CN117329699B - Acid heating cylinder for wafer etching - Google Patents
Acid heating cylinder for wafer etchingInfo
- Publication number
- CN117329699B CN117329699B CN202311360956.8A CN202311360956A CN117329699B CN 117329699 B CN117329699 B CN 117329699B CN 202311360956 A CN202311360956 A CN 202311360956A CN 117329699 B CN117329699 B CN 117329699B
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- Prior art keywords
- cylinder
- heating
- heating film
- liquid
- shell
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
- F24H1/102—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply with resistance
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/0005—Details for water heaters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/0005—Details for water heaters
- F24H9/001—Guiding means
- F24H9/0015—Guiding means in water channels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/18—Arrangement or mounting of grates or heating means
- F24H9/1809—Arrangement or mounting of grates or heating means for water heaters
- F24H9/1818—Arrangement or mounting of electric heating means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Instantaneous Water Boilers, Portable Hot-Water Supply Apparatuses, And Control Of Portable Hot-Water Supply Apparatuses (AREA)
- Weting (AREA)
Abstract
一种晶圆蚀刻用酸液加热筒，它包括出液口固定座，进液口固定座，外壳，传感器引线口，电源线引线口，隔热棉，进液口、出液口，均流板，膨胀压紧机构，外筒，内筒，侧板，电加热膜，传感及控制器，螺杆，螺母，膨胀壳，多瓣部件，圆筒，锥形环，其特征是：两固定座和外壳共同构成加热器外壳，均流板、外筒、内筒和侧板共同构成石英加热筒，加热筒安装于加热器外壳中，二者之间填充有隔热棉，电加热膜通过膨胀压紧机构紧贴于外筒的内壁。本发明可以精确测量和控制加热液温度，提高加热效率，避免了流动死角和局部高温，同时具有耐腐蚀能力强、能够满足半导体湿法处理领域所需化学品的高洁净度、快速响应等加热需求的优点。
An acid heating cylinder for wafer etching includes a liquid outlet fixing seat, a liquid inlet fixing seat, a shell, a sensor lead port, a power line lead port, thermal insulation cotton, a liquid inlet, a liquid outlet, a flow equalizing plate, an expansion and pressing mechanism, an outer cylinder, an inner cylinder, a side plate, an electric heating film, a sensor and a controller, a screw, a nut, an expansion shell, a multi-petal component, a cylinder, and a conical ring. The invention is characterized in that: the two fixing seats and the shell together constitute a heater shell, the flow equalizing plate, the outer cylinder, the inner cylinder, and the side plate together constitute a quartz heating cylinder, the heating cylinder is installed in the heater shell, and thermal insulation cotton is filled between the two, and the electric heating film is tightly attached to the inner wall of the outer cylinder through the expansion and pressing mechanism. The present invention can accurately measure and control the temperature of the heating liquid, improve heating efficiency, avoid flow dead corners and local high temperatures, and has the advantages of strong corrosion resistance, the ability to meet the high cleanliness and rapid response of chemicals required in the field of semiconductor wet processing, and other heating requirements.
Description
Technical Field
The invention belongs to the technical field of chemical liquid heating, in particular to an acid liquid heating technology used in semiconductor processing, and specifically relates to an acid liquid heating cylinder for wafer etching.
Background
Chemical liquid heating is an important link in a plurality of high-precision production processes. In the semiconductor wafer etching process, the acid solution used needs to be heated from normal temperature to about 200 ℃. The acid liquor heating cylinder for etching the wafer commonly used at present mainly comprises a whole quartz cylinder and an electric heating film wrapped on the outer side of the quartz cylinder, wherein one end of the heating cylinder is used for feeding liquor, and the other end is used for discharging liquor. The heater has larger size, and a low flow speed area exists when liquid flows in the heating cavity. Local high temperature is easy to generate in the low-speed areas, so that the temperature of a final liquid outlet fluctuates, the etching quality of a wafer is affected, and the service life of a heater is also shortened due to the influence. In the heater, the temperature of the heated liquid is gradually increased from the liquid inlet to the liquid outlet, the temperature is low near the liquid inlet, higher heating power is needed to quickly heat the liquid, the temperature is high near the liquid outlet and near the target temperature, and the heating power is not needed to be too high in order to prevent the final liquid outlet temperature from being too high. The traditional acid liquor heating cylinder for wafer etching can not realize the zonal heating power control, and the heating efficiency is affected. Therefore, it is necessary to develop a new type of acid heating cylinder for wafer etching.
Disclosure of Invention
The invention aims to provide an acid liquor heating cylinder for wafer etching, which is uniform in heating and high in temperature control precision, aiming at the problems that the heating temperature of the traditional chemical liquor quartz heating cylinder is not uniform and is not easy to control.
The technical scheme of the invention is as follows:
the acid liquor heating cylinder for wafer etching comprises a liquid outlet fixing seat 1, a liquid inlet fixing seat 2 and a shell 3, wherein a sensor lead 4 and a power wire lead 5 are arranged on the liquid outlet fixing seat 1, two ends of the shell 3 are respectively arranged on the liquid outlet fixing seat 1 and the liquid inlet fixing seat 2, the acid liquor heating cylinder is characterized in that an outer cylinder 10 is arranged in the shell 3, insulation cotton 6 for heat preservation is additionally arranged between the shell 3 and the outer cylinder 10, side plates 12 are additionally arranged at two ends of the outer cylinder 10, a liquid inlet 22 is arranged on one side plate 12, a liquid outlet 7 is arranged on the other side plate 12, the outer cylinder 10 and the two end side plates 12 form a hollow cylindrical heating cavity, an external heating film component consisting of a plurality of groups of heating films is additionally arranged on the outer surface of the outer cylinder 10, the inner surface of the external heating film component is attached to the outer cylinder 10, the outer surface of the external heating film component is contacted with the insulation cotton 6, an inner cylinder 11 is arranged in the outer cylinder 10, at least two circular flow equalizing plates 8 are arranged on the inner cylinder 11, the outer diameter of the flow equalizing plates 8 is smaller than the inner diameter of the outer cylinder 10, an inner heating film component consisting of a plurality of groups of heating films is arranged in the inner cylinder 11, the inner heating film component is tightly pressed by an inner film component 9, and the temperature of the inner heating film component is automatically pressed by a heater 9 in a temperature control device, and the temperature is controlled by the temperature of the outer heater, and the temperature is controlled to be tightly pressed by the temperature of the liquid outlet heating film component and is automatically pressed by the heater to be pressed by the outer heater, and is kept in a temperature control position close to the liquid outlet heater, and is kept close to the temperature by the liquid outlet heating film.
The external heating membrane component at least consists of three sections, and the heating power of the external heating membrane component which is closer to the liquid inlet end is higher.
The inner side of the flow equalizing plate 8, which is contacted with the inner cylinder 11, is provided with a circle of rectangular opening for acid liquor to pass through, the outer circle of the flow equalizing plate 8 is provided with a half circle of liquid through holes, and the positions of the liquid through holes are opposite to the positions of the liquid inlet or the liquid outlet.
The inner heating membrane component at least consists of three sections, and the heating power of the inner and outer heating membrane components which are closer to the liquid inlet end is higher.
The expansion compressing mechanism 9 is composed of a screw rod 15, a nut 16, an expansion shell 17, a multi-petal part 18, a cylinder 19 and a conical ring 20, wherein the nut 16, the multi-petal part 18, the cylinder 19 and the conical ring 20 are sleeved on the screw rod 15, the nut 16 is positioned at two ends of the screw rod 17, the multi-petal part 18 is at least composed of two petals, two sides of the multi-petal part 18 are provided with inclined planes matched with one conical ring 20, one cylinder 19 is placed in each two adjacent conical rings 20 and used for transmitting thrust, the nut 16 at one end of the screw rod 15 is screwed, the conical ring 20 is pushed to move towards the other end of the screw rod 15, the conical ring 20 pushes the multi-petal part 18 to move radially through the inclined planes, so that the expansion shell 17 is deformed, and the expansion shell 17 clings to the inner surface of the inner cylinder 11, so that heat of the inner heating film assembly can be transmitted to the inner wall of the inner cylinder and heat the acid liquid flowing through the outer wall of the inner cylinder.
The outer cylinder 10, the inner cylinder 11 and the side plates 12 together form a hollow annular heating cavity, the hollow annular heating cavity is arranged in the shell 3, and heat insulation cotton 6 is stuck to the inner side of the shell 3. The outer side of the outer cylinder 10 is stuck with an outer heating film which is formed by a first heating film at the position close to the inlet of the outer layer, a second heating film at the middle position of the outer layer and a third heating film 27 at the position close to the outlet of the outer layer, liquid inlets and liquid outlets are respectively arranged on two side plates, the two flow equalizing plates are sleeved on the inner cylinder and divide the hollow annular heating cavity into three sections along the axial direction, a plurality of liquid through holes are uniformly distributed on a half area of the flow equalizing plates along the radial direction, and when the flow equalizing plates are installed, the half of the flow equalizing plates with the liquid through holes is ensured to be in the opposite position with the liquid inlets/liquid outlets on the outer side of the flow equalizing plates.
The inner layer heating films formed by the first heating film at the position close to the inlet of the outer layer, the second heating film at the middle position of the outer layer and the third heating film at the position close to the outlet of the outer layer, the fourth heating film at the position close to the inlet of the inner layer, the fifth heating film at the middle position of the inner layer and the sixth heating film at the position close to the outlet of the inner layer can realize heating in different areas with different powers according to the axial partition along the heating cylinder.
The details are as follows:
The utility model provides an acidizing fluid heating cylinder for wafer etching, including liquid outlet fixing base 1, liquid inlet fixing base 2, shell 3, sensor lead wire mouth 4, power cord lead wire mouth 5, thermal-insulated cotton 6, liquid inlet 22, liquid outlet 7, flow equalizing plate 8, inflation hold-down mechanism 9, urceolus 10, inner tube 11, curb plate 12, inlayer near entrance heating film 13, inlayer intermediate position heating film 23, inlayer near exit heating film 24, inlayer near entrance heating film 25, skin intermediate position heating film 26, skin near exit heating film 27, sensor and controller 14, screw rod 15, nut 16, inflation shell 17, multi-lamella part 18, drum 19, conical ring 20. The shell 3 is arranged between the liquid outlet fixing seat 1 and the liquid inlet fixing seat 2, and the three parts form the outer surface of the acid liquid heating cylinder together. The power supply sensor lead port 4 and the power supply wire lead port 5 are arranged on the liquid outlet fixing seat 1. The outer cylinder 10, the inner cylinder 11 and the side plates 12 together form a heating cavity and are arranged in the shell 3, the inner side of the shell 3 is stuck with heat insulation cotton 6, the outer side of the outer cylinder 10 is stuck with an outer heating film consisting of an outer near-inlet heating film 25, an outer middle heating film 26 and an outer near-outlet heating film 27, and the two side plates 12 are respectively provided with a liquid inlet 22 and a liquid outlet 7 for inflow and outflow of chemical liquid medicine. The sensor and controller 14 is mounted on the side plate 12 on the liquid outlet side. The heating cavity formed by the outer cylinder 10, the inner cylinder 11 and the side plates 12 is hollow and cylindrical, and compared with the cylindrical cavity of a traditional heater, the hollow cylindrical cavity can improve the flow rate of liquid in the cavity and improve the heat exchange efficiency of the heater. The flow equalizing plate 8 is sleeved on the inner cylinder 11. The outer diameter of the flow equalizing plate 8 is smaller than the inner diameter of the outer cylinder 10, the size of a gap between the outer side of the flow equalizing plate 8 and the inner wall of the outer cylinder 10 is determined according to the flow velocity of liquid in the cavity, and the inner diameter of the flow equalizing plate 8 is the same as the outer wall diameter of the inner cylinder 11, so that the flow equalizing plate 8 can be fixed on the inner cylinder 11. Rectangular openings are arranged on the inner side of the flow equalizing plate 8 and are uniformly distributed on the whole inner ring. The upper part of the flow equalizing plate 8 is also provided with a plurality of liquid through holes which are uniformly distributed in a half area of the flow equalizing plate 8. When the flow equalizing plate 8 is installed, the half of the flow equalizing plate with the liquid through holes is guaranteed to be in the opposite position with the liquid inlet/outlet on the outer side of the flow equalizing plate, as shown in fig. 5. The existence of the flow equalizing plate 8 further improves the flow velocity of liquid in the heating cavity, reduces the flow dead zone and makes the internal flow field more reasonable. The inner heating film is positioned between the expansion pressing mechanism 9 and the inner cylinder 11 and is composed of an inner layer near-inlet heating film 13, an inner layer middle position heating film 23 and an inner layer near-outlet heating film 24. The outer heating film and the inner heating film can realize sectional power heating along the axial direction of the heating cylinder, the heating power at one side close to the liquid inlet is high, and the heating power at the position closer to the liquid outlet is lower. the expansion and compression mechanism 9 is positioned in the inner cylinder 11 and consists of a screw rod 15, a nut 16, an expansion shell 17, a multi-petal part 18, a cylinder 19 and a conical ring 20, wherein the nut 16, the multi-petal part 18, the cylinder 19 and the conical ring 20 are sleeved on the screw rod 15. The expansion shell 17 is made of stainless steel and the multi-lobe member 18 is made of aluminum. The nut 16 is located at the extreme ends of the screw 17, and the multi-lobed member 18 has two conical rings 20 on each side, with cylinders 19 being placed in the two adjacent conical rings 20.
The beneficial effects of the invention are as follows:
1. Improves the flow field in the heating cavity, greatly reduces the flow dead zone, and avoids the local high temperature of the liquid medicine (shown in figure 1).
2. A novel expansion pressing mechanism is used for ensuring the fit between the electric heating film and the wall of the quartz cylinder.
3. Realize the subregion heating, different heating power is used to different positions, has improved heating efficiency.
4. The capacity of the heating cavity is reduced, the temperature rise is faster under the same power, and the energy is saved.
Drawings
Fig. 1 is a comparison of a conventional quartz heating cartridge flow field distribution (left) with a quartz heating cartridge flow field distribution (right) of the present invention.
Fig. 2 is a schematic view of the appearance of the heating cylinder according to the present invention.
Fig. 3 is a schematic view of the internal structure of the heating cylinder according to the present invention.
Fig. 4 is an exploded view of the overall structure of the cartridge heater according to the present invention.
Fig. 5 is a schematic diagram of a current sharing plate structure according to the present invention.
Fig. 6 is a schematic view of the internal structure of the expansion and compression mechanism according to the present invention.
In the figure, 1, a liquid outlet fixing seat; 2, a liquid inlet fixing seat, 3, a shell, 4, a sensor lead port, 5, a power line lead port, 6, heat insulation cotton, 7, a liquid outlet, 8, a flow equalizing plate, 9, an expansion compressing mechanism, 10, an outer cylinder, 11, an inner cylinder, 12, a side plate, 13, an inner layer near-inlet heating film, 14, a sensing controller, 15, a screw rod, 16, a nut, 17, an expansion shell, 18, a multi-piece part, 19, a cylinder, 20, a conical ring, 21, a flow dead zone, 22, a liquid inlet, 23, an inner layer middle position heating film, 24, an inner layer near-outlet heating film, 25, an outer layer near-inlet heating film, 26, an outer layer middle position heating film and 27, an outer layer near-outlet heating film.
Detailed Description
The invention will be described in further detail with reference to the drawings and the detailed description.
As shown in fig. 1 to 5.
As shown in figure 4, the acid liquor heating cylinder for wafer etching comprises a liquid outlet fixing seat 1, a liquid inlet fixing seat 2, a shell 3, a sensor lead port 4, a power line lead port 5, heat insulation cotton 6, a liquid inlet 22, a liquid outlet 7, a flow equalizing plate 8, an expansion pressing mechanism 9, an outer cylinder 10, an inner cylinder 11, a side plate 12, an inner layer near-inlet heating film 13, an inner layer middle position heating film 23, an inner layer near-outlet heating film 24, an outer layer near-inlet heating film 25, an outer layer middle position heating film 26, an outer layer near-outlet heating film 27, a sensor and controller 14, a screw 15, a nut 16, an expansion shell 17, a multi-flap component 18, a cylinder 19 and a conical ring 20. As shown in fig. 2, the casing 3 is installed between the liquid outlet fixing seat 1 and the liquid inlet fixing seat 2, and the three components together form the outer surface of the acid liquid heating cylinder. The power supply sensor lead port 4 and the power supply wire lead port 5 are arranged on the liquid outlet fixing seat 1. The outer cylinder 10, the inner cylinder 11 and the side plates 12 together form a heating cavity and are arranged in the shell 3, the inner side of the shell 3 is stuck with heat insulation cotton 6, the outer side of the outer cylinder 10 is stuck with an outer heating film consisting of an outer near-inlet heating film 25, an outer middle heating film 26 and an outer near-outlet heating film 27, and the two side plates 12 are respectively provided with a liquid inlet 22 and a liquid outlet 7 for inflow and outflow of chemical liquid medicine. the sensor and controller 14 is mounted on the side plate 12 on the liquid outlet side. The heating cavity formed by the outer cylinder 10, the inner cylinder 11 and the side plates 12 is hollow and cylindrical, and compared with the cylindrical cavity of a traditional heater, the hollow cylindrical cavity can improve the flow rate of liquid in the cavity and improve the heat exchange efficiency of the heater. As shown in fig. 3, the flow equalizing plate 8 is sleeved on the inner cylinder 11. The outer diameter of the flow equalizing plate 8 is smaller than the inner diameter of the outer cylinder 10, a gap is reserved between the flow equalizing plate 8 and the outer cylinder 10, the size of the gap is determined according to the flow velocity of liquid in the cavity, and the inner diameter of the flow equalizing plate 8 is the same as the outer wall diameter of the inner cylinder 11, so that the flow equalizing plate 8 can be fixed on the inner cylinder 11. Rectangular openings are arranged on the inner side of the flow equalizing plate 8 and are uniformly distributed on the whole inner ring. The upper part of the flow equalizing plate 8 is also provided with a plurality of liquid through holes which are uniformly distributed in a half area of the flow equalizing plate 8. When the flow equalizing plate 8 is installed, the half of the flow equalizing plate with the liquid through holes is guaranteed to be in the opposite position with the liquid inlet/outlet on the outer side of the flow equalizing plate, as shown in fig. 5. The existence of the flow equalizing plate 8 further improves the flow velocity of liquid in the heating cavity, reduces the flow dead zone and makes the internal flow field more reasonable. The inner heating film is formed by an inner layer near-inlet heating film 13, an inner layer middle position heating film 23 and an inner layer near-outlet heating film 24 which are positioned between the expansion pressing mechanism 9 and the inner barrel 11. The outer heating film and the inner heating film can realize sectional power heating along the axial direction of the heating cylinder, the heating power at one side close to the liquid inlet is high, and the heating power at the position closer to the liquid outlet is lower. As shown in fig. 6, the expansion and compression mechanism 9 is located in the inner cylinder 11, and is composed of a screw rod 15, a nut 16, an expansion shell 17, a multi-petal part 18, a cylinder 19 and a conical ring 20, wherein the nut 16, the multi-petal part 18, the cylinder 19 and the conical ring 20 are all sleeved on the screw rod 15. The expansion shell 17 is made of stainless steel and the multi-lobe member 18 is made of aluminum. The nut 16 is located at the extreme ends of the screw 17, and the multi-lobe member 18 has two conical rings 20 on each side, and a cylinder 19 is placed between two adjacent conical rings 20 for transmitting thrust. when a pre-tightening force is applied to the nuts 16 at both ends of the expansion and compression mechanism 9, the tapered rings 20 adjacent to the nuts are subjected to an axially inward pushing force, which can be transmitted to all the tapered rings 20 through the cylinder 19, and the tapered side walls of the tapered rings 20 and the oblique angle expanding surfaces on the inner sides of the multi-lobe members 18 convert the pushing force applied by the tapered rings 20 into an expanding force for driving the multi-lobe members 18 to deform. The deformation of the multi-lobe member 18 drives the expansion shell 17 radially outwardly so that the electrically heated membrane on the outer layer of the expansion and compression mechanism 9 can be brought into close contact with the inner wall of the inner cylinder 11. When the acid liquor heating cylinder is assembled, nuts 16 on two sides of the expansion pressing mechanism 9 are screwed first, so that the electric heating film is ensured to be tightly attached to the inner wall of the inner cylinder 11 under the pressing force from the expansion pressing mechanism 9, and parts such as a shell, a fixing seat and the like are assembled. When the acid liquor heating cylinder is used, liquid to be heated is introduced into the heating cylinder through the liquid inlet 22 on the liquid inlet fixing seat 2, and after the liquid flows out from the liquid outlet 7 on the liquid outlet fixing seat 1, an electric heating film is connected to start heating, and heating power is adjusted according to target temperature.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any modification or replacement made by those skilled in the art within the scope of the present invention should be covered by the present invention.
The invention is not related in part to the same as or can be practiced with the prior art.
Claims (5)
1. An acid liquor heating cylinder for wafer etching comprises a liquid outlet fixing seat (1), The liquid inlet fixing seat (2) and the shell (3), wherein the liquid outlet fixing seat (1) is provided with a sensor lead port (4) and a power line lead port (5), two ends of the shell (3) are respectively arranged on the liquid outlet fixing seat (1) and the liquid inlet fixing seat (2), the liquid inlet fixing seat is characterized in that an outer cylinder (10) is arranged in the shell (3), insulating cotton (6) for heat preservation is additionally arranged between the shell (3) and the outer cylinder (10), two ends of the outer cylinder (10) are provided with side plates (12), a liquid inlet (22) is arranged on one side plate (12), a liquid outlet (7) is arranged on the other side plate (12), the outer cylinder (10) and the two end side plates (12) form a hollow barrel-shaped heating cavity, an outer heating film assembly consisting of a plurality of groups of heating films is additionally arranged on the outer surface of the outer cylinder (10), the inner surface of the outer heating film assembly is attached to the outer cylinder (10), the outer surface of the outer heating film assembly is contacted with the insulating cotton (6), an inner cylinder (11) is arranged in the outer cylinder (10), at least two circular plates (8) are arranged on the inner cylinder (11), the inner diameter of the inner cylinder (8) is smaller than the inner diameter of the inner heating film assembly (11), the inner heating film component is pressed and stuck on the inner cylinder wall through an expansion pressing mechanism (9), one end of the outer cylinder (10) close to the liquid outlet (7) is provided with a sensor and a controller (14), the controller automatically controls the heating power of the outer heating film component and each heating component in the inner heating film component according to the measured temperature of the liquid outlet (7) so as to keep the liquid outlet temperature of the liquid outlet within a set range, and the expansion pressing mechanism (9) is formed by a screw (15), the nut (16), the expansion shell (17), the multi-petal component (18), the cylinder (19) and the conical ring (20) are formed together, the nut (16), the multi-petal component (18), The cylinder (19) and the conical rings (20) are sleeved on the screw (15), the nut (16) is positioned at two ends of the screw (15), the multi-petal part (18) is at least composed of two petals, inclined planes matched with one conical ring (20) are arranged at two sides of the multi-petal part (18), one cylinder (19) is arranged in each two adjacent conical rings (20) and used for transmitting thrust, the nut (16) at one end of the screw (15) is screwed to push the conical ring (20) to move towards the other end of the screw (15), the conical ring (20) pushes the multi-petal part (18) to move radially through the inclined planes so as to deform the expansion shell (17), the expansion shell (17) tightly clings the inner heating film component to the inner surface of the inner cylinder (11) so as to be beneficial to heat the heat of the inner heating film component to be transmitted to the inner wall of the inner cylinder and heat acid liquid flowing through the outer wall of the inner cylinder, the outer cylinder (10), The inner cylinder (11) and the side plates (12) form a hollow annular heating cavity together, the hollow annular heating cavity is arranged in the outer shell (3), heat insulation cotton (6) is adhered to the inner side of the outer shell (3), an outer heating film is formed by a first heating film at the position close to an inlet of the outer layer, a second heating film at the middle position of the outer layer and a third heating film (27) at the position close to an outlet of the outer layer together, liquid inlets and liquid outlets are respectively arranged on the two side plates, the hollow annular heating cavity is axially divided into three sections by the two flow equalizing plates, a plurality of liquid through holes are uniformly distributed in a radial direction in a half area of the flow equalizing plates, and when the flow equalizing plates are arranged, the half of the flow equalizing plates with the liquid through holes is ensured to be in the opposite position with the liquid inlets/liquid outlets on the outer side of the flow equalizing plates.
2. The acid solution heating cylinder for wafer etching as set forth in claim 1, wherein the outer heating film assembly is composed of at least three sections, and the heating power of the outer heating film assembly is higher as the outer heating film assembly is closer to the liquid inlet end.
3. The acid liquor heating cylinder for wafer etching according to claim 1, wherein a circle of rectangular openings for the acid liquor to pass through are formed in the inner side, which is contacted with the inner cylinder (11), of the flow equalizing plate (8), half circles of liquid through holes are formed in the outer circle of the flow equalizing plate (8), and the positions of the liquid through holes are opposite to the positions of the liquid inlet or the liquid outlet.
4. The acid solution heating cylinder for wafer etching as set forth in claim 1, wherein said inner heating film assembly is composed of at least three sections, and the heating power of the inner and outer heating film assemblies is increased as they are closer to the inlet end.
5. The acid solution heating cylinder for wafer etching according to claim 1, wherein the outer heating film composed of the first heating film at the outer layer near-entrance, the second heating film at the outer layer middle position and the third heating film at the outer layer near-exit, and the inner heating film composed of the fourth heating film at the inner layer near-entrance, the fifth heating film at the inner layer middle position and the sixth heating film at the inner layer near-exit can realize heating with different power in different areas according to the partition along the axial direction of the heating cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311360956.8A CN117329699B (en) | 2023-10-20 | 2023-10-20 | Acid heating cylinder for wafer etching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311360956.8A CN117329699B (en) | 2023-10-20 | 2023-10-20 | Acid heating cylinder for wafer etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117329699A CN117329699A (en) | 2024-01-02 |
| CN117329699B true CN117329699B (en) | 2025-10-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202311360956.8A Active CN117329699B (en) | 2023-10-20 | 2023-10-20 | Acid heating cylinder for wafer etching |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN210070582U (en) * | 2019-11-26 | 2020-02-14 | 北京北方华创微电子装备有限公司 | Heating furnace body and semiconductor device |
| CN211781944U (en) * | 2019-12-24 | 2020-10-27 | 德格瑞(南通)压缩空气净化设备有限公司 | Zero gas loss adsorption dryer air heating device |
| CN114178247A (en) * | 2021-12-30 | 2022-03-15 | 常州捷佳创精密机械有限公司 | Heating device and cleaning device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162113A (en) * | 2000-11-24 | 2002-06-07 | Ses Co Ltd | Temperature increasing device for constant temperature liquid |
| JP5043776B2 (en) * | 2008-08-08 | 2012-10-10 | 株式会社日立国際電気 | Substrate processing apparatus and semiconductor device manufacturing method |
| CN114234439A (en) * | 2022-01-14 | 2022-03-25 | 广东汇晶新能源科技有限公司 | An outer coating liquid heater assembly |
-
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- 2023-10-20 CN CN202311360956.8A patent/CN117329699B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN210070582U (en) * | 2019-11-26 | 2020-02-14 | 北京北方华创微电子装备有限公司 | Heating furnace body and semiconductor device |
| CN211781944U (en) * | 2019-12-24 | 2020-10-27 | 德格瑞(南通)压缩空气净化设备有限公司 | Zero gas loss adsorption dryer air heating device |
| CN114178247A (en) * | 2021-12-30 | 2022-03-15 | 常州捷佳创精密机械有限公司 | Heating device and cleaning device |
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