CN117232412B - Online monitoring methods, dynamic characteristics analysis methods and related equipment for air film thickness - Google Patents
Online monitoring methods, dynamic characteristics analysis methods and related equipment for air film thickness Download PDFInfo
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Abstract
本发明涉及厚度测量技术领域，具体公开了一种气膜厚度的在线监测方法、动态特性分析方法及相关设备，其中，气膜厚度的在线监测方法包括步骤：S1、在滑台滑动过程中，获取第一距离信息和第二距离信息，第一距离信息为感应屏基于激光发生器衍射产生的第一明纹与中央明纹之间的距离，第二距离信息为气膜靠近感应屏一端与感应屏之间的距离；S2、根据第一距离信息和第二距离信息在线分析气膜厚度的变化情况；该气膜厚度的在线监测方法在滑台滑动过程中，基于第一距离信息和第二距离信息能直接或间接地在线分析并判断驱动设备在运行过程中产生的微米级的气膜的厚度是否出现变化，以实现对驱动设备运行状态的精准监控。
The invention relates to the technical field of thickness measurement, and specifically discloses an online monitoring method of air film thickness, a dynamic characteristic analysis method and related equipment. The online monitoring method of air film thickness includes the steps: S1. During the sliding process of the slide table, Obtain the first distance information and the second distance information. The first distance information is the distance between the first clear pattern and the central clear pattern generated by the diffraction of the laser generator on the sensing screen. The second distance information is the distance between the end of the air film close to the sensing screen and The distance between the sensing screens; S2, online analysis of changes in air film thickness based on the first distance information and the second distance information; the online monitoring method of the air film thickness is based on the first distance information and the second distance information during the sliding process of the slide table. The second distance information can directly or indirectly analyze online and determine whether the thickness of the micron-level air film generated by the driving equipment during operation changes, so as to achieve accurate monitoring of the operating status of the driving equipment.
Description
Technical Field
The application relates to the technical field of thickness measurement, in particular to an online monitoring method of air film thickness, a dynamic characteristic analysis method and related equipment.
Background
In the related art, a driving device based on air floatation conveying generally generates an air film with a micron-sized thickness based on an air floatation bearing when a sliding table is driven to slide, an air floatation block is a main body structure for generating the air film to slide in the air floatation bearing, the thickness of the air film is smaller, the thickness change of the air film is generally within 5-20 mu m, the thickness change of the air film is closely related to the driving performance of the driving device, and the related detection device in the prior art can only detect the thickness of the air film generated by the driving device in static operation and cannot monitor the thickness of the air film generated by the driving device in online operation.
In view of the above problems, no effective technical solution is currently available.
Disclosure of Invention
The application aims to provide an online monitoring method for the thickness of a gas film, a dynamic characteristic analysis method and related equipment, so as to online monitor the change condition of the thickness of the gas film generated during the operation of driving equipment.
In a first aspect, the application provides an online monitoring method of a gas film thickness, which is applied to a driving device based on air floatation conveying, wherein the driving device comprises a sliding table which slides on a base based on driving of a linear driving assembly, and an air floatation block which is fixed on the sliding table and is used for generating a gas film between the sliding table and the base when the sliding table slides;
the two ends of the base along the sliding direction of the sliding table are respectively provided with a laser generator and an induction screen, wherein the laser generator and the induction screen are opposite to the air film;
the online monitoring method of the thickness of the air film comprises the following steps:
s1, acquiring first distance information and second distance information in the sliding process of the sliding table, wherein the first distance information is the distance between a first bright line and a central bright line generated by the induction screen based on diffraction of a laser generator, and the second distance information is the distance between one end, close to the induction screen, of the air film and the induction screen;
s2, analyzing the change condition of the thickness of the air film on line according to the first distance information and the second distance information.
According to the online monitoring method for the thickness of the air film, in the sliding process of the sliding table, the thickness of the micron-sized air film generated by the driving equipment in the operation process can be directly or indirectly analyzed and judged online based on the first distance information and the second distance information, so that the operation state of the driving equipment can be accurately monitored.
The step S2 of the online monitoring method of the thickness of the air film comprises the following steps:
calculating the ratio of the second distance information to the first distance information;
and analyzing the fluctuation condition of the ratio on line to evaluate the change condition of the thickness of the air film.
In this example, the ratio can more intuitively reflect the fluctuation of the film thickness.
The method for on-line monitoring the thickness of the air film further comprises the following steps of:
and adjusting the position and the orientation of the laser generator and the position of the induction screen so that central bright patterns generated after laser emitted by the laser generator passes through the air film are projected on the imaging center of the induction screen, and the thickness of each bright pattern and each dark pattern except the central bright patterns is uniform.
According to the on-line monitoring method for the thickness of the air film, the air film is a vertical air film or a horizontal air film.
In a second aspect, the application also provides a dynamic characteristic analysis method of the thickness of the air film, which is applied to driving equipment based on air floatation conveying, wherein the driving equipment comprises a sliding table which slides on a base based on driving of a linear driving assembly, and an air floatation block which is fixed on the sliding table and is used for generating the air film between the sliding table and the base when the sliding table slides;
the two ends of the base along the sliding direction of the sliding table are respectively provided with a laser generator and an induction screen, wherein the laser generator and the induction screen are opposite to the air film;
the method for analyzing the dynamic characteristics of the thickness of the air film comprises the following steps:
a1, acquiring first distance information and second distance information in a sliding process of the sliding table based on different motion states, wherein the first distance information is the distance between a first bright line and a central bright line generated by the induction screen based on diffraction of a laser generator, and the second distance information is the distance between one end, close to the induction screen, of the air film and the induction screen;
a2, analyzing the change condition of the air film thickness in the sliding process of the sliding table based on different motion states according to the first distance information and the second distance information so as to determine the dynamic characteristic of the air film thickness in the sliding process of the sliding table based on different motion states.
According to the dynamic characteristic analysis method for the air film thickness, in the sliding process of the sliding table based on different motion states, the dynamic characteristic of the air film thickness can be directly or indirectly analyzed on line based on the first distance information and the second distance information, so that the change condition of the air film thickness in different motion states can be judged, and the dynamic characteristic of the air film thickness changing along with the factors such as position, speed and acceleration can be determined.
The method for analyzing the dynamic characteristics of the thickness of the air film, wherein the step A2 comprises the following steps:
acquiring a reference curve according to the first distance information and the second distance information, wherein the reference curve is a fitting curve of the second distance information about the change of the first distance information in the sliding process of the sliding table based on different motion states;
and acquiring the mean square error of the second distance information in the sliding process of the sliding table based on different motion states according to the reference curve, the first distance information and the second distance information so as to evaluate the dynamic characteristic of the thickness of the air film.
The method for analyzing the dynamic characteristics of the air film thickness can reflect the average deviation condition of the air film thickness by utilizing the mean square error obtained by calculation in the steps, so that the method can be used for evaluating the dynamic characteristics of the air film thickness to determine the stability of the air film thickness in different motion states.
In the method for analyzing the dynamic characteristics of the thickness of the air film, in the step S1, the first distance information is triggered to be acquired when the second distance information accords with a preset distance set.
In a third aspect, the application also provides an online monitoring device for the thickness of a gas film, which is applied to a driving device based on air floatation conveying, wherein the driving device comprises a sliding table which slides on a base based on driving of a linear driving assembly, and an air floatation block which is fixed on the sliding table and is used for generating the gas film between the sliding table and the base when the sliding table slides;
the two ends of the base along the sliding direction of the sliding table are respectively provided with a laser generator and an induction screen, wherein the laser generator and the induction screen are opposite to the air film;
the online monitoring device for the thickness of the air film comprises the following steps:
the acquisition module is used for acquiring first distance information and second distance information in the sliding process of the sliding table, wherein the first distance information is the distance between a first bright pattern and a central bright pattern generated by the induction screen based on diffraction of a laser generator, and the second distance information is the distance between one end, close to the induction screen, of the air film and the induction screen;
and the calculation and analysis module is used for analyzing the change condition of the thickness of the air film on line according to the first distance information and the second distance information.
The online monitoring device for the thickness of the air film can directly or indirectly analyze and judge whether the thickness of the micron-sized air film generated by the driving equipment in the operation process changes or not on the basis of the first distance information and the second distance information in the sliding process of the sliding table so as to realize accurate monitoring of the operation state of the driving equipment.
In a fourth aspect, the present application also provides an electronic device comprising a processor and a memory storing computer readable instructions which, when executed by the processor, perform the steps of the method as provided in the first or second aspects above.
In a fifth aspect, the present application also provides a computer readable storage medium having stored thereon a computer program which when executed by a processor performs the steps of the method as provided in the first or second aspect above.
From the above, the application provides an online monitoring method, a dynamic characteristic analysis method and related equipment for the thickness of the air film, wherein the online monitoring method for the thickness of the air film can directly or indirectly analyze and judge whether the thickness of the micron-sized air film generated by the driving equipment in the running process changes on the basis of the first distance information and the second distance information in the sliding process of the sliding table, so that the running state of the driving equipment is accurately monitored.
Drawings
Fig. 1 is a flowchart of an online monitoring method for a thickness of a gas film according to an embodiment of the present application.
Fig. 2 is a schematic side sectional structure of a driving device applied to the method for on-line monitoring of the thickness of a gas film according to the embodiment of the present application.
Fig. 3 is a schematic front view of a driving device used in the method for on-line monitoring the thickness of a gas film according to the embodiment of the present application.
Fig. 4 is a flowchart of a method for analyzing dynamic characteristics of a film thickness according to an embodiment of the present application.
Fig. 5 is a schematic structural diagram of an online monitoring device for thickness of an air film according to an embodiment of the present application.
Fig. 6 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
Reference numerals: 101. a linear drive assembly; 102. a base; 103. a sliding table; 104. an air floatation block; 105. a laser generator; 106. an induction screen; 301. an acquisition module; 302. a calculation and analysis module; 401. a processor; 402. a memory; 403. a communication bus.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
1-3, some embodiments of the present application provide an online monitoring method of a gas film thickness, which is applied in a driving device based on air floatation conveying, wherein the driving device includes a sliding table 103 sliding on a base 102 based on driving of a linear driving assembly 101, and an air floatation block 104 fixed on the sliding table 103 and used for generating a gas film between the sliding table 103 and the base 102 when the sliding table 103 slides;
a laser generator 105 and an induction screen 106 which are opposite to the air film are respectively arranged at two ends of the base 102 along the sliding direction of the sliding table 103;
the online monitoring method of the thickness of the air film comprises the following steps:
s1, acquiring first distance information and second distance information in the sliding process of a sliding table 103, wherein the first distance information is the distance between a first bright line and a central bright line generated by diffraction of a laser generator 105 by an induction screen 106, and the second distance information is the distance between one end of an air film, which is close to the induction screen 106, and the induction screen 106;
s2, analyzing the change condition of the thickness of the air film on line according to the first distance information and the second distance information.
Specifically, when the existing driving device based on air-floating conveying drives the sliding table 103 to slide, an air-floating bearing is generally used for generating an air film with a micron-sized thickness, so that special detection equipment is required to be used for detecting the thickness of the air film, wherein the air-floating bearing is a bearing using gas as a lubricating medium, and the main structure of the air-floating bearing generally comprises an air-floating block 104; the method for online monitoring the thickness of the air film in the embodiment of the application aims at online monitoring the change condition of the thickness of the air film by utilizing a diffraction assembly formed by the laser generator 105 and the induction screen 106 so as to online monitor the change condition of the air film generated by corresponding driving equipment in the operation process and to online monitor and analyze whether the driving equipment operates normally or not; the air bearing 104 may be a part of an air bearing for generating an air film, or may be a sliding part for providing an air film in other air sliding devices.
More specifically, the laser generator 105 is just opposite to the air film to be monitored, so that the laser emitted by the laser generator 105 diffracts after passing through the air film with the thickness of micron order to form diffraction fringes on the induction screen 106, wherein parameters such as distance between the air film and the induction screen 106, laser wavelength, air film thickness and the like all influence the distribution characteristics of the diffraction fringes, and the diffraction fringes accord with diffraction conditions according to fraunhofer and the following conditions:
（1）
wherein the method comprises the steps of，θIn order to be a diffraction angle,λfor the wavelength of the laser light,bis the thickness of the air film,kfor corresponding diffraction fringe order, e.g.kCorresponding to =1 is first bright and dark markskThe positive and negative signs of the values represent the diffraction directions).
Next, sinθThe following is also satisfied:
（2）
wherein,Las the information of the second distance,xfor the distance between the center position of the diffraction fringes of different orders and the center of the central bright fringe (hereinafter the distance between the centers of the fringes is defined as the distance between the fringes), i.ekWhen the number of the codes is =1,xfor the distance between the first bright vein and the central bright vein or the distance between the first dark vein and the central bright vein, so forkFor the bright line of =1,xis the first distance information.
Thus, based on formula (2), it is possible to:
（3）
wherein the wavelength of the laser generated by the laser generator 105 is generally about 1 micron, which corresponds to the sin generatedθThe value of (2) is also small, if the second distance information is adjustable between 0.1 and 1m for a laser with a wavelength of 0.63 μm, the film thickness is defined as 5 to 20 μm, ifkWhen=1, sinθThe value of (2) is within 0.0315-0.126, therebyFar greater than 1, so equation (3) can be simplified to:
（4）
the combination of the formulas (1) and (4) can be obtained:
（5）
（6）
based on the formulas (5) and (6), the dark fringes at each level and the distance between the bright fringes at each level and the central bright fringes generated by diffraction can be used for calculating the thickness of the air film; the first bright pattern is the most clear diffraction data except the center bright pattern, andxthe smaller the value is, the smaller the deviation caused by the simplified formula (3) is, so the online monitoring method of the air film thickness in the embodiment of the application preferably adopts the first distance information representing the position relation between the first bright line and the central bright line to monitor the air film thickness so as to improve the monitoring precision and reliability of the online monitoring method of the air film thickness in the embodiment of the application; thus, for the first bright print, the film thickness satisfies:
（7）
in the actual operation process, the laser wavelength is a fixed value, so that the online monitoring method for the air film thickness can directly calculate and acquire the air film thickness online through the first distance information and the second distance information, and the change condition of the air film thickness is analyzed according to the first distance information and the second distance information so as to monitor the air film thickness.
More specifically, the transformation is available based on equation (7):
（8）
in the formula (8), if the film thickness is not changedL/xThe method for monitoring the thickness of the air film on line in the embodiment of the application can indirectly judge whether the thickness of the air film changes on line according to the ratio of the first distance information to the second distance information or the ratio of the second distance information to the first distance information, the processing mode does not need to calculate the specific value of the thickness of the air film, but directly judges the fluctuation condition of the thickness of the air film based on the proportional relation of the related distance information,the calculation logic of the method is effectively simplified, and the calculation load of the related calculation equipment is reduced so as to improve the reaction rate of the related calculation equipment.
It should be noted that, the sensing screen 106 is an electronic sensing screen, and is electrically connected to an image processor for collecting a diffraction image formed by diffraction fringes thereon, and the image processor can analyze the diffraction image to determine the first distance information.
More specifically, the second distance information may be obtained based on camera shooting analysis or based on distance sensor measurement, or may be obtained based on encoded data analysis of an encoder that controls the operation of the linear driving assembly 101.
In the online monitoring method of the thickness of the air film, in the sliding process of the sliding table 103, the thickness of the micron-sized air film generated by the driving equipment in the running process can be directly or indirectly analyzed and judged online based on the first distance information and the second distance information, so that the running state of the driving equipment can be accurately monitored.
In some preferred embodiments, step S2 comprises:
s21, calculating the ratio of the second distance information to the first distance information;
s22, analyzing fluctuation conditions of the ratio on line to evaluate the change conditions of the thickness of the air film.
Specifically, according to the measured data (such as the combination of (4) and the corresponding sinθThe value of (2) that the second distance information is generally larger than the first distance information, the ratio of the second distance information to the first distance information is a positive value larger than 1, and the ratio can more intuitively reflect the fluctuation of the thickness of the air film.
More specifically, the fluctuation of the ratio may be an increasing value of the ratio or an increasing or decreasing ratio of the ratio with respect to a previous time or an increasing or decreasing ratio of the ratio with respect to a preset reference ratio, preferably an increasing or decreasing ratio of the ratio with respect to the preset reference ratio; the reference ratio is the ratio of the second distance information to the first distance information measured when the air film reaches the expected thickness.
More specifically, based on the formula (7)Film thicknessL/xThe ratio obtained by the calculation in the step S21 is related to the preset reference ratio, so that the ratio of the air film thickness can be directly reflected, that is, the deviation ratio of the air film thickness to the expected thickness is reflected, so that the step S22 can determine whether the air film thickness is qualified.
More specifically, in some embodiments, step S22 preferably includes:
and analyzing whether the increasing and decreasing ratio of the ratio relative to a preset reference ratio is in a preset range on line so as to judge whether the thickness of the air film is qualified.
More specifically, in this embodiment, the increasing/decreasing ratio reflects the deviation ratio of the film thickness, so that it can be directly used to determine whether the film thickness is acceptable, and the preset range can be set according to the use requirement of the driving apparatus, and in this embodiment, it is preferably-20% to 20%.
In some preferred embodiments, the method further comprises the step of performing before step S1:
s0, adjusting the position and the orientation of the laser generator 105 and the position of the sensing screen 106 so that central bright grains generated after laser emitted by the laser generator 105 passes through the air film are projected on the imaging center of the sensing screen 106, and the thickness of each bright grain and each dark grain except the central bright grains is uniform.
Specifically, as shown in fig. 3, a plurality of air films, such as air film a, b, c, d, e, are generated by the driving device in the operation process, and changing the position of the laser generator 105 can change the monitoring object of the online monitoring method of the air film thickness in the embodiment of the application, so that the sensing screen 106 needs to be matched with the position of the laser generator 105 to set so as to ensure that the diffraction fringes can be successfully received; the central bright line projected on the center of the sensing screen 106 can facilitate the image processor to analyze whether the generated image is a symmetrical (diffraction lines are mirror image distributed with the central bright line as a reference line) clear diffraction pattern to determine whether the laser generator 105 and the sensing screen 106 are in place.
More specifically, the laser generator 105 and the sensing screen 106 may be mounted on the base 102 via motorized linear guides such that the on-line monitoring method of the film thickness changes the position of the laser generator 105 and the sensing screen 106 by sending relevant adjustment information to the motorized linear guides, and in other embodiments, the position of the laser generator 105 and the sensing screen 106 may be corrected by manual adjustment.
More specifically, when the laser generator 105 adjusts the position, it needs to ensure that the laser projected by the laser generator avoids the air holes and the air guide grooves of the air bearing block 104, so as to avoid the influence of the concave structures of the air holes and the air guide grooves on the diffraction fringes.
More specifically, the laser generator 105 also needs to adjust its orientation, such as yaw and pitch angles with respect to the sensing screen 106; wherein, adjusting the yaw angle of the laser generator 105 can change the thicknesses of the bright and dark fringes of each stage of the diffraction fringe, and in the embodiment of the application, the thicknesses of the bright and dark fringes of each stage are preferably adjusted to be uniformly distributed (the sizes are the same or the gradients decrease along the directions of two sides of the central bright fringe), and the adjustment result can be determined based on the analysis of the image sensor; adjusting the pitch angle of the laser generator 105 can change the symmetry of the diffraction fringes, and in the embodiment of the present application, it is preferable to adjust each stage of bright fringes and dark fringes to mirror image distribution with the central bright fringe center line as a reference line, and the adjustment result can be determined based on image sensor analysis.
In some preferred embodiments, the gas film is a vertical gas film or a transverse gas film.
Specifically, as shown in fig. 3, an air film a, b, c, d, e is generated between the air floatation block 104 of the driving device and the base 102, wherein the air films a and c are transverse air films, the air films b, d and e are vertical air films, and the thicknesses of the transverse air films are related to each other, so that the on-line monitoring method of the air film thickness in the embodiment of the application can determine the change condition of the thickness of other transverse air films by monitoring the change condition of the thickness of one transverse air film on line, and in the same way, the on-line monitoring method of the air film thickness in the embodiment of the application can determine the change condition of the thickness of other vertical air films by monitoring the change condition of the thickness of one vertical air film on line; the change conditions of the transverse air film and the vertical air film are not relevant, so in some embodiments, the online monitoring method of the air film thickness in the embodiment of the application carries out online monitoring on the transverse air film and the vertical air film at the same time.
More specifically, the thickness of the horizontal air film reflects the displacement of the slide table 103 in the vertical direction, and the thickness of the vertical air film reflects the displacement of the slide table 103 in the horizontal direction.
In a second aspect, referring to fig. 4, some embodiments of the present application further provide a method for analyzing dynamic characteristics of a gas film thickness, which is applied to a driving device based on air-floating conveying, where the driving device includes a sliding table 103 sliding on a base 102 based on driving of a linear driving assembly 101, and an air-floating block 104 fixed on the sliding table 103 and used for generating a gas film between the sliding table 103 and the base 102 when the sliding table slides;
a laser generator 105 and an induction screen 106 which are opposite to the air film are respectively arranged at two ends of the base 102 along the sliding direction of the sliding table 103;
the method for analyzing the dynamic characteristics of the thickness of the air film comprises the following steps:
a1, acquiring first distance information and second distance information in the sliding process of the sliding table 103 based on different motion states, wherein the first distance information is the distance between a first bright line and a central bright line generated by diffraction of the laser generator 105 by the induction screen 106, and the second distance information is the distance between one end of the air film close to the induction screen 106 and the induction screen 106;
a2, analyzing the change condition of the air film thickness in the sliding process of the sliding table 103 based on different motion states according to the first distance information and the second distance information so as to determine the dynamic characteristic of the air film thickness in the sliding process of the sliding table 103 based on different motion states.
Specifically, the different motion states comprise variable speed motion and uniform speed motion, wherein the uniform speed motion comprises uniform speed motion in different speed states, and the variable speed motion comprises variable speed motion with fixed acceleration and variable speed motion with variable acceleration, such as uniform acceleration motion, uniform deceleration motion, variable acceleration motion and the like; the dynamic characteristic is the variation characteristic of the thickness of the air film of the driving equipment under the different motion states, and can be the maximum deviation value of the thickness, the deviation curve of the thickness, the variation curve of the thickness and the variation curve of the thicknessL/xWith respect toLA change curve of (c) and the like.
More specifically, based on the foregoing, the specific value of the thickness of the air outlet film can be directly calculated by combining the first distance information and the second distance information to represent the variation situation of the thickness of the air film, and the variation situation of the thickness of the air film can also be indirectly represented by the ratio of the second distance information to the first distance information.
More specifically, the object moving at high speed can generate negative pressure for air, and the air film thickness generated by the sliding table 103 in different movement states may be different.
In the method for analyzing the dynamic characteristics of the air film thickness, in the sliding process of the sliding table 103 based on different motion states, the dynamic characteristics of the air film thickness can be directly or indirectly analyzed on line based on the first distance information and the second distance information so as to judge the change condition of the air film thickness in different motion states, and therefore the dynamic characteristics of the air film thickness changing along with the factors such as position, speed, acceleration and the like are determined.
In some preferred embodiments, step A2 comprises:
a21, acquiring a reference curve according to the first distance information and the second distance information, wherein the reference curve is a fitting curve of the second distance information about the change of the first distance information in the sliding process of the sliding table 103 based on different motion states;
a22, acquiring the mean square error of the second distance information in the sliding process of the sliding table 103 based on different motion states according to the reference curve, the first distance information and the second distance information so as to evaluate the dynamic characteristics of the air film thickness.
Specifically, the dynamic characteristic analysis method of the air film thickness in the embodiment of the application is used for analyzing and evaluating the motion characteristics of the air film thickness in different motion states, so that independent analysis is preferably performed according to the first distance information and the second distance information generated in each type of motion state, and therefore, a reference curve is drawn by using the step A21 according to the first distance information and the second distance information generated in the corresponding motion state to preliminarily confirm the change characteristic of the second distance information about the first distance information in the corresponding motion state; based on formula (8), under the condition that the thickness of the air film is unchanged, the second distance information and the first distance information are in a proportional relation, but in the actual motion process, the thickness of the air film can generate certain fluctuation, so that the reference curve is similar to a linear function (in some real-time modes, the reference curve can be determined as the linear function), meanwhile, the deviation condition of the thickness of the air film can be reflected by the difference value between the actual value of the second distance information and the fitting function, so that the average deviation condition of the thickness of the air film can be reflected by the mean square error obtained by calculating in the step A22, and the dynamic characteristic of the thickness of the air film can be evaluated to determine the stability of the thickness of the air film under different motion states.
More specifically, step a21 may be to draw a corresponding reference curve based on each motion state, calculate a mean square error using step a22 to evaluate the dynamic characteristics of the air film thickness in each motion state, and draw a corresponding reference curve based on each complete linear motion process, and calculate a mean square error using step a22 to evaluate the dynamic characteristics of the air film thickness in each motion process.
More specifically, in this embodiment, step A1 is to intermittently acquire the first distance information and the second distance information, so that step a21 draws a scatter diagram of the second distance information with respect to the change of the first distance information from the first distance information and the second distance information, and then draws an acquisition reference curve based on the scatter diagram.
More specifically, step a21 may obtain the reference curve based on the least square method, or may determine the reference curve based on an optimized mean square error, and in the embodiment of the present application, the latter is preferable, and the determination process is as follows:
setting a reference curve as p #x) The mean square error is:
（9）
wherein,in the form of a mean square error,iis the firstiThe scattered point data;
minimization ofThe reference curve p can be determinedx）。
More specifically, after determining the reference curve, observation is performedThe value of (2) can determine the dynamic characteristic of the film thickness in the motion state, < >>Smaller values indicate smaller fluctuations in film thickness, indicating that film thickness is more stable in this motion state.
In some preferred embodiments, in step A1, the first distance information is acquired by triggering when the second distance information corresponds to a preset distance set.
Specifically, the first distance information is triggered to be acquired based on the second distance information, so that high matching accuracy of the two data can be ensured, and the reference curve drawn in the step A21 can be more reliable.
More specifically, the method for analyzing the dynamic characteristics of the thickness of the air film continuously acquires the second distance information, records the second distance information when the second distance information accords with a preset distance set, and triggers the acquisition of the first distance information.
More specifically, the preset distance set is preferably a set formed by an arithmetic progression, so that the method for analyzing the dynamic characteristics of the air film thickness in the embodiment of the application can acquire the first distance information and the second distance information at equal intervals, so as to draw a scatter diagram with the characteristic of transverse uniform distribution, and ensure that a drawn reference curve is accurately available.
In a third aspect, referring to fig. 5, some embodiments of the present application further provide an online monitoring device for a thickness of a gas film, which is applied to a driving device based on air-floating conveying, where the driving device includes a sliding table 103 sliding on a base 102 based on driving of a linear driving assembly 101, and an air-floating block 104 fixed on the sliding table 103 and used for generating the gas film between the sliding table 103 and the base 102 when the sliding table slides;
a laser generator 105 and an induction screen 106 which are opposite to the air film are respectively arranged at two ends of the base 102 along the sliding direction of the sliding table 103;
the on-line monitoring device for the thickness of the air film comprises the following steps:
the acquisition module 301 is configured to acquire first distance information and second distance information during a sliding process of the sliding table 103, where the first distance information is a distance between a first bright grain and a central bright grain generated by diffraction of the laser generator 105 by the induction screen 106, and the second distance information is a distance between one end of the air film, which is close to the induction screen 106, and the induction screen 106;
the calculation and analysis module 302 is configured to analyze the change condition of the air film thickness on line according to the first distance information and the second distance information.
In the sliding process of the sliding table 103, the on-line monitoring device for the thickness of the air film can directly or indirectly analyze and judge whether the thickness of the micron-sized air film generated by the driving equipment in the running process changes on line based on the first distance information and the second distance information, so that the running state of the driving equipment is accurately monitored.
In some preferred embodiments, the online monitoring device for the thickness of the air film according to the embodiments of the present application is used to perform the online monitoring method for the thickness of the air film provided in the first aspect.
In a fourth aspect, referring to fig. 6, some embodiments of the present application further provide a schematic structural diagram of an electronic device, where the electronic device includes: a processor 401 and a memory 402, the processor 401 and the memory 402 being interconnected and in communication with each other by a communication bus 403 and/or other form of connection mechanism (not shown), the memory 402 storing computer readable instructions executable by the processor 401, which when executed by an electronic device, the processor 401 executes to perform the method in any of the alternative implementations of the embodiments described above.
In a fifth aspect, embodiments of the present application provide a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, performs a method in any of the alternative implementations of the embodiments described above. The computer readable storage medium may be implemented by any type or combination of volatile or non-volatile Memory devices, such as static random access Memory (Static Random Access Memory, SRAM), electrically erasable Programmable Read-Only Memory (EEPROM), erasable Programmable Read-Only Memory (Erasable Programmable Read Only Memory, EPROM), programmable Read-Only Memory (PROM), read-Only Memory (ROM), magnetic Memory, flash Memory, magnetic disk, or optical disk.
In summary, the embodiment of the application provides an online monitoring method, a dynamic characteristic analysis method and related equipment for air film thickness, wherein the online monitoring method for air film thickness can directly or indirectly analyze and judge whether the thickness of a micron-sized air film generated by driving equipment in the running process changes on the basis of first distance information and second distance information in the sliding process of a sliding table 103 so as to realize accurate monitoring of the running state of the driving equipment.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
Further, the units described as separate units may or may not be physically separate, and units displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
Furthermore, functional modules in various embodiments of the present application may be integrated together to form a single portion, or each module may exist alone, or two or more modules may be integrated to form a single portion.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The foregoing is merely exemplary embodiments of the present application and is not intended to limit the scope of the present application, and various modifications and variations may be suggested to one skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims (5)
1. The on-line monitoring method of the thickness of the air film is applied to driving equipment based on air floatation conveying, and is characterized in that the driving equipment comprises a sliding table which slides on a base based on driving of a linear driving assembly and an air floatation block which is fixed on the sliding table and is used for generating the air film between the sliding table and the base when the sliding table slides, and the air film is a vertical air film or a horizontal air film;
the two ends of the base along the sliding direction of the sliding table are respectively provided with a laser generator and an induction screen, wherein the laser generator and the induction screen are opposite to the air film;
the online monitoring method of the thickness of the air film comprises the following steps:
s0, adjusting the position and the orientation of the laser generator and the position of the induction screen so that central bright patterns generated after laser emitted by the laser generator passes through the air film are projected on an imaging center of the induction screen, and the thickness of each bright pattern and each dark pattern except the central bright patterns is uniform;
s1, acquiring first distance information and second distance information in the sliding process of the sliding table, wherein the first distance information is the distance between a first bright line and a central bright line generated by the induction screen based on diffraction of a laser generator, and the second distance information is the distance between one end, close to the induction screen, of the air film and the induction screen;
s2, analyzing the change condition of the thickness of the air film on line according to the first distance information and the second distance information;
the step S2 comprises the following steps:
calculating the ratio of the second distance information to the first distance information;
and analyzing the fluctuation condition of the ratio on line to evaluate the change condition of the thickness of the air film.
2. The dynamic characteristic analysis method of the thickness of the air film is applied to driving equipment based on air floatation conveying, and is characterized in that the driving equipment comprises a sliding table which slides on a base based on driving of a linear driving assembly and an air floatation block which is fixed on the sliding table and is used for generating the air film between the sliding table and the base when the sliding table slides;
the two ends of the base along the sliding direction of the sliding table are respectively provided with a laser generator and an induction screen, wherein the laser generator and the induction screen are opposite to the air film;
the method for analyzing the dynamic characteristics of the thickness of the air film comprises the following steps:
a1, acquiring first distance information and second distance information in a sliding process of the sliding table based on different motion states, wherein the first distance information is the distance between a first bright line and a central bright line generated by the induction screen based on diffraction of a laser generator, the second distance information is the distance between one end, close to the induction screen, of the air film and the induction screen, and the first distance information is acquired by triggering when the second distance information accords with a preset distance set;
a2, analyzing the change condition of the air film thickness in the sliding process of the sliding table based on different motion states according to the first distance information and the second distance information so as to determine the dynamic characteristic of the air film thickness in the sliding process of the sliding table based on different motion states;
the step A2 comprises the following steps:
acquiring a reference curve according to the first distance information and the second distance information, wherein the reference curve is a fitting curve of the second distance information about the change of the first distance information in the sliding process of the sliding table based on different motion states;
and acquiring the mean square error of the second distance information in the sliding process of the sliding table based on different motion states according to the reference curve, the first distance information and the second distance information so as to evaluate the dynamic characteristic of the thickness of the air film.
3. An on-line monitoring device for the thickness of an air film, which is applied to driving equipment based on air floatation conveying, is characterized in that the on-line monitoring device for the thickness of the air film is used for executing the on-line monitoring method for the thickness of the air film according to claim 1; the driving device comprises a sliding table which slides on the base based on the driving of the linear driving assembly, and an air floating block which is fixed on the sliding table and is used for generating an air film between the sliding table and the base when the sliding table slides;
the two ends of the base along the sliding direction of the sliding table are respectively provided with a laser generator and an induction screen, wherein the laser generator and the induction screen are opposite to the air film;
the on-line monitoring device of air film thickness includes:
the acquisition module is used for acquiring first distance information and second distance information in the sliding process of the sliding table, wherein the first distance information is the distance between a first bright pattern and a central bright pattern generated by the induction screen based on diffraction of a laser generator, and the second distance information is the distance between one end, close to the induction screen, of the air film and the induction screen;
the calculation and analysis module is used for analyzing the change condition of the thickness of the air film on line according to the first distance information and the second distance information;
the step of analyzing the change condition of the air film thickness on line according to the first distance information and the second distance information comprises the following steps:
and acquiring a reference curve according to the first distance information and the second distance information, wherein the reference curve is a fitting curve of the second distance information about the change of the first distance information in the sliding process of the sliding table based on different motion states.
4. An electronic device comprising a processor and a memory storing computer readable instructions which, when executed by the processor, perform the steps in the method of claim 1 or 2.
5. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, performs the steps of the method according to claim 1 or 2.
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| WO2015139340A1 (en) * | 2014-03-18 | 2015-09-24 | 华中科技大学 | Active gas suspension support device |
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