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CN118812835A - A leveling agent containing 2-substituted benzimidazole groups and its preparation method and application - Google Patents

A leveling agent containing 2-substituted benzimidazole groups and its preparation method and application Download PDF

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CN118812835A
CN118812835A CN202410790461.7A CN202410790461A CN118812835A CN 118812835 A CN118812835 A CN 118812835A CN 202410790461 A CN202410790461 A CN 202410790461A CN 118812835 A CN118812835 A CN 118812835A
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substituted benzimidazole
copper
leveling agent
leveler
electroplating
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张小春
吴正旭
翁行尚
陈伟健
赵鹏
庄学文
杨宗美
张俊杰
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Institute of Chemical Engineering of Guangdong Academy of Sciences
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G65/00Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
    • C08G65/02Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring
    • C08G65/26Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds
    • C08G65/2618Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds the other compounds containing nitrogen
    • C08G65/2621Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds the other compounds containing nitrogen containing amine groups
    • C08G65/263Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds the other compounds containing nitrogen containing amine groups containing heterocyclic amine groups
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/423Plated through-holes or plated via connections characterised by electroplating method

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  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
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  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
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  • Metallurgy (AREA)
  • Electroplating And Plating Baths Therefor (AREA)

Abstract

The invention discloses a leveling agent containing 2-substituted benzimidazole groups, which comprises functional components, wherein the functional components are polymers obtained by reacting 2-substituted benzimidazole compounds with diglycidyl ether compounds. The 2-substituted benzimidazole group enables the leveling agent to have higher positive charge amount, be easier to adsorb on copper surface and further inhibit deposition of copper ions, and have higher binding force on copper surface. Meanwhile, the existence of the 2-substituent group can further lead the leveling agent to have a molecular structure with larger steric hindrance, further increase the difficulty of the leveling agent entering and being adsorbed in the hole, and lead the inside and outside of the blind hole to form larger deposition speed difference, thereby leading the blind hole electroplating to have the effects of high copper filling speed, lower surface copper thickness, basically no gap in filling and good appearance state, meeting the production requirement of blind hole electroplating, improving the production efficiency and reducing the process cost.

Description

一种含2-取代苯并咪唑基团整平剂及其制备方法与应用A leveling agent containing 2-substituted benzimidazole groups and its preparation method and application

技术领域Technical Field

本发明属于电镀技术领域,具体涉及一种含2-取代苯并咪唑基团整平剂及其制备方法与应用。The invention belongs to the technical field of electroplating, and in particular relates to a leveling agent containing 2-substituted benzimidazole groups and a preparation method and application thereof.

背景技术Background Art

随着消费类电子产品不断的轻薄化、集成化和多功能化发展,使印刷电路板所布线密度和孔密度要求越来越高,其制造也越来越复杂。为了实现电路板高密度布线一般采用增加盲孔或埋孔数的方法。因此,盲孔电镀填孔技术成为了解决这个问题的有效手段,也成为高密度互联板发展的关键技术之一。With the continuous development of thinner, integrated and multifunctional consumer electronic products, the wiring density and hole density of printed circuit boards are becoming higher and higher, and their manufacturing is becoming more and more complicated. In order to achieve high-density wiring of circuit boards, the method of increasing the number of blind holes or buried holes is generally adopted. Therefore, blind hole electroplating filling technology has become an effective means to solve this problem, and it has also become one of the key technologies for the development of high-density interconnection boards.

为保证电路连接的可靠性,同时确保线路制作良品率和减少后续蚀刻、减铜成本和难度,盲孔要求被电镀铜完全填充,无包孔或裂缝等缺陷且铜面尽可能薄,此工艺过程中盲孔的填孔率(一般以凹陷值(Dimple值)表示,当镀铜后盲孔镀层中心位置往下凹陷则Dimple值为正,如果镀层中心凸出铜面则Dimple值为负。)以及电镀后面铜厚度是衡量镀铜液性能的重要指标。In order to ensure the reliability of circuit connection, ensure the yield of circuit production and reduce the cost and difficulty of subsequent etching and copper reduction, the blind hole is required to be completely filled with electroplated copper, without defects such as cladding or cracks, and the copper surface is as thin as possible. In this process, the filling rate of the blind hole (generally expressed as a depression value (Dimple value), when the center of the blind hole plating layer is depressed downward after copper plating, the Dimple value is positive, and if the center of the plating layer protrudes from the copper surface, the Dimple value is negative.) and the copper thickness after electroplating are important indicators for measuring the performance of the copper plating solution.

盲孔填孔电镀工艺中用到的镀铜有机添加剂主要有三类:加速剂、抑制剂和整平剂。加速剂(又称光亮剂),主要有SPS(聚二硫二丙烷磺酸钠)和MPS(3-硫基丙烷磺酸钠)等。抑制剂(又称载运剂)多为聚醚类化合物,常用的有聚乙二醇、PO/EO嵌段式聚醚等。整平剂是能否填满盲孔至关重要的添加剂,一般为含氮杂环化合物或者季铵盐化合物,其分子本身带正电荷,能够较易吸附在板面突起的区域,即高电流密度区,使该处的电镀速度变慢,抑制高电流密度区域铜的沉积,而在板面凹陷处及盲孔孔内吸附较少,使得此处的铜沉积作用不受影响,从而达到填平盲孔的效果。季铵盐化合物整平剂是电镀添加剂的研究热点之一,目前研究发现含氮杂环小分子与二缩水甘油醚类化合物反应得到的聚合物整平剂既能发挥类似于抑制剂聚醚的抑制作用,又具备季铵盐的整平作用,具有良好的填充能力。There are three main types of copper plating organic additives used in the blind hole filling electroplating process: accelerators, inhibitors and levelers. Accelerators (also known as brighteners) mainly include SPS (sodium polydisulfide propane sulfonate) and MPS (sodium 3-thiopropane sulfonate). Inhibitors (also known as carriers) are mostly polyether compounds, and commonly used ones are polyethylene glycol, PO/EO block polyether, etc. Levelers are crucial additives for filling blind holes. They are generally nitrogen-containing heterocyclic compounds or quaternary ammonium salt compounds. Their molecules themselves are positively charged and can be easily adsorbed on the protruding areas of the board surface, that is, high current density areas, which slows down the electroplating speed there and inhibits the deposition of copper in the high current density area. However, there is less adsorption in the concave areas of the board surface and in the blind holes, so that the copper deposition effect here is not affected, thereby achieving the effect of filling the blind holes. Quaternary ammonium salt compound levelers are one of the research hotspots of electroplating additives. Current studies have found that the polymer levelers obtained by the reaction of nitrogen-containing heterocyclic small molecules with diglycidyl ether compounds can not only play an inhibitory role similar to that of inhibitor polyethers, but also have the leveling effect of quaternary ammonium salts and have good filling capacity.

《苯基修饰含氮整平剂对高厚径比盲孔镀铜的影响》中公开了一种苯基修饰的含氮整平剂,该文献中分别选用可溶于水的咪唑、4-苯基咪唑、2-苯基咪唑和苯并咪唑为原料,与1,4-丁二醇二缩水甘油醚和仲胺反应合成季铵盐整平剂,制得的整平剂均具有较好的盲孔填孔能力,表面铜厚在16μm左右,其中苯并咪唑具有稳定的平面结构,咪唑环和苯环共平面,形成一个高度共轭π体系,使得苯并咪唑型季铵盐中平行吸附在铜表面的面积相比于其他苯基咪唑更大,作为整平剂应用于盲孔填孔电镀中能达到比其他苯基咪唑型季铵盐更高的填孔率与更低的面铜厚度。"The Effect of Phenyl-Modified Nitrogen-Containing Leveler on Copper Plating of High Aspect Ratio Blind Holes" discloses a phenyl-modified nitrogen-containing leveler. In this document, water-soluble imidazole, 4-phenylimidazole, 2-phenylimidazole and benzimidazole are selected as raw materials, respectively, and reacted with 1,4-butanediol diglycidyl ether and secondary amine to synthesize a quaternary ammonium salt leveler. The prepared levelers all have good blind hole filling ability, and the surface copper thickness is about 16μm. Among them, benzimidazole has a stable planar structure, and the imidazole ring and the benzene ring are coplanar to form a highly conjugated π system, so that the area of parallel adsorption on the copper surface of the benzimidazole-type quaternary ammonium salt is larger than that of other phenylimidazoles. When used as a leveler in blind hole filling electroplating, it can achieve a higher filling rate and a lower surface copper thickness than other phenylimidazole-type quaternary ammonium salts.

目前季铵盐化合物整平剂的研究主要集中在现有商品化含氮杂环化合物的筛选及其通孔填充效果的探究,较少关注研究整平剂结构或取代基对于整平能力的影响,为了满足日渐升高的产业需求,开发和设计合成新型高效整平剂,进一步提高盲孔填孔电镀性能尤为重要。At present, the research on quaternary ammonium salt compound levelers is mainly focused on the screening of existing commercial nitrogen-containing heterocyclic compounds and the exploration of their through-hole filling effects. Less attention is paid to the study of the influence of the structure or substituents of the leveler on the leveling ability. In order to meet the increasing industrial demand, it is particularly important to develop and design the synthesis of new high-efficiency levelers to further improve the blind hole filling electroplating performance.

发明内容Summary of the invention

本发明的首要目的是提供一种含2-取代苯并咪唑基团整平剂,该整平剂应用于盲孔电镀中能够在合理电流密度范围内,实现凹陷值低、面铜厚度小、铜层均匀、平整、外观状态好的效果,满足盲孔电镀的生产要求,同时可提高生产效率,降低工艺成本。The primary purpose of the present invention is to provide a leveling agent containing a 2-substituted benzimidazole group. The leveling agent is applied to blind hole electroplating and can achieve the effects of low depression value, small surface copper thickness, uniform and flat copper layer, and good appearance within a reasonable current density range, thereby meeting the production requirements of blind hole electroplating, improving production efficiency, and reducing process costs.

本发明的第二目的是提供一种含2-取代苯并咪唑基团整平剂的制备方法。The second object of the present invention is to provide a method for preparing a leveler containing 2-substituted benzimidazole groups.

本发明的第三目的是提供一种电镀液。A third object of the present invention is to provide an electroplating solution.

本发明的上述目的通过以下技术方案实现:The above-mentioned object of the present invention is achieved by the following technical solutions:

一种含2-取代苯并咪唑基团整平剂,所述含2-取代苯并咪唑基团整平剂包括功效成分,所述功效成分为2-取代苯并咪唑化合物与二缩水甘油醚类化合物反应得到的聚合物,2-取代苯并咪唑化合物和二缩水甘油醚类化合物的结构式分别如式Ⅰ和式Ⅱ所示:A leveler containing 2-substituted benzimidazole groups, the leveler containing 2-substituted benzimidazole groups comprising an effective component, the effective component is a polymer obtained by reacting a 2-substituted benzimidazole compound with a diglycidyl ether compound, the structural formulas of the 2-substituted benzimidazole compound and the diglycidyl ether compound are shown in Formula I and Formula II, respectively:

其中,所述2-取代苯并咪唑化合物的R1为C5-C10烷基、对卤苄基、2,4-二卤苄基、3,4-二卤苄基中的一种;Wherein, R1 of the 2-substituted benzimidazole compound is one of C5 - C10 alkyl, p-halobenzyl, 2,4-dihalobenzyl, and 3,4-dihalobenzyl;

所述二缩水甘油醚类化合物的R2为C1-C10烷基。R 2 of the diglycidyl ether compound is a C 1 -C 10 alkyl group.

优选地,所述聚合物可选用一种或多种2-取代苯并咪唑化合物与一种或多种二缩水甘油醚类化合物反应得到。Preferably, the polymer can be obtained by reacting one or more 2-substituted benzimidazole compounds with one or more diglycidyl ether compounds.

优选地,所述聚合物的数均分子量为500-25000。Preferably, the number average molecular weight of the polymer is 500-25000.

更优选地,所述聚合物的数均分子量为500-10000。More preferably, the number average molecular weight of the polymer is 500-10,000.

一种含2-取代苯并咪唑基团整平剂的制备方法,包括如下步骤:A method for preparing a leveler containing a 2-substituted benzimidazole group comprises the following steps:

将2-取代苯并咪唑化合物溶于溶剂中,滴加二缩水甘油醚类化合物进行缩合反应得到聚合物,蒸馏回收溶剂后往聚合物中加入适量水和硫酸溶液调节pH至酸性,得到所述含2-取代苯并咪唑基团整平剂。The 2-substituted benzimidazole compound is dissolved in a solvent, a diglycidyl ether compound is added dropwise to carry out a condensation reaction to obtain a polymer, and after distilling and recovering the solvent, appropriate amounts of water and sulfuric acid solution are added to the polymer to adjust the pH to acidic to obtain the leveling agent containing the 2-substituted benzimidazole group.

优选地,所述2-取代苯并咪唑化合物与二缩水甘油醚类化合物摩尔比为0.5-2:1。Preferably, the molar ratio of the 2-substituted benzimidazole compound to the diglycidyl ether compound is 0.5-2:1.

优选地,所述2-取代苯并咪唑化合物与溶剂质量比为1:1-10。Preferably, the mass ratio of the 2-substituted benzimidazole compound to the solvent is 1:1-10.

优选地,所述溶剂为甲醇、乙醇、异丙醇、乙酸乙酯、氯仿、四氢呋喃、甲苯、二甲苯中的一种或多种。Preferably, the solvent is one or more of methanol, ethanol, isopropanol, ethyl acetate, chloroform, tetrahydrofuran, toluene and xylene.

优选地,所述酸溶液的质量分数为20%-50%。Preferably, the mass fraction of the acid solution is 20%-50%.

优选地,所述含2-取代苯并咪唑基团整平剂的pH为1-4。Preferably, the pH of the leveler containing 2-substituted benzimidazole groups is 1-4.

2-取代苯并咪唑化合物与二缩水甘油醚类化合物制备所得的一些聚合物在pH为中性的条件下在水中的溶解性较差,而在pH为酸性的条件下在水中的溶解性较好,且盲孔电镀使用的电镀液为酸性,整平剂制备成酸性溶液有助于其更好地分散在电镀液中。Some polymers prepared from 2-substituted benzimidazole compounds and diglycidyl ether compounds have poor solubility in water under neutral pH conditions, but have good solubility in water under acidic pH conditions. The plating solution used for blind hole electroplating is acidic, and preparing the leveling agent into an acidic solution helps it to be better dispersed in the plating solution.

具体地,蒸馏回收溶剂采用低于100℃的常压或减压蒸馏回收。Specifically, the solvent is recovered by distillation at normal pressure or reduced pressure below 100°C.

一种电镀液,所述电镀液含有上述的含2-取代苯并咪唑基团整平剂。An electroplating solution contains the above-mentioned leveler containing 2-substituted benzimidazole groups.

优选地,所述电镀液中整平剂的含量为0.5-10ppm。Preferably, the content of the leveler in the electroplating solution is 0.5-10 ppm.

优选地,所述电镀液中除了整平剂外,还含有铜离子源、卤离子源、抑制剂、光亮剂和电解质。Preferably, the electroplating solution contains, in addition to the leveler, a copper ion source, a halide ion source, an inhibitor, a brightener and an electrolyte.

更优选地,所述铜离子源选自五水硫酸铜,卤离子源选自盐酸,抑制剂选用聚乙二醇(PEG-10000),光亮剂选用聚二硫二丙烷磺酸钠(SPS),电解质选用硫酸。More preferably, the copper ion source is selected from copper sulfate pentahydrate, the halide ion source is selected from hydrochloric acid, the inhibitor is selected from polyethylene glycol (PEG-10000), the brightener is selected from sodium polydisulfide propane sulfonate (SPS), and the electrolyte is selected from sulfuric acid.

进一步优选地,所述铜离子源的浓度为190-260g/L(以五水硫酸铜计算),所述卤离子源的浓度为50-80ppm(以氯离子计算),所述电解质的浓度为40-100g/L(以硫酸计算)。Further preferably, the concentration of the copper ion source is 190-260 g/L (calculated as copper sulfate pentahydrate), the concentration of the halide ion source is 50-80 ppm (calculated as chloride ions), and the concentration of the electrolyte is 40-100 g/L (calculated as sulfuric acid).

进一步优选地,所述抑制剂的在电镀液中的含量为200-600ppm,所述光亮剂的在电镀液中的含量为0.5-4ppm。Further preferably, the content of the inhibitor in the electroplating solution is 200-600 ppm, and the content of the brightener in the electroplating solution is 0.5-4 ppm.

上述电镀液在盲孔电镀铜中的应用。Application of the above electroplating solution in blind hole copper electroplating.

与现有技术相比,本发明的有益效果是:Compared with the prior art, the present invention has the following beneficial effects:

(1)本发明含有2-取代苯并咪唑基团整平剂中的2-取代位上的基团对苯并咪唑环内起吸电子作用,在2-取代苯并咪唑化合物和二缩水甘油醚类化合物聚合生成聚季铵盐的过程中使得聚季铵盐的正电荷与没有取代基的苯并咪唑季铵盐相比进一步加强,从而使得整平剂更容易吸附在面铜进而抑制铜离子的沉积,2-取代苯并咪唑基团可与铜面发生络合,形成偶极键,对铜面有较高的结合力,该高结合力使得整平剂一旦结合在面铜就难以脱附。同时,2-取代位上基团的存在还可使整平剂具有较大空间位阻的分子结构,进一步加大整平剂进入并吸附在孔内的难度使得孔内整平剂浓度远远少于孔外,导致整平剂难以对孔内产生抑制作用,孔内沉积快,孔外沉积慢,实现盲孔内外形成了较大的沉积速度差,从而使盲孔电镀具有填铜速度快、面铜厚度较低、填充基本无空隙、外观状态良好的效果,满足盲孔电镀的生产要求,提高了生产效率,降低了工艺成本。(1) The group at the 2-substituted position in the leveling agent containing 2-substituted benzimidazole groups of the present invention plays an electron-withdrawing role in the benzimidazole ring. In the process of polymerizing the 2-substituted benzimidazole compound and the diglycidyl ether compound to form the polyquaternary ammonium salt, the positive charge of the polyquaternary ammonium salt is further enhanced compared with the benzimidazole quaternary ammonium salt without a substituent, so that the leveling agent is more easily adsorbed on the surface copper and thus inhibits the deposition of copper ions. The 2-substituted benzimidazole group can be complexed with the copper surface to form a dipole bond, and has a higher binding force to the copper surface. The high binding force makes it difficult for the leveling agent to be desorbed once it is bound to the surface copper. At the same time, the presence of the group at the 2-substitution position can also make the leveler have a molecular structure with a large steric hindrance, further increasing the difficulty of the leveler entering and adsorbing in the hole, making the concentration of the leveler in the hole much less than that outside the hole, resulting in the leveler being difficult to inhibit the hole, and the deposition in the hole is fast, and the deposition outside the hole is slow, so that a large deposition rate difference is formed inside and outside the blind hole, so that the blind hole electroplating has the effects of fast copper filling speed, low surface copper thickness, basically no gaps in filling, and good appearance, which meets the production requirements of blind hole electroplating, improves production efficiency, and reduces process costs.

(2)本发明创新采用2-取代苯并咪唑作为单体,采用溶剂将非水溶性的2-取代苯并咪唑溶解后加入二缩水甘油醚类化合物均相聚合,随着聚合的进行苯并咪唑环上的N季铵盐化和环氧结构开环生成羟基,使得聚合物水溶性不断增强,最后通过回收溶剂,配水配酸形成均相水溶液,即得整平剂,扩展了新系列的盲孔整平剂。(2) The present invention innovatively uses 2-substituted benzimidazole as a monomer, uses a solvent to dissolve the water-insoluble 2-substituted benzimidazole, and then adds a diglycidyl ether compound for homogeneous polymerization. As the polymerization proceeds, the N-quaternary ammonium salt on the benzimidazole ring and the epoxy structure are opened to generate hydroxyl groups, so that the water solubility of the polymer is continuously enhanced. Finally, the solvent is recovered and water and acid are added to form a homogeneous aqueous solution to obtain a leveling agent, thereby expanding a new series of blind hole leveling agents.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为使用实施例1所得的整平剂进行盲孔电镀后所得的镀件的切片图。FIG. 1 is a cross-sectional view of a plated part obtained after blind hole electroplating using the leveler obtained in Example 1.

图2为使用实施例2所得的整平剂进行盲孔电镀后所得的镀件的切片图。FIG. 2 is a cross-sectional view of a plated part obtained after blind hole electroplating using the leveler obtained in Example 2.

图3为使用对比例1所得的整平剂进行盲孔电镀后所得的镀件的切片图。FIG3 is a cross-sectional view of a plated part obtained after blind hole electroplating using the leveler obtained in Comparative Example 1.

图4为使用对比例2所得的整平剂进行盲孔电镀后所得的镀件的切片图。FIG. 4 is a cross-sectional view of a plated component obtained after blind hole electroplating using the leveler obtained in Comparative Example 2.

图5为使用对比例3所得的整平剂进行盲孔电镀后所得的镀件的切片图。FIG5 is a cross-sectional view of a plated part obtained after blind hole electroplating using the leveler obtained in Comparative Example 3.

图6为使用对比例4所得的整平剂进行盲孔电镀后所得的镀件的切片图。FIG. 6 is a cross-sectional view of a plated part obtained after blind hole electroplating using the leveler obtained in Comparative Example 4.

图7为使用实施例1所得的整平剂进行盲孔电镀后的板面图。FIG. 7 is a board surface diagram after blind hole electroplating using the leveling agent obtained in Example 1.

图8为使用对比例2所得的整平剂进行盲孔电镀后的板面图。FIG8 is a board surface diagram after blind hole electroplating using the leveler obtained in Comparative Example 2.

图9为使用对比例4所得的整平剂进行盲孔电镀后的板面图。FIG. 9 is a board surface diagram after blind hole electroplating using the leveler obtained in Comparative Example 4.

具体实施方式DETAILED DESCRIPTION

为了更清楚、完整的描述本发明的技术方案,以下通过具体实施例进一步详细说明本发明,应当理解,此处所描述的具体实施例仅用于解释本发明,并不用于限定本发明,可以在本发明权利限定的范围内进行各种改变。In order to more clearly and completely describe the technical solution of the present invention, the present invention is further described in detail through specific embodiments below. It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention. Various changes can be made within the scope of the rights of the present invention.

实施例1Example 1

取21.8g(0.1mol)2-庚基苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入130.8g甲醇,加热升温到40℃缓慢滴加20.4g(0.1mol)1,4-丁二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应2h,常压蒸馏回收甲醇,冷却至室温往聚合物中加入90g水和12mL50%硫酸溶液调至pH=1,获得黄色液体,即为含2-庚基苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为2130。Take 21.8g (0.1mol) of 2-heptylbenzimidazole and add it to a 250mL round-bottom flask equipped with a stirrer, a condenser, a thermometer, and a dropping funnel. Add 130.8g of methanol, heat to 40°C, slowly drop 20.4g (0.1mol) of 1,4-butanediol diglycidyl ether, and after the dropwise addition completes the reaction to a homogeneous system, continue to heat and reflux to continue the reaction for 2h, recover the methanol by atmospheric distillation, cool to room temperature, add 90g of water and 12mL of 50% sulfuric acid solution to the polymer and adjust to pH = 1 to obtain a yellow liquid, which is a leveler containing 2-heptylbenzimidazole groups, and the number average molecular weight of the polymer contained in the leveler is 2130.

实施例2Example 2

取19.0g(0.1mol)2-戊基苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入95g甲醇,加热升温到40℃缓慢滴加20.4g(0.1mol)1,4-丁二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应2h,常压蒸馏回收甲醇,冷却至室温往聚合物中加入90g水和12mL 50%硫酸溶液调至pH=1,获得黄色液体,即为含2-戊基苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为1886。Take 19.0g (0.1mol) of 2-pentylbenzimidazole and add it into a 250mL round-bottom flask equipped with a stirrer, a condenser, a thermometer, and a dropping funnel. Add 95g of methanol, heat to 40°C, and slowly drop 20.4g (0.1mol) of 1,4-butanediol diglycidyl ether. After the dropwise addition is completed and the reaction becomes a homogeneous system, continue to heat and heat to reflux and continue the reaction for 2h. Recover methanol by atmospheric distillation, cool to room temperature, add 90g of water and 12mL of 50% sulfuric acid solution to the polymer and adjust to pH=1 to obtain a yellow liquid, which is a leveler containing 2-pentylbenzimidazole groups. The number average molecular weight of the polymer contained in the leveler is 1886.

实施例3Example 3

取23.2g(0.11mol)2-辛基苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入139.2g乙醇,加热升温到40℃缓慢滴加20.4g(0.1mol)1,4-丁二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应3h,常压蒸馏回收乙醇,冷却至室温往聚合物中加入90g水和12mL50%硫酸溶液调至pH=1.5,获得黄色液体,即为含2-辛基苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为2417。Take 23.2g (0.11mol) of 2-octylbenzimidazole and add it to a 250mL round-bottom flask with a stirrer, a condenser, a thermometer, and a dropping funnel. Add 139.2g of ethanol, heat to 40°C, slowly drop 20.4g (0.1mol) of 1,4-butanediol diglycidyl ether, and after the dropwise addition completes the reaction to a homogeneous system, continue to heat and reflux to continue the reaction for 3h, recover the ethanol by atmospheric distillation, cool to room temperature, add 90g of water and 12mL of 50% sulfuric acid solution to the polymer and adjust to pH = 1.5 to obtain a yellow liquid, which is a leveler containing 2-octylbenzimidazole groups. The number average molecular weight of the polymer contained in the leveler is 2417.

实施例4Example 4

取22.0g(0.09mol)2-对氯苄基苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入154g乙醇,加热升温到50℃缓慢滴加20.4g(0.1mol)1,4-丁二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应4.5h,常压蒸馏回收乙醇,冷却至室温往聚合物中加入90g水和10mL50%硫酸溶液调至pH=1.3,获得黄色液体,即为含2-对氯苄基苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为3674。Take 22.0g (0.09mol) of 2-p-chlorobenzylbenzimidazole and add it to a 250mL round-bottom flask with a stirrer, a condenser, a thermometer, and a dropping funnel. Add 154g of ethanol, heat to 50°C, and slowly drop 20.4g (0.1mol) of 1,4-butanediol diglycidyl ether. After the dropwise addition is completed and the reaction is a homogeneous system, continue to heat and heat to reflux and continue the reaction for 4.5h. Recover the ethanol by atmospheric distillation, cool to room temperature, add 90g of water and 10mL of 50% sulfuric acid solution to the polymer and adjust the pH to 1.3 to obtain a yellow liquid, which is a leveler containing 2-p-chlorobenzylbenzimidazole groups. The number average molecular weight of the polymer contained in the leveler is 3674.

实施例5Example 5

取22.4g(0.08mol)2-(2,4-二氯苄基)苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入134.4g四氢呋喃,加热升温到50℃缓慢滴加20.4g(0.1mol)1,4-丁二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应5h,常压蒸馏回收四氢呋喃,冷却至室温往聚合物中加入90g水和10mL 50%硫酸溶液调至pH=1.5,获得黄色液体,即为含2-(2,4-二氯苄基)苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为4821。Take 22.4g (0.08mol) of 2-(2,4-dichlorobenzyl)benzimidazole and add it into a 250mL round-bottom flask equipped with a stirrer, a condenser, a thermometer, and a dropping funnel. Add 134.4g of tetrahydrofuran, heat to 50°C, slowly drop 20.4g (0.1mol) of 1,4-butanediol diglycidyl ether, and after the dropwise addition is completed and the reaction is a homogeneous system, continue to heat and heat to reflux and continue the reaction for 5h, recover tetrahydrofuran by atmospheric distillation, cool to room temperature, add 90g of water and 10mL of 50% sulfuric acid solution to the polymer and adjust the pH to 1.5 to obtain a yellow liquid, which is a leveler containing 2-(2,4-dichlorobenzyl)benzimidazole groups. The number average molecular weight of the polymer contained in the leveler is 4821.

实施例6Example 6

取28.0g(0.1mol)2-(3,4-二氯苄基)苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入140g甲苯,加热升温到50℃缓慢滴加23.2g(0.1mol)1,6-己二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应2h,减压蒸馏回收甲苯,冷却至室温往聚合物中加入90g水和12mL 50%硫酸溶液调至pH=1,获得黄色液体,即为含2-(3,4-二氯苄基)苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为2747。Take 28.0g (0.1mol) of 2-(3,4-dichlorobenzyl)benzimidazole and add it into a 250mL round-bottom flask equipped with a stirrer, a condenser, a thermometer, and a dropping funnel. Add 140g of toluene, heat to 50°C, slowly drop 23.2g (0.1mol) of 1,6-hexanediol diglycidyl ether, and after the dropwise addition is completed and the reaction is a homogeneous system, continue to heat and heat to reflux and continue the reaction for 2h, recover the toluene by vacuum distillation, cool to room temperature, add 90g of water and 12mL of 50% sulfuric acid solution to the polymer and adjust the pH to 1 to obtain a yellow liquid, which is a leveler containing 2-(3,4-dichlorobenzyl)benzimidazole groups, and the number average molecular weight of the polymer contained in the leveler is 2747.

实施例7Example 7

取10.9g(0.05mol)2-庚基苯并咪唑和12.2g(0.05mol)2-对氯苄基苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入138.6g乙醇,加热升温到40℃缓慢滴加23.2g(0.1mol)1,6-己二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应3h,常压蒸馏回收乙醇,冷却至室温往聚合物中加入90g水和12mL50%硫酸溶液调至pH=1,获得黄色液体,即为含2-庚基苯并咪唑和2-对氯苄基苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为2674。10.9 g (0.05 mol) of 2-heptylbenzimidazole and 12.2 g (0.05 mol) of 2-p-chlorobenzylbenzimidazole were added to a 250 mL round-bottom flask equipped with a stirrer, a condenser, a thermometer, and a dropping funnel. 138.6 g of ethanol was added, and the temperature was raised to 40°C, and 23.2 g (0.1 mol) of 1,6-hexanediol diglycidyl ether was slowly added dropwise. After the addition was completed and the reaction was completed to a homogeneous system, the temperature was continued to be raised to reflux and the reaction was continued for 3 hours. The ethanol was recovered by atmospheric distillation, and the polymer was cooled to room temperature. 90 g of water and 12 mL of 50% sulfuric acid solution were added to the polymer to adjust the pH to 1 to obtain a yellow liquid, which was a leveler containing 2-heptylbenzimidazole and 2-p-chlorobenzylbenzimidazole groups. The number average molecular weight of the polymer contained in the leveler was 2674.

实施例8Example 8

取10.54g(0.05mol)2-辛基苯并咪唑和14.0g(0.05mol)2-(3,4-二氯苄基)苯并咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入128.4g甲苯,加热升温到50℃缓慢滴加23.2g(0.1mol)1,6-己二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应6h,减压蒸馏回收甲苯,冷却至室温往聚合物中加入90g水和12mL50%硫酸溶液调至pH=1,获得黄色液体,即为含2-辛基苯并咪唑和2-(3,4-二氯苄基)苯并咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为8314。10.54 g (0.05 mol) of 2-octylbenzimidazole and 14.0 g (0.05 mol) of 2-(3,4-dichlorobenzyl)benzimidazole were added to a 250 mL round-bottom flask equipped with a stirrer, a condenser, a thermometer, and a dropping funnel. 128.4 g of toluene was added, and the temperature was raised to 50° C., and 23.2 g (0.1 mol) of 1,6-hexanediol diglycidyl ether was slowly added dropwise. After the addition was completed and the reaction was completed to a homogeneous system, the temperature was continued to be raised to reflux and the reaction was continued for 6 hours. The toluene was recovered by vacuum distillation, and the polymer was cooled to room temperature. 90 g of water and 12 mL of 50% sulfuric acid solution were added to the polymer to adjust the pH to 1 to obtain a yellow liquid, which was a leveler containing 2-octylbenzimidazole and 2-(3,4-dichlorobenzyl)benzimidazole groups. The number average molecular weight of the polymer contained in the leveler was 8314.

对比例1Comparative Example 1

取14.65g(0.1mol)2-苯基咪唑加入带有搅拌、冷凝管、温度计、滴液漏斗的250mL圆底烧瓶中加入130.8g甲醇,加热升温到40℃缓慢滴加20.4g(0.1mol)1,4-丁二醇二缩水甘油醚,滴加完成反应至均相体系后,继续加热升温至回流继续反应2h,常压蒸馏回收甲醇,冷却至室温往聚合物中加入90g水和12mL50%硫酸溶液调至pH=1,获得黄色液体,即为含2-苯基咪唑基团的整平剂,该整平剂中所含聚合物的数均分子量为1673。Take 14.65g (0.1mol) of 2-phenylimidazole and add it to a 250mL round-bottom flask equipped with a stirrer, a condenser, a thermometer, and a dropping funnel. Add 130.8g of methanol, heat to 40°C, and slowly drop 20.4g (0.1mol) of 1,4-butanediol diglycidyl ether. After the dropwise addition completes the reaction to a homogeneous system, continue to heat and heat to reflux and continue the reaction for 2h. Recover methanol by atmospheric distillation, cool to room temperature, add 90g of water and 12mL of 50% sulfuric acid solution to the polymer and adjust to pH = 1 to obtain a yellow liquid, which is a leveler containing 2-phenylimidazole groups. The number average molecular weight of the polymer contained in the leveler is 1673.

对比例2Comparative Example 2

本对比例提供一种整平剂其制备过程与对比例1基本相同,不同之处在于:将2-苯基咪唑替换为4-苯基咪唑,该整平剂中所含聚合物的数均分子量为1641。This comparative example provides a leveling agent, and its preparation process is basically the same as that of comparative example 1, except that: 2-phenylimidazole is replaced by 4-phenylimidazole, and the number average molecular weight of the polymer contained in the leveling agent is 1641.

对比例3Comparative Example 3

本对比例提供一种从市场购入的含4-苯基咪唑基团的整平剂,由摩尔比为1:1的4-苯基咪唑和1,4-丁二醇二缩水甘油醚以水为溶剂制备得到,该整平剂中所含聚合物的数均分子量为1577。This comparative example provides a leveler containing 4-phenylimidazole groups purchased from the market, which is prepared from 4-phenylimidazole and 1,4-butanediol diglycidyl ether in a molar ratio of 1:1 using water as a solvent. The number average molecular weight of the polymer contained in the leveler is 1577.

对比例4Comparative Example 4

本对比例提供一种整平剂其制备过程与对比例1基本相同,不同之处在于:将2-苯基咪唑替换为苯并咪唑,苯并咪唑加入质量为11.93g,该整平剂中所含聚合物的数均分子量为1518。This comparative example provides a leveling agent, and its preparation process is basically the same as that of comparative example 1, except that: 2-phenylimidazole is replaced by benzimidazole, the added mass of benzimidazole is 11.93g, and the number average molecular weight of the polymer contained in the leveling agent is 1518.

性能测试Performance Testing

电镀液配置:将实施例1-实施例8和对比例1-对比例4中的整平剂分别按表1配方配置电镀液。Preparation of electroplating solution: The leveling agents in Examples 1 to 8 and Comparative Examples 1 to 4 were respectively prepared into electroplating solutions according to the formulas in Table 1.

表1.填孔镀铜电镀液Table 1. Via-filling copper plating solutions

电镀方法:分别在装有实施例1-实施例8和对比例1-对比例4制得电镀液的带鼓气搅拌装置(鼓气速率:4L/min)并具有磷铜板作为阳极的1.5L哈林槽中,放入经过化学沉铜(化学沉铜处理是在原本不导电的盲孔内沉积上一层1μm以内的铜层使孔内获得导电性,方便后续的盲孔电镀。)处理后的规格为孔径100μm,界厚80-90μm的盲孔双面板,在直流电,1.6ASD电流密度下电镀60min,得到各测试板。Electroplating method: In a 1.5L Haring trough equipped with an aeration stirring device (aeration rate: 4L/min) and having a phosphor copper plate as an anode and containing the electroplating solutions obtained in Examples 1 to 8 and Comparative Examples 1 to 4, a blind hole double-sided board with a hole diameter of 100μm and a boundary thickness of 80-90μm was placed after chemical copper deposition (chemical copper deposition is to deposit a copper layer of less than 1μm in the originally non-conductive blind hole to make the hole conductive, which is convenient for subsequent blind hole electroplating.) and electroplated for 60min under direct current and a current density of 1.6ASD to obtain each test board.

其中,盲孔双面板测试前均经过除油(40℃)1min,水洗,微蚀(过硫酸盐体系)1min,水洗,酸洗1min等处理。Among them, before the blind hole double-sided board test, it was degreased (40℃) for 1min, washed with water, micro-etched (persulfate system) for 1min, washed with water, and pickled for 1min.

电镀完成后,对各测试板进行切片处理,分别根据盲孔的切片图测试计算得到每块测试板中盲孔的Dimple值(凹陷值)以及面铜厚度,结果如表2所示。此外,实施例1-实施例2的电镀所得的盲孔切片图如图1-图2所示,对比例1-对比例4电镀所得的盲孔切片图如图3-图6所示,实施例1盲孔电镀后的板面图如图7所示,对比例2和对比例4盲孔电镀后的板面图如图8和图9所示。After the electroplating is completed, each test board is sliced, and the Dimple value (depression value) and the surface copper thickness of the blind hole in each test board are calculated based on the blind hole slice diagram test, and the results are shown in Table 2. In addition, the blind hole slice diagrams obtained by electroplating in Example 1-Example 2 are shown in Figures 1-2, the blind hole slice diagrams obtained by electroplating in Comparative Example 1-Comparative Example 4 are shown in Figures 3-6, the board surface diagram of the blind hole after electroplating in Example 1 is shown in Figure 7, and the board surface diagrams of the blind holes after electroplating in Comparative Example 2 and Comparative Example 4 are shown in Figures 8 and 9.

其中,Dimple值反映盲孔填孔能力,即盲孔孔内所沉积的铜厚度相对于测试板表面上沉积的铜层表面的凹陷值大小。当镀铜后盲孔镀层中心位置往下凹陷则Dimple值为正,如果镀层中心凸出铜面则Dimple值为负。Dimple值在正数范围内越接近0说明电镀液和其中的整平剂的填孔能力越好。Among them, the Dimple value reflects the blind hole filling ability, that is, the depression value of the copper thickness deposited in the blind hole relative to the copper layer deposited on the surface of the test board. If the center of the blind hole plating layer is depressed downward after copper plating, the Dimple value is positive, and if the center of the plating layer protrudes from the copper surface, the Dimple value is negative. The closer the Dimple value is to 0 in the positive range, the better the filling ability of the electroplating solution and the leveler therein.

Dimple值的计算方式:Dimple值=盲孔孔底到表面铜层厚度-盲孔孔内积铜高度。Calculation method of Dimple value: Dimple value = thickness of copper layer from bottom of blind hole to surface - height of copper inside blind hole.

面铜厚度为盲孔电镀后覆盖在测试板表面的铜层厚度。面铜厚度过薄容易造成较大的凹陷值,需要额外的后续处理工艺(增加面铜厚度),然后再进行减薄铜制程来减小凹陷的问题,造成生产工序和成本的增加。面铜厚度过厚,在线路蚀刻的过程中由于侧蚀的影响无法制备精细线路,无法制作精密化工艺产品,不利于细线路的制作。The surface copper thickness is the thickness of the copper layer covering the surface of the test board after blind hole electroplating. If the surface copper thickness is too thin, it is easy to cause a large concave value, requiring additional subsequent processing (increasing the surface copper thickness), and then thinning the copper process to reduce the concave problem, resulting in an increase in production procedures and costs. If the surface copper thickness is too thick, it is impossible to prepare fine circuits during the circuit etching process due to the influence of side etching, and it is impossible to produce precision process products, which is not conducive to the production of fine circuits.

表2.电镀实验结果Table 2. Electroplating test results

由表2与图1、图2、图7可知,本发明含有实施例1-8所得的整平剂的电镀液用于盲孔电镀后,盲孔的凹陷值在4μm-10μm之间,并且面铜厚度在15μm-18μm之间,且孔内无包孔现象,板面光滑无铜瘤,满足生产要求,由此说明本发明制备的整平剂具有良好的填孔性能,在填孔效果较好的情况下面铜厚度较低,生产中可减少铜的用量,能有效降低生产成本和难度。It can be seen from Table 2 and Figures 1, 2 and 7 that after the electroplating solution containing the leveler obtained in Examples 1-8 of the present invention is used for blind hole electroplating, the depression value of the blind hole is between 4μm and 10μm, and the surface copper thickness is between 15μm and 18μm, and there is no hole packing phenomenon in the hole, and the board surface is smooth and free of copper nodules, which meets the production requirements. This shows that the leveler prepared by the present invention has good hole filling performance. When the hole filling effect is good, the surface copper thickness is low, the amount of copper can be reduced in production, and the production cost and difficulty can be effectively reduced.

通过对比例1和对比例2合成的整平剂电镀结果可知,虽然凹陷值与面铜厚度均可满足生产要求但相较实施例1-8仍有明显劣势,而且分别出现了孔内包孔和板面长铜瘤的现象,铜瘤如图8中凸起来的圆点所示,分散在板面中央与板面边缘,由此可知,在相同的制备方法,含2-取代苯并咪唑基团的整平剂在板面和填孔等性能上明显优于含取代咪唑基团的整平剂。From the electroplating results of the levelers synthesized in Comparative Examples 1 and 2, it can be seen that although the depression value and the surface copper thickness can meet the production requirements, they are still significantly inferior to those of Examples 1-8, and the phenomena of hole inclusion in the hole and copper nodules on the board surface appear respectively. The copper nodules are shown as the raised dots in FIG8 and are scattered in the center and edge of the board surface. It can be seen that, under the same preparation method, the leveler containing 2-substituted benzimidazole groups is significantly superior to the leveler containing substituted imidazole groups in terms of board surface and hole filling properties.

通过对比例3从市场购入的整平剂电镀结果可知,凹陷值为15.97μm,铜面厚度19.79μm,明显劣于实施例1-8的整平剂,且在填孔凹陷值也较对比例2差,由此说明本发明中的制备方法制得的整平剂在填孔性能方面优于目前常使用的水溶剂合成法所制得的整平剂。From the electroplating results of the leveler purchased from the market in Comparative Example 3, it can be seen that the depression value is 15.97 μm and the copper surface thickness is 19.79 μm, which are obviously inferior to the levelers of Examples 1-8, and the hole filling depression value is also worse than that of Comparative Example 2. This shows that the leveler prepared by the preparation method of the present invention is superior to the leveler prepared by the currently commonly used water solvent synthesis method in terms of hole filling performance.

通过对比例4的整平剂电镀结果和图9可知,凹陷值为10.07μm,铜面厚度19.62μm,同样明显劣于实施例1-8的整平剂,且出现了板面长铜瘤现象,铜瘤大量分散在板面边缘,少量分散在板面中央,由此说明苯并咪唑上2取代位的取代基起到了明显提高填孔效率和优化板面的作用。It can be seen from the electroplating results of the leveling agent of comparative example 4 and Figure 9 that the depression value is 10.07 μm and the copper surface thickness is 19.62 μm, which is also significantly inferior to the leveling agents of Examples 1-8. In addition, copper nodules appear on the board surface. A large number of copper nodules are scattered at the edge of the board surface, and a small number are scattered in the center of the board surface. This shows that the substituent at the 2-substitution position on the benzimidazole plays a role in significantly improving the hole filling efficiency and optimizing the board surface.

综上所述,无论是在整平剂的结构还是制备方法上,本发明相较目前业界常用的结构和制备方法都具有创新性和性能优越性。In summary, whether in terms of the structure or preparation method of the leveling agent, the present invention is innovative and has superior performance compared to the structures and preparation methods currently commonly used in the industry.

显然,本发明的上述实施例仅仅是为清楚地说明本发明所作的举例,而并非是对本发明的实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明权利要求的保护范围之内。Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims (9)

1.一种含2-取代苯并咪唑基团整平剂,其特征在于,所述含2-取代苯并咪唑基团整平剂包括功效成分,所述功效成分为2-取代苯并咪唑化合物与二缩水甘油醚类化合物反应得到的聚合物,2-取代苯并咪唑化合物和二缩水甘油醚类化合物的结构式分别如式Ⅰ和式Ⅱ所示:1. A leveling agent containing 2-substituted benzimidazole groups, characterized in that the leveling agent containing 2-substituted benzimidazole groups comprises an effective component, the effective component is a polymer obtained by reacting a 2-substituted benzimidazole compound with a diglycidyl ether compound, and the structural formulas of the 2-substituted benzimidazole compound and the diglycidyl ether compound are shown in Formula I and Formula II, respectively: 其中,所述2-取代苯并咪唑化合物的R1为C5-C10烷基、对卤苄基、2,4-二卤苄基、3,4-二卤苄基中的一种;Wherein, R1 of the 2-substituted benzimidazole compound is one of C5 - C10 alkyl, p-halobenzyl, 2,4-dihalobenzyl, and 3,4-dihalobenzyl; 所述二缩水甘油醚类化合物的R2为C1-C10烷基。R 2 of the diglycidyl ether compound is a C 1 -C 10 alkyl group. 2.根据权利要求1所述含2-取代苯并咪唑基团整平剂,其特征在于,所述聚合物的数均分子量为500-25000。2. The leveler containing 2-substituted benzimidazole groups according to claim 1, characterized in that the number average molecular weight of the polymer is 500-25000. 3.根据权利要求1所述含2-取代苯并咪唑基团整平剂,其特征在于,所述聚合物的数均分子量为500-10000。3. The leveler containing 2-substituted benzimidazole groups according to claim 1, characterized in that the number average molecular weight of the polymer is 500-10000. 4.一种含2-取代苯并咪唑基团整平剂的制备方法,其特征在于,所述制备方法包括如下步骤:4. A method for preparing a leveler containing a 2-substituted benzimidazole group, characterized in that the preparation method comprises the following steps: 将2-取代苯并咪唑化合物溶于溶剂中,滴加二缩水甘油醚类化合物进行缩合反应得到聚合物,蒸馏回收溶剂后往聚合物中加入适量水和硫酸溶液调节pH至酸性,得到所述含2-取代苯并咪唑基团整平剂。The 2-substituted benzimidazole compound is dissolved in a solvent, a diglycidyl ether compound is added dropwise to carry out a condensation reaction to obtain a polymer, and after distilling and recovering the solvent, appropriate amounts of water and sulfuric acid solution are added to the polymer to adjust the pH to acidic to obtain the leveling agent containing the 2-substituted benzimidazole group. 5.根据权利要求4所述制备方法,其特征在于,所述2-取代苯并咪唑化合物与二缩水甘油醚类化合物摩尔比为0.5-2:1。5. The preparation method according to claim 4, characterized in that the molar ratio of the 2-substituted benzimidazole compound to the diglycidyl ether compound is 0.5-2:1. 6.根据权利要求4所述制备方法,其特征在于,所述2-取代苯并咪唑化合物与溶剂质量比为1:1-10。6 . The preparation method according to claim 4 , characterized in that the mass ratio of the 2-substituted benzimidazole compound to the solvent is 1:1-10. 7.根据权利要求3所述制备方法,其特征在于,所述溶剂为甲醇、乙醇、异丙醇、乙酸乙酯、氯仿、四氢呋喃、甲苯、二甲苯中的一种或多种。7. The preparation method according to claim 3, characterized in that the solvent is one or more of methanol, ethanol, isopropanol, ethyl acetate, chloroform, tetrahydrofuran, toluene, and xylene. 8.一种电镀液,其特征在于,所述电镀液含有权利要求1-7中任一项所述的含2-取代苯并咪唑基团整平剂。8. An electroplating solution, characterized in that the electroplating solution contains the leveler containing 2-substituted benzimidazole groups according to any one of claims 1 to 7. 9.权利要求8所述的电镀液在盲孔电镀铜中的应用。9. Use of the electroplating solution according to claim 8 in blind hole copper electroplating.
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