CN117067125A - A multi-mesh laminated thinning grinding wheel and its preparation method - Google Patents

Abstract

This application discloses a multi-mesh laminated thinning grinding wheel and a preparation method thereof. The multi-mesh laminated thinning grinding wheel includes: a base and grinding wheel teeth arranged on the base. The grinding wheel teeth at least include first grinding wheels stacked in sequence. The tooth layer and the second grit tooth layer, the mesh number of the grit teeth of the first grit tooth layer is smaller than the mesh number of the grit teeth of the second grit tooth layer; multiple first grit tooth layers and the second grit tooth layer form at least one set of grinding groups Combination; the grinding group combination includes a first grit tooth layer and a second grit tooth layer, and the first grit tooth layer of the grinding group combination is located on the side away from the base. By forming two or more grit layers on the grinding wheel teeth, at least two processes of rough grinding, semi-rough grinding or fine grinding can be completed on the same thinning shaft, thus avoiding the need for purchasing Multiple equipment or a single complex equipment can complete the two thinning processes, which can reduce equipment purchase costs in actual production.

Description

A multi-mesh laminated thinning grinding wheel and its preparation method

Technical field

The invention relates to the technical field of grinding wheel thinning technology, and in particular to a multi-mesh laminated thinning grinding wheel and a preparation method thereof.

Background technique

The grinding wheel thinning process in semiconductor wafer manufacturing has the advantages of fast material removal and small total thickness variation (TTV) of the processed product, and is widely used in the fields of semiconductor substrate and chip manufacturing. In the grinding wheel thinning process, in order to improve the processing efficiency and obtain a surface with smaller roughness, grinding wheels with two mesh sizes are usually installed on two thinning spindles to perform two processes: rough thinning and fine thinning. Due to the small mesh number of the grinding wheel, rough thinning can achieve the effect of quickly removing material and thinning, but the roughness of the processed surface is large, and it is necessary to further use a grinding wheel with a larger mesh number for fine thinning to obtain a smaller roughness. Only after processing the surface can subsequent processes be carried out.

The two thinning spindles equipped with grinding wheels of two thicknesses can be installed on two thinning machines respectively, or they can be integrated on the same equipment; the former will increase the number of equipment, and the latter will make the equipment more complex. Both All will make the cost of equipment higher.

Contents of the invention

In view of the above problems, the present invention overcomes at least one of them and proposes a multi-mesh laminated thinning grinding wheel and a preparation method thereof.

The technical solutions adopted by the present invention are as follows:

The present application provides a multi-mesh laminated thinning grinding wheel, including: a base and grinding wheel teeth arranged on the base. The grinding wheel teeth at least include a first grinding tooth layer and a second grinding tooth layer that are stacked in sequence. , the mesh number of the sand teeth of the first sand tooth layer is smaller than the mesh number of the sand teeth of the second sand tooth layer;

A plurality of the first grit tooth layers and the second grit tooth layer form at least one grinding group combination;

The grinding group assembly includes a first sand tooth layer and a second sand tooth layer, and the first sand tooth layer of the grinding group assembly is located on a side away from the base.

By forming two or more grit tooth layers on the grinding wheel teeth, after the first grit tooth layer or the second grit tooth layer is ground away, the third grit tooth layer below the first grit tooth layer can continue to be used. The second grit tooth layer or the first grit tooth layer below the second grit tooth layer is ground and circulated in sequence, so that at least two processes of rough grinding, semi-rough grinding or fine grinding can be completed on the same thinning shaft, which avoids Instead of purchasing multiple pieces of equipment or a single piece of complex equipment to complete the two thinning processes, the equipment purchase cost can be reduced in actual production.

Further, the mesh number of the first sand tooth layer is 400#~2000#, and the mesh number of the second sand tooth layer is 3000#~30000#.

The first grit layer has a smaller mesh size and is used for rough grinding of the wafers waiting to be processed. The second grit layer has a larger mesh size and is used for fine grinding or fine grinding of the wafers waiting to be processed. Grinding process.

Further, the thickness of the material to be processed that needs to be removed by rough grinding is D1, the wear ratio of the first grit layer is F1, and the tooth thickness of the first grit layer is T1=D1×F1.

Further, the thickness of the material to be processed that needs to be removed by fine grinding is D2, the wear ratio of the second grit layer is F2, and the tooth thickness of the second grit layer is T2=D2×F2.

Further, the thickness of the material to be processed that needs to be removed by fine grinding is D2, the wear ratio of the second sand tooth layer is F2, and the tooth thickness of the second sand tooth layer is T2=D2×F2+D2×F2× (3%~8%).

In actual use, adding a tooth thickness of 3% to 8% to the second sand tooth layer can avoid the adverse effects of the first sand tooth layer on the roughness degradation of the surface of the finished material and protect the precision. The function of grinding the surface.

Further, the grinding wheel teeth further include a third grinding tooth layer, the third grinding tooth layer is provided between the first grinding tooth layer and the second grinding tooth layer, and the grinding teeth of the third grinding tooth layer The mesh number is greater than the mesh number of the first sand tooth layer and smaller than the mesh number of the second sand tooth layer.

The grit number of the third grit layer is between the grit number of the first grit layer and the second grit layer, and can be used for the semi-rough grinding process of the wafer to be processed.

Further, the mesh number of the third sand tooth layer is 2001#～2999#.

Further, the grinding gear teeth are bonded to the base.

Further, the base includes a truncated cone mounting surface, and the grinding wheel teeth are bonded to the truncated cone mounting surface;

The multi-mesh laminated thinning grinding wheel includes a plurality of grinding wheel teeth, and the plurality of grinding wheel teeth are arranged at circular intervals along the outer periphery of the truncated cone mounting surface.

Furthermore, the corresponding tooth layers of the same type in each of the grinding wheel teeth have the same position and height relative to the truncated cone mounting surface.

That is, in actual use, a plurality of the grinding wheel teeth have the same type of tooth layer, and the tooth layer of the same type has the same thickness, and the same type of tooth layer has the same position height relative to the truncated cone mounting surface.

This application also provides a method for preparing a multi-mesh laminated thinning grinding wheel, which includes the following steps:

Provide a first abrasive, a second abrasive, a bonding agent and a filler, mix the first abrasive with the bonding agent and the filler to form a first mixture, mix the second abrasive with the bonding agent and the filler The fillers are mixed to form a second mixture; the mesh number of the first abrasive is smaller than the mesh number of the second abrasive;

Put the first mixture into a mold and perform one-time molding to form a first sand tooth layer;

The second mixed material is put into the mold formed with the first sand tooth layer for secondary molding, and a second sand tooth layer is formed on the first sand tooth layer, and the second sand tooth layer and The first sand tooth layers are combined to form a tooth blank;

Put the tooth blank into a sintering furnace for sintering to form grinding wheel teeth;

A base is provided, and grinding wheel teeth are fixed on the base to form a multi-mesh laminated thinning grinding wheel, and the first grinding tooth layer is arranged on a side away from the base.

The grinding teeth of the multi-mesh laminated thinning grinding wheel prepared by the method of the present invention are complete grinding teeth formed by laminating two mesh numbers. The multi-mesh laminated thinning grinding wheel prepared by the method of the present invention can be used in In the process of thinning, thinning grinding wheels with different mesh numbers are required.

Further, before placing the tooth blank into a sintering furnace for sintering, it also includes repeating at least once the placing of the first mixed material into a mold for molding to form a first sand tooth layer and the step of placing the first mixed material into a mold. The step of placing the second mixed material into a mold on which the first sand tooth layer is formed and performing secondary molding to form a second sand tooth layer on the first sand tooth layer;

After fixing the grinding wheel teeth on the base to form a multi-mesh laminated thinning grinding wheel, it also includes performing a dynamic balancing debugging operation on the multi-mesh laminated thinning grinding wheel.

Further, when forming the first mixture and forming the second mixture, it also includes adding pigments of different colors to the first mixture and the second mixture respectively, so that the tooth layers of different mesh types can be clearly observed during use. .

Further, the mesh number of the first abrasive is 400#~2000#, and the mesh number of the second abrasive is 3000#~30000#;

The thickness of the material to be processed that needs to be removed by rough grinding is D1, the wear ratio of the first grit layer is F1, and the tooth thickness of the first grit layer is T1 = D1 × F1;

The thickness of the material to be processed that needs to be removed by fine grinding is D2, the wear ratio of the second sand tooth layer is F2, the tooth thickness of the second sand tooth layer T2=D2×F2, or the second sand tooth layer is The tooth thickness of the tooth layer is T2=D2×F2+D2×F2×(3%~8%);

The base includes a truncated cone mounting surface, and the grinding gear teeth are bonded to the truncated cone mounting surface;

The grinding wheel teeth include a plurality of grinding wheel teeth, and the plurality of grinding wheel teeth are arranged at circular intervals along the outer periphery of the truncated cone mounting surface. The plurality of grinding wheel teeth have the same type of tooth layer, and the tooth layer of the same type has the same thickness, and the same type of tooth layer has the same position height relative to the truncated cone mounting surface.

The beneficial effects of the present invention are:

(1) By forming two or more grit tooth layers on the grinding wheel teeth, when the first grit tooth layer or the second grit tooth layer is ground away, the first grit tooth layer can continue to be used. The lower second grit layer or the first grit layer below the second grit layer is ground and circulated in sequence, so that at least two of rough grinding, semi-rough grinding or fine grinding can be completed on the same thinning shaft. process, avoiding the purchase of multiple pieces of equipment or a single complex piece of equipment to complete two thinning processes, which can reduce equipment purchase costs in actual production.

(2) Adding a tooth thickness of 3% to 8% to the second grit layer can prevent the first grit layer from adversely affecting the roughness degradation of the finished material surface and protect the fine grinding surface effect.

(3) The multi-mesh laminated thinning grinding wheel prepared by the method of the present invention has a complete grinding tooth formed by laminating two mesh numbers. The multi-mesh laminated thinning grinding wheel prepared by the method of the present invention It can be used in processes that require thinning grinding wheels with different mesh sizes.

Description of the drawings

Figure 1 is a schematic structural diagram of the shaft side of a multi-mesh laminated thinning grinding wheel according to an embodiment of the present invention;

Figure 2 is a partial structural schematic diagram of a multi-mesh laminated thinning grinding wheel according to an embodiment of the present invention;

Figure 3 is a schematic diagram of the preparation and molding process of a multi-mesh laminated thinning grinding wheel according to an embodiment of the present invention.

Each reference number in the figure is:

100. Base; 110. Grinding wheel teeth; 111. First grinding tooth layer; 112. Second grinding tooth layer.

Detailed ways

The present invention will be described in detail below with reference to the accompanying drawings.

As shown in Figures 1 and 2, the present application provides a multi-mesh laminated thinning grinding wheel, including: a base 100 and grinding wheel teeth 110 provided on the base 100. The grinding wheel teeth 110 at least include first and second teeth that are stacked in sequence. The sand tooth layer 111 and the second sand tooth layer 112, the sand tooth mesh number of the first sand tooth layer 111 is smaller than the sand tooth mesh number of the second sand tooth layer 112;

A plurality of first grit tooth layers 111 and second grit tooth layers 112 form at least one grinding group combination;

The grinding group assembly includes a first sand tooth layer 111 and a second sand tooth layer 112 , and the first sand tooth layer 111 of the grinding group assembly is located on the side away from the base 100 .

By forming two or more grit layers on the grinding wheel teeth 110 , after the first grit layer 111 or the second grit layer 112 is ground out, the first grit layer can continue to be used. The second grit layer 112 below the second grit layer 111 or the first grit layer 111 below the second grit layer 112 is ground and circulated in sequence, so that rough grinding, semi-rough grinding or fine grinding can be completed on the same thinning shaft. At least two processes are used, which avoids the purchase of multiple pieces of equipment or a single complex piece of equipment to complete two thinning processes, which can reduce equipment purchase costs in actual production.

In this embodiment, the mesh number of the first grit layer 111 is 1000#, and the mesh number of the second grit layer 112 is 10000#.

The first grit layer 111 has a smaller mesh size and is used for rough grinding of wafers waiting to be processed. The second grit layer 112 has a larger mesh size and is used for fine grinding of wafers waiting to be processed. Or fine grinding process.

In this embodiment, the thickness D1 of the material to be processed that needs to be removed by rough grinding is 80 μm, the wear ratio F1 of the first grit layer 111 is 1, and the tooth thickness of the first grit layer 111 is T1 = D1 × F1 = 80 μm. .

In other embodiments, the thickness of the material to be processed that needs to be removed by fine grinding is D2, the wear ratio of the second grit layer 112 is F2, and the tooth thickness of the second grit layer 112 is T2=D2×F2.

In this embodiment, the thickness D2 of the material to be processed that needs to be removed by fine grinding is 20 μm, the wear ratio F2 of the second grit layer 112 is 0.2, and the tooth thickness of the second grit layer 112 is T2 = D2 × F2 + D2×F2×5%=4.2μm.

In actual use, adding a tooth thickness of 5% to the second grit layer 112 can prevent the first grit layer 111 from adverse effects such as roughness degradation on the surface of the finished finely ground material, thereby protecting the finely ground surface. effect.

In other embodiments, the grinding wheel teeth 110 further include a third grit layer. The third grit layer is disposed between the first grit layer 111 and the second grit layer 112 . The mesh number of the third grit layer is The mesh number of the sand teeth is greater than that of the first sand tooth layer 111 and smaller than the mesh number of the sand teeth of the second sand tooth layer 112 .

The grit number of the third grit layer is between the grit number of the first grit layer 111 and the second grit layer 112 , and can be used for semi-rough grinding process of the wafer to be processed.

In this embodiment, the base 100 includes a circular cone mounting surface, and the grinding wheel teeth 110 are bonded on the circular cone mounting surface;

The multi-mesh laminated thinning grinding wheel includes a plurality of grinding wheel teeth 110, and the plurality of grinding wheel teeth 110 are arranged at circular intervals along the outer periphery of the truncated cone mounting surface.

In actual use, the plurality of grinding wheel teeth 110 have the same type of tooth layer, and the tooth layer of the same type has the same thickness, and the same type of tooth layer has the same position height relative to the truncated cone mounting surface.

In this embodiment, the base 100 is made of aluminum alloy.

As shown in Figure 3, this application also provides a method for preparing a multi-mesh laminated thinning grinding wheel, which includes the following steps:

Provide a first abrasive, a second abrasive, a bonding agent and a filler, mix the first abrasive with the bonding agent and the filler to form a first mixture, mix the second abrasive with the bonding agent and the filler to form a second mixture; The mesh number is smaller than the mesh number of the second abrasive;

Put the first mixed material into the mold and perform one-time molding to form the first sand tooth layer 111;

Put the second mixed material into the mold formed with the first sand tooth layer 111 and perform secondary molding to form a second sand tooth layer 112 on the first sand tooth layer 111. The second sand tooth layer 112 is in contact with the first sand tooth layer 111. Layers 111 combine to form a tooth blank;

Put the tooth blank into a sintering furnace for sintering to form grinding wheel teeth 110;

A base 100 is provided, and the grinding wheel teeth 110 are fixed on the base 100 to form a multi-mesh laminated thinning grinding wheel. The first grinding tooth layer 111 is provided on the side close to the base 100 .

The grinding teeth of the multi-mesh laminated thinning grinding wheel prepared by the method of the present invention are complete grinding teeth formed by laminating two mesh numbers. The multi-mesh laminated thinning grinding wheel prepared by the method of the present invention can be used in In the process of thinning, thinning grinding wheels with different mesh numbers are required.

In this embodiment, before placing the tooth blank into the sintering furnace for sintering, it also includes repeating at least once the first mixed material into the mold for molding to form the first sand tooth layer 111 and placing the second mixed material into the mold. The step of performing secondary molding in the mold on which the first sand tooth layer 111 is formed to form the second sand tooth layer 112 on the first sand tooth layer 111;

After the grinding wheel teeth 110 are fixed on the base 100 to form a multi-mesh laminated thinning grinding wheel, the dynamic balancing debugging operation of the multi-mesh laminated thinning grinding wheel is also included.

In this embodiment, when forming the first mixture and forming the second mixture, it also includes adding pigments of different colors to the first mixture and the second mixture respectively, so that different mesh types can be clearly observed during use. of tooth layer.

In this embodiment, the mesh number of the first abrasive is 1000#, and the mesh number of the second abrasive is 10000#;

The thickness D1 of the material to be processed that needs to be removed by rough grinding is 80 μm, the wear ratio F1 of the first grit layer 111 is 1, and the tooth thickness of the first grit layer 111 is T1 = D1 × F1 = 80 μm;

The thickness D2 of the material to be processed that needs to be removed by fine grinding is 20 μm. The wear ratio of the second grit layer 112 is F2, which is 0.2. The tooth thickness of the second grit layer 112 is T2 = D2 × F2 + D2 × F2 × 5%. =4.2μm;

The base 100 includes a circular cone mounting surface, and the grinding wheel teeth 110 are bonded to the circular cone mounting surface;

The grinding wheel teeth 110 include a plurality of grinding wheel teeth 110, and the plurality of grinding wheel teeth 110 are arranged at circular intervals along the outer periphery of the truncated cone mounting surface. The plurality of grinding wheel teeth 110 have the same type of tooth layer, and the tooth layer of the same type has the same thickness, and the same type of tooth layer has the same position height relative to the truncated cone mounting surface.

The above are only preferred embodiments of the present invention, which do not limit the scope of patent protection of the present invention. Any equivalent structural transformation made by using the contents of the description and drawings of the present invention can be directly or indirectly used in other related technical fields. All are similarly included in the protection scope of the present invention.

Claims (10)

1. A multi-mesh laminated thinning grinding wheel, characterized in that it includes: a base and grinding wheel teeth arranged on the base. The grinding wheel teeth at least include a first grinding tooth layer and a second grinding tooth layer that are stacked in sequence. A sand tooth layer, the grit mesh number of the first sand tooth layer is smaller than the sand tooth mesh number of the second sand tooth layer; A plurality of the first grit tooth layers and the second grit tooth layer form at least one grinding group combination; The grinding group assembly includes a layer of first grit teeth and a layer of second grit teeth, and the first grit layer of the grinding group assembly is located on the side away from the base; The thickness of the material to be processed that needs to be removed by rough grinding is D1, the wear ratio of the first grit layer is F1, and the tooth thickness of the first grit layer is T1 = D1 × F1; The thickness of the material to be processed that needs to be removed by fine grinding is D2, the wear ratio of the second grit layer is F2, the tooth thickness of the second grit layer is T2=D2×F2, or the second The tooth thickness of the sand tooth layer is T2=D2×F2+D2×F2×(3%～8%). 2. A multi-mesh laminated thinning grinding wheel as claimed in claim 1, characterized in that the mesh number of the first grit layer is 400#~2000#, and the mesh number of the second grit layer is It is 3000#～30000#. 3. A multi-mesh laminated thinning grinding wheel according to claim 1, characterized in that the grinding wheel teeth further include a third grinding tooth layer, and the third grinding tooth layer is arranged on the first grinding tooth. Between the third sand tooth layer and the second sand tooth layer, the sand tooth mesh number of the third sand tooth layer is greater than the sand tooth mesh number of the first sand tooth layer and smaller than the sand tooth mesh number of the second sand tooth layer. 4. A multi-mesh laminated thinning grinding wheel according to claim 3, characterized in that the mesh number of the third grit layer is 2001#~2999#. 5. A multi-mesh laminated thinning grinding wheel according to claim 1, characterized in that the grinding wheel teeth are bonded to the base. 6. A multi-mesh laminated thinning grinding wheel according to claim 1, characterized in that the base includes a truncated cone mounting surface, and the grinding wheel teeth are bonded to the truncated cone mounting surface; The multi-mesh laminated thinning grinding wheel includes a plurality of grinding wheel teeth, and the plurality of grinding wheel teeth are arranged at circular intervals along the outer periphery of the truncated cone mounting surface. 7. A multi-mesh laminated thinning grinding wheel according to claim 6, characterized in that the corresponding tooth layers of the same type in each of the grinding wheel teeth have the same position and height relative to the truncated cone mounting surface. 8. A method for preparing a multi-mesh laminated thinning grinding wheel, which is characterized in that it includes the following steps: Provide a first abrasive, a second abrasive, a bonding agent and a filler, mix the first abrasive with the bonding agent and the filler to form a first mixture, mix the second abrasive with the bonding agent and the filler The fillers are mixed to form a second mixture; the mesh number of the first abrasive is smaller than the mesh number of the second abrasive; Put the first mixture into a mold and perform one-time molding to form a first sand tooth layer; The second mixed material is put into the mold formed with the first sand tooth layer for secondary molding, and a second sand tooth layer is formed on the first sand tooth layer, and the second sand tooth layer and The first sand tooth layers are combined to form a tooth blank; Put the tooth blank into a sintering furnace for sintering to form grinding wheel teeth; A base is provided, and grinding wheel teeth are fixed on the base to form a multi-mesh laminated thinning grinding wheel, and the first grinding tooth layer is arranged on a side away from the base. 9. The method for preparing a multi-mesh laminated thinning grinding wheel according to claim 8, characterized in that before placing the tooth blank into a sintering furnace for sintering treatment, it further includes repeating the step of placing the tooth blank at least once. The first mixed material is put into the mold for primary molding to form a first sand tooth layer and the second mixed material is put into the mold formed with the first sand tooth layer for secondary molding. The step of forming a second sand tooth layer on the first sand tooth layer; After fixing the grinding wheel teeth on the base to form a multi-mesh laminated thinning grinding wheel, it also includes performing a dynamic balancing debugging operation on the multi-mesh laminated thinning grinding wheel. 10. A method for preparing a multi-mesh laminated thinning grinding wheel as claimed in claim 8, characterized in that the mesh number of the first abrasive is 400#~2000#, and the mesh number of the second abrasive is 3000#~30000#; The thickness of the material to be processed that needs to be removed by rough grinding is D1, the wear ratio of the first grit layer is F1, and the tooth thickness of the first grit layer is T1 = D1 × F1; The thickness of the material to be processed that needs to be removed by fine grinding is D2, the wear ratio of the second sand tooth layer is F2, the tooth thickness of the second sand tooth layer T2=D2×F2, or the second sand tooth layer is The tooth thickness of the tooth layer is T2=D2×F2+D2×F2×(3%~8%); The base includes a truncated cone mounting surface, and the grinding gear teeth are bonded to the truncated cone mounting surface; The grinding wheel teeth include a plurality of grinding wheel teeth, and the plurality of grinding wheel teeth are arranged at circular intervals along the outer periphery of the truncated cone mounting surface.