CN110323668A - A kind of infrared narrowband emitter - Google Patents
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Abstract
本发明公开了一种红外窄带辐射器。该红外窄带辐射器产生预设频率vIR的中长波红外窄带辐射,其包括由下到上依次生长的衬底、泵浦光源、第一红外谐振腔、红外增益介质和第二红外谐振腔;或包括由下到上依次生长的衬底、泵浦光源和掺杂有红外增益介质的红外谐振腔。红外增益介质的禁带宽度等于所需中长波红外光的能量,红外增益介质吸收泵浦光源发出的泵浦光,产生热载流子,光致热载流子通过弛豫到红外增益介质的能带边缘产生多个电子‑空穴对,多个电子‑空穴对通过辐射复合为频率vIR的中长波红外光提供增益,泵浦光的频率vpump>2vIR。本发明在无需中长波红外增益介质的单晶外延生长的情况下,提高了辐射功率谱密度和方向性。
The invention discloses an infrared narrow-band radiator. The infrared narrowband radiator produces medium and long-wave infrared narrowband radiation with a preset frequency vIR , which includes a substrate grown sequentially from bottom to top, a pump light source, a first infrared resonant cavity, an infrared gain medium and a second infrared resonant cavity; Or it includes a substrate grown sequentially from bottom to top, a pumping light source and an infrared resonant cavity doped with an infrared gain medium. The forbidden band width of the infrared gain medium is equal to the energy of the required medium and long-wave infrared light. The infrared gain medium absorbs the pump light emitted by the pump light source to generate hot carriers. Multiple electron-hole pairs are generated at the edge of the energy band, and multiple electron-hole pairs provide gain for mid- and long-wave infrared light with a frequency v IR through radiative recombination, and the frequency of the pump light is v pump >2v IR . The invention improves the radiation power spectrum density and directivity without the single crystal epitaxial growth of the medium and long wave infrared gain medium.
Description
技术领域technical field
本发明涉及光-热-电能量转换技术领域,特别是涉及一种红外窄带辐射器。The invention relates to the technical field of photo-thermal-electric energy conversion, in particular to an infrared narrow-band radiator.
背景技术Background technique
中长波红外光源在气体探测、生物目标检测等诸多领域有着极为广泛的应用。以气体探测为例,诸多气体分子在中长波红外波段有特征吸收峰,称为指纹区。通过红外光源发射这些波长的红外光,如果存在这类分子,则红外光会被吸收,信号减弱,通过探测红外信号强弱即可检测到对应分子是否存在以及其相对浓度大小。而不同的气体分子有着不同的指纹区,其指纹区覆盖范围为几纳米到数十纳米不等,中心波长范围也各不相同,因此对于中长波红外光源提出了窄带辐射的要求。Mid- and long-wave infrared light sources are widely used in many fields such as gas detection and biological target detection. Taking gas detection as an example, many gas molecules have characteristic absorption peaks in the medium and long-wave infrared band, which are called fingerprint regions. The infrared light of these wavelengths is emitted by an infrared light source. If such molecules exist, the infrared light will be absorbed and the signal will be weakened. By detecting the intensity of the infrared signal, the existence of the corresponding molecule and its relative concentration can be detected. Different gas molecules have different fingerprint areas, the fingerprint area coverage ranges from a few nanometers to tens of nanometers, and the center wavelength range is also different. Therefore, narrow-band radiation requirements are put forward for medium and long-wave infrared light sources.
现有的中长波红外窄带辐射器主要有以下两种实现方案:1)中长波红外量子级联激光器;2)中长波红外窄带热辐射器。The existing medium and long-wave infrared narrowband radiators mainly have the following two implementation schemes: 1) medium and long-wave infrared quantum cascade lasers; 2) medium and long-wave infrared narrow-band thermal radiators.
中长波红外量子级联激光器有着较好的单色特性,光谱功率密度高,能进行快速调制,但往往需要超过μm甚至10μm量级的中长波红外增益介质的单晶外延生长,成本极高,成为限制其在中长波红外探测应用的主要因素。Mid- and long-wave infrared quantum cascade lasers have good monochromatic characteristics, high spectral power density, and fast modulation, but often require single-crystal epitaxial growth of mid- and long-wave infrared gain media on the order of more than μm or even 10 μm, and the cost is extremely high. It has become the main factor limiting its application in medium and long-wave infrared detection.
中长波红外窄带热辐射器,通过构建具有中长波窄带吸收特性的辐射器表面,根据基尔霍夫定律,对该辐射器加热以后,该辐射器对外进行窄带的中长波红外辐射。对于任何的热辐射器,其远场辐射功率谱密度不可能超过同温度的黑体,从而具有辐射功率谱密度低的缺点;另外由于单纯的加热难以实现粒子数反转,热辐射器只有谐振器而没有增益介质,其光谱功率谱相对较宽,并且辐射的方向性相对较差。The mid- and long-wave infrared narrow-band thermal radiator constructs a radiator surface with mid- and long-wave narrow-band absorption characteristics, and according to Kirchhoff's law, after heating the radiator, the radiator emits narrow-band mid- and long-wave infrared radiation to the outside. For any thermal radiator, its far-field radiation power spectral density cannot exceed that of a black body at the same temperature, so it has the disadvantage of low radiation power spectral density; in addition, because it is difficult to achieve particle number inversion by simple heating, the thermal radiator only has a resonator Without a gain medium, its spectral power spectrum is relatively broad, and the directivity of the radiation is relatively poor.
发明内容Contents of the invention
本发明旨在至少在一定程度上解决相关技术中的技术问题之一。The present invention aims to solve one of the technical problems in the related art at least to a certain extent.
本发明的目的是提供一种单片集成的中长波红外窄带辐射器,能够在无需中长波红外增益介质的单晶外延生长的情况下,实现较高的辐射功率谱密度和方向性,具有制备方式简单、成本低的优点。The purpose of the present invention is to provide a monolithically integrated medium and long-wave infrared narrow-band radiator, which can achieve higher radiation power spectral density and directivity without the need for single crystal epitaxial growth of medium and long-wave infrared gain media, and has the advantages of preparation The method is simple and the cost is low.
为实现上述目的,本发明提供了如下方案:To achieve the above object, the present invention provides the following scheme:
一种红外窄带辐射器,所述红外窄带辐射器包括由下到上依次生长的衬底、泵浦光源、第一红外谐振腔、红外增益介质和第二红外谐振腔;所述红外窄带辐射器用于产生预设频率vIR的中长波红外窄带辐射;An infrared narrowband radiator, the infrared narrowband radiator includes a substrate grown sequentially from bottom to top, a pump light source, a first infrared resonant cavity, an infrared gain medium and a second infrared resonant cavity; the infrared narrowband radiator is used to generate mid- to long-wave infrared narrow-band radiation at a predetermined frequency v IR ;
所述红外增益介质用于吸收所述泵浦光源发出的泵浦光,以产生中长波红外光,所述泵浦光的频率vpump与所述预设频率vIR满足vpump>2vIR;所述红外增益介质的禁带宽度等于所述中长波红外光的能量;所述第一红外谐振腔和所述第二红外谐振腔均由N个谐振单元由下到上依次堆叠而成,其中N≥2;所述第一红外谐振腔和所述第二红外谐振腔用于对所述中长波红外光进行谐振选频,以产生预设频率vIR的中长波红外窄带辐射。The infrared gain medium is used to absorb the pump light emitted by the pump light source to generate medium and long-wave infrared light, and the frequency v pump of the pump light and the preset frequency v IR satisfy v pump >2v IR ; The forbidden band width of the infrared gain medium is equal to the energy of the medium and long-wave infrared light; the first infrared resonant cavity and the second infrared resonant cavity are both formed by stacking N resonant units from bottom to top, wherein N≥2; the first infrared resonant cavity and the second infrared resonant cavity are used to resonate and frequency-select the mid- and long-wave infrared light, so as to generate mid- and long-wave infrared narrowband radiation with a preset frequency vIR .
可选的,所述红外增益介质为具有多重激子效应的窄禁带半导体或具有多重激子效应的准金属;Optionally, the infrared gain medium is a narrow-bandgap semiconductor with multiple excitonic effects or a metalloid with multiple exciton effects;
所述窄禁带半导体为PbSe纳米量子点、PbS纳米量子点、PbTe纳米量子点、InAs纳米量子点、InP纳米量子点、CdSe纳米量子点和CdTe纳米量子点中的一种或几种;The narrow bandgap semiconductor is one or more of PbSe nano quantum dots, PbS nano quantum dots, PbTe nano quantum dots, InAs nano quantum dots, InP nano quantum dots, CdSe nano quantum dots and CdTe nano quantum dots;
所述准金属为Sn纳米量子点、CdHgTe纳米量子点、Ag2S纳米量子点、CuAg纳米量子点、碳纳米管和石墨烯中的一种或几种。The metalloid is one or more of Sn nano quantum dots, CdHgTe nano quantum dots, Ag 2 S nano quantum dots, CuAg nano quantum dots, carbon nanotubes and graphene.
可选的,各纳米量子点的尺寸范围为1~1000nm。Optionally, the size range of each nano quantum dot is 1-1000 nm.
可选的,所述第一红外谐振腔和所述第二红外谐振腔均为一维光子晶体;Optionally, both the first infrared resonant cavity and the second infrared resonant cavity are one-dimensional photonic crystals;
所述一维光子晶体为中长波红外布拉格反射光栅或中长波红外分布反馈光栅;所述一维光子晶体的谐振频率等于所述预设频率vIR。The one-dimensional photonic crystal is a mid-to-long-wave infrared Bragg reflection grating or a mid-to-long-wave infrared distributed feedback grating; the resonant frequency of the one-dimensional photonic crystal is equal to the preset frequency v IR .
可选的,所述谐振单元包括由下到上设置的第一谐振层和第二谐振层;Optionally, the resonant unit includes a first resonant layer and a second resonant layer arranged from bottom to top;
所述第一谐振层为MgF2层、CaF2层、BF2层、YF3层、SrF2层、KBr层和ZnS层中的一种或几种,所述第二谐振层为Ge层和Si层中的一种或几种。The first resonant layer is one or more of MgF 2 layers, CaF 2 layers, BF 2 layers, YF 3 layers, SrF 2 layers, KBr layers and ZnS layers, and the second resonant layer is Ge layer and One or more of the Si layers.
本发明还提供了一种红外窄带辐射器,所述红外窄带辐射器包括由下到上依次生长的衬底、泵浦光源和掺杂有红外增益介质的红外谐振腔;所述红外窄带辐射器用于产生预设频率vIR的中长波红外窄带辐射;The present invention also provides an infrared narrowband radiator, which includes a substrate grown sequentially from bottom to top, a pump light source, and an infrared resonant cavity doped with an infrared gain medium; the infrared narrowband radiator is used to generate mid- to long-wave infrared narrow-band radiation at a predetermined frequency v IR ;
所述掺杂有红外增益介质的红外谐振腔由N个掺杂有红外增益介质的谐振单元由下到上依次堆叠而成,其中N≥2;所述掺杂有红外增益介质的红外谐振腔用于吸收所述泵浦光源发出的泵浦光,以产生中长波红外光,并对所述中长波红外光进行谐振选频,以产生预设频率vIR的中长波红外窄带辐射;所述泵浦光的频率vpump与所述预设频率vIR满足vpump>2vIR;所述红外增益介质的禁带宽度等于所述中长波红外光的能量。The infrared resonant cavity doped with an infrared gain medium is formed by stacking N resonant units doped with an infrared gain medium from bottom to top, wherein N≥2; the infrared resonant cavity doped with an infrared gain medium It is used to absorb the pump light emitted by the pumping light source to generate mid- and long-wave infrared light, and perform resonance frequency selection on the mid- and long-wave infrared light to generate mid- and long-wave infrared narrow-band radiation with a preset frequency v IR ; the The frequency v pump of the pump light and the preset frequency v IR satisfy v pump >2v IR ; the forbidden band width of the infrared gain medium is equal to the energy of the medium and long-wave infrared light.
可选的,所述红外增益介质为具有多重激子效应的窄禁带半导体或具有多重激子效应的准金属;Optionally, the infrared gain medium is a narrow-bandgap semiconductor with multiple excitonic effects or a metalloid with multiple exciton effects;
所述窄禁带半导体为PbSe纳米量子点、PbS纳米量子点、PbTe纳米量子点、InAs纳米量子点、InP纳米量子点、CdSe纳米量子点和CdTe纳米量子点中的一种或几种;The narrow bandgap semiconductor is one or more of PbSe nano quantum dots, PbS nano quantum dots, PbTe nano quantum dots, InAs nano quantum dots, InP nano quantum dots, CdSe nano quantum dots and CdTe nano quantum dots;
所述准金属为Sn纳米量子点、CdHgTe纳米量子点、Ag2S纳米量子点、CuAg纳米量子点、碳纳米管和石墨烯中的一种或几种。The metalloid is one or more of Sn nano quantum dots, CdHgTe nano quantum dots, Ag 2 S nano quantum dots, CuAg nano quantum dots, carbon nanotubes and graphene.
可选的,各纳米量子点的尺寸范围为1~1000nm。Optionally, the size range of each nano quantum dot is 1-1000 nm.
可选的,所述掺杂有红外增益介质的红外谐振腔为一维光子晶体;Optionally, the infrared resonator doped with an infrared gain medium is a one-dimensional photonic crystal;
所述一维光子晶体为中长波红外布拉格反射光栅或中长波红外分布反馈光栅;所述一维光子晶体的谐振频率等于所述预设频率vIR。The one-dimensional photonic crystal is a mid-to-long-wave infrared Bragg reflection grating or a mid-to-long-wave infrared distributed feedback grating; the resonant frequency of the one-dimensional photonic crystal is equal to the preset frequency v IR .
可选的,所述掺杂有红外增益介质的谐振单元包括由下到上设置的第一掺杂有红外增益介质的谐振层和第二掺杂有红外增益介质的谐振层;Optionally, the resonant unit doped with an infrared gain medium includes a first resonant layer doped with an infrared gain medium and a second resonant layer doped with an infrared gain medium arranged from bottom to top;
所述第一掺杂有红外增益介质的谐振层为掺杂有红外增益介质的MgF2层、掺杂有红外增益介质的CaF2层、掺杂有红外增益介质的BF2层、掺杂有红外增益介质的YF3层、掺杂有红外增益介质的SrF2层、掺杂有红外增益介质的KBr层和掺杂有红外增益介质的ZnS层中的一种或几种,所述第二掺杂有红外增益介质的谐振层为掺杂有红外增益介质的Ge层和掺杂有红外增益介质的Si层中的一种或几种。The first resonant layer doped with infrared gain medium is MgF 2 layer doped with infrared gain medium, CaF 2 layer doped with infrared gain medium, BF 2 layer doped with infrared gain medium, doped with One or more of the YF 3 layer doped with the infrared gain medium, the SrF 2 layer doped with the infrared gain medium, the KBr layer doped with the infrared gain medium, and the ZnS layer doped with the infrared gain medium, the second The resonant layer doped with the infrared gain medium is one or more of the Ge layer doped with the infrared gain medium and the Si layer doped with the infrared gain medium.
与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:
本发明提出了一种红外窄带辐射器。该红外窄带辐射器为单片集成的中长波红外窄带辐射器,其包括由下到上依次生长的衬底、泵浦光源、第一红外谐振腔、红外增益介质和第二红外谐振腔;或者包括由下到上依次生长的衬底、泵浦光源和掺杂有红外增益介质的红外谐振腔;红外窄带辐射器用于产生预设频率vIR的中长波红外窄带辐射。红外增益介质的禁带宽度等于所需中长波红外光的能量,红外增益介质吸收泵浦光源发出的泵浦光,产生热载流子,光致热载流子通过弛豫到红外增益介质的能带边缘产生多个电子-空穴对,多个电子-空穴对通过辐射复合为频率vIR的中长波红外光提供增益,泵浦光的频率vpump与预设频率vIR满足vpump>2vIR。本发明在无需中长波红外增益介质的单晶外延生长的情况下,提高了辐射功率谱密度和辐射的方向性;且具有制备方式简单、成本低的优点。The invention proposes an infrared narrowband radiator. The infrared narrow-band radiator is a monolithically integrated medium and long-wave infrared narrow-band radiator, which includes a substrate grown sequentially from bottom to top, a pump light source, a first infrared resonant cavity, an infrared gain medium, and a second infrared resonant cavity; or It includes a substrate grown sequentially from bottom to top, a pump light source, and an infrared resonant cavity doped with an infrared gain medium; an infrared narrowband radiator is used to generate medium and long-wave infrared narrowband radiation with a preset frequency vIR . The forbidden band width of the infrared gain medium is equal to the energy of the required medium and long-wave infrared light. The infrared gain medium absorbs the pump light emitted by the pump light source to generate hot carriers. Multiple electron-hole pairs are generated at the edge of the energy band, and multiple electron-hole pairs provide gain for mid- to long-wave infrared light of frequency v IR through radiative recombination. The frequency v pump of the pump light and the preset frequency v IR satisfy v pump >2v IR . The invention improves the radiation power spectral density and the radiation directionality without the need of single crystal epitaxial growth of the medium and long wave infrared gain medium; and has the advantages of simple preparation method and low cost.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some of the present invention. Embodiments, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without paying creative labor.
图1为本发明实施例1一种红外窄带辐射器的结构示意图;Fig. 1 is the structural representation of a kind of infrared narrowband radiator of embodiment 1 of the present invention;
图2为本发明实施例2一种红外窄带辐射器的结构示意图;Fig. 2 is a schematic structural view of an infrared narrowband radiator according to Embodiment 2 of the present invention;
图3为本发明实施例1、2中红外增益介质的工作原理示意图。FIG. 3 is a schematic diagram of the working principle of the mid-infrared gain medium in Embodiments 1 and 2 of the present invention.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图和具体实施方式对本发明作进一步详细的说明。In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
实施例1Example 1
图1为本发明实施例1一种红外窄带辐射器的结构示意图。Fig. 1 is a schematic structural diagram of an infrared narrowband radiator according to Embodiment 1 of the present invention.
参见图1,本实施例的红外窄带辐射器,所述红外窄带辐射器包括由下到上依次生长的衬底1、泵浦光源2、第一红外谐振腔3、红外增益介质4和第二红外谐振腔5;所述红外窄带辐射器用于产生预设频率vIR的中长波红外窄带辐射。Referring to Fig. 1, the infrared narrowband radiator of the present embodiment comprises a substrate 1, a pumping light source 2, a first infrared resonant cavity 3, an infrared gain medium 4 and a second Infrared resonant cavity 5; the infrared narrowband radiator is used to generate medium and long wave infrared narrowband radiation with preset frequency vIR .
所述红外增益介质4用于吸收所述泵浦光源2发出的泵浦光,以产生中长波红外光,所述泵浦光的频率vpump与所述预设频率vIR满足vpump>2vIR;所述红外增益介质4的禁带宽度等于所述中长波红外光的能量,中长波红外光的能量Eg=hvIR,h表示普朗克常数;所述第一红外谐振腔3和所述第二红外谐振腔5的结构相同,均是由N个谐振单元由下到上依次堆叠而成,其中N≥2;所述第一红外谐振腔3和所述第二红外谐振腔5为所述中长波红外光提供模式选择机制,用于对所述中长波红外光进行谐振选频,以产生预设频率vIR的中长波红外窄带辐射。The infrared gain medium 4 is used to absorb the pump light emitted by the pump light source 2 to generate medium and long-wave infrared light, and the frequency v pump of the pump light and the preset frequency v IR satisfy v pump >2v IR ; the forbidden band width of the infrared gain medium 4 is equal to the energy of the medium and long-wave infrared light, the energy of the medium and long-wave infrared light E g =hv IR , h represents Planck's constant; the first infrared resonant cavity 3 and The structure of the second infrared resonant cavity 5 is the same, and they are all formed by stacking N resonant units sequentially from bottom to top, where N≥2; the first infrared resonant cavity 3 and the second infrared resonant cavity 5 A mode selection mechanism is provided for the mid- and long-wave infrared light, which is used for resonantly frequency-selecting the mid- and long-wave infrared light, so as to generate mid- and long-wave infrared narrowband radiation with a preset frequency vIR .
作为一种可选的实施方式,所述红外增益介质4为具有多重激子效应的窄禁带半导体或具有多重激子效应的准金属;所述窄禁带半导体为PbSe纳米量子点、PbS纳米量子点、PbTe纳米量子点、InAs纳米量子点、InP纳米量子点、CdSe纳米量子点和CdTe纳米量子点中的一种或几种;所述准金属为Sn纳米量子点、CdHgTe纳米量子点、Ag2S纳米量子点、CuAg纳米量子点、碳纳米管和石墨烯中的一种或几种。各纳米量子点的尺寸范围为1~1000nm。本实施例中,采用PbSe纳米量子点产生光致热载流子,作为可见光-红外光转换的增益介质,即所述红外增益介质4为PbSe纳米量子点。As an optional implementation, the infrared gain medium 4 is a narrow bandgap semiconductor with multiple excitonic effects or a metalloid with multiple excitonic effects; the narrow bandgap semiconductor is PbSe nano quantum dots, PbS nano One or more of quantum dots, PbTe nano-quantum dots, InAs nano-quantum dots, InP nano-quantum dots, CdSe nano-quantum dots and CdTe nano-quantum dots; the metalloid is Sn nano-quantum dots, CdHgTe nano-quantum dots, One or more of Ag 2 S nanometer quantum dots, CuAg nanometer quantum dots, carbon nanotubes and graphene. The size range of each nanometer quantum dot is 1-1000nm. In this embodiment, PbSe nano quantum dots are used to generate photoinduced hot carriers as a gain medium for visible light-infrared light conversion, that is, the infrared gain medium 4 is PbSe nano quantum dots.
作为一种可选的实施方式,所述第一红外谐振腔3和所述第二红外谐振腔5均为一维光子晶体;所述一维光子晶体为中长波红外布拉格反射光栅或中长波红外分布反馈光栅;所述一维光子晶体的谐振频率等于所述预设频率vIR。所述谐振单元包括由下到上设置的第一谐振层31和第二谐振层32;所述第一谐振层31为MgF2层、CaF2层、BF2层、YF3层、SrF2层、KBr层和ZnS层中的一种或几种,所述第二谐振层32为Ge层和Si层中的一种或几种。本实施例中,所述第一红外谐振腔3和所述第二红外谐振腔5均为MgF2/Ge周期性一维光子晶体;所述第一谐振层31为MgF2层,所述第二谐振层32为Ge层。As an optional implementation, both the first infrared resonant cavity 3 and the second infrared resonant cavity 5 are one-dimensional photonic crystals; the one-dimensional photonic crystals are medium-long-wave infrared Bragg reflection gratings or medium-long-wave infrared Distributed feedback grating; the resonant frequency of the one-dimensional photonic crystal is equal to the preset frequency v IR . The resonant unit includes a first resonant layer 31 and a second resonant layer 32 arranged from bottom to top; the first resonant layer 31 is MgF 2 layers, CaF 2 layers, BF 2 layers, YF 3 layers, SrF 2 layers , KBr layer and ZnS layer, and the second resonant layer 32 is one or more of Ge layer and Si layer. In this embodiment, both the first infrared resonant cavity 3 and the second infrared resonant cavity 5 are MgF 2 /Ge periodic one-dimensional photonic crystals; the first resonant layer 31 is a MgF 2 layer, and the second infrared resonant cavity The second resonant layer 32 is a Ge layer.
作为一种可选的实施方式,所述第一红外谐振腔3和所述第二红外谐振腔5均为二维光子晶体;所述二维光子晶体由所述泵浦光源的电光转换功能薄膜和中长波红外的增益介质材料组成;所述二维光子晶体的谐振频率等于所述预设频率vIR。As an optional implementation, both the first infrared resonant cavity 3 and the second infrared resonant cavity 5 are two-dimensional photonic crystals; It is composed of medium and long-wave infrared gain medium materials; the resonant frequency of the two-dimensional photonic crystal is equal to the preset frequency v IR .
本实施例中,所述泵浦光源2为蓝光GaN基LED。In this embodiment, the pumping light source 2 is a blue GaN-based LED.
下面对本实施例中的红外窄带辐射器的制备过程和工作原理进行介绍。The preparation process and working principle of the infrared narrowband radiator in this embodiment will be introduced below.
1)制备过程:1) Preparation process:
在一个完成后部工艺、但没有封装的蓝光GaN基LED管芯外延片上,采用电子束蒸发沉积周期性的MgF2/Ge,周期数不少于2个,形成第一红外谐振腔3。一个周期的MgF2/Ge为一个谐振单元,MgF2层作为第一谐振层31,Ge层为第二谐振层32,每个周期中MgF2、Ge的光程为所需中长波红外光真空波长的四分之一,即nMgF2×dMgF2=nGe×dGe=λ0-IR/4,其中,nMgF2表示MgF2的折射率,dMgF2表示MgF2的厚度,nGe表示Ge的折射率,dGe表示Ge的厚度,λ0-IR表示所需的中长波红外光的真空波长。On a blue-light GaN-based LED tube core epitaxial wafer that has completed the post-process but has not been packaged, periodic MgF 2 /Ge is deposited by electron beam evaporation, and the number of cycles is not less than 2 to form the first infrared resonant cavity 3 . A cycle of MgF 2 /Ge is a resonant unit, the MgF 2 layer is used as the first resonant layer 31, and the Ge layer is the second resonant layer 32. The optical path of MgF 2 and Ge in each cycle is the required medium and long wave infrared light vacuum A quarter of the wavelength, that is, n MgF2 × d MgF2 = n Ge × d Ge = λ 0 -IR / 4 , where n MgF2 represents the refractive index of MgF2, d MgF2 represents the thickness of MgF2, and n Ge represents Ge The refractive index of , d Ge represents the thickness of Ge, and λ 0-IR represents the vacuum wavelength of the desired mid- and long-wave infrared light.
旋转涂覆PbSe纳米量子点悬浮液,所述PbSe纳米量子点的尺寸范围为1~100nm,PbSe纳米量子点对应的禁带宽度等于所需的中长波红外光的能量,即Eg-PbSe=hvIR。vIR为预设频率,即所需的中长波红外光的频率。Spin coating PbSe nano quantum dot suspension, the size range of the PbSe nano quantum dot is 1 ~ 100nm, the forbidden band width corresponding to the PbSe nano quantum dot is equal to the energy of the required medium and long wave infrared light, that is E g-PbSe = hv IR . v IR is the preset frequency, which is the frequency of the desired medium and long wave infrared light.
采用电子束蒸发沉积周期性的MgF2/Ge,周期数不少于2个,形成第二红外谐振腔5。一个周期的MgF2/Ge为一个谐振单元,MgF2层作为第一谐振层31,Ge层为第二谐振层32,每个周期中MgF2、Ge的光程为所需中长波红外光真空波长的四分之一,即nMgF2×dMgF2=nGe×dGe=λ0-IR/4。Periodic MgF 2 /Ge is deposited by electron beam evaporation, and the number of periods is not less than 2 to form the second infrared resonant cavity 5 . A cycle of MgF 2 /Ge is a resonant unit, the MgF 2 layer is used as the first resonant layer 31, and the Ge layer is the second resonant layer 32. The optical path of MgF 2 and Ge in each cycle is the required medium and long wave infrared light vacuum A quarter of the wavelength, that is, n MgF2 ×d MgF2 =n Ge ×d Ge =λ 0-IR /4.
2)工作原理2) Working principle
对蓝光GaN基LED管芯通电,产生真空波长λ0-pump≈410nm(hvpump≈3eV)蓝光作为泵浦光,其中,λ0-pump表示泵浦光源发出的泵浦光的波长,vpump表示泵浦光源发出的泵浦光的频率。PbSe纳米量子点的禁带宽度Eg-PbSe≈0.375eV,约为泵浦光子能量的1/8。在泵浦光的照射下,PbSe纳米量子点通过跃迁产生光致热载流子,光致热载流子弛豫到PbSe的能带边缘,产生新的电子-空穴对。在这个过程中,每个PbSe纳米量子点每吸收一个泵浦光子,最多可产生7个位于能带边缘的电子-空穴对。这些电子-空穴对通过直接复合发出峰值真空波长λ0-IR≈3280nm(hvpump≈0.375eV)的红外光。两侧的周期性MgF2/Ge(第一红外谐振腔3、第二红外谐振腔5)对量子点发光的红外光以布拉格反射的方式进行谐振选频,最后产生自由空间波长λ0-IR≈3280nm(hvpump≈0.375eV)的窄带红外辐射。Power on the blue GaN-based LED tube core to generate blue light with a vacuum wavelength λ 0-pump ≈ 410nm (hv pump ≈ 3eV) as pump light, where λ 0-pump represents the wavelength of the pump light emitted by the pump light source, and v pump Indicates the frequency of the pump light emitted by the pump light source. The forbidden band width E g-PbSe of PbSe nano-quantum dots is ≈0.375eV, which is about 1/8 of the pump photon energy. Under the irradiation of pump light, PbSe nano-quantum dots generate photo-induced thermal carriers through transition, and the photo-induced thermal carriers relax to the energy band edge of PbSe to generate new electron-hole pairs. In this process, each PbSe nano-quantum dot can generate up to seven electron-hole pairs at the band edge for every pump photon absorbed. These electron-hole pairs emit infrared light with a peak vacuum wavelength λ 0-IR ≈3280nm (hv pump ≈0.375eV) through direct recombination. The periodic MgF 2 /Ge on both sides (the first infrared resonant cavity 3 and the second infrared resonant cavity 5) performs resonant frequency selection on the infrared light emitted by the quantum dots in the form of Bragg reflection, and finally generates a free space wavelength λ 0-IR ≈3280nm (hv pump ≈0.375eV) narrow-band infrared radiation.
本实施例1中的红外窄带辐射器通过单片集成的方式产生中长波红外的窄带辐射,实现了在无需中长波红外增益介质的单晶外延生长的情况下,提高辐射功率谱密度和辐射的方向性;且具有制备方式简单、成本低的优点。The infrared narrow-band radiator in Example 1 generates narrow-band radiation of mid- and long-wave infrared through monolithic integration, and realizes the improvement of radiation power spectral density and radiation without the need for single-crystal epitaxial growth of mid- and long-wave infrared gain media. directionality; and has the advantages of simple preparation and low cost.
实施例2Example 2
图2为本发明实施例2一种红外窄带辐射器的结构示意图。Fig. 2 is a schematic structural diagram of an infrared narrowband radiator according to Embodiment 2 of the present invention.
参见图2,本实施例的红外窄带辐射器,所述红外窄带辐射器包括由下到上依次生长的衬底1、泵浦光源2和掺杂有红外增益介质的红外谐振腔6;所述红外窄带辐射器用于产生预设频率vIR的中长波红外窄带辐射。Referring to Fig. 2, the infrared narrowband radiator of the present embodiment, the infrared narrowband radiator comprises a substrate 1, a pumping light source 2 and an infrared resonant cavity 6 doped with an infrared gain medium that are grown sequentially from bottom to top; Infrared narrowband radiators are used to generate mid- and long-wave infrared narrowband radiation at a preset frequency v IR .
所述掺杂有红外增益介质的红外谐振腔6由N个掺杂有红外增益介质的谐振单元由下到上依次堆叠而成,其中N≥2;所述掺杂有红外增益介质的红外谐振腔6用于吸收所述泵浦光源发出的泵浦光,以产生中长波红外光,并对所述中长波红外光进行谐振选频,以产生预设频率vIR的中长波红外窄带辐射;所述泵浦光的频率vpump与所述预设频率vIR满足vpump>2vIR;所述红外增益介质的禁带宽度等于所述中长波红外光的能量。The infrared resonant cavity 6 doped with an infrared gain medium is formed by stacking N resonant units doped with an infrared gain medium from bottom to top, wherein N≥2; the infrared resonator doped with an infrared gain medium The cavity 6 is used to absorb the pumping light emitted by the pumping light source to generate medium and long-wave infrared light, and perform resonant frequency selection on the medium and long-wave infrared light to generate medium and long-wave infrared narrow-band radiation with a preset frequency v IR ; The frequency v pump of the pump light and the preset frequency v IR satisfy v pump >2v IR ; the forbidden band width of the infrared gain medium is equal to the energy of the medium and long-wave infrared light.
作为一种可选的实施方式,所述红外增益介质为具有多重激子效应的窄禁带半导体或具有多重激子效应的准金属;所述窄禁带半导体为PbSe纳米量子点、PbS纳米量子点、PbTe纳米量子点、InAs纳米量子点、InP纳米量子点、CdSe纳米量子点和CdTe纳米量子点中的一种或几种;所述准金属为Sn纳米量子点、CdHgTe纳米量子点、Ag2S纳米量子点、CuAg纳米量子点、碳纳米管和石墨烯中的一种或几种。各纳米量子点的尺寸范围为1~1000nm。本实施例中,采用CdHgTe(CHT)纳米量子点产生光致热载流子,作为可见光-红外光转换的增益介质,即掺杂的红外增益介质为CdHgTe(CHT)纳米量子点。As an optional implementation, the infrared gain medium is a narrow bandgap semiconductor with multiple excitonic effects or a metalloid with multiple excitonic effects; the narrow bandgap semiconductor is PbSe nano quantum dots, PbS nano quantum dots point, PbTe nano quantum dots, InAs nano quantum dots, InP nano quantum dots, CdSe nano quantum dots and CdTe nano quantum dots; the metalloid is Sn nano quantum dots, CdHgTe nano quantum dots, Ag One or more of 2 S nanometer quantum dots, CuAg nanometer quantum dots, carbon nanotubes and graphene. The size range of each nanometer quantum dot is 1-1000nm. In this embodiment, CdHgTe (CHT) nano quantum dots are used to generate photoinduced thermal carriers as a gain medium for visible light-infrared light conversion, that is, the doped infrared gain medium is CdHgTe (CHT) nano quantum dots.
作为一种可选的实施方式,所述掺杂有红外增益介质的红外谐振腔6为一维光子晶体;所述一维光子晶体为中长波红外布拉格反射光栅或中长波红外分布反馈光栅;所述一维光子晶体的谐振频率等于所述预设频率vIR。所述掺杂有红外增益介质的谐振单元包括由下到上设置的第一掺杂有红外增益介质的谐振层61和第二掺杂有红外增益介质的谐振层62;所述第一掺杂有红外增益介质的谐振层61为掺杂有红外增益介质的MgF2层、掺杂有红外增益介质的CaF2层、掺杂有红外增益介质的BF2层、掺杂有红外增益介质的YF3层、掺杂有红外增益介质的SrF2层、掺杂有红外增益介质的KBr层和掺杂有红外增益介质的ZnS层中的一种或几种,所述第二掺杂有红外增益介质的谐振层62为掺杂有红外增益介质的Ge层和掺杂有红外增益介质的Si层中的一种或几种。本实施例中,所述掺杂有红外增益介质的红外谐振腔6为ZnS/Ge周期性一维光子晶体;所述第一掺杂有红外增益介质的谐振层61为掺杂有CdHgTe(CHT)纳米量子点的ZnS层,所述第二掺杂有红外增益介质的谐振层62为掺杂有CdHgTe(CHT)纳米量子点的Ge层。As an optional implementation, the infrared resonant cavity 6 doped with an infrared gain medium is a one-dimensional photonic crystal; the one-dimensional photonic crystal is a mid-long wave infrared Bragg reflection grating or a mid-long wave infrared distribution feedback grating; The resonant frequency of the one-dimensional photonic crystal is equal to the preset frequency v IR . The resonant unit doped with an infrared gain medium includes a first resonant layer 61 doped with an infrared gain medium and a second resonant layer 62 doped with an infrared gain medium arranged from bottom to top; the first doped The resonant layer 61 with infrared gain medium is MgF 2 layers doped with infrared gain medium, CaF 2 layers doped with infrared gain medium, BF 2 layers doped with infrared gain medium, YF doped with infrared gain medium 3 layers, one or more of SrF 2 layers doped with infrared gain medium, KBr layer doped with infrared gain medium and ZnS layer doped with infrared gain medium, the second doped with infrared gain medium The resonant layer 62 of the medium is one or more of a Ge layer doped with an infrared gain medium and a Si layer doped with an infrared gain medium. In this embodiment, the infrared resonant cavity 6 doped with an infrared gain medium is ZnS/Ge periodic one-dimensional photonic crystal; the first resonant layer 61 doped with an infrared gain medium is a doped CdHgTe (CHT ) ZnS layer of nano quantum dots, the second resonant layer 62 doped with infrared gain medium is a Ge layer doped with CdHgTe (CHT) nano quantum dots.
作为一种可选的实施方式,所述掺杂有红外增益介质的红外谐振腔6为二维光子晶体;所述二维光子晶体由所述泵浦光源的电光转换功能薄膜和中长波红外的增益介质材料组成;所述二维光子晶体的谐振频率等于所述预设频率vIR。As an optional implementation, the infrared resonant cavity 6 doped with an infrared gain medium is a two-dimensional photonic crystal; Gain medium material; the resonant frequency of the two-dimensional photonic crystal is equal to the preset frequency v IR .
本实施例中,所述泵浦光源2为红光AlGaInP基LED。In this embodiment, the pumping light source 2 is a red AlGaInP-based LED.
下面对本实施例中的红外窄带辐射器的制备过程和工作原理进行介绍。The preparation process and working principle of the infrared narrowband radiator in this embodiment will be introduced below.
1)制备过程:1) Preparation process:
在一个完成后部工艺、但没有封装的红光AlGaInP基LED管芯外延片上,采用电子束蒸发掺杂有CdHgTe纳米量子点的ZnS/Ge,周期数不少于2个,形成掺杂有红外增益介质的红外谐振腔6。一个周期的ZnS/Ge为一个掺杂有红外增益介质的谐振单元,掺杂有CdHgTe纳米量子点的ZnS层作为第一掺杂有红外增益介质的谐振层61,掺杂有CdHgTe纳米量子点的Ge层为第二掺杂有红外增益介质的谐振层62,每个周期中掺杂有CdHgTe量子点ZnS和Ge的光程为所需中长波红外光真空波长的四分之一,即nZnS-CHT×dZnS-CHT=nGe-CHT×dGe-CHT=λ0-IR/4,其中nZnS-CHT表示掺杂有CdHgTe纳米量子点的ZnS层的折射率,dZnS-CHT表示掺杂有CdHgTe纳米量子点的ZnS层的厚度,nGe-CHT表示掺杂有CdHgTe纳米量子点的Ge层的折射率,dGe-CHT表示掺杂有CdHgTe纳米量子点的Ge层的厚度。CdHgTe纳米量子点的尺寸为1~100nm,对应的禁带宽度等于所需的中长波红外光的能量,即Eg-CHT=hvIR。On a red AlGaInP-based LED die epitaxial wafer that has completed the back-end process but has not been packaged, electron beam evaporation is used to evaporate ZnS/Ge doped with CdHgTe nano-quantum dots. The number of cycles is not less than 2, forming a doped infrared Gain medium for infrared resonator 6 . One cycle of ZnS/Ge is a resonant unit doped with an infrared gain medium, the ZnS layer doped with CdHgTe nanometer quantum dots is used as the first resonant layer 61 doped with an infrared gain medium, and the ZnS layer doped with CdHgTe nanometer quantum dots The Ge layer is the second resonant layer 62 doped with an infrared gain medium, and the optical path doped with CdHgTe quantum dots ZnS and Ge in each period is a quarter of the vacuum wavelength of the required medium and long-wave infrared light, that is, n ZnS -CHT × d ZnS-CHT = n Ge-CHT × d Ge-CHT = λ 0-IR /4, where n ZnS-CHT represents the refractive index of the ZnS layer doped with CdHgTe nano-quantum dots, and d ZnS-CHT represents The thickness of the ZnS layer doped with CdHgTe nano-quantum dots, nGe -CHT represents the refractive index of the Ge layer doped with CdHgTe nano-quantum dots, and dGe-CHT represents the thickness of the Ge layer doped with CdHgTe nano-quantum dots. The size of the CdHgTe nanometer quantum dot is 1-100nm, and the corresponding forbidden band width is equal to the energy of the required medium and long-wave infrared light, that is, E g-CHT =hv IR .
2)工作原理2) Working principle
对红光AlGaInP基LED管芯通电,产生真空波长λ0-pump≈650nm(hvpump≈1.91eV)红光作为泵浦光。CdHgTe量子点的禁带宽度Eg-CHT≈0.477eV,约为泵浦光子能量的1/4。在泵浦光的照射下,CdHgTe量子点通过跃迁产生光致热载流子,光致热载流子弛豫到CdHgTe的能带边缘,产生新的电子-空穴对。在这个过程中,每个CdHgTe量子点每吸收一个泵浦光子,最多可产生3个位于能带边缘的电子-空穴对。这些电子-空穴对通过直接复合发出峰值真空波长λ0-IR≈2600nm(hvpump≈0.477eV)的红外光。周期性ZnS/Ge对量子点发出的红外光以分布反馈的方式进行选频,即一边产生增益一边进行选频反馈,最后产生自由空间波长λ0-IR≈2600nm(hvpump≈0.477eV)的窄带红外辐射。The red AlGaInP-based LED tube core is energized to generate red light with a vacuum wavelength λ 0-pump ≈650nm (hv pump ≈1.91eV) as pump light. The forbidden band width E g-CHT of CdHgTe quantum dots is ≈0.477eV, which is about 1/4 of the pump photon energy. Under the irradiation of pump light, CdHgTe quantum dots generate photoinduced hot carriers through transition, and the photoinduced hot carriers relax to the band edge of CdHgTe to generate new electron-hole pairs. In this process, each CdHgTe quantum dot can generate up to three electron-hole pairs at the band edge for every pump photon absorbed. These electron-hole pairs emit infrared light with a peak vacuum wavelength λ 0-IR ≈2600nm (hv pump ≈0.477eV) through direct recombination. Periodic ZnS/Ge performs frequency selection on the infrared light emitted by quantum dots in the form of distributed feedback, that is, frequency selection feedback is performed while generating gain, and finally produces a free space wavelength λ 0-IR ≈2600nm (hv pump ≈0.477eV) narrowband infrared radiation.
本实施例2中的红外窄带辐射器通过单片集成的方式产生中长波红外的窄带辐射,实现了在无需中长波红外增益介质的单晶外延生长的情况下,提高辐射功率谱密度和辐射的方向性;且具有制备方式简单、成本低的优点。The infrared narrow-band radiator in Example 2 generates narrow-band radiation of mid- and long-wave infrared through monolithic integration, and realizes the improvement of radiation power spectral density and radiation without the need for single-crystal epitaxial growth of mid- and long-wave infrared gain media. directionality; and has the advantages of simple preparation and low cost.
上述实施例1、2中的红外窄带辐射器虽然在结构上存在差别,但本质上都是基于相同的工作原理实现的。图3为本发明实施例1、2中红外增益介质的工作原理示意图。参见图3,其中,11为入射的泵浦光,12为光致热载流子,13为电子空穴对,14为出射的中长波红外光子。入射的泵浦光11,能量是增益材料禁带宽度的若干倍。增益材料吸收泵浦光子后,电子从价带顶跃迁到远超过导带底的导带顶子能级位置,产生光致热载流子12。然后电子从导带顶的子能级弛豫,释放出来的能量让其他的电子从价带跃迁到导带底,产生多个电子空穴对13。然后这多个电子空穴对复合发光,产生多个中长波红外光子14。Although the infrared narrowband radiators in the above-mentioned embodiments 1 and 2 are different in structure, they are essentially realized based on the same working principle. FIG. 3 is a schematic diagram of the working principle of the mid-infrared gain medium in Embodiments 1 and 2 of the present invention. Referring to FIG. 3 , 11 is the incident pumping light, 12 is the photoinduced thermal carrier, 13 is the electron-hole pair, and 14 is the outgoing medium and long-wave infrared photon. The energy of the incident pump light 11 is several times of the forbidden band width of the gain material. After the gain material absorbs the pump photons, the electrons jump from the top of the valence band to the sub-level position of the top of the conduction band far beyond the bottom of the conduction band, generating photoinduced hot carriers12. Then the electron relaxes from the sub-level at the top of the conduction band, and the released energy allows other electrons to jump from the valence band to the bottom of the conduction band, generating multiple electron-hole pairs13. Then the multiple electron-hole pairs recombine and emit light, generating multiple mid- and long-wave infrared photons 14 .
本说明书中每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似部分互相参见即可。What each embodiment in this specification focuses on is the difference from other embodiments, and the same and similar parts of the various embodiments can be referred to each other.
本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想;同时,对于本领域的一般技术人员,依据本发明的思想,在具体实施方式及应用范围上均会有改变之处。综上所述,本说明书内容不应理解为对本发明的限制。In this paper, specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; meanwhile, for those of ordinary skill in the art, according to the present invention Thoughts, there will be changes in specific implementation methods and application ranges. In summary, the contents of this specification should not be construed as limiting the present invention.
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