circuit unit, the PWM rectifier circuit unit includes a multi-channel PWM rectifier circuit, the output end of the DSP control circuit is connected to the drive circuit, the output end of the drive circuit is connected to the The PWM rectifier circuit unit is connected to amplify the signal output by the DSP control circuit and output the signal to the PWM rectifier circuit; the output end of each PWM rectifier circuit is connected to a phase-shifting parallel circuit for receiving AC mains voltage conversion is the DC voltage signal.

Specifically, the driving power supply also includes a multi-channel isolated driving circuit, the output end of the DSP control circuit is connected to the isolated driving circuit, the output end of the isolated driving circuit is connected to the phase-shifting parallel circuit unit, and the isolated driving circuit It is used to amplify and isolate the SPWM signal output by the DSP control circuit.

The present invention also includes a method for controlling a high-voltage piezoelectric ceramic driving power supply, which has the same inventive concept as the above-mentioned high-voltage piezoelectric ceramic driving power supply, and the method includes:

S01: The phase-shifting parallel circuit unit adjusts the amplitude and frequency of the output signal according to the SPWM signal and the DC voltage signal. Wherein, the SPWM signal is a SPWM signal with a first phase difference, and the first phase difference is determined according to the number of half-bridge inverter circuits in the phase-shifting parallel circuit unit to ensure that the phase-shifting parallel circuit unit can output continuous adjustable frequency and amplitude modulation sine wave voltage signal.

Specifically, adjusting the amplitude and frequency of the output voltage includes:

S02: Adjust the SPWM fundamental wave frequency to realize the adjustment of the output current frequency of the phase-shifting parallel unit, adjust the SPWM carrier frequency to realize the on-off adjustment of the switching device in the phase-shifting parallel unit, and adjust the duty cycle of the SPWM to realize the output of the phase-shifting parallel unit Adjustment of voltage amplitude.

Compared with prior art, the beneficial effect of the present invention is:

(1) The current flowing through the switching device on each bridge arm of the half-bridge inverter circuit in the phase-shifting parallel circuit unit of the present invention is smaller than that of the ordinary half-bridge or full bridge, and the multiple phase-shifting parallel circuits can be connected in series Obtaining a larger output voltage further increases the power of the drive circuit.

(2) The present invention adopts SPWM wave to control the on-off of the switching device in the half-bridge inverter circuit in the phase-shifting parallel circuit unit so as to adjust the duty ratio of SPWM, thereby adjusting the output voltage value of the phase-shifting parallel circuit, further increasing The power of the drive circuit.

(3) The present invention connects multiple half-bridge inverter circuits in parallel, and the sine wave ripples output by each group of half-bridges will be offset to a certain extent after parallel connection, which reduces the output current ripple and reduces the parameter requirements of the filter circuit , thereby improving the output frequency response.

(4) There are few half-bridge inverter circuit devices in the phase-shifting parallel circuit unit of the present invention, and only one DSP control circuit can be used to realize the adjustment of the amplitude and frequency of the output sine wave signal of the phase-shifting parallel circuit unit, and the whole driving power supply circuit It is simple, easy to integrate, and can effectively reduce the circuit size.

Description of drawings

The specific embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings. The accompanying drawings described here are used to provide a further understanding of the application and constitute a part of the application. In these drawings, the same reference numerals are used to indicate the same or similar parts, the exemplary embodiments of the application and their descriptions are used to explain the application, and do not constitute an undue limitation to the application. In the picture:

Fig. 1 is the circuit structural diagram of embodiment 1 of the present invention;

FIG. 2 is a structural diagram of a phase-shifting parallel circuit in Embodiment 1 of the present invention.

Detailed ways

The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are part of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms belonging to "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated direction or positional relationship is based on the direction or positional relationship of the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be configured in a specific orientation, and operation, and therefore should not be construed as limiting the invention. In addition, belonging to "first" and "second" is only for descriptive purposes, and should not be understood as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise specified and limited, "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as there is no conflict with each other.

Example 1

As shown in Figure 1, in Embodiment 1, a high-voltage piezoelectric ceramic drive power supply specifically includes a phase-shifting parallel circuit unit, a DSP control circuit, a PWM rectifier circuit unit, an optical isolation unit, a drive circuit, a feedback circuit, Isolate the power supply circuit and the auxiliary power supply circuit. The PWM rectifier circuit unit performs AC-DC rectification on the AC220V mains power, and outputs a stable DC voltage of 380-500V to the phase-shifting parallel circuit unit, and the stable DC voltage of 380-500V is used as the input DC voltage signal of the phase-shifting parallel circuit unit; The DSP control circuit receives an external DC signal source, analyzes the output voltage amplitude and frequency, and generates a SPWM signal with the first phase difference according to the number of half-bridge inverter circuits in the phase-shifting parallel circuit unit, and controls the phase-shifting parallel circuit through the optical isolation unit. The on-off of the open tube device in the unit adjusts the voltage amplitude and frequency of the output signal. The drive circuit receives the PWM signal from the DSP control circuit, amplifies the signal and outputs it to the PWM rectification circuit unit. The feedback circuit receives the continuously adjustable FM sine wave signal output by the phase-shifting parallel circuit unit, and feeds back the sine wave signal to the DSP control circuit, and the DSP circuit performs PID adjustment according to the voltage and current values fed back by the feedback circuit to realize phase shifting Parallel unit output sine wave amplitude and frequency adjustment. AC220V mains supply power to the phase-shift parallel circuit, DSP control circuit, PWM rectifier circuit unit, optical isolation unit and feedback circuit through the isolated power supply circuit and the auxiliary power supply circuit.

Further, the phase-shifting parallel circuit unit includes multiple phase-shifting parallel circuit modules, which are used to adjust the DC voltage signal input at the power supply input terminal according to the SPWM wave input at the control input terminal and generate a continuously adjustable frequency-amplitude modulated sine wave at the power supply output terminal. wave signal, thereby driving the piezoelectric ceramics to undergo micro-displacement. The multiple phase-shifting parallel circuit modules are connected in series to increase the output voltage.

Furthermore, the phase-shifting parallel circuit module includes 2 filter circuit modules connected in series and multiple half-bridge inverter circuits, the filter circuit module includes 4 filter circuits connected in parallel, and each half-bridge inverter circuit receives a PWM rectifier circuit For the output DC voltage signal, the control input end of each half-bridge inverter circuit receives the SPWM wave, the output end of each half-bridge inverter circuit is connected to a filter circuit, and the output end of the filter circuit is connected to piezoelectric ceramics. In the multi-channel half-bridge inverter circuit, each half-bridge inverter circuit is connected in parallel. In the case of outputting the same current, the current required to flow through the switching device on the bridge arm of each half-bridge inverter circuit in the phase-shifted parallel circuit It is 1/N of the total output current, and the current flowing through the switching device of each bridge arm of the ordinary half-bridge circuit is the output current, and the current flowing through the switching device of each bridge arm of the full-bridge circuit is half of the output current. Therefore, in the present invention, the current flowing through the switching devices on each bridge arm of each half-bridge inverter circuit is smaller than that of ordinary half-bridge or full-bridge, and a larger current can be obtained by connecting multiple phase-shifting parallel circuits in series. The output voltage further increases the power of the driver circuit. And in the multi-channel half-bridge inverter circuit, each half-bridge inverter circuit is connected in parallel, and the sine wave ripples output by each half-bridge inverter circuit will cancel each other to a certain extent, thereby reducing the parameter requirements of the filter circuit and obtaining higher output frequency response.

Furthermore, as shown in Figure 2, in this embodiment, the phase-shifting parallel circuit unit includes two phase-shifting parallel circuit modules, and the phase-shifting parallel circuit also includes an anti-surge circuit, an overvoltage protection circuit and an overcurrent protection circuit, The anti-surge circuit, over-voltage protection circuit and over-current protection circuit are connected in parallel, and the anti-surge circuit, over-voltage protection circuit, over-current protection circuit are connected in parallel with the half-bridge inverter circuit, and the over-current protection circuit is connected with the half-bridge A capacitor C _in is connected in parallel between the inverter circuits for stabilizing the input voltage. Taking the half-bridge inverter circuit including four-way half-bridge inverter circuit as an example, the four-way half-bridge inverter circuit is composed of four half-bridge inverter circuits connected in parallel, and the half-bridge inverter circuits include the upper half-bridge bridge arms connected in series The circuit structure of the upper half bridge arm and the lower half bridge arm is the same as that of the lower half bridge arm, including a switching device and an RCD absorption circuit; the upper half bridge arm and the lower half bridge arm in the half bridge inverter circuit The gate of the switching device in the arm is connected to the control input terminal, that is, the DSP control circuit is connected to the gate of the switching device in the upper half bridge arm and the lower half bridge arm of the half bridge inverter circuit through the isolation drive circuit, and the upper half bridge arm is connected to the gate of the switching device in the lower half bridge arm. The drain of the switching device in the half-bridge arm is connected to the positive pole of the power input terminal, and the source of the switching device in the lower half-bridge arm is connected to the negative pole of the power input terminal. The common connection point of the bridge arm of the upper half bridge and the bridge arm of the lower half bridge outputs the voltage signal of one of the half-bridge inverter circuits to one of the four filter circuits. The DSP control circuit realizes 4 channels of SPWM wave output with a phase difference of 90 degrees through phase control. The phases of the sinusoidal current waveforms output by each half bridge plus LC filter are 90 degrees in sequence, and the ripples of the four sinusoidal current waveforms with 90 degrees of phase difference in sequence cancel each other out after superimposition, and the effective value of the output sinusoidal current after superposition is a single half bridge Output 4 times the effective value of the sinusoidal current, effectively increasing the output current value. Further, the DSP control circuit outputs SPWM waves to control the complementary conduction of SiC switch VT1 and SiC switch VT2, and outputs a sine wave signal, and there is a dead time between SiC switch VT1 and SiC switch VT2 to avoid on, Under the straight-through, there is no driving signal for the two SiC switch tubes during the dead time. There is also a freewheeling diode on the bridge arm of the half-bridge inverter circuit, which forms an RCD absorption circuit with a capacitor and an inductor, and is used to absorb the voltage peak when the switch tube is turned off. The voltage signal output by the half-bridge inverter circuit is output to the piezoelectric ceramic through the LC filter circuit. Among them, since the SiC switching tube has smaller parasitic parameters than ordinary switching devices, its switching frequency is higher, the switching time is shorter, and the switching speed is faster.

Further, the feedback circuit is connected to the output end of the LC filter circuit module in the phase-shifting parallel circuit, and the output end of the feedback circuit is connected to the DSP control circuit for feeding back the sine wave signal output by the phase-shifting parallel circuit unit to the DSP control circuit. The output current and voltage are adjusted by PID. Wherein, the feedback loop includes a sampling circuit and an ADC circuit, the output end of the filter circuit is connected with the sampling circuit, the output end of the sampling circuit is connected with the ADC circuit, and the output end of the ADC circuit is connected with the DSP control circuit.

Further, the drive power supply also includes a first drive circuit, a second drive circuit and a PWM rectifier circuit unit, the PWM rectifier circuit unit includes a first PWM rectifier circuit and a second PWM rectifier circuit, each PWM rectifier circuit output terminal is connected to a phase shifter The parallel circuit module is connected to output a stable DC voltage to the phase-shifted parallel circuit module. The output end of the DSP control circuit is connected to the drive circuit, and the output end of the drive circuit is connected to the PWM rectification circuit unit for amplifying the PWM signal output by the DSP control circuit and outputting the signal to the PWM rectification circuit.

Further, the driving power supply also includes a first isolated driving circuit and a second isolated driving circuit, the output end of the DSP control circuit is connected to the isolated driving circuit, and the output end of the isolated driving circuit is connected to the phase-shifting parallel circuit unit for outputting the DSP control circuit The SPWM signal is amplified and isolated to ensure that the output voltage of the phase-shifted parallel circuit unit is effectively improved.

Example 2

This implementation provides a control method for a high-voltage piezoelectric ceramic drive power supply on the basis of Embodiment 1, which has the same inventive concept as Embodiment 1, and the method specifically includes:

S01: The phase-shifting parallel circuit unit adjusts the amplitude and frequency of the output signal according to the SPWM signal and the DC signal. Wherein, the SPWM signal is an SPWM signal with a first phase difference, and the first phase difference is determined according to the number of half-bridge inverter circuits in the phase-shifting parallel circuit unit, which is used to ensure that the phase-shifting parallel circuit unit can output a continuously adjustable frequency-amplitude-modulated sine wave wave voltage signal.

Further, adjusting the amplitude and frequency of the output signal includes:

S02: Adjust the SPWM fundamental wave frequency to realize the adjustment of the output current frequency of the phase-shifting parallel unit, adjust the SPWM carrier frequency to realize the on-off adjustment of the switching device in the phase-shifting parallel unit, and adjust the duty cycle of the SPWM to realize the output of the phase-shifting parallel unit Adjustment of voltage amplitude.

Further, the first phase difference is determined according to the number of half-bridge inverter circuits in the phase-shifted parallel circuit unit, and its specific calculation formula is 360°/N, where N is the number of half-bridge inverter circuits. In Embodiment 1, there is 4-way half-bridge inverter circuit, then the DSP control circuit generates a 90° phase difference SPWM signal to control the switching devices of the upper and lower bridge arms in the half-bridge inverter circuit in the phase-shifting parallel circuit unit, and the multi-channel half-bridge inverter circuit The control waveform of the switching device of the lower bridge arm is complementary to the control waveform of the switching device of the upper bridge arm of the corresponding half-bridge inverter circuit, and there is a certain dead zone, thereby ensuring that the phase-shifting parallel circuit unit can output a sine wave voltage signal with continuously adjustable frequency and amplitude modulation.

Furthermore, this embodiment also includes a control method with a DSP control circuit as the main body:

S11: the DSP control circuit generates a SPWM signal with a first phase difference to control the on-off of the switching device in the phase-shifting parallel circuit unit;

S12: Perform PID adjustment according to the voltage and current values fed back by the feedback circuit to realize the adjustment of the output sine wave amplitude and frequency of the phase-shifted parallel unit.

The above specific embodiment is a detailed description of the present invention, and it cannot be determined that the specific embodiment of the present invention is only limited to these descriptions. For those of ordinary skill in the technical field of the present invention, they can also Making some simple deduction and substitution should be regarded as belonging to the protection scope of the present invention.

Claims (10)

1. A high-voltage piezoelectric ceramic drive power supply, characterized in that: It includes a phase-shifting parallel circuit unit, including a control input terminal, a power supply input terminal and a power supply output terminal; the phase-shifting parallel circuit unit adjusts the DC voltage signal input at the power supply input terminal according to the SPWM wave input at the control input terminal and outputs it at the power supply The terminal generates a sine wave signal with continuously adjustable frequency and amplitude modulation, thereby driving the piezoelectric ceramic to undergo a micro-displacement; The phase-shifting parallel circuit unit includes multiple phase-shifting parallel circuit modules, and the multiple phase-shifting parallel circuit modules are connected in series to increase the output voltage. 2. A kind of high-voltage piezoelectric ceramic drive power supply according to claim 1, characterized in that: said phase-shifting parallel circuit module comprises a plurality of filter circuit modules connected in series and a plurality of parallel-connected half-bridge inverter circuits, The filtering circuit module includes several filtering circuits connected in parallel, the power input terminal of each half-bridge inverter circuit receives the DC voltage signal, and the control input end of each half-bridge inverter circuit receives the SPWM wave, each The output terminal of the half-bridge inverter circuit is connected with the filter circuit, and the output terminal of the filter circuit is connected with the piezoelectric ceramics. 3. A high-voltage piezoelectric ceramic drive power supply according to claim 2, characterized in that: said half-bridge inverter circuits each include an upper half-bridge bridge arm and a lower half-bridge bridge arm connected in series, and said upper half-bridge bridge arm The bridge arm and the lower half bridge arm have the same circuit structure, both including a switching device and an RCD absorbing circuit; the drain of the switching device in the upper half bridge arm is connected to the positive pole of the power input terminal, and the lower half bridge The source of the switching device in the bridge arm is connected to the negative pole of the power input terminal; the common connection point of the upper half bridge arm and the lower half bridge arm outputs the voltage signal of one of the half bridge inverter circuits. 4. A high-voltage piezoelectric ceramic drive power supply according to claim 1, characterized in that: the phase-shifting parallel circuit also includes an anti-surge circuit, an overvoltage protection circuit and an overcurrent protection circuit, and the anti-surge The circuit, the overvoltage protection circuit and the overcurrent protection circuit are connected in parallel, and the anti-surge circuit, the overvoltage protection circuit and the overcurrent protection circuit are connected in parallel with the half-bridge inverter circuit. 5. A kind of high-voltage piezoelectric ceramic drive power supply according to claim 1, characterized in that: the drive power supply also includes a DSP control circuit and a feedback circuit, the output end of the filter circuit module is connected to the feedback circuit, and the feedback circuit The circuit output terminal is connected to the DSP control circuit, and the DSP control circuit is used to generate a corresponding SPWM wave according to the signal obtained by the feedback circuit; The feedback loop includes a sampling circuit and an ADC circuit, the output end of the filtering circuit is connected to the sampling circuit, the output end of the sampling circuit is connected to the ADC circuit, and the output end of the ADC circuit is connected to the DSP control circuit . 6. A high-voltage piezoelectric ceramic drive power supply according to claim 5, characterized in that: the drive power supply also includes a multi-channel drive circuit and a PWM rectifier circuit unit, and the PWM rectifier circuit unit includes a multi-channel PWM rectifier circuit , the output end of the DSP control circuit is connected to the drive circuit, and the output end of the drive circuit is connected to the PWM rectifier circuit unit for amplifying the signal output by the DSP control circuit and outputting the signal to the PWM rectifier circuit; The output terminal of the PWM rectifier circuit is connected with a phase-shifting parallel circuit for receiving the AC mains voltage and converting it into the DC voltage signal. 7. A kind of high-voltage piezoelectric ceramic drive power supply according to claim 5, characterized in that: the drive power supply also includes a multi-channel isolated drive circuit, the output end of the DSP control circuit is connected to the isolated drive circuit, the The output end of the isolation drive circuit is connected to the phase-shift parallel circuit unit, and the isolation drive circuit is used for amplifying and isolating the SPWM signal output by the DSP control circuit. 8. A method for controlling a high-voltage piezoelectric ceramic drive power supply according to any one of claims 1-7, wherein the method comprises: The phase-shifting parallel circuit unit adjusts the amplitude and frequency of the output sine wave signal according to the SPWM signal and the DC voltage signal. 9. A control method for a high-voltage piezoelectric ceramic drive power supply according to claim 8, wherein said adjusting the amplitude and frequency of the output voltage comprises: Adjust the frequency of the SPWM fundamental wave to realize the adjustment of the output current frequency of the phase-shifted parallel unit, adjust the SPWM carrier frequency to realize the on-off adjustment of the switching device in the phase-shifted parallel unit, and adjust the duty cycle of the SPWM to realize the output voltage amplitude of the phase-shifted parallel unit value adjustment. 10. A method for controlling a high-voltage piezoelectric ceramic drive power supply according to claim 8, wherein the SPWM signal is a SPWM signal with a first phase difference, and the first phase difference is based on a phase-shifting parallel circuit The number of half-bridge inverter circuits in the unit is determined to ensure that the phase-shifting parallel circuit unit can output a sine wave voltage signal with continuously adjustable frequency and amplitude modulation.