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CN118336499B - Self-stabilizing laser device and output method - Google Patents

Self-stabilizing laser device and output method Download PDF

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CN118336499B
CN118336499B CN202410750039.9A CN202410750039A CN118336499B CN 118336499 B CN118336499 B CN 118336499B CN 202410750039 A CN202410750039 A CN 202410750039A CN 118336499 B CN118336499 B CN 118336499B
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CN118336499A (en
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于永吉
李礼
刘航
王超
王子健
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Changchun University of Science and Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0405Conductive cooling, e.g. by heat sinks or thermo-electric elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/042Arrangements for thermal management for solid state lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/163Solid materials characterised by a crystal matrix
    • H01S3/1631Solid materials characterised by a crystal matrix aluminate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/163Solid materials characterised by a crystal matrix
    • H01S3/164Solid materials characterised by a crystal matrix garnet
    • H01S3/1643YAG
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/163Solid materials characterised by a crystal matrix
    • H01S3/1671Solid materials characterised by a crystal matrix vanadate, niobate, tantalate
    • H01S3/1673YVO4 [YVO]

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Lasers (AREA)

Abstract

The invention provides a self-stabilizing laser device and an output method, which relate to the technical field of laser and comprise a right-angle prism, a wedge-shaped prism, a saturable absorber, a laser gain crystal, an output mirror, a beam splitter, a pumping source controller, a beam analyzer, a feedback controller and a motor. The invention adopts the wedge prism and the right angle prism to cooperate, on one hand, the wedge prism is adopted to achieve the effect of equal optical path length of the round trip path in the resonant cavity, and eliminate the beam drift caused by the thermal effect. On the other hand adopts the right angle prism simultaneously, utilizes the characteristics that right angle prism can be used for gathering the light together in the different directions, not only can adjust the drift of light beam, in the resonant cavity is returned to the light beam reflection that will drift, increases the beam quality of output light, can also effectively improve laser output's stability, arouses the resonant cavity detuning to external vibration, temperature stress variation. The quality stability and the high-precision directivity of the laser output beam are improved, and the applicability of the laser device is expanded.

Description

一种自稳定激光装置及输出方法Self-stabilizing laser device and output method

技术领域Technical Field

本发明一般涉及激光技术领域,具体涉及一种自稳定激光装置及输出方法。The present invention generally relates to the field of laser technology, and in particular to a self-stabilizing laser device and an output method.

背景技术Background Art

固体激光器具有转换效率高、器件结构紧凑、体积小、可靠性高、输出能量大等特点,是当前激光技术的主要发展方向,在军事、加工、医疗等众多领域被广泛的应用。Solid-state lasers have the characteristics of high conversion efficiency, compact device structure, small size, high reliability, and large output energy. They are the main development direction of current laser technology and are widely used in many fields such as military, processing, and medical treatment.

固体激光常采用侧面泵浦的方式对激光增益晶体进行泵浦。侧面泵浦一般采用大功率、发光面积大的半导体激光阵列,被广泛应用在激光雷达、光电对抗以及激光诊断等高功率激光输出的领域中。同时,其激光工作介质内的增益区域大,晶体内部会出现局部高温现象,发生热量分布不均情况。侧面泵浦还存在输出能量分布不均匀、能量提取效率低等问题,这是由于侧面泵浦的泵浦光是沿径向方向进入晶体,会导致泵浦光分布不均匀、工作物质内的增益分布很难与激光谐振腔本征基模发生模式匹配,进而导致热效应严重、输出光束质量差的问题。Solid-state lasers often use side pumping to pump laser gain crystals. Side pumping generally uses high-power, large-light-emitting semiconductor laser arrays, and is widely used in high-power laser output fields such as lidar, optoelectronic countermeasures, and laser diagnosis. At the same time, the gain area in the laser working medium is large, and local high temperatures will appear inside the crystal, resulting in uneven heat distribution. Side pumping also has problems such as uneven output energy distribution and low energy extraction efficiency. This is because the pump light of the side pump enters the crystal in the radial direction, which will cause uneven distribution of the pump light and make it difficult for the gain distribution in the working material to match the intrinsic fundamental mode of the laser resonant cavity, which will lead to serious thermal effects and poor output beam quality.

通常侧面泵浦激光器发出的激光光束的空间层面上呈高斯分布。当高斯泵浦光作用在激光增益晶体内部时,在晶体内的热量分布也有一定的温度梯度,晶体在热量的作用下,在表面发生微小形变,导致输出的激光光束会发生细微漂移。因此,需要一种能够提高激光器的输出激光光束稳定性和指向精度的技术方案。Usually, the laser beam emitted by the side-pumped laser has a Gaussian distribution in the spatial plane. When the Gaussian pump light acts on the inside of the laser gain crystal, the heat distribution in the crystal also has a certain temperature gradient. Under the action of heat, the crystal undergoes a slight deformation on the surface, causing the output laser beam to drift slightly. Therefore, a technical solution is needed to improve the stability and pointing accuracy of the laser output beam.

发明内容Summary of the invention

为了解决输出激光光束稳定性差,指向精度差等问题,本发明提供了一种自稳定激光装置及输出方法。In order to solve the problems of poor stability and poor pointing accuracy of output laser beams, the present invention provides a self-stabilizing laser device and an output method.

如图1所示,根据本发明的第一方面的实施例提供的自稳定激光装置,包括直角棱镜1,楔形棱镜2,可饱和吸收体3,激光增益晶体4,输出镜5,分束镜6,泵浦源7,泵浦源控制器8,光束分析仪9,反馈控制器10,电机11。As shown in Figure 1, a self-stabilizing laser device provided according to an embodiment of the first aspect of the present invention includes a right-angle prism 1, a wedge prism 2, a saturable absorber 3, a laser gain crystal 4, an output mirror 5, a beam splitter 6, a pump source 7, a pump source controller 8, a beam analyzer 9, a feedback controller 10, and a motor 11.

具体的,所述自稳定激光装置由左至右依次包括直角棱镜1,楔形棱镜2,可饱和吸收体3,激光增益晶体4,输出镜5,分束镜6;Specifically, the self-stabilized laser device includes, from left to right, a right-angle prism 1, a wedge prism 2, a saturable absorber 3, a laser gain crystal 4, an output mirror 5, and a beam splitter 6;

所述泵浦源7为一个独立结构或一组紧密排列结构,所述泵浦源7对应设置在所述激光增益晶体4侧面,沿着侧向将泵浦光提供给所述激光增益晶体4;The pump source 7 is an independent structure or a group of closely arranged structures. The pump source 7 is correspondingly arranged on the side of the laser gain crystal 4 to provide pump light to the laser gain crystal 4 in the lateral direction.

所述泵浦源7的输出波长与所述激光增益晶体4的吸收波长相对应,使所述激光增益晶体4发生粒子数反转;The output wavelength of the pump source 7 corresponds to the absorption wavelength of the laser gain crystal 4, so that the laser gain crystal 4 undergoes population inversion;

所述直角棱镜1与所述输出镜5作为激光谐振腔镜,经过增益振荡后的激光沿所述输出镜5输出;The right-angle prism 1 and the output mirror 5 serve as laser resonant cavity mirrors, and the laser light after gain oscillation is output along the output mirror 5;

所述输出镜5后沿光路设置所述分束镜6,将输出激光分为水平方向和垂直方向两路,其中所述水平方向为工作所需光路,所述垂直方向为检测光路,所述垂直方向的激光入射至所述光束分析仪9;The beam splitter 6 is arranged along the optical path behind the output mirror 5 to divide the output laser into two paths, the horizontal direction and the vertical direction, wherein the horizontal direction is the optical path required for work, and the vertical direction is the detection optical path, and the laser in the vertical direction is incident on the beam analyzer 9;

所述光束分析仪9与所述反馈控制器10电连接,所述反馈控制器10与所述电机11电连接;The beam profiler 9 is electrically connected to the feedback controller 10, and the feedback controller 10 is electrically connected to the motor 11;

所述光束分析仪9对入射激光的光斑情况进行分析,将分析结果传输至所述反馈控制器10,所述反馈控制器10向所述电机11输出控制信号;The beam analyzer 9 analyzes the spot condition of the incident laser and transmits the analysis result to the feedback controller 10, and the feedback controller 10 outputs a control signal to the motor 11;

所述电机11与所述楔形棱镜2连接,控制所述楔形棱镜2在第一位置A和第二位置B之间移动;所述第一位置A为所述楔形棱镜2未进入激光光路的位置,所述第二位置B为所述楔形棱镜2进入激光光路后输出激光光斑为基模时的所述楔形棱镜2的位置。The motor 11 is connected to the wedge prism 2 to control the movement of the wedge prism 2 between a first position A and a second position B; the first position A is the position of the wedge prism 2 before it enters the laser light path, and the second position B is the position of the wedge prism 2 when the output laser spot is a fundamental mode after the wedge prism 2 enters the laser light path.

具体的,所述激光增益晶体4采用Nd:YAG晶体、Nd:YAP晶体或Nd:YVO4晶体;所述泵浦源7出射的泵浦光波长为808nm。Specifically, the laser gain crystal 4 is made of Nd:YAG crystal, Nd:YAP crystal or Nd:YVO 4 crystal; the wavelength of the pump light emitted by the pump source 7 is 808 nm.

其中,Nd:YAG晶体、Nd:YAP晶体或Nd:YVO4晶体的吸收波长为808nm,设置泵浦源输出波长为808nm,以实现激光增益晶体的粒子数反转。The absorption wavelength of the Nd:YAG crystal, Nd:YAP crystal or Nd:YVO 4 crystal is 808 nm, and the output wavelength of the pump source is set to 808 nm to achieve population inversion of the laser gain crystal.

具体的,所述可饱和吸收体3采用Cr4+:YAG晶体,在初始状态下,所述可饱和吸收体3的初始透过率较低,激光谐振腔内损耗较大,不能形成激光振荡;在泵浦光作用下,增益介质中上能级粒子数不断增加,激光光强增加,所述可饱和吸收体3的透过率增大,腔内损耗降低,激光在谐振腔内往复振荡,当所述可饱和吸收体3达到饱和时,被动调Q开启,形成激光脉冲。Specifically, the saturable absorber 3 adopts Cr 4+ :YAG crystal. In the initial state, the initial transmittance of the saturable absorber 3 is low, the loss in the laser resonant cavity is large, and laser oscillation cannot be formed; under the action of pump light, the number of upper energy level particles in the gain medium continues to increase, the laser light intensity increases, the transmittance of the saturable absorber 3 increases, the loss in the cavity decreases, the laser oscillates back and forth in the resonant cavity, and when the saturable absorber 3 reaches saturation, passive Q switching is turned on to form a laser pulse.

具体的,所述直角棱镜1表面镀有输出激光波长的高反膜,所述激光增益晶体4两端面镀有输出激光波长的增透膜;所述输出镜5镀有输出激光波长的增透膜;所述分束镜6镀有输出激光波长的部分反射膜,优选的,所述部分反射膜的反射率为1%-10%。Specifically, the surface of the right-angle prism 1 is coated with a high-reflection film of the output laser wavelength, and the two end surfaces of the laser gain crystal 4 are coated with an anti-reflection film of the output laser wavelength; the output mirror 5 is coated with an anti-reflection film of the output laser wavelength; the beam splitter 6 is coated with a partial reflection film of the output laser wavelength, and preferably, the reflectivity of the partial reflection film is 1%-10%.

具体的,所述直角棱镜1、所述输出镜5、所述分束镜6的材质为CaF2晶体。Specifically, the right-angle prism 1, the output mirror 5, and the beam splitter 6 are made of CaF 2 crystal.

具体的,所述自稳定激光装置的输出方法,包括:Specifically, the output method of the self-stabilizing laser device includes:

通过所述电机11调整所述楔形棱镜2位于第一位置A,即所述楔形棱镜2未进入谐振腔光路的位置;The motor 11 is used to adjust the wedge-shaped prism 2 to be located at a first position A, that is, a position where the wedge-shaped prism 2 does not enter the optical path of the resonant cavity;

所述泵浦源7位于所述激光增益晶体4的侧面,所述泵浦源7发出泵浦光;The pump source 7 is located on the side of the laser gain crystal 4, and the pump source 7 emits pump light;

在泵浦光的作用下,所述激光增益晶体4中,粒子吸收泵浦光发生能级跃迁,通过能级之间的能量转移,粒子被激发到上能级,所述激光增益晶体4中实现了粒子数反转;Under the action of the pump light, the particles in the laser gain crystal 4 absorb the pump light and undergo energy level transition. Through energy transfer between energy levels, the particles are excited to the upper energy level, and the particle number inversion is achieved in the laser gain crystal 4.

所述可饱和吸收体3先使谐振腔处于高损耗的模式,在初始状态下,所述可饱和吸收体3的初始透过率较低,激光谐振腔内损耗较大,不能形成激光振荡;在泵浦光作用下,增益介质中上能级粒子数不断增加,激光光强增加,所述可饱和吸收体3的透过率增大,腔内损耗降低,激光在谐振腔内往复振荡,当所述可饱和吸收体3达到饱和时,被动调Q开启,形成激光脉冲;The saturable absorber 3 first puts the resonant cavity in a high-loss mode. In the initial state, the initial transmittance of the saturable absorber 3 is low, the loss in the laser resonant cavity is large, and laser oscillation cannot be formed; under the action of pump light, the number of upper energy level particles in the gain medium continues to increase, the laser light intensity increases, the transmittance of the saturable absorber 3 increases, the loss in the cavity decreases, and the laser oscillates back and forth in the resonant cavity. When the saturable absorber 3 reaches saturation, passive Q switching is turned on to form a laser pulse;

当泵浦光作用在所述激光增益晶体4上时,所述激光增益晶体4在热效应的作用下,由于温度的梯度,使所述激光增益晶体4在表面发生微小形变,导致输出激光光束会发生漂移;When the pump light acts on the laser gain crystal 4, the laser gain crystal 4 undergoes a slight deformation on the surface due to the temperature gradient under the action of the thermal effect, causing the output laser beam to drift;

所述输出激光经过所述分束镜6后进入所述光束分析仪9,所述光束分析仪9对输出激光光束进行分析,并将分析结果实时传输给所述反馈控制器10;The output laser enters the beam analyzer 9 after passing through the beam splitter 6. The beam analyzer 9 analyzes the output laser beam and transmits the analysis result to the feedback controller 10 in real time.

所述反馈控制器10控制电机11调整所述楔形棱镜2的位置,使所述楔形棱镜2从所述第一位置A向光路方向移动并进入光路,进而调整所述楔形棱镜2插入谐振腔内的距离;The feedback controller 10 controls the motor 11 to adjust the position of the wedge prism 2, so that the wedge prism 2 moves from the first position A toward the optical path and enters the optical path, thereby adjusting the distance by which the wedge prism 2 is inserted into the resonant cavity;

通过所述楔形棱镜2的调整,可以使漂移的激光脉冲进入到所述直角棱镜1中,对输出激光进行修正;By adjusting the wedge-shaped prism 2, the drifting laser pulse can enter the right-angle prism 1 to correct the output laser;

在所述楔形棱镜2移动的过程中,通过所述光束分析仪9实时检测输出激光光束光斑,在检测到输出激光光斑为基模光斑时,通过所述反馈控制器10控制电机11停止,此时所述楔形棱镜2的位置即为第二位置B。During the movement of the wedge-shaped prism 2, the output laser beam spot is detected in real time by the beam analyzer 9. When it is detected that the output laser beam spot is a fundamental mode spot, the feedback controller 10 controls the motor 11 to stop. At this time, the position of the wedge-shaped prism 2 is the second position B.

本发明提出的自稳定激光装置及输出方法,采用侧面泵浦的方式,充分利用激光增益晶体,能够获得高功率、大能量、高转换效率的激光输出。通过单泵浦源的侧面泵浦实现单面传热结构,形成单方向温度梯度,采用楔形棱镜与直角棱镜的配合使用,一方面采用楔形棱镜,达到谐振腔内往返路径等光程的效果,消除热效应引起光束漂移。另一方面同时采用直角棱镜,利用直角棱镜可以用于将不同方向上的光线汇聚到一起的特点,不仅能够调整光束的漂移,将漂移的光束反射回谐振腔内,增加输出光线的光束质量,还能有效提高激光输出的稳定性,对抗外界振动、温度应力变化引起谐振腔失调。本方案提高了激光输出的光束质量稳定性和高精度指向性,扩展了激光装置的适用性。The self-stabilizing laser device and output method proposed in the present invention adopt the side pumping method and make full use of the laser gain crystal to obtain high-power, high-energy, and high-conversion-efficiency laser output. The single-sided heat transfer structure is realized by the side pumping of a single pump source to form a unidirectional temperature gradient. The wedge-shaped prism and the right-angle prism are used in combination. On the one hand, the wedge-shaped prism is used to achieve the effect of equal optical path in the round-trip path in the resonant cavity, eliminating the beam drift caused by thermal effects. On the other hand, the right-angle prism is used at the same time. The right-angle prism can be used to converge light in different directions together. It can not only adjust the drift of the light beam, reflect the drifting light beam back into the resonant cavity, and increase the beam quality of the output light, but also effectively improve the stability of the laser output, and resist the misalignment of the resonant cavity caused by external vibration and temperature stress changes. This scheme improves the beam quality stability and high-precision directivity of the laser output, and expands the applicability of the laser device.

应当理解,发明内容部分中所描述的内容并非旨在限定本发明的实施例的关键或重要特征,亦非用于限制本发明的范围。本发明的其它特征将通过以下的描述变得容易理解。It should be understood that the contents described in the summary of the invention are not intended to limit the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

结合附图并参考以下详细说明,本发明各实施例的上述和其他特征、优点及方面将变得更加明显。在附图中,相同或相似的附图标记表示相同或相似的元素,其中:The above and other features, advantages and aspects of the embodiments of the present invention will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. In the accompanying drawings, the same or similar reference numerals represent the same or similar elements, wherein:

图1是一种自稳定激光装置的结构示意图。FIG. 1 is a schematic diagram of the structure of a self-stabilizing laser device.

其中,图1中的附图标记与部件名称之间的对应关系为:The corresponding relationship between the reference numerals and component names in FIG. 1 is as follows:

1直角棱镜,2楔形棱镜,3可饱和吸收体,4激光增益晶体,5输出镜,6分束镜,7泵浦源,8泵浦源控制器,9光束分析仪,10反馈控制器,11电机,A第一位置,B第二位置。1 right angle prism, 2 wedge prism, 3 saturable absorber, 4 laser gain crystal, 5 output mirror, 6 beam splitter, 7 pump source, 8 pump source controller, 9 beam analyzer, 10 feedback controller, 11 motor, A first position, B second position.

具体实施方式DETAILED DESCRIPTION

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的全部其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

另外,本文中术语“和/或”,仅仅是一种描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,可以表示:单独存在A,同时存在A和B,单独存在B这三种情况。另外,本文中字符“/”,一般表示前后关联对象是一种“或”的关系。In addition, the term "and/or" in this article is only a description of the association relationship between the associated objects, indicating that there can be three relationships. For example, A and/or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character "/" in this article generally indicates that the associated objects before and after are in an "or" relationship.

本发明中,采用楔形棱镜与直角棱镜的配合使用,不仅能够调整光束的漂移,将漂移的光束反射回谐振腔内,增加输出光线的光束质量,还能有效提高激光输出的稳定性,对抗外界振动、温度应力变化引起谐振腔失调。In the present invention, the wedge prism and the right-angle prism are used in combination, which can not only adjust the drift of the light beam and reflect the drifted light beam back into the resonant cavity to increase the beam quality of the output light, but also effectively improve the stability of the laser output and resist the misalignment of the resonant cavity caused by external vibration and temperature stress changes.

下面参照图1来描述本发明的实施例提供的自稳定激光装置。The self-stabilizing laser device provided by an embodiment of the present invention is described below with reference to FIG. 1 .

如图1所示,根据本发明的第一方面的实施例提供的自稳定激光装置,包括直角棱镜1,楔形棱镜2,可饱和吸收体3,激光增益晶体4,输出镜5,分束镜6,泵浦源7,泵浦源控制器8,光束分析仪9,反馈控制器10,电机11。As shown in Figure 1, a self-stabilizing laser device provided according to an embodiment of the first aspect of the present invention includes a right-angle prism 1, a wedge prism 2, a saturable absorber 3, a laser gain crystal 4, an output mirror 5, a beam splitter 6, a pump source 7, a pump source controller 8, a beam analyzer 9, a feedback controller 10, and a motor 11.

具体的,所述自稳定激光装置由左至右依次包括直角棱镜1,楔形棱镜2,可饱和吸收体3,激光增益晶体4,输出镜5,分束镜6;Specifically, the self-stabilized laser device includes, from left to right, a right-angle prism 1, a wedge prism 2, a saturable absorber 3, a laser gain crystal 4, an output mirror 5, and a beam splitter 6;

所述泵浦源7为一个独立结构或一组紧密排列结构,所述泵浦源7对应设置在所述激光增益晶体4侧面,沿着侧向将泵浦光提供给所述激光增益晶体4;The pump source 7 is an independent structure or a group of closely arranged structures. The pump source 7 is correspondingly arranged on the side of the laser gain crystal 4 to provide pump light to the laser gain crystal 4 in the lateral direction.

所述泵浦源7的输出波长与所述激光增益晶体4的吸收波长相对应,使所述激光增益晶体4发生粒子数反转;The output wavelength of the pump source 7 corresponds to the absorption wavelength of the laser gain crystal 4, so that the laser gain crystal 4 undergoes population inversion;

所述直角棱镜1与所述输出镜5作为激光谐振腔镜,经过增益振荡后的激光沿所述输出镜5输出;The right-angle prism 1 and the output mirror 5 serve as laser resonant cavity mirrors, and the laser light after gain oscillation is output along the output mirror 5;

所述输出镜5后沿光路设置所述分束镜6,将输出激光分为水平方向和垂直方向两路,其中所述水平方向为工作所需光路,所述垂直方向为检测光路,所述垂直方向的激光入射至所述光束分析仪9;The beam splitter 6 is arranged along the optical path behind the output mirror 5 to divide the output laser into two paths, the horizontal direction and the vertical direction, wherein the horizontal direction is the optical path required for work, and the vertical direction is the detection optical path, and the laser in the vertical direction is incident on the beam analyzer 9;

所述光束分析仪9与所述反馈控制器10电连接,所述反馈控制器10与所述电机11电连接;The beam profiler 9 is electrically connected to the feedback controller 10, and the feedback controller 10 is electrically connected to the motor 11;

所述光束分析仪9对入射激光的光斑情况进行分析,将分析结果传输至所述反馈控制器10,所述反馈控制器10向所述电机11输出控制信号;The beam analyzer 9 analyzes the spot condition of the incident laser and transmits the analysis result to the feedback controller 10, and the feedback controller 10 outputs a control signal to the motor 11;

所述电机11与所述楔形棱镜2连接,控制所述楔形棱镜2在第一位置A和第二位置B之间移动;所述第一位置A为所述楔形棱镜2未进入激光光路的位置,所述第二位置B为所述楔形棱镜2进入激光光路后输出激光光斑为基模时的所述楔形棱镜2的位置。The motor 11 is connected to the wedge prism 2 to control the movement of the wedge prism 2 between a first position A and a second position B; the first position A is the position of the wedge prism 2 before it enters the laser light path, and the second position B is the position of the wedge prism 2 when the output laser spot is a fundamental mode after the wedge prism 2 enters the laser light path.

在一些实施例中,所述激光增益晶体4采用Nd:YAG晶体、Nd:YAP晶体或Nd:YVO4晶体;所述泵浦源7出射的泵浦光波长为808nm。In some embodiments, the laser gain crystal 4 is made of Nd:YAG crystal, Nd:YAP crystal or Nd:YVO 4 crystal; the wavelength of the pump light emitted by the pump source 7 is 808 nm.

在该些实施例中,Nd:YAG晶体、Nd:YAP晶体或Nd:YVO4晶体的吸收波长为808nm,设置泵浦源输出波长为808nm,以实现激光增益晶体的粒子数反转。In these embodiments, the absorption wavelength of the Nd:YAG crystal, Nd:YAP crystal or Nd:YVO 4 crystal is 808 nm, and the output wavelength of the pump source is set to 808 nm to achieve population inversion of the laser gain crystal.

在一些实施例中,所述可饱和吸收体3采用Cr4+:YAG晶体,在初始状态下,所述可饱和吸收体3的初始透过率较低,激光谐振腔内损耗较大,不能形成激光振荡;在泵浦光作用下,增益介质中上能级粒子数不断增加,激光光强增加,所述可饱和吸收体3的透过率增大,腔内损耗降低,激光在谐振腔内往复振荡,当所述可饱和吸收体3达到饱和时,被动调Q开启,形成激光脉冲。In some embodiments, the saturable absorber 3 adopts Cr 4+ :YAG crystal. In the initial state, the initial transmittance of the saturable absorber 3 is low, the loss in the laser resonant cavity is large, and laser oscillation cannot be formed; under the action of pump light, the number of upper energy level particles in the gain medium continues to increase, the laser light intensity increases, the transmittance of the saturable absorber 3 increases, the loss in the cavity decreases, the laser oscillates back and forth in the resonant cavity, and when the saturable absorber 3 reaches saturation, passive Q switching is turned on to form a laser pulse.

在一些实施例中,所述直角棱镜1表面镀有输出激光波长的高反膜,所述激光增益晶体4两端面镀有输出激光波长的增透膜;所述输出镜5镀有输出激光波长的增透膜;所述分束镜6镀有输出激光波长的部分反射膜,优选的,所述部分反射膜的反射率为1%-10%。In some embodiments, the surface of the right-angle prism 1 is coated with a high-reflection film of the output laser wavelength, and the two end surfaces of the laser gain crystal 4 are coated with an anti-reflection film of the output laser wavelength; the output mirror 5 is coated with an anti-reflection film of the output laser wavelength; the beam splitter 6 is coated with a partial reflection film of the output laser wavelength, and preferably, the reflectivity of the partial reflection film is 1%-10%.

在一些实施例中,所述直角棱镜1、所述输出镜5、所述分束镜6的材质为CaF2晶体。In some embodiments, the right-angle prism 1, the output mirror 5, and the beam splitter 6 are made of CaF 2 crystal.

在一些实施例中,所述自稳定激光装置的输出方法,包括:In some embodiments, the output method of the self-stabilized laser device includes:

通过所述电机11调整所述楔形棱镜2位于第一位置A,即所述楔形棱镜2未进入谐振腔光路的位置;The motor 11 is used to adjust the wedge-shaped prism 2 to be located at a first position A, that is, a position where the wedge-shaped prism 2 does not enter the optical path of the resonant cavity;

所述泵浦源7位于所述激光增益晶体4的侧面,所述泵浦源7发出泵浦光;The pump source 7 is located on the side of the laser gain crystal 4, and the pump source 7 emits pump light;

在泵浦光的作用下,所述激光增益晶体4中,粒子吸收泵浦光发生能级跃迁,通过能级之间的能量转移,粒子被激发到上能级,所述激光增益晶体4中实现了粒子数反转;Under the action of the pump light, the particles in the laser gain crystal 4 absorb the pump light and undergo energy level transition. Through energy transfer between energy levels, the particles are excited to the upper energy level, and the particle number inversion is achieved in the laser gain crystal 4.

所述可饱和吸收体3先使谐振腔处于高损耗的模式,在初始状态下,所述可饱和吸收体3的初始透过率较低,激光谐振腔内损耗较大,不能形成激光振荡;在泵浦光作用下,增益介质中上能级粒子数不断增加,激光光强增加,所述可饱和吸收体3的透过率增大,腔内损耗降低,激光在谐振腔内往复振荡,当所述可饱和吸收体3达到饱和时,被动调Q开启,形成激光脉冲;The saturable absorber 3 first puts the resonant cavity in a high-loss mode. In the initial state, the initial transmittance of the saturable absorber 3 is low, the loss in the laser resonant cavity is large, and laser oscillation cannot be formed; under the action of pump light, the number of upper energy level particles in the gain medium continues to increase, the laser light intensity increases, the transmittance of the saturable absorber 3 increases, the loss in the cavity decreases, and the laser oscillates back and forth in the resonant cavity. When the saturable absorber 3 reaches saturation, passive Q switching is turned on to form a laser pulse;

当泵浦光作用在所述激光增益晶体4上时,所述激光增益晶体4在热效应的作用下,由于温度的梯度,使所述激光增益晶体4在表面发生微小形变,导致输出激光光束会发生漂移;When the pump light acts on the laser gain crystal 4, the laser gain crystal 4 undergoes a slight deformation on the surface due to the temperature gradient under the action of the thermal effect, causing the output laser beam to drift;

所述输出激光经过所述分束镜6后进入所述光束分析仪9,所述光束分析仪9对输出激光光束进行分析,并将分析结果实时传输给所述反馈控制器10;The output laser enters the beam analyzer 9 after passing through the beam splitter 6. The beam analyzer 9 analyzes the output laser beam and transmits the analysis result to the feedback controller 10 in real time.

所述反馈控制器10控制电机11调整所述楔形棱镜2的位置,使所述楔形棱镜2从所述第一位置A向光路方向移动并进入光路,进而调整所述楔形棱镜2插入谐振腔内的距离;The feedback controller 10 controls the motor 11 to adjust the position of the wedge prism 2, so that the wedge prism 2 moves from the first position A toward the optical path and enters the optical path, thereby adjusting the distance by which the wedge prism 2 is inserted into the resonant cavity;

通过所述楔形棱镜2的调整,可以使漂移的激光脉冲进入到所述直角棱镜1中,对输出激光进行修正;By adjusting the wedge-shaped prism 2, the drifting laser pulse can enter the right-angle prism 1 to correct the output laser;

在所述楔形棱镜2移动的过程中,通过所述光束分析仪9实时检测输出激光光束光斑,在检测到输出激光光斑为基模光斑时,通过所述反馈控制器10控制电机11停止,此时所述楔形棱镜2的位置即为第二位置B。During the movement of the wedge-shaped prism 2, the output laser beam spot is detected in real time by the beam analyzer 9. When it is detected that the output laser beam spot is a fundamental mode spot, the feedback controller 10 controls the motor 11 to stop. At this time, the position of the wedge-shaped prism 2 is the second position B.

根据本发明的实施例,实现了以下技术效果:根据本发明的实施例提供的自稳定激光装置及输出方法,采用了侧面泵浦技术,充分利用激光增益晶体,以确保激光增益晶体大部分受到泵浦源的有效激发,从而实现高功率、大能量和高转换效率的激光输出。具体通过单泵浦源的侧面泵浦实现单面传热结构,形成单方向温度梯度,采用楔形棱镜与直角棱镜的配合使用,一方面采用楔形棱镜,达到谐振腔内往返路径等光程的效果,消除热效应引起光束漂移。另一方面同时采用直角棱镜,利用直角棱镜可以用于将不同方向上的光线汇聚到一起的特点,不仅能够调整光束的漂移,将漂移的光束反射回谐振腔内,增加输出光线的光束质量,还能有效提高激光输出的稳定性,对抗外界振动、温度应力变化引起谐振腔失调。According to the embodiments of the present invention, the following technical effects are achieved: the self-stabilizing laser device and output method provided by the embodiments of the present invention adopt the side pumping technology, make full use of the laser gain crystal, to ensure that most of the laser gain crystal is effectively excited by the pump source, so as to achieve high-power, high-energy and high-conversion-efficiency laser output. Specifically, the single-sided heat transfer structure is realized by the side pumping of a single pump source to form a unidirectional temperature gradient, and the wedge prism and the right-angle prism are used in combination. On the one hand, the wedge prism is used to achieve the effect of equal optical path in the round-trip path in the resonant cavity, eliminating the beam drift caused by thermal effect. On the other hand, the right-angle prism is used at the same time, and the right-angle prism can be used to converge light in different directions together, which can not only adjust the drift of the light beam, reflect the drifting light beam back into the resonant cavity, and increase the beam quality of the output light, but also effectively improve the stability of the laser output, and resist the imbalance of the resonant cavity caused by external vibration and temperature stress changes.

在本说明书的描述中,术语“连接”、“安装”、“固定”等均应做广义理解,例如,“连接”可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是直接相连,也可以通过中间媒介间接相连。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本申请中的具体含义。In the description of this specification, the terms "connection", "installation", "fixation" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

在本说明书的描述中,术语“一个实施例”、“一些实施例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或特点包含于本申请的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或实例。而且,描述的具体特征、结构、材料或特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, the description of the terms "one embodiment", "some embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

以上仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims (6)

1. A method for outputting a self-stabilizing laser device is characterized in that,
The self-stabilization laser device comprises a right angle prism (1), a wedge prism (2), a saturable absorber (3), a laser gain crystal (4), an output mirror (5), a beam splitter (6), a pump source (7), a pump source controller (8), a beam analyzer (9), a feedback controller (10) and a motor (11);
The self-stabilization laser device sequentially comprises a right-angle prism (1), a wedge-shaped prism (2), a saturable absorber (3), a laser gain crystal (4), an output mirror (5) and a beam splitter (6) from left to right;
The pumping source (7) is of an independent structure or a group of closely arranged structures, the pumping source (7) is correspondingly arranged on the side face of the laser gain crystal (4), and pumping light is provided for the laser gain crystal (4) along the side direction;
the output wavelength of the pump source (7) corresponds to the absorption wavelength of the laser gain crystal (4), so that the laser gain crystal (4) generates particle number inversion;
the right-angle prism (1) and the output mirror (5) are used as laser resonant cavity mirrors, and laser after gain oscillation is output along the output mirror (5);
The beam splitter (6) is arranged behind the output mirror (5) along an optical path to split output laser into two paths of horizontal direction and vertical direction, wherein the horizontal direction is an optical path required by work, the vertical direction is a detection optical path, and the laser in the vertical direction is incident to the beam analyzer (9);
The beam analyzer (9) is electrically connected with the feedback controller (10), and the feedback controller (10) is electrically connected with the motor (11);
The beam analyzer (9) analyzes the light spot condition of the incident laser and transmits an analysis result to the feedback controller (10), and the feedback controller (10) outputs a control signal to the motor (11);
The motor (11) is connected with the wedge-shaped prism (2) and controls the wedge-shaped prism (2) to move between a first position A and a second position B; the first position A is a position where the wedge-shaped prism (2) does not enter a laser light path, and the second position B is a position of the wedge-shaped prism (2) when the output laser light spot is a fundamental mode after the wedge-shaped prism (2) enters the laser light path;
The output method of the self-stabilizing laser device comprises the following steps:
The wedge-shaped prism (2) is adjusted to be positioned at a first position A by the motor (11), namely, the position of the wedge-shaped prism (2) which does not enter a resonant cavity light path;
the pumping source (7) is positioned on the side surface of the laser gain crystal (4), and the pumping source (7) emits pumping light;
Under the action of pumping light, the particles absorb the pumping light to generate energy level transition in the laser gain crystal (4), the particles are excited to an upper energy level through energy transfer between the energy levels, and the population inversion is realized in the laser gain crystal (4);
The saturable absorber (3) enables the resonant cavity to be in a high-loss mode, and in an initial state, the initial transmittance of the saturable absorber (3) is low, the loss in the laser resonant cavity is high, and laser oscillation cannot be formed; under the action of pumping light, the upper energy level particle number in the gain medium is continuously increased, the laser light intensity is increased, the transmittance of the saturable absorber (3) is increased, the loss in the cavity is reduced, the laser oscillates reciprocally in the resonant cavity, and when the saturable absorber (3) reaches saturation, the passive Q-switching is started to form laser pulses;
When pump light acts on the laser gain crystal (4), the laser gain crystal (4) generates tiny deformation on the surface due to the temperature gradient under the action of a thermal effect, so that an output laser beam can drift;
The output laser enters the beam analyzer (9) after passing through the beam splitter (6), and the beam analyzer (9) analyzes the output laser beam and transmits the analysis result to the feedback controller (10) in real time;
The feedback controller (10) controls the motor (11) to adjust the position of the wedge-shaped prism (2) so that the wedge-shaped prism (2) moves from the first position A to the direction of the optical path and enters the optical path, and then the distance of the wedge-shaped prism (2) inserted into the resonant cavity is adjusted;
the drifting laser pulse can enter the right-angle prism (1) through adjustment of the wedge-shaped prism (2), and output laser is corrected;
in the moving process of the wedge-shaped prism (2), detecting an output laser beam spot in real time through the beam analyzer (9), and controlling a motor (11) to stop through the feedback controller (10) when detecting that the output laser spot is a fundamental mode spot, wherein the position of the wedge-shaped prism (2) is a second position B;
The wedge-shaped prism (2) is matched with the right-angle prism (1), on one hand, the wedge-shaped prism (2) is adopted to achieve the effect of equal optical path length of a round trip path in a resonant cavity, and the beam drift caused by the thermal effect is eliminated; on the other hand adopts simultaneously right angle prism (1), utilizes right angle prism (1) can be used for gathering the characteristics together of light on the different directions, not only can adjust the drift of light beam, in the resonant cavity is returned to the light beam reflection that will drift, increase the beam quality of output light, can also effectively improve laser output's stability, and the external vibration of resistance, temperature stress change arouse the resonant cavity detuning.
2. The output method of a self-stabilizing laser device according to claim 1, wherein said laser gain crystal (4) is a nd:yag crystal, nd:yap crystal, or nd:yvo 4 crystal; the wavelength of the pumping light emitted by the pumping source (7) is 808nm.
3. The method according to claim 2, wherein the saturable absorber (3) is a Cr 4+:yag crystal, and in an initial state, the initial transmittance of the saturable absorber (3) is low, the loss in the laser resonator is high, and laser oscillation cannot be formed; under the action of pumping light, the upper energy level particle number in the gain medium is continuously increased, the laser light intensity is increased, the transmittance of the saturable absorber (3) is increased, the loss in the cavity is reduced, the laser oscillates reciprocally in the resonant cavity, and when the saturable absorber (3) reaches saturation, the passive Q-switching is started to form laser pulses.
4. The method for outputting the self-stabilized laser device according to claim 3, wherein the surface of the right-angle prism (1) is plated with a high reflection film for outputting the laser wavelength, and both end surfaces of the laser gain crystal (4) are plated with an antireflection film for outputting the laser wavelength; the output mirror (5) is plated with an antireflection film for outputting laser wavelength; the beam splitter (6) is plated with a partial reflecting film for outputting laser wavelength.
5. The output method of a self-stabilizing laser device according to claim 4, wherein the reflectivity of said partially reflecting film is 1% -10%.
6. The method according to claim 4, wherein the right angle prism (1), the output mirror (5) and the beam splitter (6) are CaF 2 crystals.
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