CN119794017B - Dust collector for wafer production - Google Patents
Dust collector for wafer productionInfo
- Publication number
- CN119794017B CN119794017B CN202510040318.0A CN202510040318A CN119794017B CN 119794017 B CN119794017 B CN 119794017B CN 202510040318 A CN202510040318 A CN 202510040318A CN 119794017 B CN119794017 B CN 119794017B
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- China
- Prior art keywords
- dust removal
- positive pressure
- frame
- negative pressure
- supporting
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning In General (AREA)
- Ventilation (AREA)
Abstract
本发明公开了一种晶圆生产除尘装置，底框的四个边角设有向上延伸竖立的立柱，立柱远离底框的一端设有上框体，底框、立柱与上框体组成安装框架；安装框架中设有除尘机构，除尘机构的上面设有移动机构，移动机构的上面设有气压组件，除尘机构、移动机构与气压组件设置在安装框架中；相邻两条立柱的中部之间设有支撑横板，相对的另一边两条立柱之间设有匹配对应的另一支撑横板，两个支撑横板匹配相对设置，两个支撑横板之间设有横载板，横载板上设有气压组件的部分组件；除尘机构包括除尘头腔体，除尘头腔体的底部设有底板，除尘头腔体的顶端设有框体密封盖。本申请采用非接触式的除尘头进行清理，提高清洁效率，提升设备自动化程度。
The present invention discloses a wafer production dust removal device, wherein the four corners of the bottom frame are provided with upright columns extending upward, and an upper frame is provided at one end of the column away from the bottom frame, and the bottom frame, the columns and the upper frame form a mounting frame; a dust removal mechanism is provided in the mounting frame, a movable mechanism is provided above the dust removal mechanism, and a pneumatic assembly is provided above the movable mechanism, and the dust removal mechanism, the movable mechanism and the pneumatic assembly are arranged in the mounting frame; a supporting cross plate is provided between the middle parts of two adjacent columns, and another matching supporting cross plate is provided between the two columns on the other side, the two supporting cross plates are matched and arranged relative to each other, a cross-carrying plate is provided between the two supporting cross plates, and part of the pneumatic assembly is provided on the cross-carrying plate; the dust removal mechanism includes a dust removal head cavity, a bottom plate is provided at the bottom of the dust removal head cavity, and a frame sealing cover is provided at the top of the dust removal head cavity. The present application adopts a non-contact dust removal head for cleaning, thereby improving cleaning efficiency and enhancing the degree of automation of the equipment.
Description
Technical Field
The invention relates to the technical field of semiconductor production, in particular to a cleaning device for semiconductor chip production.
Background
Wafers are silicon chips used for manufacturing silicon semiconductor integrated circuits, and are used for producing chips of integrated circuits, and in the semiconductor production process, the wafers are placed in wafer boxes, and the wafer boxes are transported to carriers of different load ports (loadports) through an AMHS (automatic material handling system), so that dust remains on the surfaces of the carriers after a period of time, and the yield of wafer products is affected.
In order to maintain the cleanliness of the carrier, the carrier of the semiconductor processing equipment needs to be cleaned at regular time, the conventional cleaning method is mostly carried out by adopting manual cleaning, brush cleaning and the like, and the manual cleaning is carried out when equipment maintenance is needed, so that the time and the labor are wasted, the efficiency is low, the environment of the whole working condition is not facilitated, the cleanliness of the cleaning can not be controlled, and the brush cleaning belongs to the contact type, and the risk of scratching the carrier and generating static electricity exists.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a cleaning device for semiconductor chip production, which adopts non-contact suspended positive and negative air passages for cleaning, and simultaneously realizes gas-electricity isolation and independent operation, thereby improving the stability and yield of product processing.
In order to achieve the above purpose, the invention adopts the following technical scheme:
The wafer production dust removing device comprises a bottom frame, wherein four corners of the bottom frame are provided with upright posts extending upwards, one end of each upright post, which is far away from the bottom frame, is provided with an upper frame body, and the bottom frame, the upright posts and the upper frame body form an installation frame;
A supporting transverse plate is arranged between the middle parts of two adjacent upright posts, another supporting transverse plate matched and corresponding to the other supporting transverse plate is arranged between the two opposite upright posts, the two supporting transverse plates are matched and arranged oppositely, a transverse carrier plate is arranged between the two supporting transverse plates, and a part of components of the air pressure component are arranged on the transverse carrier plate;
The dust removing mechanism comprises a dust removing head cavity, a bottom plate is arranged at the bottom of the dust removing head cavity, the dust removing head cavity and the bottom plate are integrally formed, and a frame sealing cover is arranged at the top end of the dust removing head cavity;
The top of the dust removing head cavity is provided with an opening, the opening at the top end of the dust removing head cavity is provided with a frame sealing cover, a positive pressure chamber is arranged in the dust removing head cavity, the transverse two side walls of the positive pressure chamber are vertically arranged from the bottom plate in the dust removing head cavity, and the top end of the positive pressure chamber is provided with a separation distance from the top end of the dust removing head cavity;
the moving mechanism is arranged between the supporting transverse plates at two sides and comprises a concave rail and a motor, the concave rail is arranged between the supporting transverse plates at two sides, two ends of the concave rail are respectively and fixedly arranged on the supporting transverse plates at two sides, one end of the concave rail is provided with the motor, the other end of the concave rail is provided with a gear, an internal tooth belt is sleeved between an output shaft of the motor and the gear, the internal tooth belt is arranged in a groove of the concave rail, and a driving wheel on the output shaft of the motor is in meshing transmission connection with the internal tooth belt.
Further, in some embodiments, an empty space is arranged between the outer walls of the two sides of the positive pressure chamber and the inner wall of the cavity of the dust removing head, a negative pressure cavity is formed by the cavity between the inner wall of the cavity of the dust removing head and the outer wall of the positive pressure chamber, the two sides of the positive pressure chamber are respectively provided with a negative pressure cavity, and the negative pressure cavities on the two sides are arranged in the cavity of the dust removing head;
a bottom plate of the positive pressure chamber is provided with a transverse penetrating dust blowing slot, the bottom surface of the positive pressure chamber is provided with two variable cross section rods matched and corresponding to the two variable cross section rods, the variable cross section rods are arranged in parallel with the dust blowing slot, and the two variable cross section rods are respectively arranged at two sides of the dust blowing slot;
The bottom plate of the negative pressure cavity is provided with a first suction slit and a second suction slit which transversely penetrate, the first suction slit, the second suction slit and the dust blowing slit are arranged in parallel, the first suction slit is arranged close to the dust blowing slit, the second suction slit is arranged far away from the dust blowing slit, a separation distance is arranged between the first suction slit and the second suction slit, and a dust blowing and sucking operation distance is arranged between the dust blowing slit and the first suction slit.
Further, in some embodiments, a positive pressure sealing cover is arranged at one end of the positive pressure chamber away from the bottom plate, an air inlet cylinder extending upwards to penetrate through the frame sealing cover is arranged on the positive pressure sealing cover, one end of the air inlet cylinder away from the positive pressure chamber extends out of the frame sealing cover, and the air inlet cylinder is in through connection with the positive pressure chamber;
the height ratio of the positive pressure chamber to the dust removing head cavity is 2/3~3/4:1;
a hanging frame is arranged on the frame sealing cover, and one end of the hanging frame, which is far away from the frame sealing cover, is arranged on the moving mechanism;
the frame body sealing cover is provided with an air suction cylinder which is communicated with the negative pressure cavity, the positive pressure chamber and the negative pressure cavity are respectively arranged in the dust removing head cavity, and the positive pressure chamber and the negative pressure cavity are mutually isolated and mutually not communicated;
the width of the dust blowing slot is equal to the width of the first suction slot and the width of the second suction slot in a ratio of 1:4-5:4-5;
The ratio of the air quantity of the dust blowing slot to the air quantity of the first suction slot is 1:1.5-3, and the air quantity of the second suction slot is equal to the air quantity of the first suction slot.
Further, in some embodiments, a middle supporting beam is arranged in the middle of the bottom frame, two sides of the middle supporting beam are respectively provided with a side supporting beam, the middle supporting beam and the side supporting beams are arranged in the frame of the bottom frame, and the middle supporting beam and the side supporting beams are arranged at intervals;
Positioning grooves matched and corresponding to the carriers are respectively formed in the bottom surfaces of the supporting middle beams and the supporting side beams, two sides of the supporting middle beams are respectively provided with outwards protruding double-side touch wings, and the inner sides of the supporting side beams are provided with inwards protruding inner side touch wings;
The bottom plate of the dust removing head cavity is provided with a side accommodating groove matched and corresponding to the supporting side beam, and the inner side of the side accommodating groove is provided with an inner side avoiding concave table matched and corresponding to the inner side touch wing.
Further, in some embodiments, compressed air flow convex hulls protruding inwards are arranged on the variable cross-section rods, an air inlet space D1 is arranged between the tops of the two variable cross-section rods corresponding to the matching, a convex hull space D2 is arranged between the compressed air flow convex hulls on two opposite sides of the middle parts of the two variable cross-section rods, and the air inlet space D1 is larger than the convex hull space D2, an air outlet space D3 is arranged between the bottoms of the two variable cross-section rods corresponding to the matching, a dust blowing space D4 is arranged on a dust blowing seam arranged on a bottom plate, the dust blowing space D4 is also the width of the dust blowing seam, the air inlet space D1=the air outlet space D3, and the air outlet space D3 is larger than the dust blowing space D4;
The compressed air convex hulls are convex strips;
or the compressed air convex hull is a strip with an arc-shaped section;
Or the compressed air convex hull is a strip with a short chord-shaped section;
The bottom surface of the positive pressure chamber is provided with a butt-group clamping plate matched and corresponding to the variable cross-section rod, and the variable cross-section rod is embedded and clamped in the butt-group clamping plate;
the ratio of the air inlet space D1 to the convex hull space D2 is 5-10:1, the air inlet space D1=the air outlet space D3, and the ratio of the dust blowing space D4 to the convex hull space D2 is 1:1-1.5.
Further, in some embodiments, a sliding groove parallel to the internal tooth belt is formed in the bottom of the groove of the concave rail, a hanging concave sliding seat is sleeved on the concave rail, a mounting beam is arranged at the top end of the hanging concave sliding seat, and the hanging concave sliding seat is hung on the concave rail through the mounting beam;
The bottom surface of the groove of the hanging concave sliding seat is provided with a clamping seat matched and corresponding to the internal tooth belt, the internal tooth belt is clamped in the clamping seat, the clamping seat is tightly matched with the internal tooth belt, the clamping seat is inserted in the sliding groove, and a hanging rack is fixedly arranged below the hanging concave sliding seat.
Further, in some embodiments, the air pressure assembly comprises a positive pressure fan and a negative pressure fan, a transverse carrier plate is arranged between the supporting transverse plates at two sides, two ends of the transverse carrier plate are respectively and fixedly arranged on the supporting transverse plates at two sides, a negative pressure high-efficiency filter bin is arranged on the transverse carrier plate, the negative pressure fan is arranged on the negative pressure high-efficiency filter bin, a negative pressure fan air inlet shell is sleeved on the outer side of the negative pressure fan, a negative pressure fan air exhaust shell is sleeved on the top of the negative pressure fan, and the negative pressure high-efficiency filter bin is connected with an exhaust cylinder on the dust removing mechanism through a guide pipe;
the lower part of the upper frame body is provided with a positive pressure high-efficiency filter bin, the lower part of the positive pressure high-efficiency filter bin is provided with a positive pressure fan, the upper part of the positive pressure fan is sleeved with a positive pressure fan air inlet shell, the lower part of the positive pressure fan is sleeved with a positive pressure fan air exhaust shell, and the positive pressure fan is connected with an air inlet cylinder on the dust removing mechanism through a guide pipe.
The application adopts a non-contact dust removing head to clean and adopts automatic cleaning equipment. The cleaning device of the application corresponds to the size of a chip box (a chip wafer box) on a carrier, and is used for cleaning the carrier, the device of the application is placed on the chip carrier for cleaning, the working condition environment is generally provided with hundreds or thousands of wafer processing carriers (points), the working condition environment is provided with a crown block system, a movable clamp is loaded on the crown block, and when one station is cleaned, the crown block system is used for transporting the cleaning device of the application to the next idle station (carrier position) to be cleaned, and only the station route diagram is matched for cleaning one idle station to the points.
The application adopts a non-contact suspension and gas-electricity isolation design, closes the dust removal working space through the wave air flow dust blowing and the air curtain blocking (negative pressure suction), and adopts a high-efficiency filter arranged on a suction fan (negative pressure fan) to carry out (high-efficiency) filtration on dust, wherein the two fans provide positive pressure or negative pressure air sources without external air sources, and in addition, the battery is used for supplying power without external power sources. The fan and the motor are 24V, and the whole device isolates outside air and electricity.
The dust removing head (the dust blowing head) is blown by the middle dust blowing seam and is clean, the suction seams at the two sides are attracted, the dust removing head is suspended on the carrier and is not contacted, dust is not exposed when the middle dust blowing seam blows and the suction seams at the two sides are attracted, air leakage is avoided when the negative pressure suction (the suction seams) at the two sides is used for preventing the dust from drifting out.
Two suction slits (suction narrow slit channels) are respectively arranged on two sides of the dust removing head, and the slit width of the suction slits is larger than that of the dust blowing slits. The air blown down by the dust blowing slot in the middle of the dust removing head (working gun) can diffuse to two sides, two air curtains of the suction slot are arranged on each side of the two sides, then dust is sucked away, the suction slots on the two sides form the suction air curtain, the dust is prevented from diffusing out of the dust blowing gun, the cleaning efficiency is improved, and the automation degree of equipment is improved.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a schematic view of a bottom frame portion of an embodiment of the present invention;
FIG. 3 is a cross-sectional view of a portion of a dust removing mechanism according to an embodiment of the present invention;
FIG. 4 is a schematic view of the structure of one embodiment of a variable cross-section bar portion of the present invention;
FIG. 5 is a schematic view of another embodiment of a variable cross-section bar portion of the present invention;
FIG. 6 is a schematic view of a dust removing mechanism according to an embodiment of the present invention;
FIG. 7 is a schematic cross-sectional view of a portion of a dust removing mechanism according to an embodiment of the present invention;
FIG. 8 is a schematic view of the wind direction of the dust removing mechanism according to the embodiment of the present invention;
FIG. 9 is a schematic diagram of an embodiment of the present invention;
FIG. 10 is a schematic view showing an assembly of a moving mechanism portion according to an embodiment of the present invention;
FIG. 11 is a schematic view of a moving mechanism part according to an embodiment of the present invention;
FIG. 12 is a schematic view of an assembled pneumatic component portion according to an embodiment of the present invention.
The figure indicates:
Upright post 11, upper frame 12, support cross plate 13, cross carrier 14, bottom frame 21, support center sill 22, positioning groove 23, double-sided touch wing 24, support side sill 25, inner side touch wing 27, dust removing mechanism 31, dust removing head cavity 32, bottom plate 33, frame sealing cover 34, positive pressure sealing cover 35, negative pressure cavity 36, positive pressure chamber 37, air intake cylinder 38, suction cylinder 39, medium accommodating groove 41, avoidance concave table 42, side accommodating groove 43, inner side avoidance concave table 44, compressed air flow convex hull 45, first suction slit 46, second suction slit 47, dust blowing slit 48, variable section bar 49, moving mechanism 51, motor 52, gear 53, inner tooth belt 54, concave rail 55, chute 56, hanging concave slide 57, clamping seat 58, air pressure assembly 61, positive pressure fan 62, positive pressure fan 63, positive pressure fan air intake housing 64, positive pressure fan air intake housing 65, negative pressure filter house 66, negative pressure fan air intake housing 67, negative pressure high efficiency filter house 69, battery 81, conduit 82, clamping plate 83, hanging bracket 85.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to specific embodiments of the present invention and corresponding drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. In the description of the present invention, the meaning of "plurality" is two or more unless specifically defined otherwise.
In the production of semiconductor chips, a carrier surface layer for supporting a processing chip box is provided with three positioning support heads which are uniformly distributed in a separated mode, in order to enable the cleaning device to be free from contacting the carrier surface, a bottom frame 21 of the cleaning device is provided with three support arms which are matched and corresponding to the three positioning support heads, wherein a support middle beam 22 and two support side beams 25 are arranged, positioning grooves 23 which are matched and corresponding to the positioning support heads are formed in the bottoms of the support middle beam 22 and the two support side beams 25, the positioning grooves 23 of the bottom frame 21 are in abutting fit with the positioning support heads of the carrier, and the dust removing heads are suspended on the carrier in a non-contact mode through three points and three short beams to maintain the separation between the bottom frame 21 of the cleaning device and the carrier surface without contacting.
Referring to the drawings, the application comprises a bottom frame 21, wherein upright posts 11 extending upwards are arranged at four corners of the bottom frame 21, an upper frame 12 is arranged at one end of each upright post 11 far away from the bottom frame 21, the upright posts 11 and the upper frame 12 form a mounting frame, a dust removing mechanism 31 is arranged in the mounting frame, a moving mechanism 51 is arranged on the dust removing mechanism 31, an air pressure component 61 is arranged on the moving mechanism 51, and the dust removing mechanism 31, the moving mechanism 51 and the air pressure component 61 are arranged in the mounting frame.
A supporting transverse plate 13 is arranged between the middle parts of two adjacent upright posts 11, another supporting transverse plate 13 matched and corresponding to the two upright posts 11 is arranged between the two upright posts 11 on the other opposite side, two supporting transverse plates 13 are matched and corresponding to the two supporting transverse plates 13, a transverse carrier plate 14 is arranged between the two supporting transverse plates 13, a part of components of the air pressure component 61 are arranged on the transverse carrier plate 14, a battery 81 is arranged on the transverse carrier plate 14, and the battery 81 is arranged below the upper frame 12.
The bottom surface of the positive pressure chamber 37 is provided with a pair of clamping plates 83 matching and corresponding to the variable cross section rods 49, and the variable cross section rods 49 are embedded and clamped in the clamping plates 83 of the pair.
The dust removing mechanism 31 comprises a dust removing head cavity 32, wherein the dust removing head cavity 32 is also a pressure dividing bin, a bottom plate 33 is arranged at the bottom of the dust removing head cavity 32, the dust removing head cavity 32 and the bottom plate 33 are integrally formed, and a frame sealing cover 34 is arranged at the top end of the dust removing head cavity 32.
Further, in one embodiment, the top of the dust removing head cavity 32 is provided with an opening, and the opening at the top end of the dust removing head cavity 32 is provided with a frame sealing cover 34, that is, the frame sealing cover 34 is a sealing cover plate of the dust removing head cavity 32. The dust removing head cavity 32 is internally provided with a positive pressure chamber 37, two lateral walls of the positive pressure chamber 37 are vertically arranged from the bottom plate 33 in the dust removing head cavity 32, the top end of the positive pressure chamber 37 is provided with a separation distance from the top end of the dust removing head cavity 32, namely, a distance between the top end of the positive pressure chamber 37, which is far away from the bottom plate 33, and the frame sealing cover 34 is provided with a distance which is mutually separated.
The ratio of the height of the plenum 37 to the height of the dust removal head cavity 32 is 2/3~3/4:1.
Further, in one embodiment, a positive pressure sealing cover 35 (positive pressure cavity cover plate) is provided at an end of the positive pressure chamber 37 away from the bottom plate 33, an air inlet tube 38 extending upward through the frame sealing cover 34 is provided on the positive pressure sealing cover 35, an end of the air inlet tube 38 away from the positive pressure chamber 37 extends above the frame sealing cover 34, and the air inlet tube 38 is connected with the positive pressure chamber 37 in a penetrating manner.
An empty space is arranged between the outer walls of the two sides of the positive pressure chamber 37 and the inner wall of the dust removing head cavity 32, a negative pressure cavity 36 is formed by a cavity between the inner wall of the dust removing head cavity 32 and the outer wall of the positive pressure chamber 37, the negative pressure cavity 36 is arranged on the outer side of the outer wall of the positive pressure chamber 37, namely, the negative pressure cavities 36 are respectively arranged on the two sides of the positive pressure chamber 37, the negative pressure cavities 36 on the two sides are arranged in the dust removing head cavity 32, an air suction barrel 39 is arranged on the frame sealing cover 34, and the air suction barrel 39 is in through connection with the negative pressure cavity 36. The positive pressure chamber 37 and the negative pressure chamber 36 are respectively arranged in the dust removing head chamber 32, and the positive pressure chamber 37 and the negative pressure chamber 36 are mutually isolated and mutually not communicated.
The frame sealing cover 34 is provided with a hanging frame 84, and one end of the hanging frame 84 away from the frame sealing cover 34 is arranged on the moving mechanism 51.
Further, in one embodiment, a bottom plate 33 (bottom surface) of the plenum 37 is provided with a dust blowing slot 48 passing through transversely, the bottom surface of the plenum 37 is provided with two corresponding variable cross section rods 49, the variable cross section rods 49 are parallel to the dust blowing slot 48, and the two variable cross section rods 49 are respectively arranged at two sides of the dust blowing slot 48.
The variable cross-section rods 49 are provided with compressed air flow convex hulls 45 protruding inwards (facing towards the opposite direction), an air inlet distance D1 is arranged between the tops of the two variable cross-section rods 49 corresponding to the matching, a convex hull distance D2 is arranged between the compressed air flow convex hulls 45 on two opposite sides of the middle parts of the two variable cross-section rods 49, the air inlet distance D1 is larger than the convex hull distance D2, an air outlet distance D3 is arranged between the bottoms of the two variable cross-section rods 49 corresponding to the matching, a dust blowing gap 48 arranged on the bottom plate 33 is provided with a dust blowing distance D4, the dust blowing distance D4 is the width of the dust blowing gap 48, and the air inlet distance D1=the air outlet distance D3, and the air outlet distance D3 is larger than the dust blowing distance D4.
The compressed air convex hulls 45 are convex strips;
Or the compressed air convex hull 45 is a strip with an arc-shaped section;
or the compressed air convex hull 45 is a strip of short chord-wise cross-section.
The variable cross section rod 49 is used for generating a high-frequency high-speed pulse air flow at an outlet position (dust blowing seam 48) through repeated compression and diffusion of compressed air passing through the variable cross section air flow channel and the wide-narrow cross section variable flow channel, so that ultrafine particles are separated from a substrate and then sucked away and collected by surrounding negative pressure air flow.
Further, in one embodiment, the ratio of the air inlet space D1 to the convex hull space D2 is 5-10:1, the air inlet space d1=the air outlet space D3, D1 is equal to D3, and the ratio of the dust blowing space D4 to the convex hull space D2 is 1:1-1.5.
The size of the air gap is D1=D3 > D2 > D4, the air flow is subjected to air channel wide-narrow air channel fluctuation change through D1→D2→D3→D4, and high-frequency high-speed pulse air flow is obtained, and the air port of the dust blowing slot 48 is used for impact dust blowing and air sweeping.
The bottom plate 33 (bottom surface) of the negative pressure cavity 36 is provided with a first suction slit 46 and a second suction slit 47 which transversely penetrate, the first suction slit 46 and the second suction slit 47 are arranged in parallel with the dust blowing slit 48, the first suction slit 46 (inner suction slit) is arranged close to the dust blowing slit 48, the second suction slit 47 (outer suction slit) is arranged far away from the dust blowing slit 48, and a separation distance is arranged between the first suction slit 46 and the second suction slit 47. Further, the first suction slit 46 and the second suction slit 47 are provided penetrating the bottom plate 33 of the negative pressure chamber 36, i.e., the first suction slit 46 and the second suction slit 47 are provided penetrating the bottom plate 33. A blowing and sucking operation interval is provided between the dust blowing slit 48 and the first sucking slit 46.
Further, in one embodiment, the ratio of the width of the dust blowing slit 48 to the width of the first suction slit 46 to the width of the second suction slit 47 is 1:4-5:4-5;
the first suction slit 46 is the same width as the second suction slit 47.
Further, in one embodiment, the air volume of the dust blowing slot 48 is 1:1.5-3, and the air volume of the first suction slot 46 is equal to the air volume of the first suction slot 31.
The middle part of the bottom frame 21 is provided with a supporting middle beam 22, two sides of the supporting middle beam 22 are respectively provided with a supporting side beam 25, the supporting middle beam 22 and the supporting side beams 25 are arranged in the frame of the bottom frame 21, and the supporting middle beam 22 and the supporting side beams 25 are arranged at intervals.
Positioning grooves 23 matched and corresponding to the carriers are respectively formed in the bottom surfaces of the supporting middle beams 22 and the supporting side beams 25, two sides of the supporting middle beams 22 are respectively provided with two outwards-protruding side touch wings 24, and the inner sides of the supporting side beams 25 are provided with inwards-protruding inner side touch wings 27.
Further, in one embodiment, a middle accommodating groove 41 matched and corresponding to the supporting middle beam 22 is formed on the bottom plate 33 of the dust removing head cavity 32, two sides of the middle accommodating groove 41 are provided with two side avoidance concave tables 42 matched and corresponding to the two side touch wings 24, a side accommodating groove 43 matched and corresponding to the supporting side beam 25 is formed on the bottom plate 33 of the dust removing head cavity 32, and an inner side avoidance concave table 44 matched and corresponding to the inner side touch wing 27 is formed on the inner side of the side accommodating groove 43.
Further, in one embodiment, the dust removing mechanism 31 is hung on the moving mechanism 51 through a hanging frame 84, the dust removing mechanism 31 is suspended on the bottom frame 21, and the dust removing mechanism 31 is connected with the air pressure assembly 61 through a conduit 82.
Further, in one embodiment, the dust removing mechanism 31 is hung on the hanging concave sliding seat 57 of the moving mechanism 51 through a hanging rack 84, the dust removing mechanism 31 is suspended on the bottom frame 21, and the dust removing mechanism 31 is connected with the air pressure assembly 61 through a conduit 82.
The moving mechanism 51 is arranged between the supporting transverse plates 13 on two sides, the moving mechanism 51 comprises a concave rail 55 and a motor 52, specifically, the concave rail 55 is arranged between the supporting transverse plates 13 on two sides, two ends of the concave rail 55 are respectively and fixedly arranged on the supporting transverse plates 13 on two sides, one end of the concave rail 55 is provided with the motor 52, the other end of the concave rail 55 is provided with a gear 53, an internal tooth belt 54 is sleeved between an output shaft of the motor 52 and the gear 53, the internal tooth belt 54 is arranged in a groove of the concave rail 55, and a driving wheel on the output shaft of the motor 52 is in meshing transmission connection with the internal tooth belt 54.
A sliding groove 56 parallel to the internal tooth belt 54 is formed in the bottom of a groove of the concave rail 55, a hanging concave sliding seat 57 is sleeved on the concave rail 55, a hanging beam 85 is arranged at the top end of the hanging concave sliding seat 57, the hanging concave sliding seat 57 is hung on the concave rail 55 through the hanging beam 85, a clamping seat 58 matched and corresponding to the internal tooth belt 54 is arranged on the bottom surface of the groove of the hanging concave sliding seat 57, the internal tooth belt 54 is clamped in the clamping seat 58, the clamping seat 58 is tightly matched with the internal tooth belt 54, the clamping seat 58 is inserted into the sliding groove 56, and a hanging frame 84 is fixedly arranged below the hanging concave sliding seat 57.
The motor 52 drives the clamping seat 58 to reciprocate in the sliding groove 56 through the internal tooth belt 54, the clamping seat 58 drives the hanging concave sliding seat 57 to reciprocate on the concave rail 55, and the hanging rack 84 drives the dust removing mechanism 31 to reciprocate.
The pneumatic component 61 comprises a positive pressure fan 62 and a negative pressure fan 63, a transverse carrier plate 14 is arranged between support transverse plates 13 on two sides, two ends of the transverse carrier plate 14 are respectively and fixedly arranged on the support transverse plates 13 on two sides, a negative pressure efficient filter bin 66 is arranged on the transverse carrier plate 14, the negative pressure fan 63 is arranged on the negative pressure efficient filter bin 66, a negative pressure fan air inlet shell 67 is sleeved on the outer side of the negative pressure fan 63, a negative pressure fan air exhaust shell 68 is sleeved on the top of the negative pressure fan 63, and the negative pressure efficient filter bin 66 is connected with an exhaust cylinder on the dust removing mechanism 31 through a guide pipe 82.
The lower side of the upper frame body 12 is provided with a positive pressure high-efficiency filter bin 69, the lower side of the positive pressure high-efficiency filter bin 69 is provided with a positive pressure fan 62, the upper part of the positive pressure fan 62 is sleeved with a positive pressure fan air inlet shell 65, the lower part of the positive pressure fan 62 is sleeved with a positive pressure fan air exhaust shell 64, and the positive pressure fan 62 is connected with an air inlet cylinder on the dust removing mechanism 31 through a conduit 82.
The above detailed description includes references to the accompanying drawings, which form a part of the detailed description. By way of illustration, the drawings show specific embodiments in which the invention may be practiced. These embodiments are also referred to herein as "examples". These examples may include other elements in addition to those shown and described. The inventors contemplate examples using any combination or permutation of the elements shown or described, either with respect to a particular example (or one or more aspects thereof) or with respect to other examples (or one or more aspects thereof) shown or described herein.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202510040318.0A CN119794017B (en) | 2025-01-10 | 2025-01-10 | Dust collector for wafer production |
Applications Claiming Priority (1)
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| CN202510040318.0A CN119794017B (en) | 2025-01-10 | 2025-01-10 | Dust collector for wafer production |
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| CN119794017A8 CN119794017A8 (en) | 2025-05-16 |
| CN119794017B true CN119794017B (en) | 2025-08-12 |
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| CN220819923U (en) * | 2023-07-12 | 2024-04-19 | 苏州中巨苏智能科技有限公司 | Wafer inspection apparatus |
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| US7216655B2 (en) * | 1998-01-09 | 2007-05-15 | Entegris, Inc. | Wafer container washing apparatus |
| CN201332088Y (en) * | 2008-11-12 | 2009-10-21 | 苏州群策科技有限公司 | Automatic dust remover |
| CN207507959U (en) * | 2017-08-03 | 2018-06-19 | 漳浦比速光电科技有限公司 | A kind of sealed in unit processing cleaner |
| CN209843674U (en) * | 2019-06-12 | 2019-12-24 | 无锡新微阳科技有限公司 | Wafer detects uses dust collector |
| JP7433967B2 (en) * | 2020-02-14 | 2024-02-20 | キヤノン株式会社 | cleaning equipment |
| US12288708B2 (en) * | 2021-09-24 | 2025-04-29 | Nanya Technology Corporation | Wafer carrier dry cleaner |
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| CN220819923U (en) * | 2023-07-12 | 2024-04-19 | 苏州中巨苏智能科技有限公司 | Wafer inspection apparatus |
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| CN119794017A (en) | 2025-04-11 |
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Correction item: Classification number False: B08B 9/08(2006.01)|B08B 13/00(2006.01) Correction item: Classification number Correct: B08B 5/02(2006.01)|B08B 13/00(2006.01)|B08B 15/04(2006.01) False: B08B 9/08(2006.01)|B08B 13/00(2006.01) Number: 15-02 Page: The title page Volume: 41 |
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